CN104503090B - Prism beam-expanded system - Google Patents

Prism beam-expanded system Download PDF

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Publication number
CN104503090B
CN104503090B CN201410806115.XA CN201410806115A CN104503090B CN 104503090 B CN104503090 B CN 104503090B CN 201410806115 A CN201410806115 A CN 201410806115A CN 104503090 B CN104503090 B CN 104503090B
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China
Prior art keywords
angle
prism
incident
angle prism
plane
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CN201410806115.XA
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Chinese (zh)
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CN104503090A (en
Inventor
袁志军
张海波
周军
耿立明
姜丽媛
魏运荣
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Shanghai Institute of Optics and Fine Mechanics of CAS
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Shanghai Institute of Optics and Fine Mechanics of CAS
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Priority to CN201410806115.XA priority Critical patent/CN104503090B/en
Publication of CN104503090A publication Critical patent/CN104503090A/en
Priority to US14/954,580 priority patent/US9423621B2/en
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    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/09—Beam shaping, e.g. changing the cross-sectional area, not otherwise provided for
    • G02B27/0938—Using specific optical elements
    • G02B27/095—Refractive optical elements
    • G02B27/0972—Prisms
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/04—Prisms
    • G02B5/045—Prism arrays
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
    • G02B7/18—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors
    • G02B7/1805—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors for prisms

Abstract

A kind of prism beam-expanded system, it is characterized in that: the beam-expanding system is made of the identical right-angle prism of 2 or more structures, incident beam is incident from the inclined-plane of the right-angle prism, referred to as incident inclined-plane, right-angle surface of the outgoing beam perpendicular to same right-angle prism, it is referred to as emitted right-angle surface, the apex angle α of all right-angle prisms is identical and meets following equation:In formula, n1, n2 are respectively refractive index of the laser in incident medium and right-angle prism.The present invention may be implemented arbitrarily to expand multiple, without being limited by right-angle prism raw material size.Have the advantages that consumptive material is few, at low cost.The right-angle prism of same size is conducive to mass production, can substantially reduce period and the cost of processing.

Description

Prism beam-expanded system
Technical field
The present invention relates to expanding for directional light, especially a kind of prism beam-expanded system.It is mainly used for expanding for directional light, such as In the linewidth narrowing module of excimer laser or dye laser.It is an advantage of the invention that laser can be made to reach arbitrary Multiple is expanded, without being limited by right-angle prism raw material size.In addition also have the advantages that at low cost.
Background technique
The narrow linewidth excimer laser of photoetching is generally combined with echelle grating using prism beam-expanded system and carries out line Width narrows.The effect of prism beam-expanded system is to realize to expand laser level direction.Due to litho machine line width and expand times It counts inversely, therefore line width narrow in order to obtain, technical staff are pursued big as far as possible by way of multiple prism arrangements Expand multiple.[US5978409, CN101581866B etc.] is general in first technology all realizes 20 using three or four prisms ~30 times expand multiple.The size of these prisms is sequentially increased with the transmission that expands of light, the big prism ruler of beam-expanding system end It is very little general all in 100mm or more.In the art, fused silica or calcirm-fluoride that the material of prism generally selects ultraviolet height saturating Optical material is made, but the manufacture of large-sized optical material is difficult, limits throughput, therefore price is very expensive.In addition, formerly The right-angle prism of multiple and different specifications is used in technology, when polishing must design different clamp for machining, and process-cycle and cost are all It is relatively high.
Summary of the invention
The purpose of the present invention is to provide a kind of prism beam-expanded systems.The prism beam-expanded system can be used inexpensive, small The combination of size right-angle prism obtains height and expands multiple, and first technology is overcome to rely on large scale prism, expensive deficiency.This hair Bright prism beam-expanded system is mainly used for expanding for directional light, such as the linewidth narrowing module of excimer laser or dye laser In.Feature is that laser can be made to reach arbitrarily to expand multiple, without being limited by prism raw material size.In addition also there is consumption Few, the at low cost advantage of material.The right-angle prism of same size be conducive to mass production, can substantially reduce processing period and at This.
Technical solution of the invention is as follows:
A kind of prism beam-expanded system, it is characterized in that: the beam-expanding system is by the identical right-angle prism structure of 2 or more structures At incident beam is incident from the inclined-plane of the right-angle prism, and referred to as incident inclined-plane, outgoing beam is perpendicular to same right-angle prism Right-angle surface, referred to as outgoing right-angle surface, the apex angle α of all right-angle prisms is identical and meets following equation:
In formula, n1, n2 are respectively refractive index of the laser in incident medium and right-angle prism.
The right-angle prism grouping, the inclined-plane of the right-angle prism of each grouping joins end to end aligned.
The incident inclined-plane of the right-angle prism and outgoing right-angle surface polishing, and another right-angle surface is unpolished.
The incident inclined-plane and outgoing right-angle surface of the right-angle prism are coated with the anti-reflection film of laser wavelength of incidence.
The right-angle prism is greater than 50% to the transmitance of laser.
The right-angle prism is substituted by the right-angled trapezium prism that right-angle prism is cut into.
Technical effect of the invention is as follows:
The prism beam-expanded system of the present invention.It is used primarily in the linewidth narrowing module of excimer laser or dye laser. The advantages of the invention patent is, the quantity by increasing right-angle prism can be such that laser reaches arbitrarily to expand multiple, without by The limitation of prism raw material size.In addition also have the advantages that consumptive material is few, at low cost.The right-angle prism of same size is conducive to batch Metaplasia produces, and can substantially reduce period and the cost of processing.
Detailed description of the invention
Fig. 1 is the schematic diagram of the prism beam-expanded system embodiment 1 of the present invention
Fig. 2 is prism beam-expanded 2 schematic diagram of system embodiment of the present invention
Fig. 3 is the prism beam-expanded system schematic of 3 right-angled trapezium of the embodiment of the present invention
In figure:
R1-incident beam；R2-outgoing beam；I1-right-angle prism inclined-plane；The right-angle surface of i2, i3-right-angle prism； P1-first is grouped；P2-second packet；P3-third grouping；P4-the 4th is grouped；E1-the first right-angled trapezium prism；E2— Second right-angled trapezium prism
Specific embodiment
The design method for illustrating right-angle prism used in the present invention first, mainly illustrates the determination method of prism vertex angle.It wants Beam orthogonal is emitted in the right-angle surface of prism, then the apex angle of the right-angle prism can be calculated by beam incident angle and be learnt.It please join Fig. 1 is read, Fig. 1 is the schematic diagram of the prism beam-expanded system embodiment 1 of the present invention.
According to anaclasis law:
N1 × sin θ 1=n2 × sin θ 2 (1)
Wherein, θ 1, θ 2 are respectively incidence angle and refraction angle, and n1, n2 are constant, respectively indicate the refraction of air and prism to laser Rate.
And the case where for vertical exit, refraction angle are identical as the apex angle α of prism.
θ 2=α (2)
So the apex angle of prism is calculated by following formula:
Single right-angle prism expands multiple are as follows:
The working principle of the prism beam-expanded system of the present invention will be illustrated next.
Fig. 1 is the schematic diagram of the prism beam-expanded system embodiment 1 of the present invention, is made of the right-angle prism of 4 same sizes.Institute There is the inclined-plane of prism to join end to end, is arranged in a straight line in X direction.The inclined-plane i1 of incident beam r1 from right-angle prism is incident, outgoing Light beam r2 is perpendicular to right-angle surface i2.The apex angle α of all right-angle prisms is identical, and incidence angle θ 1 is identical, and refraction angle θ 2 is identical.
Right-angle prism selects ultraviolet fused silica material (n2=1.56, n1=1.00) in example, when incidence angle θ 1 is 72 degree, It is 37.56 degree that apex angle α, which can be obtained, according to (3), (4) formula, can achieve 2.565 and expands multiple.The specification of right-angle prism is
A=50.00mm, B=39.64mm, C=30.48mm, H=30mm (5)
Wherein A, B, C are respectively the bevel edge and two right angle side lengths of right-angle prism, and H is right-angle prism thickness.
By can see in Fig. 1, this prism beam-expanded system may be implemented to expand light beam.
Illustrate the reason of scheme disclosed by the invention reduces cost relative to first technology below.
4 completely identical in structure right-angle prisms are used in this example.The volume of each right-angle prism is Vi, then prism expands Beam system needs the net volume of ultraviolet fused silica altogether are as follows:
In first technology (such as US5978409), it is identical with this example that one piece big of right-angle prism realization can be used Expand multiple.But the net volume of required ultraviolet fused silica are as follows:
The volume ratio of the two
That is, reach it is identical expand multiple under the premise of, the present invention disclosed in technical solution consume material Material only has the 1/4 of first technology.The material cost of beam expander is greatly saved.It is bigger for expanding multiple, technology in the present invention The cost advantage of scheme is more obvious.In addition, the right-angle prism for using different size in first technology, will necessarily be related to not Same clamp for machining.The small size right-angle prism of multiple same sizes is applied in combination in this example, and the week of processing can be significantly reduced Phase and cost.
Explanation realizes 43 times or more laser beam expandings using the prism beam-expanded system of the present invention below.The embodiment of the present invention 2 is such as schemed Shown in 2.
7 identical right-angle prisms have been used to realize laser beam expanding, the apex angle of all right-angle prisms, three side rulers in Fig. 2 Very little, height equal-specification is identical as the size in (5) formula.Wherein it is divided into 4 groupings.First grouping P1 includes a right-angled edge Mirror, second packet P2 include a right-angle prism, and it includes two right-angle prisms that third, which is grouped P3, and the 4th grouping P4 includes three straight Angle prism.
The incident angle of four groupings is all identical, is 72 degree.As previously mentioned, single right-angle prism realization expands multiple For Mi=2.565 times, then it is M=(M that four groupings were total, which expands multiple,i)4=(2.565)4=43.29 times.
If necessary to design the beam-expanding system of bigger multiple, it is only necessary to increase by the technical solution in the present invention straight in grouping The number of angle prism.The subsystem of beam-expanding system rear end is not only restricted to the size of prism material.Realize expanding for any multiple Multiple only need to add the diaphragm of set bore on the basis of technical solution of the present invention at incident beam or outgoing beam It realizes, details are not described herein.
It based on technical solution of the present invention and right-angle prism design method, is improved, can be designed that appearance is not limited to In the optical beam-expanding system of right-angle prism, should also be included within protection scope of the present invention.It is exemplified below.
The embodiment of the present invention 3 realizes optical beam-expanding using the identical right-angled trapezium prism of 4 structures in Fig. 3.Right angle ladder Shape prism cuts out apex angle along the direction outgoing beam r2 by right-angle prism illustrated in fig. 1 and is process.All right-angled trapezium mirrors Inclined-plane joins end to end, and arranges in the same direction.Its advantage is that can the adjacent surface of adjacent right-angled trapezium mirror, such as in Fig. 3 The top surface of the bottom surface of one right-angled trapezium mirror E1 and the second right-angled trapezium mirror E2 has beam-expanding system better with glue adhesion Stability.

Claims (5)

1. a kind of prism beam-expanded system, it is characterised in that: the beam-expanding system is identical by 2 or more apex angles, three side sizes, height Right-angle prism is constituted, and incident beam (r1) is incident from the inclined-plane (i 1) of the right-angle prism, referred to as incident inclined-plane, emergent light Beam (r2) perpendicular to same right-angle prism right-angle surface (i2), referred to as outgoing right-angle surface, the apex angle α of all right-angle prisms it is identical and Meet following equation:
In formula, n1, n2 are respectively refractive index of the laser in incident medium and right-angle prism；The right-angle prism grouping, often The inclined-plane of the right-angle prism of a grouping joins end to end aligned.
2. prism beam-expanded system according to claim 1, it is characterised in that the incident inclined-plane of the right-angle prism and go out Right-angle surface polishing is penetrated, and another right-angle surface is unpolished.
3. prism beam-expanded system according to claim 1, it is characterised in that the incident inclined-plane of the right-angle prism and outgoing Right-angle surface is coated with the anti-reflection film of laser wavelength of incidence.
4. prism beam-expanded system according to claim 1, it is characterised in that the right-angle prism is big to the transmitance of laser In 50%.
5. prism beam-expanded system according to any one of claims 1 to 4, it is characterised in that the right-angle prism is by right angle The right-angled trapezium prism substitution that prism is cut into.
CN201410806115.XA 2014-12-19 2014-12-19 Prism beam-expanded system Active CN104503090B (en)

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Application Number Priority Date Filing Date Title
CN201410806115.XA CN104503090B (en) 2014-12-19 2014-12-19 Prism beam-expanded system
US14/954,580 US9423621B2 (en) 2014-12-19 2015-11-30 Prism beam expansion system

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Application Number Priority Date Filing Date Title
CN201410806115.XA CN104503090B (en) 2014-12-19 2014-12-19 Prism beam-expanded system

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CN104503090B true CN104503090B (en) 2018-12-25

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Publication number Priority date Publication date Assignee Title
CN108873128B (en) * 2018-09-05 2024-02-23 四川新易盛通信技术有限公司 Prism, method for using prism as light beam adjuster, prism set and light assembly

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102981278A (en) * 2012-12-19 2013-03-20 中国科学院光电研究院 Laser line-width reduction and beam expanding method and system based on isosceles right angle triangular prism
CN103235446A (en) * 2013-04-18 2013-08-07 中国科学院苏州纳米技术与纳米仿生研究所 Backlight module for liquid crystal display

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6424666B1 (en) * 1999-06-23 2002-07-23 Lambda Physik Ag Line-narrowing module for high power laser

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102981278A (en) * 2012-12-19 2013-03-20 中国科学院光电研究院 Laser line-width reduction and beam expanding method and system based on isosceles right angle triangular prism
CN103235446A (en) * 2013-04-18 2013-08-07 中国科学院苏州纳米技术与纳米仿生研究所 Backlight module for liquid crystal display

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CN104503090A (en) 2015-04-08
US20160178914A1 (en) 2016-06-23

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