CN103336146A - Sample moving platform based on piezoceramic scanner and control method thereof - Google Patents
Sample moving platform based on piezoceramic scanner and control method thereof Download PDFInfo
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- CN103336146A CN103336146A CN2013102526604A CN201310252660A CN103336146A CN 103336146 A CN103336146 A CN 103336146A CN 2013102526604 A CN2013102526604 A CN 2013102526604A CN 201310252660 A CN201310252660 A CN 201310252660A CN 103336146 A CN103336146 A CN 103336146A
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Abstract
The invention discloses a sample moving platform based on a piezoceramic tube and control method thereof. The sample moving platform is connected to the upper part of the piezoceramic tube (5), wherein the sample moving platform comprises magnetic steel (9) adopting a magnetic material, a base (8) adopting a iron material and a sample base tab (7); the magnetic steel is connected with the piezoceramic tube (5); the base (8) is positioned at the upper part of the magnetic steel (9), and is clung to the upper surface of the magnetic steel (9) under the magnetic force action of the magnetic steel (9); the sample base tab (7) is a light-weight iron sheet, is positioned at the upper part of the base (8) and is clung to the surface of the base (8) under the magnetic attractive force of the magnetic steel (9); a sample (6) is connected onto the upper surface of the sample base tab (7) in a sticking manner; the contact surfaces of the base (8) and the sample base tab (7) are smooth surfaces; contact surfaces of the base (8) and the magnetic steel (9) are rough surfaces. The sample moving platform is simple to control and easy to operate.
Description
Technical field
The present invention relates to a kind of scanning probe microscopy sample mobile platform, particularly a kind of sample mobile platform and control method thereof based on piezoelectric scanner.
Background technology
Scanning probe microscopy (SPM) is the effective tool of contemporary nano measurement and nano-manipulation processing, is promoting the fast development of whole nanometer industry.The sample mobile platform is the important component part of SPM, and it mainly comprises scanner and sample platform two parts.Can only reach micron order owing to be subjected to the sweep limit of the described scanner of restriction of piezoelectric ceramic tube elongation in the scanner, if will measure other not in the target of this scope, just need with the CCD camera in the visual field of micron dimension, search for and mobile measured zone with high precision sample mobile platform, navigate to below the needle point of SPM, so that probe scanning.
The sample mobile platform that is currently applied to SPM mainly contains two kinds: a kind of is the manual sample mobile platform, it mainly manually rotates accurate screw rod by the X-Y both direction and comes mobile example, scale according to different vernier adjustment knobs, its full accuracy can reach 2 μ m, but if will reach 0.1 μ m precision, then must use expensive differential thread screw mandrel, and if mobile 1mm, necessary turning knob 80 multi-turns are handled loaded down with trivial details; Another kind is high precision Electrocontrolled sample mobile platform, and the Electrocontrolled sample mobile platform that it drives based on motor is by computer controlled automatic, cooperating optical microscope system to carry out sample moves, locatees, bearing accuracy can reach nanoscale, but design is complicated, has increased the cost of instrument greatly.
Based on the above, the necessary property of the exploitation of the sample mobile platform of a kind of low price, high precision, handiness.
Summary of the invention
At the deficiency that exists in the above-mentioned technology, the invention provides a kind of sample mobile platform based on piezoelectric ceramic tube, described sample mobile platform is connected in the top of described piezoelectric ceramic tube 5, described sample mobile platform comprises, magnet steel 9, magnetic material is connected with described piezoelectric ceramic tube 5; Pedestal 8, ferrous material is positioned at described magnet steel 9 tops, and described pedestal 8 is subjected to described magnet steel 9 magneticactions to be close to described magnet steel 9 upper surfaces; Sample substrate 7, light-type irony thin slice is positioned at described pedestal 8 tops, is subjected to described magnet steel 9 magnetic attracting force effects to be close to described pedestal 8 surfaces; Wherein, described sample 6 is adhered to the upper surface of described sample substrate 7; Described pedestal 8 is shiny surface with described sample substrate 7 phase-contact surfaces; Described pedestal 8 is uneven surface with described magnet steel 9 surface of contact.
Preferably, described a kind of sample mobile platform based on piezoelectric ceramic tube, wherein said piezoelectric ceramic tube 5 is connected on the transmission system, described transmission system comprises D/A converter 3 and high-voltage amplifier 4, described piezoelectric ceramic tube 5 is accepted the amplification voltage after described D/A converter 3 conversions from described high-voltage amplifier 4, and motion under this voltage drives.
Preferably, described a kind of sample mobile platform based on piezoelectric ceramic tube, wherein said D/A converter 3 are accepted from the digital command of dsp controller 2 and are converted thereof into the input voltage of described high-voltage amplifier 4.
Preferably, described a kind of sample mobile platform based on piezoelectric ceramic tube, wherein said dsp controller 2 is connected on the host computer 1, and described dsp controller 2 is accepted the instruction of sending from described host computer function software and digitized processing is carried out in described instruction.
Preferably, described a kind of sample mobile platform based on piezoelectric ceramic tube, wherein said ceramic pipe outer wall is divided into four parts along longitudinal axis, described four parts are respectively X+ conductive layer, X-conductive layer, Y+ conductive layer and Y-conductive layer, wherein said X+ conductive layer and described X-conductive layer are symmetrically distributed along longitudinal axis, and described Y+ conductive layer and described Y-conductive layer are symmetrically distributed along described longitudinal axis.
This case also discloses a kind of sample mobile platform control method based on piezoelectric ceramic tube, comprising following steps, 1) adds generating positive and negative voltage to described ceramic pipe outer wall symmetry conductive layer respectively, make described ceramic pipe upper end crooked by the control voltage swing, and drive whole sample mobile platform is pressed the direction initialization operation; 2) bust voltage, described piezoelectric ceramic tube 5 drives described magnet steel 9 and returns back to initial position fast, and described pedestal 8 is subjected to the friction force effect to follow described magnet steel 9 motions, and described sample substrate 7 is subjected to inertia effect still to keep step 1) direction of motion; 3) execution in step 1 repeatedly) and step 2) arrive in the scanning areas until described sample 6, described sample mobile platform is finished once mobile.
Preferably, described a kind of sample mobile platform control method based on piezoelectric ceramic tube, the length of time delay is come control waveform during wherein by 3 outputs of dsp controller 2 control high-precision d/a converters.
A kind of sample mobile platform and control method thereof based on piezoelectric scanner provided by the present invention, its beneficial effect is: simple in structure, control is convenient, and step-length can reach nanoscale.
Description of drawings
Fig. 1 is the structural representation of the described a kind of sample mobile platform based on piezoelectric scanner of the embodiment of the invention;
Fig. 2 is the described a kind of synoptic diagram that moves at directions X based on piezoelectric scanner 5 in the sample mobile platform of piezoelectric scanner of the embodiment of the invention;
Fig. 3 is the location synoptic diagram of testing sample 6 in field of view on the described substrate of the embodiment of the invention;
Fig. 4 a is waveform before the driving voltage of the described a kind of sample mobile platform control method based on piezoelectric scanner of the embodiment of the invention is proofreaied and correct;
Fig. 4 b is that the driving voltage of the described a kind of sample mobile platform control method based on piezoelectric scanner of the embodiment of the invention is proofreaied and correct the back waveform.
Embodiment
The present invention is described in further detail below in conjunction with accompanying drawing, can implement according to this with reference to the instructions literal to make those skilled in the art.
As shown in Figure 1, be a kind of sample mobile platform based on piezoelectric scanner provided by the invention, comprise control system, described control system comprises host computer 1 and dsp controller 2, described dsp controller 2 is connected on the described host computer 1, send instruction to dsp controller 2 by described host computer function software, digital processing is carried out in 2 pairs of described instructions of dsp controller; Transmission system, described transmission system comprise D/A converter 3 and high-voltage amplifier 4, and described D/A converter 3 is accepted from the digital command of described dsp controller 2 and converted thereof into simulating signal as the input voltage of high-voltage amplifier 4; Piezoelectric scanner 5, the voltage that described piezoelectric scanner 5 is accepted from described high-voltage amplifier 4, and under this voltage effect, move; The sample platform, comprise magnet steel 9, pedestal 8 and sample substrate 7, and the three links to each other from bottom to top successively, described magnet steel 9 is positioned at the top of described piezoelectric scanner 5, described pedestal 8 is positioned at described magnet steel 9 tops, described sample substrate 7 is positioned at described pedestal 8 tops, and described pedestal 8 links to each other by described magnet steel 9 magnetic with described sample substrate 7, and described pedestal 8 is connected by described magnet steel 9 magnetic with described piezoelectric scanner 5.
Because the restriction of piezoelectric scanner 5 elongation ranges, the sweep limit of SPM generally can reach micron order, for sample 6, one constantly the probe scope that can scan be center among Fig. 3, if will observe the image in the district of left side, just need make the left side district move on to the center at directions X mobile example 6.The principle of impacting drives structure according to piezoelectric ceramics as can be known, sample substrate 7 can obtain certain displacement under friction force and inertia effect, drive sample 6 as Fig. 2 piezoelectric scanner 5 and move synoptic diagram at directions X.
Now analyze described sample mobile platform principle of work based on piezoelectric scanner with the voltage waveform shown in Fig. 4 a as the driving voltage of piezoelectric scanner 5X direction, other direction principle of work are similar.Add that one slowly goes up up voltage at first for the pair of electrodes of described piezoelectric scanner 5 control directions X motions, utilize stiction drive sample substrate 7 and the sample 6 of 7 of pedestal 8 and sample substrate to move to the center direction, reach maximal value up to driving voltage; Make driving voltage descend rapidly then, because inertia, sample substrate 7 and sample 6 can not followed pedestal 8 immediately and be done motion in the other direction, but can keep original direction of motion in a period of time, so sample substrate 7 has just produced certain relative displacement with pedestal 8.Carry out just to make the left side district on the sample 6 move to the position, center so repeatedly, namely arrive the scanning area of tat probe, realize movement, the location of 6 in probe-sample.
According to principle of inertia, when voltage decline, i.e. when the top of piezoelectric scanner 5A drive pedestal 8 moved to the X negative direction, sample substrate 7 and sample 6 were done retarded motion in the X positive dirction, until ν
1=0m/s moves to the X negative direction again; The speed of assumes samples substrate 7 and sample 6 is from v
1Reducing to the zero needed time of process is (t
1-τ), be (t and scanner A reverts to the needed time of ortho states
2-τ), if t
2≤ t
1, then sample substrate 7 and sample 6 move to the X positive dirction always.Therefore, should make t
1Big as far as possible, as far as possible near t
2If make t
1Big as far as possible, the one, make v
1Big as far as possible, it is big as far as possible namely to add the driving voltage maximal value; The 2nd, make coefficientoffriction as far as possible little is that sample substrate 7 and 8 surface of contact of pedestal are smooth as far as possible, the frictional resistance when doing retarded motion to reduce sample substrate 7.
Consider characteristics such as non-linear, the creep of piezoelectric ceramics and hysteresis, in the process of experiment, waveform is updated, proofread and correct at last and obtain the voltage waveform of driven sweep device shown in Fig. 4 b.The effect of curve is to realize by length time delay that dsp controller 2 is controlled high-precision d/a converters 3 output points among the figure.
Specific implementation process is as follows:
At first, 6 supposition of probe scanning sample are in the central area during scanning probe microscopy work, start sample platform move operation interface in the described host computer function software then, can be by the amplitude that changes driving voltage and the displacement (displacement=drive voltage amplitude * periodicity * scanner sensitivity) that periodicity is selected realistic requirement in this interface, wherein scanner sensitivity is definite value.Also have 8 moving directions such as X+, X-, Y+, Y-and XY axis available in addition in the software interface.After sending, instruction sends described dsp controller 2 to, 2 pairs of instructions of described dsp controller are carried out issuing described D/A converter 3 after the digital processing, described D/A converter 3 converts digital signal to simulating signal as the input voltage of described high-voltage amplifier 4, and voltage is moving through amplifying the described piezoelectric scanner 5 of rear drive.
By sending instruction, apply the ever-increasing acceleration rising of an acceleration driving voltage for described piezoelectric scanner 5, the ascending continuous increase of the acceleration here is in order to guarantee that scanner can drive described sample 6, sample substrate 7 and pedestal 8 movement therewith effectively, and the acceleration rising is when being increased to maximum for driving voltage, the top of piezoelectric scanner 5 and pedestal 8 movement velocitys are big as far as possible, and sample 6 and sample substrate 7 can be with pedestal 8 to the mobile fixed step sizes of direction initialization (supposition X positive dirction) in this process; Then driving voltage reduces rapidly, makes (t
2-τ) time is short as far as possible, piezoelectric scanner 5 fast quick-recovery ortho states, and sample 6 and sample substrate 7 are because inertia can continue to direction initialization (supposition X positive dirction) mobile; Just the left side district of described sample 6 can have been moved to the center by drive voltage amplitude, periodicity and the moving direction of setting sample platform move operation interface in the host computer function software like this.
Although embodiment of the present invention are open as above, but it is not restricted to listed utilization in instructions and the embodiment, it can be applied to various suitable the field of the invention fully, for those skilled in the art, can easily realize other modification, therefore do not deviating under the universal that claim and equivalency range limit, the present invention is not limited to specific details and illustrates here and the legend of describing.
Claims (7)
1. sample mobile platform based on piezoelectric ceramic tube, described sample mobile platform is connected in the top of described piezoelectric ceramic tube (5), it is characterized in that, and described sample mobile platform comprises,
Magnet steel (9), magnetic material is connected with described piezoelectric ceramic tube (5);
Pedestal (8), ferrous material is positioned at described magnet steel (9) top, and described pedestal (8) is subjected to described magnet steel (9) magneticaction to be close to described magnet steel (9) upper surface;
Sample substrate (7), light-type irony thin slice is positioned at described pedestal (8) top, is subjected to described magnet steel (9) magnetic attracting force effect to be close to described pedestal (8) surface;
Wherein, described sample (6) is adhered to the upper surface of described sample substrate (7); Described pedestal (8) is shiny surface with described sample substrate (7) phase-contact surface; Described pedestal (8) is uneven surface with described magnet steel (9) surface of contact.
2. a kind of sample mobile platform based on piezoelectric ceramic tube according to claim 1, it is characterized in that, described piezoelectric ceramic tube (5) is connected on the transmission system, described transmission system comprises D/A converter (3) and high-voltage amplifier (4), described piezoelectric ceramic tube (5) is accepted the amplification voltage after described D/A converter (3) conversion from described high-voltage amplifier (4), and motion under this voltage drives.
3. a kind of sample mobile platform based on piezoelectric ceramic tube according to claim 2 is characterized in that, described D/A converter (3) is accepted from the digital command of dsp controller (2) and converted thereof into the input voltage of described high-voltage amplifier (4).
4. a kind of sample mobile platform based on piezoelectric ceramic tube according to claim 3, it is characterized in that, described dsp controller (2) is connected on the host computer (1), and described dsp controller (2) is accepted the instruction of sending from described host computer function software and digitized processing is carried out in described instruction.
5. a kind of sample mobile platform based on piezoelectric ceramic tube according to claim 1, it is characterized in that, described ceramic pipe outer wall is divided into four parts along longitudinal axis, described four parts are respectively X+ conductive layer, X-conductive layer, Y+ conductive layer and Y-conductive layer, wherein said X+ conductive layer and described X-conductive layer are symmetrically distributed along longitudinal axis, and described Y+ conductive layer and described Y-conductive layer are symmetrically distributed along described longitudinal axis.
6. sample mobile platform control method based on piezoelectric ceramic tube, it is characterized in that, may further comprise the steps, 1) adds generating positive and negative voltage to described ceramic pipe outer wall symmetry conductive layer respectively, make described ceramic pipe upper end crooked by the control voltage swing, and drive whole sample mobile platform is pressed the direction initialization operation; 2) bust voltage, described piezoelectric ceramic tube (5) drives described magnet steel (9) and returns back to initial position fast, described pedestal (8) is subjected to the friction force effect to follow described magnet steel (9) motion, and described sample substrate (7) is subjected to inertia effect still to keep step 1) direction of motion; 3) execution in step 1 repeatedly) and step 2) in described sample (6) arrived scanning area, described sample mobile platform was finished once mobile.
7. a kind of sample mobile platform control method based on piezoelectric ceramic tube according to claim 6 is characterized in that, the length of time delay is come control waveform during by dsp controller (2) control high-precision d/a converter (3) output.
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Cited By (2)
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| CN104503302A (en) * | 2014-11-26 | 2015-04-08 | 天津三英精密仪器有限公司 | Precision motion control system and control method thereof |
| CN104914276A (en) * | 2015-06-11 | 2015-09-16 | 南京航空航天大学 | Scanning probe microscope scanning control method based on hysteresis model |
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Cited By (2)
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Application publication date: 20131002 |