CN104410382A - Vibration reed, vibrator, oscillator and electronic device - Google Patents
Vibration reed, vibrator, oscillator and electronic device Download PDFInfo
- Publication number
- CN104410382A CN104410382A CN201410659202.7A CN201410659202A CN104410382A CN 104410382 A CN104410382 A CN 104410382A CN 201410659202 A CN201410659202 A CN 201410659202A CN 104410382 A CN104410382 A CN 104410382A
- Authority
- CN
- China
- Prior art keywords
- shaker arm
- arm
- vibrating reed
- shaker
- carrier
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Abstract
A vibrating reed includes: a base; at least one vibrating arm extending from the base; at least one support arm extending from the base, and at least a part of which extends in parallel to the vibrating arm; and at least one receiving section formed of a part of the support arm, the part extending to have a shape of a projection so that a distance from the vibrating arm is reduced.
Description
The application is, the divisional application that application number is 201010286678.2, the applying date is on September 17th, 2010, denomination of invention is the application for a patent for invention of vibrating reed, oscillator, oscillator and electronic instrument.
Technical field
The present invention relates to the electronic instrument of vibrating reed, oscillator, oscillator and these elements of use such as a kind of piezoelectric vibration piece be such as made up of piezoelectric.
Background technology
In the past, carry out in the vibrating reed vibrated utilizing beam mode and other vibration modes, widely use a kind of tuning-fork type piezoelectric vibrating pieces, a pair shaker arm extends in parallel from the base portion of the base material be such as made up of piezoelectrics such as crystals by this tuning-fork type piezoelectric vibrating pieces, and make its in the horizontal direction towards close to each other or away from direction vibrate.The various products of the vibrating device of this vibrating reed are installed, the information instrument that such as HDD (hard disk drive), removable computer or IC-card etc. are small-sized; With mobile communication instruments such as mobile phone, car phone or calling systems; And oscillatory type gyrosensor etc., the miniaturization of these products is being showing improvement or progress day by day, also need thereupon vibrating device and the vibrating reed that is housed in this vibrating device more miniaturized.
And, other miniaturized problems also comprise: when making the shaker arm of vibrating reed vibrate, can produce the loss of vibrational energy, this is the reason of the hydraulic performance decline causing the increase of CI (crystal impedance Crystal Impedance) value and the lower degradation vibrating reed of Q value.Therefore, while realizing vibrating reed miniaturization, further prevent or reduce the loss of vibrational energy, people have found out various method all the time.Such as there will be a known a kind of tuning-fork-type quartz crystal resonator element (such as with reference to patent documentation 1), this tuning-fork-type quartz crystal resonator element arranges elongated slot on the interarea of shaker arm, and the two side portions of the base portion extended at shaker arm forms notch or has the otch (groove of the notch) of certain depth.
To the tuning-fork-type quartz crystal resonator element described in patent documentation 1, be specifically described with reference to accompanying drawing.Fig. 8 is, represents the vertical view of the tuning-fork-type quartz crystal resonator element as one of existing vibrating reed example.
In fig. 8, tuning-fork-type quartz crystal resonator element 100 has: base portion 121, and it is formed by crystal; A pair shaker arm 122, it extends parallel to each other from the one end portion of this base portion 121.Two interareas that each shaker arm 122 has this shaker arm 122 and two sides be connected with described two interareas, and on each shaker arm 122, long side direction along this shaker arm 122 is also provided with the elongated slot 126 with bottom, and this elongated slot 126 at least one interarea in two interareas has peristome.In addition, although do not illustrate, in the region comprising elongated slot 126, the exciting electrode for making shaker arm 122 vibrate is provided with.
And, on another side (both sides) in the vertical direction of the end side of extending shaker arm 122 with base portion 121, on opposed direction, form pair of notches 141A, 141B along straight line, to occur by the shape of constriction on two interareas of this base portion 121 with this.Base portion 121 comprises: Part I 121a and Part II 121b, and described Part I 121a and Part II 121b is across pair of notches 141A, 141B and be positioned at its both sides; Coupling part 121c, it for connecting Part I 121a and Part II 121b between pair of notches 141A, 141B.In Part II 121b, be provided with the not shown external connecting electrode carrying out with external substrate such as shells being electrically connected.Tuning-fork-type quartz crystal resonator element 100 is using the Part II 121b of its base portion 121 as fixed part, and is combinedly fixed in the external substrate such as such as shell, realizes being electrically connected with external substrate simultaneously.
Due to this tuning-fork-type quartz crystal resonator element 100, by arranging elongated slot 126 in each shaker arm 122, thus making shaker arm 122 be easy to vibration effectively to vibrate, vibration loss can be made to reduce so have and CI value is suppressed the characteristic at reduced levels.
And, when the vibration of shaker arm 122 also comprises the composition of vertical direction, due to pair of notches 141A, 141B by being arranged on base portion 121, cut off the Vibration propagation of each shaker arm 122, so can suppress to vibrate the so-called leakage of vibration of externally being propagated by base portion 121, while there is the effect preventing CI value from rising, prevent the deviation of the CI value between each shaker arm 122.
Prior art
Patent documentation 1: Japanese Unexamined Patent Publication 2002-280870 publication.
Summary of the invention
Invent problem to be solved
But, in the tuning-fork-type quartz crystal resonator element 100 described in patent documentation 1, there is following problem, namely, because being formed in otch 141A, the 141B on base portion 121, and the rigidity of base portion 121 being declined and the problem causing resistance to impact to decline.
Specifically, in the tuning-fork-type quartz crystal resonator element 100 shown in Fig. 8, when applying predetermined driving voltage to exciting electrode, each shaker arm 122, in the horizontal direction in the drawings shown in arrow towards close to each other or away from direction vibrate.On the direction identical with this direction of vibration, when applying to make shaker arm 122 produce the impact of larger displacement to tuning-fork-type quartz crystal resonator element 100, produce larger stress in the local of base portion 121 side.Namely, when being made by the Part II 121b of base portion 121 front of each shaker arm 122 produce larger displacement as stiff end, in pair of notches 141A, 141B, stress concentrates on the leading section 142B place with the leading section 142A of the otch 141A of the direction of displacement opposite side of shaker arm 122 or otch 141B.Particularly when crystal, due to more weak to the mechanical strength of tensile stress, so such as to tuning-fork-type quartz crystal resonator element 100 apply can make shaker arm 122 in the drawings arrow+X-direction (left direction) produce the impact of larger displacement when, to base portion 121 in the drawings-the leading section 142B of the otch 141B of X-direction (right direction) can be subject to larger tensile stress, thus may produce crack or breakage.
For solving the method for problem
The present invention completes to solve above-mentioned problem at least partially, and can be realized by following execution mode or application examples.
[application examples 1]
Should the feature of vibrating reed involved by use-case be, it possesses: base portion; Shaker arm, it extends from described base portion; Supporting arm, it extends from described base portion, and parallelly with described shaker arm at least partially extends; Carrier, it is to make the mode of the narrower intervals between described supporting arm and described shaker arm, is extended and formed by a part for described supporting arm with overshooting shape.
According to this structure, it is the carrier of overshooting shape because being extended by a part for supporting arm, arrange in the mode of the narrower intervals between shaker arm, so when applying impact to vibrating reed and waiting thus make the displacement of shaker arm exceed the amplitude range of vibration usually, the displacement of shaker arm front is limited by carrier, so the increase to the stress that the root of shaker arm base portion applies can be suppressed, and can the generation of crackle preventing and the fault such as damaged.
[application examples 2]
The feature of the vibrating reed involved by above-mentioned application examples is, described carrier and described shaker arm facing, and be arranged on outside amplitude range when causing described shaker arm to vibrate by the electric field applied from outside, and on the position contacted with described shaker arm when the displacement of described shaker arm exceedes described amplitude range.
According to this structure, when applying impact to vibrating reed and waiting thus make the displacement of shaker arm exceed the amplitude range of vibration usually, because the displacement of shaker arm front is limited by carrier, so suppress the increase of the stress being applied in root between shaker arm and base portion, can the generation of crackle preventing and the fault such as damaged.
[application examples 3]
The feature of the vibrating reed involved by above-mentioned application examples is, described carrier is arranged on the front of described supporting arm.
According to this structure, when applying impact to vibrating reed and waiting thus make the displacement of shaker arm exceed the amplitude range of vibration usually, because the displacement of shaker arm front is limited by carrier, so the increase of the stress of the root be applied between shaker arm and base portion can be suppressed, and can the generation of crackle preventing and the fault such as damaged.And, because possess the supporting arm being provided with carrier in front end, so by using this supporting arm to be engaged the outsides such as vibrating reed and shell, thus shaker arm and base portion can be made to be maintained at outside with quick condition, therefore, it is possible to prevent the Vibration propagation because of shaker arm from leaking to base portion, or unwanted vibration is propagated to shaker arm by base portion and causes the phenomenon of vibration characteristics instability.Therefore, it is possible to provide a kind of there is stable vibration characteristics while, also there is the vibrating reed of good resistance to impact.
[application examples 4]
The feature of the vibrating reed involved by above-mentioned application examples is, described supporting arm is provided with multiple described carrier, described carrier is configured to, and contacts with the multiple positions on the length direction of described shaker arm when described shaker arm produces described flexural deformation.
According to this structure, when shaker arm produces flexural deformation, be arranged on the multiple carriers on supporting arm, contact in multiple position with shaker arm.Therefore, it is possible to prevent from or relax when shaker arm and carrier contact applying to impact to the local of shaker arm.
[application examples 5]
The feature of the vibrating reed involved by above-mentioned application examples is, described shaker arm has two interareas and two sides, described two sides connect described two interareas and length direction to described shaker arm extends, and, described shaker arm is provided with along the described length direction of described shaker arm the elongated slot with bottom, described elongated slot at least one interarea in described two interareas has peristome, described carrier is set to, when described shaker arm produces the displacement of described amplitude range when exceeding vibration usually and causes described shaker arm to contact with described carrier, with the abutment portion of described shaker arm in described carrier, be positioned on the position of side more forward than the region being formed with described elongated slot.
According to this structure, effectively vibrate owing to being made shaker arm be easy to mobile by elongated slot, thus inhibit the increase of CI value, and the shaker arm when the displacement of shaker arm is limited by carrier and the abutment portion of carrier, be configured in and be positioned at the part higher than the rigidity of the more forward side, region forming shaker arm elongated slot, so the breakage of shaker arm can be suppressed.
[application examples 6]
The feature of the vibrating reed involved by above-mentioned application examples is, on the front of described shaker arm, be provided with the hammer portion that width is wider than the described base portion side of described shaker arm, when causing described shaker arm to contact with described carrier when the displacement described shaker arm producing described amplitude range when exceeding vibration usually, be configured to the abutment portion of described shaker arm in described carrier, contact with described hammer portion.
According to this structure, due to the wider width as shaker arm part and the side with the hammer portion of higher-strength becomes the abutment portion with carrier, so can suppress the damage of shaker arm and can improve the resistance to impact of vibrating reed.
[application examples 7]
The feature of the vibrating reed involved by above-mentioned application examples is, the described abutment portion of described carrier is configured to, and carries out face contact with the side in the described hammer portion of described shaker arm.
Such as, when the abutment portion in the bight with carrier that are configured to the shaker arm formed by hammer portion contacts, can prevent the surge caused because of bight from concentrating thus cause a part for bight and carrier to produce breakage, and the resistance to impact of vibrating reed can be improved.
[application examples 8]
The feature of the vibrating reed involved by above-mentioned application examples is, described supporting arm has the part that between described two sides than described shaker arm, the thinnest width is partly thinner.
According to this structure, bend because supporting arm is easier than shaker arm, a kind of shaker arm that not only prevented the damage that shaker arm is applied can be relaxed, so can be provided damaged but also have the vibrating reed of higher resistance to impact when the carrier of shaker arm and supporting arm collides.
[application examples 9]
The feature of the vibrating reed involved by above-mentioned application examples is, described carrier is formed, and its width is less than the width of the described base portion side of described supporting arm.
According to this structure, owing to having the front of the supporting arm of carrier, easilier than the base portion side of supporting arm to bend, the damage that shaker arm is applied can be relaxed when the carrier of shaker arm and supporting arm collides, so the breakage of shaker arm can be prevented, and the resistance to impact of vibrating reed can be improved.
[application examples 10]
The feature of the vibrating reed involved by above-mentioned application examples is, described vibrating reed is the piezoelectric vibration piece formed by piezoelectric.
According to this structure, a kind of resistance to impact can be provided higher and there is the piezoelectric vibration pieces such as the quartz crystal resonator element of excellent vibration characteristics.
[application examples 11]
The feature of the vibrating reed involved by above-mentioned application examples is, crystal is used as described piezoelectric, described base portion has pair of notches, this pair of notches is arranged on respectively, described crystal by X-axis, along on the rightabout of the straight line of X-direction in the orthogonal coordinate system that Y-axis and Z axis form, occur by the shape of constriction with this on two interareas of this base portion, described shaker arm extends from an end of the Y direction of described base portion to Y direction, at least on the+X side of described shaker arm, be provided with the described supporting arm possessing described carrier.
Although crystal is widely used in the piezoelectric of piezoelectric vibration piece, but shown in structure described above, when forming otch along X-direction in the orthogonal coordinate system by corrosion at crystallographic axis, because of the etching anisotropy relative to quartz wafer, carry out from-X side the formation of otch machining otch inwall leading section (bight) on, will produce undesirable hole portion and corrosion residual part, namely form so-called fin.When applying to impact to vibrating reed, the fin of this otch can cause be full of cracks, fracture, and particularly when applying tensile stress to fin, the fin of this otch is the main cause causing significant deterioration in strength.
According to the structure of above-mentioned application examples, in the vibrating reed formed by crystal, from produce fin-X-direction otch opposition side (+X-direction) base portion end in extend supporting arm, in the front end of this supporting arm, there is carrier.Therefore, owing to being formed with carrier, this carrier for being limited in, direction fin being applied to tensile stress produces the movement of the shaker arm of displacement, so especially can improve for the resistance to impact on the direction of displacement that resistance to impact is more weak.And, form supporting arm with the end from opposite side, and the structure forming carrier further on this supporting arm is compared, only form the structure with the supporting arm of carrier from a side end of base portion, the more miniaturized of vibrating reed can be reached.
[application examples 12]
The feature of the vibrating reed involved by above-mentioned application examples is, described abutment portion is provided with damping of shocks component.
According to this structure, because reduce impact when shaker arm and carrier collide by damping of shocks component, so shaker arm can be suppressed to produce breach, breakage.
[application examples 13]
Should the feature of oscillator involved by use-case be, it possesses: the vibrating reed in above-mentioned application examples described in any one; Shell, it is for receiving described vibrating reed.
According to this structure, because possess the vibrating reed described in above-mentioned application examples, so can provide a kind of there is stable vibration characteristics, and the oscillator that resistance to impact is higher.
[application examples 14]
The feature of oscillator involved by use-case should be to possess: the vibrating reed in above-mentioned application examples described in any one; Circuit element, it has the oscillating circuit for making described vibrating reed vibrate; Shell, it is for receiving described vibrating reed and described circuit element.
According to this structure, because possess the vibrating reed described in above-mentioned application examples, so can provide a kind of there is stable vibration characteristics, and the oscillator that resistance to impact is higher.
[application examples 15]
Should the feature of electronic instrument involved by use-case be, it possesses: any one in the vibrating reed in above-mentioned application examples described in any one, the oscillator described in above-mentioned application examples or the oscillator described in above-mentioned application examples.
According to this structure, a kind of stability of characteristics can be provided, and the electronic instrument of resistance to impact can be guaranteed.
[application examples 16]
Should the feature of vibrating reed involved by use-case be, it possesses: base portion; Shaker arm, its one end portion from described base portion extends; Supporting arm, its other end part from described base portion extends, and parallelly with described shaker arm at least partially extends; Also possesses the carrier on the front being arranged on described supporting arm, outside amplitude range when described carrier is configured in the usual vibration of described shaker arm, and on the position contacted with described shaker arm when the displacement being configured in described shaker arm exceedes the described amplitude range of described usual vibration.
According to this structure, when applying impact to vibrating reed and waiting thus make the displacement of shaker arm exceed the amplitude range of vibration usually, because the distortion of the front of shaker arm is limited by carrier, so the stress of the root portion be applied between shaker arm and base portion can be suppressed to increase, and can the generation of crackle preventing and the fault such as damaged.And, because possess the supporting arm in its front end with carrier, so make vibrating reed engage with outsides such as shells by utilizing this supporting arm, outside is maintained at quick condition due to shaker arm and base portion can be made, so can prevent the vibration because of shaker arm from propagating to base portion and leaking, or the vibration characteristics that unwanted vibration is propagated to shaker arm by base portion and caused is unstable.Therefore, it is possible to provide a kind of there is stable vibration characteristics while, also there is the vibrating reed of good resistance to impact.
Accompanying drawing explanation
Fig. 1 is, illustrates from vertical view as the quartz crystal resonator element of the vibrating reed of the first execution mode of the interarea unilateral observation of a side for medelling.
Fig. 2 is, for medelling, the schematic diagram in the cross section of each several part of quartz crystal resonator element, the cutaway view of the a-a line that (a) is Fig. 1, the cutaway view of the c-c line that (b) is Fig. 1, the cutaway view of the b-b line that (c) is Fig. 1 is described.
Fig. 3 is, observes the partial enlarged drawing of a part for shaker arm side from the arrow E direction of Fig. 1.
Fig. 4 is, for medelling, the vertical view of the Change Example of the quartz crystal resonator element as vibrating reed is described.
Fig. 5 is, for medelling, the vertical view of the quartz crystal resonator element of the vibrating reed as the second execution mode is described.
Fig. 6 is, represent the schematic diagram of the schematic configuration of the oscillator of the 3rd execution mode, Fig. 6 (a) is vertical view, and Fig. 6 (b) is the cutaway view of the F-F line along Fig. 6 (a).
Fig. 7 is, represent the schematic diagram of the schematic configuration of the oscillator of the 4th execution mode, Fig. 7 (a) is vertical view, and Fig. 7 (b) is the cutaway view of the G-G line along Fig. 7 (a).
Fig. 8 is, medelling earth's surface is shown as the vertical view of the tuning-fork-type quartz crystal resonator element into existing vibrating reed.
Symbol description
20,50 as the quartz crystal resonator element of vibrating reed
21,121 base portions
21a, 121a Part I
21b, 121b Part II
21c, 121c coupling part
22,122 shaker arms
26a, 26b, 126 elongated slots
27 bights
29 hammer portions
30,30b supporting arm
31,31b bend
32 wide portions
33 narrow portions
35 carriers
35a reflex part
38 damping of shocks components
39 fixed parts
41A, 41B, 141A, 141B otch
42A, 42B, 142A, 142B (otch) leading section
43,44 exciting electrodes
100 as the tuning-fork-type quartz crystal resonator element of existing vibrating reed
Embodiment
Referring to accompanying drawing, the execution mode specialized by vibrating reed of the present invention is described.
(the first execution mode)
Fig. 1 is, illustrates from vertical view as the quartz crystal resonator element of the vibrating reed of the first execution mode of the interarea unilateral observation of a side for medelling.And Fig. 2 is, for medelling, the figure in each several part cross section of quartz crystal resonator element, the cutaway view of the a-a line that (a) is Fig. 1, the cutaway view of the c-c line that (b) is Fig. 1, the cutaway view of the b-b line that (c) is Fig. 1 are described.
In this example, crystal is used to be described for example as piezoelectric.
In FIG, the piezoelectric vibration piece that is made up of crystal of quartz crystal resonator element 20.And, as the crystal wafer (crystal base material) of the crystal original shape of the quartz crystal resonator element 20 of formation present embodiment, employ the crystal wafer of following gained, namely, in the orthogonal coordinate system be made up of X-axis, Y-axis and Z axis, for the crystal Z plate of the scope internal cutting at 0 degree of-5 degree that turn clockwise centered by Z axis, carry out cutting and grinding and be processed into predetermined thickness.The quartz crystal resonator element 20 of present embodiment is formed, and have the external form of the so-called tuning-fork-type be made up of base portion 21 and a pair shaker arm 22, described base portion 21 is by processing this crystal Z plate; Described a pair shaker arm 22 is divided into two sections from the end side (upper end side figure) of this base portion 21, and extension parallel to each other.
In base portion 21, define along the pair of notches 41A on the rightabout of straight line, 41B, occur by the shape of constriction on two interareas of this base portion 21 with this.Base portion 21 has: Part I 21a and Part II 21b, and described Part I 21a and Part II 21b is across pair of notches 41A, 41B and be positioned at its both sides; Coupling part 21c, it for being connected with Part II 21b Part I 21a between pair of notches 41A, 41B.
In the quartz crystal resonator element 20 of present embodiment, owing to passing through this otch 41A, 41B, cut off the Vibration propagation of each shaker arm 22, so can suppress to vibrate the so-called leakage of vibration of externally being propagated by base portion 21 and following supporting arm 30, and the rising of CI value can be prevented.
In addition, the width (width of coupling part 21c) of pair of notches 41A, 41B, can be more smaller or greater than the interval of the side relative with a pair shaker arm 22, and, also can be less or larger than the distance of the side contrary mutually of a pair shaker arm 22.
A pair shaker arm 22, extends in parallel from the Part I 21a of base portion 21 to two interareas (paper outwards and inwards).Further, each shaker arm 22 has described two interareas and two sides, and described two sides connect two interareas in both sides.
And, on the front of each shaker arm 22, be provided with the hammer portion 29 that width is wider than base portion 21 side of shaker arm 22 respectively.So, by the function making the hammer portion 29 of the fore-end of each shaker arm 22 play hammer, thus just can reduce frequency without the need to making the length of shaker arm 22 increase.
In addition, although illustrate the part except hammer portion 29 of the shaker arm 22 of present embodiment, there is the structure of one fixed width, but be not limited in this, the shape that the major part of shaker arm 22 (parts different from hammer portion 29) attenuates for front end can be made, such as, by forming the cone attenuated from the base portion 21 side forward end of shaker arm 22, thus shaker arm 22 can be made easily to vibrate.
As shown in Figure 1, on an interarea of each shaker arm 22, be respectively arranged with along respective length direction the elongated slot 26a that has bottom.And as shown in Fig. 2 (a), on another interarea of shaker arm 22, the length direction also along shaker arm 22 is provided with an elongated slot 26b.
By being arranged on elongated slot 26a, the 26b on each shaker arm 22, and make shaker arm 22 easily move and effectively vibrate, thus CI value can be reduced.
In addition, as shown in Figure 1, in the shaker arm 22 of present embodiment, the end side (front of shaker arm 22) of elongated slot 26a (and 26b), be formed on be positioned at side (hammer portion 29 side) more forward than the border in the hammer portion 29 of itself and shaker arm 22 position on.In this way, because the concentrated area of the stress produced when shaker arm 22 can be vibrated is dispersed on the extending direction of shaker arm 22, so the root in the hammer portion 29 of shaker arm 22 can be avoided stress concentration at and the fault such as breakage generation caused.
In contrast, the end side (front of shaker arm 22) of elongated slot 26a, 26b, also can be formed on the border that is positioned at than the hammer portion 29 of itself and shaker arm 22 more by the position of base portion 21 side, also can obtain above-mentioned effect in this way.Namely, because the concentrated area of the stress produced during by being vibrated by shaker arm 22 is dispersed on the extending direction of shaker arm 22, thus the root in the hammer portion 29 of shaker arm 22 can be avoided stress concentration at and the fault such as breakage generation caused, and, the quality in the hammer portion 29 on each shaker arm 22 is paid and is added effect and also can increase, so just can realize low frequency without the need to making the size of quartz crystal resonator element 20 increase.
But, in each shaker arm 22, even if by elongated slot 26a, when the end side (front of shaker arm 22) of 26b is arranged on the position of the boundary in the hammer portion 29 being positioned at itself and shaker arm 22, also stress can not concentrate on the root in the hammer portion 29 of shaker arm 22 and cause producing the situations such as damaged, such as when there is at shaker arm 22 width of satisfied enough rigidity, and the situation etc. of shape (such as cone shape etc.) of wider width is defined from base portion 21 side of shaker arm 22 to direction, hammer portion 29, also can by elongated slot 26a, the end side (front of shaker arm 22) of 26b is arranged on the position of the boundary in the hammer portion 29 of itself and shaker arm 22.
Quartz crystal resonator element 20 has: a pair supporting arm 30 extended from the Part II 21b of base portion 21.A pair supporting arm 30, can from two ends on the direction of reporting to the leadship after accomplishing a task with the bearing of trend of a pair shaker arm 22 base portion 21, respectively along after contrary direction extends, the bearing of trend at bend 31 place along a pair shaker arm 22 carries out bending and extending.By making it bend, thus supporting arm 30 is made to become miniaturized.The part that supporting arm 30 uses when being and being such as installed on the external substrate such as shell (not shown), is undertaken bonding, fixing by the fixed part of the fixed part 39 shown in figure and external substrate by adhesive etc., thus is installed in external substrate.Therefore, in the quartz crystal resonator element 20 be installed in external substrate, shaker arm 22 and base portion 21 can be made to be in quick condition.
As shown in Figure 2, the surface of each elongated slot 26a, 26b comprising each shaker arm 22 is formed with exciting electrode 44, and is formed with exciting electrode 43 (omitting diagram in FIG) on the surface at each comprising two sides.Wherein in a shaker arm 22, by applying voltage between exciting electrode 43,44, being stretched in two of shaker arm 22 sides, thus shaker arm 22 is vibrated.Exciting electrode 43,44 can be formed by following method, namely, crystal is corroded and formed quartz crystal resonator element 20 comprise the profile of elongated slot 26a, 26b after, such as using nickel (Ni) or chromium (Cr) as bottom, in the above by evaporation or sputtering, film forming is the electrode layer of such as gold (Au), uses photoetching process to form pattern afterwards.Here, the adhesive force between well-known chromium and crystal is higher, and gold is difficult to oxidation because resistance is low.
On the front of each supporting arm 30, be provided with the part reduced with the thickness of the direction of vibration equidirectional of shaker arm 22, and a part is wherein provided with carrier 35, described carrier 35 is to make the mode of the narrower intervals between supporting arm 30 and shaker arm 22, and the direction towards shaker arm 22 is carried out bending and formed.In other words, carrier 35 is the protuberances of the overshooting shape that the part of supporting arm 30 is formed from the bearing of trend of supporting arm 30 towards shaker arm 22.Outside amplitude range when this carrier 35 is configured in the usual vibration of adjacent shaker arm 22, and on the position abutted with this shaker arm 22 when the displacement being configured in adjacent shaker arm 22 exceedes the usual amplitude range of ormal weight.In addition, amplitude range during the usual vibration of described shaker arm 22 refers to, driving voltage (electric field) is applied by the exciting electrode 43,44 to quartz crystal resonator element 20, and the vibration area of shaker arm 22 when reaching maximum with the amplitude that the resonance frequency of regulation carries out the shaker arm 22 vibrated.That is, be set to, even if when the amplitude carrying out the shaker arm 22 vibrated with the resonance frequency of regulation reaches maximum, can not come in contact between adjacent shaker arm 22 and the carrier 35 of supporting arm 30.And the situation that the displacement of shaker arm 22 exceedes the usual amplitude range of ormal weight refers to, apply impact thus cause shaker arm 22 to produce the situation etc. of larger displacement to quartz crystal resonator element 20 because to drop etc.
As shown in Figure 1, in quartz crystal resonator element 20, each supporting arm 30 is formed, and it has the part that between two sides than adjacent shaker arm 22, the thinnest width is partly thinner.
Further, in supporting arm 30, the width of base portion 21 side of carrier 35 and carrier 35, is all less than the width of base portion 21 side of supporting arm 30.
In detail, in FIG, extend in the opposite direction from base portion 21 and bend 31 carry out bending and carry out a pair supporting arm 30 of extending along the direction parallel with shaker arm 22, there is in base portion 21 side the wide portion 32 of wider width, the front in this wide portion 32 is formed the reduced narrow portion of width 33, and the more forward side of this narrow portion 33 is carrier 35.The width t2 of the narrow portion 33 of the supporting arm 30 namely, shown in Fig. 2 (b), and between the width t3 in the wide portion 32 of the supporting arm 30 shown in Fig. 2 (c), there is the relation of t2<t3.In addition, the wide portion 32 of supporting arm 30 and the cross section of narrow portion 33, not all as shown in the embodiment square, such as when arranging the groove with bottom and the imagining center line that has relative to cross section but not the cross sectional shape of linear symmetric when, the area of section S2 of the narrow portion 33 of the supporting arm 30 shown in Fig. 2 (b), and between the area of section S3 in the wide portion 32 of the supporting arm 30 shown in Fig. 2 (c), there is the relation of S2<S3.
And, width t1 between two sides of the shaker arm 22 shown in Fig. 2 (a), and in the relation between supporting arm 30 width in the same direction, between the width t2 of the narrow portion 33 of the supporting arm 30 at least and shown in Fig. 2 (b), there is the relation of t1>t2.Further, in the present embodiment, the width t1 of shaker arm 22, and between the width t3 in the wide portion 32 of the supporting arm 30 shown in Fig. 2 (c), also there is the relation of t1>t3.In addition, the area of section S1 of the shaker arm 22 shown in Fig. 2 (a), between the area of section S2 of the narrow portion 33 of the supporting arm 30 at least and shown in Fig. 2 (b), has the relation of S1>S2.Further, the area of section S1 of shaker arm 22, and between the area of section S3 in the wide portion 32 of the supporting arm 30 shown in Fig. 2 (c), also can have the relation of S1>S3.
Like this, in quartz crystal resonator element 20, the narrow portion 33 (and wide portion 32) that between two sides having than adjacent shaker arm 22 by making each supporting arm 30, the width of the thinnest part is thinner, thus supporting arm 30 is presented more hold flexible elasticity than shaker arm 22.Therefore, due to when shaker arm 22 produces larger displacement to supporting arm 30 side and collides with carrier 35, the damage that shaker arm 22 is applied can be alleviated, so while preventing shaker arm 22 from producing breakage, the over-travel of shaker arm 22 is limited, thus the resistance to impact of quartz crystal resonator element 20 can be improved.
And, due to the width t2 of the narrow portion 33 of base portion 21 side by making carrier 35 and carrier 35, be less than the width t3 in the wide portion 32 of base portion 21 side of supporting arm 30, there is the front (narrow portion 33 side) of the supporting arm 30 of carrier 35, present and more hold flexible elasticity than base portion 21 side (side, wide portion 32) of supporting arm 30, so when shaker arm 22 produces larger displacement when colliding with carrier 35 to supporting arm 30 side, the damage that shaker arm 22 is applied can be alleviated, while preventing shaker arm 22 breakage, improve the resistance to impact of quartz crystal resonator element 20.
In addition, in the present embodiment, the narrow portion 33 that the width of each supporting arm 30 is reduced, on front to the direction near adjacent shaker arm 22 carry out bending after, bend in the mode that the shaker arm 22 with adjacent is parallel on front again, thus form carrier 35.
And, in the present embodiment, on the side of end more forward than the carrier 35 of supporting arm 30, be formed with reflex part 35a, described reflex part 35a is bent along the direction away from adjacent shaker arm 22, thus avoid the reflex part 35a in the bight in the portion foremost comprising supporting arm 30 to abut with shaker arm 22, thus can prevent from producing crack and breakage on supporting arm 30 and shaker arm 22.
In addition, in the structure of supporting arm 30 with described carrier 35, for the fixed part 39 that the external substrate such as quartz crystal resonator element 20 and shell are fixed, be the wide portion 32 of supporting arm 30, and be configured in than the side of carrier 35 closer to base portion 21.Therefore, carrier 35 can limit using fixed part 39 as fulcrum the displacement of shaker arm 22, thus can relax impact.
Further, with reference to Fig. 1 and Fig. 3, the configuration of the carrier 35 in quartz crystal resonator element 20 is described.Here, Fig. 3 of new reference is, for medelling, the allocation plan of the abutment portion of the carrier 35 of the supporting arm 30 in shaker arm 22 is described, and is the arrow E direction from Fig. 1, observe the partial enlarged drawing of a part of side of a shaker arm 22.
In the quartz crystal resonator element 20 shown in Fig. 1 and Fig. 3, when shaker arm 22 produces larger displacement to adjacent supporting arm 30 side and contacts with the carrier 35 of supporting arm 30, carrier 35 is configured to, and this carrier 35 is positioned at position as follows with the abutment portion of shaker arm 22.
Namely, when shaker arm 22 produces larger displacement, the carrier 35 of supporting arm 30 is configured on the side of end more forward than the region forming elongated slot 26a, 26b.Therefore, during owing to producing larger displacement when shaker arm 22 thus contacting with the carrier 35 of adjacent supporting arm 30, shaker arm 22 is configured to the abutment portion of carrier 35, be positioned in the part higher than the rigidity of more forward side, the region being formed with elongated slot 26a, 26b, so can prevent shaker arm 22 from occurring the faults such as damaged, and the effect of the resistance to impact improving quartz crystal resonator element 20 can be obtained.
And when shaker arm 22 produces larger displacement, the carrier 35 of supporting arm 30 is configured to, be positioned at on the position of carrying out contacting as the wide portion of shaker arm 22 front, i.e. hammer portion 29.Further, carrier 35 is configured to, and carries out face contact with the side of carrier 35 side in two sides in the hammer portion 29 of shaker arm 22.In other words, in quartz crystal resonator element 20, the carrier 35 of supporting arm 30 is configured to avoid bight 27, and described bight 27 is formed in the one end in the hammer portion 29 of shaker arm 22.Therefore, due to as shaker arm 22 wide portion and there is the side in the hammer portion 29 of higher-strength, carry out face with carrier 35 and contact, so the damage of shaker arm 22 can be suppressed.And, by being configured to the bight 27 of the shaker arm 22 avoiding being formed by hammer portion 29, thus can prevent from producing damaged situation because bight 27 contacts with a part for carrier 35 when contacting with the abutment portion of carrier 35, and the resistance to impact of quartz crystal resonator element 20 can be improved.
Further, in the quartz crystal resonator element 20 of present embodiment, damping of shocks component 38 is arranged in carrier 35 with on the face of the abutment portion of adjacent shaker arm 22.Be preferably, damping of shocks component 38 can relax this impact material when producing larger displacement by shaker arm 22 and contact with carrier 35 formed, and it is parallel with the face of the abutment portion of shaker arm 22 and there is certain area, to guarantee contact area large as far as possible and to carry out face with it to contact in the abutment portion of shaker arm 22.
Although for the material of damping of shocks component 38, the elastomeric material such as rubber and resin can be used, be not limited in these materials, also can use the soft metal films such as gold.When being formed damping of shocks component 38 by metal film, by forming this damping of shocks component 38 in the electrode preparation sections such as the exciting electrode 43,44 (with reference to figure 2 (a)) at such as quartz crystal resonator element 20 simultaneously, thus manufacturing process can not be increased just damping of shocks component 38 can be set.
So, by in carrier 35 with the abutment portion of adjacent shaker arm 22 on damping of shocks component 38 is set, thus the impact that can relax when shaker arm 22 collides with carrier 35, and the carrier 35 of shaker arm 22 and supporting arm 30 can be suppressed to produce breach and damaged phenomenon.
As described above, according to the quartz crystal resonator element 20 of above-mentioned execution mode, because it possesses otch 41A, 41B, elongated slot 26a, 26b, hammer portion 29 etc., so leakage of vibration, the rising of CI value or the decline of Q value can be suppressed, and because have drop because of quartz crystal resonator element 20 wait impact and make shaker arm 22 produce larger displacement time, for relaxing impact and the carrier 35 limited the displacement of shaker arm 22, so can provide a kind of to there is stable vibration characteristics and the higher quartz crystal resonator element 20 of resistance to impact.
As the quartz crystal resonator element 20 (piezoelectric vibration piece) with the vibrating reed illustrated by above-mentioned execution mode, also can implement by following Change Example.
(Change Example of the first execution mode)
In the above-described embodiment, the quartz crystal resonator element 20 both sides at a pair shaker arm 22 being provided with to the supporting arm 30 with carrier 35 is illustrated.In addition, if consider the crystalline axis direction of the crystal material (piezoelectric) forming quartz crystal resonator element, then carrier is set by any side in the direction of vibration of shaker arm, thus can resistance to impact be improved.
Fig. 4 is, illustrates only in the side of the direction of vibration of shaker arm, be configured with the vertical view of the Change Example of the quartz crystal resonator element of the supporting arm with carrier for medelling.For illustration of in Fig. 4 of this Change Example, for the structure identical with above-mentioned execution mode, mark identical symbol, and the description thereof will be omitted.
In the diagram, to be the thickness that specifies carry out to crystal Z plate the crystal base material that cutting and grinding machining obtains to quartz crystal resonator element 50, and it has: base portion 21; A pair shaker arm 22, its end side from this base portion 21 (in the drawings upward the end side in (Y-direction)) is divided into two sections and extension parallel to each other.Base portion 21 is formed pair of notches 41A, 41B, this pair of notches 41A, 41B are arranged on along on the rightabout of the straight line of X-direction in the orthogonal coordinate system be made up of the X-axis of crystal, Y-axis and Z axis, occur by the shape of constriction on two interareas of this base portion 21 with this.Base portion 21 has: Part I 21a and Part II 21b, and it is for being positioned at its both sides across pair of notches 41A, 41B; Coupling part 21c, it for being connected with Part II 21b Part I 21a between pair of notches 41A, 41B.
In the side, front end of a pair shaker arm 22, be provided as the hammer portion 29 in wide portion respectively.And, on the interarea of each shaker arm 22, be respectively arranged with along respective length direction the elongated slot 26a that has bottom.In addition, although do not illustrate, on the surface of each elongated slot 26a and two side comprising each shaker arm 22, exciting electrode is formed with.
Quartz crystal resonator element 50 has: a pair supporting arm 30, the 30b that extend from the Part II 21b of base portion 21.Each supporting arm 30,30b, two ends from crisscross with the bearing of trend of a pair shaker arm 22 base portion 21, mutual after the extension of contrary direction respectively, bend at bend 31,31b place along the bearing of trend of a pair shaker arm 22, extend again.
In a pair supporting arm 30,30b, the front of supporting arm 30 has carrier 35, described supporting arm 30 from crystal orthogonal coordinate system-end (+X side) that X-direction cuts the base portion 21 of the opposite side of the otch 41B formed extends.On the other hand, from the described orthogonal coordinate system of crystal-end of the base portion 21 of the otch 41B side of X-direction in another supporting arm 30b of extending, shorter than the supporting arm 30 with described carrier 35, this supporting arm 30b does not have carrier, but has fixed part 39.
In the quartz crystal resonator element 50 formed by crystal Z plate, the X-direction from base portion 21 both direction incision and formed pair of notches 41A, 41B in, by corrosion, formed along in crystallographic axis orthogonal coordinate system-X-direction on otch 41B time, according to the etching anisotropy of crystal Z plate, on leading section (bight) 42B of otch 41B inwall, undesirable hole portion and corrosion residual part will be produced, namely form so-called fin.When applying to impact to quartz crystal resonator element 50 because to drop etc., the fin produced in this otch 41B, be full of cracks can be caused and fracture, when particularly tensile stress being applied to fin, namely, shaker arm 22 is when producing larger displacement along+X-direction, and this fin is the main cause causing significant deterioration in strength.
According to the structure of the quartz crystal resonator element 50 of this Change Example, the front of a supporting arm 30 has carrier 35, described supporting arm 30 extends from base portion 21 end (+X-direction) of the opposition side of the edge-X-direction otch that fin occurs.And another supporting arm 30b has: as quartz crystal resonator element 50 supporting structure and play the fixed part 39 of function, the structure of described supporting arm 30b is, shorter than supporting arm 30 and do not have carrier on front.Therefore, when shaker arm 22 along as to fin apply the direction of tensile stress namely+X-direction on produce larger displacement time, the displacement of this shaker arm 22 is limited by carrier 35, thus can prevent producing be full of cracks on the fin that resistance to impact is weak especially and fracture.
Here, due to the otch 41B of-X side of causing fin paired, the 42A place, bight of the inwall of otch 41A can not produce fin and be difficult to cause intensity to decline, therefore on another supporting arm 30b of-X side being located at base portion 21, carrier can be set, also can shorten the length of supporting arm 30b.Thus, with arrange on the both sides of shaker arm 22 carrier 35 supporting arm 30 structure compared with, can make small-sized and there is the quartz crystal resonator element 50 of good resistance to impact.
Above the embodiments of the present invention that inventor completes are illustrated, but the present invention is not limited in above-mentioned execution mode, without departing from the scope of the gist of the present invention, various distortion can be applied.
Such as, in above-mentioned execution mode and Change Example, as the execution mode that obviously can play effect of the present invention, the quartz crystal resonator element 20,50 of otch 41A, 41B of leakage of vibration effect is suppressed to be illustrated to being provided with to have on base portion 21.But be not limited in described structure, base portion is not arranged in the structure of otch, such as, at base portion narrower and in the vibrating reed that rigidity is less, also can improve resistance to impact with the width on the direction of vibration equidirectional of shaker arm.
In addition, although in above-mentioned execution mode and Change Example, be illustrated for the quartz crystal resonator element 20,50 with the shaker arm 22 in elongated slot 26a, 26b and hammer portion 29, even if but do not have in the vibrating reed of these structures, also can obtain effect of the present invention.
And, in above-mentioned execution mode and Change Example, in the supporting arm 30 with carrier 35, in carrier 35 with the abutment portion of shaker arm 22 on damping of shocks component 38 is set structure be illustrated.But be not limited in this structure, even do not arrange the structure of damping of shocks component 38, also than the vibrating reed without carrier 35, there is the effect of higher raising resistance to impact.
Further, about reflex part 35a set on the side of end more forward than the carrier 35 of supporting arm 30, the structure that this reflex part 35a is not set can also be adopted.
And, in the above-described embodiment, be illustrated for the quartz crystal resonator element 20 of beam mode.But be not limited in this, in torsional vibration mode and shear-vibration pattern etc., in the vibrating reed of the vibration mode beyond beam mode, by the structure making it possess feature of the present invention, the effect of the raising resistance to impact identical with Change Example with above-mentioned execution mode also can be obtained.
And, in above-mentioned execution mode and Change Example, be illustrated the embodiments of the present invention of the quartz crystal resonator element 20,50 of so-called tuning-fork-type and Change Example, the quartz crystal resonator element 20,50 of described tuning-fork-type is from base portion 21, and two shaker arms 22 extend parallel to each other and formed.But be not limited only to this, even have the so-called beam vibration sheet etc. be only made up of a shaker arm of the base portion as stiff end, or there is the vibrating reed of shaker arm of more than three, also can obtain the effect identical with Change Example with above-mentioned execution mode.
Although in above-mentioned execution mode and Change Example, the quartz crystal resonator element 20,50 formed for the crystal by one of piezoelectric is illustrated, and is not limited in this, also can be made up of the piezoelectric beyond the crystal such as lithium tantalate, lithium niobate.Further, even by beyond piezoelectric, vibrating reed that such as Si semiconductor forms, also can obtain the effect identical with Change Example with above-mentioned execution mode.
Above-mentioned execution mode and the quartz crystal resonator element illustrated by Change Example 20,50, may be used for the various electronic instruments beyond piezo-electric apparatus and piezo-electric apparatus.Particularly, when in a kind of oscillator, any one piezoelectric vibration piece in described quartz crystal resonator element 20,50 is engaged in the enclosure using its supporting arm 30 as fixed part, and be at least provided with for making this quartz crystal resonator element 20,50 carry out the oscillation circuit element vibrated, this oscillator can suppress the rising of CI value, Q value declines or leakage of vibration, while realizing high performance, miniaturization can also be realized.
(the second execution mode)
Below, the quartz crystal resonator element of the vibrating reed as the second execution mode is described.Fig. 5 is, represents the vertical view of the vibrating reed of the second execution mode.
About the quartz crystal resonator element of following second execution mode that will illustrate, will stress the difference with above-mentioned execution mode, for identical situation, the description thereof will be omitted.
The quartz crystal resonator element 70 of present embodiment is provided with: two shaker arms 78,79, and it extends from the end of base portion 77; A pair (two) supporting arm (outside arm) 74B, 75B, its relative to shaker arm 78,79 on two outsides of X-direction with shaker arm 78,79 parallel.In two shaker arms 78,79, be respectively arranged with the elongated slot with the end 72,73 on interarea with peristome.Two supporting arms 74B, 75B are set to, and extend respectively from base portion 77 along Y direction, and arrangement in the X-axis direction.
In the present embodiment, supporting arm 74B, 75B are set to, and its leading section has the length relative with the leading section of shaker arm 78,79.
And, supporting arm 74B, 75B spacing distance each other, wider than base end side in its front.
Further, on the leading section of supporting arm 74B, be provided with carrier (buffer part) 241B having and absorb impact property, in the midway of supporting arm 74B, be also provided with carrier (buffer part) 242B having and absorb impact property.Same on the leading section of supporting arm 75B, be provided with carrier (buffer part) 251B having and absorb impact property, in the midway of supporting arm 75B, be also provided with carrier (buffer part) 252B having and absorb impact property.
Carrier (buffer part) 241B, 242B are formed, and make the width dimensions of supporting arm 74B become large, and make the narrower intervals between supporting arm 74B and shaker arm 78.In other words, carrier (buffer part) 241B, 242B are formed with protuberance, described protuberance be arranged in supporting arm 74B from supporting arm 74B towards the direction of shaker arm 78 and in overshooting shape.Equally, carrier (buffer part) 251B, 252B are formed, and make the width dimensions of supporting arm 75B become large, and make the narrower intervals between supporting arm 75B and shaker arm 79.In other words, carrier (buffer part) 251B, 252B are formed with protuberance, described protuberance be arranged in supporting arm 75B from supporting arm 75B towards the direction of shaker arm 79 and in overshooting shape.In addition, although the carrier of this example (buffer part) 241B, 242B, 251B, 252B, going up with from described supporting arm 74B, 75B to the side of shaker arm 78,79 structure being also provided with protuberance in the opposite direction, but also can be as mentioned above, only in the structure being provided with protuberance from supporting arm 74B, 75B towards the direction of shaker arm 78,79.
Here, carrier 242B, 252B and each shaker arm 78,79 of carrier (buffer part) 241B, 251B of the fore-end of supporting arm 74B, 75B and midway part are separated, and constitute blocking portion (limiting unit), when each shaker arm 78,79 produces flexural deformation along X-direction, described blocking portion (limiting unit) contacts with at least one shaker arm in shaker arm 78,79, thus the flexural deformation stoping (restriction) excessive.
In other words, outside amplitude range when carrier 241B, 251B, 242B, 252B are configured in the usual vibration of adjacent shaker arm 78,79, and, carrier 241B, 251B, 242B, 252B, on the position abutted with shaker arm 78,79 when the displacement being arranged on adjacent shaker arm 78,79 exceedes the usual amplitude range of ormal weight.
In addition, amplitude range during the usual vibration of above-mentioned shaker arm 78,79 refers to, identical with above-mentioned execution mode, by applying driving voltage (electric field) from outside, the vibration area of the shaker arm 78, the 79 when amplitude carrying out the shaker arm 78,79 vibrated with the resonance frequency specified reaches maximum.Namely be set to, even if when the amplitude carrying out the shaker arm 78,79 vibrated with the resonance frequency of regulation reaches maximum, adjacent shaker arm 78,79 and also can not coming in contact between carrier 241B, 251B, 242B, 252B.
When shaker arm 78 exceedes the amplitude range of vibration usually and produce the flexural deformation of X-direction on supporting arm 74B side, be arranged on the shaker arm 78 side part 2411B in the carrier 241B on the leading section of supporting arm 74B, contact with shaker arm 78.Meanwhile, when shaker arm 78 produces the flexural deformation of X-direction on supporting arm 74B side, be arranged on the shaker arm 78 side part 2421B of the carrier 242B of supporting arm 74B midway, contact with shaker arm 78.
Equally, when shaker arm 79 exceedes the amplitude range of vibration usually and produce the flexural deformation of X-direction on supporting arm 75B side, be arranged on the shaker arm 79 side part 2511B in the carrier 251B on the leading section of supporting arm 75B, contact with shaker arm 79.Meanwhile, when shaker arm 79 produces the flexural deformation of X-direction on supporting arm 75B side, be arranged on the shaker arm 79 side part 2521B of the carrier 252B of supporting arm 75B midway, contact with shaker arm 79.
So, part 2411B, 2421B, 2511B, 2521B (blocking portion) of supporting arm 74B, 75B are configured to, due to the flexural deformation of shaker arm 78,79 as above, and contact with the multiple positions on the length direction of shaker arm 78,79.Therefore, when the part 2411B of shaker arm 78,79 and supporting arm 74B, 75B, 2421B, 2511B, 2521B (blocking portion) contact, can prevent or relax the phenomenon of the applying local assault to shaker arm 78,79.
And part 2421B, the 2521B of the midway (blocking portion) of supporting arm 74B, 75B, form respectively the bending convex surface to shaker arm 78,79 side projection.Therefore, the part 2421B of the midway (blocking portion) of supporting arm 74B, carries out face due to the flexural deformation of described shaker arm 78 with shaker arm 78 and contacts.Equally, the part 2521B of the midway (blocking portion) of supporting arm 75B, carries out face due to the flexural deformation of described shaker arm 79 with shaker arm 79 and contacts.Therefore, when shaker arm 78,79 contacts with part 2421B, the 2521B of the midway (blocking portion) of supporting arm 74B, 75B, can prevent or relax phenomenon shaker arm 78,79 being applied to local assault.
According to the second execution mode described above, the effect identical with described first execution mode can be played.
(the 3rd execution mode)
Below, to as the 3rd execution mode, the oscillator had as the quartz crystal resonator element of the vibrating reed in described execution mode is described.
Fig. 6 is, represent the schematic diagram of the schematic configuration of the oscillator of the 3rd execution mode, Fig. 6 (a) is vertical view, the cutaway view of the F-F line that Fig. 6 (b) is Fig. 6 (a).In addition, in the present embodiment, for the quartz crystal resonator element 20 as the vibrating reed illustrated in described first execution mode, its structure is described.
As shown in Figure 6, the quartz crystal 5 as oscillator possesses: the quartz crystal resonator element 20 of the first execution mode and the shell 80 for receiving quartz crystal resonator element 20.Shell 80 is made up of package header 81, seaming loop 82, lid 85 etc.On package header 81, be formed with the recess can receiving quartz crystal resonator element 20, this recess is provided with two connection gaskets 88, described connection gasket 88 is connected to the not shown pasted electrode (mounting electrode) of quartz crystal resonator element 20.Connection gasket 88 is configured to, and it is connected to the distribution in package header 81, and can carry out conducting with the external cabling terminal 83 be arranged on the peripheral part of package header 81.
On around the recess of package header 81, be provided with seaming loop 82.Further, on the bottom of package header 81, through hole 86 is provided with.Quartz crystal resonator element 20 is bonded by conductive adhesive 84 to be fixed on the connection gasket 88 of package header 81.And in shell 80, lid 85 and seaming loop 82 are by seam weldering, and described lid 85 is for the recess of covering shell pedestal 81.In the through hole 86 of package header 81, be filled with the encapsulant 87 be made up of metal material etc.Sealing material 87 is cured after melting in reduced pressure atmosphere, thus carries out level Hermetic Package to through hole 86, so that can maintain in package header 81 is decompression state.By the drive singal from outside of external cabling terminal 83, quartz crystal resonator element 20 is encouraged, quartz crystal 5 is carried out vibrate (resonance) with assigned frequency (such as 32kHz).
As mentioned above, because quartz crystal 5 has the quartz crystal resonator element 20 be described in said embodiment, so can provide a kind of to there is stable vibration characteristics and the higher quartz crystal 5 of resistance to impact.
In addition, even if quartz crystal 5 uses the vibrating reed of such as other modes such as quartz crystal resonator element 70 grade, replace quartz crystal resonator element 20, also can obtain same effect.
And, although in the present embodiment, describe and quartz crystal resonator element 20 is fixed on the structure be located on the connection gasket 88 at two places, but connection gasket 88 is not limited in two places, also required number can be set, and and connection between quartz crystal resonator element 20 also can carry out on desired link position.
(the 4th execution mode)
Secondly, to as the 4th execution mode, the oscillator had as the quartz crystal resonator element of the above-mentioned vibrating reed illustrated is described.
Fig. 7 is, represent the schematic diagram of the schematic configuration of the oscillator of the 4th execution mode, Fig. 7 (a) is vertical view, the cutaway view of the G-G line that Fig. 7 (b) is Fig. 7 (a).In addition, in the present embodiment, for the quartz crystal resonator element 20 as vibrating reed illustrated in described first execution mode, its structure is described.
Structure as the crystal oscillator 6 of oscillator is, in the structure of above-mentioned quartz crystal 5, also have circuit element.Further, for the common part with quartz crystal 5, mark identical symbol, and omit detailed description.
As shown in Figure 7, crystal oscillator 6 possesses: the quartz crystal resonator element 20 of the first execution mode; As the IC chip 91 of circuit element, it has the oscillating circuit that quartz crystal resonator element 20 is vibrated; Shell 80, it is for receiving quartz crystal resonator element 20 and IC chip 91.IC chip 91 is fixed on the bottom of package header 81, and is connected by the plain conductors such as gold thread 92 on other distribution.By the drive singal of the oscillating circuit from IC chip 91, quartz crystal resonator element 20 is encouraged, crystal oscillator 6 is carried out vibrate (resonance) with the frequency (such as 32kHz) of regulation.
As mentioned above, because crystal oscillator 6 possesses the quartz crystal resonator element 20 illustrated in said embodiment, so can provide a kind of to there is stable vibration characteristics and the higher crystal oscillator 6 of resistance to impact.
In addition, even if crystal oscillator 6 uses quartz crystal resonator element 70 to replace quartz crystal resonator element 20, also same effect can be obtained.
And, although in the present embodiment, describe and quartz crystal resonator element 20 has been fixed on the structure be located on the connection gasket 88 at two places, but connection gasket 88 is not limited in two places, also required number can be set, and and connection between quartz crystal resonator element 20 also can carry out on desired link position.
(utilizability in industry)
When the quartz crystal resonator element 20,70 as described vibrating reed impacts because to drop etc. and makes shaker arm produce larger displacement, impact can be relaxed and the carrier that the displacement of shaker arm is limited owing to having, so resistance to impact can be guaranteed, and stable vibration characteristics can be maintained.
Therefore, quartz crystal 5 or the crystal oscillator 6 of this quartz crystal resonator element 20,70 has been installed, as timing device etc., and has been widely used in the electronic instruments such as digital mobile phone, PC, electronic watch, video tape recorder, television set.Further, the miniaturization etc. of these electronic instruments can be suitable for, especially for the portable equipment etc. needing resistance to impact.
Claims (10)
1. a vibrating reed, is characterized in that, comprising:
Base portion;
A pair shaker arm, it extends from described base portion;
A pair arm, it has fixed part, when top view, between described a pair arm, accompanies described a pair shaker arm, and described a pair arm and described a pair shaker arm configured separate, this pair arm extends along described bearing of trend from described fixed part,
Described shaker arm comprises wide portion, and described wide portion is positioned at the front of the side contrary with base portion side of described shaker arm when top view, and along the wider width in the direction orthogonal with described bearing of trend compared with described base portion side,
Described arm is opposed with described wide portion.
2. vibrating reed as claimed in claim 1, is characterized in that,
The front end area of described arm has cushioning effect.
3. vibrating reed as claimed in claim 1 or 2, is characterized in that,
Described a pair shaker arm with alternately repeatedly carry out close to each other and away from action mode and carry out flexural vibrations.
4. vibrating reed as claimed in claim 3, is characterized in that,
The front end area of described arm is arranged on, outside the scope of the amplitude of the described flexural vibrations of described shaker arm, and on the position contacted with described shaker arm when the displacement of described shaker arm exceedes the scope of described amplitude.
5. the vibrating reed according to any one of Claims 1-4, is characterized in that,
At least one interarea side in first interarea and the second interarea of the back-surface relationship each other of described shaker arm, is provided with groove along described bearing of trend.
6. the vibrating reed according to any one of claim 1 to 5, is characterized in that,
The side of described arm comprises to the outstanding part in the described leading section side of described shaker arm.
7. an oscillator, is characterized in that, possesses:
Vibrating reed according to any one of claim 1 to 6;
Substrate, it is configured with described vibrating reed, and is provided with described fixed part.
8. an oscillator, is characterized in that, possesses:
Vibrating reed according to any one of claim 1 to 6.
9. a gyrosensor, is characterized in that, possesses:
Vibrating reed according to any one of claim 1 to 6.
10. an electronic instrument, is characterized in that, possesses:
Vibrating reed according to any one of claim 1 to 6.
Applications Claiming Priority (7)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2009216634 | 2009-09-18 | ||
| JP2009-216634 | 2009-09-18 | ||
| JP2010-068997 | 2010-03-24 | ||
| JP2010068997A JP5703576B2 (en) | 2010-03-24 | 2010-03-24 | Vibration device |
| JP2010-159503 | 2010-07-14 | ||
| JP2010159503A JP5565158B2 (en) | 2009-09-18 | 2010-07-14 | Vibrating piece, vibrator, oscillator, and electronic device |
| CN201010286678.2A CN102025342B (en) | 2009-09-18 | 2010-09-17 | Vibration reed, vibrator, oscillator and electronic device |
Related Parent Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201010286678.2A Division CN102025342B (en) | 2009-09-18 | 2010-09-17 | Vibration reed, vibrator, oscillator and electronic device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN104410382A true CN104410382A (en) | 2015-03-11 |
| CN104410382B CN104410382B (en) | 2017-10-03 |
Family
ID=50180480
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201410659202.7A Expired - Fee Related CN104410382B (en) | 2009-09-18 | 2010-09-17 | Vibrating reed, oscillator, oscillator and electronic instrument |
Country Status (2)
| Country | Link |
|---|---|
| CN (1) | CN104410382B (en) |
| TW (1) | TW201131975A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108692745A (en) * | 2017-04-05 | 2018-10-23 | 精工爱普生株式会社 | Physical quantity transducer, electronic equipment and moving body |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPWO2022255113A1 (en) * | 2021-05-31 | 2022-12-08 |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20080023437A1 (en) * | 2006-07-27 | 2008-01-31 | Keisuke Hirano | Method for manufacturing piezoelectric resonator |
| CN100440562C (en) * | 2003-08-19 | 2008-12-03 | 精工爱普生株式会社 | Tuning fork style piezo-vibration sheet and its installation |
| CN101316097A (en) * | 2007-05-30 | 2008-12-03 | 爱普生拓优科梦株式会社 | Tuning fork resonator element and turning fork resonator |
| CN101425789A (en) * | 2007-11-02 | 2009-05-06 | 爱普生拓优科梦株式会社 | Piezoelectric resonator element, piezoelectric resonator, and acceleration sensor |
| JP2009164777A (en) * | 2007-12-28 | 2009-07-23 | Nippon Dempa Kogyo Co Ltd | Piezoelectric vibration piece and piezoelectric device, and manufacturing method thereof |
-
2010
- 2010-09-16 TW TW99131507A patent/TW201131975A/en unknown
- 2010-09-17 CN CN201410659202.7A patent/CN104410382B/en not_active Expired - Fee Related
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN100440562C (en) * | 2003-08-19 | 2008-12-03 | 精工爱普生株式会社 | Tuning fork style piezo-vibration sheet and its installation |
| US20080023437A1 (en) * | 2006-07-27 | 2008-01-31 | Keisuke Hirano | Method for manufacturing piezoelectric resonator |
| CN101316097A (en) * | 2007-05-30 | 2008-12-03 | 爱普生拓优科梦株式会社 | Tuning fork resonator element and turning fork resonator |
| CN101425789A (en) * | 2007-11-02 | 2009-05-06 | 爱普生拓优科梦株式会社 | Piezoelectric resonator element, piezoelectric resonator, and acceleration sensor |
| JP2009164777A (en) * | 2007-12-28 | 2009-07-23 | Nippon Dempa Kogyo Co Ltd | Piezoelectric vibration piece and piezoelectric device, and manufacturing method thereof |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108692745A (en) * | 2017-04-05 | 2018-10-23 | 精工爱普生株式会社 | Physical quantity transducer, electronic equipment and moving body |
Also Published As
| Publication number | Publication date |
|---|---|
| TW201131975A (en) | 2011-09-16 |
| CN104410382B (en) | 2017-10-03 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN102025342B (en) | Vibration reed, vibrator, oscillator and electronic device | |
| JP4281348B2 (en) | Piezoelectric vibrating piece, piezoelectric device using the piezoelectric vibrating piece, mobile phone device using the piezoelectric device, and electronic equipment using the piezoelectric device | |
| CN102035498B (en) | Vibrating reed, vibrator, oscillator, and electronic device | |
| CN101847978B (en) | Flexural vibration piece and oscillator using the same | |
| WO2010035714A1 (en) | Tuning-fork-type piezoelectric vibrating piece and tuning-fork-type piezoelectric vibrating device | |
| KR20110076774A (en) | Vibrating reed, vibrator, oscillator, electronic device, and method for adjusting frequency | |
| CN102111120B (en) | Bending vibration pieces, vibration device, and electronic apparatus | |
| JP5565158B2 (en) | Vibrating piece, vibrator, oscillator, and electronic device | |
| JP5652122B2 (en) | Vibrating piece, vibrating device and electronic device | |
| JP2011160094A (en) | Piezoelectric vibration chip | |
| JP2012029262A (en) | Piezoelectric vibration piece and method of manufacturing the same | |
| JP2013062643A (en) | Vibration piece, vibrator, oscillator, and electronic apparatus | |
| CN104410382A (en) | Vibration reed, vibrator, oscillator and electronic device | |
| JP2010200197A (en) | Surface acoustic wave device | |
| JP2012186639A (en) | Piezoelectric vibrating piece, piezoelectric vibrator, and electronic device | |
| CN102629860B (en) | Vibrator element, vibrator, oscillator, and electronic device | |
| JP3695183B2 (en) | Surface acoustic wave device and manufacturing method thereof | |
| JP4089149B2 (en) | Piezoelectric device | |
| US9799819B2 (en) | Elastic wave device | |
| JP2012156591A (en) | Piezoelectric vibration piece, piezoelectric vibrator and electronic device | |
| WO2023100851A1 (en) | Piezoelectric vibration element and piezoelectric device | |
| JP3912102B2 (en) | Crystal filter | |
| JP2001185987A (en) | Tuning fork type piezoelectric vibrator | |
| JP2012186637A (en) | Piezoelectric vibrating piece, piezoelectric vibrator, and electronic device | |
| JP2011151562A (en) | Tuning fork type bent crystal vibration element |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20171003 Termination date: 20190917 |
|
| CF01 | Termination of patent right due to non-payment of annual fee |