CN202101642U - High-precision atomic force profiler - Google Patents
High-precision atomic force profiler Download PDFInfo
- Publication number
- CN202101642U CN202101642U CN2011202156942U CN201120215694U CN202101642U CN 202101642 U CN202101642 U CN 202101642U CN 2011202156942 U CN2011202156942 U CN 2011202156942U CN 201120215694 U CN201120215694 U CN 201120215694U CN 202101642 U CN202101642 U CN 202101642U
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- afm
- atomic force
- electronic control
- control system
- scanner
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Abstract
The utility model relates to a high-precision atomic force profiler, which comprises a shielding cover, an AFM (atomic force microscope) main unit, a computer system and an electronic control system. A marble vibration-proof table is arranged in the shielding cover, the AFM main unit is arranged at the top end of the marble vibration-proof table and comprises an AFM head, a platform type scanner and an AFM base, the AFM head is connected with the AFM base through a data line, the platform type scanner is arranged on a scanner interface of the AFM base in a plugged manner, one end of the AFM base is connected with the electronic control system through a data line, and the electronic control system is connected with the computer system through a USB (universal serial bus) line. The high-precision atomic force profiler has the advantages that affection of coupling effect of piezoelectric ceramics is eliminated, nanoscale and sub-nanoscale high-precision revolving powers can be achieved, and three-dimensional images and data about surface structure, profile and the like of a sample can be obtained by scanning so as to measure surface roughness, steps and the like.
Description
Technical field
The utility model relates to a kind of high precision atomic force contourgraph.
Background technology
Contourgraph is the instrument of measuring and obtaining tests such as sample surfaces pattern, size and roughness, analyze, and common contourgraph is the contourgraph according to the optical principle design, as interfering contourgraph and up-to-date digital hologram microscope etc.This type of contourgraph is the dynamic test sample on a large scale; More convenient; But exist resolution to receive the restricted problem of optical wavelength; At present high lateral resolution can only arrive 300 nm, and about 1 nm of longitudinal frame can not satisfy for the test of samples such as high precision smooth surface such as hard disk, semiconductor and optical mirror slip.
Atomic force microscope (AFM) is the third generation microscope that the recent development behind optical microscope, electron microscope is got up, and is to utilize interatomic acting force to reach the microscope of observing purpose.The maximum transversal resolution of atomic force microscope can reach 0.3 nm, vertically can reach 0.1 nm, is far superior to the resolution of optical microscope and electron microscope.AFM both can be used for conducting sample to the electric conductivity no requirement (NR) of testing sample, also can be used for non-conductive sample, particularly was applied to biological sample, can carry out active dynamic studies, almost need not to carry out specimen preparation.The data that AFM obtained are three-dimensional data, thereby can be three-dimensional imaging and analysis acquisition surfaceness, particle size and results such as the gradient or thickness to sample.In addition, AFM can test under vacuum, atmosphere and liquid environment sample.In view of these characteristics; AFM has been widely used in the scientific research and the industry of industries such as material, electronics, optics, biology, semiconductor and has made; Especially in 21 century in the all-round developing epoch of nanosecond science and technology; AFM becomes an indispensable test analytical instrument, and people are also in the effect and the application of fully excavating AFM.Traditional AFM makees scanner with the tubular piezo-electric pottery at present, though small and exquisite, the easy manufacturing simple in structure of tubular piezo-electric pottery scanner, three directions of XYZ are because coupling effect; There are nonopiate error, scanner shape error, pendulum effect and problem such as non-linear; The flat bed scanning device can be with three separation of XYZ, thereby have eliminated the mutual coupling effect between each, in addition because the Z axle is independent; Can do very greatly to scope Z, thereby satisfy evenly scanning on a large scale.The flat bed scanning device is being represented the developing direction of following AFM.
The utility model content
The purpose of the utility model provides a kind of high precision atomic force contourgraph, to overcome the deficiency of above-mentioned aspect.
The purpose of the utility model is to realize through following technical scheme:
A kind of high precision atomic force contourgraph comprises radome, AFM main frame, the department of computer science electronic control system of unifying, and is provided with the marble vibration isolators in the said radome, and the top of marble vibration isolators is provided with the AFM main frame; Said AFM main frame is made up of AFM head, platform-type scanner and AFM pedestal, and the AFM head is connected with the AFM pedestal through data line, and platform-type scanner is inserted on the AFM pedestal scanner interface; One end of said AFM pedestal is connected with electronic control system through data line, and electronic control system is connected with computer system through the USB line.
Said platform-type scanner is made up of the flat type piezoelectric pottery scanner of independently X, Y, three directions of Z axle.
The beneficial effect of the utility model is: adopt the atomic force microscope of platform-type scanner, have the contact and the dynamic force atomic force microscope working method of two kinds of routines; Platform-type scanner X, Y, three directions of Z axle are independently controlled, and have eliminated the coupling effect influence of piezoelectric ceramics; Can realize the high-precision discriminating ability of nanometer, Subnano-class; Can scan 3-D views such as obtaining sample surfaces structure and pattern and data and do measurements such as surfaceness, step, thereby be used for fields such as plating, CD, integrated circuit, optical mirror slip, metal industry as the high-accurate outline appearance.
Description of drawings
According to accompanying drawing the utility model is done further explain below.
Fig. 1 is the structural representation of the described high precision atomic force of the utility model embodiment contourgraph;
Fig. 2 is the surface structure synoptic diagram of the described high precision atomic force of the utility model embodiment contourgraph;
Fig. 3 is the structural representation of platform-type scanner in the described high precision atomic force of the utility model embodiment contourgraph.
Among the figure:
1, AFM head; 2, platform-type scanner; 3, AFM pedestal; 4, radome; 5, marble vibration isolators; 6, electronic control system; 7, computer system.
Embodiment
Shown in Fig. 1 ~ 3; The described a kind of high precision atomic force contourgraph of the utility model embodiment; Comprise radome 4, AFM main frame, computer system 6 and electronic control system 7, be provided with marble vibration isolators 5 in the said radome 4, the top of marble vibration isolators 5 is provided with the AFM main frame; Said AFM main frame is made up of AFM head 1, platform-type scanner 2 and AFM pedestal 3, and AFM head 1 is connected with AFM pedestal 3 through data line, and platform-type scanner 2 is inserted on the AFM pedestal scanner interface; One end of said AFM pedestal 3 is connected with electronic control system 6 through data line, and electronic control system 6 is connected with computer system 7 through the USB line.
Said platform-type scanner 2 is made up of the flat type piezoelectric pottery scanner of independently X, Y, three directions of Z axle.
During concrete the use; Electronic control system 6 is inserted computer systems 7 and to its control with the USB line; According to the requirement of scan operation software on the computer system 7, control platform-type scanner 2, thereby drive the sample motion scan; Needle point and sample room can produce acting force; Detect and handle getting into electronic control system 6 through AFM head 3, electronic control system 6 is converted into image with signal and sends to computer system 7, and computer system 7 is 3-D view such as sample surfaces structure and pattern with the data processing that records and makes surfaceness and Measurement and analysis such as step.
The utility model is not limited to above-mentioned preferred forms; Anyone can draw other various forms of products under the enlightenment of the utility model; No matter but on its shape or structure, do any variation; Every have identical with a application or akin technical scheme, all drops within the protection domain of the utility model.
Claims (2)
1. high precision atomic force contourgraph; Comprise radome (4), AFM main frame, computer system (6) and electronic control system (7); It is characterized in that: be provided with marble vibration isolators (5) in the said radome (4), the top of marble vibration isolators (5) is provided with the AFM main frame; Said AFM main frame is made up of AFM head (1), platform-type scanner (2) and AFM pedestal (3), and AFM head (1) is connected with AFM pedestal (3) through data line, and platform-type scanner (2) is inserted on the AFM pedestal scanner interface; One end of said AFM pedestal (3) is connected with electronic control system (6) through data line, and electronic control system (6) is connected with computer system (7) through the USB line.
2. high precision atomic force contourgraph according to claim 1 is characterized in that: said platform-type scanner (2) is made up of the flat type piezoelectric pottery scanner of independently X, Y, three directions of Z axle.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011202156942U CN202101642U (en) | 2011-06-23 | 2011-06-23 | High-precision atomic force profiler |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011202156942U CN202101642U (en) | 2011-06-23 | 2011-06-23 | High-precision atomic force profiler |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN202101642U true CN202101642U (en) | 2012-01-04 |
Family
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2011202156942U Expired - Fee Related CN202101642U (en) | 2011-06-23 | 2011-06-23 | High-precision atomic force profiler |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN202101642U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103336146A (en) * | 2013-06-24 | 2013-10-02 | 苏州海兹思纳米科技有限公司 | Sample moving platform based on piezoceramic scanner and control method thereof |
-
2011
- 2011-06-23 CN CN2011202156942U patent/CN202101642U/en not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103336146A (en) * | 2013-06-24 | 2013-10-02 | 苏州海兹思纳米科技有限公司 | Sample moving platform based on piezoceramic scanner and control method thereof |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C17 | Cessation of patent right | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20120104 Termination date: 20130623 |