CN104619644A - Apparatus for preparing germane gas, and method for preparing mono-germane gas by using same - Google Patents

Apparatus for preparing germane gas, and method for preparing mono-germane gas by using same Download PDF

Info

Publication number
CN104619644A
CN104619644A CN201380043627.9A CN201380043627A CN104619644A CN 104619644 A CN104619644 A CN 104619644A CN 201380043627 A CN201380043627 A CN 201380043627A CN 104619644 A CN104619644 A CN 104619644A
Authority
CN
China
Prior art keywords
channel
germane gas
aqueous solution
reaction
metal block
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
CN201380043627.9A
Other languages
Chinese (zh)
Other versions
CN104619644B (en
Inventor
李太熙
李源镐
权炳宽
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
SK Materials Co Ltd
Original Assignee
OCI Materials Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by OCI Materials Co Ltd filed Critical OCI Materials Co Ltd
Publication of CN104619644A publication Critical patent/CN104619644A/en
Application granted granted Critical
Publication of CN104619644B publication Critical patent/CN104619644B/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B6/00—Hydrides of metals including fully or partially hydrided metals, alloys or intermetallic compounds ; Compounds containing at least one metal-hydrogen bond, e.g. (GeH3)2S, SiH GeH; Monoborane or diborane; Addition complexes thereof
    • C01B6/06—Hydrides of aluminium, gallium, indium, thallium, germanium, tin, lead, arsenic, antimony, bismuth or polonium; Monoborane; Diborane; Addition complexes thereof
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J19/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J19/0006—Controlling or regulating processes
    • B01J19/0013—Controlling the temperature of the process
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J19/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J19/0053—Details of the reactor
    • B01J19/0066—Stirrers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J19/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J19/0093—Microreactors, e.g. miniaturised or microfabricated reactors
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J19/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J19/18—Stationary reactors having moving elements inside
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J19/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J19/24—Stationary reactors without moving elements inside
    • B01J19/248—Reactors comprising multiple separated flow channels
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B6/00—Hydrides of metals including fully or partially hydrided metals, alloys or intermetallic compounds ; Compounds containing at least one metal-hydrogen bond, e.g. (GeH3)2S, SiH GeH; Monoborane or diborane; Addition complexes thereof
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01G—COMPOUNDS CONTAINING METALS NOT COVERED BY SUBCLASSES C01D OR C01F
    • C01G17/00—Compounds of germanium
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J2219/00049—Controlling or regulating processes
    • B01J2219/00051—Controlling the temperature
    • B01J2219/00054—Controlling or regulating the heat exchange system
    • B01J2219/00056—Controlling or regulating the heat exchange system involving measured parameters
    • B01J2219/00058—Temperature measurement
    • B01J2219/00063—Temperature measurement of the reactants
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J2219/00049—Controlling or regulating processes
    • B01J2219/00051—Controlling the temperature
    • B01J2219/00074—Controlling the temperature by indirect heating or cooling employing heat exchange fluids
    • B01J2219/00087—Controlling the temperature by indirect heating or cooling employing heat exchange fluids with heat exchange elements outside the reactor
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J2219/00049—Controlling or regulating processes
    • B01J2219/00051—Controlling the temperature
    • B01J2219/00074—Controlling the temperature by indirect heating or cooling employing heat exchange fluids
    • B01J2219/00087—Controlling the temperature by indirect heating or cooling employing heat exchange fluids with heat exchange elements outside the reactor
    • B01J2219/00094—Jackets
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J2219/00049—Controlling or regulating processes
    • B01J2219/00186—Controlling or regulating processes controlling the composition of the reactive mixture
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J2219/00781—Aspects relating to microreactors
    • B01J2219/00783—Laminate assemblies, i.e. the reactor comprising a stack of plates
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J2219/00781—Aspects relating to microreactors
    • B01J2219/00801—Means to assemble
    • B01J2219/0081—Plurality of modules
    • B01J2219/00813—Fluidic connections
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J2219/00781—Aspects relating to microreactors
    • B01J2219/00889—Mixing
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J2219/00781—Aspects relating to microreactors
    • B01J2219/0095—Control aspects
    • B01J2219/00952—Sensing operations
    • B01J2219/00954—Measured properties
    • B01J2219/00961—Temperature
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J2219/24—Stationary reactors without moving elements inside
    • B01J2219/2401—Reactors comprising multiple separate flow channels

Landscapes

  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Inorganic Chemistry (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
  • Silicon Compounds (AREA)

Abstract

The present invention relates to an apparatus for preparing germane gas, and a method for preparing mono-germane gas by using the same, and more specifically, to: an apparatus for preparing germane gas capable of massively and stably producing mono-germane gas by mixing reactants within a short time by using a preparation apparatus comprising a microstructured channel and simultaneously removing the generated reaction heat when preparing germane gas; and a method for preparing mono-germane gas using the same. In addition, according to the present invention, the rapid increase in reaction temperature and pressure generated during the mass production of germane gas is readily controlled, and thus it is advantageous for the massive production of mono-germane gas in a good yield.

Description

Germane gas preparation facilities and utilize it to prepare the method for single Germane gas
Technical field
The present invention relates to a kind of Germane gas preparation facilities and utilize it to prepare the method for single Germane gas, particularly relate to a kind of following Germane gas preparation facilities and utilize it to prepare the method for single Germane gas: it is when preparing single Germane gas, utilize the reactor and hybrid reaction material at short notice that comprise micro-structured channels, and effectively remove the reaction heat produced, thus single Germane gas stably can be produced in a large number.
Background technology
Germane gas (Germane gas) is used in semiconductor industry, and it makes strained silicon technology be applied in central processing unit (CPU), and has become emerging germanium passage and the critical material of grid.In addition, Germane gas is used to form the SiGe layer in the middle layer of three-dimensional connection (Triple junction) structure as the 5th generation amorphous silicon thin-film solar cell (a-Si solar cell), thus the absorption strengthened for the light in the medium wavelength region of 300-900 nanometer, improve the efficiency of battery thus.Accordingly, along with for as the increase of demand of thin-film solar cells being categorized as solar cell of future generation, estimate that the demand of Germane gas also can increase fast.
Since nineteen thirty, many chemists study manufacture and its chemical reaction involved of Germane gas.Typical example comprises: a kind of chemical process uses sodium borohydride (NaBH 4) or lithium aluminum hydride (LiAlH 4) etc. and reduce germanium dioxide (GeO 2) or germanium tetrachloride (GeCl 4); A kind of electrochemical method electrolysis germanium dioxide; And a kind of energetic methods is directly by germanium (Ge) and H-H reaction.
As for using germanium dioxide or germanium tetrachloride to prepare Germane gas in a conventional method, its productive rate approximately only has 70%.Especially, when using the germanium dioxide of more easily taking compared to germanium tetrachloride to prepare single Germane gas, be difficult to prepare single Germane gas under high yield.
In view of this, United States Patent (USP) the 4th, 668, No. 502 announcements, even if use identical germanium dioxide as raw material, by adjustment reaction conditions, namely germanium dioxide concentration, be dissolved with germanium dioxide alkaline aqueous solution in the ratio of alkali/germanium dioxide, the amount of alkali metal borohydride, the concentration, temperature of reaction etc. of acid combination, the productive rate of Germane gas can be increased to up to 97%.Really, when according to United States Patent (USP) the 4th, when reaction conditions disclosed in 668, No. 502 embodiments and claims is tested, show the germane productive rate up to about 90%.
But if according to aforesaid method, the alkaline aqueous solution and this acidic aqueous solution that this are dissolved with germanium dioxide and alkali metal borohydride react with batch or continous way, then Germane gas can produce at short notice explosively, and along with high reaction heat.If to this means with technical scale but not laboratory scale carries out the preparation of Germane gas, then speed of reaction and reaction heat will be difficult to control.If the high reaction heat with reaction as above can not get controlling, then in the process reacted, temperature of reaction will rise (about 50 DEG C or higher) fast, may generate higher germane thus, the productive rate therefore for single Germane gas has negative impact.
The present inventor has paid the effort continued and has solved the problems referred to above.As a result, found that this problem solves by following method: utilize the reactor and hybrid reaction material at short notice that comprise the passage of microstructure, and removing with and the reaction heat that produces.
Summary of the invention
Technical problem
System of the present invention relates to a kind of Germane gas preparation facilities and utilizes it to prepare the method for monochrome alkane gas, particularly relate to a kind of following Germane gas preparation facilities and utilize it to prepare the method for monochrome alkane gas: utilizing the reactor and hybrid reaction material at short notice that comprise the passage of microstructure, and the reaction heat effectively removing with and produce, thus the sharply rising of the temperature of reaction controlled when preparing Germane gas in a large number and pressure, stably can produce a large amount of single Germane gas thus.
Technical scheme
In order to reach object as above, An embodiment provides a kind of single Germane gas preparation method, comprising following steps: comprising germanium dioxide (GeO respectively to injecting in first channel and second passage 2) with the reaction raw materials alkaline aqueous solution of alkalimetal hydride and acidic aqueous solution; In the third channel of one end being connected to this first channel and second passage, the reaction raw materials alkaline aqueous solution that mixing is injected and acidic aqueous solution, and make it react to produce single Germane gas and reaction soln; And the single Germane gas produced and reaction soln are disposed to the outside of this third channel, wherein, the refrigeration agent circulated in the refrigerant circulation unit that the reaction heat produced in this third channel is placed adjacent to this third channel and arranges absorbed.
In the exemplary embodiment, this third channel can be microchannel.
In the exemplary embodiment, this third channel can comprise main channel and be formed in parallel outstanding multiple protuberances of this side, main channel one.Further, the plurality of protuberance can have acute angle relative to this main channel, and can give prominence to towards a direction.
In the exemplary embodiment, this third channel can be maintained at the temperature of 0-50 DEG C.
In the exemplary embodiment, the temperature of this third channel is controlled by regulating at least one selected from the flow velocity of the temperature of the flow of refrigeration agent, refrigeration agent, reaction raw materials alkaline aqueous solution or acidic aqueous solution.
In the exemplary embodiment, the reaction heat produced in this third channel can be conducted to the first metal block surrounding this third channel, the reaction heat conducting to the first metal block can be conducted to the second metal block with this first metal block contact, the reaction heat conducting to the second metal block can be conducted to the refrigerant circulation unit surrounded by the second metal block, and the reaction heat conducting to refrigerant circulation unit can be circulated the refrigerant suction in this refrigerant circulation unit.
In the exemplary embodiment, the quantity of this third channel can be more than one, described more than one third channel connects by parallel way, and reaction raw materials alkaline aqueous solution and acidic aqueous solution can be respectively injected in this more than one third channel, to produce single Germane gas in this more than one third channel.
In the exemplary embodiment, this alkalimetal hydride can be NaBH 4.
In the exemplary embodiment, this acidic aqueous solution can comprise mineral acid or organic acid, wherein this mineral acid can be more than one the mineral acid selected from the group be made up of sulfuric acid and phosphoric acid, and this organic acid can be more than one the organic acid selected from the group be made up of acetic acid and propionic acid.
A kind of embodiment of the present invention provides a kind of Germane gas preparation facilities, comprises: first channel, injects for reaction raw materials alkaline aqueous solution; Second passage, injects for acidic aqueous solution: third channel, is connected to one end of this first channel and second passage, for being mixed with acidic aqueous solution by reaction raw materials alkaline aqueous solution, and makes it react to produce single Germane gas and reaction soln; Relief outlet, for the single Germane gas produced in this third channel and reaction soln discharge; Refrigerant circulation unit, arranges adjacent to this third channel, for injecting and refrigerant emission, and is absorbed in the reaction heat produced in this third channel.
In the exemplary embodiment, this third channel can be microchannel.
In the exemplary embodiment, this third channel and this refrigerant circulation unit can be arranged by being separated by, this third channel can be surrounded by the first metal block, and this refrigerant circulation unit can be surrounded by the second metal block, and this first metal block and this second metal block can be arranged as and contact with each other.
Beneficial effect
According to the present invention, when preparing Germane gas, utilize the reactor and hybrid reaction material at short notice that comprise the passage of microstructure, and effectively removing with and the reaction heat that produces, thus the sharply rising of the temperature of reaction that can control when preparing Germane gas in a large number and pressure.And according to the present invention, single Germane gas can be produced by a large amount of and high productivity.
Accompanying drawing explanation
Fig. 1 is the schematic diagram of batch (batch) reactor according to prior art.
Fig. 2 a is an exploded view of Germane gas preparation facilities according to an embodiment of the invention.
Fig. 2 b is the assembly drawing of Germane gas preparation facilities according to an embodiment of the invention.
Fig. 3 a is the sketch chart of the third channel in Germane gas preparation facilities according to an embodiment of the invention.
Fig. 3 b is the enlarged view of the third channel in Germane gas preparation facilities according to an embodiment of the invention.
Fig. 4 represents the temperature variation of the third channel according to embodiment 1 to 4.
Fig. 5 be by according to the third channel of embodiments of the invention 4 with compare according to the temperature variation of the third channel of comparative example 1 and the figure that illustrates.
Nomenclature
1: batch reactor 2: circulator
3: reaction raw materials alkaline aqueous solution holder 4: acidic aqueous solution holder
5: refrigerant circulation unit 6: volume pump
7: register (recorder) 8: relief outlet
10: first channel 20: second passage
30: third channel (30a: main channel 30b: protuberance)
40: relief outlet
50: refrigerant circulation unit
(55a: refrigeration agent inlet 55b: refrigeration agent relief outlet)
60: metal block
(the 60a: the first metal block 60b: the second metal block)
Embodiment
Below, the present invention is described in detail.
Term used in the present invention " microchannel (micro-channel) " refers to the passage of microstructure, and this passage can have the several microns of diameters to several millimeters.
Term used in the present invention " reaction soln " refer to the reaction raw materials aqueous solution and acidic aqueous solution react produce Germane gas after residual solution.
germane gas preparation facilities
According to a kind of Germane gas preparation facilities of the present invention, comprise: first channel 10, inject for reaction raw materials alkaline aqueous solution; Second passage 20, injects for acidic aqueous solution; Third channel 30, is connected to one end of this first channel 10 and second passage 20, for being mixed with acidic aqueous solution by alkaline aqueous solution, and makes it react to produce single Germane gas and reaction soln; Relief outlet 40, for the single Germane gas produced in this third channel 30 and reaction soln discharge; And refrigerant circulation unit 50, arranging adjacent to this third channel 30, for injecting and refrigerant emission, and being absorbed in the reaction heat produced in this third channel 30.This third channel 30 is preferably microchannel.And, preferably, this third channel 30 is spaced with this refrigerant circulation unit 50 and arranges, this third channel 30 is surrounded by the first metal block 60a, this refrigerant circulation unit 50 is surrounded by the second metal block 60b, and this first metal block 60a and this second metal block 60b is arranged to and contacts with each other.
This first channel 10 is not limited to specific modality, as long as reaction raw materials alkaline aqueous solution can be made to inject, and the reaction raw materials alkaline aqueous solution of injection is passed to this third channel 30.This first channel 10 preferably has the shape of pipe arrangement.This first channel 10 preferably has erosion resistance and acid resistance, and this first channel 20 can be at least one or its alloy selected from the group be made up of pottery, stainless steel, titanium etc.
This reaction raw materials alkaline aqueous solution is by by germanium dioxide (GeO 2), alkalimetal hydride and alkaline aqueous solution mixing and prepare.This alkalimetal hydride can be NaBH 4.The method preparing this reaction raw materials alkaline aqueous solution is not limited to specific modality.For example, can as USP4, that records in 668,502 publications is such, at the germanium dioxide (GeO of predetermined proportion 2) the metal hydroxides aqueous solution in add the alkalimetal hydride powder of powdery, or germanium dioxide powder and alkalimetal hydride can be added wherein after the alkaline aqueous solution of previously prepared predetermined concentration.In reaction raw materials alkaline aqueous solution used in the present invention, the concentration of germanium dioxide is preferably below 0.5mol/L, is more preferably 0.3mol/L.Further, preferably, relative to the germanium dioxide of every 1mol, this metal hydroxides of more than 2 chemical equivalents can be comprised, and relative to the germanium dioxide of every 1mol, the alkalimetal hydride of more than 4mol can be comprised.If exceed above-mentioned scope, then reduce the transformation efficiency of germanium dioxide, thus may be difficult to the economic benefit guaranteeing that single Germane gas is produced.This alkaline aqueous solution is the basic metal aqueous solution or the alkaline-earth metal aqueous solution, preferably, can be the NaOH aqueous solution or the KOH aqueous solution.When preparing this reaction raw materials alkaline aqueous solution, if being used by the NaOH aqueous solution is alkaline aqueous solution, and by this NaBH 4using is alkalimetal hydride, then due to NaBH 4stabilization and can not hydrogen be produced.
This second passage 20 is not limited to specific modality, as long as acidic aqueous solution can be made to inject, and the acidic aqueous solution of injection is passed to this third channel 30.This second passage 20 can have the shape of pipe arrangement.This second passage 20 preferably has opposing by the erosion resistance of the corrosion of acidic aqueous solution and acid resistance, and the material of this second passage 20 can be at least one or its alloy selected from the group be made up of pottery, stainless steel, titanium etc.
This acidic aqueous solution mixes with water by the acid that will be selected from mineral acid (e.g., sulfuric acid and phosphoric acid etc.) or organic acid (e.g., acetic acid and propionic acid etc.) and prepares.But, consider the purifying of single Germane gas, preferably avoid the use of volatile acid (e.g., hydrochloric acid).This acidic aqueous solution is not limited to certain concentration.
This third channel 30 is not limited to specific modality, as long as can be connected to one end of this first channel 10 and second passage 20, and causes mixing and reaction of the reaction raw materials aqueous solution that is injected into each passage and acidic aqueous solution.This third channel 30 is preferably micro-structured channels.The diameter of microchannel and length can change according to the size of manufacturing installation of the present invention and desired Germane gas turnout.Preferably, it can between some tens of pm to several millimeters.
This third channel 30 can comprise main channel 30a and be formed in parallel outstanding multiple protuberance 30b of this side, main channel one.The plurality of protuberance 30b can have acute angle relative to this main channel and can give prominence to towards a direction.This third channel 30 has the form comprising main channel 30a and protuberance 30b, thus can make to be moved up and down constantly by the fluid of this third channel 30, and enables this fluid shunt (split) or interflow (recombine).This third channel 30 has this structure, thus the reaction raw materials aqueous solution that injected by first channel 10 and second passage 20 respectively and acidic aqueous solution can be made to mix easily, moreover, also increase the contact area of this reaction raw materials aqueous solution and acidic aqueous solution, thus the technique effect promoting Germane gas formation reaction can be brought.Further, this third channel 30 preferably comprises temperature sensor (not shown) further.This temperature sensor can carry out real-time temperature survey to this third channel 30, thus is easy to regulate temperature of reaction, and adjustable refrigeration agent is by the flow of this refrigerant circulation unit 50, is expected to the productive rate increasing single Germane gas accordingly.
This relief outlet 40 is not limited to specific modality, as long as the Germane gas that the reaction carried out in third channel 30 can be produced and reaction soln are discharged to the outside of this third channel 30.This relief outlet 40 for being connected to the form of one end of this third channel 30, and preferably has the shape of pipe arrangement.The diameter being connected to the relief outlet 40 of one end of this third channel 30 can change according to the size of this manufacturing installation and desired Germane gas turnout.
This refrigerant circulation unit 50 is not limited to specific modality, it can be arranged adjacent to third channel 30, and comprise the refrigeration agent inlet injected for refrigeration agent and the refrigeration agent relief outlet 40 supplying discharge refrigerant, and the refrigeration agent for absorption reaction heat can be allowed to pass through, this reaction heat produces due to the Germane gas formation reaction of generation in third channel 30.This refrigerant circulation unit 50 can be the in-line or flexuose pipe arrangement that can pass through for refrigeration agent, and the diameter of this refrigerant circulation unit 50 can change according to the size of this manufacturing installation and desired Germane gas turnout.
The refrigeration agent be circulated in refrigerant circulation unit 50 is fluid, refrigeration agent is injected into refrigerant circulation unit 50 by the refrigeration agent inlet 55a being positioned at one end of this refrigerant circulation unit 50, and discharged by the refrigeration agent relief outlet 55b of the other end that is positioned at this refrigerant circulation unit 50, to refrigeration agent, there is no particular restriction, seek only it to solidify under temperature below 0 DEG C, can preferred ethylene glycol (ethyleneglycol).
In one embodiment of the invention, this third channel 30 can be arranged by being separated by with this refrigerant circulation unit 50, this third channel 30 can be surrounded by the first metal block 60a, this refrigerant circulation unit 50 can be surrounded by the second metal block 60b, and this first metal block 60a and this second metal block 60b can be arranged to and contacts with each other.In this embodiment, the reaction heat that the Germane gas formation reaction occurred in this third channel 30 produces is conducted to the first metal block 60a surrounding third channel, the reaction heat conducting to this first metal block 60a is conducted to the second metal block 60b contacted with this first metal block 60a, and the reaction heat conducting to this second metal block 60b be conducted to the refrigerant circulation unit 50 that surrounds by this second metal block 60b.The refrigeration agent that the reaction heat conducting to refrigerant circulation unit 50 is circulated in refrigerant circulation unit 50 absorbed.
This first metal block 60a is not limited to specific modality, as long as it surrounds third channel 30, and is preferably made up of the metallic substance with high thermal conductivity.This second metal block 60b is not limited to specific modality, as long as it surrounds refrigerant circulation unit 50, and is preferably made up of the metallic substance with high thermal conductivity.
In the exemplary embodiment, this the first metal block 60a and the second metal block 60b can have rectangular shape, and the face that this first metal block 60a contacts with the second metal block 60b is broader, reaction heat more reliably can conduct to refrigerant circulation unit 50 by this third channel 30.
single Germane gas preparation method
reaction raw materials alkaline aqueous solution and acidic aqueous solution implantation step
First, titanium dioxide will be comprised germanium(GeO 2) be injected into first channel 10 and second passage 20 respectively with the reaction raw materials alkaline aqueous solution of alkalimetal hydride and the sour flight of steps leading to a palace hall aqueous solution.
The reaction raw materials alkaline aqueous solution being injected into first channel 10 is by by titanium dioxide germanium(GeO 2), alkalimetal hydride and alkaline aqueous solution mixing and prepare.This alkalimetal hydride can be NaBH 4.The manufacture method of reaction raw materials alkaline aqueous solution can as USP4, described such in 668,502 publications, at the germanium dioxide (GeO of predetermined proportion 2) the metal hydroxides aqueous solution in add the alkalimetal hydride powder of powdery, or after the alkaline aqueous solution of previously prepared predetermined concentration, titanium dioxide can be added wherein germaniumpowder and alkalimetal hydride powder and prepare, but the present invention is not limited to above-mentioned form.In reaction raw materials alkaline aqueous solution used in the present invention, titanium dioxide germaniumconcentration be preferably below 0.5mol/L, be more preferably 0.3mol/L.And, corresponding to the titanium dioxide of every 1mol germanium, this metal hydroxides of more than 2 chemical equivalents can be comprised, and correspond to the titanium dioxide of every 1mol germanium, the alkalimetal hydride of more than 4mol can be comprised.If exceed above-mentioned scope, then reduce titanium dioxide germaniumtransformation efficiency, be thus difficult to the economic benefit guaranteeing that single Germane gas is produced.This alkaline aqueous solution is preferably the basic metal aqueous solution or the alkaline-earth metal aqueous solution, is preferably the NaOH aqueous solution or the KOH aqueous solution.When preparing this reaction raw materials alkaline aqueous solution, if being used by the NaOH aqueous solution is alkaline aqueous solution, and by this NaBH 4using is alkalimetal hydride, then NaBH 4obtain stabilization and can not hydrogen be produced.
The acidic aqueous solution being injected into second passage 20 mixes with water by the acid that will be selected from mineral acid (e.g., sulfuric acid and phosphoric acid etc.) or organic acid (e.g., acetic acid and propionic acid etc.) and prepares.But, consider the purifying of single Germane gas, the use of volatile acid (e.g., hydrochloric acid) can be avoided.The concentration of this acidic aqueous solution is not limited.
The rate of injection of this reaction raw materials alkaline aqueous solution and acidic aqueous solution can be respectively the tens of milliliter of per minute, and can regulate according to the size of this manufacturing installation and desired Germane gas turnout.
When injecting reaction raw materials alkaline aqueous solution and acidic aqueous solution to this first channel 10 and second passage 20, the device that can adopt is not particularly limited, as long as it can inject this alkaline aqueous solution and acidic aqueous solution continuously and consistently to this first channel 10 and second passage 20, preferably volume pump etc. can be adopted.
step 2
Be injected into reaction raw materials alkaline aqueous solution and the acidic aqueous solution of first channel 10 and second passage 20 respectively, be passed to the third channel 30 be connected with one end of this first channel 10 and second passage 20 via this passage.In this third channel 30, the reaction raw materials alkaline aqueous solution transmitted and acidic aqueous solution mixed, and there is Germane gas formation reaction on the interface contacted with each other.
The third channel 30 that this reaction occurs is preferably microchannel.By making this third channel 30 have micro-structured channels form, Germane gas formation reaction can be promoted, and the effect that the temperature that the reaction heat that the control that can maximize generates with this reaction causes rises.This is because Germane gas formation reaction only occurs in the interface that this reaction raw materials alkaline aqueous solution and this acidic aqueous solution contact with each other.That is, along with drop (droplet) size reduce and quantity increase, the area at the interface that alkaline aqueous solution contacts with acidic aqueous solution increases, so be easy on micro-scale (microscale) mix.
Third channel 30 can comprise main channel 30a and be formed in parallel outstanding multiple protuberance 30b of this side, main channel one, and the plurality of protuberance 30b can have acute angle relative to this main channel 30a and can give prominence to towards a direction.Accordingly, be injected into reaction raw materials alkaline aqueous solution and the acidic aqueous solution of third channel 30, can be to and from after being injected into third channel 30 between main channel 30a and multiple protuberance 30b and move up and down constantly, and shunting or interflow can be realized.Accordingly, this reaction raw materials alkaline aqueous solution will be mixed with micro-scale with this acidic aqueous solution, and react on interface and produce Germane gas.
Reaction heat produces while Germane gas generates.Due to this reaction heat, the temperature in this third channel 30 may sharply rise.So, refrigerant circulation unit 50 is arranged adjacent to this third channel 30, with absorption reaction heat in during carrying out in this reaction.
In one embodiment of the invention, Germane gas results from this third channel 30, and the reaction heat produced while Germane gas generates then conducts to the first metal block 60a surrounding this third channel 30.This first metal block 60a conducts this reaction heat to the second metal block 60b contacted with the first metal block 60a.The reaction heat conducting to this second metal block 60b be conducted to the refrigerant circulation unit 50 that surrounds by the second metal block 60b.The refrigeration agent that the reaction heat conducting to refrigerant circulation unit 50 is circulated in refrigerant circulation unit 50 absorbed.The absorption of this reaction heat by the supply temperature and refrigeration agent that are supplied to the refrigeration agent of this refrigerant circulation unit 50 supply flow and regulated.When increasing when the turnout in order to increase this Germane gas the reaction raw materials alkaline aqueous solution and acidic aqueous solution that are injected into third channel 30, in order to make the temperature of reaction of this third channel 30 remain constant, the measure of the supply temperature reducing refrigeration agent or the supply flow increasing refrigeration agent will be adopted.
The temperature of this third channel 30 is by regulating at least one selected from the flow of refrigeration agent, the temperature of refrigeration agent and the flow velocity of reaction raw materials alkaline aqueous solution or acidic aqueous solution and controlled.The temperature of this third channel 30 preferably maintains within 50 DEG C, is more preferably 0 DEG C to 50 DEG C.If this is because exceed said temperature scope, then promote the formation of high order germane in the reaction between this reaction raw materials alkaline aqueous solution and this acidic aqueous solution, instead of promote the formation of single germane, the productive rate therefore for single Germane gas has negative impact.
In one embodiment of the invention, the quantity of this third channel 30 is more than one, and this more than one third channel 30 connects by parallel way, and this reaction raw materials alkaline aqueous solution and this acidic aqueous solution are injected into this more than one third channel 30 respectively, to generate single Germane gas in this more than one third channel 30.If this third channel 30 connects with parallel way, then can with a large amount of single Germane gas of industrial-scale production.
step 3
The single Germane gas produced by this reaction and reaction soln will be discharged into the outside of this third channel 30 by the relief outlet 40 being connected to one end of third channel 30.Single Germane gas of discharge and reaction soln are distinguished and collected.The productive rate of single Germane gas of being produced by above-mentioned a series of step is 90%, and it shows good level.
For batch reactor for the production of Germane gas of the prior art or flow reactor, make refrigeration agent method of circulating in the cooling jacket surrounding this reactor even if adopt, be still difficult to control the temperature in reactor that reaction heat causes when a large amount of production Germane gas.
But, for the reactor comprising micro-structured channels according to the present invention, not only the mixing and the react easy of reaction raw materials aqueous solution and acidic aqueous solution, and cooling performance is maximized, thus be easy to the temperature of reactor to maintain 0 DEG C to 50 DEG C, therefore, be conducive to a large amount of single Germane gas to be produced with high yield.
embodiment
Below, in further detail the present invention will be described by embodiment.But, these embodiments only for illustration of purposes, those skilled in the art from when understand scope of the present invention be not limited to these embodiments.
embodiment 1
By the 75g vitriol oil (H of 96% 2sO 4) be dissolved in the distilled water of 500mL, thus prepared the acidic aqueous solution of 20 DEG C.
At 20 DEG C, by the 2.82mL NaOH aqueous dissolution of 50% in the distilled water of 250mL, and in above-mentioned solution, dissolve the germanium dioxide (GeO of 3.4g successively 2) and the NaBH of 7.4g 4, thus prepared reaction raw materials alkaline aqueous solution.
At Germane gas preparation facilities according to an embodiment of the invention (see in Fig. 2 first channel 10 a), this reaction raw materials alkaline aqueous solution is injected with the speed of per minute 8mL, meanwhile, this acidic aqueous solution is injected in second passage 20 with the speed of per minute 16mL.Above-mentioned injection process employs volume pump.The temperature adjoint to the carrying out manufacturing the reaction of Germane gas by means of this manufacturing installation rises and measures.By measuring the temperature of the reaction soln discharged via the relief outlet 40 being connected to third channel 30, measuring this temperature and rising.
On the time point that the temperature of third channel 30 remains constant, start to be made by ethylene glycol it circulate in the refrigerant circulation unit 50 of this Germane gas preparation facilities as refrigeration agent.The temperature of this third channel 30 maintains about 38 DEG C, so supply ethylene glycol and circulated from this time point.The ethylene glycol supplied is with 15 DEG C, the speed supply of 120mL/ minute.This refrigeration agent circulate once beginning, the temperature just confirming this third channel 30 sharply declines, and confirms the temperature being maintained at about 23 DEG C.
embodiment 2 ~ 4
The flow of injected reaction raw materials alkaline aqueous solution and aqueous sulfuric acid is increased to 2 times, 3 times and 4 times, and other conditions are maintained identical with embodiment 1.
In example 2, the temperature of third channel 30 maintains 42 DEG C, and once the ethylene glycol of supply 5 DEG C, is maintained at about 28 DEG C (see Fig. 4) with regard to finding the temperature of this third channel 30 sharply to decline.
In embodiment 3, the temperature of third channel 30 maintains 43 DEG C, and once supplying the ethylene glycol of-5 DEG C, is maintained at about 30 DEG C (see Fig. 4) with regard to finding the temperature of third channel 30 sharply to decline.
In example 4, the temperature of third channel 30 maintains 43 DEG C and once the ethylene glycol supplying-10 DEG C, is maintained at about 32 DEG C (see Fig. 4) with regard to finding the temperature of third channel 30 sharply to decline.
comparative example 1
Reaction raw materials alkaline aqueous solution and acidic aqueous solution has been prepared as this embodiment 1.
Use volume pump and in 1 liter of glass (glass) reactor, inject reaction raw materials alkaline aqueous solution and acidic aqueous solution respectively, and injecting with the flow equaling embodiment 4 respectively.
Reach before about 43 DEG C in the temperature of this 1 liter of glass reactor, ethylene glycol (refrigeration agent) is not allowed to circulate, and the moment of 43 DEG C is reached in the temperature of this reactor, the ethylene glycol of-10 DEG C (refrigeration agent) are circulated (see Fig. 5) with the speed of per minute 250mL.
The result of comparative examples 4 and comparative example 1, for for the Germane gas preparation facilities of the embodiment of the present invention, cooling performance by means of the ethylene glycol as refrigeration agent increases significantly compared with prior art (comparative example 1), give the credit to this significant cooling performance, when a large amount of production Germane gas, more easily regulate the reaction heat reacting and produce, thus be easy to maintain the temperature (see Fig. 5) being conducive to prepared by single Germane gas 0 ~ 50 DEG C.
As can be seen here, according to Germane gas preparation facilities of the present invention and single Germane gas preparation method, with during technical scale a large amount of production Germane gas to reaction favourable, moreover, also help the rising controlling the temperature of reaction that reaction heat causes, therefore, it is possible to a large amount of production Germane gas of excellent productive rate.
Although elaborated the specific part of content of the present invention, but the personnel in this area with general knowledge probably know that these concrete technology are preferred embodiment, and the present invention is limited by these contents.Therefore, should show that essential scope of the present invention is defined by claims and equivalents thereto thereof.

Claims (13)

1. a single Germane gas preparation method, is characterized in that, comprise the steps:
Respectively to injecting the reaction raw materials alkaline aqueous solution and the acidic aqueous solution that comprise germanium dioxide and alkalimetal hydride in first channel and second passage;
In the third channel of one end being connected to this first channel and second passage, the reaction raw materials alkaline aqueous solution that mixing is injected and acidic aqueous solution, and make it react to produce single Germane gas and reaction soln: and
The single Germane gas produced and reaction soln are disposed to the outside of this third channel,
Wherein, the refrigeration agent circulated in the refrigerant circulation unit that the reaction heat produced in this third channel is placed adjacent to this third channel and arranges absorbed.
2. single Germane gas preparation method as claimed in claim 1, is characterized in that, this third channel is microchannel.
3. single Germane gas preparation method as claimed in claim 1, it is characterized in that, this third channel comprises:
Main channel;
Multiple protuberance, gives prominence to abreast in a side of this main channel and is formed.
4. single Germane gas preparation method as claimed in claim 3, it is characterized in that, the plurality of protuberance has acute angle relative to this main channel, and outstanding towards a direction.
5. single Germane gas preparation method as claimed in claim 1, is characterized in that, the temperature of this third channel maintains 0 DEG C to 50 DEG C.
6. single Germane gas preparation method as claimed in claim 5, it is characterized in that, the temperature of this third channel is dredged from the temperature of the flow of refrigeration agent, refrigeration agent and reaction raw materials alkaline water at least one selected the flow velocity of liquid or acidic aqueous solution by regulating and is controlled.
7. single Germane gas preparation method as claimed in claim 1, it is characterized in that, the reaction heat produced in this third channel is conducted to the first metal block surrounding this third channel, the reaction heat conducting to this first metal block is conducted to the second metal block with this first metal block contact, the reaction heat conducting to this second metal block is conducted to the refrigerant circulation unit surrounded by the second metal block, and the refrigeration agent that the reaction heat conducting to refrigerant circulation unit is circulated in this refrigerant circulation unit absorbed.
8. single Germane gas preparation method as claimed in claim 1, it is characterized in that, the quantity of this third channel is more than one, this more than one third channel connects with parallel way, and this alkaline aqueous solution and acidic aqueous solution are respectively injected in this more than one third channel, to produce single Germane gas in this more than one third channel.
9. single Germane gas preparation method as claimed in claim 1, is characterized in that, this alkalimetal hydride is NaBH 4.
10. single Germane gas preparation method as claimed in claim 1, it is characterized in that, this acidic aqueous solution comprises mineral acid or organic acid, this mineral acid is more than one the mineral acid selected from the group be made up of sulfuric acid and phosphoric acid, and this organic acid is more than one the organic acid selected from the group be made up of acetic acid and propionic acid.
11. 1 kinds of Germane gas preparation facilitiess, is characterized in that, comprise:
First channel, injects for reaction raw materials alkaline aqueous solution:
Second passage, injects for acidic aqueous solution;
Third channel, is connected to one end of this first channel and second passage, for being mixed with acidic aqueous solution by alkaline aqueous solution, and makes it react to produce single Germane gas and reaction soln;
Relief outlet, for the single Germane gas produced in this third channel and reaction soln discharge; And
Refrigerant circulation unit, arranges adjacent to this third channel, for injecting and refrigerant emission, and is absorbed in the reaction heat produced in this third channel.
12. Germane gas preparation facilitiess as claimed in claim 11, it is characterized in that, this third channel is microchannel.
13. Germane gas preparation facilitiess as claimed in claim 11, it is characterized in that, this third channel and this refrigerant circulation unit are arranged by being spaced, this third channel is surrounded by the first metal block, this refrigerant circulation unit is surrounded by the second metal block, and this first metal block and this second metal block are arranged to and contact with each other.
CN201380043627.9A 2012-08-20 2013-08-20 Germane gas preparation facilities and the method utilizing the single Germane gas of its preparation Active CN104619644B (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
KR20120090756A KR101250172B1 (en) 2012-08-20 2012-08-20 Method for preparing mono germane gas in high yield
KR10-2012-0090756 2012-08-20
PCT/KR2013/007465 WO2014030909A1 (en) 2012-08-20 2013-08-20 Apparatus for preparing germane gas, and method for preparing mono-germane gas by using same

Publications (2)

Publication Number Publication Date
CN104619644A true CN104619644A (en) 2015-05-13
CN104619644B CN104619644B (en) 2016-12-14

Family

ID=48442218

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201380043627.9A Active CN104619644B (en) 2012-08-20 2013-08-20 Germane gas preparation facilities and the method utilizing the single Germane gas of its preparation

Country Status (6)

Country Link
US (1) US9586820B2 (en)
JP (1) JP5952969B2 (en)
KR (1) KR101250172B1 (en)
CN (1) CN104619644B (en)
TW (2) TW201425227A (en)
WO (2) WO2014030885A1 (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106467290A (en) * 2015-08-20 2017-03-01 贺孝鸣 A kind of electromotive force that adjusts manipulates production method and device prepared by germane
CN109205660A (en) * 2018-11-22 2019-01-15 衡阳恒荣高纯半导体材料有限公司 A kind of method of purification of germanium dioxide
CN111777040A (en) * 2020-07-31 2020-10-16 江西华特电子化学品有限公司 Purification production process and production system of high-purity germane
CN112408327A (en) * 2020-12-18 2021-02-26 天津中科拓新科技有限公司 Method and device for preparing electronic-grade germane and co-producing electronic-grade tetrafluorogermane

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US11091374B1 (en) * 2019-09-28 2021-08-17 Ge Solartech, LLC Method to produce high purity germane from germanium dioxide or impure germanium compounds
KR102538855B1 (en) * 2021-05-21 2023-06-02 주식회사 솔 머티리얼즈 Apparatus and method for manufacturing germane gas

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4668502A (en) * 1986-01-13 1987-05-26 Voltaix, Inc. Method of synthesis of gaseous germane
JPH10291804A (en) * 1997-04-18 1998-11-04 Mitsui Chem Inc Production method of germane
JP2000302411A (en) * 1999-04-21 2000-10-31 Mitsui Chemicals Inc Production of monogermane
US20080299037A1 (en) * 2007-05-31 2008-12-04 Mathias Tezock Method for Purifying Germanium Hydrides
CN101687651A (en) * 2007-03-30 2010-03-31 Rev可再生能源投资公司 Catalytic hydrogenation
CN102639644A (en) * 2009-12-04 2012-08-15 斯帕恩特私人有限公司 Method for producing hydrogenated polygermane and hydrogenated polygermane

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6388317B1 (en) * 2000-09-25 2002-05-14 Lockheed Martin Corporation Solid-state chip cooling by use of microchannel coolant flow
US20100183500A1 (en) * 2009-01-17 2010-07-22 Henry Lee Germane gas production from germanium byproducts or impure germanium compounds
CN101723326B (en) * 2009-12-18 2011-08-31 浙江理工大学 Preparation method of germane

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4668502A (en) * 1986-01-13 1987-05-26 Voltaix, Inc. Method of synthesis of gaseous germane
JPH10291804A (en) * 1997-04-18 1998-11-04 Mitsui Chem Inc Production method of germane
JP2000302411A (en) * 1999-04-21 2000-10-31 Mitsui Chemicals Inc Production of monogermane
CN101687651A (en) * 2007-03-30 2010-03-31 Rev可再生能源投资公司 Catalytic hydrogenation
US20080299037A1 (en) * 2007-05-31 2008-12-04 Mathias Tezock Method for Purifying Germanium Hydrides
CN102639644A (en) * 2009-12-04 2012-08-15 斯帕恩特私人有限公司 Method for producing hydrogenated polygermane and hydrogenated polygermane

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106467290A (en) * 2015-08-20 2017-03-01 贺孝鸣 A kind of electromotive force that adjusts manipulates production method and device prepared by germane
CN114655927A (en) * 2015-08-20 2022-06-24 贺孝鸣 Production method and device for regulating electromotive force to control germane preparation
CN109205660A (en) * 2018-11-22 2019-01-15 衡阳恒荣高纯半导体材料有限公司 A kind of method of purification of germanium dioxide
CN111777040A (en) * 2020-07-31 2020-10-16 江西华特电子化学品有限公司 Purification production process and production system of high-purity germane
CN112408327A (en) * 2020-12-18 2021-02-26 天津中科拓新科技有限公司 Method and device for preparing electronic-grade germane and co-producing electronic-grade tetrafluorogermane

Also Published As

Publication number Publication date
TW201425232A (en) 2014-07-01
KR101250172B1 (en) 2013-04-05
CN104619644B (en) 2016-12-14
TW201425227A (en) 2014-07-01
JP5952969B2 (en) 2016-07-13
WO2014030885A1 (en) 2014-02-27
US9586820B2 (en) 2017-03-07
JP2015526378A (en) 2015-09-10
US20150175418A1 (en) 2015-06-25
WO2014030909A1 (en) 2014-02-27
TWI593631B (en) 2017-08-01

Similar Documents

Publication Publication Date Title
CN104619644A (en) Apparatus for preparing germane gas, and method for preparing mono-germane gas by using same
CN101565175A (en) Device of fast synthetizing CdSe quantum dots and method thereof
JP5619837B2 (en) Continuous reaction equipment for inorganic particles
CN105107442A (en) Intelligent industrialized micro-channel flow reactor
CN106748943A (en) The method and device that a kind of continuous hydrolysis of the double grignard condensation products of vitamin A intermediate are neutralized
CN105330549A (en) Method for preparing isooctyl nitrate in micro-channel reactor
CN107216296A (en) The method that expoxy propane is prepared in micro passage reaction
CN103911194A (en) Composite type diesel fuel cetane number improver and production process thereof
CN115490215B (en) Device and method for preparing nitrogen trifluoride
CN101314572A (en) Method for preparing tetramethyl ammonium hydrogen carbonate with condensation reaction of pipe type reactor
KR101250092B1 (en) Apparatus for preparing germane gas and the method for preparing mono germane gas using the same
CN205164690U (en) Intelligence industrialization microchannel continuous reactor
CN212068771U (en) Grignard reagent continuous preparation device and system
CN108299489B (en) Vinyl tributyl ketoxime group silane serialization reaction system
CN212113896U (en) Novel low-temperature alcohol reforming fuel cell system
CN210022090U (en) Device for producing pinacolone by continuous method
CN202007217U (en) Natural gas hydrate preparing device
CN204656495U (en) A kind of industrial mass stablizes the tandem arrangement preparing quantum dot
CN219291378U (en) Fluorination reactor for synthesizing difluoro sulfimide
CN101428774A (en) Method for continuously dilution diluting aqua fortis and controlling generation of NO2
CN202829586U (en) Synthetising device for lithium hexafluorophosphate
CN115193357B (en) Microfluidic device for one-step synthesis of heterojunction material, synthesis method and application
CN202415175U (en) Device for preparing boron trifluoride through reaction of fluorosulfonic acid and boric acid
CN202226826U (en) Continuous hydrogenation production system device
CN104986726A (en) Method for industrial large-scale stable preparation of quantum dots

Legal Events

Date Code Title Description
C06 Publication
PB01 Publication
C10 Entry into substantive examination
SE01 Entry into force of request for substantive examination
CB02 Change of applicant information

Address after: South Korea Gyeongbuk Rong City

Applicant after: Sk New Material Co. Ltd.

Address before: South Korea Gyeongbuk Rong City

Applicant before: OCI MATERIALS CO., LTD.

COR Change of bibliographic data
C14 Grant of patent or utility model
GR01 Patent grant