CN104503302A - Precision motion control system and control method thereof - Google Patents
Precision motion control system and control method thereof Download PDFInfo
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- CN104503302A CN104503302A CN201410692715.8A CN201410692715A CN104503302A CN 104503302 A CN104503302 A CN 104503302A CN 201410692715 A CN201410692715 A CN 201410692715A CN 104503302 A CN104503302 A CN 104503302A
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- G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
- G05B19/00—Programme-control systems
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Abstract
The invention relates to a precision motion control system and a control method thereof. The system comprises a control core module, a sensor input module, a high-voltage driving output module, a multichannel signal acquisition module, an executor module, a controlled object and a host computer screen display module. The output end of the sensor input module is connected with the input end of the control core module through the multichannel data acquisition module; the output end of the control core module is connected with the input end of the high-voltage driving output module; the host computer screen display module is in bidirectional connection with the control core module; the output end of the high-voltage driving output module is connected with the input end of the executor module; the output end of the executor module is connected with the input end of the controlled object and drives the controlled object; and the output end of the controlled object is connected with the input end of the sensor input module.
Description
Technical field
The invention belongs to displacement data acquisition technique field, especially a kind of precise flange system and method processed thereof.
Background technology
Along with the development of science and technology, the especially develop rapidly of MEMS technology, the motion in the even sub-nano-scale of nanometer and positioning control become possibility.This gives human knowledge and utilizes microworld, provides strong instrument.So-called nanometer displacement location technology refers to carries out precise hard_drawn tuhes to controlled object (micro Process instrument or micro-survey instrument) in nano-precision grade, to meet its requirement to positioning precision, kinematic accuracy and precision stability, realize having the processing of function of measuring and detect operation.The application of movement control technology mostly motion platform mechanism in a variety of manners or product realizes.Its application is ubiquitous, comprises nearly all high-tech area.
Control method based on single-chip microcomputer just occurred in the eighties in 20th century, but the occasion of application is mostly to system cloud gray model accuracy requirement and the lower field of operating cost, the real-time of the calculating travelling speed of single-chip microcomputer is poor, can only be applied in closed-loop control low speed point position motion and to the less demanding control occasion of running orbit.
Novel DSP kinetic control system, adopt more advanced modular organization, can combine with SOC (system on a chip) (SOC), field programmable gate array (FPGA) and the contour performance process chip of ARM, according to different application requirements, by simply increasing or changing module and coupling system programming, just can expand or amendment system, the data acquisition system (DAS) that promptly composition one is new, its arithmetic speed is faster, precision is higher, is widely used in field of precision movement control.
Summary of the invention
The object of the invention is to overcome the deficiencies in the prior art part, there is provided a kind of precise control system that can reach under the prerequisite of the requirement of control accuracy and speed, save cost and the cycle of research and development in early stage, there is the precise flange system of extensibility, ease for use and stability and method processed thereof simultaneously.
The present invention solves its technical matters and takes following technical scheme to realize:
A kind of precise flange system, comprise control core module, sensor load module, high drive output module, multi-channel signal acquiring module, executor module, by control object and host computer screen display module; The output terminal of sensor load module is by the input end of multi-channel data acquisition model calling to control core module; The output terminal of control core module is connected with the input end of high drive output module; Host computer screen display module and control core module are bi-directionally connected; The output terminal of high drive output module is connected with the input end of executor module; The output terminal of executor module connects by the input end of control object and drives by control object; The output terminal of controlled device is connected with the input end of sensor load module.
And, control core in described control core module is dsp processor, it data processing module, control module and display module is all integrated in one piece of dsp processor, take dsp processor as the design of the multi-channel signal acquiring of core and the system of process, the schematic diagram that will design is divided into following functional module: be that core completes the collection of data, data processing and data and stores with dsp processor, carries out with main frame the host interface module that communicates; For system provides the supply module of power supply; Carry out the D/A converter module of the analog-to-digital conversion module of signals collecting and the data of conversion dsp processor process.
And the dsp processor in described control core module and host computer screen display module are bi-directionally connected by USB2.0 host-host protocol; Dsp processor is all connected with control bus by address bus with multi-channel signal acquiring module, high drive output module.
And the external one piece of SDRAM storer of dsp processor, has also accessed one piece of FLASH memory.
And, described host computer screen display module transmission command to control core module, control core module control controlled device, controlled device by feedback position information transmission to host computer screen display module.
The step of the control method of above-mentioned precise flange system is:
(1) power on to described control system, host computer screen display module and dsp processor load initialize routine, enter initial phase;
Dsp processor initialization complete after transmission initialization success command to host computer screen display module, then enter waiting status;
(3) host computer screen display module sends movement instruction to dsp processor, after dsp processor accepts movement instruction, enters main circulating program;
(4) the positional information of current x, y, z three axis is passed through multi-channel data acquisition module transfer to dsp processor by sensor load module, dsp processor computing draws movement velocity and direction, and result is transferred to host computer screen display module, convert result to analog signal output high drive module by D/A converter module simultaneously, drive the output port of high drive module;
(5) high drive module passes through actuate actuators module to being controlled object implementatio8 micrometric displacement;
Sensor load module by current location information and displacement by multi-channel data acquisition module real-time be transferred to dsp processor, and in the display of host computer screen display module, wait for the operation of host computer, be finished and return master routine.
And, step (1) with step (3) in, after system electrification, dsp processor is connected with host computer screen display module by downloader, host computer screen display module by downloader to dsp processor signal transmission acquisition instructions, dsp processor obtains signals collecting instruction, and the data collected also are deposited in pre-assigned space by enabling signal collection.
And, step (1) in, when carrying out Initialize installation to system, closeall interruption is arranged; Start timer and provide clock pulse signal for capacitive transducer, ensure that capacitive transducer normally works; Start I
2c program configuration D/A converter, ensures that routine processes can be converted to the execution that simulating signal drives actuator below after completing in time; And open EDMA interruption; Judge whether interruption, had interruption to enter interrupt service subroutine, complete the reception of data, process and transmission.
And, step (4) in, after program startup optimization, multi-channel data acquisition program is responsible for starting the collection that data collecting plate card carries out signal, signals collecting program is made up of McASP and EDMA two parts program, McASP and EDMA is utilized to link the collection being interrupted settling signal data by EDMA, and the data collected are delivered in dsp processor carry out treatment and analysis, in McASP initialization procedure, collection and the transmission of data are all the McASP serial line interfaces used, and it is respective independent operating that transmission and reception unit is divided.
And, when configuring EDMA, after setting up correct channel link and parameter configuration, meet interrupt condition to enter interruption and start to utilize EDMA channel transmission data, complete when once receiving data, store data in default space and wait for calling of analysis and treament program, dsp processor calls these above-mentioned collection data and to data analysis, conditioning, after filtering and a series of algorithm computing, serializer is sent to McASP again by EDMA channel transfer, send to digital to analog converter PCM3168A to carry out D/A converter module by McASP serial line interface and become simulating signal, enable to drive performer work below.
And, step (4) in, the compute mode that dsp processor carries out according to the feedback information of sensor load module is: result of calculation and objective result are compared in real time regulated by the ratio of PID closed loop control algorithm, integration and differentiation module, until meet error requirements, then result is transferred to host computer screen display module.
And the (5) described executor module of step is the Piezoelectric Driving executor module of nanopositioning stage, high drive module by the Piezoelectric Driving executor module of this nanopositioning stage to by control object implementatio8 nanopositioning stage micrometric displacement.
Advantage of the present invention and good effect are:
1, the present invention is directed to nanometer displacement and locating platform, design and develop a set of signal acquiring and processing system based on DSP, the data acquisition of multi-channel high-accuracy, in real time process can be realized and export, and the data exported are converted to analog quantity drive execution module to have moved the motion of micro-displacement platform and location.The signal acquisition and processing system being micro-nano displacement platform by the present invention provides the scheme of a practical feasibility.
2, control core system of the present invention adopts DSP process chip, compared with DSP+FPGA+ARM tri-core control system, there is the features such as high precision, good stability, cost performance are high, simple to operate, hyperchannel, high-precision data acquisition request that micro-displacement platform proposes can be met.
3, the present invention can realize three-D displacement by multi-channel data acquisition and disposal system micro-displacement platform and moves and locate, and one dimension can be controlled as required, two dimension, three-dimensional displacement is moved and locates, because this data acquisition system (DAS) can realize high-precision data acquisition, cost is low, strong interference immunity, can well control cost, micro-displacement platform can be applied to make it to realize nano level location, for China further develops semiconductor manufacturing facility, flat panel display manufacturing apparatus, large scale memory manufacturing equipment, and the advanced manufacturing set such as Ultra-precision Turning and measurement industry, set up the basic platform of an exploitation nanometer displacement location technology and product, there is important Research Significance.
Accompanying drawing explanation
Fig. 1 is the structured flowchart of entire system in the present invention.
Fig. 2 is the signal processing module Acquire and process system chart of dsp processor of the present invention;
The data processing structure block diagram of Fig. 3 to be of the present invention with dsp processor be core.
Embodiment
Below in conjunction with accompanying drawing, also by specific embodiment, the invention will be further described, and following examples are descriptive, are not determinate, can not limit protection scope of the present invention with this.
A kind of precise flange system, comprise control core module, sensor load module, high drive output module, multi-channel signal acquiring module, executor module, by control object and host computer screen display module; The output terminal of sensor load module is by the input end of multi-channel data acquisition model calling to control core module; The output terminal of control core module is connected with the input end of high drive output module; Host computer screen display module and control core module are bi-directionally connected; The output terminal of high drive output module is connected with the input end of executor module; The output terminal of executor module connects by the input end of control object and drives by control object; The output terminal of controlled device is connected with the input end of sensor load module.
Wherein, control core in described control core module is dsp processor, it data processing module, control module and display module is all integrated in one piece of dsp processor, take dsp processor as the design of the multi-channel signal acquiring of core and the system of process, the schematic diagram that will design is divided into following functional module: be that core completes the collection of data, data processing and data and stores with dsp processor, carries out with main frame the host interface module that communicates; For system provides the supply module of power supply; Carry out the D/A converter module of the analog-to-digital conversion module of signals collecting and the data of conversion dsp processor process.
Dsp processor in control core module and host computer screen display module are bi-directionally connected by USB2.0 host-host protocol; Dsp processor is all connected with control bus by address bus with multi-channel signal acquiring module, high drive output module.
The external one piece of SDRAM storer of dsp processor, has also accessed one piece of FLASH memory.
Described host computer screen display module transmission command to control core module, control core module control controlled device, controlled device by feedback position information transmission to host computer screen display module.
The step of the control method of above-mentioned precise flange system is:
(1) power on to described control system, host computer screen display module and dsp processor load initialize routine, enter initial phase, and when carrying out Initialize installation to system, closeall interruption is arranged; Start timer and provide clock pulse signal for capacitive transducer, ensure that capacitive transducer normally works; Start I
2c program configuration D/A converter, ensures that routine processes can be converted to the execution that simulating signal drives actuator below after completing in time; And open EDMA interruption; Judge whether interruption, had interruption to enter interrupt service subroutine, complete the reception of data, process and transmission;
Dsp processor initialization complete after transmission initialization success command to host computer screen display module, then enter waiting status;
(3) host computer screen display module sends movement instruction to dsp processor, after dsp processor accepts movement instruction, enters main circulating program;
(4) sensor load module is by current x, y, the positional information of z tri-axis passes through multi-channel data acquisition module transfer to dsp processor, dsp processor computing draws movement velocity and direction, and result is transferred to host computer screen display module, convert result to analog signal output high drive module by D/A converter module simultaneously, drive the output port of high drive module, after program startup optimization, multi-channel data acquisition program is responsible for starting the collection that data collecting plate card carries out signal, signals collecting program is made up of McASP and EDMA two parts program, McASP and EDMA is utilized to link the collection being interrupted settling signal data by EDMA, and the data collected are delivered in dsp processor carry out treatment and analysis, the compute mode that dsp processor carries out according to the feedback information of sensor load module is: by the ratio of PID closed loop control algorithm, result of calculation and objective result are compared and are regulated by integration and differentiation module in real time, until meet error requirements, again result is transferred to host computer screen display module, in McASP initialization procedure, the collection of data and transmission are all the McASP serial line interfaces used, it is respective independent operating that transmission and reception unit is divided, when configuring EDMA, after setting up correct channel link and parameter configuration, meet interrupt condition to enter interruption and start to utilize EDMA channel transmission data, complete when once receiving data, store data in default space and wait for calling of analysis and treament program, dsp processor calls these above-mentioned collection data and to data analysis, conditioning, after filtering and a series of algorithm computing, serializer is sent to McASP again by EDMA channel transfer, send to digital to analog converter PCM3168A to carry out D/A converter module by McASP serial line interface and become simulating signal, enable to drive performer work below.
(5) high drive module is by driving the Piezoelectric Driving executor module of nanopositioning stage to being controlled object implementatio8 nanopositioning stage micrometric displacement;
Sensor load module by current location information and displacement by multi-channel data acquisition module real-time be transferred to dsp processor, and in the display of host computer screen display module, wait for the operation of host computer, be finished and return master routine.
With reference to the accompanying drawings the detailed operation of this said system and control method thereof and mentality of designing are described below:
As shown in Figure 1, the whole design idea of this embodiment is exactly be that core controller is to control micrometric displacement motion and the location of micro-displacement platform with digital signal processor.Utilize host computer to set an initial value and be transferred to digital signal processor, simulating signal is converted to by D/A converter module after digital signal processor processes, be transferred to micrometric displacement motion module, located by driver drives actuator motions, and by a sensor, current positional information is fed back to digital signal processor, form the control system of a closed loop.Because digital signal processor cannot direct Analog signals, need an analog-to-digital conversion module that simulating signal is converted to digital signal, again by digital signal processor collection and and setting value carry out contrasting until actuator motions to set expectation value, actuator completes the stop motion of micrometric displacement motion positions task.
After system electrification, first can carry out Initialize installation to system, and closeall interruption is arranged; Start timer and provide clock pulse signal for capacitive transducer, ensure that capacitive transducer normally works; Start I
2c program configuration D/A converter, ensures that routine processes can be converted to the execution that simulating signal drives actuator below after completing in time; Start McASP program, open transceiver channel; Start EDMA program, set up the link passage of EDMA and McASP, and open EDMA interruption; Judge whether interruption, had interruption to enter interrupt service subroutine, complete the reception of data, process and transmission.
In order to ensure that dsp chip can normally run, first Initialize installation should be carried out according to the demand of design to chip.By Initialize installation, dsp chip complete register initial value setting, set up interrupt vector table and peripheral components initial configuration etc.In the present invention, the Initialize installation step of DSP is:
1) initialization of device control register, arrange cpu clock and use external clock input, timer 1 and the multiplexing pin of McASP0 are set to McASP0 pin, and timer 0 and the multiplexing pin of McASP0 are set to timer 0 pin.
2) initialization interrupt vector is arranged.
3) initialize Timer.
4) global interrupt is closed.
5) PLL setting and EMIF interface are arranged.
After program startup optimization, multi-channel data acquisition program is responsible for starting the collection that data collecting plate card carries out signal.Signals collecting program is made up of McASP and EDMA two parts program, utilizes McASP and EDMA to link the collection being interrupted settling signal data by EDMA, and the data collected are delivered in DSP carries out treatment and analysis.
After dsp processor has carried out analysis, conditioning, filtering and a series of algorithm computing to the data collected, then PCM3168A analog to digital converter is sent to carry out analog to digital conversion by multi channel signals transmission program.Transmission program also bears the tasks such as clock configuration and register configuration for PCM3168A analog to digital converter simultaneously.
Dsp processor send use or McASP serial line interface, and utilize the clock generator of McASP and frame synchronization generator to provide the clock signal of normal work for PCM3168A.The reception of McASP and tranmitting data register are configured in order to asynchronous work mode when DSP carries out initial configuration, receive and send and can separate work not interfere with each other.
In order to ensure the phenomenon not occurring loss of data when sending, during configurable clock generator frequency when ensureing to meet the timing requirements of PCM3168A, the speed of data transmission rate and data receiver also must be made to be consistent.And note sending the configuration of formatting unit mask register and sending data bit stream providing data formatting register configuration, ensure receive data layout and send data self-consistentency, in order to avoid make the data of output make a mistake.
When configuring the register of PCM3168A digital to analog converter using dsp processor as main frame, PCM3168A digital to analog converter, as from machine, after setting the register parameters that will configure, detects I
2whether C bus hurries, the words setting be not in a hurry needs the address configured in machine, and the condition that generation starts to send data starts data transmission, the value write set is needed built-in address in machine, in order to ensure that data can write from loom address completely, time delay is waited for a period of time, and is sent completely rear generation stop condition and closes I
2c bus.
Because PCM3168A is the digital-to-analog conversion device that eight passages export, and we only employ three output channels wherein, in order to the power consumption reducing chip reduces the thermal value of chip, during configuration register, close the ADC part of PCM3168A and DAC part useless.
Claims (10)
1. a precise flange system, comprise control core module, sensor load module, high drive output module, multi-channel signal acquiring module, executor module, by control object and host computer screen display module; The output terminal of sensor load module is by the input end of multi-channel data acquisition model calling to control core module; The output terminal of control core module is connected with the input end of high drive output module; Host computer screen display module and control core module are bi-directionally connected; The output terminal of high drive output module is connected with the input end of executor module; The output terminal of executor module connects by the input end of control object and drives by control object; The output terminal of controlled device is connected with the input end of sensor load module.
2. precise flange system according to claim 1, it is characterized in that: the control core in described control core module is dsp processor, it data processing module, control module and display module is all integrated in one piece of dsp processor, take dsp processor as the design of the multi-channel signal acquiring of core and the system of process, the schematic diagram that will design is divided into following functional module: be that core completes the collection of data, data processing and data and stores with dsp processor, carries out with main frame the host interface module that communicates; For system provides the supply module of power supply; Carry out the D/A converter module of the analog-to-digital conversion module of signals collecting and the data of conversion dsp processor process.
3. precise flange system according to claim 2, is characterized in that: the dsp processor in described control core module and host computer screen display module are bi-directionally connected by USB2.0 host-host protocol; Dsp processor is all connected with control bus by address bus with multi-channel signal acquiring module, high drive output module.
4. precise flange system according to claim 2, is characterized in that: the external one piece of SDRAM storer of dsp processor, has also accessed one piece of FLASH memory.
5. precise flange system according to claim 2, it is characterized in that: described host computer screen display module transmission command is to control core module, control core module control controlled device, controlled device by feedback position information transmission to host computer screen display module.
6. a control method for precise flange system as claimed in claim 2, is characterized in that: the steps include:
(1) power on to described control system, host computer screen display module and dsp processor load initialize routine, enter initial phase;
Dsp processor initialization complete after transmission initialization success command to host computer screen display module, then enter waiting status;
(3) host computer screen display module sends movement instruction to dsp processor, after dsp processor accepts movement instruction, enters main circulating program;
(4) the positional information of current x, y, z three axis is passed through multi-channel data acquisition module transfer to dsp processor by sensor load module, dsp processor computing draws movement velocity and direction, and result is transferred to host computer screen display module, convert result to analog signal output high drive module by D/A converter module simultaneously, drive the output port of high drive module;
(5) high drive module passes through actuate actuators module to being controlled object implementatio8 micrometric displacement;
Sensor load module by current location information and displacement by multi-channel data acquisition module real-time be transferred to dsp processor, and in the display of host computer screen display module, wait for the operation of host computer, be finished and return master routine.
7. the control method of described precise flange system according to claim 6, it is characterized in that: described step (1) with step (3) in, after system electrification, dsp processor is connected with host computer screen display module by downloader, host computer screen display module by downloader to dsp processor signal transmission acquisition instructions, dsp processor obtains signals collecting instruction, and the data collected also are deposited in pre-assigned space by enabling signal collection.
8. the control method of described precise flange system according to claim 7, is characterized in that: step (1) in, when carrying out Initialize installation to system, closeall interruption is arranged, start timer and provide clock pulse signal for capacitive transducer, ensure that capacitive transducer normally works, start I
2c program configuration D/A converter, ensures that routine processes can be converted to the execution that simulating signal drives actuator below after completing in time, and open EDMA interruption, judge whether interruption, interruption is had to enter interrupt service subroutine, complete the reception of data, process and transmission, when configuring EDMA, after setting up correct channel link and parameter configuration, meet interrupt condition to enter interruption and start to utilize EDMA channel transmission data, complete when once receiving data, store data in default space and wait for calling of analysis and treament program, dsp processor calls these above-mentioned collection data and to data analysis, conditioning, after filtering and a series of algorithm computing, serializer is sent to McASP again by EDMA channel transfer, send to digital to analog converter PCM3168A to carry out D/A converter module by McASP serial line interface and become simulating signal, enable to drive performer work below.
9. the control method of described precise flange system according to claim 8, it is characterized in that: step (4) in, after program startup optimization, multi-channel data acquisition program is responsible for starting the collection that data collecting plate card carries out signal, signals collecting program is made up of McASP and EDMA two parts program, McASP and EDMA is utilized to link the collection being interrupted settling signal data by EDMA, and the data collected are delivered in dsp processor carry out treatment and analysis, in McASP initialization procedure, the collection of data and transmission are all the McASP serial line interfaces used, it is respective independent operating that transmission and reception unit is divided,
The compute mode that dsp processor carries out according to the feedback information of sensor load module is: result of calculation and objective result are compared in real time regulated by the ratio of PID closed loop control algorithm, integration and differentiation module, until meet error requirements, then result is transferred to host computer screen display module.
10. the control method of described precise flange system according to claim 6, it is characterized in that: step (5) in, described executor module is the Piezoelectric Driving executor module of nanopositioning stage, and high drive module passes through the Piezoelectric Driving executor module of this nanopositioning stage to being controlled object implementatio8 nanopositioning stage micrometric displacement.
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| CN104503302B (en) | 2017-02-22 |
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