CN109490580A - A kind of annealing device of needle tip of scanning tunnel microscope - Google Patents
A kind of annealing device of needle tip of scanning tunnel microscope Download PDFInfo
- Publication number
- CN109490580A CN109490580A CN201811332520.7A CN201811332520A CN109490580A CN 109490580 A CN109490580 A CN 109490580A CN 201811332520 A CN201811332520 A CN 201811332520A CN 109490580 A CN109490580 A CN 109490580A
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- China
- Prior art keywords
- needle point
- filament
- annealing device
- metallic shield
- screw rod
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000000137 annealing Methods 0.000 title claims abstract description 30
- 229910052751 metal Inorganic materials 0.000 claims abstract description 45
- 239000002184 metal Substances 0.000 claims abstract description 45
- 239000000919 ceramic Substances 0.000 claims abstract description 30
- 238000009413 insulation Methods 0.000 claims abstract description 29
- 230000007704 transition Effects 0.000 claims description 4
- 230000005641 tunneling Effects 0.000 abstract description 5
- 208000002925 dental caries Diseases 0.000 abstract description 2
- 239000000463 material Substances 0.000 abstract description 2
- 125000003003 spiro group Chemical group 0.000 abstract description 2
- 238000003466 welding Methods 0.000 abstract description 2
- 238000010438 heat treatment Methods 0.000 description 8
- 238000000034 method Methods 0.000 description 4
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 4
- 229910052721 tungsten Inorganic materials 0.000 description 4
- 239000010937 tungsten Substances 0.000 description 4
- 238000010586 diagram Methods 0.000 description 2
- 230000005684 electric field Effects 0.000 description 2
- 238000010894 electron beam technology Methods 0.000 description 2
- 239000012535 impurity Substances 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 238000001000 micrograph Methods 0.000 description 1
- QGLKJKCYBOYXKC-UHFFFAOYSA-N nonaoxidotritungsten Chemical compound O=[W]1(=O)O[W](=O)(=O)O[W](=O)(=O)O1 QGLKJKCYBOYXKC-UHFFFAOYSA-N 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 230000001052 transient effect Effects 0.000 description 1
- 229910001930 tungsten oxide Inorganic materials 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
- G01Q60/00—Particular types of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
- G01Q60/24—AFM [Atomic Force Microscopy] or apparatus therefor, e.g. AFM probes
- G01Q60/38—Probes, their manufacture, or their related instrumentation, e.g. holders
Landscapes
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
- Radiology & Medical Imaging (AREA)
- Electron Sources, Ion Sources (AREA)
Abstract
The present invention relates to a kind of annealing devices of needle tip of scanning tunnel microscope, belong to ultrahigh vacuum technical field of electronic devices.The annealing device of the needle tip of scanning tunnel microscope, annealing device include power lead, thick screw rod, middle screw rod, micro screw, metal stator, ceramic insulation piece, metal connecting sheet, metallic shield and filament.Needle point can be effectively treated in the present apparatus, shield the influence of needle point support metal frame；The present apparatus can be used in a variety of scanning tunneling microscope cavitys, change thick spiro rod length according to demand；The material of accessory can be replaced according to working environment in the present apparatus, can be used in a variety of environment, including ultra-high vacuum environment；Present apparatus structural principle is simple, and device welding is replaceable, is easy to repair；Cost is relatively low for the present apparatus.
Description
Technical field
The present invention relates to a kind of annealing devices of needle tip of scanning tunnel microscope, belong to ultrahigh vacuum electronics technologies
Field.
Background technique
In the experiment of scanning tunneling microscope, the state of needle point determines the resolution ratio of scanning tunneling microscope image.
Needle point adsorbs the oxide layer of various molecules and needle surface or impurity can all seriously affect the state of needle point.Therefore, it is necessary to
Situ heat treatment in vacuum is carried out to needle tip of scanning tunnel microscope.By taking tungsten tip as an example, when tungsten tip is heated to 1000 DEG C,
The dystectic tungsten oxide layer in its surface and remaining impurity can be removed.In addition, since the fusing point of tungsten is up to 3300 DEG C, this
Kind heat treatment mode will not damage tungsten tip itself.
There are many kinds of modes for heat treatment, but due to the needle point very little of scanning tunneling microscope, and handle tip temperature and reach
To 1000 DEG C.Therefore conventional heat transfer, the methods of heat radiation are not particularly suited for the heat treatment of needle tip of scanning tunnel microscope.Most
The mode for being suitble to processing metal needle point is that beam bombardment heats, and in this heating method, has in filament and is isolated in negative high voltage
Operating current, the distance between filament and needle tip of scanning tunnel microscope need to control in millimeter magnitude.Specific working mode are as follows:
Since, there are negative high voltage, the electronics escaped from filament obtains energy by electric field in filament and needle point between filament and needle point
After amount accelerates, bombardment is focused on needle point, makes the transient heating of needle point part to 1000 DEG C, realize needle point heat treatment.But at present
The equipment that the country is not based on beam bombardment heat treatment needle tip of scanning tunnel microscope.
Summary of the invention
For the above-mentioned problems of the prior art and deficiency, the present invention provides a kind of heat of needle tip of scanning tunnel microscope
Processing unit.The invention is realized by the following technical scheme.
A kind of annealing device of needle tip of scanning tunnel microscope, annealing device 16 include power lead 1, thick screw rod 2,
Middle screw rod 3, micro screw 4, metal stator 5, ceramic insulation piece 6, metal connecting sheet 7, metallic shield 8 and filament 9, ceramics are absolutely
Embolium 6 is spaced specific range with metal stator 5 by middle screw rod 3 and is vertically connected with, and 5 top center position of metal stator is equipped with
Thick screw rod 2 across 5 top of metal stator, 9 main body of filament are located at 6 upper end of ceramic insulation piece, and the glower end of 9 two sides of filament is logical
It crosses micro screw 4 and is mounted on 6 bottom surface of ceramic insulation piece, metallic shield 8 is equipped with outside filament 9,8 bottom of metallic shield is equipped with three
A connector, three connectors are mounted on 6 bottom surface of ceramic insulation piece by micro screw 4, and one of connector is connected by metal connecting sheet 7
Connecing the filament 9 being mounted on 6 bottom surface of ceramic insulation piece, wherein side glower end (makes the side filament of metallic shield 8 Yu filament 9
Hold potential identical), the glower end of 9 two sides of filament is respectively connect with 1 one end of power lead, every 1 other end of power lead point
It is not connect with 15 positive and negative anodes of high voltage power supply；When work, the position of needle point 11 is located at 8 top surface middle position of metallic shield and gold
Belong to 8 top of shielding case to extend into needle point support metal frame 10.
The metallic shield 8 divides for three parts, and top section is minor diameter hollow circuit cylinder, and middle section is hollow taper
Transition zone, bottom part are diameter hollow cylinder, and diameter hollow cylinder is located on 6 surface of ceramic insulation piece and wraps up filament
9, the position of needle point 11 is located at minor diameter hollow circuit cylinder top surface middle position.
When work, two power leads 1 in annealing device 16 pass sequentially through one end, electrode flange in threeway flange 13
14 connect with 15 positive and negative anodes of high voltage power supply respectively, and thick screw rod 2 passes through threeway flange 13 and straight line propeller in annealing device 16
12 connections.
Needle point 11 is located at 10 bottom of needle point support metal frame, and when work, straight line propeller 12 successively pushes thick screw rod 2, Re Chu
Reason device 16 travels forward, and needle point 11 is located at 8 top surface middle position of metallic shield and 8 top of metallic shield extend into needle
In point support metal frame 10.
The working principle of the annealing device of the needle tip of scanning tunnel microscope are as follows:
8 minor diameter hollow circuit cylinder center of metallic shield is first directed at needle point 11, it is then by straight line propeller 12 that device is past
Needle point 11 is mobile, until 8 minor diameter hollow circuit cylinder front end of metallic shield is protruded into needle point support metal frame 10, makes metallic shield
Electric field between 8 shielding filaments 9 and needle point support metal frame 10.Filament 9 is connected later and connects high voltage power supply 15, so that in filament 9
Have and be isolated in the electric current that negative high voltage works, after current turns ON, observes electron beam current, and stablize electron beam current in suitable work
High voltage power supply 15 is closed in work value, the processing of needle point 11 after completing, afterwards by 12 control device of straight line propeller to far from needle point 11
Direction is mobile.Finally needle point 11 is withdrawn, entire processing step is completed.
The beneficial effects of the present invention are:
(1) needle point can be effectively treated in the present apparatus, shield the influence of needle point support metal frame；
(2) present apparatus can be used in a variety of scanning tunneling microscope cavitys, change thick spiro rod length according to demand；
(3) material of accessory can be replaced according to working environment in the present apparatus, can be used in a variety of environment, including ultrahigh vacuum
Environment；
(4) present apparatus structural principle is simple, and device welding is replaceable, is easy to repair；
(5) cost is relatively low for the present apparatus.
Detailed description of the invention
Fig. 1 is the annealing device structural schematic diagram of needle tip of scanning tunnel microscope of the present invention；
Fig. 2 is the annealing device metallic shield internal filaments Local map of needle tip of scanning tunnel microscope of the present invention；
Fig. 3 is the annealing device needle point annealing device diagrammatic cross-section of needle tip of scanning tunnel microscope of the present invention；
Fig. 4 is needle point and metallic shield of the present invention front end Local map；
Fig. 5 is the annealing device assembly method schematic diagram of needle tip of scanning tunnel microscope.
In figure: 1- power lead, the thick screw rod of 2-, screw rod in 3-, 4- micro screw, 5- metal stator, 6- ceramic insulation piece,
7- metal connecting sheet, 8- metallic shield, 9- filament, 10- needle point support metal frame, 11- needle point, 12- straight line propeller, 13- tri-
Logical flange, 14- electrode flange, 15- high voltage power supply, 16- annealing device.
Specific embodiment
With reference to the accompanying drawings and detailed description, the invention will be further described.
Embodiment 1
As shown in Figures 1 to 4, the annealing device of the needle tip of scanning tunnel microscope, annealing device 16 include power lead 1,
Thick screw rod 2, middle screw rod 3, micro screw 4, metal stator 5, ceramic insulation piece 6, metal connecting sheet 7, metallic shield 8 and filament
9, ceramic insulation piece 6 is spaced specific range with metal stator 5 by middle screw rod 3 and is vertically connected with, 5 top center of metal stator
Position is equipped with the thick screw rod 2 across 5 top of metal stator, and 9 main body of filament is located at 6 upper end of ceramic insulation piece, 9 two sides of filament
Glower end is mounted on 6 bottom surface of ceramic insulation piece by micro screw 4, is equipped with metallic shield 8,8 bottom of metallic shield outside filament 9
Portion is set there are three connector, and three connectors are mounted on 6 bottom surface of ceramic insulation piece by micro screw 4, and one of connector passes through metal
Wherein side glower end (makes metallic shield 8 and filament 9 to the filament 9 that the connection of connection sheet 7 is mounted on 6 bottom surface of ceramic insulation piece
Side glower end potential it is identical), the glower end of 9 two sides of filament is respectively connect with 1 one end of power lead, every power lead
1 other end is connect with 15 positive and negative anodes of high voltage power supply respectively；When work, the position of needle point 11 is located in 8 top surface of metallic shield
Between position and 8 top of metallic shield extend into needle point support metal frame 10.
Wherein metallic shield 8 divides for three parts, and top section is minor diameter hollow circuit cylinder, and middle section is hollow taper
Transition zone, bottom part are diameter hollow cylinder, and diameter hollow cylinder is located on 6 surface of ceramic insulation piece and wraps up filament
9, the position of needle point 11 is located at minor diameter hollow circuit cylinder top surface middle position.
Embodiment 2
As shown in Fig. 1 to 5, the annealing device of the needle tip of scanning tunnel microscope, annealing device 16 include power lead 1,
Thick screw rod 2, middle screw rod 3, micro screw 4, metal stator 5, ceramic insulation piece 6, metal connecting sheet 7, metallic shield 8 and filament
9, ceramic insulation piece 6 is spaced specific range with metal stator 5 by middle screw rod 3 and is vertically connected with, 5 top center of metal stator
Position is equipped with the thick screw rod 2 across 5 top of metal stator, and 9 main body of filament is located at 6 upper end of ceramic insulation piece, 9 two sides of filament
Glower end is mounted on 6 bottom surface of ceramic insulation piece by micro screw 4, is equipped with metallic shield 8,8 bottom of metallic shield outside filament 9
Portion is set there are three connector, and three connectors are mounted on 6 bottom surface of ceramic insulation piece by micro screw 4, and one of connector passes through metal
Wherein side glower end (makes metallic shield 8 and filament 9 to the filament 9 that the connection of connection sheet 7 is mounted on 6 bottom surface of ceramic insulation piece
Side glower end potential it is identical), the glower end of 9 two sides of filament is respectively connect with 1 one end of power lead, every power lead
1 other end is connect with 15 positive and negative anodes of high voltage power supply respectively；When work, the position of needle point 11 is located in 8 top surface of metallic shield
Between position and 8 top of metallic shield extend into needle point support metal frame 10.
Wherein metallic shield 8 divides for three parts, and top section is minor diameter hollow circuit cylinder, and middle section is hollow taper
Transition zone, bottom part are diameter hollow cylinder, and diameter hollow cylinder is located on 6 surface of ceramic insulation piece and wraps up filament
9, the position of needle point 11 is located at minor diameter hollow circuit cylinder top surface middle position；Two power supplys when work, in annealing device 16
Conducting wire 1 passes sequentially through one end in threeway flange 13, electrode flange 14 and connect respectively with 15 positive and negative anodes of high voltage power supply, annealing device
Thick screw rod 2 is connect by threeway flange 13 with straight line propeller 12 in 16.
Needle point 11 is located at 10 bottom of needle point support metal frame, and when work, straight line propeller 12 successively pushes thick screw rod 2, Re Chu
Reason device 16 travels forward, and needle point 11 is located at 8 top surface middle position of metallic shield and 8 top of metallic shield extend into needle
In point support metal frame 10.
In conjunction with attached drawing, the embodiment of the present invention is explained in detail above, but the present invention is not limited to above-mentioned
Embodiment within the knowledge of a person skilled in the art can also be before not departing from present inventive concept
Put that various changes can be made.
Claims (4)
1. a kind of annealing device of needle tip of scanning tunnel microscope, it is characterised in that: annealing device (16) includes that power supply is led
Line (1), thick screw rod (2), middle screw rod (3), micro screw (4), metal stator (5), ceramic insulation piece (6), metal connecting sheet
(7), metallic shield (8) and filament (9), ceramic insulation piece (6) are spaced by middle screw rod (3) with metal stator (5) specific
Distance is vertically connected with, and metal stator (5) top center position is equipped with the thick screw rod (2) at the top of metal stator (5), lamp
Silk (9) main body is located at ceramic insulation piece (6) upper end, and the glower end of filament (9) two sides is mounted on ceramic insulation by micro screw (4)
Piece (6) bottom surface is equipped with metallic shield (8) outside filament (9), and metallic shield (8) bottom sets that there are three connector, three connectors
It is mounted on ceramic insulation piece (6) bottom surface by micro screw (4), one of connector is mounted on by metal connecting sheet (7) connection
Filament (9) on ceramic insulation piece (6) bottom surface wherein respectively lead with a power supply by side glower end, the glower end of filament (9) two sides
The connection of line (1) one end, every power lead (1) other end are connect with high voltage power supply (15) positive and negative anodes respectively；When work, by needle point
(11) position is located at metallic shield (8) top surface middle position and metallic shield (8) top and extend into needle point support metal frame
(10) in.
2. the annealing device of needle tip of scanning tunnel microscope according to claim 1, it is characterised in that: the metal screen
It covers cover (8) and is divided into three parts, top section is minor diameter hollow circuit cylinder, and middle section is hollow taper transition zone, bottom part
For diameter hollow cylinder, diameter hollow cylinder is located on ceramic insulation piece (6) surface and wraps up filament (9), needle point (11)
Position be located at minor diameter hollow circuit cylinder top surface middle position.
3. the annealing device of needle tip of scanning tunnel microscope according to claim 1, it is characterised in that: when work, heat
Two power leads (1) in processing unit (16) pass sequentially through one end in threeway flange (13), electrode flange (14) respectively with
High voltage power supply (15) positive and negative anodes connect, and thick screw rod (2) passes through threeway flange (13) and straight line propeller in annealing device (16)
(12) it connects.
4. the annealing device of needle tip of scanning tunnel microscope according to claim 3, it is characterised in that: needle point (11) position
In needle point support metal frame (10) bottom, when work, straight line propeller (12) successively pushes thick screw rod (2), annealing device (16)
It travels forward, needle point (11) is located at metallic shield (8) top surface middle position and metallic shield (8) top and extend into needle point
It holds in the palm in metal frame (10).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811332520.7A CN109490580A (en) | 2018-11-09 | 2018-11-09 | A kind of annealing device of needle tip of scanning tunnel microscope |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811332520.7A CN109490580A (en) | 2018-11-09 | 2018-11-09 | A kind of annealing device of needle tip of scanning tunnel microscope |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN109490580A true CN109490580A (en) | 2019-03-19 |
Family
ID=65694087
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201811332520.7A Pending CN109490580A (en) | 2018-11-09 | 2018-11-09 | A kind of annealing device of needle tip of scanning tunnel microscope |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN109490580A (en) |
Citations (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2407857Y (en) * | 1999-03-11 | 2000-11-29 | 中国药科大学 | Micro forging instrument for producing microsyringe and fixing needle |
| US20040026629A1 (en) * | 2002-08-12 | 2004-02-12 | Tadashi Fujieda | Emission source having carbon nanotube, electron microscope using this emission source, and electron beam drawing device |
| JP2007265685A (en) * | 2006-03-27 | 2007-10-11 | Kiyoyoshi Mizuno | Probe for electron source |
| CN101079331A (en) * | 2005-08-04 | 2007-11-28 | 中国科学院物理研究所 | A tunnel probe for scanning the tunnel microscope and its making method |
| CN201269842Y (en) * | 2008-10-22 | 2009-07-08 | 中国科学院大连化学物理研究所 | Electron beam heater in ultra high vacuum surface analysis system |
| CN101655441A (en) * | 2009-09-29 | 2010-02-24 | 南京大学 | Device for heating needle tip of scanning tunnel microscope |
| CN101995416A (en) * | 2009-08-12 | 2011-03-30 | 精工电子纳米科技有限公司 | Softening point measuring apparatus and thermal conductivity measuring apparatus |
| CN104483512A (en) * | 2014-12-29 | 2015-04-01 | 大连交通大学 | Scanning tunneling microscope needle point corrosion instrument |
| CN105467159A (en) * | 2015-12-29 | 2016-04-06 | 中国科学院物理研究所 | Positioning system based on scanning probe technology and utilization method for same |
| CN107941624A (en) * | 2017-12-13 | 2018-04-20 | 吉林大学 | High-temperature high-frequency material mechanical property in-situ test device |
| CN108728800A (en) * | 2017-04-24 | 2018-11-02 | 中国科学院物理研究所 | For the Multifunctional treatment device in vacuum environment |
-
2018
- 2018-11-09 CN CN201811332520.7A patent/CN109490580A/en active Pending
Patent Citations (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2407857Y (en) * | 1999-03-11 | 2000-11-29 | 中国药科大学 | Micro forging instrument for producing microsyringe and fixing needle |
| US20040026629A1 (en) * | 2002-08-12 | 2004-02-12 | Tadashi Fujieda | Emission source having carbon nanotube, electron microscope using this emission source, and electron beam drawing device |
| CN101079331A (en) * | 2005-08-04 | 2007-11-28 | 中国科学院物理研究所 | A tunnel probe for scanning the tunnel microscope and its making method |
| JP2007265685A (en) * | 2006-03-27 | 2007-10-11 | Kiyoyoshi Mizuno | Probe for electron source |
| CN201269842Y (en) * | 2008-10-22 | 2009-07-08 | 中国科学院大连化学物理研究所 | Electron beam heater in ultra high vacuum surface analysis system |
| CN101995416A (en) * | 2009-08-12 | 2011-03-30 | 精工电子纳米科技有限公司 | Softening point measuring apparatus and thermal conductivity measuring apparatus |
| CN101655441A (en) * | 2009-09-29 | 2010-02-24 | 南京大学 | Device for heating needle tip of scanning tunnel microscope |
| CN104483512A (en) * | 2014-12-29 | 2015-04-01 | 大连交通大学 | Scanning tunneling microscope needle point corrosion instrument |
| CN105467159A (en) * | 2015-12-29 | 2016-04-06 | 中国科学院物理研究所 | Positioning system based on scanning probe technology and utilization method for same |
| CN108728800A (en) * | 2017-04-24 | 2018-11-02 | 中国科学院物理研究所 | For the Multifunctional treatment device in vacuum environment |
| CN107941624A (en) * | 2017-12-13 | 2018-04-20 | 吉林大学 | High-temperature high-frequency material mechanical property in-situ test device |
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| RJ01 | Rejection of invention patent application after publication |
Application publication date: 20190319 |
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| RJ01 | Rejection of invention patent application after publication |