CN101928921A - Coating film supporting mechanism of high temperature deposition hard mask of film coating workpiece - Google Patents
Coating film supporting mechanism of high temperature deposition hard mask of film coating workpiece Download PDFInfo
- Publication number
- CN101928921A CN101928921A CN2009102180597A CN200910218059A CN101928921A CN 101928921 A CN101928921 A CN 101928921A CN 2009102180597 A CN2009102180597 A CN 2009102180597A CN 200910218059 A CN200910218059 A CN 200910218059A CN 101928921 A CN101928921 A CN 101928921A
- Authority
- CN
- China
- Prior art keywords
- workpiece
- film
- coating
- steel ball
- stop dog
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Images
Landscapes
- Physical Vapour Deposition (AREA)
Abstract
The invention relates to a coating film supporting mechanism of a high temperature deposition hard mask of a film coating workpiece, belonging to auxiliary equipment of optical coating. The coating film supporting mechanism comprises a film coating tray, a stop dog groove, a workpiece stop dog, a locking screw, a steel ball and a steel ball caulking groove. The middle part of the film coating tray is provided with an opening for placing the film coating workpiece, the four sides of the tray are provided with radial stop dog grooves for installing the workpiece stop dog, the workpiece stop dog moves in the groove, the inclined plane of the workpiece stop dog is embedded with a steel ball (rolling ball), the steel ball rolls in the caulking groove, the workpiece stop dog is fixed in the stop dog groove by the locking screw, the edges of the film coating workpiece are all provided with tapers, the film coating workpiece is placed on the inclined plane of the workpiece stop dog and contacts with the steel evenly, and then the film coating workpiece and the entire device are both placed into a circular ring tray of the film coating machine. The mechanism of the invention can ensure that uniform force is exerted on each steel ball and the workpiece, the position of the stop dog can be freely adjusted in a certain scope according to the dimension of the workpiece; in addition, the chucking power for adjusting the workpiece can be provided by expansion or shrinkage force generated from high temperature or low temperature to drive the steel ball to roll; and the mechanism of the invention features in simple structure and high cost performance.
Description
Invention field
The invention belongs to optical coating technical study field, relate generally to the optical coating utility appliance.
Background technology
The aircraft infrared window not only will satisfy the performance requriements of high optical transmittance, and want severe environment such as the anti-weathering of energy, husky erosion to impact, this just needs plating diamond film on its outer surface, and will be coated with the diamond-film-like of high rigidity, and temperature must reach more than 200 ℃ during plated film.
Will be on the infrared window outside surface be unified the plating diamond film, just can not there be any blocking in plated film auxiliary mechanism (workpiece is installed jig etc.) to the workpiece coating film area, all there is bevelling at infrared window edges all in film-coating workpiece, can pass through the bevelling supporting workpiece.But the linear expansivity of medium wave or LONG WAVE INFRARED crystalline material (as MgF2, ZnS) and workpiece are installed the linear expansivity of jig material (as aluminium, copper etc.) and are differed greatly.When coating equipment heated, workpiece was installed jig and is expanded greatly, and infrared crystal expands little, the workpiece segment distance that will fall in jig is installed; And in plated film end temperature-fall period, workpiece is installed jig and shunk greatly, and infrared crystal shrinks little, and is mobile voluntarily as not making it, is easy to squeeze the infrared window of broken costliness.
Summary of the invention
The present invention has taken into full account the material of plated film vacuum environment and hot environment and has selected problem, has designed a cover plated film auxiliary mechanism, can make film-coating workpiece (as infrared window) can avoid the fragmentation that is squeezed from line displacement in plated film intensification and temperature-fall period.
The coating film supporting mechanism of a kind of film-coating workpiece high temperature deposition hard mask of the present invention, concrete structure is seen Fig. 1, this coating film supporting mechanism comprises plated film pallet, block groove, workpiece block, locking screw, steel ball and steel ball caulking groove.The opening of laying film-coating workpiece is arranged in the middle of the plated film pallet, there is the radial stop groove that the workpiece block is installed on pallet four limits, the workpiece block moves in groove, inlay steel ball (ball) on the workpiece block inclined-plane, steel ball can roll in caulking groove, the workpiece block is fixed in the block groove with locking screw, all there is bevelling at the film-coating workpiece edge, can pass through the bevelling supporting workpiece, film-coating workpiece be placed on the inclined-plane of workpiece block and with the steel ball uniform contact, the shape of the opening of plated film pallet and size are complementary with film-coating workpiece.Then film-coating workpiece and whole device are put into coating equipment annulus pallet simultaneously.
Positively effect of the present invention: inlay steel ball on workpiece block inclined-plane, steel ball can roll in caulking groove, has satisfied simultaneously that high low temperature did not indeformablely lose efficacy, anchorage force is big and the little functional requirement of frictional force; The plated film pallet is machined grooves radially, unclamps locking screw, and the workpiece block can both can guarantee that each steel ball and workpiece contact force were even along groove (guiding) displacement, can freely adjust stop location within the specific limits according to workpiece size again; Complete assembly only is made of three parts, and expansion that the holding force of regulating the location of workpiece only produces by high low temperature or convergent force drive steel ball and roll and realize, and is simple in structure, cost performance is high.
Description of drawings:
Fig. 1 is the plated film supporting structure synoptic diagram of a kind of film-coating workpiece high temperature deposition hard mask of the present invention, wherein plated film pallet 1, workpiece block 3, locking screw 6, film-coating workpiece 7.
Fig. 2 is a plated film support holder structure synoptic diagram, comprising block groove 2.
Fig. 3 inlays steel ball structure figure on the workpiece block, comprising steel ball 4 and steel ball caulking groove 5.
Embodiment:
To be coated with infrared window is the use of example explanation coating film supporting mechanism:
Clean plated film pallet, workpiece block, locking screw,, the workpiece block is fixed on the plated film pallet with locking screw according to workpiece size.Film-coating workpiece is placed on the plated film bracing or strutting arrangement, makes steel ball and workpiece slope uniform contact.Then, workpiece and whole device are put into coating equipment annulus pallet, intensification, plated film, cooling simultaneously.Machine to be coated cools off fully, and workpiece and plated film bracing or strutting arrangement are taken off simultaneously, unloads film-coating workpiece, finishes plated film.
Claims (2)
1. the coating film supporting mechanism of a film-coating workpiece high temperature deposition hard mask is characterized in that this coating film supporting mechanism comprises plated film pallet (1), block groove (2), workpiece block (3), locking screw (4), steel ball (5) and steel ball caulking groove (6);
Each position component and annexation: the opening of laying film-coating workpiece is arranged in the middle of the plated film pallet (1), there is the radial stop groove (2) that the workpiece block is installed on pallet four limits, workpiece block (3) moves in block groove (2), workpiece block (3) is inlayed steel ball (5) on the inclined-plane, steel ball (5) rolls in steel ball caulking groove (6), workpiece block (3) is fixed in the block groove (2) with locking screw (4), all there is bevelling at film-coating workpiece (7) edge, by the bevelling supporting workpiece, film-coating workpiece (7) be placed on the inclined-plane of workpiece block (3) and with steel ball (5) uniform contact, then film-coating workpiece and whole device are put into coating equipment annulus pallet simultaneously.
2. the coating film supporting mechanism of film-coating workpiece high temperature deposition hard mask according to claim 1 is characterized in that the shape and the size of the opening of described plated film pallet (1) is complementary with film-coating workpiece (7).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2009102180597A CN101928921B (en) | 2009-12-22 | 2009-12-22 | Coating film supporting mechanism of high temperature deposition hard mask of film coating workpiece |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2009102180597A CN101928921B (en) | 2009-12-22 | 2009-12-22 | Coating film supporting mechanism of high temperature deposition hard mask of film coating workpiece |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN101928921A true CN101928921A (en) | 2010-12-29 |
| CN101928921B CN101928921B (en) | 2012-04-11 |
Family
ID=43368343
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2009102180597A Expired - Fee Related CN101928921B (en) | 2009-12-22 | 2009-12-22 | Coating film supporting mechanism of high temperature deposition hard mask of film coating workpiece |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN101928921B (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104404470A (en) * | 2014-10-29 | 2015-03-11 | 中国科学院长春光学精密机械与物理研究所 | Clamp for combination of cleaning and film plating |
| CN111118453A (en) * | 2020-01-21 | 2020-05-08 | 上海现代先进超精密制造中心有限公司 | Coating tool for large square reflector |
| CN114488374A (en) * | 2022-03-11 | 2022-05-13 | 中国科学院长春光学精密机械与物理研究所 | Preparation tool for metal film layer of echelle grating and use method of preparation tool |
-
2009
- 2009-12-22 CN CN2009102180597A patent/CN101928921B/en not_active Expired - Fee Related
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104404470A (en) * | 2014-10-29 | 2015-03-11 | 中国科学院长春光学精密机械与物理研究所 | Clamp for combination of cleaning and film plating |
| CN104404470B (en) * | 2014-10-29 | 2017-04-05 | 中国科学院长春光学精密机械与物理研究所 | The fixture that a kind of cleaning and plated film are integrated |
| CN111118453A (en) * | 2020-01-21 | 2020-05-08 | 上海现代先进超精密制造中心有限公司 | Coating tool for large square reflector |
| CN111118453B (en) * | 2020-01-21 | 2023-09-26 | 上海现代先进超精密制造中心有限公司 | Coating fixture for large square reflector |
| CN114488374A (en) * | 2022-03-11 | 2022-05-13 | 中国科学院长春光学精密机械与物理研究所 | Preparation tool for metal film layer of echelle grating and use method of preparation tool |
Also Published As
| Publication number | Publication date |
|---|---|
| CN101928921B (en) | 2012-04-11 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN101928921B (en) | Coating film supporting mechanism of high temperature deposition hard mask of film coating workpiece | |
| US9337371B2 (en) | Cam turntable, sun-tracking device equipped with same and control method for the device | |
| WO2010032095A3 (en) | Non-tracking solar collector device | |
| CA2908897C (en) | Centering of a plate in a holder both at room temperatures and at higher temperatures | |
| KR20110099304A (en) | Thermally activated shutdown seals for rotatable shafts | |
| JPWO2012176650A1 (en) | Solar collector mirror and solar thermal power generation system having the solar collector mirror | |
| WO2012105351A1 (en) | Solar light collecting mirror, and solar thermal power generation system comprising the solar light collecting mirror | |
| CN103376630B (en) | The housing of projection arrangement | |
| CN102377847A (en) | Mobile phone with liquid metal radiating module group | |
| WO2017187443A1 (en) | Thermal management for concentrated photo voltaic power generation system and the method thereof | |
| CN104389895A (en) | Double-direction thrust reverse sliding bearing applied to turbine | |
| JPWO2013015190A1 (en) | Solar collector mirror and solar thermal power generation system having the solar collector mirror | |
| CN110064771A (en) | Rise core fixture and its application method with gasket | |
| CN106611733B (en) | Many imports cavity heating support frame | |
| CN214307241U (en) | Integrated heat-insulating and heat-dissipating device structure of electric ceramic furnace | |
| CN113391417B (en) | Optical element supporting structure | |
| CN204140651U (en) | Magnetic suspension bearing | |
| CN208422938U (en) | A kind of two-sided monocrystalline silicon piece of surface coating | |
| CN210307302U (en) | Polishing jig for glass cover plate | |
| JP5246017B2 (en) | Sputtering equipment | |
| CN203418451U (en) | Abrasive disk | |
| CN110289338B (en) | Diffusion furnace for manufacturing solar photovoltaic cell | |
| CN204341667U (en) | A kind of complementary connector from chip removal | |
| CN221337138U (en) | Rotatory DOE device and wafer processing stealthy equipment | |
| CN214422705U (en) | Novel controllable cooling of copper pipe annealing stove device |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C17 | Cessation of patent right | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20120411 Termination date: 20131222 |