CN104360275A - Fuel cell internal temperature-humidity-current density synchronous measurement sensor - Google Patents
Fuel cell internal temperature-humidity-current density synchronous measurement sensor Download PDFInfo
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- CN104360275A CN104360275A CN201410637420.0A CN201410637420A CN104360275A CN 104360275 A CN104360275 A CN 104360275A CN 201410637420 A CN201410637420 A CN 201410637420A CN 104360275 A CN104360275 A CN 104360275A
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Abstract
The invention discloses a fuel cell internal temperature-humidity-current density synchronous measurement sensor and belongs to the field of fuel cell internal parameter measurement. Each temperature-humidity-current density synchronous measurement sensor body is made by a vacuum evaporation coating method and comprises ninth layers of films, the first layer is a silicon dioxide insulation layer, the second layer is a bottom electrode aluminium coating, the third layer is coated with a high molecular polymer humidity-sensing medium, the fourth layer is coated with a top electrode aluminium coating by evaporation, the fifth and sixth layers are respectively coated with a film thermocouple copper coating and a film thermocouple nickel coating by evaporation, the seventh layer is a silicon dioxide protection layer, and the eighth and ninth layers are coated with a current density measurement copper coating and a current density measurement gold coating respectively by evaporation. One ends of leads are connected with the temperature-humidity-current density synchronous measurement sensor bodies while the other ends extend to the edges of a flow field plate for transmitting electrical signals. Synchronous measurement of internal temperature, humidity and current density of a fuel cell is realized, special modification on the structure of the fuel cell is not required, and the sensor can be arranged on the fuel cell flow field plate with flow channels of various shapes.
Description
Technical field
The invention belongs to fuel battery inside parameter measurement field, relate to the measurement of fuel battery inside temperature, humidity and local current densities, particularly fuel battery inside temperature-humidity-current density translocation sensor.
Background technology
The performance of fuel cell is subject to the impact of many factors, as temperature, and humidity, reacting gas concentration, flow etc.By the measurement to fuel battery inside temperature, humidity and current density, can reflect the mechanism that various factors affects fuel battery performance, therefore the measurement of fuel battery inside parameter receives the concern of more and more researchist.
For temperature survey, traditional measuring method is thermopair, thermal resistance or micro temperature sensor are implanted in fuel cell or with the membrane electrode of fuel cell to be hot pressed into one mostly, these methods need to carry out special transformation, processed complex to the flow-field plate of fuel cell or pole plate mostly; Be hot pressed into one with fuel cell membrane electrode, easily have an impact to the performance of membrane electrode, cost of manufacture is high simultaneously.For moisture measurement, method has by perforate on fuel cell flow field board, implant the humidity of humidity sensor to fuel battery inside to measure, the method needs to carry out special process and remould to the flow-field plate of fuel cell, difficulty of processing is large, and has certain destructiveness to the sealing of fuel cell; In addition, employing etching technics is also had to make humidity sensor to implant the method that fuel battery inside carries out moisture measurement.The measurement of current density, method mainly contains sub-battery method, membrane electrode split plot design, magnet ring group method etc., mostly needs to carry out special transformation to the pole plate of fuel cell, and make complicated, difficulty of processing is large.
Meanwhile, if measure temperature, humidity and current density respectively, need to carry out being dismounted for multiple times to fuel cell or carry out special transformation to the structure of fuel cell.Because the influence factor of the performance of fuel cell is very many, dismounting repeatedly or the change of structure all can have a great impact its performance, also make front and back Data Comparison lack accuracy.
The present invention is by adopting vacuum evaporation coating film method, film thermocouple, humicap and current density are measured the coat of metal to be integrated on a sensor, achieve the synchro measure of fuel battery inside temperature, humidity and current density, decrease the dismounting number of times to fuel cell, can be arranged on fuel cell flow field board easily, do not need to carry out special transformation to the flow-field plate of fuel cell, ensure that the stable of fuel battery performance.
Summary of the invention
The object of the present invention is to provide a kind of sensor that can carry out translocation to fuel battery inside temperature, humidity and current density.This invention structure is simple, and easy to make, the position on fuel cell flow field board is flexible.
For realizing above-mentioned technical purpose, technical scheme of the present invention is as follows: fuel battery inside temperature-humidity-current density translocation sensor, comprise fuel cell flow field board 1, temperature-humidity-current density translocation sensor 4, lead-in wire 5, fuel cell flow field board 1 is provided with runner 2 and ridge 3, temperature-humidity-current density translocation sensor 4 is arranged on the ridge 3 between fuel cell flow field board 1 liang of adjacent channels 2, one end of lead-in wire 5 connects with the wiring exit of temperature-humidity-current density translocation sensor 4, and the other end extends to the edge of fuel cell flow field board 1; During fuel cell assembling, fuel cell flow field board 1 is furnished with temperature-humidity-current density translocation sensor 4 facing to fuel cell membrane electrode side and close contact with it.
Described temperature-humidity-current density translocation sensor 4 comprises film thermocouple temperature measuring unit, humicap hygrometric unit and current density are measured the coat of metal and are surveyed current unit, vacuum evaporation coating film method is adopted to make, comprise nine layer films: ground floor is the thick silicon dioxide insulating layer 15 for 0.08-0.12 μm on the ridge 3 of evaporation between fuel cell flow field board 1 liang of adjacent channels 2, as dielectric substrate, the second layer is the thick bottom electrode aluminium coat 16 for 1.0-1.2 μm of evaporation on silicon dioxide insulating layer 15, third layer is above bottom electrode aluminium coat 16, apply the high molecular polymer humidity-sensitive medium layer 17 that thick layer is 0.5-1 μm, 4th layer is the thick top electrode aluminium coat 18 for 1.0-1.2 μm of evaporation above high molecular polymer humidity-sensitive medium layer 17, described top electrode aluminium coat 18, high molecular polymer humidity-sensitive medium layer 17 and bottom electrode aluminium coat 16 constitute humicap, and head end is humicap wiring exit 35, and wherein the shape of top electrode aluminium coat 18 is snakelike, layer 5 is the thick film thermocouple copper coating 19 for 0.1-0.12 μm of evaporation on silicon dioxide insulating layer 15, and layer 6 is the thick film thermocouple nickel coating 20 for 0.1-0.12 μm of evaporation on silicon dioxide insulating layer 15, described film thermocouple copper coating 19 and film thermocouple nickel coating 20 constitute film thermocouple, and head end is film thermocouple wiring exit 34, the shape of film thermocouple copper coating 19 and film thermocouple nickel coating 20 is strip, and mesophase spherule lap connects, and lap-joint forms film thermocouple hot junction node 33, layer 7 is the thick silicon dioxide layer of protection 21 for 0.08-0.12 μm of evaporation above top electrode aluminium coat 18, film thermocouple copper coating 19 and film thermocouple nickel coating 20,8th layer for above the silicon dioxide layer of protection 21 at film thermocouple copper coating 19 and film thermocouple nickel coating 20 place evaporation thick layer be that the current density of 1.5-2.0 μm measures copper coating 22, the 9th layer be measure in current density the current density measurement gold plate 23 that evaporation thick layer above copper coating 22 is 0.1-0.12 μm, described current density measures copper coating 22 and current density measurement gold plate 23 is overlapped, constitutes current density and measures the coat of metal 36, and head end is that current density measures coat of metal wiring exit 37.
Described film thermocouple wiring exit 34, humicap wiring exit 35 and current density are measured coat of metal wiring exit 37 and are all made into circle, and are all arranged in the same side of silicon dioxide insulating layer 15.
The making step of temperature-humidity-current density translocation sensor comprises step one 24, step 2 25, step 3 26, step 4 27, step 5 28, step 6 29, step 7 30, step 8 31, step 9 32; Specifically, step one 24, according to silicon dioxide insulating layer mask 6 evaporation layer of silicon dioxide insulation course 15 on the ridge 3 of fuel cell flow field board 1, as the dielectric substrate of sensor; Step 2 25, according to bottom electrode aluminium coat mask 7 evaporation one deck bottom electrode aluminium coat 16 on silicon dioxide insulating layer 15; Step 3 26, applies one deck high molecular polymer humidity-sensitive medium layer 17 according to high molecular polymer humidity-sensitive medium layer mask 8 above bottom electrode aluminium coat 16; Step 4 27, according to top electrode aluminium coat mask 9 evaporation one deck top electrode aluminium coat 18 above high molecular polymer humidity-sensitive medium layer 17; Step 5 28, according to film thermocouple copper coating mask 10 evaporation thin film thermopair copper coating 19 on silicon dioxide insulating layer 15; Step 6 29, according to film thermocouple nickel coating mask 11 evaporation thin film thermopair nickel coating 20 on silicon dioxide insulating layer 15; Step 7 30, according to silicon dioxide layer of protection mask 12 evaporation layer of silicon dioxide protective seam 21 above top electrode aluminium coat 18, film thermocouple copper coating 19 and film thermocouple nickel coating 20; Step 8 31, above film thermocouple copper coating 19 and the right silicon dioxide layer of protection 21 of film thermocouple nickel coating 20, measure copper coating mask 13 according to current density, evaporation one Lyer current density measures copper coating 22; Step 9 32, measures above copper coating 22 in current density, measures gold plate mask 14 evaporation one Lyer current density measure gold plate 23 according to current density; Form temperature-humidity-current density translocation sensor by above step, external metering circuit and data acquisition equipment can realize the synchro measure to fuel battery inside temperature, humidity and current density.
In described temperature-humidity-current density translocation sensor 4, silicon dioxide insulating layer 15 can be made into square, circular, polygon, trapezoidal, triangle, irregular figure.
The coat of metal material of top electrode and bottom electrode in described humicap, also can select gold, copper, platinum to replace.
The shape of described top electrode aluminium coat 18 sets according to the shape of mask, and its shape also can be zigzag, pectination.
In described temperature measuring unit film thermocouple, the simple metal coating be made up of copper and mickel can also select tungsten and nickel, copper and cobalt, molybdenum and nickel, antimony and cobalt to substitute, and metal mixture material such as copper and constantan also can be adopted to substitute.
In described temperature-humidity-current density translocation sensor 4, the shape of film thermocouple copper coating 19 and film thermocouple nickel coating 20 sets according to the shape of mask, its shape can also be ellipse, arc, waveform, rhombus and irregularly shaped, and the shape mutually after overlap joint can be arc, waveform, serrate.
The shape that described current density measures copper coating 22 and current density measurement gold plate 23 sets according to the shape of mask, can be rectangle, ellipse, circle, triangle, trapezoidal, irregular figure.
The shape that described film thermocouple wiring exit 34, humicap wiring exit 35 and current density measure coat of metal wiring exit 37 also can be ellipse, rectangle, trapezoidal, triangle, the both sides being arranged in silicon dioxide insulating layer 15 that its position also can be relative.
The width of described lead-in wire 5 is 0.1-0.2mm; be made up of the four-level membrane of vacuum evaporation coating film method evaporation: ground floor is the lead-in wire silicon dioxide insulating layer 38 of thick 0.08-0.12 μm; the second layer is the lead-in wire copper coating 39 of thick 0.1-0.12 μm; third layer is the lead-in wire gold plate 40 of thick 0.1-0.12 μm, and most last layer is the lead-in wire silicon dioxide layer of protection 41 of thick 0.05-0.1 μm.
Lead-in wire silicon dioxide insulating layer 38 is all consistent in shape, position and size with the gold plate 40 that goes between with lead-in wire copper coating 39, and lead-in wire silicon dioxide layer of protection 41 is identical in shape with position with three first layers, but in close flow-field plate edge, outline is shorter than three first layers.
The shape of described fuel cell flow field board 1 upper runner 2 can be parallel fluid channels, snakelike single channel runner, serpentine multichannel runner, interdigitated gas distributor stream, irregular runner.
Compared with prior art, the present invention has following beneficial effect.
Adopt fuel battery inside of the present invention temperature-humidity-current density translocation sensor, the synchro measure to fuel battery inside temperature, humidity and current density can be realized; This invention structure is simple, and easy to make, volume is little, and cost is low, is applicable to the fuel cell flow field board of various flow channel shape, and without the need to carrying out special transformation to the flow-field plate of fuel cell or pole plate, facilitates fuel battery inside measuring multiple parameters.
Accompanying drawing explanation
Fig. 1 is the subjective schematic diagram that temperature-humidity-current density translocation sensor is arranged in parallel fluid channels flow-field plate;
Fig. 2 is the subjective schematic diagram of single temperature-humidity on fuel cell flow field board-current density translocation sensor;
Fig. 3 is the Making programme figure of single temperature-humidity on fuel cell flow field board-current density translocation sensor;
Fig. 4 is the subjective schematic diagram in cross section of temperature-humidity-current density translocation sensor lead;
Fig. 5 is the subjective schematic diagram that temperature-humidity-current density translocation sensor is arranged in interdigitated gas distributor flow-field plate;
Fig. 6 is the subjective schematic diagram that temperature-humidity-current density translocation sensor is arranged on snakelike single channel fluid flow on channel plate;
Fig. 7 is the subjective schematic diagram that temperature-humidity-current density translocation sensor is arranged on serpentine multichannel fluid flow on channel plate;
In figure, 1, fuel cell flow field board, 2, runner, 3, ridge, 4, temperature-humidity-current density translocation sensor, 5, lead-in wire;
6-14 is each layer mask of temperature-humidity-current density translocation sensor: 6, silicon dioxide insulating layer mask, 7, bottom electrode aluminium coat mask, 8, high molecular polymer humidity-sensitive medium layer mask, 9, top electrode aluminium coat mask, 10, film thermocouple copper coating mask, 11, film thermocouple nickel coating mask, 12, silicon dioxide layer of protection mask, 13, current density measures copper coating mask, and 14, current density measures gold plate mask;
15-23 is the temperature-humidity-each rete of current density translocation sensor according to mask fabrication: 15, silicon dioxide insulating layer, 16, bottom electrode aluminium coat, 17, high molecular polymer humidity-sensitive medium layer, 18, top electrode aluminium coat, 19, film thermocouple copper coating, 20, film thermocouple nickel coating, 21, silicon dioxide layer of protection, 22, current density measure copper coating, 23, current density measure gold plate;
24-32 is the making step of temperature-humidity-current density translocation sensor: 24, step one, 25, step 2,26, step 3,27, step 4,28, step 5,29, step 6,30, step 7,31, step 8,32, step 9;
33, film thermocouple hot junction node, 34, film thermocouple wiring exit, 35, humicap wiring exit, 36, current density measures the coat of metal, 37, current density measures coat of metal wiring exit;
38, go between silicon dioxide insulating layer, 39, lead-in wire copper coating, 40, lead-in wire gold plate, 41, lead-in wire silicon dioxide layer of protection;
Embodiment
Below in conjunction with accompanying drawing, the invention will be further described.
With reference to shown in Fig. 1, fuel battery inside temperature-humidity of the present invention-current density translocation sensor, comprise fuel cell flow field board 1, temperature-humidity-current density translocation sensor 4, lead-in wire 5, temperature-humidity-current density translocation sensor 4 is arranged on the ridge 3 between fuel cell flow field board 1 liang of adjacent channels 2, one end of lead-in wire 5 is connected with the wiring exit of temperature-humidity-current density translocation sensor 4, the other end extends to the edge of flow-field plate, for transmitting the electric signal that temperature-humidity-current density translocation sensor produces; When fuel cell is assembled, fuel cell flow field board 1 is furnished with temperature-humidity-current density translocation sensor 4 facing to membrane electrode side and close contact with it.
With reference to shown in Fig. 2, temperature-humidity of the present invention-current density translocation sensor 4 comprises film thermocouple temperature measuring unit, humicap hygrometric unit and current density are measured the coat of metal and are surveyed current unit, vacuum evaporation coating film method is adopted to be made, comprise nine layer films: ground floor is the thick silicon dioxide insulating layer 15 for 0.08-0.12 μm on the ridge 3 of evaporation between fuel cell flow field board 1 liang of adjacent channels 2, as dielectric substrate, the second layer is the thick bottom electrode aluminium coat 16 for 1.0-1.2 μm of evaporation on silicon dioxide insulating layer 15, third layer is above bottom electrode aluminium coat 16, apply the high molecular polymer humidity-sensitive medium layer 17 that thick layer is 0.5-1 μm, 4th layer is the thick top electrode aluminium coat 18 for 1.0-1.2 μm of evaporation above high molecular polymer humidity-sensitive medium layer 17, layer 5 is the thick film thermocouple copper coating 19 for 0.1-0.12 μm of evaporation on silicon dioxide insulating layer 15, layer 6 is the thick film thermocouple nickel coating 20 for 0.1-0.12 μm of evaporation on silicon dioxide insulating layer 15, layer 7 is at top electrode aluminium coat 18, the top evaporation of film thermocouple copper coating 19 and film thermocouple nickel coating 20 thick is the silicon dioxide layer of protection 21 of 0.08-0.12 μm, 8th layer for above the silicon dioxide layer of protection 21 at film thermocouple copper coating 19 and film thermocouple nickel coating 20 place evaporation thick layer be that the current density of 1.5-2.0 μm measures copper coating 22, 9th layer for measuring the current density measurement gold plate 23 that evaporation thick layer above copper coating 22 is 0.1-0.12 μm in current density.
Fig. 3 is Making programme figure: 6-14 of single temperature-humidity-current density translocation sensor is each layer mask of temperature-humidity-current density translocation sensor, 15-23 is the temperature-humidity-each rete of current density translocation sensor according to mask fabrication, and 24-32 is the making step of temperature-humidity-current density translocation sensor.First on the ridge 3 of fuel cell flow field board 1 according to silicon dioxide insulating layer mask 6 evaporation layer of silicon dioxide insulation course 15, as the substrate of sensor, and fully insulate with fuel cell flow field board, completing steps 1; Step 2 25 is according to bottom electrode aluminium coat mask 7 evaporation one deck bottom electrode aluminium coat 16 on silicon dioxide insulating layer 15, step 3 26 for apply one deck high molecular polymer humidity-sensitive medium layer 17 according to high molecular polymer humidity-sensitive medium layer mask 8 above bottom electrode aluminium coat 16, and step 4 27 is according to top electrode aluminium coat mask 9 evaporation one deck top electrode aluminium coat 18 above high molecular polymer humidity-sensitive medium layer 17; Bottom electrode aluminium coat 16, high score polymkeric substance humidity-sensitive medium layer 17 and top electrode aluminium coat 18 constitute humicap, achieve the measurement of humidity; Step 5 28 is according to film thermocouple copper coating mask 10 evaporation thin film thermopair copper coating 19 on silicon dioxide insulating layer 15, and step 6 29 is according to film thermocouple nickel coating mask 11 evaporation thin film thermopair nickel coating 20 on silicon dioxide insulating layer 15; Film thermocouple copper coating 19 and film thermocouple nickel coating 20 constitute film thermocouple, thus achieve temperature survey; Step 7 30 is according to silicon dioxide layer of protection mask 12 evaporation layer of silicon dioxide protective seam 21 above humicap upper electrode metal coating and the film thermocouple coat of metal; Step 8 31 is by above film thermocouple copper coating 19 and the right silicon dioxide layer of protection 21 of film thermocouple nickel coating 20, and measure copper coating mask 13 according to current density, evaporation one Lyer current density measures copper coating 22; Step 9 32 is measure above copper coating 22 in current density, and measure gold plate mask 14 according to current density, evaporation one Lyer current density measures gold plate 23; Current density measures copper coating 22 and current density measurement gold plate 23 is overlapped, constitutes current density and measures the coat of metal 36, thus achieve the measurement of current density; Form temperature-humidity-current density translocation sensor by above step, external metering circuit and data acquisition equipment can realize the synchro measure to fuel battery inside temperature, humidity and current density.
Wherein, the global shape of temperature-humidity-current density translocation sensor is decided by the shape of silicon dioxide insulating layer, it is square that it not only can be made into shown in Fig. 3, can be made into circle, polygon, trapezoidal, other shape such as triangle, irregular figure.The metal material of the humicap top electrode that step 2 25 and step 4 27 complete and bottom electrode also can select other metal substitutes such as gold, copper, platinum, wherein, the shape of humicap top electrode aluminium coat 18 sets according to the shape of mask, what not only can be shown in Fig. 3 is snakelike, also can be other shapes such as zigzag, pectination.The shape of the film thermocouple copper coating 19 that step 5 28 and step 6 29 complete and film thermocouple nickel coating 20 is strip, and mesophase spherule lap connects, and lap-joint forms film thermocouple hot junction node 33; The shape of film thermocouple copper coating 19 and film thermocouple nickel coating 20 is different according to the difference of mask, also can be ellipse, arc, waveform, rhombus and other shape such as irregularly shaped, the shape mutually after overlap joint can be arc, waveform, serrate etc.; The material of the film thermocouple coat of metal also can be tungsten and nickel, copper and cobalt, molybdenum and nickel, antimony and cobalt etc. substitute, and metal mixture material such as copper and constantan also can be adopted to substitute.Current density that step 8 31 and step 9 32 complete is measured the shape that copper coating 22 and current density measure gold plate 23 and is set according to the shape of mask, also can be other shapes such as rectangle, ellipse, circle, triangle, trapezoidal, irregular figure.
The head end of film thermocouple is film thermocouple wiring exit 34, the head end of humicap is humicap wiring exit 35, the head end that current density measures the coat of metal is that current density measures coat of metal wiring exit 37, it act as and is conveniently connected with lead-in wire 5, carries out the conduction of electric signal.The shape that film thermocouple wiring exit 34, humicap wiring exit 35 and current density measure coat of metal wiring exit 37 not only can be the shape shown in Fig. 3, also can be other shapes such as ellipse, rectangle, trapezoidal, triangle, its position can be arranged in the same side of silicon dioxide insulating layer 15, the both sides being arranged in silicon dioxide insulating layer 15 that also can be relative.
Fig. 4 is the schematic cross-section of temperature-humidity-current density translocation sensor lead, the width of this lead-in wire 5 is 0.1-0.2mm, be made up of the four-level membrane of vacuum evaporation coating film method evaporation: ground floor is the lead-in wire silicon dioxide insulating layer 38 of thick 0.08-0.12 μm, the second layer is the lead-in wire copper coating 39 of thick 0.1-0.12 μm, third layer is the lead-in wire gold plate 40 of thick 0.1-0.12 μm, and most last layer is the lead-in wire silicon dioxide layer of protection 41 of thick 0.05-0.1 μm; Lead-in wire silicon dioxide insulating layer 38 is all consistent in shape, position and size with the gold plate 40 that goes between with lead-in wire copper coating 39; lead-in wire silicon dioxide layer of protection 41 is identical in shape with position with three first layers; but in close flow-field plate edge; outline is shorter than three first layers, is connected with the lead-in wire of external data collecting device to facilitate.
Fig. 5 is the temperature-humidity-layout schematic diagram of current density translocation sensor in interdigitated gas distributor flow-field plate, the ridge of interdigitated gas distributor flow-field plate is furnished with temperature-humidity-current density translocation sensor 4,5 one end that go between connect with temperature-humidity-current density translocation sensor wiring exit, and the other end extends to flow-field plate edge.
Fig. 6 is the layout schematic diagram of temperature-humidity-current density translocation sensor on snakelike single channel fluid flow on channel plate, the ridge of flow-field plate is furnished with temperature-humidity-current density translocation sensor 4,5 one end that go between connect with temperature-humidity-current density translocation sensor wiring exit, and the other end extends to flow-field plate edge.
Fig. 7 is the temperature-humidity-layout schematic diagram of current density translocation sensor on serpentine multichannel fluid flow on channel plate, the ridge of flow-field plate is furnished with temperature-humidity-current density translocation sensor 4,5 one end that go between connect with temperature-humidity-current density translocation sensor wiring exit, and the other end extends to flow-field plate edge.
Adopt fuel battery inside of the present invention temperature-humidity-current density translocation sensor, can the temperature of Simultaneous Monitoring fuel battery inside, humidity and current density.The method simplicity of design, easy to make, do not need to carry out special transformation to fuel cell flow field board or pole plate, reduce cost of manufacture.
Claims (10)
1. fuel battery inside temperature-humidity-current density translocation sensor, comprise fuel cell flow field board (1), temperature-humidity-current density translocation sensor (4), lead-in wire (5), fuel cell flow field board (1) is provided with runner (2) and ridge (3), temperature-humidity-current density translocation sensor (4) is arranged on the ridge (3) between fuel cell flow field board (1) two adjacent channels (2), one end of lead-in wire (5) connects with the wiring exit of temperature-humidity-current density translocation sensor (4), the other end extends to the edge of fuel cell flow field board (1), during fuel cell assembling, fuel cell flow field board (1) is furnished with temperature-humidity-current density translocation sensor (4) facing to fuel cell membrane electrode side and close contact with it, it is characterized in that:
Described temperature-humidity-current density translocation sensor (4) comprises film thermocouple temperature measuring unit, humicap hygrometric unit and current density are measured the coat of metal and are surveyed current unit, vacuum evaporation coating film method is adopted to make, comprise nine layer films: ground floor is the thick silicon dioxide insulating layer (15) for 0.08-0.12 μm on the ridge (3) of evaporation between fuel cell flow field board (1) two adjacent channels (2), as dielectric substrate, the second layer is the thick bottom electrode aluminium coat (16) for 1.0-1.2 μm at the upper evaporation of silicon dioxide insulating layer (15), the high molecular polymer humidity-sensitive medium layer (17) of third layer at bottom electrode aluminium coat (16) top coating thick layer being 0.5-1 μm, 4th layer is the thick top electrode aluminium coat (18) for 1.0-1.2 μm at high molecular polymer humidity-sensitive medium layer (17) top evaporation, described top electrode aluminium coat (18), high molecular polymer humidity-sensitive medium layer (17) and bottom electrode aluminium coat (16) constitute humicap, head end is humicap wiring exit (35), and wherein the shape of top electrode aluminium coat (18) is snakelike, layer 5 is the thick film thermocouple copper coating (19) for 0.1-0.12 μm at the upper evaporation of silicon dioxide insulating layer (15), and layer 6 be the film thermocouple nickel coating (20) of 0.1-0.12 μm at the upper evaporation of silicon dioxide insulating layer (15) thick, described film thermocouple copper coating (19) and film thermocouple nickel coating (20) constitute film thermocouple, and head end is film thermocouple wiring exit (34), the shape of film thermocouple copper coating (19) and film thermocouple nickel coating (20) is strip, and mesophase spherule lap connects, and lap-joint forms film thermocouple hot junction node (33), layer 7 is in top electrode aluminium coat (18), the top evaporation of film thermocouple copper coating (19) and film thermocouple nickel coating (20) thick is the silicon dioxide layer of protection (21) of 0.08-0.12 μm, 8th layer of top evaporation thick layer for the silicon dioxide layer of protection (21) at film thermocouple copper coating (19) and film thermocouple nickel coating (20) place is current density measurement copper coating (22) of 1.5-2.0 μm, 9th layer of current density measurement gold plate (23) at the top evaporation thick layer of current density measurement copper coating (22) being 0.1-0.12 μm, described current density measures copper coating (22) and current density measurement gold plate (23) is overlapped, constitute current density and measure the coat of metal (36), head end is that current density measures coat of metal wiring exit (37),
Described film thermocouple wiring exit (34), humicap wiring exit (35) and current density are measured coat of metal wiring exit (37) and are all made into circle, and are all arranged in the same side of silicon dioxide insulating layer (15).
The making step of temperature-humidity-current density translocation sensor comprises step one (24), step 2 (25), step 3 (26), step 4 (27), step 5 (28), step 6 (29), step 7 (30), step 8 (31), step 9 (32); Specifically, step one (24), according to silicon dioxide insulating layer mask (6) evaporation layer of silicon dioxide insulation course (15) on the ridge (3) of fuel cell flow field board (1), as the dielectric substrate of sensor; Step 2 (25), according to bottom electrode aluminium coat mask (7) evaporation one deck bottom electrode aluminium coat (16) on silicon dioxide insulating layer (15); Step 3 (26), according to high molecular polymer humidity-sensitive medium layer mask (8) at bottom electrode aluminium coat (16) top coating one deck high molecular polymer humidity-sensitive medium layer (17); Step 4 (27), in the top of high molecular polymer humidity-sensitive medium layer (17) according to top electrode aluminium coat mask (9) evaporation one deck top electrode aluminium coat (18); Step 5 (28), according to film thermocouple copper coating mask (10) at upper evaporation thin film thermopair copper coating (19) of silicon dioxide insulating layer (15); Step 6 (29), according to film thermocouple nickel coating mask (11) at upper evaporation thin film thermopair nickel coating (20) of silicon dioxide insulating layer (15); Step 7 (30), in the top of top electrode aluminium coat (18), film thermocouple copper coating (19) and film thermocouple nickel coating (20) according to silicon dioxide layer of protection mask (12) evaporation layer of silicon dioxide protective seam (21); Step 8 (31), film thermocouple copper coating (19) and film thermocouple nickel coating (20) right silicon dioxide layer of protection (21) top, measure copper coating mask (13) according to current density, evaporation one Lyer current density measures copper coating (22); Step 9 (32), measures the top of copper coating (22) in current density, measure gold plate mask (14) evaporation one Lyer current density measure gold plate (23) according to current density; Form temperature-humidity-current density translocation sensor by above step, external metering circuit and data acquisition equipment can realize the synchro measure to fuel battery inside temperature, humidity and current density.
2. fuel battery inside temperature-humidity according to claim 1-current density translocation sensor, is characterized in that: silicon dioxide insulating layer (15) can be made into square, circular, polygon, trapezoidal, triangle, irregular figure in described temperature-humidity-current density translocation sensor (4).
3. fuel battery inside temperature-humidity according to claim 1-current density translocation sensor, is characterized in that: the coat of metal material of top electrode and bottom electrode in described humicap, and gold, copper, platinum also can be selected to replace.
4. fuel battery inside temperature-humidity according to claim 1-current density translocation sensor, it is characterized in that: the shape of described top electrode aluminium coat (18) sets according to the shape of mask, and its shape also can be zigzag, pectination.
5. fuel battery inside temperature-humidity according to claim 1-current density translocation sensor, it is characterized in that: in described temperature measuring unit film thermocouple, the simple metal coating be made up of copper and mickel can also select tungsten and nickel, copper and cobalt, molybdenum and nickel, antimony and cobalt to substitute, and metal mixture material such as copper and constantan also can be adopted to substitute.
6. fuel battery inside temperature-humidity according to claim 1-current density translocation sensor, it is characterized in that: in described temperature-humidity-current density translocation sensor (4), the shape of film thermocouple copper coating (19) and film thermocouple nickel coating (20) sets according to the shape of mask, its shape can also be ellipse, arc, waveform, rhombus and irregularly shaped, and the shape mutually after overlap joint can be arc, waveform, serrate.
7. fuel battery inside temperature-humidity according to claim 1-current density translocation sensor, it is characterized in that: the shape that described current density measures copper coating (22) and current density measurement gold plate (23) sets according to the shape of mask, can be rectangle, ellipse, circle, triangle, trapezoidal, irregular figure.
8. fuel battery inside temperature-humidity according to claim 1-current density translocation sensor, it is characterized in that: the shape that described film thermocouple wiring exit (34), humicap wiring exit (35) and current density measure coat of metal wiring exit (37) also can be ellipse, rectangle, trapezoidal, triangle, the both sides being arranged in silicon dioxide insulating layer (15) that its position also can be relative.
9. fuel battery inside temperature-humidity according to claim 1-current density translocation sensor, it is characterized in that: the width of described lead-in wire (5) is 0.1-0.2mm, be made up of the four-level membrane of vacuum evaporation coating film method evaporation: ground floor is the lead-in wire silicon dioxide insulating layer (38) of thick 0.08-0.12 μm, the second layer is the lead-in wire copper coating (39) of thick 0.1-0.12 μm, third layer is the lead-in wire gold plate (40) of thick 0.1-0.12 μm, and most last layer is the lead-in wire silicon dioxide layer of protection (41) of thick 0.05-0.1 μm;
Lead-in wire silicon dioxide insulating layer (38) with go between copper coating (39) and the gold plate (40) that goes between all consistent in shape, position and size; lead-in wire silicon dioxide layer of protection (41) is identical in shape with position with three first layers; but in close flow-field plate edge, outline is shorter than three first layers.
10. fuel battery inside temperature-humidity according to claim 1-current density translocation sensor, is characterized in that: the shape of described fuel cell flow field board (1) upper runner (2) can be parallel fluid channels, snakelike single channel runner, serpentine multichannel runner, interdigitated gas distributor stream, irregular runner.
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