CN104440141A - Ultra precision positioning workbench with nanometer resolution - Google Patents
Ultra precision positioning workbench with nanometer resolution Download PDFInfo
- Publication number
- CN104440141A CN104440141A CN201310423958.7A CN201310423958A CN104440141A CN 104440141 A CN104440141 A CN 104440141A CN 201310423958 A CN201310423958 A CN 201310423958A CN 104440141 A CN104440141 A CN 104440141A
- Authority
- CN
- China
- Prior art keywords
- workbench
- computer
- ultra precision
- positioning
- nanometer resolution
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
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- 239000000919 ceramic Substances 0.000 claims abstract description 19
- 238000006073 displacement reaction Methods 0.000 claims abstract description 12
- 238000001514 detection method Methods 0.000 abstract 1
- 230000009977 dual effect Effects 0.000 abstract 1
- 238000005516 engineering process Methods 0.000 description 3
- 238000005259 measurement Methods 0.000 description 3
- 230000009286 beneficial effect Effects 0.000 description 2
- 238000004377 microelectronic Methods 0.000 description 2
- 238000010205 computational analysis Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000005461 lubrication Methods 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
- B23Q1/00—Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
- B23Q1/25—Movable or adjustable work or tool supports
- B23Q1/26—Movable or adjustable work or tool supports characterised by constructional features relating to the co-operation of relatively movable members; Means for preventing relative movement of such members
- B23Q1/34—Relative movement obtained by use of deformable elements, e.g. piezoelectric, magnetostrictive, elastic or thermally-dilatable elements
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Micromachines (AREA)
Abstract
The invention relates to a positioning workbench, in particular to an ultra precision positioning workbench with nanometer resolution. The ultra precision positioning workbench with the moving precision and positioning precision can be in the sub micron or even nanometer level. The workbench comprises a soft hinge workbench body and a piezoelectric ceramic micro displacement device and is characterized in that a dual frequency laser interferometer (SJD5) is adopted for detection, and a loop control system is obtained through a computer and a phase meter; digital signals are transmitted the computer and are converted and amplified through a D/A converter, the 0 to 1000V variable voltage with the step of 1 V is produced to drive the piezoelectric ceramic to stretch, and the piezoelectric ceramic drives the soft hinge workbench body to perform micro displacement.
Description
Technical field
the present invention relates to a kind of positioning table, especially relates to a kind of Ultra Precision Stages of nanometer resolution.
Background technology
21 century, nano measurement has demand widely, and such as, at microelectronic, the typical live width of 1999 is 180nm, will be 100nm to the typical live widths of 2006, and typical live width in 2009 will be 70nm.Positioning precision should be 1/3 ~ 1/4 of live width.At biological field, the yardstick of DNA is within the scope of 2 ~ 3nm.So micro-nano location technology has important application in microstoning, microelectronic engineering, bioengineering, field of nanometer technology.
traditional micro displacement workbench adopts accurate lead screw pair and the mechanical transmission-type micro-displacement drivers such as (or slip) guide rail, precision auger cotter mechanism, the recessed wheel mechanism of turbine, lever gear formula mechanism that roll.Due to mechanical friction, gap, the reason such as to creep, its kinematic accuracy, positioning precision are difficult to reach sub-micron even nanometer scale.
Summary of the invention
the present invention is exactly for the problems referred to above, provides a kind of kinematic accuracy, positioning precision can reach sub-micron even a kind of Ultra Precision Stages with nanometer resolution of nanometer scale.
to achieve these goals, the present invention adopts following technical scheme, main body of the present invention is made up of flexible hinge work bench and piezo-ceramic micro displacement unit, and its structural feature is: adopt two-frequency laser interferometer SJD5 to detect, jointly form closed-loop control system by computer and phasometer; Provide data signal by computer, change and amplify through D/A, generation 0 ~ 1000V, step-length are the variable voltage of 1V, drive piezoelectric ceramics to stretch, and then drive flexible hinge work bench to make micrometric displacement by piezoelectric ceramics.
as a kind of preferred version, control section adopts PC to control.
beneficial effect of the present invention.
the present invention adopts piezoelectric ceramics can be easy to realize high-resolution motion, and does not have the phenomenon such as backlash, stick-slip, becomes the micro-actuator of extensive use in micro-positioning.And flexure hinge mechanism has mechanical friction, gapless, does not need lubrication, does not produce the advantage such as heat and noise.Adopt the flexible hinge work bench of Piezoelectric Ceramic, there is direct-drive, compact conformation, lightweight, displacement resolution advantages of higher, have wide application development prospect.
Accompanying drawing explanation
for technical problem solved by the invention, technical scheme and beneficial effect are clearly understood, below in conjunction with the drawings and the specific embodiments, the present invention is further elaborated.Should be appreciated that detailed description of the invention described herein only in order to explain the present invention, be not intended to limit the present invention.
fig. 1 is principle of the invention block diagram.
Detailed description of the invention
as shown in the figure, main body of the present invention is made up of flexible hinge work bench and piezo-ceramic micro displacement unit, adopts two-frequency laser interferometer SJD5 to detect, jointly forms closed-loop control system by computer and phasometer; Provide data signal by computer, change and amplify through D/A, generation 0 ~ 1000V, step-length are the variable voltage of 1V, drive piezoelectric ceramics to stretch, and then drive flexible hinge work bench to make micrometric displacement by piezoelectric ceramics.
as a kind of preferred version, control section adopts PC to control.
the selection of micro-actuator-piezoelectric ceramics.
have employed piezoelectric ceramics PZT1 that Chinese Academy of Sciences's acoustics develops and the piezoelectric ceramics PZT2 that German PI Corp. early 1990s manufactures respectively as actuator.The range of these two kinds of PZT is all at about 5 μm, and driving voltage is 1000V.So average voltage often raises or reduces resolution ratio corresponding to 1V at about 5nm.Additionally use the piezoelectric ceramics PZT3 that Japan produces in addition, its maximum range is about 15 μm, corresponding to driving voltage 150V; If relatively low to positioning accuracy request, PZT3 can be used.So, in order to improve micrometric displacement resolution ratio further, must the flexible hinge work bench with certain speed reducing ratio be adopted.
the invention discloses a kind of Ultra Precision Stages had compared with big speed ratio, and theoretically computational analysis has been carried out to mechanical performances such as its rigidity.The motion positions characteristic of two-frequency laser interferometer to this positioning table with sub-nano measurement resolution ratio is adopted to measure.Under 1000V voltage driven, the Measurement Resolution that piezoelectric ceramics is formed by positioning table can reach 012 nm.
above content is the further description done the present invention in conjunction with concrete preferred embodiment; can not assert that specific embodiment of the invention is confined to these explanations; for general technical staff of the technical field of the invention; without departing from the inventive concept of the premise; some simple deduction or replace can also be made, all should be considered as belonging to the protection domain that claims that the present invention submits to are determined.
Claims (2)
1. there is the Ultra Precision Stages of nanometer resolution, main body of the present invention is made up of flexible hinge work bench and piezo-ceramic micro displacement unit, its structural feature is: adopt two-frequency laser interferometer SJD5 to detect, jointly form closed-loop control system by computer and phasometer; Provide data signal by computer, change and amplify through D/A, generation 0 ~ 1000V, step-length are the variable voltage of 1V, drive piezoelectric ceramics to stretch, and then drive flexible hinge work bench to make micrometric displacement by piezoelectric ceramics.
2. the Ultra Precision Stages with nanometer resolution according to claim 1, is characterized in that control section adopts PC to control.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310423958.7A CN104440141A (en) | 2013-09-17 | 2013-09-17 | Ultra precision positioning workbench with nanometer resolution |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310423958.7A CN104440141A (en) | 2013-09-17 | 2013-09-17 | Ultra precision positioning workbench with nanometer resolution |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN104440141A true CN104440141A (en) | 2015-03-25 |
Family
ID=52887304
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201310423958.7A Pending CN104440141A (en) | 2013-09-17 | 2013-09-17 | Ultra precision positioning workbench with nanometer resolution |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN104440141A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104793121A (en) * | 2015-04-23 | 2015-07-22 | 中国电子科技集团公司第四十一研究所 | Controllable high-frequency-response probe test moving device for microwave and millimeter wave chips |
| CN106767406A (en) * | 2016-12-20 | 2017-05-31 | 华南理工大学 | Micro-nano alignment system and its closed-loop On-Line Control Method to compliant mechanism platform |
-
2013
- 2013-09-17 CN CN201310423958.7A patent/CN104440141A/en active Pending
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104793121A (en) * | 2015-04-23 | 2015-07-22 | 中国电子科技集团公司第四十一研究所 | Controllable high-frequency-response probe test moving device for microwave and millimeter wave chips |
| CN104793121B (en) * | 2015-04-23 | 2017-11-17 | 中国电子科技集团公司第四十一研究所 | A kind of controllable high frequency sound probe test telecontrol equipment of microwave and millimeter wave chip |
| CN106767406A (en) * | 2016-12-20 | 2017-05-31 | 华南理工大学 | Micro-nano alignment system and its closed-loop On-Line Control Method to compliant mechanism platform |
| CN106767406B (en) * | 2016-12-20 | 2022-08-16 | 华南理工大学 | Micro-nano positioning system and full closed-loop online control method for compliant mechanism platform by micro-nano positioning system |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| WD01 | Invention patent application deemed withdrawn after publication |
Application publication date: 20150325 |
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| WD01 | Invention patent application deemed withdrawn after publication |