CN104404470B - The fixture that a kind of cleaning and plated film are integrated - Google Patents
The fixture that a kind of cleaning and plated film are integrated Download PDFInfo
- Publication number
- CN104404470B CN104404470B CN201410604535.XA CN201410604535A CN104404470B CN 104404470 B CN104404470 B CN 104404470B CN 201410604535 A CN201410604535 A CN 201410604535A CN 104404470 B CN104404470 B CN 104404470B
- Authority
- CN
- China
- Prior art keywords
- microscope base
- screw
- cleaning
- fixture
- plated film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/50—Substrate holders
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Electroplating Methods And Accessories (AREA)
- Cleaning By Liquid Or Steam (AREA)
Abstract
The fixture that a kind of cleaning and plated film are integrated, belongs to technical field of optical coating, causes the technical problem of component contamination and chipping in solving prior art during cleaning and plated film；Including microscope base S1, microscope base S2, connecting elements, cleaning supporting member and fixing component；Microscope base S1 and microscope base S2 is annular, at the interior bone of microscope base S1 and microscope base S2 is provided with groove；Connecting elements is fixedly connected with microscope base S1 and microscope base S2 respectively by screw；Cleaning supporting member includes that politef block, support, screw a, screw b and screw c, politef block and support are connected by screw a, screw b and screw c；Cleaning supporting member is fixedly connected with microscope base S1 and microscope base S2 respectively by screw；Fixing component passes through microscope base S1 and microscope base S2 retaining elements respectively；The present invention reduces component contamination, the risk collided with during being prevented effectively from turn-over with chipping, is easy to operate, saves the operating time simple structure.
Description
Technical field
The invention belongs to optical coating field, and in particular to the fixture that a kind of cleaning and plated film are integrated.
Background technology
With developing rapidly for opto-electronics so that the importance of optical element is increasingly lifted.Plated film is used as optical manufacturing
Final step, institute's quality of film plating layer is highly important for the optical property of optical element.In plated film each step
The pollution of introducing, can not only increase the absorption of film layer, can more cause defect, affect the service life of film layer.
There is following defect in the traditional thermal evaporation coating clamp for using at present：Ultrasound wave cleaning process and coating process
Using different fixtures, carrying out fixture conversion after cleaning can cause component contamination；After element one side plating made membrane, to element
Carrying out turn-over needs to touch element, can cause component contamination, and when component size is larger and during relatively thin edge, turn-over is more difficult,
There is chipping dangerous.
The content of the invention
It is an object of the invention to provide a kind of cleaning and the fixture that is integrated of plated film, solve in prior art in cleaning and
The technical problem of component contamination and chipping is caused during plated film.
The fixture that a kind of cleaning of the present invention and plated film are integrated, including microscope base S1, microscope base S2, connecting elements, multiple cleanings
Support component and multiple fixing components；
The microscope base S1With the microscope base S2For annular, in microscope base S1With microscope base S2Interior bone at be provided with it is circular recessed
Groove；The plurality of cleaning supporting member circumference uniform distribution is in microscope base S1With microscope base S2Between, cleaning supporting member passes through screw and microscope base
S1With microscope base S2It is fixedly connected, the multiple connecting elements of circumference uniform distribution between the adjacent cleaning supporting member of each two；Connecting elements leads to
Cross screw and microscope base S1With microscope base S2It is fixedly connected, microscope base S1With microscope base S2The multiple screwed holes of upper circumference uniform distribution, fixing component and spiral shell
Pit coordinates.
The plurality of cleaning supporting member includes politef block, support, screw a, screw b, screw c and screw d, gathers
Tetrafluoroethene block and support pass through screw a, screw b and screw c connects, screw d lock-screw c.
The plurality of fixing component is polyacetals bulb jackscrew, polyacetals bulb jackscrew and microscope base S1With microscope base S2Screw thread
Hole coordinates.
The fixing component is spring-loaded plunger, spring-loaded plunger and microscope base S2On screwed hole coordinate, and with connecting elements on
Screwed hole coordinate.
The fixing component is stainless steel ball crown silk, stainless steel ball crown silk and microscope base S2On screwed hole coordinate, and
Coordinate with the screwed hole on connecting elements.
The plurality of connecting elements is 2.
The plurality of cleaning supporting member is 3.
The plurality of fixture is 3.
The plurality of screwed hole is 3, has a screwed hole described in each two between connecting elements.
The Advantageous Effects of the present invention：The fixture that present invention cleaning and plated film are integrated, as cleaning and plated film are same
Carry out in one fixture, it is to avoid the element after cleaning be transformed into during coating clamp caused by component contamination；In element one side
When carrying out turn-over plated film after crossing made membrane, due to being that operation fixture carries out turn-over rather than operating element carries out turn-over, it is to avoid
Touch component contamination caused by element；And edge relatively thin element larger for size, knocks during being prevented effectively from turn-over
Touch the risk with chipping；The present invention is not only simple in structure, is easy to operation, and saves the operating time of switch fixture.
Description of the drawings
Fig. 1 is the structure chart cleaned to element by the fixture that a kind of cleaning of the present invention and plated film are integrated；
Fig. 2 is the structure chart of the cleaning supporting member of the fixture that a kind of cleaning of the present invention and plated film are integrated；
Fig. 3 is the structure chart that the fixture that a kind of cleaning of the present invention and plated film are integrated carries out plated film to the one side of element；
Fig. 4 is the structure chart that the fixture that a kind of cleaning of the present invention and plated film are integrated carries out turn-over to element
Wherein, 1, microscope base S1, 2, microscope base S2, 3, connecting elements, 4, cleaning supporting member, 401, politef block, 402,
Support, 403, screw a, 404, screw b, 405, screw c, 406, screw d, 5, polyacetals bulb jackscrew, 6, spring-loaded plunger, 7, no
Rust steel ball crown silk.
Specific embodiment
The present invention is further elaborated below in conjunction with the accompanying drawings.
Referring to accompanying drawing 1, accompanying drawing 2, accompanying drawing 3 and accompanying drawing 4, the fixture that a kind of cleaning of the present invention and plated film are integrated includes microscope base
S11st, microscope base S22nd, multiple connecting elements 3, multiple cleaning supporting members 4 and fixing component；
The microscope base S11 and the microscope base S22 is annular, in microscope base S11 and microscope base S2Circle is provided with 2 interior bone
Connected in star；The plurality of cleaning supporting member circumference uniform distribution is in microscope base S11 and microscope base S2Between 2, cleaning supporting member passes through screw
With microscope base S11 and microscope base S22 are fixedly connected, the multiple connecting elements of circumference uniform distribution between the adjacent cleaning supporting member of each two；Even
Connection member is by screw and microscope base S11 and microscope base S22 are fixedly connected, microscope base S11 and microscope base S2The multiple screwed holes of circumference uniform distribution on 2,
Fixing component is coordinated with screwed hole.
The cleaning supporting member 4 includes politef block 401, support 402, screw a403, screw b404, screw
C405 and screw d406, politef block 401 and support 402 pass through screw a403, screw b404 and screw c405 connects, spiral shell
Nail a403, screw b404, screw c405 and screw d406 complete support, clamping and the locking to politef block 401 jointly,
Wherein screw a403, screw b404 are used to support ethylene block, screw c405 to be used for the position for adjusting politef block 401, make
Politef block 401 is close to element, and screw d406 is used for lock-screw c405.
The plurality of fixing component is polyacetals bulb jackscrew 5, polyacetals bulb jackscrew 5 and microscope base S11 and microscope base S22
Screwed hole coordinates.
The fixing component is spring-loaded plunger 6, spring-loaded plunger 6 and microscope base S2Screwed hole on 2 coordinates, and and connecting elements
Screwed hole on 3 coordinates.
The fixing component is stainless steel ball crown silk 7, stainless steel ball crown silk 7 and microscope base S2Screwed hole on 2 coordinates,
And coordinate with the screwed hole on connecting elements 3.
Wherein, the element, spring-loaded plunger 6 when polyacetals bulb jackscrew 5 is used for fixed cleaning is used to limit element during plated film
Position, stainless steel ball crown silk 7 be used for turn-over when retaining element.
The plurality of connecting elements 3 is 2.
The plurality of cleaning supporting member 4 is 3.
The plurality of screwed hole is 3, has a screwed hole described in each two between connecting elements 3.
This fixture carries out cleaning to element, the overall process of plated film and turn-over is：
First element is cleaned, element to be cleaned is placed on into microscope base S11 and microscope base S2In the middle of 2, and use polyacetals ball
Element is propped up by crown silk 5, make the upper and lower surface of element respectively with microscope base S11 and microscope base S22 leave space, prevent the mistake cleaned
Water in journey, connecting elements 3 by screw respectively with microscope base S11 and microscope base S22 are fixedly connected, and cleaning supporting member 4 passes through screw
Respectively with microscope base S11 and microscope base S22 are fixedly connected, and the side of element to be cleaned is by the politef block 401 for cleaning supporting mechanism
It is fixed：Ethylene block is supported with screw a403, screw b404 first, then the position of politef block 401 is adjusted with screw c405,
Make politef block 401 be close to element, and then element to be cleaned is clamped, finally with screw d406 lock-screw c405.Will
This fixture is placed in the cleaning basket of ultrasonic washing unit, is treated cleaning element and is cleaned.
After element is cleaned, fixture is taken out, remove cleaning supporting member 4 and microscope base S11 and microscope base S2Polyacetals on 2
Bulb jackscrew 5, makes element drop to microscope base S2In circular groove in 2, and in microscope base S1The correspondence of the polyacetals bulb jackscrew 5 on 1
Position is screwed into spring-loaded plunger 6, with restriction element axial dipole field and motion.And spring stack is screwed in the screwed hole of connecting elements 3
Plug 6, with restriction element radial deflection and motion.By the microscope base S of this fixture22 downward onto in coater planetary plate to element
One side carry out plated film.
Element has been coated with after one side, is prepared turn-over and is coated with another side.Fixture is taken out, microscope base S is pulled down11 and connecting elements 3
On spring-loaded plunger 6, and be screwed into stainless steel ball crown silk 7 in correspondence position, element is fixed on inside fixture, turnover fixture,
Make microscope base S11 below, pulls down microscope base S11 and connecting elements 3 on stainless steel ball crown silk 7, and be screwed into spring in correspondence position
Plunger 6, is axially and radially offset and is moved with restriction element, by the microscope base S of this fixture11 downward onto coater planetary plate
The interior another side to element carries out plated film.Element is taken out, that is, is completed and element is cleaned in same fixture and plated film
Process.
Claims (9)
1. the fixture that a kind of cleaning and plated film are integrated, it is characterised in that including microscope base S1 (1), microscope base S2 (2), connecting elements
(3), multiple cleanings supporting member (4) and multiple fixing components；
The microscope base S1 (1) and the microscope base S2 (2) are annular, are opened at the interior bone of microscope base S1 (1) and microscope base S2 (2)
There is circular groove；Between microscope base S1 (1) and microscope base S2 (2), cleaning is supported the plurality of cleaning supporting member (4) circumference uniform distribution
Component (4) is fixedly connected with microscope base S1 (1) and microscope base S2 (2) by screw, between the adjacent cleaning supporting member (4) of each two
The multiple connecting elements of circumference uniform distribution；Connecting elements (3) is fixedly connected with microscope base S1 (1) and microscope base S2 (2) by screw, microscope base S1
(1) the multiple screwed holes of circumference uniform distribution and on microscope base S2 (2), fixing component are coordinated with screwed hole.
2. the fixture that a kind of cleaning and plated film are integrated according to claim 1, it is characterised in that the plurality of cleaning is supported
Component (4) includes politef block (401), support (402), screw a (403), screw b (404), screw c (405) and screw
D (406), politef block (401) and support (402) are connected by screw a (403), screw b (404) and screw c (405),
Screw d (406) lock-screw c (405).
3. a kind of fixture that cleaning and plated film are integrated according to claim 1, it is characterised in that the plurality of fixing component
It is polyacetals bulb jackscrew (5), polyacetals bulb jackscrew (5) and microscope base S1And microscope base S (1)2(2) screwed hole coordinates.
4. the fixture that a kind of cleaning and plated film are integrated according to claim 1, it is characterised in that the fixing component is bullet
Spring plunger (6), spring-loaded plunger (6) and microscope base S2(2) screwed hole on coordinates, and coordinates with the screwed hole on connecting elements (3).
5. the fixture that a kind of cleaning and plated film are integrated according to claim 1, it is characterised in that the fixing component is not
Rust steel ball crown silk (7), stainless steel ball crown silk (7) and microscope base S2(2) screwed hole on coordinates, and with connecting elements (3) on
Screwed hole coordinate.
6. a kind of fixture that cleaning and plated film are integrated according to claim 1, it is characterised in that the plurality of connecting elements
(3) it is 2.
7. the fixture that a kind of cleaning and plated film are integrated according to claim 1, it is characterised in that the plurality of cleaning is supported
Component (4) is 3.
8. a kind of cleaning and the fixture that is integrated of plated film according to claim 1, it is characterised in that the plurality of fixture is
3.
9. a kind of cleaning and the fixture that is integrated of plated film according to claim 1, it is characterised in that the plurality of screwed hole is
3, between connecting elements described in each two (3), there is a screwed hole.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410604535.XA CN104404470B (en) | 2014-10-29 | 2014-10-29 | The fixture that a kind of cleaning and plated film are integrated |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410604535.XA CN104404470B (en) | 2014-10-29 | 2014-10-29 | The fixture that a kind of cleaning and plated film are integrated |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN104404470A CN104404470A (en) | 2015-03-11 |
| CN104404470B true CN104404470B (en) | 2017-04-05 |
Family
ID=52642132
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201410604535.XA Expired - Fee Related CN104404470B (en) | 2014-10-29 | 2014-10-29 | The fixture that a kind of cleaning and plated film are integrated |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN104404470B (en) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101928921A (en) * | 2009-12-22 | 2010-12-29 | 中国科学院长春光学精密机械与物理研究所 | Coating film supporting mechanism of high temperature deposition hard mask of film coating workpiece |
| CN104057380A (en) * | 2014-07-01 | 2014-09-24 | 中国科学院长春光学精密机械与物理研究所 | High-precision square flat plate clamp used for optical element polishing |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE19533402A1 (en) * | 1995-09-09 | 1997-03-13 | Leybold Ag | Device for holding plate-shaped body in frame passing before coating unit |
-
2014
- 2014-10-29 CN CN201410604535.XA patent/CN104404470B/en not_active Expired - Fee Related
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101928921A (en) * | 2009-12-22 | 2010-12-29 | 中国科学院长春光学精密机械与物理研究所 | Coating film supporting mechanism of high temperature deposition hard mask of film coating workpiece |
| CN104057380A (en) * | 2014-07-01 | 2014-09-24 | 中国科学院长春光学精密机械与物理研究所 | High-precision square flat plate clamp used for optical element polishing |
Also Published As
| Publication number | Publication date |
|---|---|
| CN104404470A (en) | 2015-03-11 |
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|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20170405 Termination date: 20181029 |