CN104570612A - Wafer receiving hand device for workpiece table - Google Patents
Wafer receiving hand device for workpiece table Download PDFInfo
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- CN104570612A CN104570612A CN201310513598.XA CN201310513598A CN104570612A CN 104570612 A CN104570612 A CN 104570612A CN 201310513598 A CN201310513598 A CN 201310513598A CN 104570612 A CN104570612 A CN 104570612A
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- mounting base
- contact pin
- supporting component
- work stage
- pad
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Abstract
The invention relates to a wafer receiving hand device for a workpiece table. The wafer receiving hand device comprises a mounting base, a supporting assembly, a driving assembly, a measuring unit, an air control unit and an auxiliary supporting assembly, wherein the supporting assembly is mounted on the mounting base and is used for bearing and adsorbing workpieces; the driving assembly is mounted on the mounting base and is used for driving the supporting assembly to vertically move; the measuring unit is fixed between the mounting base and the supporting assembly and is used for measuring the displacement of the vertical motion of the supporting assembly; the air control unit is fixed on the mounting base and is used for supplying auxiliary supporting and power down protection to the workpieces; the auxiliary supporting assembly is fixed on the mounting base and is connected with the supporting assembly to perform synchronous movement so as to support the workpieces. According to the wafer receiving hand device for the workpiece table, a static thrust of a motor caused by load change is solved, so that the wafer receiving hand device can rapidly and accurately move; as the supporting assembly and the auxiliary supporting assembly are driven by the same motor, the synchronism is improved.
Description
Technical field
The present invention relates to semiconductor lithography apparatus field, particularly relate to a kind of work stage contact pin arm device.
Background technology
Work stage contact pin arm device (Lift-Pin) belongs to photo-etching machine work-piece platform subsystem, for completing the work of work stage lifting workpiece (glass substrate or silicon chip).Common contact pin arm device has pneumatic or motorized motions, and the acceleration of motion that this mechanism can reach and kinematic accuracy will directly have influence on the productive rate of litho machine.Along with the development of photoetching technique, more and more higher requirement is proposed to productive rate and complete machine integrated level, in order to improve the speed that productive rate just needs lifting workpieces to transmit, this just proposes requirements at the higher level to the movement velocity of contact pin arm device (Lift-Pin) and acceleration of participating in Workpiece circulation in work stage directly, cause its powered actuation mechanism volume to increase to a certain extent, then may affect the integrated requirement of complete machine.For promoting the sport efficiency of contact pin arm device, there is following several different solution at present:
The first scheme: propose a contact pin arm device be made up of cylinder and linkage assembly, the fixed point that this device adopts cylinder and linkage assembly to realize workpiece is transmitted.The shortcoming of this method is that workpiece motion s speed is uneven, complex structure, and cost is higher, and cannot adapt to the operating mode becoming gravity;
First scheme: propose the contact pin arm device that by servomotor is driving element, this device adopts the physical construction load-supporting gravity such as hinge, adopts rotary actuation mode to be used for vertical location.Although the mechanical support patten's design such as hinge are simple, there is the non-linear factors such as friction and gap in its transmission process, directly affects positioning precision, and process and assembly difficulty high, manufacturability is not good;
The third scheme: use linear motor direct drive, because load quality change the motor generation static thrust caused, can cause that the motor feels hot, cause motor size to strengthen simultaneously.The workpiece deformation that the heating of motor causes, and affect measuring accuracy due to change of temperature field, finally affect the precision of contact pin arm device.The vertical motor of larger number, by enlarging mechanism quality, finally affects kinematic accuracy.
Summary of the invention
The invention provides a kind of work stage contact pin arm device, to solve contact pin arm device complex structure in prior art, cost is high, the problem of processing, the high and low precision of assembly difficulty.
For solving the problems of the technologies described above, the invention provides a kind of work stage contact pin arm device, comprising mounting base, supporting component, driven unit, measuring unit, gas control unit and auxiliary support assemblies, wherein,
Described supporting component is installed on described mounting base, for carrying and adsorbing workpiece;
Described driven unit is arranged on described mounting base, drives described supporting component catenary motion;
Described measuring unit is fixed between described mounting base and described supporting component, measures the displacement of described supporting component catenary motion;
Described gas control unit is fixed on described mounting base for described workpiece provides supplemental support and power down protection;
Described auxiliary support assemblies is fixed on described mounting base, and is connected with described supporting component, and the two is synchronized with the movement as described workpiece provides support.
Preferably, described mounting base comprises X to top board, mounting base plate and support, and described mounting base plate and described support are all fixedly installed on the center of described X to top board, builds the motion platform supporting described supporting component; Described auxiliary support assemblies is fixed on the periphery of described X to top board.
Preferably, described mounting base also comprises preloading spring, and the two ends of described preloading spring are connected to described X respectively to top board and described supporting component.
Preferably, described supporting component comprises back up pad, some hollow pillar stands and contact pin finger, described some hollow pillar stands are distributed in described back up pad, and the top of described hollow pillar stand is fixedly connected with contact pin finger respectively, and described driven unit is fixedly connected with described back up pad.
Preferably, described contact pin finger is also provided with loading end and sucker, and described sucker is connected to negative pressure source by described hollow pillar stand.
Preferably, described driven unit comprises linear electric motors, line slideway, guide rail splice, described guide rail splice slides along described line slideway under the drive of described linear electric motors, described guide rail splice is lifted plate by first and is connected with described back up pad, and drives described back up pad to be synchronized with the movement.
Preferably, described measuring unit comprises glass raster chi, grating scale installing plate, encoder count head and read head support, described glass raster chi is fixed on described support by described grating scale installing plate, and described encoder count head is fixed in described back up pad by described read head support.
Preferably, described gas control unit comprises Rodless cylinder and second and lifts plate, and described Rodless cylinder is fixed on described mounting base plate, and described second lifts plate is fixedly connected with described Rodless cylinder, and described second lifts the below that plate is installed on described back up pad.
Preferably, also comprise throttling valve in described gas control unit, described throttling valve is installed in described Rodless cylinder.
Preferably, described auxiliary support assemblies comprises bracing frame, flexible cable, directive slide track, linked block, auxiliary thimble and three pulley mechanisms, described directive slide track is vertical to be fixed on support frame as described above, described linked block is vertically slided by described directive slide track, described auxiliary thimble is fixed on the top of described linked block, the two ends of described flexible cable are connected to described back up pad and described linked block respectively, and described flexible cable is turned to by described three pulley mechanisms.
Preferably, described auxiliary support assemblies also comprises a spring, and the two ends of described spring are connected to support frame as described above and described linked block respectively.
Compared with prior art, the present invention has the following advantages:
1. adopt the vertical deviation of measuring unit to supporting component to measure, this displacement information is fed back to driven unit, accurately location can be realized fast;
2. adopt gas control unit to provide supplemental support for workpiece, reduce exerting oneself of driven unit, ensure this device high-speed, high precision locomitivity, as the power down of emergency case driven unit, described gas control unit can continue to support workpiece, prevents the damage because the landing of supporting component mistake power may cause workpiece;
3. supporting component and auxiliary support assemblies adopt single motor to drive, cost-saving, and sync rates is high.
Accompanying drawing explanation
The structural representation of a kind of work stage contact pin arm device of Fig. 1 embodiment of the invention;
The structural representation of supporting component and driven unit in a kind of work stage contact pin arm device of Fig. 2 embodiment of the invention;
Fig. 3 is the structural representation of gas control unit in the work stage contact pin arm device of the embodiment of the invention;
Fig. 4 is the structural representation of measuring unit in the work stage contact pin arm device of the embodiment of the invention;
Fig. 5 is the structural representation that in the work stage contact pin arm device of the embodiment of the invention, auxiliary support assemblies is connected with supporting component;
Fig. 6 is the structural representation of auxiliary support assemblies in the work stage contact pin arm device of the embodiment of the invention;
Fig. 7 is the control block diagram of active suspension system in the work stage contact pin arm device of the embodiment of the invention.
In Fig. 1-6: 100-mounting base, 110-X is to top board, 120-mounting base plate, 130-support, 140-preloading spring, 200-supporting component, 210-back up pad, 220-hollow pillar stand, 230-contact pin is pointed, 300-driven unit, 310-linear electric motors, 320-line slideway, 330-guide rail splice, 340-first lifts plate, 400-measuring unit, 410-glass raster chi, 420-grating scale installing plate, 430-encoder count head, 440-read head support, 500-gas control unit, 510-Rodless cylinder, 520-second lifts plate, 600-auxiliary support assemblies, 610-bracing frame, 620-flexible cable, 630-directive slide track, 640-linked block, 650-assists thimble, 660-pulley mechanism, 670-spring.
Embodiment
For enabling above-mentioned purpose of the present invention, feature and advantage become apparent more, are described in detail the specific embodiment of the present invention below in conjunction with accompanying drawing.It should be noted that, accompanying drawing of the present invention all adopts the form of simplification and all uses non-ratio accurately, only in order to object that is convenient, the aid illustration embodiment of the present invention lucidly.
Work stage contact pin arm device provided by the invention, as shown in Figure 1, and composition graphs 2 to Fig. 6, comprise mounting base 100, supporting component 200, driven unit 300, measuring unit 400, gas control unit 500 and auxiliary support assemblies 600, wherein,
Described supporting component 200 is installed on described mounting base 100, for carrying and adsorbing workpiece (not shown);
Described driven unit 300 is installed on described mounting base 100, drives described supporting component 200 vertical (i.e. Z-direction in figure) to move;
Described measuring unit 400 is fixed between described mounting base 100 and described supporting component 200, measures the displacement of described supporting component 200 catenary motion;
Described gas control unit 500 is fixed on described mounting base 100 for described workpiece provides supplemental support and power down protection;
Described auxiliary support assemblies 600 is fixed on described mounting base 100, and is connected with described supporting component 200, and the two is synchronized with the movement as described workpiece provides support.
The present invention utilizes gas control unit 500 to solve the motor static thrust that causes because load change, make the motion of this device more fast accurate, and supporting component 200 and auxiliary support assemblies 600 adopts single motor to drive, and improve synchronism.
Preferably, please refer to Fig. 1 to Fig. 4, described mounting base 100 comprises X to top board 110, mounting base plate 120 and support 130, described mounting base plate 120 is all fixedly installed on the center of described X to top board 110 with described support 130, described auxiliary support assemblies 600 is fixed on the periphery of described X to top board 110, particularly, described mounting base 100 is the support of whole device, described X is the bracket of whole device to top board 110, described mounting base plate 120 and support 130, build the motion platform of described supporting component 200 jointly.
Preferably, please refer to Fig. 2 to Fig. 4, described mounting base 100 also comprises preloading spring 140, and the two ends of described preloading spring 140 are connected to described X to top board 110 and described supporting component 200, respectively to increase the rigidity of device.
Preferably, please continue to refer to Fig. 2 to Fig. 4, described supporting component 200 comprises back up pad 210, some hollow pillar stands 220 and contact pin finger 230, described some hollow pillar stands 220 are distributed in described back up pad 210, the top of described hollow pillar stand 220 is fixedly connected with contact pin finger 230 respectively, in the present embodiment, described back up pad 210 is rectangle, described hollow pillar stand 220 is four, be distributed in four drift angle places of rectangular supporting board 210, the quantity of described contact pin finger 230 is corresponding with the quantity of described hollow pillar stand 220, also be four, four contact pin fingers 230 are individually fixed in described hollow pillar stand 220 top, and outwards launch, particularly, described contact pin finger 230 is also provided with loading end and sucker (not shown), described sucker is connected to negative pressure source by described hollow pillar stand 220, described loading end is used for and described absorption surface, and provide support power, when negative pressure source is opened, described sucker is evacuated to vacuum state by hollow pillar stand 220, workpiece is adsorbed.
Preferably, as depicted in figs. 1 and 2, described driven unit 300 comprises linear electric motors 310, line slideway 320, guide rail splice 330, described guide rail splice 330 slides along described line slideway 320 under the drive of described linear electric motors 310, described guide rail splice 330 with lift plate 340 by first and be connected with described back up pad 210, and drive described back up pad 210 to be synchronized with the movement.Particularly, described linear electric motors 310 are driving element unique in device, be responsible for the power providing described supporting component 200 to move along Z-direction, described line slideway 320 is synchronized with the movement under the interlock of guide rail splice 330 with linear electric motors 310, and driving force is lifted plate 340 by first and passed to supporting component 200; Described first lifts plate 340 one end is connected with described back up pad 210, and the other end is connected with described guide rail splice 330.
Preferably, please emphasis with reference to figure 4, described measuring unit 400 comprises glass raster chi 410, grating scale installing plate 420, encoder count head 430 and read head support 440, described glass raster chi 410 is fixed on described support 130 by described grating scale installing plate 420, and described encoder count head 430 is fixed in described back up pad 210 by described read head support 440.The vertical deviation of described measuring unit 400 pairs of supporting components 200 is measured, and this displacement information is fed back to described driven unit 300, thus realizes accurately locating fast.
Preferably, described gas control unit 500 comprises Rodless cylinder 510 and second and lifts plate 520, described Rodless cylinder 510 is fixed on described mounting base plate 120, described second lifts the below that plate 520 is installed on described back up pad 210, and one end is fixedly connected with described Rodless cylinder 510, particularly, described Rodless cylinder 510 comprises cylinder body and slide block two parts, described cylinder body is fixed on described mounting base plate 120, described slide block catenary motion, described slide block and described second is lifted plate 520 and is fixedly connected with, thus transmits anchorage force to described back up pad 210.Adopt this gas control unit 500 to described back up pad 210, namely supporting component 200 carries out supplemental support, the gravity of mechanism loading part, reducing mechanism upwards accelerated motion time demand to linear electric motors 310 power output, ensure the ability that work stage contact pin arm device high-speed, high precision of the present invention moves, adopt Rodless cylinder 510 to increase kinetic damping, improve the rigidity of system, strengthen the stationarity of motion.In addition, linear electric motors 310 power down in case of as described in emergency case, described gas control unit 500 can continue to support described back up pad 210, prevents because back up pad 210 loses the damage that power landing may cause other parts and workpiece.
Preferably, throttling valve (not shown) is also comprised in described gas control unit 500, described throttling valve is installed in described Rodless cylinder 510, the static thrust that Active Compensation linear electric motors 310 export, guarantee in supporting component 200 descending motion process, top lift remains unchanged, and improves the effect of supplemental support further, makes the present invention possess the locomitivity of high-speed, high precision.
Preferably, please refer to Fig. 5 and Fig. 6, described auxiliary support assemblies 600 comprises bracing frame 610, flexible cable 620, directive slide track 630, linked block 640, auxiliary thimble 650 and three pulley mechanisms 660, described directive slide track 630 is vertical to be fixed on support frame as described above 610, described linked block 640 is vertically slided by described directive slide track 630, described auxiliary thimble 650 is fixed on the top of described linked block 640, the two ends of described flexible cable 620 are connected to described back up pad 210 and described linked block 640 respectively, described flexible cable 620 is turned to by described three pulley mechanisms 660, when described supporting component 200 moves upward, on described flexible cable 620, each section of stressing conditions after described pulley mechanism 660 turns to is as shown in the direction of arrow in Fig. 5, particularly, the quantity of described auxiliary support assemblies 600 and arrangement mode can regulate according to the shape of workpiece and size, in the present embodiment, described auxiliary support assemblies 600 is arranged on the corner of described X to top board 110, described back up pad 210 bottom surface is connected with flexible cable 620, be connected with linked block 640 by three pulley mechanisms 660, realize the function that is synchronized with the movement of back up pad 210 and linked block 640, namely realize described contact pin finger 230 and being synchronized with the movement of described auxiliary thimble 650, thus provide supplemental support power for workpiece.Preferably, described auxiliary support assemblies 600 also comprises a spring 670, and the two ends of described spring 670 are connected to support frame as described above 610 and described linked block 640 respectively, uses for auxiliary support assemblies 600 playbacks.
Please continue to refer to Fig. 1 to Fig. 6, the concrete action specification of work stage contact pin arm device provided by the invention is as follows:
Original state:
The mover of linear electric motors 310 is not initial position (namely exerting oneself), and Rodless cylinder 510 is lifted plate 520 by described second and provided certain to described back up pad 210 and upwards lift power, namely for supporting component 200 provides supplemental support; Described auxiliary support assemblies 600 is also in initial position, and described linked block 640 is connected with back up pad 210 along pulley mechanism 660 by flexible cable 620.
Enhancing action:
The mover of described linear electric motors 310 moves upward, guide rail splice 330 upwards promotes under the guide effect of line slideway 320, lifting force is lifted plate 340 by first and is passed to back up pad 210, supporting component 200 moves upward, and measuring unit 400 is to the relative displacement of control module (not shown) feedback supporting component 200; Rodless cylinder 510 receives control module signal, the slide block of Rodless cylinder 510 and the stator of linear electric motors 310 synchronously move upward, continue as supporting component 200 and supplemental support is provided, wherein, the driving force needed for described linear electric motors 310 lifting supporting component 200 has a big chunk all to be digested by Rodless cylinder 510;
Described back up pad 210 does Z-direction positive movement, drive the flexible cable 620 be connected to below it, flexible cable 620 is connected with the linked block 640 in auxiliary support assemblies 600 by pulley mechanism 660, pass through pulley drive, linked block 640 and back up pad 210 synchronously move upward, and described auxiliary thimble 650 provides supplemental support for workpiece;
Described measuring unit 400 reads supporting component 200 displacement, when displacement arrives upper limit, described linear electric motors 310 stop with Rodless cylinder 510, supporting component 200 stop motion, described Rodless cylinder 510 increases system damping, and supporting component 200 is tended towards stability more fast; Flexible cable 620 on linked block 640 in described auxiliary support assemblies 600 loses upwards acceleration, is issued to stress balance, synchronous stop motion in the effect of spring 670 pretightning force.
Down maneuver:
Described linear electric motors 310 drive supporting component 200 to move downward, acceleration of motion is a, slide block in Rodless cylinder 510 moves down simultaneously, under the throttling valve effect of gas control unit 500, ensure constant to the top lift of described supporting component 200, Rodless cylinder 510 increases the damping of this device, adds the stability of device, and can not increase the burden of linear electric motors 310 driving force;
Described back up pad 210 moves downward, and under the gearing of pulley mechanism 660, flexible cable on the linked block 640 in auxiliary support assemblies 600 620 relaxes, and auxiliary thimble 650, under the acting force of spring 670, synchronously moves downward with supporting component 200;
Described measuring unit 400 reads the Z-direction displacement of supporting component 200, and when displacement arrives lower limit, linear electric motors 310 and Rodless cylinder 510 stop, and supporting component 200 and auxiliary support assemblies 600 synchronously get back to initial position.
Cylinder control loop:
It should be noted that, in the practical application of prior art, contact pin arm device is lifted in the process of displacement to workpiece, and the driving force of linear electric motors 310 is curves that an elder generation delays suddenly afterwards.Produce static thrust because load quality changes the linear electric motors 310 caused, linear electric motors 310 can be caused to generate heat, affect the precision of precise motion platform.And the present invention improves gas control unit 500, adopt the control method increasing compensation loop in position loop, its control principle block diagram as shown in Figure 7.In the present embodiment, the anchorage force that gas control unit 500 provides in supporting component 200 motion process is up and down constant, not with change in displacement; The pneumatic controller of Rodless cylinder 510 adopts throttling valve to add a low-pass first order filter composition, for eliminating the motor static force that load Gravity changer causes.Its form is:
wherein 1≤k
p≤ 50 is gain, and f≤10Hz is the cutoff frequency of low-pass filter, thus allows Rodless cylinder 510 provide dynamic supplemental support power.
In sum, work stage contact pin arm device provided by the invention, comprise mounting base 100, supporting component 200, driven unit 300, measuring unit 400, gas control unit 500 and auxiliary support assemblies 600, wherein, described supporting component 200 is installed on described mounting base 100, for carrying and adsorbing workpiece; Described driven unit 300 is installed on described mounting base 100, drives described supporting component 200 catenary motion; Described measuring unit 400 is fixed between described mounting base 100 and described supporting component 200, measures the displacement of described supporting component 200 catenary motion; Described gas control unit 500 is fixed on described mounting base 100 for described workpiece provides supplemental support and power down protection; Described auxiliary support assemblies 600 is fixed on described mounting base 100, and is connected with described supporting component 200, and the two is synchronized with the movement as described workpiece provides support.The present invention utilizes gas control unit 500 to solve the motor static thrust that causes because load change, make the motion of this device more fast accurate, and supporting component 200 and auxiliary support assemblies 600 adopts single motor to drive, raising synchronism.
Obviously, those skilled in the art can carry out various change and modification to invention and not depart from the spirit and scope of the present invention.Like this, if these amendments of the present invention and modification belong within the scope of the claims in the present invention and equivalent technologies thereof, then the present invention is also intended to comprise these change and modification.
Claims (11)
1. a work stage contact pin arm device, is characterized in that, comprises mounting base, supporting component, driven unit, measuring unit, gas control unit and auxiliary support assemblies, wherein,
Described supporting component is installed on described mounting base, for carrying and adsorbing workpiece;
Described driven unit is arranged on described mounting base, drives described supporting component catenary motion;
Described measuring unit is fixed between described mounting base and described supporting component, measures the displacement of described supporting component catenary motion;
Described gas control unit is fixed on described mounting base for described workpiece provides supplemental support and power down protection;
Described auxiliary support assemblies is fixed on described mounting base, and is connected with described supporting component, and the two is synchronized with the movement as described workpiece provides support.
2. work stage contact pin arm device as claimed in claim 1, it is characterized in that, described mounting base comprises X to top board, mounting base plate and support, described mounting base plate and described support are all fixedly installed on the center of described X to top board, build the motion platform supporting described supporting component; Described auxiliary support assemblies is fixed on the periphery of described X to top board.
3. work stage contact pin arm device as claimed in claim 2, it is characterized in that, described mounting base also comprises preloading spring, and the two ends of described preloading spring are connected to described X respectively to top board and described supporting component.
4. work stage contact pin arm device as claimed in claim 2, it is characterized in that, described supporting component comprises back up pad, some hollow pillar stands and contact pin finger, described some hollow pillar stands are distributed in described back up pad, the top of described hollow pillar stand is fixedly connected with contact pin finger respectively, and described driven unit is fixedly connected with described back up pad.
5. work stage contact pin arm device as claimed in claim 4, is characterized in that, described contact pin finger is also provided with loading end and sucker, and described sucker is connected to negative pressure source by described hollow pillar stand.
6. work stage contact pin arm device as claimed in claim 4, it is characterized in that, described driven unit comprises linear electric motors, line slideway, guide rail splice, described guide rail splice slides along described line slideway under the drive of described linear electric motors, described guide rail splice is lifted plate by first and is connected with described back up pad, and drives described back up pad to be synchronized with the movement.
7. work stage contact pin arm device as claimed in claim 4, it is characterized in that, described measuring unit comprises glass raster chi, grating scale installing plate, encoder count head and read head support, described glass raster chi is fixed on described support by described grating scale installing plate, and described encoder count head is fixed in described back up pad by described read head support.
8. work stage contact pin arm device as claimed in claim 4, it is characterized in that, described gas control unit comprises Rodless cylinder and second and lifts plate, described Rodless cylinder is fixed on described mounting base plate, described second lifts plate is fixedly connected with described Rodless cylinder, and described second lifts the below that plate is installed on described back up pad.
9. work stage contact pin arm device as claimed in claim 8, it is characterized in that, also comprise throttling valve in described gas control unit, described throttling valve is installed in described Rodless cylinder.
10. work stage contact pin arm device as claimed in claim 4, it is characterized in that, described auxiliary support assemblies comprises bracing frame, flexible cable, directive slide track, linked block, auxiliary thimble and three pulley mechanisms, described directive slide track is vertical to be fixed on support frame as described above, described linked block is vertically slided by described directive slide track, described auxiliary thimble is fixed on the top of described linked block, the two ends of described flexible cable are connected to described back up pad and described linked block respectively, and described flexible cable is turned to by described three pulley mechanisms.
11. work stage contact pin arm devices as claimed in claim 10, it is characterized in that, described auxiliary support assemblies also comprises a spring, and the two ends of described spring are connected to support frame as described above and described linked block respectively.
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| Application Number | Priority Date | Filing Date | Title |
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| CN201310513598.XA CN104570612B (en) | 2013-10-25 | 2013-10-25 | A kind of work stage contact pin arm device |
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| CN201310513598.XA CN104570612B (en) | 2013-10-25 | 2013-10-25 | A kind of work stage contact pin arm device |
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| CN104570612A true CN104570612A (en) | 2015-04-29 |
| CN104570612B CN104570612B (en) | 2016-09-28 |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN107561870A (en) * | 2016-06-30 | 2018-01-09 | 上海微电子装备（集团）股份有限公司 | A kind of sports platform adsorbent equipment and lithographic equipment |
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| CN102272914A (en) * | 2008-12-31 | 2011-12-07 | 伊雷克托科学工业股份有限公司 | Monolithic stage positioning system and method |
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| JP2008235470A (en) * | 2007-03-19 | 2008-10-02 | Nikon Corp | Planar motor apparatus, stage apparatus, exposure apparatus, and device manufacturing method |
| US20100157273A1 (en) * | 2008-12-22 | 2010-06-24 | Asml Netherlands B.V. | Lithographic apparatus and device manufacturing method |
| CN102272914A (en) * | 2008-12-31 | 2011-12-07 | 伊雷克托科学工业股份有限公司 | Monolithic stage positioning system and method |
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