CN107014321B - Rapid field flatness measuring device and measuring method - Google Patents

Rapid field flatness measuring device and measuring method Download PDF

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CN107014321B
CN107014321B CN201710334870.6A CN201710334870A CN107014321B CN 107014321 B CN107014321 B CN 107014321B CN 201710334870 A CN201710334870 A CN 201710334870A CN 107014321 B CN107014321 B CN 107014321B
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laser
position sensor
plane
information
processing unit
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CN107014321A (en
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贾书海
常艳
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Xian Jiaotong University
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Xian Jiaotong University
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00Measuring arrangements characterised by the use of optical techniques
    • G01B11/30Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces
    • G01B11/303Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces using photoelectric detection means

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Abstract

The invention discloses a rapid field measurement device and a rapid field measurement method for flatness, and belongs to the technical field of photoelectric measurement. The device comprises a binocular positioning system, a laser plane device, a position sensor, a data acquisition unit, a wireless data transmission unit and a data processing unit which are sequentially connected; the laser plane device is arranged on a plane to be measured and comprises a laser and a cylindrical lens, and the cylindrical lens diffuses a laser beam of the laser into a laser reference plane; the position sensor is used for measuring height deviation information; the binocular positioning system is used for acquiring the spatial position information of the position sensor and transmitting the spatial position information to the data processing unit; the data acquisition unit is used for acquiring height deviation information and transmitting the height deviation information to the data processing unit through the wireless data transmission unit; and the data processing unit is used for processing the obtained height deviation information and the obtained spatial position information. The measuring device can generate a stable laser reference plane, and is convenient to arrange and measure on site quickly.

Description

Rapid field flatness measuring device and measuring method
Technical Field
The invention belongs to the technical field of photoelectric measurement, and particularly relates to a flatness rapid on-site measurement device and a flatness rapid on-site measurement method.
Background
In the mechanical manufacturing process, one of the key factors influencing the manufacturing accuracy is the flatness of the workpiece, so the measurement of the flatness is very important.
In actual machining, a plane to be measured is irregular and discontinuous in many cases, and for flatness measurement of the workpieces, the existing methods mainly include an autocollimator method, a level meter method, a three-coordinate machine method and a laser flatness detector. The autocollimator method and the level meter method need to arrange points in advance in the measuring process (a basic point arrangement form of the measuring planeness is given in GB 11337-2004 flatness error detection), and position information of the measuring points needs to be manually input during calculation, so that the positions of the measuring points are limited, and the measuring speed is reduced; the three-coordinate measuring machine method is not limited in the selection of measuring points, but the three-coordinate measuring machine is limited by the length of a moving guide rail of the three-coordinate measuring machine, the size of a measurable part of the three-coordinate measuring machine is also limited greatly, and on the other hand, the three-coordinate measuring machine is large and expensive, is generally used in a special measuring room and is difficult to apply to a processing field; the laser flatness detector overcomes the limitation of the size of a part, but can not measure the position information of a point to be measured in real time, the point distribution position needs to be input in software before measurement, and a target is placed according to the set point distribution position, so that the error of the position of the target can be brought, the measurement speed and the use convenience are reduced, and the practicability of the measurement in a machining field is greatly limited.
Disclosure of Invention
The invention aims to provide a rapid field measuring device for flatness, which can generate a stable laser reference plane and is convenient and rapid to arrange and measure on the field.
The invention also aims to provide a using method of the flatness rapid on-site measuring device.
The invention is realized by the following technical scheme:
a rapid field measuring device for flatness comprises a binocular positioning system, a laser plane device, a position sensor, a data acquisition unit, a wireless data transmission unit and a data processing unit which are sequentially connected; the laser plane device comprises a laser and a cylindrical lens arranged in front of the laser, and the cylindrical lens can diffuse laser beams emitted by the laser into a laser reference plane; the position sensor is used for calibrating the laser reference plane and measuring the height deviation information of points on the plane to be measured; the binocular positioning system is used for recording the picture information of the position sensor and transmitting the picture information of the position sensor to the data processing unit; the data acquisition unit is used for acquiring height deviation information and transmitting the height deviation information to the data processing unit through the wireless data transmission unit; and the data processing unit is used for processing the obtained height deviation information and the position sensor picture information.
The height deviation information refers to the height information of the deviation of a point on a plane to be measured from a measurement reference plane, and the measurement reference plane refers to a virtual plane formed by the position of a position sensor when the laser reference plane is calibrated; the height deviation information is numerically equivalent to height information of a deviation of the zero point position of the position sensor from the laser reference plane.
The binocular positioning system obtains photos of the position sensor from different angles, and the photos are transmitted to the data processing unit and are analyzed to obtain spatial position information of the position sensor.
Preferably, the position sensor is a PSD position sensor or a wireless image sensor.
Preferably, the binocular positioning system comprises two CCD cameras.
Preferably, the laser plane device further comprises a rotating platform, the rotating platform is provided with a metal shell provided with a slit, and the laser and the cylindrical lens are arranged in a cavity formed by the metal shell.
Further preferably, the metal shell is a cylindrical shell, and the slit is opened along a circumferential direction of the cylindrical shell.
Further preferably, the rotary platform is provided with a driving motor for driving the rotary platform to rotate.
The flatness field measurement method using the flatness fast field measurement device comprises the following steps:
1) placing a laser plane device on a plane to be measured, and diffusing a laser beam emitted by a laser into a laser reference plane by a cylindrical lens; the position sensor is placed at any three non-collinear points of the plane to be measured, the angle of the laser plane device is adjusted, and then the angle of the optical reference plane is adjusted, so that the reading of the position sensor is zero, and the calibration of the laser reference plane is realized;
2) moving the position sensor to any position to be detected, recording picture information of the position sensor by using a binocular positioning system, inputting the picture information into a data processing unit through a data line, and obtaining spatial position information of the position sensor by the data processing unit after picture analysis; detecting height deviation information by using a position sensor, wherein the height deviation information is acquired by a data acquisition unit and then is input into a data processing unit through a wireless data transmission unit;
3) moving to the next position to be measured, and operating according to the step 2) until the measurement of all points to be measured is completed;
4) and the data processing unit obtains the flatness information of the plane to be measured of the mechanical workpiece through fitting calculation according to the obtained spatial position information and the height deviation information.
Compared with the prior art, the invention has the following beneficial technical effects:
the invention discloses a rapid field measuring device for flatness, which comprises a binocular positioning system, a laser plane device, a position sensor, a data acquisition unit, a wireless data transmission unit and a data processing unit, wherein the data acquisition unit, the wireless data transmission unit and the data processing unit are sequentially connected; the laser plane device is arranged on a plane to be measured and comprises a laser and a cylindrical lens, and the cylindrical lens diffuses a laser beam of the laser into a laser reference plane; the position sensor is arranged at a certain point on the plane to be measured and can receive laser on the laser reference plane and measure the height deviation information of the point on the plane to be measured, and the height deviation information is input into the data processing unit through the data acquisition unit and the wireless data transmission unit; the binocular positioning system can obtain images of the position sensors at different angles, spatial position information of the position sensors can be obtained through image processing calculation, and the spatial position information is input into the data processing unit through a data line; and the data processing unit obtains the flatness information of the plane to be measured of the mechanical workpiece through fitting calculation. Wherein, with the help of lenticular lens, the produced laser beam direct diffusion of laser instrument becomes a sectorial laser plane, has directly generated the laser plane, compares in the laser plane that relies on the laser beam sweep to form, and this laser plane is more stable and reliable, and the laser plane device is simpler, need not to adopt the rotary device of high accuracy and high stability, has reduced measuring device's cost, has made things convenient for measuring device's maintenance. The measuring device is reasonable in structural design and simple to use, overcomes the defect that the existing flatness measuring method needs manual acquisition of measured position data, is simple in structure and easy to maintain, can form a stable laser reference plane without precise rotating equipment, can be suitable for severe field environments, and is convenient to rapidly deploy; the method has the advantages of high measurement speed, high efficiency, wide measurement range, convenience and quickness in application and the like, can be used for detecting the flatness of a machining surface, a surface of a machined part, a machine working surface, a machine tool working table surface, a machine tool motion system and the like, and has wide application prospect in the fields of high dimensional precision requirements of precision machinery, aerospace manufacturing and the like.
Furthermore, the laser plane device also comprises a rotary platform, a cylindrical metal shell is arranged below the rotary platform, and a slit is arranged on the metal shell. Therefore, the metal shell shields the laser ray on the laser reference plane and enables the laser ray on the laser reference plane to only leak out of the slit, and the rotating platform can drive the metal shell to rotate and enable the slit to rotate when rotating, so that the laser ray appears in the laser reference plane in a laser beam mode, and the laser reference plane scanned by the laser beam is formed in a mode. However, in the technical scheme, the laser reference plane is also a laser and a cylindrical lens, and a high-precision and high-stability rotating device is not required for the laser reference plane; meanwhile, the scanning light beam is formed in a mode of blocking light, so that a high-precision rotating device does not need to be adopted for the rotating platform. Therefore, the technical scheme forms a stable and reliable laser reference plane for beam scanning without adopting a high-precision rotating device, and has the characteristics of simple structure, easiness in maintenance and low cost.
The invention discloses a flatness field measurement method by means of a flatness fast field measurement device, which utilizes a binocular positioning system to position the spatial position of a measurement point, can continuously and randomly change the position of a target in a range to be measured in the measurement process without setting a measurement point distribution mode before measurement, then measures the spatial position information and height deviation information of the target, and then processes the spatial position information and the height deviation information through a data processing unit to directly calculate the flatness of a surface to be measured. The method of the invention has unlimited number of measuring points, can obtain the complete information of the plane to be measured, can measure the planeness of parts in any shape, can realize continuous automatic measurement in the whole process, and greatly improves the measuring speed, real-time performance and convenience.
Drawings
Fig. 1 is a schematic structural diagram of a rapid field flatness measuring device according to the present invention.
Fig. 2 is a flow chart of a measurement method according to the present invention.
Fig. 3 is a schematic structural diagram of a laser plane device according to the present invention.
The meanings of the symbols used in the drawings of the specification are explained below:
011,012 is the CCD camera, 02 is PSD position sensor, 03 is the laser plane device, 031 is the laser instrument, 032 is lenticular lens, 033 is rotary platform, 034 is the metal casing, 035 is the slit, 036 is driving motor, 04 is data acquisition unit, 05 is wireless data transmission unit, 06 is the data processing unit.
Detailed Description
The present invention will now be described in further detail with reference to specific examples and figures, which are intended to be illustrative, but not limiting, of the invention.
As shown in fig. 1, a rapid field flatness measuring device includes a binocular positioning system, a laser plane device 03, a position sensor, a wireless data transmission unit 05, a data acquisition unit 04, and a data processing unit 06, which are connected in sequence; the laser plane device 03 and the position sensor are both arranged on a plane to be measured; the laser plane device 03 comprises a laser 031 and a cylindrical lens 032 arranged in front of the laser 031, and the cylindrical lens 032 diffuses laser beams of the laser 031 into a laser reference plane;
the position sensor is used for calibrating the laser reference plane and measuring the height deviation information of points on the plane to be measured;
the binocular positioning system is used for recording the picture information of the position sensor and transmitting the picture information of the position sensor to the data processing unit 06;
the wireless data transmission unit 05 and the data acquisition unit 04 are used for transmitting the height deviation information to the data processing unit 06;
and a data processing unit 06 for processing the obtained height deviation information and position sensor picture information.
The height deviation information refers to the height information of the deviation of a point on a plane to be measured from a measurement reference plane, and the measurement reference plane refers to a virtual plane formed by the positions of the position sensors when the laser reference plane is determined; the height deviation information is equal in value to the height deviation information of the zero point position of the position sensor from the laser reference plane.
The binocular positioning system obtains the photos of the position sensor from different angles, and the photos are transmitted to the data processing unit 06 to be analyzed to obtain the spatial position information of the position sensor.
In a possible implementation manner, the position sensor is one of a PSD position sensor 02 or a wireless image sensor. The PSD position sensor 02 can directly measure the height deviation information. The wireless image sensor can calculate the height deviation information according to the relative position of the photosensitive element which receives the light on the laser reference plane.
Wherein, in one possible implementation, the binocular positioning system includes two CCD cameras 011,012. The two CCD cameras 011,012 can obtain images of the position sensor at different angles, and spatial position information of the position sensor can be obtained by calculating the image processing.
As shown in fig. 3, the laser plane device 03 further includes a rotating platform 033 and a housing (the housing is not fully enclosed, and one side is open), the rotating platform 033 is provided with a driving motor 036 for driving the rotating platform to rotate, and a stator of the driving motor 036 is fixed on the housing of the laser plane device 03. A cylindrical metal shell 034 is further disposed below the rotating platform 033, and a slit 035 is formed in the metal shell 034 in the circumferential direction. The laser 031 and the cylindrical lens 032 are disposed in the cavity formed by the metal shell 034 and fixed to the housing of the laser plane device 03. Thus, when the laser plane device 03 is placed on a point to be measured during operation, the laser 031 and the cylindrical lens 032 are fixed on the housing of the laser plane device 03, and the laser reference plane formed by the laser 031 and the cylindrical lens 032 remains stable and unchanged; the metal shell 034 shields the laser light on the laser reference plane and allows the laser light on the laser reference plane to leak out only from the slit 035 to form a laser beam; the rotating platform 033, when rotating, can bring about the rotation of the metal shell 034 and cause the slit 035 to rotate, so that the laser beam leaking out of the slit 035 rotates, and thus the laser light emerges in the form of a laser beam in the laser reference plane, which formally forms the laser reference plane for the laser beam scanning. Wherein the laser reference plane formed by the laser 031 and the cylindrical lens 032 is not parallel to the slit 035, wherein in a further preferred embodiment the laser reference plane formed by the laser 031 and the cylindrical lens 032 is perpendicular to the slit.
As shown in fig. 2, the flatness field measurement method using the flatness fast field measurement apparatus includes the steps of:
1) placing a laser plane device 03 and a position sensor on a plane to be measured, diffusing a laser beam emitted by a laser 031 into a laser reference plane by a cylindrical lens 032, wherein three non-collinear points A, B and C are randomly selected on the plane to be measured, sequentially placing the position sensor at three points A, B and C, adjusting the angle of the laser plane device 03 at each position and adjusting the angle of the laser reference plane, and finally enabling the readings of the position sensor at the three points A, B and C to be zero, so as to realize the calibration of the laser reference plane;
2) moving the position sensor to any position to be measured, recording picture information of the position sensor by using a binocular positioning system, inputting the picture information into the data processing unit 06 through a data line, and obtaining the spatial position information of the position sensor by the data processing unit 06 after picture analysis; detecting height deviation information by using a position sensor, wherein the height deviation information is acquired by a data acquisition unit 04 and then is input into a data processing unit 06 through a wireless data transmission unit 05;
3) moving to the next position to be measured; completing the measurement of all points to be measured according to the operation of the step 2);
4) the data processing unit 06 obtains flatness information of the plane to be measured of the mechanical workpiece by fitting calculation according to the obtained spatial position information and the height deviation information.
In summary, the present invention overcomes the defects that the prior flatness measurement technology needs to set a proper point distribution format in advance, the number of measurement space points is small, the measurement speed is slow, etc., and the position sensor in the present invention can be placed at any position, and can simultaneously measure the space position information and the height deviation information of the plane point to be measured, and the flatness of the plane to be measured can be directly calculated through the data processing software of the industry standard (see GB 11337 and 2004 "flatness error detection"), and the number of measurement points is theoretically infinite. The invention can measure the flatness of any complex-shaped object, and the measuring speed and the real-time performance are substantially improved compared with other current technologies.

Claims (5)

1. A rapid field measurement device for flatness is characterized by comprising a binocular positioning system, a laser plane device (03), a position sensor, a data acquisition unit (04), a wireless data transmission unit (05) and a data processing unit (06) which are sequentially connected; the laser plane device (03) and the position sensor are both arranged on a plane to be measured, the laser plane device (03) comprises a laser (031) and a cylindrical lens (032) arranged in front of the laser, and the cylindrical lens (032) can diffuse laser beams emitted by the laser (031) into a laser reference plane; the laser plane device (03) further comprises a rotating platform (033), a metal shell (034) provided with a slit (035) is arranged below the rotating platform (033), a laser (031) and a cylindrical lens (032) are arranged in a cavity formed by the metal shell (034), and a laser reference plane formed by the laser (031) and the cylindrical lens (032) is not parallel to the slit (035); the metal shell (034) is a cylindrical shell, and the slit (035) is arranged on the side surface of the cylindrical shell along the circumferential direction;
the position sensor is used for calibrating the laser reference plane and measuring the height deviation information of points on the plane to be measured;
the binocular positioning system is used for recording the picture information of the position sensor and transmitting the picture information of the position sensor to the data processing unit (06);
the data acquisition unit (04) is used for acquiring height deviation information and transmitting the height deviation information to the data processing unit (06) through the wireless data transmission unit (05);
and a data processing unit (06) for processing the obtained height deviation information and the position sensor picture information.
2. The rapid in-situ flatness measurement device of claim 1, wherein the position sensor is a PSD position sensor (02) or a wireless image sensor.
3. Fast field measurement device of the flatness according to claim 1, characterized in that the rotating platform (033) is provided with a drive motor (036) for driving the rotation of the rotating platform.
4. The flatness fast field measurement device of claim 1, wherein the binocular positioning system includes two CCD cameras (011,012).
5. The flatness on-site measuring method of the flatness rapid on-site measuring device according to any one of claims 1 to 4, characterized by comprising the steps of:
1) the laser plane device (03) is placed on a plane to be measured, and a laser beam emitted by the laser (031) is diffused by the cylindrical lens (032) to form a laser reference plane; the position sensor is placed at any three non-collinear points of the plane to be measured, the angle of the laser plane device (03) is adjusted, and then the angle of the optical reference plane is adjusted, so that the reading of the position sensor is zero, and the calibration of the laser reference plane is realized;
2) moving the position sensor to any position to be detected, recording picture information of the position sensor by using a binocular positioning system, inputting the picture information into a data processing unit (06) through a data line, and obtaining spatial position information of the position sensor by the data processing unit (06) after picture analysis; height deviation information is detected by a position sensor, and the height deviation information is input into a data processing unit (06) through a wireless data transmission unit (05) after being collected by a data collector (04);
3) moving to the next position to be measured, and operating according to the step 2) until the measurement of all points to be measured is completed;
4) and the data processing unit (06) obtains the flatness information of the plane to be measured of the mechanical workpiece through fitting calculation according to the obtained spatial position information and the height deviation information.
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CN107436131A (en) * 2017-08-30 2017-12-05 东莞欧达电子有限公司 The measurement of planeness system and its measuring method of a kind of laser alignment equipment
CN109186471B (en) * 2018-07-05 2021-02-19 歌尔光学科技有限公司 Lead height detection method and device
CN109341538A (en) * 2018-10-17 2019-02-15 太原科技大学 A kind of measurement method measuring bearing offset
CN109518725B (en) * 2018-12-27 2023-10-03 镇江市高等专科学校 Inspection well cover position on-line monitoring device and method
CN109975796B (en) * 2019-04-11 2021-08-13 清华大学深圳研究生院 Integrated position measuring and adjusting device and method
CN110207625B (en) * 2019-04-25 2021-05-04 三门三友科技股份有限公司 System and method for dynamically detecting flatness of cathode plate
CN110057555B (en) * 2019-05-28 2020-09-04 易思维(杭州)科技有限公司 Method for detecting flatness of line laser
CN110440701A (en) * 2019-07-11 2019-11-12 南京中车浦镇城轨车辆有限责任公司 A kind of intelligent more curved surface detecting systems of rail vehicle and method
CN111904074A (en) * 2020-08-20 2020-11-10 上海交通大学 Human body digital measuring device based on infrared laser speckle projection
CN112325808B (en) * 2020-11-03 2022-05-13 北京石油化工学院 Flatness real-time calibration compensation measurement method based on multiple PSDs
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CN100561121C (en) * 2007-02-02 2009-11-18 西安交通大学 Measurement method of planeness based on Flame Image Process and image recognition
CN103604367B (en) * 2013-11-14 2016-10-12 上海交通大学 A kind of calibrating installation for Laser Triangulation Measurement System Based and method
CN105716547A (en) * 2016-04-20 2016-06-29 西安交通大学 Rapid measurement device and method for planeness of mechanical workpiece

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