CN112325808B - Flatness real-time calibration compensation measurement method based on multiple PSDs - Google Patents
Flatness real-time calibration compensation measurement method based on multiple PSDs Download PDFInfo
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Abstract
The invention discloses a multi-PSD-based flatness implementation calibration compensation measurement method, which comprises the following steps: acquisition of target and reference data: respectively synchronizing real timeObtaining a target PSD and a plurality of reference PSDs1And PSD2Measured data of (2), synchronization error: 200 ms; establishing an error model: according to the terrain environment where the test is located, analyzing the influence on flatness accuracy and the error with a specific form, namely ground vibration, and establishing an error model in the environment; and (3) error separation of the measuring station: then, carrying out a plurality of groups of test measurements, adding data samples, analyzing the data, and separating errors; and (3) real-time calibration of flatness: the flatness is compensated in real time through the compensation system, so that the flatness precision of the scanning test device is ensured, and the compensation precision (the resolution is less than 0.005 mm). The vibration error of the laser plane generator can be effectively removed, and the plane compensation precision is effectively improved.
Description
Technical Field
The invention relates to a method for detecting flatness and compensating and calibrating flatness of a plane motion device in real time, in particular to a method for calibrating and compensating flatness in real time based on multi-PSD (phase-sensitive detector), which is particularly suitable for calibrating and compensating flatness of a large-size high-precision electromagnetic wave plane scanning device in real time.
Background
The large high-precision plane scanning device is one of the key devices for detecting the amplitude and phase characteristics of the quiet zone of a compact range, near-field test and other electromagnetic wave tests. And meanwhile, a transmitting and receiving probe is always arranged on a plane scanning device in the near field test, the transmitting and receiving test is carried out on the target to be tested according to a certain sampling interval by moving the probe in the plane, and the electromagnetic properties such as the radar cross section, the directional diagram, the wave absorbing property and the like of the target are detected through a subsequent transformation algorithm. In order to ensure the detection and test accuracy, the flatness root mean square error of the scanning device is required to be less than one percent of the working wavelength according to the RUZE theory, and as the compact field and near field tests develop towards the direction of large size and high frequency, the flatness of a large-scale plane scanning device is difficult to meet the test requirement through hardware, and the flatness accuracy requirement of the scanning detection device is usually ensured through a compensation method.
At present, two methods are used for compensating a large-scale plane scanning detection device, one method is that the flatness of the plane scanning device is measured and interpolated by high-precision large-scale measuring equipment such as a laser tracker and the like to calculate the error of each position, and the error compensation quantity is written into a motion control system to perform off-line compensation; secondly, the PSD fixed at the probe of the scanning device can detect the flatness error of the scanning device in real time by receiving laser signals, and the error is fed back to the motion system in real time, so that dynamic real-time compensation of the flatness error is realized. In fact, displacement errors detected by the PSD include flatness errors of the scanning device and errors of the measurement stations such as the PSD sensor and the laser light source vibration, the errors of the measurement stations are also important sources influencing the flatness compensation precision of the scanning and measuring device, how to separate the errors of the measurement stations from the detection errors improves the real-time flatness compensation precision, and documents in the prior art are rarely reported.
Disclosure of Invention
Based on the above problems, a multi-PSD-based real-time flatness calibration compensation measurement method is provided, which is used for separating a station measurement error from a displacement error detected by a PSD, and improving the plane compensation precision of a plane scanning device.
The purpose of the invention is realized by the following technical scheme, and the method comprises the following steps:
step 1) PSD position information acquisition: synchronous real-time acquisition of target PSD and multiple reference PSDs1,PSD2…PSDn(n is more than or equal to 2), wherein the synchronous error among the PSDs is not more than: 20 ms;
step 2), establishing a three-factor error model: establishing an error model of three factors including an actual flatness error, a station measuring error and an external interference error;
step 3) error separation of the measuring station: carrying out a plurality of groups of test measurements on the basis of the error model, adding data samples, and separating out errors of the measuring station through analyzing the data;
step 4), flatness real-time calibration compensation: the flatness is compensated in real time through the compensation system, the flatness precision of the scanning test device is guaranteed, and the resolution of the compensation motion system is superior to 0.005 mm.
According to the technical scheme provided by the invention, the flatness real-time calibration compensation measurement method based on the multi-PSD provided by the embodiment of the invention has the advantages that the error source is analyzed, the mathematical model is established, the data are acquired by adopting the multi-measuring-head measurement method, the error relationship of the measuring station at different positions is found out through data analysis, the simultaneous function equation is used for solving the error quantity to carry out compensation calibration, the cost of the implementation scheme is low, and the applicability is wide.
Drawings
Fig. 1 is a schematic flow chart of a multi-PSD-based flatness real-time calibration compensation measurement method according to an embodiment of the present invention;
FIG. 2a, FIG. 2b, FIG. 2c, FIG. 2d, and FIG. 2e are schematic diagrams of a test measurement model and its components, respectively, according to an embodiment of the present invention;
FIG. 3a and FIG. 3b are schematic diagrams of the flatness face accuracy errors before and after the test compensation according to the embodiment of the present invention;
Detailed Description
The embodiments of the present invention will be described in further detail below. Details which are not described in detail in the embodiments of the invention belong to the prior art which is known to a person skilled in the art. For ease of illustration, the present embodiment employs one target PSD and two reference PSDs.
The invention relates to a multi-PSD-based flatness real-time calibration compensation measurement method, which has the preferred specific implementation mode that:
the method comprises the following steps:
PSD position information acquisition: real-time acquisition of target PSD and multiple reference PSDs1,PSD2…PSDn(n is more than or equal to 2), wherein the synchronous error among the PSDs is not more than: 20 ms;
establishing a three-factor error model: establishing an error model of three factors, namely an actual flatness error, a station measurement error and an external interference error;
and (3) error separation of the measuring station: carrying out a plurality of groups of test measurements on the basis of the error model, adding data samples, and separating out errors of the measuring station through analyzing the data;
and (3) real-time calibration and compensation of flatness: the flatness is compensated in real time through the compensation system, the flatness precision of the scanning test device is guaranteed, and the resolution of the compensation motion system is superior to 0.005 mm.
The device model established for the method comprises an XY axis displacement table (1), a compensation Z axis (2), a target PSD (3) and a reference PSD1(4) Reference PSD2(5) The laser transmitter (6), wherein the compensation Z axis (2) and the target PSD (3) form a scanning test device, the target PSD (3) is fixed on the compensation Z axis (2), and a control driver is contained in the compensation Z axis;
on XY axle aversion platform (1), the slip table can move along X axle or Y axle at the XY plane along the driving motor drives, and laser emitter (6) launches the laser plane signal simultaneously and can map on the photosurface of the target PSD who moves along with the slip table and be accepted by the sensor to reference PSD1And PSD2The laser device is placed in a laser plane coverage area to receive signals.
In the establishment of the three-factor error model, the influence of errors on flatness calibration compensation under a test field environment is mainly analyzed to obtain the actual flatness error, the station measurement error and the external interference error of the sliding table guide rail, and the overall error model is established below.
Establishing an overall error model comprises the following steps:
the station error model analysis is based on the error generated by the environmental vibration mainly in the station error under the test field environment, so that the vibration model at a single position has the following form:
where A, B, C are acceleration, velocity, and displacement coefficients.
Also for external interference at a single position, which is embodied in a form mainly based on electromagnetic interference, the device can be firstly equivalent to a combination containing a resistance inductor and a capacitor, and a weak error generated by the external electromagnetic interference has the following form:
wherein K1、K2、K3For capacitive, inductive and resistive interference coefficients, C, L, R is the circuit equivalent inductance, capacitance and resistance.
The corresponding displacement relationship can be expressed as:
ψ (t) ═ K Φ (t), where K is a proportionality coefficient.
Data Z (n) recorded by the target PSD contains reference flatness information and error amount information caused by three factors, and an integral three-factor error model and a mathematical model corresponding to data acquired by the target PSD and the reference PSD are established below.
Z(n)＝S(n)+E(n)+ψ(n)
Wherein S (n) is the error amount of the actual flatness of the sliding table guide rail, E (n) is the error amount caused by the vibration of the measuring station, and the Z-axis offset amount generated by the external electromagnetic interference is psi (n).
Model of target PSD data:
Z0，i(N)＝S0，i(N)+E0，i(N)+ψ0，i(N)，i≤N
wherein: i is the ith measurement position in the operation process of the target PSD, S0，i(N) is the actual flatness error of the slide table guide rail;
reference PSD1And a reference PSD2The data recorded at different measuring positions are respectively G1，i(n)、G2，iAnd (n), wherein the measurement data contains information of error amount caused by vibration error amount of the measuring station and external electromagnetic interference error. The theory requires the use of m measuring probes with data of Gm，i(n), (m ═ 1, 2.., n), m is a station identifier, and i denotes the ith measurement point. Taking the data of the first reference PSD at the first measurement position as an example, the following relationship is given:
G1，1(n)＝E1，1(n)+ψ1，1(n)
wherein E1，1(n) is the amount of error, ψ, due to station vibration at that point1，1(n) is the Z-axis offset due to external electromagnetic interference at that point.
The set of first reference PSD measurements at i point positions is as follows:
For target PSD measurement data, there is G0＝(G0，1G0，2G0，3…G0，i)TWherein G is0，1＝E0，1(n)+ψ0，1(n)。
And integrating error model equations on all the measuring points, and taking into account error characteristics caused by the vibration of the measuring station and external electromagnetic interference, and searching the relation between different reference PSDs at different measuring positions by adopting a data processing and converting method. Taking two reference PSD measurement data as an example, a system of equations is obtained:
G2＝J1G1
wherein J1Coefficient of relation, G, for data measured by first and second reference PSDs1For the first reference PSD measurement data, G2Is the second reference PSD measurement data.
Combining all the equation sets, there are:
G(m-1)×1＝J1×(m-1)·G′(m-1)×1(m≥2)
wherein the content of the first and second substances,
G(m-1)×1＝(G2 G3 … Gm)T，J1×(m-1)＝(J1 J2 … Jm-1)T，G′(m-1)×1＝(G1 G2 … Gm-1)T
taking the first ginsengTaking the measured data of PSD and the second reference PSD as an example to calculate J1G is1And G2Respectively performing empirical mode decomposition, and determining J by Hilbert yellow data analysis1. Repeating the above method to obtain coefficient matrix J1×(m-1)。
In the data of target PSD measurement caused by flatness errors caused by station vibration and external electromagnetic interference under the field environment, the solved coefficient matrix J is used1×(m-1)Then, the following relationship remains:
G0＝J-1·Gk
wherein G iskSignal data for the kth reference PSD measurement, G0The target PSD comprises the station errors and Z-axis offset caused by external electromagnetic interference.
And the data information measured by the target PSD in real time in the moving process comprises the actual flatness position, the error of a measuring station and the error amount of Z-axis deviation caused by external electromagnetic interference. The Z-axis flatness to be compensated is Δ Z:
Δz＝Z(n)-J-1·Gk＝S(n)
wherein J-1·GkIs the sum of errors caused by the error of the measuring station and the external electromagnetic interference.
And the calculated and analyzed delta z is compensated in real time through a compensation control system, so that the flatness precision of the scanning test device is ensured, and meanwhile, the compensated data curved surface is checked and compared to verify the effectiveness of the detection method.
The multi-PSD-based flatness implementation calibration compensation measurement method can effectively weaken the vibration error of the laser plane generator and effectively improve the plane compensation precision.
The method specifically comprises the following steps:
firstly, respectively obtaining a target PSD and a reference PSD1And PSD2The data of (a);
wherein the schematic diagram of the test model comprises an XY-axis displacement table, a scanning measurement device (a target PSD is fixed on a compensation Z axis), and a reference PSD1And PSD2A laser emitter, an XY-axis displacement table enablingThe scanning test device moves in a single direction along the X direction or the Y direction in the XY plane, meanwhile, the two groups of reference PSDs can receive laser signals in a laser coverage area in real time, and the data of the sensor are recorded in real time in the whole measurement process.
Analyzing errors which aim at flatness precision influence and have a specific form according to the environment of the test, and establishing a three-factor error model in the environment;
the main factor influencing the flatness of the scanning measuring device under the test field environment is the vibration of a laser reference surface caused by the vibration of a measuring station, and an external electromagnetic interference phenomenon exists at the same time. The flatness real-time measurement and calibration method is characterized in that errors and interference errors caused by the vibration of the measuring station can be separated, a corresponding data analysis method is adopted according to the established mathematical model, and finally the compensation control system is used for compensating the Delta z in real time, so that the influence of the vibration and the interference on the flatness is reduced, and the flatness precision of the scanning test device is ensured.
The correlation model built here for the major errors is as follows:
data Z (n) recorded by the target PSD contains reference flatness information and error amount information caused by three factors, and an integral three-factor error model and a mathematical model corresponding to data acquired by the target PSD and the reference PSD are established below.
Z(n)＝S(n)+E(n)+ψ(n)
Wherein S (n) is the error amount of the actual flatness of the sliding table guide rail, E (n) is the error amount caused by the vibration of the measuring station, and the Z-axis offset amount generated by the external electromagnetic interference is psi (n).
And then, carrying out a plurality of groups of test measurements, adding data samples, analyzing the sensor data, and separating errors of the measuring station.
The large-size measurement condition can be simulated by changing the distance between the sliding table and the laser source and then collecting the measurement data of the reference PSD at different point positions after the distance is fixed, so that the specific change rules of the test site survey station vibration and the electromagnetic signal interference errors at different positions are searched. For example, the distance between the laser source and the slide table can be set to Ni(i 1, 2.., n), and then data acquisition is performedTransforming the position measurement of the two groups of reference PSDs and acquiring data; and then changing the distance between the laser source and the sliding table, and performing multiple times of tests again.
And analyzing the collected data, solving a coefficient matrix J between the errors of the measuring station between different positions and the Z-axis offset caused by external electromagnetic interference, further solving a compensation quantity delta Z, and compensating the errors at any point position in real time through a compensation control system to ensure that the scanning measuring device keeps higher flatness precision in movement. The step method is to compensate in real time during the measurement process.
At present, data before compensation is obtained through sensor scanning and is fitted into a curved surface, the range of the plane Z direction is-0.1 mm- +0.4mm, the range of the compensated data fitting plane Z direction is-0.02 mm- +0.03mm (shown in attached figures), and the flatness precision is effectively improved.
The invention discloses a multi-PSD-based flatness real-time calibration and measurement method, which utilizes a plurality of sets of PSD sensors to measure the whole test at the same time. The invention separates the vibration and interference errors of the measuring station based on multi-PSD measurement, and controls the compensation Z axis in real time through the compensation control system, so that the measuring station keeps higher flatness precision operation. Compared with the prior art, the method provided by the patent does not depend on any special hardware. By establishing a mathematical model of a corresponding error source, solving the size of the error amount by adopting a multi-measuring-head error separation method, and then performing compensation calibration, the whole scheme has low economic cost and wide applicability.
The specific embodiment is as follows:
the invention relates to a multi-PSD-based flatness real-time calibration compensation measurement, and a basic idea of the multi-PSD-based flatness real-time calibration compensation measurement is to establish an error factor model by utilizing the characteristic that errors have deterministic change rules in different space states. A plurality of groups of photoelectric sensors with high precision are selected for simultaneous measurement, data are analyzed and processed to obtain compensation quantity delta z, real-time compensation is carried out through a compensation system, flatness precision of the measuring device is guaranteed, and a flow diagram is shown in figure 1.
Establishing test measurement models of the figures 2a, 2b, 2c, 2d and 2e according to the characteristics of error rules, wherein the test measurement models comprise an XY axis shift table, a scanning measurement device (a target PSD and a compensation Z axis which contain a control driver), and a reference PSD1And a reference PSD2And a laser emitter. The laser emitter is fixed on the support to generate a laser plane.
The XY-axis displacement table is used for simulating a large scanning frame, wherein the sliding table moves along the X-axis direction or the Y-axis direction under the driving of the driving stepping motor, the scanning and measuring device is composed of a target PSD and a compensation Z-axis, the target PSD is fixed on the Z-axis and is used for detecting laser signals and receiving control signals to perform real-time compensation, and therefore the Z-axis is always located in a reference plane.
Reference PSD1And PSD2The laser plane signal emitted by the laser emitter can be mapped on the photosensitive surface of the target PSD moving along with the sliding table and received and controlled.
And establishing a three-factor error model.
Following the test measurements, sets of tests can be established, e.g., A1、A2、...、AiSet, first a first set of tests A1Setting the distance between the laser source and the XY-axis displacement table to N1The starting sliding table moves along the X axial direction on the XY axial displacement table, and simultaneously two groups of reference PSDs are arranged at a1,b1Two points measure and acquire data until the target PSD runs to the end point on one side of the X axis, and the measurement positions of two groups of reference PSDs are changed to be a2,b2Then, data collection is continued, and meanwhile, the sliding table is started to run in the reverse direction along the X axis towards the end point on the other side. In A1The position of adding the reference PSD in the group test process is (a)3、b3)、(a4、b4)、...、(ai、bi). Through A1Changing the distance to N after completion of the group measurement2The same procedure is adopted to carry out A2Group testing, and so on.
The measured data is analyzed to obtain the delta Z, and the error delta Z is compensated on the Z axis in real time by the compensation control system, so that the scanning measuring device is controlled to keep high-precision flatness in the motion process.
The above description is only for the preferred embodiment of the present invention, but the scope of the present invention is not limited thereto, and any changes or substitutions that can be easily conceived by those skilled in the art within the technical scope of the present invention are included in the scope of the present invention. Therefore, the protection scope of the present invention shall be subject to the protection scope of the claims.
Claims (3)
1. A flatness real-time calibration compensation measurement method based on multiple PSDs is suitable for compensation of multiple groups of reference PSDs and is characterized by comprising the following steps:
step 1) PSD position information acquisition: synchronous real-time acquisition of target PSD and multiple reference PSDs1,PSD2…PSDnWherein n is more than or equal to 2, and the synchronous error among the PSDs is not more than: 20 ms;
step 2), establishing a three-factor error model: establishing an error model of three factors including an actual flatness error, a station measuring error and an external interference error;
step 3) error separation of the measuring station: carrying out a plurality of groups of test measurements on the basis of the error model, adding data samples, and separating out errors of the measuring station through analyzing the data;
step 4), flatness real-time calibration compensation: compensating the flatness in real time through a compensation system, wherein the resolution of the compensation system is better than 0.005 mm;
the device model established for the method comprises an XY axis displacement table (1), a compensation Z axis (2), a target PSD (3) and a reference PSD1,PSD2…PSDnThe laser transmitter (6), wherein the compensation Z axis (2) and the target PSD (3) form a scanning test device, the target PSD (3) is fixed on the compensation Z axis (2), and a control driver is contained in the compensation Z axis;
on the XY-axis displacement table (1), the sliding table can be driven to be in an XY plane along with a driving motorThe surface moves along the X axis or the Y axis, and simultaneously, a laser plane signal emitted by a laser emitter (6) can be mapped on the photosensitive surface of a target PSD moving along the sliding table and received by a sensor, and a reference PSD1,PSD2…PSDnPlacing the laser plane covering area to receive signals;
obtaining an analog or digital error signal by an associated processing module;
firstly, analyzing and obtaining the influence of errors for flatness calibration compensation on the actual flatness errors of the sliding table guide rail, the errors of a measuring station and external interference errors under the test field environment;
an overall three-factor error model is established below, along with a target PSD and a plurality of reference PSDs1,PSD2…PSDnThe mathematical model corresponding to the acquired data is as follows:
Z(n)＝S(n)+E(n)+ψ(n)
wherein S (n) is the error amount of the actual flatness of the sliding table guide rail, E (n) is the error amount caused by the vibration of the measuring station, and the Z-axis offset amount generated by the external electromagnetic interference is psi (n);
model of target PSD data:
Z0,i(N)＝S0,i(N)+E0,i(N)+ψ0,i(N)，i≤N
wherein: i is the ith measurement position in the operation process of the target PSD, S0,i(N) is the actual flatness error of the sliding table guide rail;
reference PSD1And a reference PSD2The data recorded at different measuring positions are respectively G1,i(n)、G2,i(n) wherein the measured data contains information of error amount caused by vibration error amount of the measuring station and error amount caused by external electromagnetic interference error, m measuring probes are theoretically adopted, and the data is Gm,i(n) represents data recorded by the mth reference PSD at the ith measurement point, where m is 1,21The data at the first measurement location is for example the following relationship:
G1,1(n)＝E1,1(n)+ψ1,1(n)
wherein E1,1(n) is the measurement at the pointAmount of error, psi, caused by station vibrations1,1(n) is the Z-axis offset caused by external electromagnetic interference at the point location;
first reference PSD1The set of measurements at i sites is as follows:
For target PSD measurement data, there is G0＝(G0,1 G0,2 G0,3…G0,i)TWherein G is0,1＝E0,1(n)+ψ0,1(n)；
Integrating error model equations on all measuring points, considering error characteristics caused by station vibration and external electromagnetic interference, finding the relation between different reference PSDs at different measuring positions by adopting a data processing and converting method, and taking two reference PSD measuring data as an example to obtain an equation set:
G2＝J1G1
wherein J1For the first reference PSD1And a second reference PSD2Coefficient of relationship of measured data, G1For the first reference PSD1Measurement data, G2For the second reference PSD2Measuring data;
combining all the equations, there are:
G(m-1)×1＝J1×(m-1)·G′(m-1)×1，m≥2
wherein
G(m-1)×1＝(G2 G3…Gm)T,J1×(m-1)＝(J1 J2…Jm-1)T,G′(m-1)×1＝(G1 G2…Gm-1)T
Taking a first reference PSD1And a second reference PSD2Taking measurement data as an example to obtain J1G is1And G2Respectively performing empirical mode decomposition bySolving J by Hilbert-Huang transform data analysis method1Repeating the above method to obtain a coefficient matrix J1×(m-1)；
In the data of target PSD measurement caused by flatness errors caused by station vibration and external electromagnetic interference under the field environment, the solved coefficient matrix J is used1×(m-1)Then, the following relationship remains:
G0＝J-1·Gk
wherein G iskFor the kth reference PSDkMeasured signal data, G0The target PSD comprises the station errors and Z-axis offset caused by external electromagnetic interference.
2. The multi-PSD-based flatness real-time calibration compensation measurement method of claim 1, wherein performing a plurality of sets of tests to add data samples, analyzing the data and solving for Δ z comprises:
data information measured in real time by the target PSD in the moving process comprises an actual flatness position, a station measurement error and an error amount of Z-axis deviation caused by external electromagnetic interference, and the Z-axis flatness needing to be compensated is delta Z:
Δz＝Z(n)-J-1·Gk＝S(n)
wherein J-1·GkIs the sum of errors caused by the error of the measuring station and the external electromagnetic interference.
3. The multi-PSD-based real-time flatness calibration, compensation and measurement method according to claim 2, characterized in that a flatness error Δ z of the scanning test device at any position is calculated, and real-time compensation is performed through a compensation system, so that flatness accuracy of the scanning test device is ensured.
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