CN104792500A - Diagnostic method for light beam pointing stability of optical system - Google Patents

Diagnostic method for light beam pointing stability of optical system Download PDF

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Publication number
CN104792500A
CN104792500A CN201510189696.1A CN201510189696A CN104792500A CN 104792500 A CN104792500 A CN 104792500A CN 201510189696 A CN201510189696 A CN 201510189696A CN 104792500 A CN104792500 A CN 104792500A
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optical system
adjustment rack
frequency
pointing stability
accelerometer
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CN104792500B (en
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郑留念
刘志刚
庞向阳
黄宏彪
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Anhui Zhongke Spring Valley Laser Industry Technology Research Institute Co Ltd
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Shanghai Institute of Optics and Fine Mechanics of CAS
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Abstract

The invention discloses a diagnostic method for light beam pointing stability of an optical system. The method includes: arranging an accelerometer on each adjustment frame or device for positioning an optical device of the diagnosed optical system, wherein an output end of each accelerometer is connected with an input end of an acquisition instrument, and an output end of the acquisition instrument is connected with a first input end of a computer; adding a sampling mirror to a laser light path outputted by a transmission terminal of the optical system, arranging a high-speed video camera in a sampling light output direction of the sampling mirror, wherein an output end of the high-speed video camera is connected with a second input end of the computer. The diagnostic method for light beam pointing stability of the optical system has the advantages of wide measurement range, high precision, high sensitivity, high directness of measurement results and quickness and accuracy in judgment of light beam pointing stability data and error sources.

Description

The diagnostic method of optical system beam-pointing stability
Technical field
The present invention relates to optical system, particularly a kind of method of testing of optical system beam-pointing stability, for measuring the pointing stability error that optical system light source or optical element produce due to vibration, and Error Diagnostics source, be specially adapted to complicated large-scale high power laser system.
Background technology
Light beam is subject to the interference of factors in transmitting procedure; especially be subject to the impact of uncontrollable dynamic vibration interference in transmitting procedure, when light beam arrives target center, usually can vibrate back and forth at ideal position; in order to ensure the success ratio of practicing shooting, beam-pointing stability seems extremely important.Measuring beam pointing stability, has the methods such as Mechanical Method, electric method, optical method.Along with the development of technology, main based on electric method and optical method again.Electric method is exactly convert the vibratory output of measurand to electricity, then power consumption testing tool is measured, its advantage be highly sensitive, frequency range and dynamic linear response range wide, be convenient to analyze and remote measurement, deficiency is the Vibration Condition being subject to the interference of electromagnetic field, directly can not reflecting light beam on simple optical element, there is no the stability error data that quantitative vibration causes.Mostly optical method prior art is that the method based on interfering is measured, its advantage be not high by the interference of electromagnetic field, measuring accuracy, be suitable for test specimen that is little to quality and that not easily install accelerometer and make non-cpntact measurement, deficiency is measuring system more complicated, apparatus expensive.
The pointing stability of current optical system is measured is the method for testing of mechanical vibration mostly, only the principle measured of minority literature research optical method.As the people such as Anhui ray machine institute Tan Kun have studied the test of ccd video camera measuring beam pointing stability (see " image technique of measuring laser beam shake ", Tan Kun, air and environmental optics journal, 2nd volume the 1st phase), patent " laser stability test macro " (see ZL201420018034.9), feature is all the small pointing stability change directly obtaining laser spot position, but has no idea the device of diagnosing out positional change even to have an impact.
Summary of the invention
Object of the present invention is exactly the deficiency that will make up above-mentioned existing optical system beam-pointing stability test, a kind of diagnostic method of beam-pointing stability of optical system is proposed, the method can measuring beam pointing stability size simply and effectively, and can diagnose the source affecting beam-pointing stability error.
Technical solution of the present invention is as follows:
A diagnostic method for the beam-pointing stability of optical system, be characterized in, the method includes the steps of:
1) arranged accelerometer by each adjustment rack of diagnosis optical system, the output terminal of accelerometer is connected with the input end of Acquisition Instrument, and the output terminal of this Acquisition Instrument is connected with the first input end of computing machine; In the laser optical path that the transmission terminal of optical system exports, add sampling mirror, arrange high-speed camera at the outbound course of the sampled light of this sampling mirror, the output terminal of this high-speed camera is connected with the second input end of computing machine;
2) when the light source of optical system is not opened, the accelerometer of each adjustment rack of optical system positioning optical element obtains the vibration electrical signal of each adjustment rack respectively, through Acquisition Instrument input computing machine, Computer Analysis obtains the spectrum signature of corresponding each adjustment rack, if the spectrum signature of adjustment rack does not have obvious frequency can be judged as the first natural frequency of this adjustment rack, change the accelerometer with larger frequency response range to continue to repeat this step, to obtain the spectrum signature of each adjustment rack;
3) light source of optical system is opened, described sampling mirror samples the output beam of optical system, the laser signal of sampling is gathered by high-speed camera, computing machine described in several light spot images obtained are inputted, computing machine is to after the image centroid gathered or center of gravity process, obtain image change in displacement data in time, i.e. the amplitude size of time domain inner light beam pointing stability error; Carry out Fourier transform to displacement data, obtain the spectrogram to the beam-pointing stability error that beam-pointing impacts, in spectrogram, different frequency has corresponding beam-pointing stability error amplitude, and some frequency places have obvious amplitude peak;
4) frequency of the obvious amplitude peak in the spectrum signature that the light beam image analysis described in obtains, the frequency near the natural frequency of each adjustment rack or natural frequency can be thought, the spectrum signature of the described adjustment rack that degree of will speed up meter collection analysis obtains, particularly the frequency of its first natural frequency and described obvious amplitude peak is compared, and judges that the sequence number of the adjustment rack producing beam-pointing stability error and corresponding adjustment rack are to the size of beam-pointing stability influence.
Described high-speed camera has focusing lens, can the image of high frequency recording light source, and its picture-taken frequency is greater than the twice of the maximum first natural frequency of all adjustment racks.
Technique effect of the present invention is as follows:
1, the high-speed camera that adopts of the present invention is to the sampling and measuring of the light signal transmitted on optical element, obtains laser beam and points to and measure over time in level and vertical direction, can on-line measurement and do not affect the normal work of optical system; The focusing lens of high-speed camera are conducive to light signal and focus on, clearly project in the image acquisition element of high-speed camera.
2, the present invention adopt high-speed camera image acquisition time sample frequency high, record analysis frequency can be less than the picture signal of self sample frequency half.After the change in displacement component analysis of image signal level and vertical direction, show the both direction vibration characteristics of optical system light beam, obtain the vibration signals spectrograph feature causing beam-pointing to offset and respective affect size.
3, the present invention's degree of will speed up meter is for gathering the natural frequency equifrequent data of optical system light source or optical element adjustment rack, judges the vibration characteristics of adjustment rack intuitively, accurately, delicately.
4, vibration survey accelerometer and high-speed camera rapid data collection combine by the present invention, quick and precisely judge beam-pointing stability data and source of error.
5, the present invention is the beam-pointing stability diagnostic method based on electric method and optical method, make use of the advantage of two kinds of vibration measurement methods and avoid its shortcoming, the beam-pointing stability error that diagnosable the earth vibration, air turbulence, people or sports equipment produce optical system.There is the few compact conformation of element, optical path adjusting be convenient, measurement range is large, sensitivity and precision high, the advantage of data analysis simple and fast.
Accompanying drawing explanation
Fig. 1 is the schematic diagram of the diagnostic device of beam-pointing stability of the present invention.
Fig. 2 is a kind of diagnostic method of beam-pointing stability of the present invention under unknown light beam of light source pointing stability and the schematic diagram of device.
Embodiment
Below in conjunction with drawings and Examples, the invention will be further described.
As shown in Figure 1, the diagnostic method of the beam-pointing stability of optical system of the present invention, it is characterized in that, the method includes the steps of:
1) optical system is diagnosed to be that the helium-neon laser be placed on stable vibration-isolating platform sends wavelength 632.8nm incident laser, through optical element onwards transmission such as multiple reflection or transmissions, by on each adjustment rack of diagnosis optical system, accelerometer 3 is being set, the output terminal of accelerometer 3 is connected with the input end of Acquisition Instrument 7, and the output terminal of this Acquisition Instrument 7 is connected with the first input end of computing machine 6; In the laser optical path that the transmission terminal of optical system exports, add sampling mirror 4, arrange high-speed camera 5 at the outbound course of the sampled light of this sampling mirror 4, the output terminal of this high-speed camera 5 is connected with the second input end of computing machine 6;
2) when the light source of optical system is not opened, the optical system accelerometer 3 of locating on the adjustment rack of each optical element obtains the vibration electrical signal of each adjustment rack respectively, computing machine 6 is inputted through Acquisition Instrument 7, computing machine 6 analysis obtains the spectrum signature of corresponding each adjustment rack, if the spectrum signature of adjustment rack does not have obvious frequency can be judged as the first natural frequency of this adjustment rack, change the accelerometer with larger frequency response range to continue to repeat this step, to obtain the spectrum signature of each adjustment rack;
3) light source of optical system is opened, the output beam sampling of described sampling mirror 4 pairs of optical systems, the laser signal of sampling is gathered by high-speed camera 5, computing machine described in several light spot images obtained are inputted, computing machine 6 is to after the image centroid gathered or center of gravity process, obtain image change in displacement data in time, i.e. the amplitude size of time domain inner light beam pointing stability error; Carry out Fourier transform to displacement data, obtain the spectrogram to the beam-pointing stability error that beam-pointing impacts, in spectrogram, different frequency has corresponding beam-pointing stability error amplitude, and some frequency places have obvious amplitude peak;
4) frequency of the obvious amplitude peak in the spectrum signature that the light beam image analysis described in obtains, the frequency near the natural frequency of each adjustment rack or natural frequency can be thought, the spectrum signature of the described adjustment rack that degree of will speed up meter (3) collection analysis obtains, particularly the frequency of its first natural frequency and described obvious amplitude peak is compared, and judges that the sequence number of the adjustment rack producing beam-pointing stability error and corresponding adjustment rack are to the size of beam-pointing stability influence.
High-speed camera 5 is observed the light spot image of high-speed camera 5 screen, is regulated its focusing lens lay location in sampling light path after, gathers and obtain several light spot images after rationally arranging the size of beam and focus image.The picture-taken frequency of the high-speed camera 5 that the embodiment of the present invention adopts is greater than 2000 hertz, so the present embodiment can analyze the spectrum signature that obtains impacting beam-pointing from 0 hertz to 1000 hertz, image acquisition quantity is 2000 width, and can meet is the requirement of experiment of optical system mostly.Computing machine 6, to after the image centroid gathered or center of gravity calculation process, obtains image in level and vertical direction change in displacement data in time, i.e. the amplitude size of beam-pointing stability error; Fourier transform process is carried out to both direction image centroid or displacement of center of gravity data, correspondingly can obtain the size degree of spectrum signature figure that level and vertical direction impact beam-pointing and each spectral contributions beam-pointing stability.
As analyzed the impact of foundation vibration on the beam-pointing of optical system, the adjustment rack of each optical element in location vertically installs accelerometer 3.In this example, accelerometer 3 adopts piezoelectric accelerometer, and its Hz-KHz can reach 1000 hertz.The vibration electrical signal of the acquisition of accelerometer is after the Acquisition Instrument 7 with electric charge collection enlarging function gathers, and input computing machine 6 analyzing and processing, namely obtains the respective tones spectrum signature, particularly first natural frequency of each adjustment rack after analysis.Different adjustment racks generally has different first natural frequency, and the first natural frequency of most of adjustment rack is less than 500 hertz, also gather the highest frequency 1000 hertz of the spectrum signature that image analysis obtains at high-speed camera high frequency within.The frequency comparison at the peak value place of the spectrogram that the natural frequency of the spectrum signature of each adjustment rack that degree of will speed up meter collection analysis obtains and image procossing obtain, judge the adjustment rack sequence number producing stability error, also know by the size degree of peak value the size degree affecting beam-pointing stability that this adjustment rack affects simultaneously.
In enforcement of the present invention, also can as Fig. 2, under the pointing stability unknown situation of light source, the adjustment rack of its positioned light source also can install accelerometer 3, equally with other adjustment racks carries out frequecy characteristic judgement equally.In checkout and diagnosis process, need not on all adjustment racks once property accelerometer 3 is all installed, on each adjustment rack, accelerometer 3 can be installed in turn, gather in turn and analytic signal, the frequecy characteristic of each adjustment rack of final acquisition, reduces implementation cost of the present invention to reduce the quantity of accelerometer 3.
The beam-pointing that method of the present invention can obtain optical system is measured over time, also can analyze causing the vibration signals spectrograph feature of beam deviation and respective affecting size; This optical method for measuring scope is large, precision and highly sensitive, and measurement result is more directly perceived, can quick and precisely judge beam-pointing stability data and source of error, has good engineer applied and is worth.

Claims (2)

1. a diagnostic method for the beam-pointing stability of optical system, it is characterized in that, the method includes the steps of:
1) accelerometer (3) is being set by each adjustment rack of the positioning optical components and parts of diagnosis optical system or device, the output terminal of accelerometer (3) is connected with the input end of Acquisition Instrument (7), and the output terminal of this Acquisition Instrument (7) is connected with the first input end of computing machine (6); Sampling mirror (4) is added in the laser optical path that the transmission terminal of optical system exports, arrange high-speed camera (5) at the outbound course of the sampled light of this sampling mirror (4), the output terminal of this high-speed camera (5) is connected with the second input end of computing machine (6);
2) when the light source of optical system is not opened, the adjustment rack (1) of optical system positioning optical element obtains the vibration electrical signal of each adjustment rack respectively to the accelerometer (3) on adjustment rack (n), through Acquisition Instrument (7) input computing machine (6), computing machine (6) analysis obtains the spectrum signature of corresponding each adjustment rack, if the spectrum signature of adjustment rack does not have obvious frequency can be judged as the first natural frequency of this adjustment rack, change the accelerometer with larger frequency response range to continue to repeat this step, to obtain the spectrum signature of each adjustment rack,
3) light source of optical system is opened, described sampling mirror (4) samples the output beam of optical system, the laser signal of sampling is gathered by high-speed camera (5), computing machine described in several light spot images obtained are inputted, computing machine (6) is to after the image centroid gathered or center of gravity process, obtain image change in displacement data in time, i.e. the amplitude size of time domain inner light beam pointing stability error; Carry out Fourier transform to displacement data, obtain the spectrogram to the beam-pointing stability error that beam-pointing impacts, in spectrogram, different frequency has corresponding beam-pointing stability error amplitude, and some frequency places have obvious amplitude peak;
4) frequency of the obvious amplitude peak in the spectrum signature that the light beam image analysis described in obtains, the frequency near the natural frequency of each adjustment rack or natural frequency can be thought, the spectrum signature of the described adjustment rack that degree of will speed up meter (3) collection analysis obtains, particularly the frequency of its first natural frequency and described obvious amplitude peak is compared, and judges that the sequence number of the adjustment rack producing beam-pointing stability error and corresponding adjustment rack are to the size of beam-pointing stability influence.
2. the diagnostic method of the beam-pointing stability of optical system according to claim 1, it is characterized in that high-speed camera (5) has focusing lens, can the image of high frequency recording light source, and its picture-taken frequency is greater than the twice of the maximum first natural frequency of all adjustment racks.
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Publication number Priority date Publication date Assignee Title
CN107452026A (en) * 2017-08-08 2017-12-08 何佳芮 A kind of processing system and its method for image spot barycenter
CN107449590A (en) * 2017-10-11 2017-12-08 长春理工大学 A kind of laser beam pointing stability measurement apparatus
CN107515101A (en) * 2017-09-04 2017-12-26 中国电子科技集团公司第四十研究所 The dynamic parameter calibrating installation and method of a kind of stab ilized electro-optical sight system stable measurement device
CN111429422A (en) * 2020-03-19 2020-07-17 中国工程物理研究院激光聚变研究中心 Laser near-field state analysis method and device based on deep learning

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CN102804053A (en) * 2009-06-11 2012-11-28 佳能株式会社 Image stabilization apparatus and image pickup apparatus
CN102879184A (en) * 2012-10-16 2013-01-16 哈尔滨工业大学 Screw-in type beam collimation detection unit and method
CN203688198U (en) * 2014-01-13 2014-07-02 维林光电(苏州)有限公司 Laser pointing stability test system

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Publication number Priority date Publication date Assignee Title
US20080043304A1 (en) * 2006-06-02 2008-02-21 Microzeus Llc Methods and systems for micro transmissions
CN102804053A (en) * 2009-06-11 2012-11-28 佳能株式会社 Image stabilization apparatus and image pickup apparatus
CN201583399U (en) * 2009-12-28 2010-09-15 核工业理化工程研究院华核新技术开发公司 Light beam pointing detection device
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CN203688198U (en) * 2014-01-13 2014-07-02 维林光电(苏州)有限公司 Laser pointing stability test system

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107452026A (en) * 2017-08-08 2017-12-08 何佳芮 A kind of processing system and its method for image spot barycenter
CN107515101A (en) * 2017-09-04 2017-12-26 中国电子科技集团公司第四十研究所 The dynamic parameter calibrating installation and method of a kind of stab ilized electro-optical sight system stable measurement device
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CN111429422A (en) * 2020-03-19 2020-07-17 中国工程物理研究院激光聚变研究中心 Laser near-field state analysis method and device based on deep learning

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