CN104532193B - A kind of safe metallic film evaporation coating method - Google Patents
A kind of safe metallic film evaporation coating method Download PDFInfo
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- CN104532193B CN104532193B CN201510005459.5A CN201510005459A CN104532193B CN 104532193 B CN104532193 B CN 104532193B CN 201510005459 A CN201510005459 A CN 201510005459A CN 104532193 B CN104532193 B CN 104532193B
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- Prior art keywords
- evaporation
- region
- organic film
- oil
- safety line
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Classifications
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/14—Metallic material, boron or silicon
- C23C14/20—Metallic material, boron or silicon on organic substrates
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
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- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
Abstract
The present invention relates to a kind of safe metallic film evaporation coating method, in evaporation, gaseous state zinc-aluminium particulate is sized region discontinuous evaporation on organic film base material, it is independent between each region transverse direction, longitudinal direction is connected with a narrow coating with public area, during the evaporation safety line is laterally increased in each region, and the safety line between each region uses non-horizontal arrangement, be plated organic film substrate also included smearing the step of accurately shielding non-evaporation area by grease before being deposited with by gaseous state zinc-aluminium particulate, even if product is in process of production because roller is scratched to safety line, each is interregional still to have horizontal safety line to be connected, because horizontal safety line uses non-horizontal arrangement, the continuous probability for scratching is greatly lowered, it is simple and convenient that the method smeared using grease accurately shields non-evaporation area, it is workable.
Description
Technical field
The present invention relates to coating technology field, more particularly to a kind of safe metallic film evaporation coating method.
Background technology
The raw material metal film of metallic film capacitor is to be deposited with one layer of aluminium or zinc-aluminium conjunction on organic film surface
Gold is allowed to form conductor, and so as to become the electrode of capacitor, traditional metallized film is typically continuous steaming plating method, will aluminium or
, in film surface, the relatively easy cost of technique is also low, but because thin film capacitor for the continuous continual uniform evaporation of allumen
Operationally inevitably occurred local evaporation layer punch-through by rush of current（It is commonly called as self-healing）, serious self-healing meeting
Capacitor is caused into short circuit so as to fail.
Constantly brought forth new ideas in industry based on this situation evaporation coating method, occur in that the evaporation mode of safeguard construction, and by industry
Inside commonly use.Safeguard construction is that metal level is sized into region discontinuous to be deposited with film, between each region transverse direction
It is independent, longitudinally with a narrow coating（It is commonly called as security insurance line）It is connected with public area.
The advantage of the vapour deposition method of safeguard construction is：When having rush of current and self-healing phenomenon occur, there is self-healing region
Safety device can also be disconnected by rush of current simultaneously, and now this block region is independent with metallic film, and capacitor will not be because
This and there is breaking phenomena, still can effectively work, because an electric capacity is made up of many blockages, a few regions are because of self-healing
Disconnection nor affects on capacitor whole volume, therefore, safety-type thin film evaporation technique is widely used at present in the industry.
Although safety-type film vapor deposition method has many advantages, such as in theory, in actual production manufacturing process, due to electricity
Container is formed together by winding film, and steaming unavoidably occurs when winding production process film is by up- coiler roller
Coating is scratched by roller and coating obscission occurs, and the length of scuffing is different in size, and weight differs, and occurs scuffing area often proper
Ingeniously be in safe line position, destroy a succession of safety line, so as to production process will the device destruction of product all fronts, cause product
It is bad.
In other currently available technology, non-evaporation region needs to be shielded with object when production is deposited with and just can guarantee that on film
It is not coated with metal level, operation inconvenience.
The content of the invention
In order to solve above-mentioned technical problem, the invention provides a kind of safe metallic film evaporation coating method, tool
The technical scheme of body is:
A kind of safe metallic film evaporation coating method, comprises the following steps；
Step one：Organic film substrate will be plated in vacuum evaporation plating machine, with vacuum pumped vacuum；
Step 2：Heating aluminum alloy melting groove causes that allumen dissolves and evaporated gaseous under the high temperature conditions；
Step 3：The surface of the mobile plated organic film substrate under the effect of rolled machine roller of gaseous state zinc-aluminium particulate
Upper deposition, cooling reduction, the gaseous state zinc-aluminium particulate are sized region discontinuous and are deposited with organic film base material, each
It is independent between the transverse direction of region, longitudinal direction is connected with a narrow coating with public area；
It is characterized in that：A safety line is laterally increased in each region during the evaporation, and between each region
Safety line uses non-horizontal arrangement, described to be plated organic film substrate before being deposited with by gaseous state zinc-aluminium particulate also including by oil
Fat smears the step of accurately shielding non-evaporation area, and the method that the grease smearing accurately shields non-evaporation area is：Rolled using oil screen
Wheel Excircle machining goes out the mode of oil groove, shielding oil is uniformly accurately coated according to the groove that oil screen roller surface is processed
On organic film by oil screen roller surface, there is fuel feed hole oil screen roller one end, and oil-feed goes out inside oil groove to be connected with surface,
The groove of oil product roller surface design is in staggered distribution by horizontal safety line height.
Plated organic film substrate is cylindrical shape.
The vacuum is 1.3*10-2~1.3*10-3Pa。
The aluminum alloy melting groove heating-up temperature is 1200 °C -1400 °C.
The present invention has the following technical effect that compared with prior art：During evaporation a safety is laterally increased in each square
Safety line between line, and each region uses non-horizontal arrangement, so, even if product is in process of production because roller is drawn
Safety line is hurt, each is interregional still to have horizontal safety line to be connected, it is continuous to scratch because horizontal safety line uses non-horizontal arrangement
Probability be greatly lowered, it is simple and convenient that the method smeared using grease accurately shields non-evaporation area, workable.
Brief description of the drawings
Fig. 1 is that evaporation area of the invention self-healing and safety device disconnect phenomenon schematic diagram.
Fig. 2 is oil screen roller operating diagram of the invention.
Fig. 3 is metallic film evaporation process schematic diagram of the invention.
Specific embodiment
Below by specific embodiment, and with reference to accompanying drawing, technical scheme is described in further detail.
Embodiment：A kind of safe metallic film evaporation coating method, comprises the following steps；
First by plated cylindric organic film base material 1 in vacuum evaporation plating machine 2, with vacuum pumped vacuum, very
Reciprocal of duty cycle is；1.3*10-2~1.3*10-3Pa, by by oil screen roller 3, non-evaporation area accurately being shielded using grease smearing method,
By the way of the oil screen Excircle machining of roller 3 goes out oil groove, make shielding oil uniform according to the good groove of the oil screen Surface Machining of roller 3
Accurately it is coated on the organic film 1 by oil screen roller 3 surface, there are fuel feed hole 5, oil-feed and surface in oil screen roller 3 one end
Go out inside oil groove 4 and be connected, the groove of oil screen roller 3 surface design is in staggered distribution by horizontal safety line height, then heats aluminium
Alloy melting groove 6 causes that allumen dissolves and evaporated gaseous under the conditions of 1200 °C -1400 °C of high temperature；Gaseous state zinc-aluminium particulate
Deposition, cooling reduction, the gaseous state on the surface of mobile plated organic film substrate 1 under the effect of rolled machine roller 7
It is independent, longitudinal direction on organic film base material 1, between each region transverse direction that zinc-aluminium particulate is sized region discontinuous evaporation
It is connected with public area with a narrow coating, a safety line, and each region is laterally increased in each region during the evaporation
Between safety line use non-horizontal arrangement.
During the present invention evaporation safety line, and the safety line use between each region are laterally increased in each region
Non-horizontal arrangement, so, even if product is in process of production because roller is scratched to safety line, each is interregional still horizontal peace
Completely it is connected, because horizontal safety line uses non-horizontal arrangement, the continuous probability for scratching is greatly lowered.
The above, only this practicality preferably specific embodiment, but the utility model protection domain is not limited to
This, equivalent or change are subject to according to the technical solution of the utility model and its inventive concept, should all be covered new in this practicality
Within the protection domain of type.
Claims (4)
1. a kind of safe metallic film evaporation coating method, comprises the following steps；
Step one：Organic film substrate will be plated in vacuum evaporation plating machine, with vacuum pumped vacuum；
Step 2：Heating aluminum alloy melting groove causes that allumen dissolves and evaporated gaseous under the high temperature conditions；
Step 3：Sunk on the surface of the mobile plated organic film substrate under the effect of rolled machine roller of gaseous state zinc-aluminium particulate
Product, cooling reduction, the gaseous state zinc-aluminium particulate are sized region discontinuous and are deposited with organic film base material, each region
It is independent between transverse direction, longitudinal direction is connected with a narrow coating with public area；
It is characterized in that：During the evaporation safety line, and the safety between each region are laterally increased in each region
Line uses non-horizontal arrangement, described to be plated organic film substrate before being deposited with by gaseous state zinc-aluminium particulate also including being applied by grease
The step of accurately shield non-evaporation area is smeared, the method that the grease smearing accurately shields non-evaporation area is：Outside using oil screen roller
Circle processes the mode of oil groove, make shielding oil according to the groove that oil screen roller surface is processed uniformly accurately be coated in by
On the organic film of oil screen roller surface, there is fuel feed hole oil screen roller one end, and oil-feed goes out inside oil groove to be connected with surface, oil product
The groove of roller surface design is in staggered distribution by horizontal safety line height.
2. evaporation coating method according to claim 1, it is characterised in that：Plated organic film substrate is cylindrical shape.
3. evaporation coating method according to claim 2, it is characterised in that：The vacuum is 1.3 × 10-2~1.3×10-3Pa。
4. evaporation coating method according to claim 3, it is characterised in that：The aluminum alloy melting groove heating-up temperature is 1200 °C
-1400°C。
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510005459.5A CN104532193B (en) | 2015-01-07 | 2015-01-07 | A kind of safe metallic film evaporation coating method |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510005459.5A CN104532193B (en) | 2015-01-07 | 2015-01-07 | A kind of safe metallic film evaporation coating method |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN104532193A CN104532193A (en) | 2015-04-22 |
| CN104532193B true CN104532193B (en) | 2017-06-30 |
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| CN201510005459.5A Active CN104532193B (en) | 2015-01-07 | 2015-01-07 | A kind of safe metallic film evaporation coating method |
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Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN106480407A (en) * | 2016-11-15 | 2017-03-08 | 苍南宇诺新材料科技有限公司 | A kind of metallized film production technology |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1619009A (en) * | 2003-11-20 | 2005-05-25 | 爱发科股份有限公司 | Take-up vacuum deposition method and take-up vacuum deposition apparatus |
| CN103578749A (en) * | 2013-10-15 | 2014-02-12 | 铜陵其利电子材料有限公司 | Half-breadth metallization safety film |
-
2015
- 2015-01-07 CN CN201510005459.5A patent/CN104532193B/en active Active
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1619009A (en) * | 2003-11-20 | 2005-05-25 | 爱发科股份有限公司 | Take-up vacuum deposition method and take-up vacuum deposition apparatus |
| CN103578749A (en) * | 2013-10-15 | 2014-02-12 | 铜陵其利电子材料有限公司 | Half-breadth metallization safety film |
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| Publication number | Publication date |
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| CN104532193A (en) | 2015-04-22 |
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