CN104419927A - 硬质合金刀具及其镀膜方法 - Google Patents
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- 229910052804 chromium Inorganic materials 0.000 claims description 20
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Abstract
本发明涉及一种硬质合金刀具及其增强硬质合金刀具的镀膜方法,特别是硬质合金刀具过渡层的制备方法,以最终实现在硬质合金刀具表面涂层金刚石膜。本发明的方法包括如下步骤:先在硬质合金刀具表面镀制TiC-Ti-Cr-CrC过渡层,作为镀制金刚石涂层的过渡层;上述硬质合金刀具经丙酮清洗脱水后,放入化学气相沉积金刚石生长设备中进行金刚石涂层。利用本方法镀制的硬质合金刀具的表面镀有TiC-Ti-Cr-CrC过渡层,在TiC-Ti-Cr-CrC过渡层上镀有金刚石涂层,所述TiC-Ti-Cr-CrC过渡层厚度为2-3um;通过过渡层的镀制,保证了硬质合金刀具进行金刚石涂层的可行性,为提高硬质合金刀具的性能提供了工艺保证。
Description
技术领域
本发明涉及合金刀具,尤其是涉及一种表面涂层金刚石膜的硬质合金刀具以及增强硬质合金刀具性能的镀膜方法。
背景技术
本发明是把物理气相沉积(PVD)多弧离子镀技术和化学气相沉积(CVD)金刚石制备技术结合在一起的一种新技术,可简称为PCVD复合涂层技术。物理气相沉积多弧离子镀技术是一种设有1个或多个可同时蒸发离化难熔金属材料的镀膜技术,具有镀膜速度快,膜层组织致密,附着力好,均匀性好的特点。热丝化学气相沉积金刚石技术是利用热丝(钨丝或钽丝)产生的高温(2200℃左右),将CH4H2混合气体激发,得到大量反应粒子,这些粒子经吸附、脱附等过程而进入气相形成等离子体,经过一系列复杂的化学反应到达基台表面,在适宜条件下形成了金刚石膜。具有技术成熟,设备操作简单,生产成本低,膜层质量好的特点。
因为YG系列或YT系列硬质合金一般含有6-8%的钴,用化学气相沉积方法在这类刀具上进行金刚石涂层时,因为钴的析出导致成膜困难或膜层结合力很差。要解决这一难题,主要措施是去除硬质合金材料中的钴。现在去除钴的方法一般是化学法,即用酸脱钴,因为此法破坏了硬质合金的基体成分,刀具基体受到很大损伤,降低了刀体的强度,即使能够涂层金刚石,意义也不是很大,因此未能推广。
发明内容
本发明的目的是提出一种基于金刚石涂层的硬质合金刀具以及该金刚石涂层的制备方法,能够大幅度提高刀具的耐磨性,加工效率和使用寿命。
为了实现本发明的目的,提出如下技术方案:
一种硬质合金刀具,所述硬质合金刀具的表面镀有TiC-Ti-Cr-CrC过渡层,在TiC-Ti-Cr-CrC过渡层上镀有金刚石涂层。
所述TiC-Ti-Cr-CrC过渡层厚度为2-3um,且最后一层CrC厚度为0.2-0.3um,保护Cr涂层在空气中不被氧化,保证在化学气相沉积设备中镀制金刚石涂层时易被活化。
本发明还提出一种硬质合金刀具镀膜方法,所述方法包括如下步骤:
1)先在硬质合金刀具表面镀制TiC-Ti-Cr-CrC过渡层,作为镀制金刚石涂层的过渡层;
2)上述硬质合金刀具经丙酮清洗脱水后,放入化学气相沉积金刚石生长设备中进行金刚石涂层。
在所述步骤1)中,所述TiC-Ti-Cr-CrC过渡层具体镀制方法如下:
1.1) Ti、Cr靶材的制备:Ti采用高纯海绵钛(纯度99.99%),Cr选用高纯铬(纯度99.99%),加工成直径120MM,长200MM的柱形靶。
1.2) 碳源准备:采用40L瓶装高纯甲烷,纯度5N(99.999%),作为碳源。
1.3)用物理气相沉积方法制备:把经超声波清洗的并经干燥脱水的硬质合金刀具放入物理气相沉积设备的真空室,抽真空达到1×10-1Pa时,开启电弧源,进行离子轰击,清洗硬质合金刀具表面2-3分钟,轰击偏压从400V降至250V,钛靶和铬靶的弧电源保持在60A,先打开钛靶电源,同时打开甲烷进气流量计,流量为150SDDM,镀膜时间10-15分钟;然后关闭甲烷流量计,继续开动钛靶弧电源5分钟,然后关闭钛靶弧电源,同时开动铬靶弧电源,10分钟后开动甲烷流量计,流量100SDDM,5分钟后关闭流量计和铬靶弧电源。使真空室缓慢冷却,1.5小时后取出样品;这样,在硬质合金刀具表面就镀制了一层厚度为2-3um的TiC-Ti-Cr-CrC过渡层。
在所述步骤2)中,所述金刚石涂层的具体步骤包括:
2.1)把镀有TiC-Ti-Cr-CrC过渡层的硬质合金刀具放入化学气相沉积金刚石生长设备的真空室,使刀具顶端距离电阻丝3mm-4mm;
2.2)打开冷却水系统,先抽真空到10托,然后打开热丝电源,缓慢加电流,电流达到600A时,打开氢气质量流量计,流量为900-1000SDDM;
2.3)3分钟后打开甲烷质量流量计,流量为150-200SDDM,2小时后减小电流,关闭甲烷流量计,20分钟后电流为零,此时关闭氢气流量计,保持冷却系统正常运转;
2.4)1-1.5小时后关闭冷却系统,打开真空室门,取出刀具,如此在硬质合金刀具表面镀制一层厚度为15-20um的金刚石膜。
本发明确定了用PVD方法先在硬质合金刀具上镀制TiC-Ti-Cr-CrC膜作为过渡层,然后再用CVD方法进行金刚石涂层的方法。确定了靶材的成分和制备方法,确定了PVD涂层的工艺参数,避免了膜层因升温过快引起的内应力过大而发生爆裂或脱落现象,使膜层与基体之间具有很好的附着力。本发明通过过渡层的镀制,保证了硬质合金刀具进行金刚石涂层的可行性,为提高硬质合金刀具的性能提供了工艺保证。
具体实施方式
为使本发明的目的、技术方案和优点更加清楚明白,以下结合具体实施例,对本发明进一步详细说明。
本方法是先在硬质合金刀具上用物理气相沉积方法镀TiC-Ti-Cr-CrC膜作为过渡层,然后再进行CVD金刚石涂层。其原理是:钛和铬都是强碳化物形成材料,特别是TiC与基体硬质合金(WC基、TiC基)、Cr(或同时含有微量CrC)和金刚石均具有良好的浸润性和结合力,可以消除薄膜与基底因晶格失配,热膨胀系数差异而造成的内应力,既可以防止碳过度渗入基底,又可以防止钴从基体深处向表面扩散。在这样的过渡层上再进行CVD金刚石涂层,既能保证硬质合金刀具原有的强度和锋利度,又可以通过金刚石涂层,大幅度提高刀具的耐磨性,加工效率和使用寿命。
所述TiC-Ti-Cr-CrC过渡层厚度为2-3um,且最后一层CrC厚度只有0.2-0.3um,目的是既可保护Cr涂层在空气中不被氧化,又可保证在化学气相沉积设备中镀制金刚石膜时容易被活化。
实例1:
柄径∮3.175mm立铣刀,全长38mm,材质:YG6硬质合金。经除油、超声波清洗、烘干后,立式放入真空室中的盘式夹具上。抽真空,真空度达到1×10-1Pa时,开启电弧源,进行离子轰击,清洗刀具表面3分钟,轰击偏压从401V降至248V,钛靶和铬靶的弧电源保持在60A,先打开钛靶电源,同时打开甲烷进气流量计,流量为145SDDM,镀膜时间11分钟;然后关闭甲烷流量计,继续开动钛靶弧电源5分钟,然后关闭钛靶弧电源,同时开动铬靶弧电源,9分钟后开动甲烷流量计,流量102SDDM,5分钟后关闭流量计和铬靶弧电源。使真空室缓慢冷却,1.2小时后取出样品;这样,在硬质合金刀具表面就镀制了一层厚度为2.1um的TiC-Ti-Cr-CrC过渡层。上述硬质合金刀具经丙酮清洗脱水后再放入化学气相沉积金刚石生长设备中进行金刚石涂层,即可得到具有TiC-Ti-Cr-CrC过渡层的硬质合金刀具。
实例2:
柄径∮2.5mm钻头 全长38mm,材质:YG8硬质合金。经除油、超声波清洗、烘干后,立式放入真空室中的盘式夹具上。抽真空,真空度达到1×10-1Pa时,开启电弧源,进行离子轰击,清洗刀具表面2.5分钟,轰击偏压从400V降至251V,钛靶和铬靶的弧电源保持在59A,先打开钛靶电源,同时打开甲烷进气流量计,流量为148SDDM,镀膜时间12分钟;然后关闭甲烷流量计,继续开动钛靶弧电源6分钟,然后关闭钛靶弧电源,同时开动铬靶弧电源,8分钟后开动甲烷流量计,流量99SDDM,5分钟后关闭流量计和铬靶弧电源。使真空室缓慢冷却,1.5小时后取出样品;这样,在硬质合金刀具表面就镀制了一层厚度为2.2um的TiC-Ti-Cr-CrC过渡层。上述硬质合金刀具经丙酮清洗脱水后再放入化学气相沉积金刚石生长设备中进行金刚石涂层,即可得到具有TiC-Ti-Cr-CrC过渡层的硬质合金刀具。
实例3:
可转位刀片,规格:13 mm *13 mm *5 mm,材质:YG8硬质合金。经除油、超声波清洗、烘干后,立式放入真空室中的旋转夹具上。抽真空,真空度达到1×10-1Pa时,开启电弧源,进行离子轰击,清洗刀具表面2分钟,轰击偏压从395V降至250V,钛靶和铬靶的弧电源保持在65A,先打开钛靶电源,同时打开甲烷进气流量计,流量为151SDDM,镀膜时间15分钟;然后关闭甲烷流量计,继续开动钛靶弧电源5分钟,然后关闭钛靶弧电源,同时开动铬靶弧电源,10分钟后开动甲烷流量计,流量103SDDM,6分钟后关闭流量计和铬靶弧电源。使真空室缓慢冷却,1.5小时后取出样品;这样,在硬质合金刀具表面就镀制了一层厚度为2.6um的TiC-Ti-Cr-CrC过渡层。上述硬质合金刀具经丙酮清洗脱水后再放入化学气相沉积金刚石生长设备中进行金刚石涂层,即可得到具有TiC-Ti-Cr-CrC过渡层的硬质合金刀具。
以上所述的具体实施例,对本发明的目的、技术方案和有益效果进行了进一步的详细说明,所应理解的是,以上所述仅为本发明的具体实施例而已,并不用于限制本发明,凡在本发明的精神和原则之内,所做的任何修改、等同替换、改进等,均应包含在本发明的保护范围之内。
Claims (5)
1.一种硬质合金刀具,其特征在于:所述硬质合金刀具的表面镀有TiC-Ti-Cr-CrC过渡层,在TiC-Ti-Cr-CrC过渡层上镀有金刚石涂层。
2.根据权利要求1所述的硬质合金刀具,其特征在于:所述TiC-Ti-Cr-CrC过渡层厚度为2-3um,且最后一层CrC厚度为0.2-0.3um,保护Cr涂层在空气中不被氧化,保证在化学气相沉积设备中镀制金刚石涂层时易被活化。
3.一种硬质合金刀具镀膜方法,其特征在于,所述方法包括如下步骤:
1)先在硬质合金刀具表面镀制TiC-Ti-Cr-CrC过渡层,作为镀制金刚石涂层的过渡层;
2)上述硬质合金刀具经丙酮清洗脱水后,放入化学气相沉积金刚石生长设备中进行金刚石涂层。
4.根据权利要求3所述的硬质合金刀具镀膜方法,其特征在于,所述步骤1)中,所述TiC-Ti-Cr-CrC过渡层具体镀制方法如下:
1.1) Ti、Cr靶材的制备:Ti采用高纯海绵钛(纯度99.99%),Cr选用高纯铬(纯度99.99%),加工成直径120MM,长200MM的柱形靶;
1.2) 碳源准备:采用40L瓶装高纯甲烷,纯度5N(99.999%),作为碳源;
1.3)用物理气相沉积方法制备:把经超声波清洗的并经干燥脱水的硬质合金刀具放入物理气相沉积设备的真空室,抽真空达到1×10-1Pa时,开启电弧源,进行离子轰击,清洗硬质合金刀具表面2-3分钟,轰击偏压从400V降至250V,钛靶和铬靶的弧电源保持在60A,先打开钛靶电源,同时打开甲烷进气流量计,流量为150SDDM,镀膜时间10-15分钟;然后关闭甲烷流量计,继续开动钛靶弧电源5分钟,然后关闭钛靶弧电源,同时开动铬靶弧电源,10分钟后开动甲烷流量计,流量100SDDM,5分钟后关闭流量计和铬靶弧电源;使真空室缓慢冷却,1.5小时后取出样品;这样,在硬质合金刀具表面就镀制了一层厚度为2-3um的TiC-Ti-Cr-CrC过渡层。
5.根据权利要求4所述的硬质合金刀具镀膜方法,其特征在于,在所述步骤2)中,所述金刚石涂层的具体步骤包括:
2.1)把镀有TiC-Ti-Cr-CrC过渡层的硬质合金刀具放入化学气相沉积金刚石生长设备的真空室,使刀具顶端距离电阻丝3mm-4mm;
2.2)打开冷却水系统,先抽真空到10托,然后打开热丝电源,缓慢加电流,电流达到600A时,打开氢气质量流量计,流量为900-1000SDDM;
2.3)3分钟后打开甲烷质量流量计,流量为150-200SDDM,2小时后减小电流,关闭甲烷流量计,20分钟后电流为零,此时关闭氢气流量计,保持冷却系统正常运转;
2.4)1-1.5小时后关闭冷却系统,打开真空室门,取出刀具,如此在硬质合金刀具表面镀制一层厚度为15-20um的金刚石膜。
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CN106637130A (zh) * | 2016-12-29 | 2017-05-10 | 东莞市吉和金属制品有限公司 | 一种硬质合金刀片及其制备方法 |
CN110055512A (zh) * | 2019-06-10 | 2019-07-26 | 北华航天工业学院 | 一种铝镁合金镀膜方法 |
CN110319796A (zh) * | 2019-06-20 | 2019-10-11 | 东南大学 | 一种检测镀钛金刚石颗粒表面镀层厚度的方法 |
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Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE10226724A1 (de) * | 2001-06-15 | 2003-01-02 | Fraunhofer Ges Forschung | Laserkristall mit einer Kühlstruktur, Verfahren zum Herstellen eines Laserkristalls mit einer Kühlstruktur sowie Verwendung eines solchen Laserkristalls |
CN101831651A (zh) * | 2010-05-25 | 2010-09-15 | 晏双利 | 一种硬质合金刀具镀膜方法及刀具 |
-
2013
- 2013-09-10 CN CN201310407881.4A patent/CN104419927B/zh not_active Expired - Fee Related
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE10226724A1 (de) * | 2001-06-15 | 2003-01-02 | Fraunhofer Ges Forschung | Laserkristall mit einer Kühlstruktur, Verfahren zum Herstellen eines Laserkristalls mit einer Kühlstruktur sowie Verwendung eines solchen Laserkristalls |
CN101831651A (zh) * | 2010-05-25 | 2010-09-15 | 晏双利 | 一种硬质合金刀具镀膜方法及刀具 |
Non-Patent Citations (2)
Title |
---|
《当代中国有色金属工业》编委员: "《新中国有色金属硬质合金工业》", 31 December 1987 * |
黎向锋等: ""通过过渡层改善金刚石膜和基底间的结合性能"", 《材料开发与应用》 * |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN106637130A (zh) * | 2016-12-29 | 2017-05-10 | 东莞市吉和金属制品有限公司 | 一种硬质合金刀片及其制备方法 |
CN110055512A (zh) * | 2019-06-10 | 2019-07-26 | 北华航天工业学院 | 一种铝镁合金镀膜方法 |
CN110319796A (zh) * | 2019-06-20 | 2019-10-11 | 东南大学 | 一种检测镀钛金刚石颗粒表面镀层厚度的方法 |
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