CN104600007A - Turnover mechanism - Google Patents
Turnover mechanism Download PDFInfo
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- CN104600007A CN104600007A CN201510009425.3A CN201510009425A CN104600007A CN 104600007 A CN104600007 A CN 104600007A CN 201510009425 A CN201510009425 A CN 201510009425A CN 104600007 A CN104600007 A CN 104600007A
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- unit
- retractor device
- switching mechanism
- roll
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Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G47/00—Article or material-handling devices associated with conveyors; Methods employing such devices
- B65G47/22—Devices influencing the relative position or the attitude of articles during transit by conveyors
- B65G47/24—Devices influencing the relative position or the attitude of articles during transit by conveyors orientating the articles
- B65G47/248—Devices influencing the relative position or the attitude of articles during transit by conveyors orientating the articles by turning over or inverting them
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G47/00—Article or material-handling devices associated with conveyors; Methods employing such devices
- B65G47/74—Feeding, transfer, or discharging devices of particular kinds or types
- B65G47/90—Devices for picking-up and depositing articles or materials
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
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- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Manipulator (AREA)
Abstract
The invention relates to the technical field of logistics transmission of crystalline silicon solar automatic system, and discloses a turnover mechanism, including a main frame support unit, a turnover unit, an orthogonal motion unit and a grabbing unit. The grabbing unit is used for grabbing a material rest needing to be turned over, the vertical motion unit and the grabbing unit can be turned over for a preset angle by the turnover unit, and thereby the turnover and line-changing of the material rest can be achieved; the motion of the grabbing unit in the vertical direction and the horizontal direction can be achieved by the orthogonal motion unit. Therefore, the turnover mechanism provided by the invention can allow the material rest to quickly turn over in vertical and horizontal directions.
Description
Technical field
The present invention relates to crystal silicon solar automatic system logistics transmission technical field, particularly relate to a kind of on the transmission line can by bin vertical and laterally between carry out the switching mechanism that overturns.
Background technology
Along with global greenhouse effect is day by day serious, the exhaustion day by day of oil, natural gas, coal, environmental protection and energy saving have become the theme of world development.The regenerative resource that solar energy is unlimited as a kind of reserves, clean, safe is the developing direction of global new forms of energy.Under the guidance of national novel energy and regenerative resource industrial policy and under the drive of American-European solar energy market solid demand, domestic solar photovoltaic industry develop rapidly in recent years.At present, China has become solar cell and has manufactured big country, has the maximum manufacture of solar cells producer in the whole world and production capacity over half.
The fast development of solar photovoltaic industry also promotes the flourish of domestic photovoltaic manufacturing equipment industry.It is early stage that solar cell industry develops, and solar battery sheet manufacturing enterprise does not cause the demand to automatic production line, and production line is slapped together by semi-automatic, the automation equipment that isolate substantially.Along with the explosive growth of global solar photovoltaic industry, suitable in order to make field of solar energy unit cost of electricity-generating be reduced to conventional power generation usage cost, solar battery sheet manufacturer more and more an urgent demand can use high integrated, supermatic production line.In future, the height of automaticity will determine that in certain aspect who is only the minimum manufacturer of production cost, and can simply copy in factory subsequently through well-designed and automatic factory's system of high-efficiency operation, and gets out of the red rapidly.Comply with the growth requirement of photovoltaic industry, external solar battery sheet production equipment just by semi-automation to full-automatic, intelligent transition so that improve production efficiency and product quality, reduce production cost.
At present, the chip transmission between each technique unit of crystal silicon solar batteries slice assembly line loads silicon chip with stacking type or card slot type two kinds of modes, then adopts dolly a dead lift.This mode efficiency is low, is unfavorable for large-scale production.But, because the initial stage of crystal silicon solar batteries production line development does not consider full-automatic production, thus various automation interface is not possessed, do not exist and each technique unit can be coupled together self-propagating material transmission system, there is not the automated handling method adapting to this production process yet.
In order to realize full-automatic large-scale production, the chip transmission between each technique unit must adopt automatic transmission system to realize.For this reason, must develop adapt to crystal silicon solar battery sheet automatic production line bin magazine logistic transmission system.Under this industry background, we have developed a series of logistics transmission module, logistic transmission system can be built according to customer demand, provide rapidly different production-scale crystal silicon solar batteries sheet to manufacture whole line automation solution.
Refer to Fig. 1, Fig. 1 is the structural representation of card slot type bin, and in Fig. 1, A indicates bin direct of travel.At equipment interface place, need card slot type bin to be placed on another transmission lines after a transmission lines upset.Silicon chip to be poured into by silicon chip clamping mouth 102 or is poured out the draw-in groove of bin 100 by the reviewing equipment of each technique unit, and the silicon chip 101 realized between process equipment and transmission equipment transmits.When bin 100 enters different reviewing equipment, modes of emplacement is different, and bin needs vertically to place sometimes, and bin 100 needs traverse sometimes, needs bin 100 to overturn between traverse, to meet the requirement of transmission system placing vertically.
Therefore, how quick by bin vertical and laterally between overturn, become the technical barrier that those skilled in the art are urgently to be resolved hurrily.
Summary of the invention
The object of the invention be to provide a kind of on the transmission line can by bin vertical and laterally between carry out the switching mechanism that overturns.
To achieve these goals, the invention provides a kind of switching mechanism, comprising:
Main body frame support unit, for supporting roll-over unit, orthogonal motion unit, placement unit;
Roll-over unit, for driving described orthogonal motion unit and described placement unit to move having between the first station of default angle and the second station, and the two ends of described roll-over unit connect described main body frame support unit and described orthogonal motion unit respectively;
Orthogonal motion unit, for the both direction motion driving described placement unit presetting; The two ends of described orthogonal motion unit connect described roll-over unit and described placement unit respectively;
Placement unit, for capturing the bin needing upset; Described placement unit is fixed on the free end of described orthogonal motion unit.
Preferably, described roll-over unit comprises the first retractor device, returning face plate; One end of described first retractor device is connected with described main body frame support unit, and the other end is connected with one end of described returning face plate, the other end of described returning face plate and the rotatable pivot joint of described main body frame support unit.
Preferably, described first retractor device is connected to by mounting panel inside the upper end of the unit that described main body frame supports.
Preferably, the general frame of described main body frame support unit is fixed with turnover connecting piece, described turnover connecting piece forms rotatable pivot joint by rotating shaft, axle sleeve and bearing and described returning face plate.
Preferably, the end of described rotating shaft is embedded by bearing in the axle head block that is fixedly installed.
Preferably, described orthogonal transportation unit comprises the second retractor device, the 3rd retractor device and L-type supporting bracket; One end of described second retractor device is fixed on described roll-over unit, and the other end is fixed on a side of described L-type supporting bracket; Another side of described L-type supporting bracket is fixed in one end of described 3rd retractor device, and the other end connects described placement unit.
Preferably, also fixed by reinforcement between the body of described 3rd retractor device and described L-type supporting bracket.
Preferably, described placement unit comprises crawl finger, finger contiguous block and parallel air gripper; Described crawl finger is fixed on described finger contiguous block, is driven carry out action by described parallel air gripper; Described parallel air gripper is connected with described 3rd retractor device by grabbing device connecting plate.
Preferably, the quantity of described parallel air gripper is two, and two parallel air grippers are by an electromagnetically operated valve Synchronization Control.
Preferably, the described material capturing finger is polyurethane.
Preferably, described first retractor device, the second retractor device, the 3rd retractor device are hydraulic jack or cylinder.
Preferably, described second retractor device, described 3rd retractor device are sliding desk type cylinder.
Switching mechanism provided by the invention comprises main body frame support unit, roll-over unit, orthogonal motion unit, placement unit.Placement unit needs the bin of upset for capturing, the angle that movement in vertical direction unit and placement unit upset can be made to preset by roll-over unit, realizes upset and the thread-changing of bin; Orthogonal motion unit can realize the motion of placement unit in vertical direction and horizontal direction.Therefore visible, switching mechanism provided by the invention can realize vertically and between transverse direction being overturn by bin fast.
Accompanying drawing explanation
Fig. 1 is a kind of structural representation of bin;
Fig. 2 is the perspective view of a kind of embodiment of switching mechanism provided by the present invention;
Fig. 3 is the left TV structure schematic diagram of switching mechanism in Fig. 2;
Fig. 4 is the right TV structure schematic diagram of switching mechanism in Fig. 2;
Fig. 5 is I place's structure for amplifying schematic diagram in Fig. 4;
Fig. 6 is II place's structure for amplifying schematic diagram in Fig. 3;
Fig. 7 is III place's structure for amplifying schematic diagram in Fig. 4;
Fig. 8 is IV place's structure for amplifying schematic diagram in Fig. 3;
Fig. 9 is the view that bin arrives upturned position;
Figure 10 is the view capturing bin;
Figure 11 is the view of upset bin;
Figure 12 is that bin turn to horizontal view;
Figure 13 is the view of placing bin;
Figure 14 is the view that roll-over unit resets;
Figure 15 is the schematic diagram of roll-over unit when being reset to vertical position.
[in figure Reference numeral]:
Bin 100; Silicon chip 101; Silicon chip clamping mouth 102; Main body frame support unit 1; Roll-over unit 2; Orthogonal motion unit 3; Placement unit 4; General frame 5; First mounting panel 6; Source of the gas processing components 7; Valve island 8; First returning face plate 9; Axle head block 10; Rotating shaft 11; Axle sleeve 12; Bearing 13; Rotating connector 14; Cabling terminal board 15; Second returning face plate 16; Second mounting panel 17; Standard Cylinder 18; First sliding desk type cylinder 19; L-type supporting bracket 20; Second sliding desk type cylinder 21; Reinforcement 22; Capture clamping device connecting plate 23; Parallel air gripper 24; Finger contiguous block 25; Capture finger 26.
Embodiment
For making content of the present invention clearly understandable, below in conjunction with Figure of description, content of the present invention is described further.Certain the present invention is not limited to this specific embodiment, and the general replacement known by those skilled in the art is also encompassed in protection scope of the present invention.Secondly, the present invention's detailed statement that utilized schematic diagram to carry out, when describing example of the present invention in detail, for convenience of explanation, schematic diagram, should in this, as limitation of the invention not according to general ratio partial enlargement.
It should be noted that, in following embodiment, utilize structural representation to carry out detailed statement to by switching mechanism of the present invention.Describe in detail embodiments of the present invention time, for convenience of explanation, each schematic diagram not according to general scale and carried out partial enlargement and omit process, therefore, should avoid in this, as limitation of the invention.
Please refer to Fig. 2 to Fig. 4, Fig. 2 is the perspective view of a kind of embodiment of switching mechanism provided by the present invention, and Fig. 3 is the left TV structure schematic diagram of switching mechanism in Fig. 2, and Fig. 4 is the right TV structure schematic diagram of switching mechanism in Fig. 2.
As shown in Figures 2 to 4, switching mechanism provided by the invention, comprises main body frame support unit 1, roll-over unit 2, orthogonal motion unit 3, placement unit 4.
Main body frame support unit 1 is for supporting roll-over unit 2, orthogonal motion unit 3, placement unit 4; Roll-over unit 2, move having between the first station of default angle and the second station for driving described orthogonal motion unit 3 and described placement unit 4, and the two ends of described roll-over unit 2 connect described main body frame support unit 1 and described orthogonal motion unit 3 respectively, in concrete scheme, first station and the second station can be respectively position that is vertical and that laterally place, angle between two stations can be arranged arbitrarily according to actual needs, such as 87 °, 93 ° etc.; Orthogonal motion unit 3, for the both direction motion driving described placement unit 4 presetting; The two ends of described orthogonal motion unit 3 connect described roll-over unit 2 and described placement unit 4 respectively; Placement unit 4, for capturing the bin 100 needing upset; Described placement unit 4 is fixed on the free end of described orthogonal motion unit 3.
Switching mechanism provided by the invention comprises main body frame support unit 1, roll-over unit 2, orthogonal motion unit 3, placement unit 4.Placement unit 4 needs the bin 100 of upset for capturing, movement in vertical direction unit and placement unit 4 can be made to overturn the angle preset, realize upset and the thread-changing of bin 100 by roll-over unit 2; Orthogonal motion unit 3 can realize the motion of placement unit 4 in vertical direction and horizontal direction.Therefore visible, switching mechanism provided by the invention can realize vertically and between transverse direction being overturn by bin 100 fast.
In concrete execution mode, main body frame support unit 1 comprises general frame 5, source of the gas processing components 7, valve island 8 and the first mounting panel 6.General frame 5 can be formed by connecting by extruding aluminum corner brace by heavy aluminium section bar, and can be fastenedly connected with external equipment; First mounting panel 6 to be arranged on general frame 5, it is fixed with source of the gas processing components 7 and valve island 8.
Concrete, roll-over unit 2 comprises the first retractor device, the second returning face plate 16; First retractor device can adopt hydraulic jack or cylinder, and the present embodiment is for Standard Cylinder.One end of first retractor device is connected with described main body frame support unit 1, and the other end is connected with one end of described second returning face plate 16, the other end of described second returning face plate 16 and the rotatable pivot joint of described main body frame support unit 1.
In addition, described first retractor device is also connected to by the second mounting panel 17 inside the upper end of general frame 5 of the unit that described main body frame supports.
In the present embodiment, the general frame of described main body frame support unit 1 is fixed with turnover connecting piece 14, described turnover connecting piece 14 forms rotatable pivot joint by rotating shaft 11, axle sleeve 12 and bearing 13 with described second returning face plate 16.As shown in Figure 5, rotating connector 14 is fixed on general frame 5, and two ends can coordinate with the deep groove ball bearing of band dust cap, and rotating shaft 11, through bearing 13, avoids rotating shaft 11 directly to coordinate with rotating connector 14, reduces the wearing and tearing of rotating shaft 11 and rotating connector 14.Rotating shaft 11 one end embeds in the second returning face plate 16, in other end embedded axle terminal block block 10.The end face that returning face plate 2 is corresponding with rotating connector 14 and axle head block 10 end face corresponding with rotating connector 14 respectively add an axle sleeve, prevent axial endplay.Standard Cylinder is fixed on the second returning face plate 16 by its connector one end, and the other end is connected with mounting panel second mounting panel 17, and the second mounting panel 17 is fixed on general frame 5.
As shown in Figure 6, for the ease of fixing cabling terminal board 15, second returning face plate 16 is connected with the first returning face plate 9, described cabling terminal board 15 is fixed on the first returning face plate 9.
In order to prevent Standard Cylinder from original position can be kept when originating from and dying suddenly, in order to avoid security incident occurs, exhaust shutter and unidirectional valve can be set in the control gas circuit of Standard Cylinder.
In the present embodiment, described orthogonal transportation unit comprises the second retractor device, the 3rd retractor device and L-type supporting bracket 20, in concrete scheme, second retractor device, the 3rd retractor device can adopt hydraulic jack or cylinder, in the present embodiment, described second retractor device, described 3rd retractor device are small-sized sliding desk type cylinder, are respectively the first sliding desk type cylinder 19 and the second sliding desk type cylinder 21.
As shown in Figure 8, one end of described first sliding desk type cylinder 19 is fixed on described roll-over unit 2, and the other end is fixed on a side of described L-type supporting bracket 20; Another side of described L-type supporting bracket 20 is fixed in one end of described second sliding desk type cylinder 21, and the other end connects described placement unit 4.
In order to improve the second sliding desk type cylinder 21 and the rigidity be connected between L-type supporting bracket 20, also fixed by reinforcement 22 between the body of the second sliding desk type cylinder 21 and described L-type supporting bracket 20.
As shown in Figure 7, described placement unit 4 comprises crawl finger 26, finger contiguous block 25 and parallel air gripper 24; Described crawl finger 26 is fixed on described finger contiguous block 25, is driven carry out action by described parallel air gripper 24; Described parallel air gripper 24 is connected with described 3rd retractor device by grabbing device connecting plate 23.
In the present embodiment, clamp bin about 100 two ends to realize synchronous crawl, the quantity of described parallel air gripper 24 is two, and two parallel air grippers 24 are by an electromagnetically operated valve Synchronization Control.
In order to reduce to capture the collision between finger 26 and bin 100, the material of described crawl finger 26 can adopt polyurethane.
Simply introduce below in conjunction with the operation principle of accompanying drawing to the switching mechanism provided in above-described embodiment.
Please refer to Fig. 9 to Figure 15, Fig. 9 is the view that bin 100 arrives upturned position; Figure 10 is the view capturing bin 100; Figure 11 is the view of upset bin 100; Figure 12 is that bin 100 turn to horizontal view; Figure 13 is the view of placing bin 100; Figure 14 is the view that roll-over unit 2 resets; Figure 15 is the schematic diagram of roll-over unit 2 when being reset to vertical position.
As shown in Figure 9, in figure, B indicates bin direct of travel, and under initial condition, the Standard Cylinder of switching mechanism, the second sliding desk type cylinder 21 and parallel air gripper 24 are in contraction state, and the first sliding desk type cylinder 19 is in the state of stretching out.When bin 100 is transferred to flip bit by conveyer, the bin 100 on conveyer detects signal to level sensor, and now transport tape is out of service.
As shown in Figure 10, in figure, C indicates parallel air gripper 24 to open, and D indicates the first sliding desk type cylinder 19 to shrink, and E indicates the second sliding desk type cylinder 21 to stretch out; First sliding desk type cylinder 19 of orthogonal motion unit 3 shrinks, and the second sliding desk type cylinder 21 stretches out, thus drives placement unit 4 near bin 100, and the parallel air gripper 24 of last placement unit 4 opens, and makes to capture finger 26 and clamps bin 100.
As shown in Figure 11, Figure 12, in Figure 11, F indicates the first sliding desk type cylinder 19 to stretch out, and in Figure 12, G indicates Standard Cylinder to stretch out; First sliding desk type cylinder 19 of orthogonal motion unit 3 stretches out, and drive bin 100 to leave transport tape, then the Standard Cylinder of roll-over unit 2 is stretched out.Drive orthogonal motion unit 3 and placement unit 4 to overturn, till the proximity switch on Standard Cylinder detects that cylinder is elongated to extreme position, thus drive the bin 100 captured on finger 26 to turn to landscape positions.
As shown in figure 13, in figure, H indicates parallel air gripper 24 to shrink, and E indicates the second sliding desk type cylinder 21 to shrink; Parallel air gripper 24 on placement unit 4 shrinks, and drive crawl finger 26 to unclamp bin 100, thus bin 100 is placed on another transport tape, completes bin 100 from vertically placing the upset thread-changing campaign becoming traverse.
As shown in Figure 14, Figure 15, in Figure 14, I indicates Standard Cylinder to shrink, and in Figure 15, B indicates bin direct of travel; The Standard Cylinder of roll-over unit 2 is contracted to initial position, drives orthogonal motion unit 3 and placement unit 4 to overturn simultaneously.Now the position of placement unit 4 becomes vertically, thus the mechanism completing switching mechanism degree resets, and the turning next bin 100 of mechanism, is placed on the bin 100 on cross conveyor, according to demand can two to transmission.
In addition, it should be noted that, unless stated otherwise or point out, otherwise the term " first " in specification, " second ", " the 3rd " etc. describe only for distinguishing each assembly, element, step etc. in specification, instead of for representing logical relation between each assembly, element, step or ordinal relation etc.
Be understandable that, although the present invention with preferred embodiment disclose as above, but above-described embodiment and be not used to limit the present invention.For any those of ordinary skill in the art, do not departing under technical solution of the present invention ambit, the technology contents of above-mentioned announcement all can be utilized to make many possible variations and modification to technical solution of the present invention, or be revised as the Equivalent embodiments of equivalent variations.Therefore, every content not departing from technical solution of the present invention, according to technical spirit of the present invention to any simple modification made for any of the above embodiments, equivalent variations and modification, all still belongs in the scope of technical solution of the present invention protection.
Claims (12)
1. a switching mechanism, is characterized in that, comprising:
Main body frame support unit, for supporting roll-over unit, orthogonal motion unit, placement unit;
Roll-over unit, for driving described orthogonal motion unit and described placement unit to move having between the first station of default angle and the second station, and the two ends of described roll-over unit connect described main body frame support unit and described orthogonal motion unit respectively;
Orthogonal motion unit, for the both direction motion driving described placement unit presetting; The two ends of described orthogonal motion unit connect described roll-over unit and described placement unit respectively; And,
Placement unit, for capturing the bin needing upset; Described placement unit is fixed on the free end of described orthogonal motion unit.
2. switching mechanism according to claim 1, is characterized in that, described roll-over unit comprises the first retractor device and returning face plate; One end of described first retractor device is connected with described main body frame support unit, and the other end is connected with one end of described returning face plate, the other end of described returning face plate and the rotatable pivot joint of described main body frame support unit.
3. switching mechanism according to claim 2, is characterized in that, described first retractor device is connected to inside the upper end of the unit that described main body frame supports by mounting panel.
4. switching mechanism according to claim 2, is characterized in that, the general frame of described main body frame support unit is fixed with turnover connecting piece, and described turnover connecting piece forms rotatable pivot joint by rotating shaft, axle sleeve and bearing and described returning face plate.
5. switching mechanism according to claim 4, is characterized in that, the end of described rotating shaft is embedded by bearing in the axle head block that is fixedly installed.
6. switching mechanism according to claim 1, is characterized in that, described orthogonal transportation unit comprises the second retractor device, the 3rd retractor device and L-type supporting bracket; One end of described second retractor device is fixed on described roll-over unit, and the other end is fixed on a side of described L-type supporting bracket; Another side of described L-type supporting bracket is fixed in one end of described 3rd retractor device, and the other end connects described placement unit.
7. switching mechanism according to claim 6, is characterized in that, is also fixed by reinforcement between the body of described 3rd retractor device and described L-type supporting bracket.
8. switching mechanism according to claim 6, is characterized in that, described placement unit comprises crawl finger, finger contiguous block and parallel air gripper; Described crawl finger is fixed on described finger contiguous block, is driven carry out action by described parallel air gripper; Described parallel air gripper is connected with described 3rd retractor device by grabbing device connecting plate.
9. switching mechanism according to claim 8, is characterized in that, the quantity of described parallel air gripper is two, and two parallel air grippers are by an electromagnetically operated valve Synchronization Control.
10. switching mechanism according to claim 8, is characterized in that, the described material capturing finger is polyurethane.
11. switching mechanisms according to claim 6, is characterized in that, described second retractor device, the 3rd retractor device are hydraulic jack or cylinder.
12. switching mechanisms according to claim 6, is characterized in that, described second retractor device, described 3rd retractor device are sliding desk type cylinder.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510009425.3A CN104600007B (en) | 2015-01-08 | 2015-01-08 | A kind of switching mechanism |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510009425.3A CN104600007B (en) | 2015-01-08 | 2015-01-08 | A kind of switching mechanism |
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| CN104600007A true CN104600007A (en) | 2015-05-06 |
| CN104600007B CN104600007B (en) | 2018-05-29 |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104600007B (en) * | 2015-01-08 | 2018-05-29 | 北京北方华创微电子装备有限公司 | A kind of switching mechanism |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1646001A (en) * | 2005-01-28 | 2005-07-27 | 广辉电子股份有限公司 | Carsette turning over and positioning device |
| CN204303771U (en) * | 2015-01-08 | 2015-04-29 | 北京七星华创电子股份有限公司 | A kind of switching mechanism |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN104600007B (en) * | 2015-01-08 | 2018-05-29 | 北京北方华创微电子装备有限公司 | A kind of switching mechanism |
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2015
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Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1646001A (en) * | 2005-01-28 | 2005-07-27 | 广辉电子股份有限公司 | Carsette turning over and positioning device |
| CN204303771U (en) * | 2015-01-08 | 2015-04-29 | 北京七星华创电子股份有限公司 | A kind of switching mechanism |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104600007B (en) * | 2015-01-08 | 2018-05-29 | 北京北方华创微电子装备有限公司 | A kind of switching mechanism |
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