CN2593320Y

CN2593320Y - Scanning probe of scanning tunnel microscope

Info

Publication number: CN2593320Y
Application number: CN02280003U
Authority: CN
Inventors: 李民乾; 胡均; 华寿亭; 张心澄
Original assignee: SHANGHAI AJ NANO-SCIENCE DEVELOPMENT Co Ltd
Current assignee: SHANGHAI AJ NANO-SCIENCE DEVELOPMENT Co Ltd
Priority date: 2002-11-28
Filing date: 2002-11-28
Publication date: 2003-12-17
Anticipated expiration: 2012-11-28

Abstract

The utility model relates to a scanning head of a scanning tunnel microscope, which comprises an inner box that is arranged in an outer metal cover and forms double shielding. A needle point of a probe is stretched out of a small hole on a bottom board of a casing, and the probe is integrated with the casing. Three regulating rods which are arranged on a mounting platform are distributed in the form of an isosceles triangle. Two manual regulating rods are of coarse regulation, and the automatic regulating rod which is positioned at position of an apical angle of the isosceles triangle is of fine regulation. After the needle point of the probe and the surface of a sample to be measured form tunnel current, the height and the position of the needle point of the probe are fixed. When the sample to be measured moves as a sample worktable which is driven by a piezoelectric ceramic tube, the needle point of the probe scans toward the surface of the sample to be measured. Compared with the prior art, the utility model has the advantages of simple structure, convenient operation, strong capability of anti-interference, large scanning area reaching to 6 mu, high scanning resolution which is the atomic resolution of high order graphite (HOPG), and high resolving precision reaching to 1*10+[-5]mu.

Description

The scanning head of scanning tunnel microscope

Technical field

The utility model is a kind of scanning head of scanning tunnel microscope, is used for scanning tunnel microscope, has the resolution of atom level, is indispensable important tool in the nanotechnology research.

Background technology

Scanning head is the part of core in the scanning tunnel microscope structure.Formerly in the technology, having a kind of is that its middle probe is a manual adjustment, and needle point is to drive automatically into motor with the mode that testing sample approaches mutually, and the maximum scan scope is 6 μ m, and main shortcoming is that function is few, and Installation and Debugging are complicated, inconvenient operation.

Formerly in the technology, there are two companies (Digita1 Instruments Co. (USA) and ParkInstruments Co. (USA)) in the U.S., the scanning head adjustment control that provides is by computer controlled automatic entirely, the structure that needle point and testing sample approach also is to drive automatically into motor, though the maximum magnitude of scanning be 0.5 μ m. it to have Installation and Debugging simple, operate also fairly simplely, production cost is cheaper.But its sweep limit is less, and the occasion of measuring in some requires in a big way is inapplicable.

Summary of the invention

The purpose of this utility model is the deficiency that overcomes in the above-mentioned technology formerly, and a kind of scanning head is provided, both simple in structure, easy to adjust, volume is little, with low cost, have simultaneously high cost performance, higher resolution precision, bigger sweep limit again.

Scanning head of the present utility model as shown in Figure 1.Comprise: inner box 3, mounting platform 4, the base 5 of outer cover 1, tape drum lid 2, the scan block 6 and the probe 32 that constitute by mounting platform 4 and base 5.

Said outer cover 1 is the metal cap 11 that the lower end has flange 10.Be evenly distributed with hanging bolt 101 on the flange 10, antidetonation suspention spring is used for installing.Outer cover 1 covers on the outside of inner box 3.

The inner box 3 of said tape drum lid 2 comprises shell 30, and shell 30 surrounds the reception room 301 of inner chamber.Match at the reference column 20 that is equipped with on shell 30 tops on pilot hole 302 and the lid 2.Be built-in with circuit board 31 at reception room 301.Probe 32 has metal tube 35, has in the aperture of needle point from shell 30 base plates of probe 32 of metal tube 35 to stretch out inner box 3, between the metal tube 35 of probe 32 and shell 30 base plates insulating sleeve 33 is arranged.Probe 32 constitutes one with shell 30.The tail end of probe 32 is connected on the circuit board 31.Be equipped with on the sidewall of shell 30 with control system on the electronic receptacle 34 that matches of electronic plug 62.

Be equipped with two manual adjustment rod 40 and an automatic adjuster bar 41 on the said mounting platform 4.Three

adjuster bars

40,41 present the distribution of an isoceles triangle shape, and adjuster bar 41 is positioned at the summit of isosceles triangle automatically.Between three

adjuster bars

40,41, be equipped with testing sample platform 61.Testing sample platform 61 places on the piezoelectric ceramic tube 60.Have on the piezoelectric ceramic tube 60 with control system on the D shape interface 63 that matches of D shape interface.Support column 43 is arranged under the mounting platform 4, and support column 43 places on the base 5.

It can be integral type that mounting platform 4 constitutes scan block 6 with base 5, or the split assembling.

Said inner box 3 is seated on the mounting platform 4, and three

adjuster bars

40,41 on the mounting platform 4 withstand on the base plate of inner box 3 shells 30, the probe 32 tip alignment testing sample platforms 61 that stretch out in the aperture from shell 30 base plates.

The shell 30 of said outer cover 1, lid 2 and inner box 3 all is by proportion heavier metal such as stainless steel, or duralumin, hard alumin ium alloy constitutes, in order that make probe segment heavier, makes probe 32 stable, trembles to avoid needle point.

Above-mentioned structure as shown in Figure 1, testing sample is seated on the testing sample platform 61.When beginning to survey, at first regulate two manual adjustment rod 40, make probe 32 needle points approach testing sample lentamente, when being adjusted to certain position, handle automatic adjuster bar 41 by control box and carry out accurate adjustment, after overcoming potential barrier formation tunnel current between probe 32 needle points that are added with bias voltage and the testing sample surface, the height of stationary probe 32 needle points.Startup piezoelectric ceramic tube 60 makes testing sample platform 61 carry testing sample and moves, and the needle point that then forms probe 32 is facing to the testing sample surface scan.By the variation of the tunnel current between record needle point and the testing sample surface, just obtained the information of testing sample surface topography.

Scanning head of the present utility model is compared with technology formerly, and there is outer cover 1 inner box 3 outsides on the utility model scanning head, constituted double layer screen, so antijamming capability are strong.

Probe 32 of the present utility model passes in shell 30 base plate apertures, and probe 32 is formed one with shell 30.The adjustment of probe 32 needle point height is carried out coarse adjustment with two manual adjustment rod 40 earlier, and accurate adjustment is carried out with automatic adjuster bar in the back.Both protected needle point not impaired, needle point is regulated accurately apart from the height on testing sample surface, thereby improved the scanning accuracy of scanning head because of producing bigger tunnel current suddenly.In the utility model scanning head, maintain static after has adjusted the position of probe 32 needle points, move, form needle point facing to the testing sample surface scan but carry testing sample by piezoelectric ceramic tube 60 driving testing sample platforms 61.This makes that not only measurement is reliable and stable, and sweep limit also enlarges easily.Therefore, the utility model is not only simple in structure, easy to operate, and sweep limit is bigger simultaneously, scanning resolution precision height.

Description of drawings

Fig. 1 is the STRUCTURE DECOMPOSITION synoptic diagram of scanning head of the present utility model.

Embodiment

As above-mentioned structure shown in Figure 1.

Wherein outer cover 1, lid 2 and shell 30 constitute by stainless steel.

Insulating sleeve 33 on the probe 32 is to be made of high insulating material teflon.The isosceles triangle that the distribution of three

adjuster bars

40,41 presents tall and big in the radius of mounting platform 4.Automatically adjuster bar 41 is to be regulated by the driving of computer-controlled stepper motor.The utility model of said structure is used for scanning tunnel microscope, and the sweep limit of acquisition is 3 μ m, and maximum can reach 6 μ m.Scanning resolution be high order graphite (HOPG) former explanation.The precision of explanation is up to 1 * 10 ^-5μ m (0.1 ).

Claims

1, a kind of scanning head of scanning tunnel microscope comprises: inner box (3), mounting platform (4), base (5) and the probe (32) of outer cover (1), tape drum lid (2) is characterized in that:

＜1 〉, said outer cover (1) is the metal cap (11) that the lower end has flange (10), is evenly distributed with hanging bolt (101) on the flange (10), outer cover (1) covers on the outside of inner box (3);

＜2 〉, the said inner box (3) that has lid (2) comprises shell (30), the reception room (301) that shell (30) surrounds, reference column (20) on pilot hole (302) on shell (30) top and the lid (2) matches, stretch out in the aperture of probe (32) needle point that has metal tube (35) from shell (30) base plate, between the metal tube (35) of probe (32) and shell (30) base plate insulating sleeve (33) is arranged, probe (32) constitutes one with shell (30), be built-in with circuit board (31) at reception room (301), the tail end of probe (30) is connected on the circuit board (31), be equipped with on the sidewall of shell (30) with control system on the electronic receptacle (34) that matches of electronic plug (62);

＜3 〉, be equipped with two manual adjustment rod (40) and an automatic adjuster bar (41) on the said mounting platform (4), three adjuster bars (40,41) distribution presents an isoceles triangle shape, automatically adjuster bar (41) is positioned at the summit of isosceles triangle, at three adjuster bars (40,41) be equipped with piezoelectric ceramic tube (60) between, go up storing testing sample platform (61) at piezoelectric ceramic tube (60), D shape interface (63) is arranged on the piezoelectric ceramic tube (60), support column (43) is arranged under the mounting platform (4), support column (43) places on the base (5), and mounting platform (4) constitutes scan block (6) with base (5);

＜4 〉, above-mentioned inner box (3) places on the mounting platform (4), three adjuster bars (40,41) on the mounting platform (4) withstand on shell (30) base plate of inner box (3), and probe (32) the tip alignment mounting platform (4) that stretches out in the aperture from shell (30) base plate is gone up the testing sample platform (61) on the piezoelectric ceramic tube (60).

2, the scanning head of scanning tunnel microscope according to claim 1, the shell (30) that it is characterized in that said outer cover (1), lid (2) and inner box (3) all are to be stainless steel by the heavier metal of proportion, or duralumin, hard alumin ium alloy constitutes.