CN104597841B - System and method for compensating planeness of compact field plane scanning frame - Google Patents
System and method for compensating planeness of compact field plane scanning frame Download PDFInfo
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- CN104597841B CN104597841B CN201410790156.4A CN201410790156A CN104597841B CN 104597841 B CN104597841 B CN 104597841B CN 201410790156 A CN201410790156 A CN 201410790156A CN 104597841 B CN104597841 B CN 104597841B
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- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
- G05B19/00—Programme-control systems
- G05B19/02—Programme-control systems electric
- G05B19/18—Numerical control [NC], i.e. automatically operating machines, in particular machine tools, e.g. in a manufacturing environment, so as to execute positioning, movement or co-ordinated operations by means of programme data in numerical form
- G05B19/404—Numerical control [NC], i.e. automatically operating machines, in particular machine tools, e.g. in a manufacturing environment, so as to execute positioning, movement or co-ordinated operations by means of programme data in numerical form characterised by control arrangements for compensation, e.g. for backlash, overshoot, tool offset, tool wear, temperature, machine construction errors, load, inertia
Abstract
The invention discloses system and method for compensating planeness of a compact field plane scanning frame. The system comprises a laser plane emitter for enabling emitted laser beams to form a laser plane by a self-rotating manner, a position-sensitive detector for detecting the position deviation of the laser plane and a zero position at the self-sensing area on real time and sending to a controller, the controller for generating driving current according to the position deviation to drive a servo compensator, and the servo compensator for driving the position-sensitive detector to jointly adjust the position to perform closed-loop control compensation for the planeness error of the scanning frame on real time. According to the technical scheme, the system has the advantages that the closed-loop control strategy is utilized to dynamically compensate the tail end of a scanning surface, and therefore, the problem of planeness error of the scanning plane caused by mechanical deviation due to the influences from mechanical processing, assembling precision, temperature, environmental vibration, gravity and other factors when the compact field plane scanning frame is in a complex environment or the testing cycle is relatively long, can be solved.
Description
Technical field
The present invention relates to a kind of real-time planar degree compensation system.More particularly, to a kind of Compact Range flat scanning frame
Flatness compensation system and method.
Background technology
The flatness of the plane microwave that Compact Range is formed is to evaluate an important indicator of Compact Range performance, Compact Range plane
Scanning support is the special equipment for measuring the index.With the continuous development of science and technology, the microwave that Compact Range is formed is put down
Face area is increasing, index more and more higher, and this just directly scans the flat of the test plane to be formed to Compact Range flat scanning frame
Face degree index is put forward higher requirement.
The spacescan plane conduct that current Compact Range flat scanning frame is typically formed through mechanical movement using equipment
Test plane, by microwave amplitude and the phase place of each point in point-to-point measurement plane, judges whether Compact Range reaches necessary requirement.
Adopt metal structure more large-scale scanning support, easily a certain degree of deformation is produced by reasons such as temperature, ambient vibration, gravity, merely
By machining and assembly precision it is difficult to ensure which forms the flatness in spacescan face.
To flatness by the way of semireal time more than current flatness compensation method, i.e., by dynamic scan state
Under, the actual coordinate value popped one's head in each sampled point is measured by laser system, then by the VEC set up, is given
The coordinate modification value (or offset) of each point, resettles complete error correction table.When microwave planar degree index measurement is carried out,
The errors table that real-time calling has been stored, is corrected in real time to the coordinate of place anchor point.But, environment larger for size it is complicated or
Person's test process cycle longer Compact Range flat scanning frame, the actual conditions of scanning support may be with meter with time or environmental change
State being inscribed when calculating correction chart large change occurring, said method is difficult to ensure that compensation effect.Thus, it is to ensure test result
Accuracy, under this kind of state, needs to carry out real-time dynamic compensation to scanning plane flatness error.
Accordingly, it is desirable to provide a kind of flatness compensation system of Compact Range flat scanning frame and method.
The content of the invention
It is an object of the present invention to provide a kind of flatness compensation system of Compact Range flat scanning frame.
Further object is that providing a kind of flatness compensation method of Compact Range flat scanning frame.
For reaching above-mentioned purpose, the present invention adopts following technical proposals：
A kind of flatness compensation system of Compact Range flat scanning frame, the system include：Laser plane transmitter, position are quick
Sense detector PSD, controller and servo compensator；
Laser plane transmitter, for utilizing the laser beam for making transmitting in the way of itself polarized rotation to be formed perpendicular to tight
The laser plane in reduction field microwave propagation direction；
Position-Sensitive Detector PSD is arranged on servo compensator, and makes connecing for the induction zone of Position-Sensitive Detector PSD
To parallel with laser plane and vertical with the reception direction of scanning support antenna probes, Position-Sensitive Detector PSD is used for leading to debit
Position relationship of the induction zone detection with laser plane of its own is crossed, and the position deviation of generation is sent to controller；
Controller, drives servo compensator for generating driving current according to position deviation；
Servo compensator is arranged on scanning support cantilever and link position sensing detector PSD and scanning support antenna probes,
For driving Position-Sensitive Detector PSD and scanning support antenna probes to be synchronized with the movement, complete to scanning Compact Range flat scanning frame
The closed-loop control compensation of flatness.
Preferably, controller includes：Industrial computer, motion control device and output control device；
Industrial computer, for receiving position deviation, generates control instruction according to position deviation and sends control instruction to fortune
Dynamic control device；
Motion control device, for generating control signal according to control instruction and transmitting the signal to Power Control dress
Put；
Output control device, drives servo compensator for generating driving current according to control signal.
Preferably, servo compensator includes：Antenna polarization device and feeding compensation device；
Antenna polarization device is arranged on feeding compensation device and link position sensing detector PSD and scanning support antenna are visited
Head, for driving Position-Sensitive Detector PSD and scanning support antenna probes in the direction synchronization pole parallel to the laser plane
Change rotation, it is to avoid cause laser beam to be blocked because Position-Sensitive Detector PSD follows the rotation of Compact Range flat scanning frame, it is sensitive
Detector PSD induction zones can not receive the problem of laser plane；
Feeding compensation device, for driving antenna polarization device, Position-Sensitive Detector PSD and scanning support antenna probes to exist
Move along a straight line perpendicular to the direction of the laser plane.
Preferably, servo compensator also includes：Fittable slackening device, supports for constituting omnidirectional to servo compensator.
A kind of such as flatness compensation method of the Compact Range flat scanning frame of system above, the method comprise the steps：
S1, laser plane transmitter is made into polarized rotation so as to which the laser beam of transmitting forms laser plane；
S2, the position of adjustment laser plane transmitter and launch angle so as to which polarized rotation is with Compact Range microwave propagation side
To for axle, and make the laser plane which produces vertical with Compact Range microwave propagation direction；
The position of the Position-Sensitive Detector PSD of S3, adjustment on servo compensator and receiving angle, make position quick
The reception direction of sense detector PSD induction zones is parallel with laser plane and vertical with the reception direction of scanning support antenna probes, and
Induction zone real-time reception is enable to laser plane；
S4, the built-in optical imaging system using Position-Sensitive Detector PSD induction zones by Position-Sensitive Detector PSD
Real-time detection simultaneously generates position deviation, and position deviation is sent to controller；
S5, using controller according to the position deviation generate driving current drive servo compensator；
S6, drive using servo compensator Position-Sensitive Detector PSD and scanning support antenna probes to be synchronized with the movement, complete right
The closed-loop control compensation of scanning Compact Range flat scanning frame flatness.
Preferably, step S5 further includes following sub-step：
Using industrial computer receiving position deviation, control instruction is generated according to position deviation and control instruction is sent to motion
Control device；
Control signal is generated according to control instruction using motion control device and output control device is transmitted the signal to；
Driving current is generated according to control signal using output control device and drives servo compensator.
Preferably, step S6 further includes following sub-step：
Position-Sensitive Detector PSD and scanning support antenna probes are driven parallel to the laser using antenna polarization device
The direction synchronous polarization rotation of plane；
Position-Sensitive Detector PSD, antenna polarization device and scanning support antenna probes are driven to exist using feeding compensation device
Perpendicular to the direction synchronous linear motion of the laser plane.
Beneficial effects of the present invention are as follows：
Present invention aim to address Compact Range flat scanning frame is operated in, environment is complicated or the test process cycle is longer
In the case of, it is machined, the factor such as assembly precision, temperature, ambient vibration, gravity affects to cause mechanical deformation, caused
There is flatness error in the plane of scanning motion.Technical scheme of the present invention, as which adopts Closed-loop Control Strategy, to scanning
Face end carries out dynamic compensation, can eliminate the flatness error problem that mechanical deformation etc. is caused.Simultaneously by described in invention
Laser plane transmitter and Position-Sensitive Detector PSD, can also real-time direct measurement out position sensing detector PSD and laser
The position deviation of plane, and avoid due to measuring indirectly the calculation error brought.By practical application measurement data, using this
After bright described technical scheme is compensated, the scanning plane flatness error of Compact Range flat scanning frame can ensure 0.05mm with
It is interior.
Description of the drawings
Below in conjunction with the accompanying drawings the specific embodiment of the present invention is described in further detail.
Fig. 1 illustrates the flatness compensation system composition figure of Compact Range flat scanning frame.
Fig. 2 illustrates the induction zone relation schematic diagram of laser plane and Position-Sensitive Detector PSD.
Fig. 3 illustrates Position-Sensitive Detector PSD schematic diagrames.
Fig. 4 illustrates servo compensator schematic diagram in the flatness compensation system of Compact Range flat scanning frame.
Fig. 5 illustrates the flatness compensation system signal flow graph of Compact Range flat scanning frame.
Fig. 6 illustrates the flatness compensation method flow chart of Compact Range flat scanning frame.
Specific embodiment
In order to be illustrated more clearly that the present invention, the present invention is done further with reference to preferred embodiments and drawings
It is bright.In accompanying drawing, similar part is indicated with identical reference.It will be appreciated by those skilled in the art that institute is concrete below
The content of description is illustrative and be not restrictive, and should not be limited the scope of the invention with this.
As shown in figure 1, the flatness compensation system of the Compact Range flat scanning frame of the present embodiment offer includes laser plane
Transmitting equipment 1, Position-Sensitive Detector PSD2, controller 3 and servo compensator 4, its annexation are as follows with working method：
Laser plane transmitting equipment 1 is fixed on the ground, and which makes the laser beam launched produce one by itself rotation
Laser plane 5, using this laser plane 5 as a reference plane.
As shown in Fig. 2 14 microwave reflection 9 of microwave reflection face is to scanning support, and direction is invariable.Put down by adjusting laser
The angles and positions of surface launching equipment 1 so as to which the laser plane 5 of generation is parallel with microwave reflection face 14, i.e. laser plane 5 with it is micro-
Ripple arrival bearing is vertical, and scanning support antenna probes 7 are received vertically penetrates the microwave for coming, and ideally scanning support antenna probes 7 exist
Move in the space plane parallel with microwave reflection face 14, the microwave for coming vertically is penetrated in reception.
Servo compensator 4 is arranged on the line slideway of the spiral arm of scanning support 6, and during 6 normal work of scanning support, spiral arm does and revolves
Transhipment is dynamic, drives servo compensator 4 to move together.Meanwhile, servo compensator 4 can be done along the line slideway of the spiral arm of scanning support 6
Linear motion.Therefore, servo compensator 4 can reach any point that scanning support scans out plane.Scanning support antenna probes 7 are fixed
On servo compensator 4, according to testing requirement, scanning support 6 and 4 routing motion of servo compensator, drive antenna to reach space and put down
Diverse location in face carries out dependence test.
Position-Sensitive Detector PSD2 is fixed on servo compensator 4, and adjusting servo compensator 4 makes laser plane 5
The induction zone of Position-Sensitive Detector PSD2, the sensing of laser plane 5 and Position-Sensitive Detector PSD2 are irradiated in real time can
Cell relation is as shown in Figure 2.
As shown in figure 3,8 centre position of Position-Sensitive Detector PSD2 induction zones is induction zone zero-bit 10.Laser plane 5 is swept
When crossing Position-Sensitive Detector PSD2 induction zones 8, built-in optical imaging system of the induction zone 8 by Position-Sensitive Detector PSD
Real-time detection simultaneously generates the irradiation position of laser plane and the distance and position deviation of induction zone zero-bit, if irradiation position is quick in position
Sense detector PSD induction zones zero-bit 10, then position deviation is 0, i.e. parallel plane of the scanning support antenna probes in laser plane 5
On；If irradiation position deviates induction zone zero-bit 10, the position deviation that Position-Sensitive Detector PSD2 is generated, i.e. scanning support antenna
Probe plane-parallel position deviation of the current location away from laser plane 5.
Position deviations of the Position-Sensitive Detector PSD2 by serial communication by antenna in diverse location with laser plane 5
Sent to controller 3 in real time；
Controller 3 includes：Industrial computer, motion control device and output control device.Industrial computer completes location sensitive spy
The reception that device PSD2 transmits data is surveyed, is processed and control instruction output；Motion control device mainly completes the pole of servo compensator 4
Change the Motion trajectory that axle and straight line compensate axle, and generate corresponding control signal and pass to output control device；Power Control
Device generates driving current, drives servo compensator 4 to move, and completes flatness compensation.
Industrial computer serial communication is set to into baud rate 19200, no parity check position, 8 data bit, 1 stop position.
Industrial computer is by serial communication with including that the communication speed receiving position sensing detector PSD2 of 250ms sends out
The packet of flatness error information, packet the 9th, 10 include position deviation information, and the 9th, 10 bit value of setting is respectively
A, b, then physical location deviation analytical Calculation is as follows：
C=a+b*256
If c≤32767, position deviation p=c*0.0005；
If c ＞ 32767, position deviation p=(c-65536) * 0.0005.
After industrial computer receives position deviation, control instruction is generated according to position deviation and is sent to motion control device.Fortune
Dynamic control device generates control signal and passes to output control device.Output control device generates driving current, drives servo to mend
Repay device 4 and complete real-Time Compensation.
As shown in figure 4, servo compensator includes：Antenna polarization device 11, feeding compensation device 12, fittable slackening device
13；Wherein scanning support antenna probes 7 and Position-Sensitive Detector PSD2 are installed on antenna polarization device 11, antenna polarization dress
Put 11 to be arranged on feeding compensation device 12, feeding compensation device 12 is arranged on fittable slackening device 13, fittable slackening device
13 are arranged on scanning support cantilever, and antenna polarization device 11 is mainly used in driving Position-Sensitive Detector PSD and scanning support antenna
Pop one's head in the direction synchronous polarization rotation parallel to the laser plane, it is to avoid because Position-Sensitive Detector PSD follows Compact Range
Flat scanning frame rotates and causes laser beam to be blocked, and sensing detector PSD induction zones can not receive the problem of laser plane；Enter
Antenna polarization device 11, Position-Sensitive Detector PSD2 and scanning support antenna probes 7 are driven perpendicular to sharp to compensation device 12
The direction linear motion of optical plane 5, carries out flatness compensation；Fittable slackening device 13 coordinates two groups using octagon cylindrical structure
Totally four guide rail slide block components constitute omnidirectional to servo compensator and support.
Position-Sensitive Detector PSD2 is arranged on the antenna polarization device 11 of servo compensator 4, when servo compensator 4 pairs
When a certain position plane degree error is compensated, Position-Sensitive Detector PSD2 can be filled with feeding compensation device 12, antenna polarization
Put 11 and scanning support antenna probes 7 be synchronized with the movement, it is ensured that the space phase of Position-Sensitive Detector PSD2 and scanning support antenna probes 7
It is constant to position.With the carrying out of compensation, the position of 5 inswept Position-Sensitive Detector PSD2 induction zones of laser plane levels off to sense
Area's zero-bit, Position-Sensitive Detector PSD2 is answered to pass to the position deviation of controller 3 and accordingly reduce, the control servo of controller 3 is mended
The position command for repaying device 4 accordingly changes, and finally makes the flatness of antenna probes place plane meet testing requirement, completes to scanning
The real-time closed-loop control compensation of Compact Range flat scanning frame flatness.
The flatness compensation method of the Compact Range flat scanning frame that the present embodiment is provided, comprises the steps：
S1, laser plane transmitter is made into polarized rotation so as to which the laser beam of transmitting forms laser plane；
S2, the position of adjustment laser plane transmitter and launch angle so as to which polarized rotation is passed with tightening flat field microwave
It is axle to broadcast direction, and makes the laser plane of its generation vertical with Compact Range microwave propagation direction；
The position of the Position-Sensitive Detector PSD of S3, adjustment on servo compensator and receiving angle, make position quick
The reception direction of sense detector PSD induction zones is parallel with laser plane and vertical with the reception direction of scanning support antenna probes, and
Induction zone real-time reception is enable to laser plane；
S4, the built-in optical imaging system using Position-Sensitive Detector PSD induction zones by Position-Sensitive Detector PSD
Real-time detection simultaneously generates position deviation, and position deviation is sent to controller；
S5, compensating control signal is generated according to position deviation using controller, and compensating control signal is sent to servo
Compensator, the detailed process of the step are as follows：
Using industrial computer receiving position deviation, control instruction is generated according to position deviation and control instruction is sent to motion
Control device；
Control signal is generated according to control instruction using motion control device and output control device is transmitted the signal to；
Driving current is generated according to control signal using output control device and drives servo compensator；
S6, drive using servo compensator Position-Sensitive Detector PSD and scanning support antenna probes to be synchronized with the movement, complete right
The closed-loop control compensation of scanning Compact Range flat scanning frame flatness, the detailed process of the step are as follows：
Position-Sensitive Detector PSD and scanning support antenna probes are driven parallel to laser plane using antenna polarization device
The rotation of direction synchronous polarization, make sensing detector PSD induction zones receive laser plane at an arbitrary position；
Antenna polarization device, Position-Sensitive Detector PSD and scanning support antenna probes are driven to exist using feeding compensation device
Move along a straight line perpendicular to the direction of laser plane, complete the closed-loop control compensation to scanning Compact Range flat scanning frame flatness.
In sum, technical scheme of the present invention, by controller and Compact Range flat scanning frame flatness compensator
The mode of closed-loop control is formed, can effectively overcome scanning support structure to be machined, assembly precision, temperature, ambient vibration, weight
The factors such as power affect to cause mechanical deformation, the flatness error problem of the caused plane of scanning motion；Meanwhile, launched by laser plane
Device and Position-Sensitive Detector PSD, direct measurement can go out non-physical plane that Compact Range flat scanning frame is scanned in real time
Flatness error, than by way of the final Calculation Plane degree of indirect measurement systems parameter, reducing measurement and calculating link
Error, more accurately reflects System planes degree error level；And, the present invention adopts Real-time compensation control method, in real time
The mode of dynamic compensation flatness error, carries out the advantage of flatness compensation system and is than the mode of semireal time：Can overcome and work as
It is complicated or in the case that the test process cycle is longer that Compact Range flat scanning frame is operated in environment, the actual shape of scanning frame for compact antenna test range
State may change with before, cause physical plane degree error and early stage by survey calculation to error correction table be not inconsistent
Problem.
Obviously, the above embodiment of the present invention is only intended to clearly illustrate example of the present invention, and is not to this
The restriction of the embodiment of invention, for those of ordinary skill in the field, on the basis of the above description can be with
Make other changes in different forms, all of embodiment cannot be exhaustive here, it is every to belong to the present invention
Technical scheme it is extended obvious change or change still in protection scope of the present invention row.
Claims (6)
1. a kind of flatness compensation system of Compact Range flat scanning frame, it is characterised in that the system includes：Laser plane is launched
Device, Position-Sensitive Detector PSD, controller and servo compensator；
Laser plane transmitter is flat perpendicular to tightening for utilizing the laser beam for making transmitting in the way of itself polarized rotation to be formed
The laser plane in face field microwave propagation direction；
Position-Sensitive Detector PSD is arranged on servo compensator, and makes the recipient of the induction zone of Position-Sensitive Detector PSD
To parallel with laser plane and vertical with the reception direction of scanning support antenna probes, Position-Sensitive Detector PSD is used for by which
The induction zone detection of itself and the position relationship of the laser plane, and the position deviation of generation is sent to controller；
Controller, drives servo compensator for generating driving current according to the position deviation；
Servo compensator is arranged on scanning support cantilever and link position sensing detector PSD and scanning support antenna probes, is used for
Drive Position-Sensitive Detector PSD and scanning support antenna probes to be synchronized with the movement, complete the flatness to Compact Range flat scanning frame
Real-Time Compensation；
The servo compensator includes：Antenna polarization device and feeding compensation device；
Antenna polarization device is arranged on feeding compensation device and link position sensing detector PSD and scanning support antenna probes,
For driving Position-Sensitive Detector PSD and scanning support antenna probes in the direction synchronous polarization rotation parallel to the laser plane
Turn；
Feeding compensation device, for driving antenna polarization device, Position-Sensitive Detector PSD and scanning support antenna probes vertical
In the direction synchronous linear motion of the laser plane.
2. the flatness compensation system of Compact Range flat scanning frame according to claim 1, it is characterised in that the control
Device includes：Industrial computer, motion control device and output control device；
Industrial computer, for receiving position deviation, generates control instruction according to position deviation and sends control instruction to motion control
Device processed；
Motion control device, for generating control signal according to control instruction and sending control signals to output control device；
Output control device, drives servo compensator for generating driving current according to control signal.
3. the flatness compensation system of Compact Range flat scanning frame according to claim 1, it is characterised in that the servo
Compensator also includes：Fittable slackening device, supports for constituting omnidirectional to the servo compensator.
4. a kind of flatness compensation method of the Compact Range flat scanning frame of the system as described in any one of claim 1-3, which is special
Levy and be, the method comprises the steps：
S1, laser plane transmitter is made into polarized rotation so as to which the laser beam of transmitting forms laser plane；
S2, the position of adjustment laser plane transmitter and launch angle so as to which polarized rotation is tightening flat field microwave propagation side
To for axle, and make the laser plane which produces vertical with Compact Range microwave propagation direction；
The position of the Position-Sensitive Detector PSD of S3, adjustment on servo compensator and receiving angle, make the position quick
The reception direction of sense detector PSD induction zones is parallel with laser plane and vertical with the reception direction of scanning support antenna probes, and
The induction zone real-time reception is enable to the laser plane；
It is S4, real-time by the built-in optical imaging system of Position-Sensitive Detector PSD using Position-Sensitive Detector PSD induction zones
Position deviation is detected and generated, and position deviation is sent to controller；
S5, using controller according to the position deviation generate driving current drive servo compensator；
S6, drive using servo compensator Position-Sensitive Detector PSD and scanning support antenna probes to be synchronized with the movement, complete to tightening
The real-Time Compensation of the flatness of field flat scanning frame.
5. the flatness compensation method of Compact Range flat scanning frame according to claim 4, it is characterised in that the step
S5 further includes following sub-step：
Using industrial computer receiving position deviation, control instruction is generated according to position deviation and control instruction is sent to motion control
Device；
Control signal is generated according to control instruction using motion control device and output control device is transmitted the signal to；
Driving current is generated according to control signal using output control device and drives servo compensator.
6. the flatness compensation method of Compact Range flat scanning frame according to claim 4, it is characterised in that the step
S6 further includes following sub-step：
Position-Sensitive Detector PSD and scanning support antenna probes are driven parallel to the laser plane using antenna polarization device
The rotation of direction synchronous polarization；
Position-Sensitive Detector PSD, antenna polarization device and scanning support antenna probes are driven vertical using feeding compensation device
In the direction synchronous linear motion of the laser plane.
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| CN105607046B (en) * | 2015-12-22 | 2018-03-06 | 北京无线电计量测试研究所 | A kind of large-scale scanning frame for compact antenna test range and test system |
| CN107884742B (en) * | 2017-11-10 | 2021-10-01 | 中国航空工业集团公司西安飞机设计研究所 | Method for installing high-flatness antenna array of airplane and antenna array installation plate |
| CN108287968B (en) * | 2018-01-29 | 2021-09-10 | 广东曼克维通信科技有限公司 | Method, device and system for measuring and calculating parallelism of antenna aperture and scanning frame |
| CN108802501A (en) * | 2018-04-19 | 2018-11-13 | 北京无线电计量测试研究所 | A kind of Compact Range scanning means |
| CN108828347B (en) * | 2018-04-24 | 2020-07-31 | 青岛中电绿网新能源有限公司 | Electronic circuit EMI sensitive area positioning measurement system and positioning measurement method based on near-far field transformation algorithm |
| CN108710033A (en) * | 2018-05-27 | 2018-10-26 | 南京艾文森电子科技有限公司 | A kind of low-cost and high-precision small scanning frame and control method |
| CN110879384B (en) * | 2019-12-06 | 2020-09-18 | 江苏南水科技有限公司 | Radar reflecting surface system and leveling method and building method thereof |
| CN112325808B (en) * | 2020-11-03 | 2022-05-13 | 北京石油化工学院 | Flatness real-time calibration compensation measurement method based on multiple PSDs |
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