CN103234991B - A kind of measuring method of crystalline material crystal orientation - Google Patents
A kind of measuring method of crystalline material crystal orientation Download PDFInfo
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- CN103234991B CN103234991B CN201310132877.1A CN201310132877A CN103234991B CN 103234991 B CN103234991 B CN 103234991B CN 201310132877 A CN201310132877 A CN 201310132877A CN 103234991 B CN103234991 B CN 103234991B
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- 239000013078 crystal Substances 0.000 title claims abstract description 85
- 238000000034 method Methods 0.000 title claims abstract description 24
- 239000002178 crystalline material Substances 0.000 title claims description 9
- 238000001514 detection method Methods 0.000 claims abstract description 4
- 238000004364 calculation method Methods 0.000 claims description 2
- 238000010408 sweeping Methods 0.000 abstract description 2
- 238000002441 X-ray diffraction Methods 0.000 description 7
- 238000012360 testing method Methods 0.000 description 6
- 238000010586 diagram Methods 0.000 description 4
- 239000000463 material Substances 0.000 description 3
- 238000000691 measurement method Methods 0.000 description 3
- 230000002457 bidirectional effect Effects 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- 238000012545 processing Methods 0.000 description 2
- 239000004927 clay Substances 0.000 description 1
- 238000012937 correction Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 229910021421 monocrystalline silicon Inorganic materials 0.000 description 1
- 229910052594 sapphire Inorganic materials 0.000 description 1
- 239000010980 sapphire Substances 0.000 description 1
- 239000007858 starting material Substances 0.000 description 1
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- Analysing Materials By The Use Of Radiation (AREA)
Abstract
The invention provides a kind of crystal processes the crystal orientation of crystal face detection method of X-ray to deviation or crystal bar, the measuring method adopted scans the crystal orientation of crystal crystal face, found out the crystal positions angle under peak value by surface sweeping curve, simultaneously by the position angle of trough measure crystal under this position angle to angular deviation.Only need single pass, twice braking rotates just can correct crystal orientation accurately.
Description
Technical field
The present invention relates to and a kind ofly measure the method in crystal orientation of crystal to deviation or crystal bar processing crystal face, relate in particular to the detection method of X-ray of a kind of crystal to the crystal orientation of deviation or crystal bar processing crystal face.
Background technology
Monocrystal material has purposes widely in Cutting-edge science technology, such as monocrystalline silicon, sapphire single-crystal etc., due to the special crystal structure of monocrystal material and the characteristic of crystal, be widely used in the optical lens of semicon industry and optics, prism, watch window, under specific crystal orientation, optical characteristics is remarkable, but measure crystal to time existing direction finder and direction-finding method cannot accurately measure and correct with crystal orientation.
The orientation method of prior art has single-measurement method and bidirectional measurement method, and adopted is bidirectional measurement method more.Sample crystals is mainly placed in the unit clamp rotating and return to Chinese Taiwan by this kind of method, first carry out X-direction adjustment, rotation is returned to Chinese Taiwan clockwise again (or counterclockwise) 90-degree rotation, carry out Y direction adjustment, repeatedly repeat above operation, until within the scope of 0-90 degree, measured value is constant, the crystal orientation crystal face now for having corrected.
As shown in Figure 1, be the measuring method in a kind of monocrystal material crystal orientation of prior art, before test, draw cross curve at the center of sample 14 macro surface, button on a glass.Enclose sample 14 with the outer face of sucker 16, from the Kong Zhongyong clay 13 of sucker 16 opposite side by bonding for sample 14, then sucker 16 is fixed on end face of shaft bush 7 through index dial 12.When sample 14 is tested, XRD detector is moved on to certain crystal face diffraction occur 2 θ positions on motionless.While starter motor 10 allows the quick rotation of sample 14, carry out θ scanning, obtain the envelope diagram of stepped line.Position A1, A2 value that diffraction maximum value occurs determined by the collection of illustrative plates gathered, and the mean value of the difference of the two is exactly the crystal orientation fleet angle B that will survey.2 θ positions are still remained at detector, θ axle is allowed to move on to A1 or A2 position when also keeping motionless, only allow the slow rotation of sample, see by display screen the angle of sample cross-hatch on index dial 12 that diffraction maximum value is corresponding, namely this angle is the projection of crystal orientation fleet angle in macro surface---position angle C.Utilize stepper motor, can C be found, realize monocrystalline orientation.By the former sample position cut, foundation B and C is restored for bulk single crystal and just can cut out certain crystal face at cutting machine.
There is following shortcoming in this kind of crystal orientation measuring method: 1, test needs macro surface, namely a smooth flat, adds the manufacturing procedure before test; 2, this kind of test is applicable for the tangible samples such as film, wafer, block, inapplicable for the shaggy sample of out-of-shape, test sample narrow range; 3, sample need be close on sucker, is difficult to fixing for large scale as 6 cun, 8 cun etc.; 4, after finding fleet angle accurately, need sample be dismantled, retighten according to test value, enter next procedure, not process continuity; 5, look for position angle to be use dial reading, there is reading error.
For solving an above-mentioned difficult problem, a kind of measuring method of crystalline material crystal orientation is proposed.
Summary of the invention
The measuring method that the present invention adopts scans the crystal orientation of crystal crystal face, found out the crystal positions angle under peak value by surface sweeping curve, simultaneously by the position angle of trough measure crystal under this position angle to angular deviation.Only need single pass, twice braking rotates just can correct crystal orientation accurately.
The invention provides the measuring method in following a kind of crystalline material crystal orientation, surveying instrument is utilized to measure crystalline material crystal orientation, described surveying instrument comprises: rotary table assembly, ultrasonic detector, directional head, motor, XRD (X-raydiffraction, X-ray diffraction) detector and display; The method includes the steps of:
Crystal being fixed in the fixture of described rotary table assembly, utilizing described ultrasonic detector to set a virtual plane for measuring;
Described directional head moves downward, and under described ultrasonic detector detection, the virtual plane to described setting stops;
Described rotary table assembly carries out 360 degree of rotations under described driven by motor, scans with the described crystal orientation of XRD detector to crystal crystal face simultaneously;
The crystal orientation characteristic of crystal is shown in described display in the mode of exemplary waveforms, adjacent two crest locations difference 180 degree, adjacent two wave trough position difference 180 degree in described waveform;
Get arbitrarily a crest location, its position angle is θ, and so θ+90 spends position is crystal orientation angular deviation maximum position, by worktable rotary so far position, measures crystal orientation angle;
Deviate is drawn according to described crystal orientation angle calculation;
Correct crystal orientation angle according to described deviate by the angle modulation assembly in described fixture, thus obtain the crystal orientation angle of standard.
Above-mentioned rotary table assembly carries out running accuracy≤30 of 360 degree of rotations under described driven by motor ".
The feature of measuring method of the present invention is: 1, be placed on by sample in the fixture on rotary table assembly, is applicable to large scale and random crystal measurement; 2, utilize ultrasonic detector to set a virtual plane measured, be applicable to smooth flat, Rough Horizontal Plane or rough surface; 3, after finding fleet angle accurately, by angle modulation assembly, scene, crystal orientation can be corrected, after correction, fixture dismounting be entered next procedure, convenient and swift; 4, all angles are shown as numerical monitor, are accurate to radix point 3, avoid reading error.
Accompanying drawing explanation
Fig. 1 is the crystal orientation surveying work platform of prior art;
Fig. 2 is rotary table of the present invention and angle modulation group;
Fig. 3 is display curve synoptic diagram of the present invention;
Fig. 4 is directional head schematic diagram of the present invention.
Embodiment
Utilize surveying instrument to measure crystalline material crystal orientation, described surveying instrument comprises: rotary table assembly 18, ultrasonic detector 24, directional head 20, motor 27, XRD detector and display (not shown).
As Fig. 2, crystal is fixed in the fixture of rotary table assembly 18, ultrasonic detector 24 is utilized to set a virtual plane for measuring, directional head 20 moves downward, under ultrasonic detector 24 detects, stop to set virtual plane, rotary table assembly 18 carries out 360 degree of rotations under motor 27 drives, running accuracy≤30 ", scan with XRD detector simultaneously, the waveform of schematic diagram as shown in Figure 3 can be shown in the display according to the characteristic of crystal, in Fig. 3, X-axis is the position angle of rotary table, Y-axis is the angle value (numeral be accurate to radix point after 3) of crystal orientation measurement of angle, adjacent two crest locations difference 180 degree in figure, adjacent two wave trough position difference 180 degree.According to Prague theorem, crest location is position, standard crystal orientation, and wave trough position is crystal orientation angular deviation maximum position.Get arbitrarily a crest location, position angle is θ, so θ+90 spends position is crystal orientation angular deviation maximum position, by worktable rotary so far position, measure crystal orientation angle, calculate deviate, correct crystal orientation angle according to this deviate by the angle modulation assembly 21 in fixture, thus obtain the crystal orientation crystal face of standard.
Orientation method of the present invention is automatically to crystal 360 degree of rotation sweeps, and energy quick position angular deviation maximum position, method is simply accurate, and figure shows directed curve, intuitively clear.This measuring method is applicable to automatic control, reduces personal error, saves time.
The invention is not restricted to the above description to embodiment, the content that those skilled in the art disclose according to the present invention, the improvement that basis of the present invention need not be carried out through creative work and amendment all should within protection scope of the present invention.
Claims (2)
1. the measuring method in crystalline material crystal orientation, utilize surveying instrument to measure crystalline material crystal orientation, described surveying instrument comprises: rotary table assembly, ultrasonic detector, directional head, motor, XRD detector and display; The method includes the steps of:
Crystal being fixed in the fixture of described rotary table assembly, utilizing described ultrasonic detector to set a virtual plane for measuring;
Described directional head moves downward, and under described ultrasonic detector detection, the virtual plane to described setting stops;
Described rotary table assembly carries out 360 degree of rotations under described driven by motor, scans with the described crystal orientation of XRD detector to crystal crystal face simultaneously;
The crystal orientation characteristic of crystal is shown in described display in the mode of exemplary waveforms, adjacent two crest locations difference 180 degree, adjacent two wave trough position difference 180 degree in described waveform;
Get arbitrarily a crest location, its position angle is θ, and so θ+90 spends position is crystal orientation angular deviation maximum position, by worktable rotary so far position, measures crystal orientation angle;
Deviate is drawn according to described crystal orientation angle calculation;
Correct crystal orientation angle according to described deviate by the angle modulation assembly in described fixture, thus obtain the crystal orientation angle of standard.
2. the measuring method in a kind of crystalline material crystal orientation as claimed in claim 1, is characterized in that, described 360 degree of running accuracy≤30 rotated ".
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| Application Number | Priority Date | Filing Date | Title |
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| CN201310132877.1A CN103234991B (en) | 2013-04-01 | 2013-04-01 | A kind of measuring method of crystalline material crystal orientation |
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| CN201310132877.1A CN103234991B (en) | 2013-04-01 | 2013-04-01 | A kind of measuring method of crystalline material crystal orientation |
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| CN103234991B true CN103234991B (en) | 2015-11-25 |
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Families Citing this family (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103616394B (en) * | 2013-12-12 | 2015-12-02 | 哈尔滨工业大学 | A kind of method determining diamond lap crystal orientation |
| CN107238617A (en) * | 2017-07-13 | 2017-10-10 | 台州市锐利智能科技有限公司 | The high-efficiency quartz shape chip angle sorting method of view-based access control model positioning |
| CN108312370B (en) * | 2017-12-20 | 2020-05-01 | 天通控股股份有限公司 | Directional processing method based on horizontal sensor positioning crystal |
| CN109080012A (en) * | 2018-08-23 | 2018-12-25 | 中国工程物理研究院激光聚变研究中心 | Crystal orientation angle correction method |
| CN109490346B (en) * | 2018-10-15 | 2021-07-02 | 内蒙古科技大学 | A method for measuring the orientation deviation angle of grain-oriented silicon steel by X-ray diffraction |
| CN111300192B (en) * | 2020-03-24 | 2021-12-24 | 广州南砂晶圆半导体技术有限公司 | Directional processing method applied to single crystal |
| CN113658901B (en) | 2021-10-21 | 2022-01-21 | 西安奕斯伟材料科技有限公司 | Method and system for positioning center of V-shaped notch of wafer and computer storage medium |
| CN114193643A (en) * | 2021-12-27 | 2022-03-18 | 烟台力凯数控科技有限公司 | Cutting device for squarer and crystal bar cutting method |
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| CN2916626Y (en) * | 2006-07-13 | 2007-06-27 | 郭振琪 | XRD specimen stage for oriented and non-oriented crystal analysis |
| CN101532970A (en) * | 2008-03-11 | 2009-09-16 | 宝山钢铁股份有限公司 | Crystal orientation and micromechanics performance measurement method of each composition crystal grain in polycrystal |
| EP2148190A2 (en) * | 2008-07-23 | 2010-01-27 | Korea Institute Of Machinery & Materials | Apparatus of measuring the orientation relationship between neighbouring grains using a gonimeter in a transmission electron microscope and method for revealing the characteristics of grain boundaries |
| CN201555818U (en) * | 2009-12-15 | 2010-08-18 | 丹东奥龙射线仪器有限公司 | X-ray crystal orientation instrument |
| CN101806758A (en) * | 2010-04-16 | 2010-08-18 | 谢加地 | Seed crystal detection method and device thereof |
| CN103257150A (en) * | 2012-08-31 | 2013-08-21 | 云南北方驰宏光电有限公司 | Crystal direction finder for directly measuring deflecting angle in crystal orientation and measurement method thereof |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| JP5276851B2 (en) * | 2008-02-01 | 2013-08-28 | 東芝Ｉｔコントロールシステム株式会社 | Crystal orientation measuring device, crystal processing device, and crystal processing method |
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| CN2916626Y (en) * | 2006-07-13 | 2007-06-27 | 郭振琪 | XRD specimen stage for oriented and non-oriented crystal analysis |
| CN101532970A (en) * | 2008-03-11 | 2009-09-16 | 宝山钢铁股份有限公司 | Crystal orientation and micromechanics performance measurement method of each composition crystal grain in polycrystal |
| EP2148190A2 (en) * | 2008-07-23 | 2010-01-27 | Korea Institute Of Machinery & Materials | Apparatus of measuring the orientation relationship between neighbouring grains using a gonimeter in a transmission electron microscope and method for revealing the characteristics of grain boundaries |
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