CN104532193A - Safe metal film evaporation method - Google Patents
Safe metal film evaporation method Download PDFInfo
- Publication number
- CN104532193A CN104532193A CN201510005459.5A CN201510005459A CN104532193A CN 104532193 A CN104532193 A CN 104532193A CN 201510005459 A CN201510005459 A CN 201510005459A CN 104532193 A CN104532193 A CN 104532193A
- Authority
- CN
- China
- Prior art keywords
- evaporation
- oil
- region
- organic film
- base material
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/14—Metallic material, boron or silicon
- C23C14/20—Metallic material, boron or silicon on organic substrates
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
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- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
Abstract
The invention relates to a safe metal film evaporation method. During evaporation, gaseous zinc-aluminum particles are arranged on an organic thin film matrix through discontinuous evaporation according to the areas of a certain regions, the engine regions are independent of one another in the transverse direction, each engine region is connected with a public area with a narrow evaporation layer, during evaporation, a safety line is added to each area transversely, the safety line in each area is not horizontal, and before the gaseous zinc-aluminum particles are arranged on the plated organic thin film matrix through evaporation, the step of smearing grease onto the matrix to accurately shield a non-evaporation region is conducted; when products are produced, even if rolling wheels scratch the safety lines, the regions are still connected through the transverse safety lines; due to the fact that the transverse safety lines are not horizontally arranged, the probability of continuous scratches is greatly reduced, the non-evaporation region is accurately, easily and conveniently shielded by smearing the grease, and the operability is high.
Description
Technical field
The present invention relates to coating technology field, particularly relate to a kind of safe metallic film evaporation coating method.
Background technology
The raw material metal film of metallic film capacitor makes it to form conductor at organic film surface evaporation one deck aluminium or aluminium zinc, thus become the electrode of electrical condenser, traditional metallized film is continuous steaming plating method normally, by aluminium or the continuous continual even evaporation of aluminium zinc at film surface, the relatively simple cost of technique is also low, but because film capacitor operationally inevitably occurs local evaporation layer punch-through (being commonly called as self-healing) by rush of current, electrical condenser can be caused short circuit thus lose efficacy by serious self-healing.
To constantly bring forth new ideas in industry based on this situation evaporation coating method, occurred the evaporation mode of safeguard construction, and generally used by industry.Safeguard construction be by metal level by a certain size region discontinuous evaporation on film, each region laterally between be independently, be longitudinally connected with public area with a narrow coating (being commonly called as security insurance line).
The advantage of the vapour deposition method of safeguard construction is: when there is self-healing phenomenon when there being rush of current, occur that the security device in self-healing region also can be disconnected by rush of current simultaneously, now this block region and metallic film independent, therefore breaking phenomena can not be there is in electrical condenser, still can effectively work, because an electric capacity is made up of a lot of dices, a few regions disconnects because of self-healing does not affect electrical condenser whole volume yet, therefore, the current widespread use of safety type thin film evaporation technique in the industry.
Although safety type film vapor deposition method has plurality of advantages in theory, but in actual production manufacturing processed, because electrical condenser is formed by winding film together, winding production process film unavoidably there will be evaporation layer through up-coiler roller and is scratched by roller and occur coating obscission, the length scratched is different in size, weight differs, often occur that scratching district is by chance in safety line position, destroy a succession of safety line, thus in production process by product device destruction completely, cause product bad.
In addition in currently available technology, on film, non-evaporation region needs when evaporation is produced not to be coated with metal level, operation inconvenience with object shielding guarantee.
Summary of the invention
In order to solve the technical problem of above-mentioned existence, the invention provides a kind of safe metallic film evaporation coating method, concrete technical scheme is:
A safe metallic film evaporation coating method, comprises the following steps;
Step one: plated organic film base material is contained in vacuum evaporation plating machine, extracts vacuum out with vacuum pump;
Step 2: heating aluminum alloy melting groove makes aluminium zinc dissolve under the high temperature conditions and evaporated gaseous;
Step 3: gaseous state zinc-aluminium particulate is in the deposited on silicon of the plated organic film base material of movement under the effect of up-coiler roller, cooling reduction, described gaseous state zinc-aluminium particulate presses a certain size region discontinuous evaporation on organic film base material, be independently between each region is horizontal, be longitudinally connected with public area with a narrow coating;
It is characterized in that: during described evaporation, laterally increase a safety line in each region, and the safety line between each region adopts non-horizontal arrangement, described plated organic film base material also comprised the step of smearing the non-evaporation district of accurately shielding through grease before by gaseous state zinc-aluminium particulate evaporation, the method that the non-evaporation district of accurately shielding smeared by described grease is: adopt oil screen roller Excircle machining to go out the mode of oil groove, shielding oil is made evenly to be coated in accurately on the organic film of oil screen roller surface according to the groove that oil screen roller surface processes, there is oil supply hole oil screen roller one end, oil-feed and surface go out oil groove inside and are connected, the groove of oil product roller surface design is in staggered distribution by horizontal safety line height.
Described plated organic film base material is cylindric.
Described vacuum tightness is 1.3*10
-2~ 1.3*10
-3pa.
Described aluminum alloy melting groove Heating temperature is 1200 ° of C-1400 ° of C.
The present invention compared with prior art has following technique effect: laterally increase a safety line at each square during evaporation, and the safety line between each region adopts non-horizontal arrangement, like this, even if product is in process of production because roller scratches safety line, eachly interregionally still have horizontal safety line to be connected, because horizontal safety line adopts non-horizontal arrangement, the probability scratched continuously significantly reduces, it is simple and convenient, workable that the method adopting grease to smear shields non-evaporation district accurately.
Accompanying drawing explanation
Fig. 1 is that evaporation district self-healing of the present invention and security device disconnect phenomenon schematic diagram.
Fig. 2 is oil screen roller operating diagram of the present invention.
Fig. 3 is metallic film evaporation process schematic diagram of the present invention.
Embodiment
Below by specific embodiment, and by reference to the accompanying drawings, technical scheme of the present invention is described in further detail.
Embodiment: a kind of safe metallic film evaporation coating method, comprises the following steps;
First be contained in vacuum evaporation plating machine 2 by the organic film base material 1 of plated cylindrical shape, extract vacuum out with vacuum pump, vacuum tightness is, 1.3*10
-2~ 1.3*10
-3pa, through shielding roller 3 by oil, grease smearing method is adopted accurately to shield non-evaporation district, oil screen roller 3 Excircle machining is adopted to go out the mode of oil groove, shielding oil is made evenly to be coated in accurately on the organic film 1 on oil screen roller 3 surface according to the groove that oil screen roller 3 surface working is good, there is oil supply hole 5 oil screen roller 3 one end, oil-feed and surface go out oil groove 4 inside and are connected, the groove of oil screen roller 3 surface design is in staggered distribution by horizontal safety line height, then heating aluminum alloy melting groove 6 makes aluminium zinc dissolve under high temperature 1200 ° of C-1400 ° of C conditions and evaporated gaseous, gaseous state zinc-aluminium particulate is the deposited on silicon of the plated organic film base material 1 of movement, cooling reduction under acting on through up-coiler roller 7, described gaseous state zinc-aluminium particulate presses a certain size region discontinuous evaporation on organic film base material 1, independently between each region is horizontal, longitudinally be connected with public area with a narrow coating, laterally increase a safety line in each region during described evaporation, and the safety line between each region adopts non-horizontal arrangement.
Laterally a safety line is increased in each region during evaporation of the present invention, and the safety line between each region adopts non-horizontal arrangement, like this, even if product is in process of production because roller scratches safety line, each interregional still have horizontal safety line be connected, because horizontal safety line adopts non-horizontal arrangement, the probability scratched continuously significantly reduces.
The above, be only this practicality preferably embodiment, but scope is not limited thereto, and is equal to and replaces or change, all should be encompassed within protection scope of the present invention according to technical scheme of the present invention and inventive concept thereof.
Claims (4)
1. a metallic film evaporation coating method for safety, comprises the following steps;
Step one: plated organic film base material is contained in vacuum evaporation plating machine, extracts vacuum out with vacuum pump;
Step 2: heating aluminum alloy melting groove makes aluminium zinc dissolve under the high temperature conditions and evaporated gaseous;
Step 3: gaseous state zinc-aluminium particulate is in the deposited on silicon of the plated organic film base material of movement under the effect of up-coiler roller, cooling reduction, described gaseous state zinc-aluminium particulate presses a certain size region discontinuous evaporation on organic film base material, be independently between each region is horizontal, be longitudinally connected with public area with a narrow coating;
It is characterized in that: during described evaporation, laterally increase a safety line in each region, and the safety line between each region adopts non-horizontal arrangement, described plated organic film base material also comprised the step of smearing the non-evaporation district of accurately shielding through grease before by gaseous state zinc-aluminium particulate evaporation, the method that the non-evaporation district of accurately shielding smeared by described grease is: adopt oil screen roller Excircle machining to go out the mode of oil groove, shielding oil is made evenly to be coated in accurately on the organic film of oil screen roller surface according to the groove that oil screen roller surface processes, there is oil supply hole oil screen roller one end, oil-feed and surface go out oil groove inside and are connected, the groove of oil product roller surface design is in staggered distribution by horizontal safety line height.
2. evaporation coating method according to claim 1, is characterized in that: described plated organic film base material is for cylindric.
3. evaporation coating method according to claim 2, is characterized in that: described vacuum tightness is 1.3*10
-2~ 1.3*10
-3pa.
4. evaporation coating method according to claim 3, is characterized in that: described aluminum alloy melting groove Heating temperature is 1200 ° of C-1400 ° of C.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510005459.5A CN104532193B (en) | 2015-01-07 | 2015-01-07 | A kind of safe metallic film evaporation coating method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510005459.5A CN104532193B (en) | 2015-01-07 | 2015-01-07 | A kind of safe metallic film evaporation coating method |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN104532193A true CN104532193A (en) | 2015-04-22 |
| CN104532193B CN104532193B (en) | 2017-06-30 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201510005459.5A Active CN104532193B (en) | 2015-01-07 | 2015-01-07 | A kind of safe metallic film evaporation coating method |
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| CN (1) | CN104532193B (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106480407A (en) * | 2016-11-15 | 2017-03-08 | 苍南宇诺新材料科技有限公司 | A kind of metallized film production technology |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4516304B2 (en) * | 2003-11-20 | 2010-08-04 | 株式会社アルバック | Winding type vacuum deposition method and winding type vacuum deposition apparatus |
| CN103578749A (en) * | 2013-10-15 | 2014-02-12 | 铜陵其利电子材料有限公司 | Half-breadth metallization safety film |
-
2015
- 2015-01-07 CN CN201510005459.5A patent/CN104532193B/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106480407A (en) * | 2016-11-15 | 2017-03-08 | 苍南宇诺新材料科技有限公司 | A kind of metallized film production technology |
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| Publication number | Publication date |
|---|---|
| CN104532193B (en) | 2017-06-30 |
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