CN104538494A - Automatic slicing machine for manufacturing single-photon detectors - Google Patents
Automatic slicing machine for manufacturing single-photon detectors Download PDFInfo
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- CN104538494A CN104538494A CN201410815160.1A CN201410815160A CN104538494A CN 104538494 A CN104538494 A CN 104538494A CN 201410815160 A CN201410815160 A CN 201410815160A CN 104538494 A CN104538494 A CN 104538494A
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- 238000004519 manufacturing process Methods 0.000 title abstract 2
- 238000005520 cutting process Methods 0.000 claims abstract description 38
- 238000000034 method Methods 0.000 claims abstract description 12
- 239000010409 thin film Substances 0.000 claims abstract description 7
- 239000010408 film Substances 0.000 claims description 55
- 238000001514 detection method Methods 0.000 claims description 9
- 230000001105 regulatory effect Effects 0.000 claims description 9
- 238000002360 preparation method Methods 0.000 claims description 8
- 239000000428 dust Substances 0.000 claims description 3
- 238000001179 sorption measurement Methods 0.000 claims description 3
- 230000000712 assembly Effects 0.000 abstract 1
- 238000000429 assembly Methods 0.000 abstract 1
- 229920002120 photoresistant polymer Polymers 0.000 description 7
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 6
- 239000010703 silicon Substances 0.000 description 6
- 229910052710 silicon Inorganic materials 0.000 description 6
- 239000002184 metal Substances 0.000 description 5
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 description 4
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 4
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 description 4
- 238000005516 engineering process Methods 0.000 description 4
- 239000000843 powder Substances 0.000 description 3
- 238000004458 analytical method Methods 0.000 description 2
- 238000005530 etching Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- 229910021642 ultra pure water Inorganic materials 0.000 description 2
- 239000012498 ultrapure water Substances 0.000 description 2
- 238000010521 absorption reaction Methods 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000029918 bioluminescence Effects 0.000 description 1
- 238000005415 bioluminescence Methods 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 230000001066 destructive effect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 229910003460 diamond Inorganic materials 0.000 description 1
- 239000010432 diamond Substances 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000001755 magnetron sputter deposition Methods 0.000 description 1
- 239000003550 marker Substances 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 238000001020 plasma etching Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 238000004513 sizing Methods 0.000 description 1
- 230000003595 spectral effect Effects 0.000 description 1
- 230000007704 transition Effects 0.000 description 1
Classifications
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- H01L31/18—
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
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- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Sampling And Sample Adjustment (AREA)
Abstract
The invention discloses an automatic slicing machine for manufacturing single-photon detectors. The automatic slicing machine comprises a rack, a motion platform, a slicing assembly, a recognition assembly and a control assembly, wherein the rack is used for mounting all assemblies, and the motion platform, the slicing assembly and the recognition assembly are mounted on the rack; the motion platform can move in the X-axis direction and the Y-axis direction; the slicing assembly and the recognition assembly are both located above the motion platform, the recognition assembly is used for conducting alignment on a thin film fixed to the motion platform, and the slicing assembly is used for cutting the thin film fixed to the motion platform; the control assembly is connected with the motion platform and the recognition assembly and used for receiving data signals of the recognition assembly and controlling the motion platform to move in the X-axis direction and the Y-axis direction. Compared with the prior art that alignment needs to be conducted once when cutting and marking are conducted every time, the automatic slicing machine has the advantages that the efficiency in the whole cutting and marking process is greatly improved, the cutting and marking accuracy is also greatly improved, and the application range is wider compared with a slicing machine achieving semi-automatic cutting by setting a cutting interval.
Description
Technical field
The invention belongs to single photon detection technical field, be specifically related to a kind of automatic clinical microtome for the preparation of single-photon detector.
Background technology
Single-photon detector is a kind of device very responsive to single quantum materials such as photons, surveys the fields such as dirt, bioluminescence, radioactivity detection, high-energy physics, astronomical light-metering, optical time domain reflection (OTDR), quantum key distribution system (QKD) have a wide range of applications at high-resolution spectral measurement, non-destructive species analysis, the detection of high speed phenomenon, rigorous analysis, air.Because this kind of detector is all be operated in the warm area lower than 1K, contrast common photonic semiconductor detector (as photomultiplier and avalanche photodide), they are with its exclusive high detection sensitivity, low background noise, the features such as low secret mark digit rate and faster signal response speed become the outstanding person in photon detector.
In recent years, a kind of superconduction boundary transition transducer (Transition-Edge Sensors of based superconductive critical condition conversion, TES) develop rapidly is obtained, its principle is, when on photon irradiation to the superconducting thin film being connected with certain electric current, photon produce by film absorption heat and make local temperature be elevated to superconduction critical temperature, thus form local non-superconducting state, the existence in this non-superconducting district obviously can change loop resistance, thus produce a detectable curent change, the object of single photon detection is realized by the measurement of this variable-current.
In the preparation process of detector, need to grow layer of metal film on a silicon substrate, usually in one piece of large substrate, grow layer of metal film, be then etched into the circuitry shapes of needs, then be cut into sample little one by one.Because silicon chip has certain thickness and hardness is higher, not easily directly cut open, be cut in the process of small pieces at above-mentioned superconducting thin film, generally adopt the mode of aiming at cutting position under the microscope and manually cutting, efficiency is low, line weak effect, not easy fitted; What also have first determines initial cut location, then realizes semi-automatic cutting by arranging cutting spacing, is difficult to realize full-automatic cutting.
Summary of the invention
The object of the invention is to solve the problem, automaticity high, contraposition convenient slicing machine accurately when a kind of cutting single-photon detector film is provided.
For solving the problems of the technologies described above, technical scheme of the present invention is: a kind of automatic clinical microtome for the preparation of single-photon detector, comprises the frame for installing each assembly; Rack-mounted motion platform, section assembly and recognizer component, motion platform can move in X-direction and Y direction, section assembly and recognizer component are all positioned at above motion platform, recognizer component is used for carrying out contraposition to fixing film on the moving platform, and section assembly is for cutting fixing film on the moving platform; The control assembly be connected with recognizer component with motion platform, control assembly for receive the data-signal of recognizer component and controlled motion platform in the movement of X-direction and Y direction.
Preferably, described recognizer component comprises two and is arranged side by side and the adjustable transducer of relative distance, the position line of transducer on identification form photon detector film, the detection light of two sensor emission is positioned at same plane with section assembly for the blade cutting film.
Preferably, also comprise rack-mounted microscope, microscope is for observing the alignment situation of recognizer component and film.
Preferably, also comprise rack-mounted dedusting assembly, for collecting the dust in cutting thin-film process.
Preferably, described section assembly comprises the hinged cross bar of blade and frame for cutting fixing film on the moving platform, for installing the mounting blocks of blade, the regulating block for pressure between adjustable blade and film; One end and the mounting blocks of cross bar are hinged, the other end and regulating block threaded engagement.
Preferably, described section assembly also comprises longitudinal adjusting screw(rod), and one end of longitudinal adjusting screw(rod) and frame threaded engagement, the other end abuts with the lower surface of cross bar.
Preferably, described motion platform comprises rack-mounted X-axis moving cell, is arranged on the Y-axis moving cell of X-axis moving cell output and the panel for fixed film; Described erecting of panel is on the output of X-axis moving cell.
Preferably, described panel is provided with the adsorption hole be connected with vacuum source.
Preferably, the motor that described Y-axis moving cell comprises ball screw and is connected with ball screw, motor is connected with control assembly, and control assembly can control the rotation of motor.
The operation principle of automatic clinical microtome for a better understanding of the present invention, be briefly described the preparation method of the single-photon detector film being applicable to automatic clinical microtome of the present invention, the preparation method of this single-photon detector film comprises the steps:
S1, select silicon chip as base material, silicon chip is cleaned by ultrasonic oscillator successively in acetone, ethanol, hydrofluoric acid and ultra-pure water, then air-dry;
S2, silicon chip after cleaning adopt magnetron sputtering technique growing metal film;
S3, covering one deck photoresist at the surface uniform of metallic film, and baking makes photoresist solidify sizing;
S4, by mask plate cover on a photoresist, exposed photoresist by mask aligner ultraviolet, mask plate surrounding is evenly distributed with prefabricated location notch, and for etching telltale mark on silicon chip, this telltale mark is position line;
S5, take off mask plate, and erode the part be exposed in photoresist with developer solution, also need after development to remove the residual photoresist of developing process by oxide etch;
S6, by development after film etch away exposed metal film portion by dry etch process, the dry etch process of employing is specially reactive ion etching process;
S7, the film after etching successively to be cleaned by ultrasonic oscillator in acetone, ethanol, hydrofluoric acid and ultra-pure water and air-dry, to remove remaining photoresist.
The invention has the beneficial effects as follows: the automatic clinical microtome for single-photon detector film provided by the present invention, the single-photon detector film with position line is fixed on the moving platform and makes unidirectional position line parallel with the transmitting terminal line of two transducers, open slicing machine, control assembly controlled motion platform moves in Y direction, until two transducers all align with same position line, control assembly receives the signal of transducer thus controlled motion platform stops at the movement of Y direction, the blade position of adjustment section assembly, makes the blade of blade just can cut out line at single-photon detector film, control assembly controlled motion platform moves back and forth once in X-direction, complete and once cut and cross, motion platform playback after line, two transducers align with this position line again, then control assembly controlled motion platform moves in Y direction, until two transducers align with next position line, control assembly receives the motion of signal stop motion platform in Y direction of transducer, controlled motion platform drives single-photon detector film to move back and forth once in X-direction again, complete and cut and cross again, iteration above-mentioned steps, this slicing machine just can complete that single-photon detector film is unidirectional to be cut and crossed, then by motion platform half-twist, repeat above-mentioned steps, cutting and crossing of another direction can be completed.
Accompanying drawing explanation
Fig. 1 is the structural representation of automatic clinical microtome of the present invention;
Fig. 2 is the schematic diagram of single-photon detector position line of the present invention.
Description of reference numerals: 11, mount pad one; 12, screw rod mount pad; 13, mount pad two; 21, panel; 31, blade; 32, longitudinal adjusting screw(rod); 33, cross bar; 34, mounting blocks; 35, regulating block; 41, transducer; 5, microscope; 6, sample block; 7, position line.
Embodiment
Below in conjunction with the drawings and specific embodiments, the present invention is described further:
As depicted in figs. 1 and 2, the automatic clinical microtome for the preparation of single-photon detector of the present invention, comprises the frame for installing each assembly; Rack-mounted motion platform, section assembly and recognizer component, motion platform can move in X-direction and Y direction, section assembly and recognizer component are all positioned at above motion platform, recognizer component is used for carrying out contraposition to fixing film on the moving platform, and section assembly is for cutting fixing film on the moving platform; The control assembly be connected with recognizer component with motion platform, control assembly for receive the data-signal of recognizer component and controlled motion platform in the movement of X-direction and Y direction.
Recognizer component comprises two and is arranged side by side and the adjustable transducer 41 of relative distance, the position line of transducer 41 on identification form photon detector film, the detection light of two transducer 41 transmittings is positioned at same plane with section assembly for the blade cutting film, concrete, transducer 41 can adopt infrared reflection transducer, position line 7 is for having the metal marker line of one fixed width, because position line 7 width on single-photon detector film is very little, when two transducers 41 are relative with position line 7 respectively, the blade of assembly of then cutting into slices is positioned on the extended line of this position line 7, if now motion platform moves in X-direction, blade streaks the position line 7 on single-photon detector film with certain pressure, complete and once cut and cross.
As shown in Figure 2, position line 7 is several crisscross straight lines, the position line 7 in each direction is all parallel to each other, sample block 6 separates by position line 7 respectively, because position line 7 is elongated block structure, require lower to the relative position between two transducers 41, as long as ensure that the distance of two transducers 41 is not more than the length of position line 7.
Conveniently observe transducer 41 and the alignment situation of position line 7, be also provided with rack-mounted microscope 5.Microscope 5 is hinged with the mount pad 1 of frame, and mount pad 1 can slide in frame, thus can regulate arbitrarily the viewing angle of microscope 5.
Section assembly can produce powder in the process of cutting film, if powder shelters from position line 7, can have an impact to the contraposition of recognizer component and single-photon detector film, therefore rack-mounted dedusting assembly is also provided with, for collecting the dust in cutting thin-film process; The technology that dedusting assembly can adopt malleation of the prior art to blow or negative pressure is inhaled is to collect powder.
Section assembly comprises blade 31, adjusting screw(rod) 32, cross bar 33, mounting blocks 34 and regulating block 35, and blade 31 is for cutting fixing single-photon detector film on the moving platform, and blade 31 can be preferably the stud cutter of cutting edge mosaic diamond; The middle part of cross bar 33 and the mount pad 2 13 of frame hinged, one end and the mounting blocks 34 of cross bar 33 are hinged, and blade 31 to be arranged on mounting blocks 34 and can up-down adjustment cutting edge height; Two transducers 41 also can be arranged on mounting blocks 34 and adjustable relative position; Because cross bar 33 is skewed often, single-photon detector film normal on the detection light launched to make transducer 41 and the cutting edge of blade 31 and motion platform, often needs the position regulating mounting blocks 34, after adjustment puts in place, by bolted, prevent from rotating during cutting.
The other end of cross bar 33 and regulating block 35 threaded engagement, when cutting and crossing, if the pressure between blade 31 and film is too small, then easily cause line more shallow, when being difficult to break point each sample, if the pressure between blade 31 and film is excessive, then single-photon detector film may be clashed into displacement by blade 31, its position on cross bar 33 is changed by rotating regulating block 35, can pressure between adjustable blade 31 and film.
Section assembly 3 also comprises longitudinal adjusting screw(rod) 32, longitudinal one end of adjusting screw(rod) 32 and screw rod mount pad 12 threaded engagement of frame, the other end abuts with the lower surface of cross bar 33, by rotating the gradient of the adjustable cross bar 33 of longitudinal adjusting screw(rod) 32, thus adjustable blade 31 is relative to the height of single-photon detector film.
Motion platform comprises rack-mounted X-axis moving cell, is arranged on the Y-axis moving cell of X-axis moving cell output and the panel 21 for fixing single-photon detector film; Described panel 21 is arranged on the output of X-axis moving cell, can realize the motion of panel 21 in X-direction and Y direction by the cooperation of X-axis moving cell and Y-axis moving cell; And panel 21 can rotate at horizontal plane, the convenient position of single-photon detector film that regulates makes its and transducer 41 contraposition, while complete a direction cut and cross after can complete cutting and crossing of another direction of single-photon detector film by half-twist.In this embodiment, panel 21 is provided with the adsorption hole be connected with vacuum source, is fixed on panel 21 by single-photon detector film by vacuum suction.
The motor that X-axis moving cell comprises trapezoidal screw and is connected with trapezoidal screw, the motor that Y-axis moving cell comprises ball screw and is connected with ball screw, these two motors are all connected with control assembly, and control assembly can control the rotation of motor.
The course of work of above-mentioned automatic clinical microtome is: fixed on the moving platform by the single-photon detector film with position line 7 and make unidirectional position line 7 parallel with the transmitting terminal line of two transducers 41, open slicing machine, control assembly controlled motion platform moves in Y direction, until two transducers 41 all align with same position line 7, control assembly receives the signal of transducer 41 thus controlled motion platform stops at the movement of Y direction, blade 31 position of adjustment section assembly, makes the blade of blade 31 just can cut out line at single-photon detector film, control assembly controlled motion platform moves back and forth once in X-direction, complete and once cut and cross, motion platform playback after line, two transducers 41 align with this position line 7 again, then control assembly controlled motion platform moves in Y direction, until two transducers 41 align with next position line 7, control assembly receives the motion of signal stop motion platform in Y direction of transducer 41, controlled motion platform drives single-photon detector film to move back and forth once in X-direction again, complete and cut and cross again, iteration above-mentioned steps, this slicing machine just can complete that single-photon detector film is unidirectional to be cut and crossed, then by motion platform half-twist, repeat above-mentioned steps, cutting and crossing of another direction can be completed.Whole cut and cross process relative to former at every turn cutting and crossing all need contraposition once phase specific efficiency improve greatly, and whether judge contraposition by transducer 41, the precision cut and crossed also improves greatly.
It is worth mentioning that, in Fig. 2, position line 7 is for being uniformly distributed, but practical application can the different position line 7 of the size setting space of sample block 6 as required, recognizer component also passes through with the contraposition of position line 7 thus completes the cutting of the sample block 6 of all size, compare to the slicing machine realizing semi-automatic cutting with respect to arranging cutting spacing, the scope of application is wider.
Those of ordinary skill in the art will appreciate that, embodiment described here is to help reader understanding's principle of the present invention, should be understood to that protection scope of the present invention is not limited to so special statement and embodiment.Those of ordinary skill in the art can make various other various concrete distortion and combination of not departing from essence of the present invention according to these technology enlightenment disclosed by the invention, and these distortion and combination are still in protection scope of the present invention.
Claims (9)
1., for the preparation of an automatic clinical microtome for single-photon detector, it is characterized in that:
Comprise the frame for installing each assembly;
Rack-mounted motion platform, section assembly and recognizer component, motion platform can move in X-direction and Y direction, section assembly and recognizer component are all positioned at above motion platform, recognizer component is used for carrying out contraposition to fixing film on the moving platform, and section assembly is for cutting fixing film on the moving platform;
The control assembly be connected with recognizer component with motion platform, control assembly for receive the data-signal of recognizer component and controlled motion platform in the movement of X-direction and Y direction.
2. automatic clinical microtome according to claim 1, it is characterized in that: described recognizer component comprises two and is arranged side by side and the adjustable transducer (41) of relative distance, the position line of transducer (41) on identification form photon detector film, the detection light that two transducers (41) are launched is positioned at same plane with section assembly for the blade cutting film.
3. automatic clinical microtome according to claim 1 and 2, is characterized in that: also comprise rack-mounted microscope (5), and microscope (5) is for observing the alignment situation of recognizer component and film.
4. automatic clinical microtome according to claim 1 and 2, is characterized in that: also comprise rack-mounted dedusting assembly, for collecting the dust in cutting thin-film process.
5. automatic clinical microtome according to claim 1 and 2, is characterized in that: described section assembly comprise blade (31) for cutting fixing film on the moving platform, and the hinged cross bar (33) of frame, for installing the mounting blocks (34) of blade (31), the regulating block (35) for pressure between adjustable blade (31) and film; One end and the mounting blocks (34) of cross bar (33) are hinged, the other end and regulating block (35) threaded engagement.
6. automatic clinical microtome according to claim 5, it is characterized in that: described section assembly (3) also comprises longitudinal adjusting screw(rod) (32), one end of longitudinal adjusting screw(rod) (32) and frame threaded engagement, the other end abuts with the lower surface of cross bar (33).
7. automatic clinical microtome according to claim 1 and 2, is characterized in that: described motion platform comprises rack-mounted X-axis moving cell, is arranged on the Y-axis moving cell of X-axis moving cell output and the panel (21) for fixed film; Described panel (21) is arranged on the output of X-axis moving cell.
8. automatic clinical microtome according to claim 7, is characterized in that: described panel (21) is provided with the adsorption hole be connected with vacuum source.
9. automatic clinical microtome according to claim 7, is characterized in that: the motor that described Y-axis moving cell comprises ball screw and is connected with ball screw, and motor is connected with control assembly, and control assembly can control the rotation of motor.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410815160.1A CN104538494B (en) | 2014-12-23 | 2014-12-23 | A kind of universal microtome for preparing single-photon detector |
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| Application Number | Priority Date | Filing Date | Title |
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| CN201410815160.1A CN104538494B (en) | 2014-12-23 | 2014-12-23 | A kind of universal microtome for preparing single-photon detector |
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| CN104538494A true CN104538494A (en) | 2015-04-22 |
| CN104538494B CN104538494B (en) | 2016-08-24 |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108510873A (en) * | 2018-03-29 | 2018-09-07 | 昆山华冠商标印刷有限公司 | A kind of label process units and its production technology |
| CN115056275A (en) * | 2022-05-31 | 2022-09-16 | 广东喜珍电路科技有限公司 | PCB slicing and cutting device and method |
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| JP2003197564A (en) * | 2001-12-21 | 2003-07-11 | Disco Abrasive Syst Ltd | Method for dicing substrate with low-dielectric material deposited thereon |
| JP2006012901A (en) * | 2004-06-22 | 2006-01-12 | Disco Abrasive Syst Ltd | Processing equipment |
| CN201109006Y (en) * | 2007-09-03 | 2008-09-03 | 深圳市大族激光科技股份有限公司 | Touch screen ITO film cutting machine |
| CN204271114U (en) * | 2014-12-23 | 2015-04-15 | 西南交通大学 | A kind of automatic clinical microtome for the preparation of single-photon detector |
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2014
- 2014-12-23 CN CN201410815160.1A patent/CN104538494B/en active Active
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2003197564A (en) * | 2001-12-21 | 2003-07-11 | Disco Abrasive Syst Ltd | Method for dicing substrate with low-dielectric material deposited thereon |
| JP2006012901A (en) * | 2004-06-22 | 2006-01-12 | Disco Abrasive Syst Ltd | Processing equipment |
| CN201109006Y (en) * | 2007-09-03 | 2008-09-03 | 深圳市大族激光科技股份有限公司 | Touch screen ITO film cutting machine |
| CN204271114U (en) * | 2014-12-23 | 2015-04-15 | 西南交通大学 | A kind of automatic clinical microtome for the preparation of single-photon detector |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN108510873A (en) * | 2018-03-29 | 2018-09-07 | 昆山华冠商标印刷有限公司 | A kind of label process units and its production technology |
| CN115056275A (en) * | 2022-05-31 | 2022-09-16 | 广东喜珍电路科技有限公司 | PCB slicing and cutting device and method |
| CN115056275B (en) * | 2022-05-31 | 2024-05-24 | 广东喜珍电路科技有限公司 | Slicing and cutting device and method for PCB |
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| CN104538494B (en) | 2016-08-24 |
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Effective date of registration: 20201123 Address after: 215400 Taicang Economic Development Zone, Jiangsu, Beijing West Road, No. 6, No. Patentee after: SUZHOU ZHENRUICHANG MATERIAL TECHNOLOGY Co.,Ltd. Address before: 610031 Sichuan City, Chengdu Province, No. two North Ring Road, No. 111 Patentee before: SOUTHWEST JIAOTONG University |