CN107014321A - A kind of flatness rapid field measurement apparatus and measuring method - Google Patents

A kind of flatness rapid field measurement apparatus and measuring method Download PDF

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Publication number
CN107014321A
CN107014321A CN201710334870.6A CN201710334870A CN107014321A CN 107014321 A CN107014321 A CN 107014321A CN 201710334870 A CN201710334870 A CN 201710334870A CN 107014321 A CN107014321 A CN 107014321A
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laser
plane
information
position sensor
measured
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CN107014321B (en
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贾书海
常艳
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Xian Jiaotong University
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Xian Jiaotong University
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00Measuring arrangements characterised by the use of optical techniques
    • G01B11/30Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces
    • G01B11/303Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces using photoelectric detection means

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  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)

Abstract

The invention discloses a kind of flatness rapid field measurement apparatus and measuring method, belong to technical field of electro-optical measurement.Including Locating System with Binocular, laser plane device, position sensor, in addition to data acquisition unit, wireless data transmission unit and the data processing unit being sequentially connected;Laser plane device is arranged in plane to be measured, including laser and lens pillar, and the laser beam of laser is diffused into laser datum plane by lens pillar;Position sensor is used to measure highly deviated information;Locating System with Binocular, the spatial positional information for obtaining position sensor, and the spatial positional information is transmitted to data processing unit;Data acquisition unit is used to gather highly deviated information and by wireless data transmission unit incoming data processing unit;Data processing unit, for handling obtained highly deviated information and spatial positional information.The measurement apparatus can produce stable laser datum plane, fast and easy arrangement and in-site measurement.

Description

A kind of flatness rapid field measurement apparatus and measuring method
Technical field
The invention belongs to technical field of electro-optical measurement, and in particular to a kind of flatness rapid field measurement apparatus and measurement side Method.
Background technology
During machine-building, the key factor of one of influence accuracy of manufacture is exactly the flatness of workpiece, because The measurement of this flatness is just particularly important.
In actual machine processing, plane to be measured is irregular discontinuous in many cases, for the flat of these workpiece Face degree measurement, existing method mainly has autocollimator method, level meter method, three coordinate machine method, laser planeness detector.Autocollimatic Straight instrument method and level meter method need to layout in advance in measurement process and (given in GB 11337-2004 flatness Error Measurings The basic arrangement form of measurement plane degree), need to be manually entered the positional information of measurement point during calculating, which has limited measurement point Position, while also reducing measuring speed;Three coordinate machine method is unrestricted in terms of the selection of measurement point, but three coordinate machine by The limitation of three coordinate measuring machine motion guide rail length, it can survey part dimension also by than larger limitation, on the other hand three sit Co-ordinate measuring machine is huge and expensive, is typically all placed in special measuring room and uses, it is difficult in processing site application;Laser planeness Detector overcomes the limitation of accessory size, but equally can not measure dot position information to be measured in real time, it is necessary to before measuring Position of layouting is inputted in software, and target is placed according to the position of layouting of setting, the error of target position so can be not only brought, And the speed of measurement and the convenience used are reduced, it is being machined the practicality of in-site measurement this greatly limits it Property.
The content of the invention
It is an object of the invention to provide a kind of flatness rapid field measurement apparatus, the measurement apparatus can produce stabilization Laser datum plane, fast and easy arrangement and in-site measurement.
The present invention also aims to provide a kind of application method of flatness rapid field measurement apparatus.
The present invention is to be achieved through the following technical solutions:
A kind of flatness rapid field measurement apparatus, including Locating System with Binocular, laser plane device, position sensor, And data acquisition unit, wireless data transmission unit and the data processing unit being sequentially connected;Wherein, laser plane device and position Put sensor to be arranged in plane to be measured, laser plane device includes laser and the lens pillar being arranged in front of it, post The laser beam that laser is sent can be diffused into laser datum plane by shape lens;Position sensor is put down for calibrating laser datum Face and the highly deviated information of the point in measurement plane to be measured;Locating System with Binocular, for position recording sensor pictorial information, And transmit the position sensor pictorial information to data processing unit;Data acquisition unit be used for gather highly deviated information and by Wireless data transmission unit incoming data processing unit;Data processing unit, for handling obtained highly deviated information and position Put sensor picture information.
Wherein, described highly deviated information refers to the height of the deviation of the point range measurement datum plane in plane to be measured Information, described measuring basis plane refers to the void that the location of position sensor during calibration laser datum plane is formed Quasi-plane;Described highly deviated information, it is numerically equal to the dead-center position of position sensor apart from laser datum plane Deviation elevation information.
Wherein, Locating System with Binocular obtains the photo of position sensor from different perspectives, and photo is transmitted to data processing list The spatial positional information of position sensor is obtained in member after analysis.
Preferably, the position sensor is PSD position sensors or wireless image sensor.
Preferably, the Locating System with Binocular includes two CCD cameras.
Preferably, laser plane device also includes a rotation platform, and rotation platform sets the metal-back for offering slit, swashs Light device and lens pillar are arranged in the cavity of metal-back formation.
It is further preferred that the metal-back is column shell, slit is opened in along along column shell circumferencial direction.
It is further preferred that rotation platform is provided for the motor for driving rotation platform to rotate.
Use the flatness on-site measurement method of described flatness rapid field measurement apparatus, including step:
1) laser plane device is placed in plane to be measured, the laser beam that laser is sent is turned into by lens pillar diffusion Laser datum plane;Position sensor is placed on any 3 not conllinear positions of plane to be measured, adjustment laser plane device Angle, and then adjust the angle of light datum plane so that the reading of position sensor is zero, is realized to laser datum plane Calibration;
2) position sensor is moved on into any one position to be measured, believed with Locating System with Binocular position recording sensor picture Cease and by the pictorial information by data wire input data processing unit, data processing unit obtains position biography after picture analyzing The spatial positional information of sensor;Highly deviated information is detected with position sensor, highly deviated information is gathered through data acquisition unit Pass through wireless data transmission unit input data processing unit afterwards;
3) next position to be measured is moved to, by step 2) measurements of the operation up to completing whole points to be measured;
4) data processing unit, by the Fitting Calculation, is obtained according to the spatial positional information and highly deviated information that are obtained To the flatness information of mechanical workpieces plane to be measured.
Compared with prior art, the present invention has following beneficial technique effect:
The invention discloses a kind of flatness rapid field measurement apparatus, including Locating System with Binocular, laser plane device, Position sensor, in addition to data acquisition unit, wireless data transmission unit and the data processing unit being sequentially connected;Wherein, swash Optical plane device is arranged in plane to be measured, including laser and lens pillar, and lens pillar spreads the laser beam of laser Into laser datum plane;The laser in laser datum plane can be received after certain point that position sensor is arranged in plane to be measured And the highly deviated information of the point in plane to be measured is determined, highly deviated information passes through data acquisition unit and wireless data transmission Unit input data processing unit;Locating System with Binocular can obtain the image of the position sensor of different angles, by figure The spatial positional information of position sensor can be obtained as processing is calculated, spatial positional information is handled by data wire input data Unit;Data processing unit obtains the flatness information of mechanical workpieces plane to be measured by the Fitting Calculation.Wherein, by column Laser beam produced by lens, laser can be directly spread as a fan-shaped lasing area, directly generated laser plane, phase Compared with the laser plane formed by laser beam surface sweeping, the lasing area is more stable and reliable, and laser plane device is more simple, The rotating device of high accuracy and high stability need not be used, the cost of measurement apparatus is reduced, facilitates the maintenance of measurement apparatus. The measurement apparatus reasonable in design, using simple, overcomes existing method measuring flatness needs collection measurement position manually The defect of data, and laser plane apparatus structure is simple and easy to maintain, and stabilization just can be formed without precision rotation equipment Laser datum plane, can be applicable more severe site environment, be easy to rapid deployment;It has measuring speed fast, efficiency high, Measurement range is wide, using the advantage such as convenient, can be used for machined surface, the treatment of surfaces of components, machine operation face, lathe work The flatness detection of table top, machine tool motion system etc., in high dimensional accuracy demand field tools such as precision optical machinery, Aero-Space manufactures Have broad application prospects.
Further, laser plane device also includes setting cylindrical metal shell, metal below a rotation platform, rotation platform Slit is set on shell.In this way, metal-back has blocked the laser beam in laser datum plane and caused in laser datum plane Laser beam is only spilt from slit, and rotation platform can drive the rotation of metal-back when rotating and slit is rotated, such as This so that laser beam occurs in laser datum plane in the form of laser beam, and laser beam scanning is formd in form Laser datum plane.But, in the technical program, laser datum plane or laser and lens pillar, laser datum The rotating device of plane without high accuracy and high stability in itself;Meanwhile, scanning light beam is formed by the form shut out the light, this Also so that rotation platform need not use high-precision rotating device.In this way, the technical program is not using high-precision rotation While device, the laser datum plane of stable and reliable light beam scanning is formd, with simple in construction, it is easy to safeguard and into The characteristics of this is low.
Flatness on-site measurement method disclosed by the invention by flatness rapid field measurement apparatus, it utilizes binocular Alignment system comes the locus of positioning measurement point, can be without setting measurement arrangement form before measuring, in measurement process In continuously, arbitrarily can change target placement in scope to be measured, then measure spatial positional information and the highly deviated of target Information, then spatial positional information and highly deviated information are handled by data processing unit, it is possible to directly calculate The flatness of tested surface.The method measurement points of the present invention are not limited, and can obtain the complete information of plane to be measured, The flatness of any shape part can be measured, whole process can realize continuous automatic measurement, the speed and real-time of measurement, Convenience is greatly improved.
Brief description of the drawings
Fig. 1 is a kind of structural representation of flatness rapid field measurement apparatus of the present invention.
Fig. 2 is the flow chart of measuring method of the present invention.
Fig. 3 is the structural representation of laser plane device of the present invention.
The implication of used symbol is explained as follows in Figure of description:
011,012 is CCD camera, and 02 is PSD position sensors, and 03 is laser plane device, and 031 is laser, and 032 is Lens pillar, 033 is rotation platform, and 034 is metal-back, and 035 is slit, and 036 is motor, and 04 is data acquisition unit, 05 It is data processing unit for wireless data transmission unit, 06.
Embodiment
With reference to specific embodiment and accompanying drawing, the present invention is described in further detail, and described is to the present invention Explain rather than limit.
As shown in figure 1, a kind of flatness rapid field measurement apparatus, including Locating System with Binocular, laser plane device 03, Position sensor, in addition to wireless data transmission unit 05, data acquisition unit 04 and the data processing unit 06 being sequentially connected;Swash Optical plane device 03 and position sensor are arranged in plane to be measured;Laser plane device 03 includes laser 031 and set The laser beam of laser is diffused into laser datum plane by the lens pillar 032 in front of it, lens pillar 032;
Position sensor is used for the highly deviated information for calibrating laser datum plane and the point in measurement plane to be measured;
Locating System with Binocular, is transmitted for position recording sensor pictorial information, and by the position sensor pictorial information To data processing unit 06;
Wireless data transmission unit 05 and data acquisition unit 04 are used for highly deviated information incoming data processing unit 06;
Data processing unit 06, for handling obtained highly deviated information and position sensor pictorial information.
Wherein, described highly deviated information refers to the height of the deviation of the point range measurement datum plane in plane to be measured Information, described measuring basis plane is referred to for determining the formation of the location of position sensor during laser datum plane Virtual plane;Described highly deviated information, it is numerically equal to the dead-center position of position sensor apart from laser datum The highly deviated information of plane.
Wherein, Locating System with Binocular obtains the photo of position sensor from different perspectives, and photo is transmitted to data processing list The spatial positional information of position sensor is obtained in member 06 after analysis.
Wherein, in a kind of feasible implementation, the position sensor is PSD position sensors 02 or wireless image One kind in sensor.PSD position sensors 02 can directly measure highly deviated information.Wireless image sensor according to It receives the relative position of the photo-sensitive cell of the light in laser datum plane, can calculate highly deviated information.
Wherein, in a kind of feasible implementation, the Locating System with Binocular includes two CCD cameras 011,012.Two Individual CCD camera 011,012 can obtain the image of the position sensor of different angles, by the way that image procossing is calculated and can obtained The spatial positional information of position sensor.
As shown in figure 3, wherein, also including a rotation platform 033 and housing, (housing is not sealed laser plane device 03 entirely Close, be simultaneously open), rotation platform 033 is provided with the motor 036 for driving rotation platform to rotate, motor 036 Stator is fixed on the housing of laser plane device 03.The lower section of rotation platform 033 is additionally provided with columned metal-back 034, gold Slit 035 is opened up on the category circumferencial direction of shell 034.Laser 031 and lens pillar 032 are arranged on the cavity of the formation of metal-back 034 It is interior, and be fixed on the housing of laser plane device 03.In this way, operationally, laser plane device 03 is placed on tested point, Because laser 031 and lens pillar 032 are fixed on the housing of laser plane device 03, laser 031 and lens pillar 032 The laser datum plane of formation keeps stablizing constant;Metal-back 034 has blocked the laser beam in laser datum plane and caused Laser beam in laser datum plane is only spilt from slit 035, forms laser beam;Rotation platform 033 can be with when rotating Drive the rotation of metal-back 034 and slit 035 is rotated so that the laser beam spilt from slit 035 is rotated, in this way, swashing Light light occurs in laser datum plane in the form of laser beam, and the laser datum of laser beam scanning is formd in form Plane.Wherein, laser 031 and the laser datum plane and slit 035 of the formation of lens pillar 032 are not parallel, wherein, more entering One step in prioritization scheme, the laser datum plane of laser 031 and the formation of lens pillar 032 is vertical with slit.
As shown in Fig. 2 flatness on-site measurement method is carried out using described flatness rapid field measurement apparatus, including Step:
1) laser plane device 03 and position sensor are placed in plane to be measured, the laser beam that laser 031 is sent Spread by lens pillar 032 as laser datum plane, wherein, three not conllinear point A, B of any selection in plane to be measured And C, position sensor is placed on 3 positions of A, B and C successively, the angle of laser plane device 03 is adjusted simultaneously in each position So that the angle adjustment of laser datum plane, finally causes position sensor to be zero in 3 readings of A, B and C, realize to swashing The calibration of light datum plane;
2) position sensor is moved on into any one position to be measured, believed with Locating System with Binocular position recording sensor picture Cease and by pictorial information by data wire input data processing unit 06, data processing unit 06 obtains position after picture analyzing The spatial positional information of sensor;Highly deviated information is detected with position sensor, highly deviated information is through data acquisition unit 04 Pass through the input data processing unit 06 of wireless data transmission unit 05 after collection;
3) it is moved to next position to be measured;By step 2) operation completion whole measurements put to be measured;
4) data processing unit 06 is according to the spatial positional information and highly deviated information obtained, by the Fitting Calculation, Obtain the flatness information of mechanical workpieces plane to be measured.
In summary, instant invention overcomes need to set in advance in existing measurement of planeness technology suitable cloth dot format, Measurement space points are few, and measuring speed waits not enough slowly, and Position Sensor of the present invention can be placed on optional position, can be simultaneously The spatial positional information and highly deviated information of planar point to be measured are measured, it is (specific to calculate by the data processing software of professional standard Method is referring to GB 11337-2004《Flatness Error Measuring》), it is possible to the flatness of plane to be measured is directly calculated, and is surveyed Amount points are theoretically unlimited.The present invention can measure the flatness of arbitrarily complicated shaped objects, and the speed and reality of measurement When property has the raising of essence relative to current other technologies.

Claims (7)

1. a kind of flatness rapid field measurement apparatus, it is characterised in that including Locating System with Binocular, laser plane device (03), position sensor, and data acquisition unit (04), wireless data transmission unit (05) and the data processing list being sequentially connected First (06);Wherein, laser plane device (03) and position sensor are arranged in plane to be measured, laser plane device (03) bag The lens pillar (032) for including laser (031) and being arranged in front of it, lens pillar (032) can send laser (031) Laser beam diffuse into laser datum plane;
Position sensor is used for the highly deviated information for calibrating laser datum plane and the point in measurement plane to be measured;
Locating System with Binocular, is transmitted to number for position recording sensor pictorial information, and by the position sensor pictorial information According to processing unit (06);
Data acquisition unit (04) is used to gather highly deviated information and handles single by wireless data transmission unit (05) incoming data First (06);
Data processing unit (06), for handling obtained highly deviated information and position sensor pictorial information.
2. flatness rapid field measurement apparatus as claimed in claim 1, it is characterised in that the position sensor is PSD Position sensor (02) or wireless image sensor.
3. flatness rapid field measurement apparatus as claimed in claim 1, it is characterised in that laser plane device (03) is also wrapped Include the metal-back (034) for being set below a rotation platform (033), rotation platform (033) and offering slit (035), laser (031) it is arranged on lens pillar (032) in the cavity of metal-back (034) formation.
4. flatness rapid field measurement apparatus as claimed in claim 3, it is characterised in that the metal-back (034) is post Shape shell, slit (035) be opened in the column shell-side face along the circumferential direction on.
5. flatness rapid field measurement apparatus as claimed in claim 3, it is characterised in that rotation platform (033), which is set, to be used The motor (036) rotated in driving rotation platform.
6. flatness rapid field measurement apparatus as claimed in claim 1, it is characterised in that the Locating System with Binocular includes Two CCD cameras (011,012).
7. based on the flatness on-site measurement method of the flatness rapid field measurement apparatus described in any one of claim 1~6, It is characterised in that it includes step:
1) laser plane device (03) is placed in plane to be measured, the laser beam that laser (031) is sent is by lens pillar (032) diffusion turns into laser datum plane;Position sensor is placed on any 3 not conllinear positions of plane to be measured, adjustment swashs The angle of optical plane device (03), and then adjust the angle of light datum plane so that the reading of position sensor is zero, is realized Calibration to laser datum plane;
2) position sensor is moved on into any one position to be measured, with Locating System with Binocular position recording sensor pictorial information simultaneously By the pictorial information by data wire input data processing unit (06), data processing unit (06) obtains position after picture analyzing Put the spatial positional information of sensor;Highly deviated information is detected with position sensor, highly deviated information is through data acquisition unit (04) wireless data transmission unit (05) input data processing unit (06) is passed through after gathering;
3) next position to be measured is moved to, by step 2) measurements of the operation up to completing whole points to be measured;
4) data processing unit (06), by the Fitting Calculation, is obtained according to the spatial positional information and highly deviated information that are obtained To the flatness information of mechanical workpieces plane to be measured.
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CN107436131A (en) * 2017-08-30 2017-12-05 东莞欧达电子有限公司 The measurement of planeness system and its measuring method of a kind of laser alignment equipment
CN109186471A (en) * 2018-07-05 2019-01-11 歌尔股份有限公司 The detection method and device of lead height
CN109341538A (en) * 2018-10-17 2019-02-15 太原科技大学 A kind of measurement method measuring bearing offset
CN109518725A (en) * 2018-12-27 2019-03-26 镇江市高等专科学校 Inspection well cover position on-Line Monitor Device and method
CN109975796A (en) * 2019-04-11 2019-07-05 清华大学深圳研究生院 Integrated position measurement and adjustment device and method
CN110057555A (en) * 2019-05-28 2019-07-26 易思维(杭州)科技有限公司 Laser line generator flatness detection method and system
CN110207625A (en) * 2019-04-25 2019-09-06 三门三友科技股份有限公司 A kind of cathode plate flatness dynamic detection system and method
CN110440701A (en) * 2019-07-11 2019-11-12 南京中车浦镇城轨车辆有限责任公司 A kind of intelligent more curved surface detecting systems of rail vehicle and method
CN111904074A (en) * 2020-08-20 2020-11-10 上海交通大学 Human body digital measuring device based on infrared laser speckle projection
CN112325808A (en) * 2020-11-03 2021-02-05 北京石油化工学院 Flatness real-time calibration compensation measurement method based on multiple PSDs
CN113720282A (en) * 2021-08-25 2021-11-30 广东奥普特科技股份有限公司 Method and device for measuring flatness of tab

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Cited By (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107436131A (en) * 2017-08-30 2017-12-05 东莞欧达电子有限公司 The measurement of planeness system and its measuring method of a kind of laser alignment equipment
CN109186471B (en) * 2018-07-05 2021-02-19 歌尔光学科技有限公司 Lead height detection method and device
CN109186471A (en) * 2018-07-05 2019-01-11 歌尔股份有限公司 The detection method and device of lead height
CN109341538A (en) * 2018-10-17 2019-02-15 太原科技大学 A kind of measurement method measuring bearing offset
CN109518725A (en) * 2018-12-27 2019-03-26 镇江市高等专科学校 Inspection well cover position on-Line Monitor Device and method
CN109518725B (en) * 2018-12-27 2023-10-03 镇江市高等专科学校 Inspection well cover position on-line monitoring device and method
CN109975796A (en) * 2019-04-11 2019-07-05 清华大学深圳研究生院 Integrated position measurement and adjustment device and method
CN110207625A (en) * 2019-04-25 2019-09-06 三门三友科技股份有限公司 A kind of cathode plate flatness dynamic detection system and method
CN110057555B (en) * 2019-05-28 2020-09-04 易思维(杭州)科技有限公司 Method for detecting flatness of line laser
CN110057555A (en) * 2019-05-28 2019-07-26 易思维(杭州)科技有限公司 Laser line generator flatness detection method and system
CN110440701A (en) * 2019-07-11 2019-11-12 南京中车浦镇城轨车辆有限责任公司 A kind of intelligent more curved surface detecting systems of rail vehicle and method
CN111904074A (en) * 2020-08-20 2020-11-10 上海交通大学 Human body digital measuring device based on infrared laser speckle projection
CN112325808A (en) * 2020-11-03 2021-02-05 北京石油化工学院 Flatness real-time calibration compensation measurement method based on multiple PSDs
CN113720282A (en) * 2021-08-25 2021-11-30 广东奥普特科技股份有限公司 Method and device for measuring flatness of tab

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