CN104469356B - Image sensor characteristic parameter measuring and analyzing system - Google Patents
Image sensor characteristic parameter measuring and analyzing system Download PDFInfo
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- CN104469356B CN104469356B CN201410838194.2A CN201410838194A CN104469356B CN 104469356 B CN104469356 B CN 104469356B CN 201410838194 A CN201410838194 A CN 201410838194A CN 104469356 B CN104469356 B CN 104469356B
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Abstract
The invention discloses an image sensor characteristic parameter measuring and analyzing system which integrates a configurable light source, a detector room and a control terminal. The configurable light source comprises a light source controller, a laser spot light source, a pulse laser light source and a digital white light source, and a signal light source of the measuring and analyzing system is formed. The detector room comprises a core control panel, a light path module, a positioning executing mechanism and an integral camera bellow and is used for sample positioning, light path focusing and task equipment controlling. The control terminal comprises a high-reliability embedded multi-core processor, a high-speed data collecting and storing module, a physical parameter testing and analyzing module, an ADC array testing module and a precise programmable power source and is used for providing the power source for the system and conducting data collection, parameter calculation and man-machine interaction. The image sensor characteristic parameter measuring and analyzing system can integrally achieve the operation special for an image sensor, wherein the operation includes device physical parameter measuring, circuit characteristic parameter measuring and high-speed image data capturing and replaying.
Description
Technical field
The present invention relates to a kind of imageing sensor feature measurement analysis system, more particularly to one kind towards imageing sensor,
Being integrated with device physicses parameter measurement, circuit characteristic measurement, high speed image data acquisition and the integrated testing analysis of storage is
System.
Background technology
The performance measurement of imageing sensor includes many kinds of parameters with analysis, such as has sensitivity, electric charge residual in terms of pixel device
The parameters such as residual, pixel-level fusion；Circuit characteristic aspect has the parameters such as gain linearity degree, ADC performances；For analysis of the image quality
Also need to carry out image data acquiring and storage.At present existing imageing sensor test system has the following disadvantages：
Pixel performance test equipment, circuit performance test equipment, image data acquiring equipment each independent, system it is huge,
Complex operation, use inconvenience；
Partial key performance parameters cannot be measured, charge residue number and electron transfer rate such as in pixel.
It is desirable to having a kind of imageing sensor feature measurement analysis system to overcome or at least mitigate the upper of prior art
State one or more in defect.
The content of the invention
It is an object of the invention to provide a kind of imageing sensor feature measurement analysis system shows to overcome or at least mitigate
There are one or more in the drawbacks described above of technology.
For achieving the above object, the invention provides a kind of imageing sensor characterisitic parameter measuring and analysis system, it includes：
Configurable light source, for producing test desired signal light wave；
Probe chamber, at least including 1 testing image sensor, for receiving the signal light-wave that configurable light source sends,
So as to export corresponding optoelectronic induction signal and related data；
Control terminal, for for the configurable light source, probe chamber to provide power supply；The photoelectricity of pick-up probe room output
Induced signal and related data, and according to the optoelectronic induction signal and correlation data calculation and show surveyed parameter；It is described
Control terminal is additionally operable to man-machine interaction, and the setting data of user are sent in probe chamber to control testing image sensor
Work.
The imageing sensor feature measurement analysis system of the present invention, integrated image sensor devices physical parameters
Measurement, circuit characteristic measurement, high speed image data acquisition and store function, so as to solve prior art in, items are surveyed
Examination equipment is separate, complex operation, awkward problem；And there is provided a kind of for charge residue number in pixel, electronics
The isoparametric measurement means of transfer rate.
Description of the drawings
Below in conjunction with the accompanying drawings and embodiment elaborates to the present invention：
Fig. 1 is monolithically fabricated block diagram for " imageing sensor feature measurement analysis system " in the present invention；
Fig. 2 is high speed Data acquisition and storage schematic diagram of the present invention；
Fig. 3 is ADC array characteristics test philosophy figures in the present invention；
Fig. 4 is charge residue test philosophy figure in the present invention；
Fig. 5 is pel array fixed pattern noise test philosophy figure in the present invention；
Fig. 6 is pixel-level fusion test philosophy figure in the present invention.
Specific embodiment
To make purpose, technical scheme and the advantage of present invention enforcement clearer, below in conjunction with the embodiment of the present invention
Accompanying drawing, the technical scheme in the embodiment of the present invention is further described in more detail.In the accompanying drawings, identical from start to finish or class
As label represent same or similar element or the element with same or like function.Described embodiment is the present invention
A part of embodiment, rather than the embodiment of whole.It is exemplary below with reference to the embodiment of Description of Drawings, it is intended to use
It is of the invention in explaining, and be not considered as limiting the invention.Based on the embodiment in the present invention, ordinary skill people
The every other embodiment that member is obtained under the premise of creative work is not made, belongs to the scope of protection of the invention.Under
Face combines accompanying drawing and embodiments of the invention is described in detail.
Fig. 1 shows the circuit theory schematic diagram of imageing sensor feature measurement analysis system proposed by the present invention.Such as Fig. 1
Shown, the measuring and analysis system includes：Configurable light source 1, probe chamber 2, control terminal 3.
Configurable light source includes as shown in Figure 1：Light source controller 11, laser facula light source 12, pulsed laser light source 13,
Digital white light light source 14.The light source controller 11 is used for light source switching and selects and light source control.Its power supply is from control terminal
The output of middle accurate program controlled power supply, and row data communication is entered by the core control panel in data cable and probe chamber.According to
The setting data that core control panel is issued, selects current test light source category used, such as laser facula light source, pulsed laser light source
With in digital white light source, and the operating frequency of selected light source is set；Or light intensity (the laser of the selected light source of adjustment
Hot spot light source/pulsed laser light source is adjusted by controlling source current；Digital white light light source is directly set by digital interface
It is fixed)；Or frequency of light wave (laser facula light source internal is mainly made up of laser instrument, filter wheel piece, monochromator, by digital interface
Set the centre wavelength of its output monochromatic optical wave).
When the measurement of imageing sensor different parameters is carried out, different light sources are can select as signal source.Alternatively, carry out
During charge residue parameter measurement, from pulsed laser light source, for producing pulse type laser；Carry out the survey of pel array FPN noises
During amount, from digital white light light source, for sending parallel equal white light；When carrying out Cross Talk performance measurements between pixel, choosing
Laser facula light source is used, for sending one-wavelength laser hot spot.
Probe chamber is as shown in figure 1, including light path module 21, positioning actuators 22, core control panel 23, overall camera bellows
24。
Wherein light path module 21 sends the light intensity of light beam, convergent beam simultaneously finally for monitoring, adjusting configurable light source 1
Project on image sensor pixel array.Light path module 21 is assembled by collimated light path 211, light intensity monitoring/adjustment unit 212
Light path 213 is constituted.Collimated light path 211 receives the light beam that configurable light source is launched, and the light beam is collimated, and controls incident illumination
The angle of divergence of beam, forms uniform parallel light, is beneficial to subsequent transmission.Light intensity monitor and adjustment unit 212 be located at collimated light path and
Between Path of Convergent Rays, mainly it is made up of diaphragm, optical attenuator, light intensity detector, it passes through data cable and core control panel
23 are connected, and real-time light intensity datagram is delivered to into core control panel 23, while and being controlled, the light intensity in dynamic adjustment light path.
Intensity control is mainly realized by diaphragm and optical attenuator.Diaphragm is the optical element with unthreaded hole.It is general into
There is clear aperature in thin rounded flakes shape, its central authorities, and pore size is adjustable by knob.Light intensity is realized by scaling clear aperature
Adjust.As clear aperature greatly if the light intensity that passes through it is strong, otherwise it is then weak.Optical attenuator is a kind of light with fixed attenuation multiplying power
Learn element.By above-mentioned two part, mainly as needed, light intensity of incident light is decayed, to prevent light intensity too strong, made
The light induced electron of photodetector is constantly in saturation.
Light-intensity test mainly leads to light intensity detector to be realized, it mainly includes light intensity detector and signal acquisition circuit, wherein,
Light intensity detector produces the faint signal of telecommunication by photoelectric effect, and after signal amplifies, Acquisition Circuit is processed, will gather number
According to passing to core control panel, and final Jing core control panels are reported and submitted to control terminal.
The main precision level guide rail 222 of positioning actuators 22, three-dimensional Electrocontrolled sample platform 223.It is mainly used in by altimetric image
The focusing of sensor and the adjustment of irradiation position.Three-dimensional Electrocontrolled sample platform is installed on precision level guide rail 222, and the latter is used as
Horizontal reference.Controlled by X/Y/Z three-axis stepping motors, automatically controlled exact position movement can be carried out in the axles of X/Y/Z tri-.Due to by mapping
As sensor is installed on core control panel, and core control panel is held on three-dimensional Electrocontrolled sample platform 223, so three-dimensional
Electrocontrolled sample platform 223 is in three axial movements, while the position for driving tested imageing sensor is moved.Three-dimensional Electrocontrolled sample platform
The output of 223 power supplys accurate program controlled power supply in control terminal, the moving direction and stepping length of its three spindle motor then pass through
Data cable is connected to core control panel, so as to be controlled.
Core control panel 23 is used to ensure that tested imageing sensor keeps normal work in test.Imageing sensor is pacified
Loaded on core control panel, being provided by core control panel, the work of the imageing sensors such as power supply, clock, biasing is necessary to drive letter
Number, while also output data need to be obtained according to the data time sequence of imageing sensor and data form.Additionally, it is also each task
The control centre of module, it passes through data cable and is connected with control terminal, receives user data and signal that it is issued, then defeated
Go out control data, the configurable light source 1 of adjustment, light path module 21, three-dimensional Electrocontrolled sample platform 222；And believe imageing sensor output
Number and gather view data and exported to control terminal by data cable.
The internal coat of overall darkroom 24 crow lac varnish, is mainly used in absorbing veiling glare, there is provided imaging darkroom.In addition overall darkroom
On be provided with line arrangement passage and power interface with the communication of outside control terminal.Overall darkroom is provided with illuminating lamp and behaviour
Make door, handling and equipment debugging, parts for maintenance, replacing for testing image sensor etc., need to close during test illuminating lamp and
Operation door.
The measuring and analysis system also includes damping isolation platform 221, and it is described for carrying as horizontal reference platform
Configurable light source 1 and probe chamber 2 simultaneously isolate vibrations.
Control terminal includes as shown in Figure 1：Highly reliable embedded multi-core processor 31, high-speed data acquisition and storage mould
Block 32, physical parameter test module 33, ADC array tests module 34, accurate program controlled power supply 35.
Wherein highly reliable embedded multi-core processor 31, is mainly used in data processing, parameter calculating, graph making and people
Machine is interacted.
High-speed data acquisition and memory module 32, are mainly made up of read-write controller 321 and memory array 322, are used for
High speed image data acquisition is stored with parallel large capacity image data.Read-write controller mainly realizes high-speed data acquisition, instruction
The function such as parsing and read-write operation control；Memory array is the actual physical storage medium of view data.
Physical parameter test module 33, mainly by lock-in amplifier 331, high-precision adc 332, data processing list
Unit 333 constitutes.It is mainly used in entering the tiny signal of tested imageing sensor output horizontal lock, amplifies and (improve tiny signal
Detectability and accuracy of detection)；High-precision analog-numeral conversion (realizing the digitized of analogue signal) and data prediction.
ADC array tests module 34 is mainly made up of standard signal source 341 and signal source controller 342.It is low for producing
Harmonic standard ADC test signals, it is finally loaded into tested imageing sensor through shielding analogue signal cable, core control panel
On.
For imageing sensor simplifies, mainly include pel array and ADC conversion arrays.Can be understood as pixel receiving light
According to and photosensitive generation analogue signal, deliver ADC arrays and be acquired and be converted to digital signal, finally export, and by outside
Data acquisition unit is obtained and display digit image.And when individually testing the performance of ADC arrays itself, by arranging, (image is passed
The switch switching of sensor chip internal), the input of the analog signal output of pixel and ADC is disconnected, switch to from outer
Boundary is loaded directly into test low harmony wave standard analog signal (frequently with sine wave, known in method of testing and process).Follow-up turns
Change with numeral output with it is consistent before.The digital signal for simply converting, is not photosensitive image, but the standard letter of input
Number.
Above-mentioned high-speed data acquisition passes through with memory module 32, physical parameter test module 33, ADC array tests module 34
High speed rear panel data/address bus carries out data interaction with highly reliable embedded multi-core processor 31, and for it data are called, and carries out data
Process and parameter is calculated.
Accurate program controlled power supply is mainly used in providing power supply for configurable light source, probe chamber and control terminal.
Method of testing：
The integrated high-speed data acquisition of the present invention and storage, circuit characteristic test, device physicses parameter testing work(
Energy.The following realization for introducing each function respectively.
High-speed data acquisition and storage：
The system is capable of achieving 10Gbps magnitudes high speed image data acquisition and storage, as shown in Figure 2.Testing image sensor
It is installed on core control panel 23, the high-speed data of its output is accessed Jing after core control panel 23, high speed data bus during work
High-speed data acquisition and memory module 32.Its concrete implementation procedure is as follows：
When user performs ' data acquisition and storage ' to be operated：Sent by embedded multi-core controller 31 and " gather storage to open
It is dynamic " instruction, detected and obtained by core bus read-write control unit, submit instruction resolution unit to.Instruction resolution unit starts can
Reconstructed number port unit, synchronous control unit, storage array read-write control unit are started working.Restructural digital port unit
Input be connected with high speed data bus and (can as needed be configured to digital parallel interface, LVDS interface, Camera-
Link interfaces), to obtain high-speed data from the testing image sensor；Its outfan is divided into：Parallel Digital port and synchronization
Signal port, is respectively connected to data write buffer unit and synchronous control unit input.
Restructural digital port unit, its data for being used to receive are converted into corresponding according to the different of output interface
Export after form.Because each image chip design producer is different, the interface definition of its chip output data is different, and numeral is simultaneously
Line interface, LVDS interface, Camera-link interfaces are the most frequently used interface shape.For various images compatible to the full extent
Sensor, interface shape is configured in the present invention by restructural digital port unit, while compatible above-mentioned several data-interfaces.
Synchronous control unit, is mainly used in data syn-chronization.Because the general Parallel multiplex output of view data, up to tens～
Roads up to a hundred.Above-mentioned data output synchronization is kept, when otherwise capturing view data and show, because data are asynchronous, meeting
Cause the phenomenons such as image disappearance, dislocation.
Data write buffer unit, are mainly used in matching operating rate.Because view data output speed is higher, and image
Writing speed is slower, in order to allow the two speeds match, formation to coordinate.First the view data for receiving is cached, is waited also
Unfinished last view data write operation terminates, then the data of caching are continued to write to.
Synchronizing signal includes：Data sync clock, frame synchronizing signal, line synchronising signal, are connected to as input signal
Step control unit.Synchronous control unit exports corresponding control signal to data write buffer unit, storage array Read-write Catrol list
Unit, the operation for being cached with matched data and simultaneously and concurrently being write.Storage array read-write control unit writes buffer unit from data
Read data, piecemeal write Large Copacity parallel memory arrays.Storage array read-write control unit feedback ' writing full ' letter after writing completely
Hang up number to instruction resolution unit and automatically and no longer write new data.
When ' data are reported ' operation is performed：Embedded multi-core processor 31 sends ' data are reported ' instruction, total by backboard
Line read-write control unit is detected and obtained, and submits instruction resolution unit to.Instruction resolution unit starts storage array Read-write Catrol list
Unit, the data in piecemeal extraction memorizer are to data read-out buffer unit.Instruction resolution unit detection data reads buffer unit
And capture data, after being encapsulated as packet, by core bus read-write control unit, High speed rear panel bus, report to it is embedded
Polycaryon processor is processed, show etc..
Circuit characteristic is measured：
As shown in figure 3, the present invention supports to measure parallel multi-channel adc circuit characteristic in testing image sensor
(tested number of channels depends on image chip inside ADC channel number), it realizes that process is as follows.During test, task device
Select ADC array tests module 34 and high-speed data acquisition and memory module 32.Chip image sensor to be measured is installed on core
On panel 23, by the output image sensor control signal of core control panel 23, the chip ADC arrays of testing image sensor are made
Input switches to external signal input pattern (signal selecting switch k as shown in Figure 3 switches to external signal input).
The low harmony wave standard analog signal sent by signal generator in control device, (often it is sinusoidal signal, sinusoidal signal
Frequency, amplitude, phase place can be arranged as required to：By sending arrange parameter to " signal source controller ", signal source controller
Standard analog signal waveform set by " standard signal source " output user can be controlled).The signal is loaded into figure as external signal
As the input of ADC arrays in sensor, for testing ADC array performance parameters.
Arranged according to user by embedded multi-core processor 31, Jing High speed rear panel data/address bus, to ADC array test modules
Signal source controller 342 in 34 sends setup parameter and " outputting standard signal " instruction.Signal source controller 342 receives finger
Then adjustment criteria signal source after order, output amplitude, frequency are fixed, high s/n ratio (SNR), low harmonics distortion (THD) sinusoidal signal,
Jing shielded signal lines are loaded into the ADC array inputs of testing image sensor.Low harmonics distortion described in ADC array acquisitions
(THD) sinusoidal signal and after analog-to-digital conversion output data Jing high speed data bus, by high-speed data acquisition and memory module
32 collections and storage.Finally each channel data is read by highly reliable embedded multi-core processor 31, each ADC channel electricity is calculated successively
Road characterisitic parameter.
Device physicses parameter measurement：
Emphasis solves charge residue parameter measurement, fixed pattern noise performance, the measurement of pixel-level fusion performance parameter.
It is illustrated in figure 4 charge residue parameter testing schematic diagram.During test, light source selects pulsed laser light source, task to set
Alternative physical parameter test module 33, adjusting light path module 21 makes LASER Light Source be vertically projected to tested imageing sensor picture
In pixel array.By core control panel output light-pulse generator control clock (Opt_Clk as shown in Figure 4, export to light source controller)
With tested imageing sensor work clock (Sens_Clk as shown in Figure 4 is exported to tested imageing sensor), the two keeps accurate
It is synchronous.Inside image sensor pixel structure, transfer tube control clock can be automatically generated (as shown in Figure 4 according to Sens_Clk
TX_Clk), for controlling pixel photoreceptor signal.Compared with TX_Clk, Opt_Clk only exports the odd number of TX_Clk to Opt_Clk
Subpulse, namely realize in the first frame integral time, opening laser pulse light source and signal transmission pipe；Ensuing second
In frame integral time, laser pulse light source is closed, but signal transmission pipe is opened.The pixel of tested imageing sensor it is above-mentioned twice
In the time of integration, photocurrent is successively exported.Above-mentioned signal delivers to physical parameter test module 33 through shielded signal line, successively
Digital value is obtained Jing after lock mutually amplification, high precision analogue conversion and data prediction, first time read output signal is obtained.Then
According to the signal of second reading, you can calculate in first time optical-integral-time, electric charge number within the pixel is remained, with it
Proportion.
Read for the first time, be that pixel is subject to after light-wave irradiation, generate and exported after electric charge, by ADC collections, digitized
After export.The electric charge numerical value of the photosensitive acquisition of pixel can be gone out according to above-mentioned numerical computations.
Due to the effect of potential barrier, potential well in pixel, the electric charge in above-mentioned first time reading, will not be transferred out completely.
A small amount of charge residue is had in pixel.Therefore need to carry out second collection, now pixel is similar under details in a play not acted out on stage, but told through dialogues environment, nothing
Illumination, namely without newly-increased induced charge.What is now gathered and read is the electric charge of original residual previous frame within the pixel.By
This can obtain the electric charge number of residual, and its ratio for accounting for.
It is illustrated in figure 5 pel array fixed pattern noise test philosophy figure.During test, light source selects digital white light light source
14, task device selects high-speed data acquisition and memory module 32, the light path module to send the digital white light light source 14
Uniform parallel white light be vertically projected on tested image sensor pixel array, the testing image sensor array is listed in described
Output photoelectric induced signal under the irradiation of collimated white light.Using high-speed data acquisition and memory module 32 according to the optoelectronic induction
Fast capturing signal picture frame, the meansigma methodss of N frames are calculated as each pixel cell by the use of highly reliable embedded multi-core processor 31
Signal output.The standard deviation of each pixel cell dark current signals output is sought, then it is defeated divided by whole array pixel cells output signal
Go out meansigma methodss and be fixed pattern noise of institute's light-metering according under.
It is illustrated in figure 6 pixel-level fusion performance test schematic diagram.During test, light source selects 12 laser facula light sources, gathers
Burnt light path part selects the higher microcobjective of multiplying power.Task device selects high-speed data acquisition and memory module 32, adjusts
Light path module 21 makes the laser facula that the laser facula light source 12 sends be vertically projected to tested image sensor pixel array
On.The spot diameter of its output and the equal scale of single pixel (conventional image after the line focus of selected laser facula light source 12
Sensor pixel size is about 2～10um), adjust sample stage Z axis and realize focusing, then adjusting X/Y axles makes hot spot only cover as far as possible
The pixel of sheet one, pixel 5 in such as Fig. 6.Pel array output data is gathered using high-speed data acquisition and memory module, particularly
Hot spot covers the output data of pixel and its adjacent pixels.Its adjacent pixels is calculated by highly reliable embedded multi-core processor 31 defeated
Go out the ratio with center pixel output, you can obtain pixel-level fusion parameter.
Particular embodiments described above, has been carried out further in detail to the purpose of the present invention, technical scheme and beneficial effect
Describe in detail bright, it should be understood that the foregoing is only the specific embodiment of the present invention, be not limited to the present invention, it is all
Within the spirit and principles in the present invention, any modification, equivalent substitution and improvements done etc. should be included in the protection of the present invention
Within the scope of.
Claims (7)
1. a kind of imageing sensor characterisitic parameter measuring and analysis system, it is characterised in that include：
Configurable light source, for producing test desired signal light wave；
Probe chamber, at least including 1 testing image sensor, for receiving the signal light-wave that configurable light source sends, so as to
Export corresponding optoelectronic induction signal and related data；The probe chamber includes light path module, and the light path module is used to examine
The signal light-wave light intensity that the configurable light source is produced is surveyed and adjusted, and the signal light-wave is projected to into testing image sensor
On pel array；
Control terminal, for for the configurable light source, probe chamber to provide power supply；The optoelectronic induction of pick-up probe room output
Signal and related data, and according to the optoelectronic induction signal and correlation data calculation and show surveyed parameter；The control
Terminal is additionally operable to man-machine interaction, and the setting data of user are sent in probe chamber to control the work of testing image sensor
Make；
Wherein, the control terminal includes：
Processor, for control data collection and memory module, physical parameter test module and ADC array test module works
Make, and the data to the output of above-mentioned module are processed and displayed；
Data acquisition and storage module, for gathering the optoelectronic induction signal and related data of tested imageing sensor output and right
It is stored；
Physical parameter test module, the optoelectronic induction signal and related data for exporting to testing image sensor is locked
Phase, amplification, analog digital conversion and data prediction；The physical parameter test module can be used to measure the testing image sensing
The charge residue parameter of device, fixed pattern noise performance and pixel-level fusion performance parameter；
ADC array test modules, for producing low harmony wave ADC test signals, and are loaded into the ADC arrays of testing image sensor
On；
The configurable light source includes pulsed laser light source；Wherein, the charge residue parameter of the testing image sensor is measured
When,
The laser pulse that the pulsed laser light source is exported is vertically projected to testing image sensor pixel by the light path module
On array；
The testing image sensor array is listed in output photoelectric induced signal under the irradiation of the laser pulse；
The physical parameter test module obtains the optoelectronic induction signal and is entered horizontal lock amplification, high precision analogue conversion
With acquisition first time numerical data after data prediction；
The physical parameter test module obtains again the optoelectronic induction signal and is entered horizontal lock amplification, high precision analogue
Second numerical data is obtained after conversion and data prediction；
The physical parameter test module remains in be measured according to the first time numerical data and second numerical data calculating
Electric charge number and its ratio in image sensor array pel array.
2. a kind of imageing sensor characterisitic parameter measuring and analysis system, it is characterised in that include：
Configurable light source, for producing test desired signal light wave；
Probe chamber, at least including 1 testing image sensor, for receiving the signal light-wave that configurable light source sends, so as to
Export corresponding optoelectronic induction signal and related data；The probe chamber includes light path module, and the light path module is used to examine
The signal light-wave light intensity that the configurable light source is produced is surveyed and adjusted, and the signal light-wave is projected to into testing image sensor
On pel array；
Control terminal, for for the configurable light source, probe chamber to provide power supply；The optoelectronic induction of pick-up probe room output
Signal and related data, and according to the optoelectronic induction signal and correlation data calculation and show surveyed parameter；The control
Terminal is additionally operable to man-machine interaction, and the setting data of user are sent in probe chamber to control the work of testing image sensor
Make；
Wherein, the control terminal includes：
Processor, for control data collection and memory module, physical parameter test module and ADC array test module works
Make, and the data to the output of above-mentioned module are processed and displayed；
Data acquisition and storage module, for gathering the optoelectronic induction signal and related data of tested imageing sensor output and right
It is stored；
Physical parameter test module, the optoelectronic induction signal and related data for exporting to testing image sensor is locked
Phase, amplification, analog digital conversion and data prediction；The physical parameter test module can be used to measure the testing image sensing
The charge residue parameter of device, fixed pattern noise performance and pixel-level fusion performance parameter；
ADC array test modules, for producing low harmony wave ADC test signals, and are loaded into the ADC arrays of testing image sensor
On；
The configurable light source includes digital white light light source；Wherein, the fixed pattern noise of the testing image sensor is measured
During performance,
The uniform parallel white light vertical irradiation that the light path module sends the digital white light light source is to testing image sensor
On pel array；
The testing image sensor array is listed in output photoelectric induced signal under the irradiation of the collimated white light；
The Data acquisition and storage module is according to the optoelectronic induction signal capture picture frame；
The processor calculates the meansigma methodss of the multiple images frame of the Data acquisition and storage module capture as described to be measured
The signal data of each pixel cell in image sensor pixel array, and calculated according to the signal data of each pixel cell
To fixed pattern noise performance data.
3. a kind of imageing sensor characterisitic parameter measuring and analysis system, it is characterised in that include：
Configurable light source, for producing test desired signal light wave；
Probe chamber, at least including 1 testing image sensor, for receiving the signal light-wave that configurable light source sends, so as to
Export corresponding optoelectronic induction signal and related data；The probe chamber includes light path module, and the light path module is used to examine
The signal light-wave light intensity that the configurable light source is produced is surveyed and adjusted, and the signal light-wave is projected to into testing image sensor
On pel array；
Control terminal, for for the configurable light source, probe chamber to provide power supply；The optoelectronic induction of pick-up probe room output
Signal and related data, and according to the optoelectronic induction signal and correlation data calculation and show surveyed parameter；The control
Terminal is additionally operable to man-machine interaction, and the setting data of user are sent in probe chamber to control the work of testing image sensor
Make；
Wherein, the control terminal includes：
Processor, for control data collection and memory module, physical parameter test module and ADC array test module works
Make, and the data to the output of above-mentioned module are processed and displayed；
Data acquisition and storage module, for gathering the optoelectronic induction signal and related data of tested imageing sensor output and right
It is stored；
Physical parameter test module, the optoelectronic induction signal and related data for exporting to testing image sensor is locked
Phase, amplification, analog digital conversion and data prediction；The physical parameter test module can be used to measure the testing image sensing
The charge residue parameter of device, fixed pattern noise performance and pixel-level fusion performance parameter；
ADC array test modules, for producing low harmony wave ADC test signals, and are loaded into the ADC arrays of testing image sensor
On；
The configurable light source includes laser facula light source；Wherein, the pixel of the testing image sensor pixel array is measured
Between crosstalk performance when,
The laser facula that the laser facula light source sends is vertically projected to testing image sensor pixel by the light path module
On array, and the laser facula is radiated in the pel array single pixel, the diameter of laser facula and the picture
The equal scale of pixel array single pixel；
Testing image sensor pixel array output photoelectric induced signal under the irradiation of the laser facula；
The Data acquisition and storage module gathers the optoelectronic induction signal and obtains illuminated pixel cell and its phase respectively
The current data of adjacent pixel cell output；
The processor is calculated picture according to the current data that the illuminated pixel cell and its adjacent pixel unit are exported
Crosstalk performance data between element.
4. the system as described in any one of claim 1-3, wherein, the configurable light source includes at least one light source and light source
Controller, the light source controller is used to select at least one light source to produce test desired signal light wave as needed.
5. the system as described in any one of claim 1-3, wherein, the probe chamber also includes：
Light path module, for detecting and adjusting the signal light-wave light intensity that the configurable light source is produced, and by the signal light-wave
It is projected on testing image sensor pixel array；
Positioning actuators, for adjusting the position of testing image sensor；
Core control panel, the testing image sensor is arranged on the core control panel, and the core control panel is used to control
The work of the testing image sensor is made, and is carried out data transmission with the control terminal；
Overall camera bellows, its veiling glare being used in absorbance detector room, and the interface interacted with outside is provided.
6. the system as described in any one of claim 1-3, wherein, the system is used for Data acquisition and storage, and the number
Include with memory module according to collection：
Core bus read-write control unit, for detecting and obtain the processor the instruction that issues is indicated according to user, and
Submit instruction resolution unit to；
Instruction resolution unit, for parsing the instruction, and resolves to data acquisition or data report instruction by the instruction；When
For data acquisition instructions when, start restructural digital port unit；When data acquisition instructions report instruction for data, startup is deposited
Storage array read-write control unit, and read data from data read-out buffer unit and report to processor；
Restructural digital port unit, receives the optoelectronic induction signal and related data of the output of testing image sensor, and by its
It is converted into exporting after corresponding format data to data and writes buffer unit and synchronous control unit；
Synchronous control unit, it is used to export synchronous control signal, single with synchrodata write buffer unit, data read-out caching
Unit and the operation of storage array read-write control unit；
Data write buffer unit, for caching the data of restructural digital port unit output；
Data read-out buffer unit, for caching the data of the storage array read-write control unit output；
Storage array read-write control unit, for reading data from data write buffer unit, and piecemeal write Large Copacity is parallel
In memory array；It is additionally operable to from parallel array memorizer extract data write data read-out buffer unit；
Parallel array memorizer, for data storage.
7. the system as described in any one of claim 1-3, wherein, the ADC array tests module includes：Standard signal source and
Signal source controller；Wherein, when circuit characteristic is measured,
The processor indicates to export setup parameter and outputting standard signal instruction to the signal source controller according to user；
Signal source controller is tested according to the instruction adjustment criteria signal source to testing image sensor loading low harmony wave ADC
Signal；
Low harmony wave ADC test signals described in ADC array acquisitions in the testing image sensor are simultaneously defeated after digital-to-analogue conversion
Go out ADC test datas；
The ADC test datas are gathered and stored by the Data acquisition and storage module；
The processor reads the ADC test datas, and is calculated each passage of ADC arrays in the testing image sensor
Circuit characteristic parameter.
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| CN106993184B (en) * | 2017-03-29 | 2021-06-22 | 国芯微(重庆)科技有限公司 | Test method for CMOS sensor |
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| CN107995487B (en) * | 2017-12-14 | 2023-11-21 | 南京理工大学 | EMCCD blind pixel testing system and method based on light homogenizing collimator |
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