CN105021626A - Ball placement detection equipment and application thereof - Google Patents

Ball placement detection equipment and application thereof Download PDF

Info

Publication number
CN105021626A
CN105021626A CN201510404597.0A CN201510404597A CN105021626A CN 105021626 A CN105021626 A CN 105021626A CN 201510404597 A CN201510404597 A CN 201510404597A CN 105021626 A CN105021626 A CN 105021626A
Authority
CN
China
Prior art keywords
ball
tin
plant
conveyer
controller
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN201510404597.0A
Other languages
Chinese (zh)
Inventor
刘劲松
钟亮
毕秋吉
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shanghai Micro Electronics Equipment Co Ltd
Original Assignee
Shanghai Micro Electronics Equipment Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shanghai Micro Electronics Equipment Co Ltd filed Critical Shanghai Micro Electronics Equipment Co Ltd
Priority to CN201510404597.0A priority Critical patent/CN105021626A/en
Publication of CN105021626A publication Critical patent/CN105021626A/en
Pending legal-status Critical Current

Links

Landscapes

  • Cultivation Receptacles Or Flower-Pots, Or Pots For Seedlings (AREA)

Abstract

The invention relates to ball placement detection equipment and its application. The detection equipment is arranged on a stand. The detection equipment comprises a ball placement unit (1), a detection unit (2) and a ball feeding unit (3). The ball placement unit (1) comprises a conveyer, a ball placement device (14) and a substrate placement platform (15), wherein the ball placement device and the substrate placement platform are arranged on the conveyer. A substrate (5) is arranged on the substrate placement platform (15). The detection unit (2) contains a fixed plate (21), an image sensor (22) disposed on the fixed plate (21) and a light source (24) mounted above the image sensor (22). A polariscope (23) is arranged between the image sensor (22) and the light source (24). The image sensor (22) and a PLC are connected. The ball feeding unit (3) is composed of a ball feeding box (32) and solder balls (31) placed inside the ball feeding box (32). In comparison with the prior art, the invention has the following advantages: the ball placement detection equipment is simple to operate; detection results are accurate; and a large area of defects are convenient to find.

Description

Plant ball checkout equipment and application thereof for one kind
Technical field
The present invention relates to a kind of checkout equipment, especially relate to one kind and plant ball checkout equipment and application thereof.
Background technology
Planting ball is key one step that BGA (Ball Grid Array), CSP (Chip Size Package) and WLP (Wafer LevelPackage) etc. encapsulate plastic packaging formative stage.Plant in ball process, the pickup of tin ball and plant film playback and ring and final plant chou fruit.Thus, tin ball pickup defect and tin ball are planted and are put defect and need identify and judge out, final plant ball quality to improve.Disclose tin ball pickup defect as US Patent No. 5615823 and the detection method of putting defect planted by tin ball: adopt correlation laser sensor to detect tin ball pickup defect, adopt photoinduction sensor to detect tin ball and plant and put defect.Because tin ball sphere diameter is less, the ray of correlation laser sensor needs very thin i.e. μm rank, thus expensive; Photoinduction sensor detects tin ball and plants the device such as glass put defect and need design complicated light path and use specific refractive index, to part processing and installation accuracy more responsive, and the impact of dust and other impurities cannot be overcome, cause erroneous judgement.
Above detection method has following inevitable shortcoming:
(1) tin ball pickup defects detection needs rows of or scans line by line and repeatedly complete, and expends time in;
(2) each row or a line detect, and can only judge that these row or the pickup of this line tin ball have defect, and cannot know that these row or this line have how many defects on earth further;
(3) device such as glass that the detection of putting defect need design complicated light path and use specific refractive index planted by tin ball, to part processing and installation accuracy more responsive, be unfavorable for concrete enforcement;
(4) the trickle foreign material such as the dust in air may change refraction and the reflection of light, cause light by desirable light path transmission, not make photoinduction sensor make erroneous judgement.
Summary of the invention
Object of the present invention be exactly in order to overcome above-mentioned prior art exist defect and provide one kind to plant ball checkout equipment and application thereof.
Object of the present invention can be achieved through the following technical solutions:
Plant a ball checkout equipment, this checkout equipment is arranged on pallet, and described checkout equipment comprises:
Plant ball unit: comprise conveyer, and the ball-planting device be arranged on conveyer and substrate placement platform, this substrate placement platform is provided with substrate;
Detecting unit: comprise fixed head, the imageing sensor be arranged on fixed head, and the light source be arranged on above imageing sensor, be provided with polariscope between described imageing sensor and light source, prevent from planting ball tool reflective, described imageing sensor is connected with PLC;
For ball unit: by supplying ball case, and be placed on for the tin ball composition in ball case;
During work, regulate conveyer, drive from for ball unit pickup tin ball or to substrate plant put tin ball ball-planting device to detecting unit, open light source, to be collected pictures data be sent to PLC and analyze by imageing sensor.
Described conveyer by respectively along the X of X-axis, Y-axis, Z-direction movement to conveyer, Y-direction conveyer and Z-direction conveyer form, described X is arranged on the bracing or strutting arrangement that is fixed on pallet to conveyer, described Y-direction conveyer is arranged on X on conveyer, described Z-direction conveyer is arranged on pallet, described ball-planting device is arranged on Y-direction conveyer, and described substrate is arranged on Z-direction conveyer.
Described X comprises X to controller be arranged on X on bracing or strutting arrangement to transfer plate to conveyer, and this X is provided with the first chute along X-direction to transfer plate, and described X is connected to transfer plate to controller with X;
Described Y-direction conveyer comprises Y-direction controller and Y-direction transfer plate, this Y-direction transfer plate is provided with the first Slip Hook matched with the first chute, and be slidably connected to transfer plate by this first Slip Hook and X, described Y-direction transfer plate is also provided with the second chute along Y direction, and described Y-direction controller is connected with Y-direction transfer plate;
Described Z-direction conveyer comprises Z-direction controller, and be arranged on pallet plants ball platform, this is planted ball platform and is provided with the 3rd chute along Z-direction, described substrate placement platform is provided with the 3rd Slip Hook matched with the 3rd chute, and by the 3rd Slip Hook with plant ball platform and be slidably connected, described Z-direction controller connects plants ball platform;
Described ball-planting device comprises card extender, the board mounting be arranged on card extender, this board mounting be provided with match with substrate plant ball tool, described card extender is provided with the second Slip Hook matched with the second chute, and is slidably connected by this second Slip Hook and Y-direction transfer plate;
During work, regulate X to controller, control Y-direction conveyer and move left and right in X-direction along the first chute;
Regulate Y-direction controller, control ball-planting device lower mobile in the Y-axis direction along the second chute;
Regulate Z-direction controller, control substrate placement platform and move forward and backward in Z-direction along the 3rd chute.
Be provided with vacuum chamber in described board mounting, board mounting two ends are provided with the gas-tpe fitting connecting vacuum chamber, and this gas-tpe fitting connects vacuum generator, and described ball tool of planting is provided with the multiple vacuum columns connected with vacuum chamber; Start vacuum generator, the air in extracting vacuum chamber, make vacuum chamber form negative pressure, and then the vacuum column be connected with vacuum chamber forms negative pressure, thus tin ball is adsorbed.
Described bracing or strutting arrangement is made up of the supporting seat be fixed on pallet and the riser be arranged on supporting seat, and described X is arranged on riser to transfer plate.
Detecting unit, for ball unit and plant ball tool three vertical direction projection be positioned on same level straight line.
Plant an application for ball checkout equipment, comprise the following steps:
A () tin ball picks up
Regulate X to controller, the Y-direction conveyer controlling to be provided with ball-planting device moves to for above ball unit along X-direction, then Y-direction controller is regulated, control ball-planting device and drop to tin ball pickup height along Y direction, open vacuum generator, adsorb tin ball from for ball unit, then regulate Y-direction controller, control ball-planting device and rise to elemental height along Y direction;
(b) tin ball pickup defects detection
Regulate X to controller, the ball-planting device controlling to have adsorbed tin ball moves to above detecting unit along X-direction, then light source is opened, imageing sensor gathers image data and is sent to PLC and analyzes, if have tin ball pickup defect, then return step (a) and again pick up tin ball, if do not have tin ball pickup defect, then carry out next step operation;
C () tin ball is planted and is put
Scaling powder smeared by substrate, carries out tin ball and plant and put, regulate Z-direction controller, control is planted ball platform and is moved along Z-direction, and ball position is planted in arrival, then regulate X to controller, control ball-planting device moves to along X-direction plants directly over ball platform, regulate Y-direction controller again, control ball-planting device along Y direction move to tin ball plant put height, close vacuum generator, plant and put tin ball, plant after discharging into, then control ball-planting device and rise to elemental height along Y direction;
D () tin ball is planted and is put defects detection
Controlling ball-planting device moves to above detecting unit along X-direction, open light source, imageing sensor gathers image data and is sent to PLC and analyzes, if there is tin ball plant and put defect, then return, step (a) re-starts whole operation, if do not have tin ball to plant and put defect, then whole ball process of planting terminates.
Tin ball pickup defect is in step (b) vacuum column of planting in ball tool and does not adsorb tin ball phenomenon;
Tin ball is planted and is put defect and be in step (d) vacuum column of planting in ball tool and have bonding tin ball phenomenon.
Tin ball pickup defect and tin ball are planted and are put defect and detected by imageing sensor, during detection, imaging is carried out by planting planting on area of visual field that ball region moves to imageing sensor of ball tool, then the imaging data of planting ball region is sent to PLC and analyzes by imageing sensor, and then judges to plant ball region and whether there is tin ball pickup defect or tin ball and plant and put defect.
In step (b), the detection method of tin ball pickup defect comprises the following steps:
1) the vacuum column quantity that examination criteria value A equals to plant on ball tool is set;
2) the tin ball on ball-planting device is projected;
3) tin spheric projection data collected by imageing sensor, and are sent to PLC detection analysis, if tin spheric projection quantity is less than examination criteria value A, then there is tin ball pickup defect;
The middle tin ball of step (d) is planted the detection method of putting defect and is comprised the following steps:
A) set examination criteria value B to equal zero;
B) the tin ball on ball-planting device is projected;
C) tin spheric projection data collected by imageing sensor, and are sent to PLC and detect and analyze, if tin spheric projection quantity is greater than examination criteria value B, then there is tin ball and plant and put defect.
Described tin spheric projection is tin spheric projection appearance profile or tin spheric projection area.
The single surveyed area area of planting ball region is not more than the area of the area of visual field of imageing sensor, if the covering of single surveyed area is whole plant ball region, then only need Polaroidly can complete detection, if single surveyed area cannot cover and wholely plant ball region, then need repeatedly imaging just can complete detection.
The area of area of visual field with plant the distance of ball region to imageing sensor, imageing sensor self is relevant, plant ball region larger to the distance of imageing sensor, namely plant residing for ball region highly higher, area of visual field area is larger, but limited by imageing sensor imaging capability, planted ball region and cross conference to the distance of imageing sensor and cause accurately detecting tin ball pickup defect and tin ball and plant and put defect.
Checkout equipment of the present invention is not only suitable for substrate, is suitable for too chip and wafer.
Compared with prior art, the present invention has the following advantages:
(1) accurately simple to operate: of the present inventionly to plant conveyer in ball checkout equipment and can plant ball unit and detecting unit, relative distance for ball unit from X axis, Y-axis and Z-axis direction three direction free adjustment, tin ball is picked up and put easy to operate, accurate planted by tin ball;
(2) imageing sensor of the present invention both can detect tin ball pickup defect, and also can detect tin ball and plant and put defect, mounting and adjusting is simple, is convenient to concrete enforcement;
(3) there is no complicated light path when detecting, eliminate the trickle foreign material such as dust in air to the impact of testing result;
(4) image in single surveyed area is saved, and for checking, can be convenient to the reason of searching the faults such as large area defect, facilitating the follow-up maintenance of equipment.
Accompanying drawing explanation
Fig. 1 is structural representation of planting ball checkout equipment of the present invention;
Fig. 2 is the structural representation of ball-planting device of the present invention;
Fig. 3 is the cut-open view of ball-planting device of the present invention;
Fig. 4 is the structural representation of detecting unit of the present invention;
Fig. 5 is the schematic diagram of tin ball of the present invention pickup defect;
Fig. 6 is that tin ball of the present invention is planted and put defect schematic diagram;
Fig. 7 is imageing sensor monitored area schematic diagram;
Fig. 8 is that tin spheric projection appearance profile detects schematic diagram;
Fig. 9 is tin spheric projection area detecting schematic diagram;
In figure, 1-plants ball unit, 11-X is to conveyer, 12-Y is to conveyer, 13-Z is to conveyer, 14-ball-planting device, 15-substrate placement platform, 111-X is to controller, 112-X is to transfer plate, 121-Y is to controller, 122-Y is to transfer plate, 131-plants ball platform, 132-Z is to controller, 141-board mounting, 142-gas-tpe fitting, 143-card extender, 144-plants ball tool, 145-vacuum chamber, 146-vacuum column, 2-detecting unit, 21-fixed head, 22-imageing sensor, 23-polariscope, 24-light source, 3-is for ball unit, 31-tin ball, 32-is for ball case, 4-bracing or strutting arrangement, 41-supporting seat, 42-riser, 5-substrate, 61-tin spheric projection appearance profile, 62-vacuum column projection profile profile, 63-tin spheric projection area, 64-vacuum column projected area.
Embodiment
Below in conjunction with the drawings and specific embodiments, the present invention is described in detail.The present embodiment is implemented premised on technical solution of the present invention, give detailed embodiment and concrete operating process, but protection scope of the present invention is not limited to following embodiment.
Embodiment 1
Plant a ball checkout equipment, as shown in Figure 1, this checkout equipment is arranged on pallet its structure, and checkout equipment comprises plants ball unit 1, detecting unit 2 and supplies ball unit.
Plant ball unit 1 and comprise conveyer, and the ball-planting device 14 be arranged on conveyer and substrate placement platform 15, this substrate placement platform 15 is provided with substrate 5, conveyer by respectively along the X of X-axis, Y-axis, Z-direction movement to conveyer 11, Y-direction conveyer 12 and Z-direction conveyer 13 form;
X is arranged on the bracing or strutting arrangement 4 that is fixed on pallet to conveyer 11, X comprises X to controller 111 and the X that is arranged on bracing or strutting arrangement to transfer plate 112 to conveyer 11, this X is provided with the first chute along X-direction to transfer plate 112, and X is connected to transfer plate 112 to controller 111 with X;
Y-direction conveyer 12 is arranged on X on conveyer 11, Y-direction conveyer 12 comprises Y-direction controller 121 and Y-direction transfer plate 122, this Y-direction transfer plate 122 is provided with the first Slip Hook matched with the first chute, and be slidably connected to transfer plate 112 by this first Slip Hook and X, Y-direction transfer plate 122 is also provided with the second chute along Y direction, and Y-direction controller 121 is connected with Y-direction transfer plate 122;
Z-direction conveyer 13 is arranged on pallet, Z-direction conveyer 13 comprises Z-direction controller 132, and be arranged on pallet plants ball platform 131, this is planted ball platform 131 and is provided with the 3rd chute along Z-direction, substrate placement platform 15 is provided with the 3rd Slip Hook matched with the 3rd chute, and by the 3rd Slip Hook with plant ball platform 131 and be slidably connected, Z-direction controller 132 connects plants ball platform 131;
The structure of ball-planting device 14 is as Fig. 2, ball-planting device 14 is arranged on Y-direction conveyer 12, ball-planting device 14 comprises card extender 143, the board mounting 141 be arranged on card extender 143, this board mounting 141 be provided with match with substrate 5 plant ball tool 144, card extender 141 is provided with the second Slip Hook matched with the second chute, and is slidably connected by this second Slip Hook and Y-direction transfer plate 122; As shown in Figure 3, be provided with vacuum chamber 145 in board mounting 141, board mounting 141 two ends are provided with the gas-tpe fitting 142 connecting vacuum chamber 145, and this gas-tpe fitting 142 connects vacuum generator, plants ball tool 144 and is provided with the multiple vacuum columns 146 connected with vacuum chamber 145;
During work, regulate X to controller 111, control Y-direction conveyer 12 to move left and right along the first chute in X-direction, regulate Y-direction controller 121, control ball-planting device 14 lower mobile in the Y-axis direction along the second chute, regulate Z-direction controller 132, control substrate placement platform 15 and move forward and backward in Z-direction along the 3rd chute;
Bracing or strutting arrangement 4 is made up of the supporting seat 41 be fixed on pallet and the riser 42 be arranged on supporting seat 41, and X is arranged on riser 42 to transfer plate 112;
Detecting unit 2, its structure as shown in Figure 4, comprise fixed head 21, the imageing sensor 22 be arranged on fixed head 21, and the light source 24 be arranged on above imageing sensor 22, polariscope 24 is provided with between imageing sensor 22 and light source 24, prevent from planting ball tool 144 reflective, imageing sensor 22 is connected with PLC;
Confession ball unit 3: by supplying ball case 32, and the tin ball 31 be placed in confession ball case 32 forms;
Detecting unit 2, to be positioned on same level straight line for ball unit 3 and the vertical direction projection of planting ball tool 144 three.
As shown in Figure 7, the area S of the area of visual field of imageing sensor 22 1=length of side a × hem width b, its value with plant the distance of ball region to imageing sensor 22, imageing sensor 22 self is relevant, plant ball region larger to the distance of imageing sensor 22, namely height H residing for ball region is planted higher, area of visual field area is larger, but limited by imageing sensor 22 imaging capability, planted ball region and cross conference to the distance of imageing sensor 22 and cause accurately detecting tin ball pickup defect and tin ball and plant and put defect.
Embodiment 2
Plant the application of ball checkout equipment as described in Example 1, comprise the following steps:
A () tin ball picks up
Regulate X to controller 111, the Y-direction conveyer 12 controlling to be provided with ball-planting device 14 moves to for above ball unit 3 along X-direction, then Y-direction controller 121 is regulated, control ball-planting device 14 and drop to tin ball pickup height along Y direction, open vacuum generator, adsorb tin ball 31 from for ball unit 3, then regulate Y-direction controller 121, control ball-planting device 14 and rise to elemental height along Y direction;
(b) tin ball pickup defects detection
Regulate X to controller 111, the ball-planting device 14 controlling to have adsorbed tin ball 31 moves to above detecting unit 2 along X-direction, then light source 24 is opened, imageing sensor 22 gathers image data and is sent to PLC and analyzes, if have tin ball pickup defect, then return step (a) and again pick up tin ball 31, if do not have tin ball pickup defect, then carry out next step operation;
C () tin ball is planted and is put
Smear scaling powder on the substrate 5, carry out tin ball to plant and put, regulate Z-direction controller 132, control is planted ball platform 131 and is moved along Z-direction, and ball position is planted in arrival, then regulate X to controller 111, control ball-planting device 14 moves to along X-direction plants directly over ball platform 131, regulate Y-direction controller 122 again, control ball-planting device 14 along Y direction move to tin ball plant put height, close vacuum generator, plant and put tin ball 31, plant after discharging into, then control ball-planting device 14 and rise to elemental height along Y direction;
D () tin ball is planted and is put defects detection
Controlling ball-planting device 14 moves to above detecting unit 2 along X-direction, open light source 24, imageing sensor 22 gathers image data and is sent to PLC and analyzes, if there is tin ball plant and put defect, then return step (a) and re-start whole operation, if do not have tin ball to plant and put defect, then whole ball process of planting terminates.
In step (b), the detection method of tin ball pickup defect comprises the following steps:
1) vacuum column 146 quantity that examination criteria value A equals to plant on ball tool 144 is set;
2) appearance profile of the tin ball 31 on ball-planting device 14 or area are projected;
3) tin spheric projection data collected by imageing sensor 22, and are sent to PLC detection analysis, if tin spheric projection quantity is less than examination criteria value A, then there is tin ball pickup defect;
The middle tin ball of step (d) is planted the detection method of putting defect and is comprised the following steps:
A) set examination criteria value B to equal zero;
B) appearance profile of the tin ball 31 on ball-planting device 14 or area are projected;
C) tin spheric projection data collected by imageing sensor 22, and are sent to PLC and detect and analyze, if tin spheric projection quantity is greater than examination criteria value B, then there is tin ball and plant and put defect.
Tin spheric projection is tin spheric projection appearance profile 61 or tin spheric projection area 63.
Tin spheric projection appearance profile 61 is larger than vacuum column projection profile profile 62, tin spheric projection area 63 is also large than vacuum column projected area 64, if tin ball vacuum pick, namely there is tin ball pickup defect, then can detect that the quantity of tin spheric projection appearance profile 61 or tin spheric projection area 63 is less than examination criteria value A; If after tin ball 31 is planted and discharged into, detect that the quantity of tin spheric projection appearance profile 61 or tin spheric projection area 63 is greater than examination criteria value B, then it is determined that the presence of tin ball and plant and put defect.
The area S of single surveyed area 2=length of side c × hem width d, plants the single surveyed area area S in ball region 2be not more than the area S of the area of visual field of imageing sensor 1.If the area S of single surveyed area 2equal the area S of the area of visual field of imageing sensor 22 1, namely the covering of single surveyed area is whole plants ball region, and as shown in Figure 8, then imageing sensor 22 need are Polaroid can complete detection; If the area S of single surveyed area 2be less than the area S of the area of visual field of imageing sensor 22 1, namely single surveyed area cannot cover and wholely plant ball region, then imageing sensor 22 needs repeatedly imaging just can complete detection, each image checking single surveyed area.When needs repeatedly image checking time, control, directly over ball-planting device 14 to detecting unit 2, to make the center of detecting unit 2 area of visual field and the center superposition of single surveyed area.

Claims (9)

1. plant a ball checkout equipment, be arranged on pallet, it is characterized in that, described checkout equipment comprises:
Plant ball unit (1): comprise conveyer, and the ball-planting device (14) be arranged on conveyer and substrate placement platform (15), this substrate placement platform (15) is provided with substrate (5);
Detecting unit (2): comprise fixed head (21), the imageing sensor (22) be arranged on fixed head (21), and be arranged on the light source (24) of imageing sensor (22) top, be provided with polariscope (23) between described imageing sensor (22) and light source (24), described imageing sensor (22) is connected with PLC;
For ball unit (3): by supplying ball case (32), and be placed on for tin ball (31) composition in ball case (32);
During work, regulate conveyer, drive from for ball unit (3) pickup tin ball (31) or to substrate (5) plant put tin ball (31) ball-planting device (14) to detecting unit (2), open light source (24), to be collected pictures data be sent to PLC by imageing sensor (22).
2. plant ball checkout equipment for one kind according to claim 1, it is characterized in that, described conveyer is by respectively along X-axis, Y-axis, the X of Z-direction movement is to conveyer (11), Y-direction conveyer (12) and Z-direction conveyer (13) composition, described X is arranged on the bracing or strutting arrangement (4) that is fixed on pallet to conveyer (11), described Y-direction conveyer (12) is arranged on X on conveyer (11), described Z-direction conveyer (13) is arranged on pallet, described ball-planting device (14) is arranged on Y-direction conveyer (12), described substrate (5) is arranged on Z-direction conveyer (13).
3. plant ball checkout equipment for one kind according to claim 2, it is characterized in that, described X comprises X to controller (111) and the X that is arranged on bracing or strutting arrangement (4) to transfer plate (112) to conveyer (11), this X is provided with the first chute along X-direction to transfer plate (112), and described X is connected to transfer plate (112) to controller (111) with X;
Described Y-direction conveyer (12) comprises Y-direction controller (121) and Y-direction transfer plate (122), this Y-direction transfer plate (122) is provided with the first Slip Hook matched with the first chute, and be slidably connected to transfer plate (112) by this first Slip Hook and X, described Y-direction transfer plate (122) is also provided with the second chute along Y direction, and described Y-direction controller (121) is connected with Y-direction transfer plate (122);
Described Z-direction conveyer (13) comprises Z-direction controller (132), and be arranged on pallet plants ball platform (131), this is planted ball platform (131) and is provided with the 3rd chute along Z-direction, described substrate placement platform (15) is provided with the 3rd Slip Hook matched with the 3rd chute, and by the 3rd Slip Hook with plant ball platform (131) and be slidably connected, described Z-direction controller (132) connects plants ball platform (131);
Described ball-planting device (14) comprises card extender (143), the board mounting (141) be arranged on card extender (143), this board mounting (141) be provided with match with substrate (5) plant ball tool (144), described card extender (143) is provided with the second Slip Hook matched with the second chute, and is slidably connected by this second Slip Hook and Y-direction transfer plate (122);
During work, regulate X to controller (111), control Y-direction conveyer (12) and move left and right in X-direction along the first chute;
Regulate Y-direction controller (121), control ball-planting device (14) lower mobile in the Y-axis direction along the second chute;
Regulate Z-direction controller (132), control substrate placement platform (15) and move forward and backward in Z-direction along the 3rd chute.
4. plant ball checkout equipment for one kind according to claim 3, it is characterized in that, vacuum chamber (145) is provided with in described board mounting (141), board mounting (141) two ends are provided with the gas-tpe fitting (142) connecting vacuum chamber (145), this gas-tpe fitting (142) connects vacuum generator, and described ball tool (144) of planting is provided with the multiple vacuum columns (146) connected with vacuum chamber (145); Start vacuum generator, air in extracting vacuum chamber (145), make vacuum chamber (211) form negative pressure, and then the vacuum column (146) be connected with vacuum chamber (211) form negative pressure, absorption tin ball (31).
5. plant ball checkout equipment for one kind according to claim 3, it is characterized in that, described bracing or strutting arrangement (4) is made up of the supporting seat be fixed on pallet (41) and the riser (42) be arranged on supporting seat (41), and described X is arranged on riser (42) to transfer plate (112).
6. plant ball checkout equipment for one kind according to claim 3, it is characterized in that, detecting unit (2), for ball unit (3) and plant ball tool (144) three vertical direction project be positioned on same level straight line.
7. the application of planting ball checkout equipment as described in as arbitrary in claim 1 ~ 6, is characterized in that, comprise the following steps:
A () tin ball picks up
Regulate X to controller (111), the Y-direction conveyer (12) that control is provided with ball-planting device (14) moves to for ball unit (3) top along X-direction, then Y-direction controller (121) is regulated, control ball-planting device (14) and drop to tin ball pickup height along Y direction, open vacuum generator, tin ball (31) is adsorbed from for ball unit (3), regulate Y-direction controller (121) again, control ball-planting device (14) and rise to elemental height along Y direction;
(b) tin ball pickup defects detection
Regulate X to controller (111), the ball-planting device (14) controlling to have adsorbed tin ball (31) moves to detecting unit (2) top along X-direction, then light source (24) is opened, imageing sensor (22) gathers image data and is sent to PLC and analyzes, if have tin ball pickup defect, then return step (a) and again pick up tin ball, if do not have tin ball pickup defect, then carry out next step operation;
C () tin ball is planted and is put
Scaling powder smeared by substrate (5), carry out tin ball to plant and put, regulate Z-direction controller (132), control is planted ball platform (131) and is moved along Z-direction, and ball position is planted in arrival, then regulate X to controller (111), control ball-planting device (14) moves to along X-direction plants directly over ball platform (131), regulate Y-direction controller (121) again, control ball-planting device (14) along Y direction move to tin ball plant put height, close vacuum generator, plant and put tin ball (31), plant after discharging into, control ball-planting device (14) again and rise to elemental height along Y direction,
D () tin ball is planted and is put defects detection
Control ball-planting device (14) and move to detecting unit (2) top along X-direction, open light source (24), imageing sensor (22) gathers image data and is sent to PLC and analyzes, if there is tin ball plant and put defect, then return step (a) and re-start whole operation, if do not have tin ball to plant and put defect, then whole ball process of planting terminates.
8. an application of planting ball checkout equipment according to claim 7, is characterized in that,
In step (b), the detection method of tin ball pickup defect comprises the following steps:
1) vacuum column (146) quantity that examination criteria value A equals to plant on ball tool (144) is set;
2) the tin ball (31) on ball-planting device (14) is projected;
3) tin spheric projection data collected by imageing sensor (22), and are sent to PLC detection analysis, if tin spheric projection quantity is less than examination criteria value A, then there is tin ball pickup defect;
The middle tin ball of step (d) is planted the detection method of putting defect and is comprised the following steps:
A) set examination criteria value B to equal zero;
B) the tin ball (31) on ball-planting device (14) is projected;
C) tin spheric projection data collected by imageing sensor (22), and are sent to PLC and detect and analyze, if tin spheric projection quantity is greater than examination criteria value B, then there is tin ball and plant and put defect.
9. an application of planting ball checkout equipment according to claim 8, it is characterized in that, described tin spheric projection is tin spheric projection appearance profile (61) or tin spheric projection area (63).
CN201510404597.0A 2015-07-10 2015-07-10 Ball placement detection equipment and application thereof Pending CN105021626A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201510404597.0A CN105021626A (en) 2015-07-10 2015-07-10 Ball placement detection equipment and application thereof

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201510404597.0A CN105021626A (en) 2015-07-10 2015-07-10 Ball placement detection equipment and application thereof

Publications (1)

Publication Number Publication Date
CN105021626A true CN105021626A (en) 2015-11-04

Family

ID=54411756

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201510404597.0A Pending CN105021626A (en) 2015-07-10 2015-07-10 Ball placement detection equipment and application thereof

Country Status (1)

Country Link
CN (1) CN105021626A (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112762864A (en) * 2020-12-24 2021-05-07 深圳市立可自动化设备有限公司 Rapid alignment detection device and method based on universal BGA ball-mounting board
CN112774173A (en) * 2021-01-28 2021-05-11 深圳市瑞驰文体发展有限公司 Billiard ball box with billiard ball detection function
CN115763309A (en) * 2022-11-10 2023-03-07 上海世禹精密机械有限公司 Ball-sucking and ball-missing detection device for ball-planting jig and using method
CN115938962A (en) * 2023-02-21 2023-04-07 深圳市立可自动化设备有限公司 Ball planting machine capable of conveniently replacing clamping assembly

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH08122273A (en) * 1994-10-25 1996-05-17 Fujitsu Ltd Inspection method of semiconductor device
US5857610A (en) * 1995-11-14 1999-01-12 Nippon Steel Corporation Process and apparatus for forming ball bumps
JPH11297774A (en) * 1998-04-14 1999-10-29 Shibuya Kogyo Co Ltd Solder ball vacuum inspection device
JP2001244290A (en) * 2001-01-23 2001-09-07 Matsushita Electric Ind Co Ltd Method of mounting conductive ball
US6685080B1 (en) * 2000-09-21 2004-02-03 Micron Technolgy, Inc. Individual selective rework of defective BGA solder balls
CN103033446A (en) * 2011-09-29 2013-04-10 三星电机株式会社 Solderball test device
CN103934207A (en) * 2013-01-18 2014-07-23 鸿劲科技股份有限公司 Electronic component working unit, working method and working equipment applied by same

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH08122273A (en) * 1994-10-25 1996-05-17 Fujitsu Ltd Inspection method of semiconductor device
US5857610A (en) * 1995-11-14 1999-01-12 Nippon Steel Corporation Process and apparatus for forming ball bumps
JPH11297774A (en) * 1998-04-14 1999-10-29 Shibuya Kogyo Co Ltd Solder ball vacuum inspection device
US6685080B1 (en) * 2000-09-21 2004-02-03 Micron Technolgy, Inc. Individual selective rework of defective BGA solder balls
JP2001244290A (en) * 2001-01-23 2001-09-07 Matsushita Electric Ind Co Ltd Method of mounting conductive ball
CN103033446A (en) * 2011-09-29 2013-04-10 三星电机株式会社 Solderball test device
CN103934207A (en) * 2013-01-18 2014-07-23 鸿劲科技股份有限公司 Electronic component working unit, working method and working equipment applied by same

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112762864A (en) * 2020-12-24 2021-05-07 深圳市立可自动化设备有限公司 Rapid alignment detection device and method based on universal BGA ball-mounting board
CN112774173A (en) * 2021-01-28 2021-05-11 深圳市瑞驰文体发展有限公司 Billiard ball box with billiard ball detection function
CN112774173B (en) * 2021-01-28 2022-05-17 深圳市瑞驰文体发展有限公司 Billiard ball box with billiard ball detection function
CN115763309A (en) * 2022-11-10 2023-03-07 上海世禹精密机械有限公司 Ball-sucking and ball-missing detection device for ball-planting jig and using method
CN115938962A (en) * 2023-02-21 2023-04-07 深圳市立可自动化设备有限公司 Ball planting machine capable of conveniently replacing clamping assembly

Similar Documents

Publication Publication Date Title
CN105021626A (en) Ball placement detection equipment and application thereof
CN104111260A (en) Nondestructive ceramic detection device and detection method thereof
CN203929667U (en) Ceramic Tiles non-destructive detecting device
CN105787407A (en) Method and system for automatically identifying express delivery barcode integrating machine vision and laser scanning
US20190148333A1 (en) Method for bonding wafers and bonding tool
CN106767423A (en) Automatic Visual Inspection instrument
CN101552219A (en) Wafer processing apparatus with wafer alignment device
CN206731587U (en) Bearing outer ring ball grooves automatic detection and screening plant
CN103219269A (en) Wafer pre-locating device based on machine vision and method thereof
CN110277327B (en) System and method for detecting silicon wafers in online graphite boat
CN105424721B (en) A kind of metal strain meter defect automatic checkout system
CN1936555A (en) Damage-free detection system for strong conveying belt
CN211905130U (en) Screen alignment lighting detection device
CN106404001A (en) Precision installation alignment device for star sensor and dynamic photostar simulator and testing method
CN206912814U (en) Bearing outer ring chamfering automatic detection and screening plant
CN104124182A (en) Turret type detection machine and using method thereof
CN100449724C (en) Wafer detecting device and wafer detecting method
CN209963021U (en) Detection system for silicon wafer in online graphite boat
CN206505030U (en) A kind of automatic line detector of automobile stamping
US20210048473A1 (en) Injection device, micro light emitting diode inspection and repairing equipment and inspection and repairing method
CN107134419A (en) Flip-chip bonding apparatus and its bonding method
CN102032872A (en) Shadow method-based high-density BGA solder ball height measuring system and method
CN204832547U (en) Plant ball check out test set
CN109855532A (en) Glass size detection device and method
CN104112686B (en) Detection assembly and method for detecting and classifying LED wafers

Legal Events

Date Code Title Description
C06 Publication
PB01 Publication
C10 Entry into substantive examination
SE01 Entry into force of request for substantive examination
RJ01 Rejection of invention patent application after publication
RJ01 Rejection of invention patent application after publication

Application publication date: 20151104