CN104483512B - Scanning tunneling microscope needle point corrosion instrument - Google Patents

Scanning tunneling microscope needle point corrosion instrument Download PDF

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Publication number
CN104483512B
CN104483512B CN201410836854.3A CN201410836854A CN104483512B CN 104483512 B CN104483512 B CN 104483512B CN 201410836854 A CN201410836854 A CN 201410836854A CN 104483512 B CN104483512 B CN 104483512B
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voltage
module
knob
fixed
current
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CN104483512A (en
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臧侃
侯宾宾
薛冬冬
游�燕
郭方准
董华军
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Dalian Jiaotong University
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Dalian Jiaotong University
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Abstract

The invention discloses a scanning tunneling microscope needle point corrosion instrument which comprises a mechanical component, a working circuit and a control power source. The control power source comprises a control circuit and a control panel. The control circuit comprises a voltage regulating and stabilizing module, a voltage measuring module, a current measuring module, a threshold value setting module, a sampling comparison module and a voltage output module. A sampling resistor R2 adopted by the voltage regulating and stabilizing module is located at a high-potential position, and an LM319 type comparator is adopted by the sampling comparison module. Due to the facts that a sampling resistor in a control circuit of an original needle point corrosion instrument is moved away from a whole load voltage collecting system according to the design control circuit of the scanning tunneling microscope needle point corrosion instrument, and the sampling resistor is changed to be located at the high-potential position, real-time current can be precisely measured, constant-voltage output at the two ends of a load resistor is guaranteed, current is gradually reduced along with increasing of load resistance, single-parameter changing is easy to control and analyze, stability in the corrosion process is improved, and the manufacturing successful rate of needle points is improved.

Description

A kind of needle tip of scanning tunnel microscope corrosion tester
Technical field
The present invention relates to a kind of needle tip of scanning tunnel microscope producing device, particularly a kind of needle tip of scanning tunnel microscope Corrosion tester.
Background technology
PSTM (stm) is a kind of very high study of surfaces instrument of resolution, and it makes people's first time in reality Spatially observe atom.In recent years, along with the development of Surface Science, it is widely used, and be increasingly becoming solidifying Poly- state and the research meanses of surface physics laboratory indispensability.As the part with research surface directly contact, needle point is each in stm Extremely important role is played in ingredient.To most stm experiment for, conventional tip point material be tungsten w or Platinoiridita pt-ir, the quality of needle point directly influences the resolution of stm.
Due to the demand to high-quality needle point for the scanning probe microscopy, a variety of methods are used for probe manufacturing.Wherein, Convenient and economical is needle point manufacturing technology that is theoretical based on electrochemical corrosion and developed.Electrochemical method corrodes needle point, AC and DC can be divided into corrode two kinds of different approach, the needle point profile that it obtains is similar to parabolic type and hyperbolic type.Phase Comparatively, the bubble that DC corrosion process produces only occurs in negative electrode, typically will not cause anode liquid level fluctuation thus more Added with profit, it is often used in the making of tungsten (w) needle point.In DC corrosion, a kind of the most frequently used technology is exactly that direct current breaks the method that falls.Should In method, among needle point immersion solution, it is formed about thinner cervical region final fracture in liquid level, the top half of tungsten filament is formed Required needle point.The major defect of this method is, if can not timely cut off circuit and will continue to react and lead to needle point Rust is it is therefore desirable to design a kind of Circuits System automatically powering off to meet its requirement.Electricity designed by traditional needle point corrosion tester The corrosion potentials of road system, load resistance and corrosion current are intended to change, the uncertainty of multiple response parameters and continue Change can increase the difficulty of experiment control, leads to the unstability of experimental result, reduces the success rate that needle point makes.
Content of the invention
For solving the problems referred to above that prior art exists, the present invention will design one kind and voltage in corrosion process can be overcome to become Change, improve the needle tip of scanning tunnel microscope corrosion tester that needle point is fabricated to power.
To achieve these goals, technical scheme is as follows: a kind of needle tip of scanning tunnel microscope corrosion tester, bag Include mechanical component, operating circuit and control power supply.
Described mechanical component includes base, support, Shang Gai, top cover knob, copper sheathing a, threaded rod, pointer, lifting fixation Block, anode electrode bar, fixed knob, electrode fixing end, three-jaw fixture a, knob, three-jaw fixture b, negative electricity pole bar, disk, electricity Polar ring, beaker and copper sheathing b.
Described base is fixed using mode connects for screw with support, disk respectively, plays overall supporting role;Described upper lid with Support is fixed using mode connects for screw;Described threaded rod two ends are coordinated with copper sheathing a and copper sheathing b gap respectively, and copper sheathing a and copper sheathing b divides It is not fixed on lid and bottom seat;Described top cover knob is marked with scale, is fastenedly connected with threaded rod using screw;Described pointer It is fixed by screws in and covers, the scale on its cooperation top cover knob determines the anglec of rotation of top cover knob.Described electrode is solid Fixed end is fixed by screws on lifting fixed block, coordinates for screw thread, anode electrode bar between fixed knob and electrode fixing end It is fixed in electrode fixing end by fixed knob;Described three-jaw fixture a and three-jaw fixture b is fixed by screws in anode respectively On electrode stem, three-jaw fixture a and three-jaw fixture b is by tungsten filament vertical clamping;Described negative electricity pole bar is fixed on base using screw On, knob is coordinated with negative electricity pole bar screw thread, and electrode retaining collar is fixedly clamped in negative electricity pole bar rotary knob;Described disk is adopted Be screwed on base, the beaker filling etchant solution is placed among the circular hole of disk, electrode retaining collar submerge beaker contained molten Below liquid liquid level.
Described operating circuit includes anode electrode bar, electrode fixing end, three-jaw fixture a, knob, three-jaw fixture b, negative pole Electrode stem, disk, electrode retaining collar and beaker.Electrode fixing end connects positive source by electric wire, and electric current is by with electrode fixing end even The anode electrode bar connecing is transmitted to the tungsten filament clamped by three-jaw fixture a and three-jaw fixture b;Described negative electricity pole bar connects power supply and bears Pole, and be connected by screw with electrode retaining collar;Tungsten filament clamped by three-jaw fixture a and three-jaw fixture b and electrode retaining collar are co-located on burning In the etchant solution contained of cup but be not directly contacted with, during energising, tungsten filament occurs cell reaction so that circuit is constituted back in etchant solution Road.
Described control power supply includes control circuit and control panel.Described control circuit includes voltage-regulation voltage-stabilization module, electricity Pressure measurement module, current measurement module, threshold value setting module, sampling comparison module, differential comparison module and voltage output module, Described voltage-regulation voltage-stabilization module is connected with voltage measurement module and current measurement module respectively, described voltage measurement module also with Voltage output module connects;Described voltage output module pass through to switch k1b respectively with sampling comparison module and differential comparison mould Block connects;Described sampling comparison module is connected with current measurement module after threshold value setting module, switch k1c, described difference The other end dividing comparison module is connected with current measurement module after switch k1c.Described voltage-regulation voltage-stabilization module sampling used electricity Resistance r2 is located at high potential, and described sampling comparison module adopts lm319 type comparator.
Described voltage-regulation voltage-stabilization module exports 0~10v DC voltage by rheostat rt1, and output voltage passes through p1 interface Connect load, i.e. the both positive and negative polarity of needle point corrosion tester.
Described voltage measurement module collection load voltage, the processing module being then internally integrated by p2 interface external power supply Actual load voltage is shown on control panel.
Described current measurement module gathers the voltage at sampling resistor r2 two ends, then by collection inside p3 interface external power supply The processing module becoming obtains being corrosion current by the electric current of sampling resistor r2 and being shown on control panel.
Described control panel is one piece and is located at the touch screen controlling outer casing of power supply front centre position, and control panel sets It is equipped with voltage and set voltage, current monitoring current, failure of current threshold value setting threshold, difference setting Differential, tip height adjust monitoring tipadj, mode of operation and switch display box.
The top cover knob of the present invention is marked with scale, is fastenedly connected with threaded rod using screw, rotating cap rotation during work Button can make connected threaded rod rotation together, so that the lifting fixed block lifting with the cooperation of threaded rod screw thread;Rotation Top cover knob makes threaded rod rotate, so that moving up and down with the lifting fixed block of threaded rod screw thread cooperation, such that it is able to adjust Tungsten filament immerses the length of the contained solution of beaker.Tipadj display box on touch operation panel before adjustment tungsten filament length, works as tungsten filament Just during contact liquid level tipadj power source internal buzzer buzzing prompting, observe scale on lid knob afterwards again to adjust tungsten filament The length of immersed in liquid level;After adjusting tungsten filament length, touch voltage sets voltage and failure of current threshold value sets Threshold display box come to set corrosion potentials and cut-out electric current;In corrosion process, current monitoring current display box is permissible Show the size variation of corrosion current in real time.
During present invention work, the operation principle of each module is as follows:
Voltage-regulation voltage-stabilization module exports 0~10v DC voltage by rheostat rt1, and this magnitude of voltage is default load voltage, this Invention predeterminated voltage when using is typically set to 4~10v, and output voltage connects load by p1 interface, and that is, needle point corrosion tester is being just Negative pole.Rheostat rt1 can be controlled to adjust default load voltage by voltage option on touch screen.
Voltage measurement module gathers load voltage, and the processing module being then internally integrated by p2 interface external power supply is by reality Load voltage then appear as the value of touch screen voltage (touch screen voltage option adjust default load before having reaction concurrently Voltage and the function of course of reaction display actual load voltage), because the position that this circuit changes sampling resistor r2 makes reality Load voltage in the course of reaction of border is sufficiently stable, is substantially equal to predeterminated voltage it is possible to see during the course of the reaction The value of voltage is only in some fluctuations up and down instantaneously having within 0.02v.
Current measurement module gathers the voltage at sampling resistor r2 two ends, by be then internally integrated by p3 interface external power supply It is corrosion current the value being shown as touch screen current that processing module obtains by the electric current of r2, it is achieved thereby that corrosion electricity The real-time display of stream.
Threshold value setting module and sampling comparison module: when corrosion tester mode of operation is adjusted to by thr. mould by Touch Screen During formula, in circuit, threshold value setting module and sampling comparison module are linked in circuit, by adjusting threshold choosing on touch screen The value of item to change the size of default cut-out electric current to control threshold value setting module rheostat rt2;Sampling comparison module collection is logical The electric current of over-sampling resistance r2 is the size of actual corrosion current and then is compared with default cut-out electric current by comparator ic2b Relatively, if actual corrosion current is less than default cut-out electric current, the triode q1 of p1 seam series connection closes, and will load from circuit Cut-out, that is, needle point corrosion tester quits work.
Differential comparison module: when corrosion tester mode of operation is adjusted to by diff. pattern by touch screen, sample in circuit Comparison module and threshold value setting module cut off from circuit, and difference block accesses in circuit.By adjusting on touch screen The value of differential to change the big of electric capacity c5 right-hand member preset voltage value to control rheostat rt3 in differential comparison module Little, thus changing the sensitivity of differential comparison module;It is that tungsten filament breaks the moment that falls when the moment that needle point corrosion terminates, corrosion current meeting There is a larger saltus step of ratio, and differential comparison module can judge the size of corrosion current saltus step, when the size of saltus step is more than one When definite value, then the triode q1 of p1 seam series connection closes, and will load cut-out from circuit, and that is, needle point corrosion tester stops work Make.
After setting corrosion parameter, touch " on " on touch screen, corrosion tester is started working, and " on " is changed into " off ", touch-control can be by corrosion tester work stopping again.
Compared with prior art, the present invention has a following improvement effect:
1st, due to control circuit designed by the present invention by the sampling resistor in conventional needle point corrosion tester control circuit from whole Remove in load voltage acquisition system, change at the high potential as shown in r2 in Fig. 2, can be with accurate measurement by such mode Real-time current, the constant voltage output at proof load resistance two ends simultaneously.Designed control circuit gives electricity with modular method The concrete function of road system components and the program of work.Actual corrosion potentials are constant, electric current with load resistance increase and It is gradually reduced, the change of such Radix Salviae Miltiorrhizae amount is easily controlled and analyzes, and enhances the stability of corrosion process, thus improve The success rate that needle point makes.
2nd, the design of contact panel of the present invention, shows that corrosion potentials, circuital current, cut-off current, tip height are adjusted in real time The parameters such as section, easy to operate.
3rd, the control circuit of the present invention adopts lm319 type comparator, is swift in response, can judge within 200ns, Improve the speed of circuit judges and action.
Brief description
The present invention has 3, accompanying drawing, wherein:
Fig. 1 is the mechanical part general assembly drawing of the present invention.
Fig. 2 is the control circuit schematic diagram of the present invention.
Fig. 3 is the guidance panel schematic diagram of the present invention.
In figure: 1, base;2nd, support;3rd, Shang Gai;4th, top cover knob;5th, copper sheathing;6th, threaded rod;7th, pointer;8th, lift admittedly Determine block;9th, anode electrode bar;10th, fixed knob;11st, electrode fixing end;12nd, three-jaw fixture a;13rd, knob;14th, three-jaw fixture b;15th, negative electricity pole bar;16th, disk;17th, electrode retaining collar;18th, beaker;19th, copper sheathing b.
Specific embodiment
Purpose, technical scheme and advantage for making embodiments of the invention are clearer, with reference to the embodiment of the present invention In accompanying drawing, clearly complete description is carried out to the technical scheme in the embodiment of the present invention.
As Figure 1-3, a kind of needle tip of scanning tunnel microscope corrosion tester, including mechanical component, operating circuit and control Power supply.
Described mechanical component includes base 1, support 2, upper lid 3, top cover knob 4, copper sheathing a5, threaded rod 6, pointer 7, rises Fall fixed block 8, anode electrode bar 9, fixed knob 10, electrode fixing end 11, three-jaw fixture a12, knob 13, three-jaw fixture b14, Negative electricity pole bar 15, disk 16, electrode retaining collar 17, beaker 18 and copper sheathing b19.
Described base 1 is fixed using mode connects for screw with support 2, disk 16 respectively, plays overall supporting role;On described Lid 3 is fixed using mode connects for screw with support 2;Described threaded rod 6 two ends are coordinated with copper sheathing a5 and copper sheathing b19 gap respectively, copper sheathing A5 and copper sheathing b19 is separately fixed on lid 3 and base 1;Described top cover knob 4 is marked with scale, using screw and threaded rod 6 It is fastenedly connected;Described pointer 7 is fixed by screws on lid 3, and the scale on its cooperation top cover knob 4 determines top cover knob 4 The anglec of rotation.Described electrode fixing end 11 is fixed by screws on lifting fixed block 8, fixed knob 10 and electrode fixing end Coordinate for screw thread between 11, anode electrode bar 9 is fixed in electrode fixing end 11 by fixed knob 10;Described three-jaw fixture A12 and three-jaw fixture b14 is fixed by screws on anode electrode bar 9 respectively, and three-jaw fixture a12 and three-jaw fixture b14 is by tungsten Silk vertical clamping;Described negative electricity pole bar 15 is fixed on base 1 using screw, and knob 13 is joined with negative electricity pole bar 15 screw thread Close, electrode retaining collar 17 is fixedly clamped in negative electricity pole bar 15 rotary knob 13;Described disk 16 is fixed on base 1 using screw On, the beaker 18 filling etchant solution is placed among the circular hole of disk 16, electrode retaining collar 17 submerge the contained liquid level of solution of beaker 18 with Under.
Described operating circuit includes anode electrode bar 9, electrode fixing end 11, three-jaw fixture a12, knob 13, three-jaw card Tool b14, negative electricity pole bar 15, disk 16, electrode retaining collar 17 and beaker 18.Electrode fixing end 11 connects positive source by electric wire, electricity Stream is transmitted to the tungsten clamped by three-jaw fixture a12 and three-jaw fixture b14 by the anode electrode bar 9 being connected with electrode fixing end 11 Silk;Described negative electricity pole bar 15 connects power cathode, and is connected by screw with electrode retaining collar 17;Three-jaw fixture a12 and three-jaw fixture Tungsten filament clamped by b14 is co-located in the etchant solution that beaker 18 is contained with electrode retaining collar 17 but is not directly contacted with, tungsten during energising Silk occurs cell reaction to make circuit constitute loop in etchant solution.
Described control power supply includes control circuit and control panel.Described control circuit includes voltage-regulation voltage-stabilization module, electricity Pressure measurement module, current measurement module, threshold value setting module, sampling comparison module, differential comparison module and voltage output module, Described voltage-regulation voltage-stabilization module is connected with voltage measurement module and current measurement module respectively, described voltage measurement module also with Voltage output module connects;Described voltage output module pass through to switch k1b respectively with sampling comparison module and differential comparison mould Block connects;Described sampling comparison module is connected with current measurement module after threshold value setting module, switch k1c, described difference The other end dividing comparison module is connected with current measurement module after switch k1c.Described voltage-regulation voltage-stabilization module sampling used electricity Resistance r2 is located at high potential, and described sampling comparison module adopts lm319 type comparator.
Described voltage-regulation voltage-stabilization module exports 0~10v DC voltage by rheostat rt1, and output voltage passes through p1 interface Connect load, i.e. the both positive and negative polarity of needle point corrosion tester.
Described voltage measurement module collection load voltage, the processing module being then internally integrated by p2 interface external power supply Actual load voltage is shown on control panel.
Described current measurement module gathers the voltage at sampling resistor r2 two ends, then by collection inside p3 interface external power supply The processing module becoming obtains being corrosion current by the electric current of sampling resistor r2 and being shown on control panel.
Described control panel is one piece and is located at the touch screen controlling outer casing of power supply front centre position, and control panel sets It is equipped with voltage and set voltage, current monitoring current, failure of current threshold value setting threshold, difference setting Differential, tip height adjust monitoring tipadj, mode of operation and switch display box.
The tungsten filament of the present invention immerses and following cell reaction occurs after switching on power among etchant solution:
Anode: w+8oh-→wo4 2-+4h2o+6e-
Negative electrode: 6h2o+6e-→3h2+6oh-
Overall reaction: w+2oh-+2h2o→wo4 2-+3h2
Tungsten filament is formed about thinner cervical region final fracture due to occurring cell reaction to be consumed in liquid level, tungsten filament upper Half part forms required needle point.

Claims (1)

1. a kind of needle tip of scanning tunnel microscope corrosion tester it is characterised in that: include mechanical component, operating circuit and control electricity Source;
Described mechanical component include base (1), support (2), upper lid (3), top cover knob (4), copper sheathing a (5), threaded rod (6), Pointer (7), lifting fixed block (8), anode electrode bar (9), fixed knob (10), electrode fixing end (11), three-jaw fixture a (12), knob (13), three-jaw fixture b (14), negative electricity pole bar (15), disk (16), electrode retaining collar (17), beaker (18) and copper sheathing b(19);
Described base (1) is fixed using mode connects for screw with support (2), disk (16) respectively, plays overall supporting role;Described Upper lid (3) and support (2) are fixed using mode connects for screw;Described threaded rod (6) two ends are respectively and between copper sheathing a (5) and copper sheathing b (19) Gap coordinates, and copper sheathing a (5) and copper sheathing b (19) is separately fixed on lid (3) and base (1);Described top cover knob (4) is marked with Scale, is fastenedly connected with threaded rod (6) using screw;Described pointer (7) is fixed by screws on lid (3), its cooperation top Scale on lid knob (4) determines the anglec of rotation of top cover knob (4);Described electrode fixing end (11) is fixed by screws in liter In fall fixed block (8), coordinate for screw thread between fixed knob (10) and electrode fixing end (11), anode electrode bar (9) passes through solid Determine knob (10) to be fixed in electrode fixing end (11);Described three-jaw fixture a (12) and three-jaw fixture b (14) pass through screw respectively It is fixed on anode electrode bar (9), three-jaw fixture a (12) and three-jaw fixture b (14) are by tungsten filament vertical clamping;Described negative electrode Bar (15) is fixed on base (1) using screw, and knob (13) is coordinated with negative electricity pole bar (15) screw thread, and rotary knob (13) will Electrode retaining collar (17) is fixedly clamped in negative electricity pole bar (15);Described disk (16) is fixed on base (1) using screw, fills The beaker (18) of etchant solution is placed among the circular hole of disk (16), electrode retaining collar (17) submerge the contained liquid level of solution of beaker (18) with Under;
Described operating circuit include anode electrode bar (9), electrode fixing end (11), three-jaw fixture a (12), knob (13), three Pawl fixture b (14), negative electricity pole bar (15), disk (16), electrode retaining collar (17) and beaker (18);Electrode fixing end (11) passes through electricity Line connects positive source, electric current by the anode electrode bar (9) being connected with electrode fixing end (11) be transmitted to three-jaw fixture a (12) and Tungsten filament clamped by three-jaw fixture b (14);Described negative electricity pole bar (15) connects power cathode, and passes through screw with electrode retaining collar (17) Connect;Tungsten filament clamped by three-jaw fixture a (12) and three-jaw fixture b (14) and electrode retaining collar (17) are co-located on beaker (18) and are contained Etchant solution in but be not directly contacted with, during energising tungsten filament occur in etchant solution cell reaction make circuit constitute loop;
Described control power supply includes control circuit and control panel.Described control circuit includes voltage-regulation voltage-stabilization module, voltage is surveyed Amount module, current measurement module, threshold value setting module, sampling comparison module, differential comparison module and voltage output module, described Voltage-regulation voltage-stabilization module be connected with voltage measurement module and current measurement module respectively, described voltage measurement module also with voltage Output module connects;Described voltage output module is passed through switch k1b and is connected with sampling comparison module and differential comparison module respectively Connect;Described sampling comparison module is connected with current measurement module after threshold value setting module, switch k1c, described differential ratio It is connected with current measurement module after switch k1c compared with the other end of module;Described sampling resistor r2 used by voltage-regulation voltage-stabilization module At high potential, described sampling comparison module adopts lm319 type comparator;
Described voltage-regulation voltage-stabilization module exports 0~10v DC voltage by rheostat rt1, and output voltage is connect negative by p1 interface Carry, i.e. the both positive and negative polarity of needle point corrosion tester;
Described voltage measurement module collection load voltage, the processing module being then internally integrated by p2 interface external power supply will be real The load voltage on border is shown on control panel;
Described current measurement module gathers the voltage at sampling resistor r2 two ends, is then internally integrated by p3 interface external power supply Processing module obtains to be corrosion current by the electric current of sampling resistor r2 and is shown on control panel;
Described control panel is one piece and is located at the touch screen controlling outer casing of power supply front centre position, and control panel is provided with Voltage sets voltage, current monitoring current, failure of current threshold value sets threshold, difference sets Differential, tip height adjust monitoring tipadj, mode of operation and switch display box.
CN201410836854.3A 2014-12-29 2014-12-29 Scanning tunneling microscope needle point corrosion instrument Expired - Fee Related CN104483512B (en)

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CN106093473A (en) * 2016-07-27 2016-11-09 大连交通大学 A kind of Pt Ir needle point corrosion device and method of work thereof
CN106757297A (en) * 2017-02-17 2017-05-31 科斗(苏州)脑机科技有限公司 A kind of Novel electric polar filament electrolytic cell
CN109490580A (en) * 2018-11-09 2019-03-19 昆明理工大学 A kind of annealing device of needle tip of scanning tunnel microscope

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