CN104332430B - Silicon chip online weighing control system and control method thereof - Google Patents
Silicon chip online weighing control system and control method thereof Download PDFInfo
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- CN104332430B CN104332430B CN201410448204.1A CN201410448204A CN104332430B CN 104332430 B CN104332430 B CN 104332430B CN 201410448204 A CN201410448204 A CN 201410448204A CN 104332430 B CN104332430 B CN 104332430B
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- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 title claims abstract description 197
- 229910052710 silicon Inorganic materials 0.000 title claims abstract description 197
- 239000010703 silicon Substances 0.000 title claims abstract description 197
- 238000005303 weighing Methods 0.000 title claims abstract description 174
- 238000000034 method Methods 0.000 title claims abstract description 99
- 238000001514 detection method Methods 0.000 claims abstract description 134
- 238000012545 processing Methods 0.000 claims abstract description 95
- 230000008569 process Effects 0.000 claims description 73
- 230000007704 transition Effects 0.000 claims description 67
- 230000032258 transport Effects 0.000 claims description 55
- 230000005540 biological transmission Effects 0.000 claims description 54
- 238000007599 discharging Methods 0.000 claims description 39
- 208000020442 loss of weight Diseases 0.000 claims description 30
- 239000007788 liquid Substances 0.000 claims description 11
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 9
- 230000033001 locomotion Effects 0.000 claims description 8
- 238000013016 damping Methods 0.000 claims description 7
- 230000007423 decrease Effects 0.000 claims description 7
- 238000012544 monitoring process Methods 0.000 claims description 6
- 238000012360 testing method Methods 0.000 claims description 4
- 238000003032 molecular docking Methods 0.000 claims description 3
- 238000005457 optimization Methods 0.000 claims description 3
- 230000007115 recruitment Effects 0.000 claims description 3
- 239000013589 supplement Substances 0.000 claims description 3
- 230000009469 supplementation Effects 0.000 claims description 3
- 238000012546 transfer Methods 0.000 claims description 3
- 230000007306 turnover Effects 0.000 claims description 3
- 238000004519 manufacturing process Methods 0.000 abstract description 5
- 238000010835 comparative analysis Methods 0.000 abstract description 3
- 210000001503 joint Anatomy 0.000 abstract 1
- 239000000463 material Substances 0.000 description 8
- 238000010586 diagram Methods 0.000 description 6
- 235000008216 herbs Nutrition 0.000 description 4
- 210000002268 wool Anatomy 0.000 description 4
- 230000002159 abnormal effect Effects 0.000 description 3
- 230000009471 action Effects 0.000 description 3
- 230000005611 electricity Effects 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 3
- 238000004458 analytical method Methods 0.000 description 2
- 238000010923 batch production Methods 0.000 description 2
- 238000004140 cleaning Methods 0.000 description 2
- 239000003814 drug Substances 0.000 description 2
- 229940079593 drug Drugs 0.000 description 2
- 238000005530 etching Methods 0.000 description 2
- 238000001039 wet etching Methods 0.000 description 2
- 241000208340 Araliaceae Species 0.000 description 1
- 235000005035 Panax pseudoginseng ssp. pseudoginseng Nutrition 0.000 description 1
- 235000003140 Panax quinquefolius Nutrition 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000000686 essence Substances 0.000 description 1
- 235000008434 ginseng Nutrition 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 238000007689 inspection Methods 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 238000005304 joining Methods 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000003020 moisturizing effect Effects 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 239000000741 silica gel Substances 0.000 description 1
- 229910002027 silica gel Inorganic materials 0.000 description 1
- 239000004575 stone Substances 0.000 description 1
- 230000001256 tonic effect Effects 0.000 description 1
- 230000009466 transformation Effects 0.000 description 1
- 235000012431 wafers Nutrition 0.000 description 1
- 238000004260 weight control Methods 0.000 description 1
Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67242—Apparatus for monitoring, sorting or marking
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67242—Apparatus for monitoring, sorting or marking
- H01L21/67253—Process monitoring, e.g. flow or thickness monitoring
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67242—Apparatus for monitoring, sorting or marking
- H01L21/67276—Production flow monitoring, e.g. for increasing throughput
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/18—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
- H01L31/1876—Particular processes or apparatus for batch treatment of the devices
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
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- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Electromagnetism (AREA)
- Automation & Control Theory (AREA)
- Weight Measurement For Supplying Or Discharging Of Specified Amounts Of Material (AREA)
Abstract
The invention discloses a silicon chip online weighing control system which includes a processing device used for carrying out technological processing on a silicon chip, and a feed weighing system and a discharge weighing system, which are arranged at the two ends of the processing device and are in butt joint with the processing device. All of the feed and discharge weighing systems and the processing device are connected with a central processing system. The central processing system controls the feed and discharge weighing systems to weigh and transport the silicon chip and records weight data fed back by the feed and discharge weighing systems and calculates a reduction weight before and after a silicon chip technological processing and then compares a reduction weight with a standard reduction weight so as to judge whether the reduction weight is normal and then adjusts processing parameters of the processing device according to the judgment result. The invention also discloses a control method for the silicon chip online weighing control system. The system is capable of realizing automatic online detection of silicon chip weights before and after processing and carries out automatic comparative analysis and adjustment of the processing parameters through the central processing control system so that the production quality and production efficiency of the silicon chip are improved.
Description
Technical field
The present invention relates to photovoltaic industry cleaning equipment and wet processing apparatus, more particularly, to a kind of silicon chip claims online
Weight control system and its control method.
Background technology
In the cleaning process and wet-treating flow process of solar silicon wafers, especially making herbs into wool and wet-etching technology flow process,
Silicon chip loss of weight is directly to reflect one of key factor of its making herbs into wool and etching effect, and the test of current silicon chip loss of weight be entirely according to
Lai Yu manually completes, and concrete grammar is first silicon chip to be taken on the electronic scale of one side weighed amount and record, then
Put and carried out PROCESS FOR TREATMENT to corresponding processing equipment, taken again after having processed after weighing up process on same electronic scale
Weight, correspond and calculate its loss of weight amount with the weight of before processing, further according to loss of weight amount go adjust relevant device technique
Parameter, when apparatus and process adjusts entrance batch production in addition it is also necessary to the repetition above procedure of not timing is inspected by random samples to silicon chip
To guarantee that exception in PROCESS FOR TREATMENT.
Not only loaded down with trivial details with upper type, but also in batch production technique can not be completely secured and occur extremely sending out in time
Existing, consequently, it is possible to leading to bad of this operation to flow to subsequent processing, ultimately result in the large batch of photoelectric transformation efficiency of appearance low
Under cell piece.
Therefore, the silicon chip weight after a kind of on-line checking before processing, automatic comparative analysis adjusting process ginseng how are designed
The silicon chip online weighing control system of number and its control method are industry technical problems urgently to be resolved hurrily.
Content of the invention
For solving above-mentioned technical problem, the silicon chip weight after a kind of present invention on-line checking before processing of proposition, contrast automatically
The silicon chip online weighing control system of analysis adjusting process parameter and its control method.
The technical solution used in the present invention is to design a kind of silicon chip online weighing control system, including：For entering to silicon chip
The process equipment of row PROCESS FOR TREATMENT and central processing unit, the two ends of described process equipment are provided with interfaced charging and weigh and are
System and discharging weighing system, described charging and discharging weighing system is all connected with central processing unit；Described charging weighing system and going out
Material weighing system all includes：The alignment means for silicon chip feeding and alignment of docking setting, the title weighed for silicon chip successively
Refitting puts, for the silicon chip smooth transfer after the completion of weighing to next process equipment transition apparatus；Described central authorities process dress
Put control charging and discharging weighing system silicon chip to be weighed and transmits, the weight data of record charging and discharging weighing system feedback is simultaneously
Calculate the loss of weight amount before and after silicon chip PROCESS FOR TREATMENT, then the loss of weight calculating amount is judged whether with the contrast of standard loss of weight amount
Abnormal, according to judged result, the technological parameter of process equipment is adjusted.
Described alignment means include：Least one set alignment transmission channel, described alignment transmission channel is provided with：Support, parallel
Belt is transported in two alignment being used for transporting silicon chip on support, for driving described two alignment to transport the alignment electricity of belt movement
Machine, is respectively arranged on first and second detection switch that belt head and the tail two ends are transported in alignment, the second detection in every group of alignment transmission channel
Switch is in same position and is provided with independent alignment motor.
Described weighing device includes：The transmission channel of weighing coordinating with transmission channel quantity of aliging, described transmission of weighing is logical
Road is provided with：Centre be provided with through hole and liftable prop up platform, parallel weigh located at propping up to be used on platform transporting the two of silicon chip
Transport belt, transport the motor of weighing of belt for driving described two to weigh, fixation stretches out through hole and less than transport belt of weighing
The LOAD CELLS of top surface, is adjacent to the 3rd detection switch propping up on platform with LOAD CELLS phase, located at propping up platform bottom
The cylinder in face, located at the 4th detection switch propping up outside platform；4th detection switch is provided with upper and lower two test positions.
Described transition apparatus include：With the transition transmission channel of transmission channel quantity cooperation of aliging, described transition is transmitted logical
Road includes：Support, parallel two transition being used for transporting silicon chip on support are transported belt, are used for driving described two transition to transport
The adjustable speed transition motor of belt movement, the 5th detection switch located at transition transport belt tail end.
First and second detection switch controls the on off state of alignment motor, and the 3rd detection switch controls the switch of motor of weighing
State, the on off state of the 3rd detection switch and the 4th detection switch co- controlling cylinder, the 5th detection switch controls transition electricity
The on off state of machine, the second detection switch, the 3rd detection switch and the 5th detection switch are all connected with central processing unit.
Described charging and discharging weighing system also includes：It is installed on damping device, the peace being used for reducing vibrations below weighing device
It is loaded on weighing device both sides for reducing the wind-proof device of air-flow.
Described damping device includes：Be fixed on the foot rest on ground, located at the beam on foot rest, joining on beam
Pouring weight, the mounting bracket on balancing weight, described LOAD CELLS is fixedly installed in described mounting bracket；Described windproof dress
Put including：It is fixed at the translucent cover weighing in transmission channel, described translucent cover top surface machine surrounding sealing, described translucent cover is respectively
It is provided with the breach accommodating silicon chip turnover with the side of transmission channel two ends cooperation of weighing.
Described central processing system includes：Central processing unit, with the display alarm module being connected central processing unit connection, prison
Control system database, described monitoring system monitors the running status of charging and discharging weighing system, and described central processing unit judges to subtract
Whether weight data is abnormal.
Present invention also offers a kind of control method of above-mentioned silicon chip online weighing control system, comprise the following steps：
Step 1, startup optimization, system initialization；
Step 2, manual or automatic device are to charging weighing system feeding；
Silicon chip in every group of transmission channel is all transported to the second detection and opens by step 3, the alignment means of charging weighing system
At pass, then transport silicon chip to charging weighing device；
Silicon chip is transported to weighing positions and is weighed by step 4, charging weighing device, and central processing unit is to weight data
Preserved, charging weighing device continues to transport backward silicon chip；
Silicon chip transition is transported to next process equipment by step 5, charging transition apparatus；
Step 6, process equipment carry out PROCESS FOR TREATMENT to silicon chip, then transport silicon chip to discharging weighing system；
Silicon chip in every group of transmission channel is all transported to the second detection and opens by step 7, the alignment means of discharging weighing system
At pass, then transport silicon chip to discharging weighing device；
Silicon chip is transported to weighing positions and is weighed by step 8, discharging weighing device, and central processing unit is to weight data
Carry out preserving and the weight data before and after PROCESS FOR TREATMENT is analyzed and judges, according to judged result to process equipment
Technological parameter be adjusted, discharging weighing device continue backward transport silicon chip；
Silicon chip transition is transported to next process equipment by step 9, discharging transition apparatus.
The silicon chip transport alignment procedure of described step 7 is identical with step 3, and described step 3 includes：
Step 3.1, the first detection switch of certain group transmission channel detect silicon chip；
Silicon chip is transmitted rearward at a high speed by step 3.2, the alignment motor starting in this transmission channel；
After step 3.3, the second detection switch detect silicon chip arrival, stop the alignment motor of this transmission channel；
Step 3.4, all silicon chip is detected when every group of second detection switch, or wherein several groups do not have silicon chip but the first detection is opened
When pass is not detected by new silicon chip charging in setting time, carry out step 3.5, otherwise return to step 3.2；
Step 3.5, all alignment motors start simultaneously, the electric motor starting of weighing of weighing device, to charging weighing device fortune
Send silicon chip, central processing unit records to every group of silicon chip simultaneously；
Step 3.6, alignment motor stop after the second detection switch loses signal.
Wherein, described step 4 includes：
Step 4.1, motor of weighing transport silicon chip backward, and after the 3rd detection switch detects silicon chip arrival, motor of weighing stops
Rotation stop is moved；
Step 4.2, central processing unit confirm whether the silicon chip that the 3rd detection switch detects is consistent with record silicon chip quantity,
Inconsistent then alarm；
Step 4.3, cylinder decline, and so that silicon chip is fallen within LOAD CELLS, and the 4th detection switch detection props up platform and reaches
Bottom, cylinder stops；
Step 4.4, central processing unit read weight data, and each scan period records a weight data, removes simultaneously
The invalid data of large deviation, when valid data reach set point number, calculates averaged weight value, and is stored to data
Storehouse；
Step 4.5, weighing completes, and cylinder rises, and the 4th detection switch detection props up platform and reaches upper, cylinder stops,
Weigh electric motor starting, transition electric motor starting simultaneously；
Step 4.6, motor of weighing stop after the 3rd detection switch loses signal.
Wherein, described step 8 includes：
Step 8.1, motor of weighing transport silicon chip backward, and after the 3rd detection switch detects silicon chip arrival, motor of weighing stops
Rotation stop is moved；
Step 8.2, central processing unit confirm whether the silicon chip that the 3rd detection switch detects is consistent with record silicon chip quantity,
Inconsistent then alarm；
Step 8.3, cylinder decline, and so that silicon chip is fallen within LOAD CELLS, and the 4th detection switch detection props up platform and reaches
Bottom, cylinder stops；
Step 8.4, central processing unit read weight data, and each scan period records a weight data, removes simultaneously
The invalid data of large deviation, when valid data reach set point number, calculates averaged weight value, and is stored to data
Storehouse, and the weight data before and after PROCESS FOR TREATMENT is analyzed and judges, the technique to process equipment according to judged result
Parameter is adjusted；
Step 8.5, weighing completes, and cylinder rises, and the 4th detection switch detection props up platform and reaches upper, cylinder stops,
Weigh electric motor starting, transition electric motor starting simultaneously；
Step 8.6, motor of weighing stop after the 3rd detection switch loses signal.
Wherein, described step 9 is identical with the silicon chip transition transport process of step 5, and described step 5 includes：
Step 5.1, transition motor transport silicon chip backward, when the 5th detection switch detects silicon chip, transition motor adjustment speed
Degree is consistent with the travelling speed of process equipment,；
Step 5.2, central processing unit confirm whether silicon chip quantity is identical with record quantity, inconsistent then alarm；
Step 5.3, transition motor stop after the 5th detection switch loses signal.
Wherein, described step 8.4 includes：
Step 8.4.1, central processing unit read weight data；
Step 8.4.2, each scan period record a weight data, remove the invalid data of large deviation simultaneously；
Step 8.4.3, when valid data reach set point number, calculate averaged weight value, and stored to data
Storehouse；
The weight data before and after same silicon chip PROCESS FOR TREATMENT transferred by step 8.4.4, central processing unit, compares and draws loss of weight
Amount, loss of weight amount is shown in real time with curve mode, stores to database simultaneously；
Step 8.4.5, actual loss of weight amount and preset standard value are compared, if subtracting gravimetric anomaly, carry out step 7.4.6,
Otherwise do not carry out；
Step 8.4.6, judge to require supplementation with liquid or water according to difference, and magnitude of recruitment is calculated according to default formula；
Step 8.4.7, process equipment carry out the supplement of liquid or water to treatment trough.
Compared with prior art, silicon chip weight before and after the present invention enables automatic on-line detection process, pass through centre
The reason automatic comparative analysis of control system adjusting process parameter, improve the quality of production and the production efficiency of silicon chip.
Brief description
With reference to embodiment and accompanying drawing, the present invention is described in detail, wherein：
Fig. 1 is the Whole Work Flow schematic diagram of the present invention；
Fig. 2 is the entry/exit material weighing system structural front view of the present invention；
Fig. 3 is the entry/exit material weighing system structure top view of the present invention；
Fig. 4 is that the weighing device of the present invention is in upper schematic diagram；
Fig. 5 is that the weighing device of the present invention is in the next schematic diagram；
Fig. 6 installs the entry/exit material weighing system structural front view after wind-proof device for the present invention；
Fig. 7 is the system initialization workflow diagram of the present invention；
Fig. 8 is the workflow schematic diagram of entry/exit material alignment means of the present invention；
Fig. 9 feeds the schematic flow sheet of weighing of weighing device for the present invention；
Figure 10 is the schematic flow sheet of weighing of discharging weighing device of the present invention；
Figure 11 is the workflow schematic diagram of entry/exit material transition apparatus of the present invention；
Figure 12 is that the loss of weight amount of the present invention judges and technical arrangement plan schematic flow sheet.
Specific embodiment
Silicon chip online weighing control system proposed by the present invention, carries out two by the weight untreated and processed to silicon chip
Secondary measurement, contrasts the loss of weight amount measuring twice, judges whether exception according to the contrast of loss of weight amount and standard loss of weight amount, and to technique
Parameter is adjusted, and makes loss of weight amount recover normal range (NR), the making herbs into wool especially for silicon chip and wet-etching technology flow process are carried out
Line Weighing control, that is, process equipment be making herbs into wool or wet-method etching equipment, this kind of process equipment be typically provided with conveyer belt, rinse bath,
Water pipe and drug liquid tube, technological parameter is the liquor strength in rinse bath, by water pipe or drug liquid tube to rinse bath add water or
Liquid, thus changing rinse bath liquor strength, improves the silicon chip quality of production.
As shown in figure 1, specifically including：For silicon chip is carried out with the process equipment of PROCESS FOR TREATMENT, the two ends of process equipment set
Interfaced charging weighing system and discharging weighing system, charging and discharging weighing system and process equipment is had all to process with central authorities
System connects；Central processing system controls charging and discharging weighing system silicon chip to be weighed and transmits, and record charging and discharging are weighed
The weight data of system feedback the loss of weight amount before and after calculating silicon chip PROCESS FOR TREATMENT, then by the loss of weight calculating amount and mark
Quasi- loss of weight amount contrast judges whether exception, according to judged result, the technological parameter of process equipment is adjusted.
Central processing system includes：Central processing unit, with the display alarm module being connected central processing unit connection, monitoring system
System database, monitoring system monitors the running status of charging and discharging weighing system, and central processing unit judges whether subtract weight data
Abnormal, database is shared in local server.Central processing unit can adopt PLC（Programmable Logic Controller）.Display alarm
Module includes display and sound-producing device.When central processing unit judges loss of weight data exception, then sent out with forms such as word, sound
Go out alarm signal to be pointed out, central processing unit can be automatically adjusted to various process parameters according to default formula simultaneously,
Loss of weight amount is made to automatically reply normal range (NR).Input and output material weight data, loss of weight data etc. all can be stored in database by monitoring system,
Result is carried out export, show and inquire about at any time to facilitate.
As shown in Fig. 2 charging weighing system and discharging weighing system all include：Successively docking setting for silicon chip feeding
And the alignment means 1 of alignment, the weighing device 2 weighed for silicon chip, be used for weighing after the completion of silicon chip smooth transfer arrive down
The transition apparatus 3 of one processing equipment, central processing system is in electric appliance control box 6.
Wherein, as shown in figure 3, alignment means 1 include：Least one set alignment transmission channel, alignment transmission channel is provided with：?
Frame, belt 13 is transported in parallel two alignment being used for transporting silicon chip on support, moves for driving two alignment to transport belt 13
Alignment motor 12, being respectively arranged on alignment transport belt 13 head and the tail two ends and less than alignment transport belt 13 top surface first and second
Detection switch；The second detection switch 11 in every group of alignment transmission channel is in same position and is provided with independent alignment motor
12, first and second detection switch controls the on off state of alignment motor 12, and the second detection switch 11 is connected with central processing unit.The
One detection switch 10 is used for detection alignment transports whether there is silicon chip on belt 13 head end, and starts alignment motor 12 and transmit rearward silicon
Piece, when silicon chip reaches the second detection switch 11, alignment motor 12 stops the rotation, when every group of silicon chip all stops at the second detection switch
On 11, or wherein several groups there is no silicon chip but this group first detection switch 10 be not detected by setting time silicon chip charging
When, alignment motor 12 starts simultaneously and for silicon chip to be sent to weighing device 2, and central processing unit records to every group of silicon chip simultaneously.
As shown in Fig. 3 is to 5, weighing device 2 includes：With the transmission channel of weighing of transmission channel quantity cooperation of aliging, weigh
Transmission channel is provided with：Centre be provided with through hole and liftable prop up platform 25, parallel be used for transporting silicon on platform 25 located at propping up
The two of piece weigh and transport belt 23, transport the motor 22 of weighing of belt 23 for driving two to weigh, and fixation is stretched out through hole and is less than
Weigh and transport the LOAD CELLS 20 of belt 23 top surface, be mutually adjacent to LOAD CELLS 20 to prop up on platform 25 and be less than and weigh
Transport the 3rd detection switch 21 of belt 23 top surface, located at the cylinder 27 propping up platform 25 bottom surface, located at propping up outside platform 25
The 4th detection switch 29；4th detection switch 29 is provided with upper and lower two test positions；Every group of transmission channel of weighing is by same
Individual motor 22 of weighing simultaneously drives, and the 3rd detection switch 21 controls the on off state of motor 22 of weighing, the 3rd detection switch 21 He
The on off state of the 4th detection switch 29 co- controlling cylinder 27, the 3rd detection switch 21 is attached with central processing unit.When
When 3rd detection switch 21 detects silicon chip, motor 22 of weighing stops the rotation, and central processing unit contrasts the 3rd detection switch 21 and examines
Whether the silicon chip measuring is consistent with the silicon chip quantity of record in central processing unit, and inconsistent, alarm module is reported to the police, cylinder
27 drives prop up platform 25 and decline, and make silicon chip depart from transport belt 23 of weighing and fall within LOAD CELLS 20, the 4th detection switch
When 29 detections prop up platform 25 and reach bottom, silicon chip is completely placed on LOAD CELLS 20, cylinder 27 stop motion, has weighed
Cheng Hou, cylinder 27 starts drive and props up platform 25 and rise, the 4th detection switch 29 detection prop up platform 25 reach upper after, weigh
Motor 22 starts and for silicon chip to be sent to transition apparatus 3.
As shown in figure 3, transition apparatus 3 include：With the transition transmission channel of transmission channel quantity cooperation of aliging, transition transmission
Passage includes：Support, parallel two transition being used for transporting silicon chip on support transport belt 32, for driving two transition to transport
The adjustable speed transition motor 31 of belt 32 motion, transport belt 32 tail end located at transition and transport belt 32 top surface less than transition
5th detection switch 30；Every group of transition transmission channel is simultaneously driven by same transition motor 31, and the 5th detection switch 30 is controlled
The on off state of transition motor 31 processed, the 5th detection switch 30 is connected with central processing unit.When the 5th detection switch 30 detects
During silicon chip, transition motor 31 adjust automatically rotary speed is consistent with the travelling speed of next processing equipment, centre simultaneously
Reason device confirms that the silicon chip quantity that the 5th detection switch 30 detects is identical with the quantity of central processing unit record, differs, reports to the police
Module is reported to the police, and silicon chip is sent to next processing equipment.
Transmission channel can be arranged according to the transmission channel quantity of processing equipment, also can arrange according to actual needs, this reality
Apply in example, alignment means are provided with five groups of alignment transmission channels, the course of work is as follows, receives and starts movement instruction, as shown in fig. 7,
Central processing unit calls initialization program to carry out self-inspection and initialization to control system part.After manual or automatic device feeding,
First detection switch 10 detects silicon chip, starts alignment motor 12 and is sent to the second detection switch 11, alignment motor 12 suspends, silicon
After piece alignment, alignment motor 12 starts and for silicon chip to be sent to weighing device 2, and motor 22 of weighing starts simultaneously, and silicon chip is transferred into
During three detection switch 21, motor 22 of weighing suspends, and cylinder 27 startup drive props up platform 25 and drops to the 4th detection switch 29
Bottom, LOAD CELLS 20 is weighed to silicon chip, and after the completion of weighing, cylinder 27 starts drive and props up platform 25 and rise, when
When 4th detection switch 29 confirms to prop up platform 25 and reach upper, motor 22 of weighing starts and for silicon chip to be sent to transition apparatus 3, transition
Motor 31 starts simultaneously, when silicon chip is transferred into five detection switch 30, transition motor 31 adjust automatically rotary speed and next
The travelling speed of processing equipment is consistent, continues to be fed forward with this speed, until the 5th detection switch signal 30, transition electricity
Machine 31 quits work.Above-mentioned motion flow is all completed by central processing unit control.Additionally, central processing unit is also responsible for weight
The collection of data, analysis, and output feedback signal is joined to interfaced processing equipment so as to complete technique as needed
The adjust automatically of number.
More excellent, in order to ensure the accuracy of weighing of weighing system, charging and discharging weighing system also includes：It is installed on and weigh
It is used for below device reducing the damping device 4 of vibrations, be installed on weighing device both sides for reducing the wind-proof device 5 of air-flow.
Wherein, as shown in Figure 5,6, damping device 4 includes：It is fixed on foot rest 43, the beam on foot rest on ground
41st, located at the balancing weight 42 on beam, the mounting bracket 40 on balancing weight, LOAD CELLS 20 is fixedly installed in installation
On support 40, beam 41 adopts silica gel material to make, and can reduce the impact to weighing data for the vibrations, balancing weight 42 is using big
Reason stone, can filter further and conduct, by ground, the vibrations coming, make vibrations more steady.Wind-proof device 5 includes：It is fixed at and weigh
Translucent cover in transmission channel, translucent cover top surface machine surrounding seals, the translucent cover side with transmission channel two ends cooperation of weighing respectively
Face is provided with the breach accommodating silicon chip turnover, and translucent cover can effectively stop the impact for weighing data for the air-flow, and translucent cover is corresponding to be claimed
The position retransmitting sensor is provided with opening, is provided with switchable door, whenever necessary LOAD CELLS is being carried out with facilitating at opening
Calibration operation.Damping device and wind-proof device heighten weighing precision to greatest extent, make weighing system preferably be applied to milligram
The application scenario of level.
Present invention also offers a kind of control method of above-mentioned silicon chip online weighing control system, comprise the following steps：
Step 1, startup optimization, system initialization；
Step 2, manual or automatic device are to charging weighing system feeding；
Silicon chip in every group of transmission channel is all transported to the second detection and opens by step 3, the alignment means of charging weighing system
At pass, then transport silicon chip to charging weighing device；
Silicon chip is transported to weighing positions and is weighed by step 4, charging weighing device, and central processing unit is to weight data
Preserved, charging weighing device continues to transport backward silicon chip；
Silicon chip transition is transported to next process equipment by step 5, charging transition apparatus；
Step 6, process equipment carry out PROCESS FOR TREATMENT to silicon chip, then transport silicon chip to discharging weighing system；
Silicon chip in every group of transmission channel is all transported to the second detection and opens by step 7, the alignment means of discharging weighing system
At pass, then transport silicon chip to discharging weighing device；
Silicon chip is transported to weighing positions and is weighed by step 8, discharging weighing device, and central processing unit is to weight data
Carry out preserving and the weight data before and after PROCESS FOR TREATMENT is analyzed and judges, according to judged result to process equipment
Technological parameter be adjusted, discharging weighing device continue backward transport silicon chip；
Silicon chip transition is transported to next process equipment by step 9, discharging transition apparatus.
As shown in figure 8, the silicon chip of step 7 transports, alignment procedure is identical with step 3, and step 3 includes：
Step 3.1, the first detection switch of certain group transmission channel detect silicon chip；
Silicon chip is transmitted rearward at a high speed by step 3.2, the alignment motor starting in this transmission channel；
After step 3.3, the second detection switch detect silicon chip arrival, stop the alignment motor of this transmission channel；
Step 3.4, all silicon chip is detected when every group of second detection switch, or wherein several groups do not have silicon chip but the first detection is opened
When pass is not detected by new silicon chip charging in setting time, carry out step 3.5, otherwise return to step 3.2；
Step 3.5, all alignment motors start simultaneously, the electric motor starting of weighing of weighing device, to charging weighing device fortune
Send silicon chip, central processing unit records to every group of silicon chip simultaneously；
Step 3.6, alignment motor stop after the second detection switch loses signal.
As shown in figure 9, step 4 includes：
Step 4.1, motor of weighing transport silicon chip backward, and after the 3rd detection switch detects silicon chip arrival, motor of weighing stops
Rotation stop is moved；
Step 4.2, central processing unit confirm whether the silicon chip that the 3rd detection switch detects is consistent with record silicon chip quantity,
Inconsistent then alarm；Inconsistent explanation silicon chip drops in transporting way from transmission channel, in practical application, alarm
Central processing unit may be configured as autostop afterwards, is put silicon chip behind corresponding 3rd detection switch position by artificial, proceeds
Weigh；Any action can also be not provided with by central processing unit after alarm, proceed to weigh, this group in processing procedure of weighing
The feed weight data of transmission channel is vacant, takes out the silicon chip dropping after manually seeing alarm；
Step 4.3, cylinder decline, and so that silicon chip is fallen within LOAD CELLS, and the 4th detection switch detection props up platform and reaches
Bottom, cylinder stops；
Step 4.4, central processing unit read weight data, and each scan period records a weight data, removes simultaneously
The invalid data of large deviation, when valid data reach set point number, calculates averaged weight value, and is stored to data
Storehouse；
Step 4.5, weighing completes, and cylinder rises, and the 4th detection switch detection props up platform and reaches upper, cylinder stops,
Weigh electric motor starting, transition electric motor starting simultaneously；
Step 4.6, motor of weighing stop after the 3rd detection switch loses signal.
As shown in Figure 10, step 8 includes：
Step 8.1, motor of weighing transport silicon chip backward, and after the 3rd detection switch detects silicon chip arrival, motor of weighing stops
Rotation stop is moved；
Step 8.2, central processing unit confirm whether the silicon chip that the 3rd detection switch detects is consistent with record silicon chip quantity,
Inconsistent then alarm；Central processing unit setting action after alarm is identical with charging weighing device；
Step 8.3, cylinder decline, and so that silicon chip is fallen within LOAD CELLS, and the 4th detection switch detection props up platform and reaches
Bottom, cylinder stops；
Step 8.4, central processing unit read weight data, and each scan period records a weight data, removes simultaneously
The invalid data of large deviation, when valid data reach set point number, calculates averaged weight value, and is stored to data
Storehouse, and the weight data before and after PROCESS FOR TREATMENT is analyzed and judges, the technique to process equipment according to judged result
Parameter is adjusted；
Step 8.5, weighing completes, and cylinder rises, and the 4th detection switch detection props up platform and reaches upper, cylinder stops,
Weigh electric motor starting, transition electric motor starting simultaneously；
Step 8.6, motor of weighing stop after the 3rd detection switch loses signal.
As shown in figure 11, step 9 is identical with the silicon chip transition transport process of step 5, and step 5 includes：
Step 5.1, transition motor transport silicon chip backward, when the 5th detection switch detects silicon chip, transition motor adjustment speed
Degree is consistent with the travelling speed of process equipment,；
Step 5.2, central processing unit confirm whether silicon chip quantity is identical with record quantity, inconsistent then alarm；Report
Central processing unit setting action after alert prompting is identical with charging weighing device；
Step 5.3, transition motor stop after the 5th detection switch loses signal.
As shown in figure 12, step 8.4 includes：
Step 8.4.1, central processing unit read weight data；
Step 8.4.2, each scan period record a weight data, remove the invalid data of large deviation simultaneously；
Step 8.4.3, when valid data reach set point number, calculate averaged weight value, and stored to data
Storehouse；
The weight data before and after same silicon chip PROCESS FOR TREATMENT transferred by step 8.4.4, central processing unit, compares and draws loss of weight
Amount, loss of weight amount is shown in real time with curve mode, stores to database simultaneously；
Actual loss of weight amount and preset standard value are compared by step 8.4.5, central processing unit, if subtracting gravimetric anomaly, enter
Row step 8.4.6, is not otherwise carried out；
Step 8.4.6, judge to require supplementation with liquid or water according to difference, and magnitude of recruitment is calculated according to default formula, this
The criterion of embodiment is：Loss of weight amount is more than standard value then moisturizing, on the contrary then tonic liquid；
Step 8.4.7, process equipment carry out the supplement of liquid or water to treatment trough, have supplemented liquid through following after a while
After ring, repeat step 2.
The foregoing is only presently preferred embodiments of the present invention, not in order to limit the present invention, all essences in the present invention
Any modification, equivalent and improvement made within god and principle etc., should be included within the scope of the present invention.
Claims (9)
1. a kind of silicon chip online weighing control system, including：For silicon chip is carried out with process equipment and the centre of PROCESS FOR TREATMENT
Reason device it is characterised in that
The two ends of described process equipment are provided with interfaced charging weighing system and discharging weighing system, and described charging and discharging claim
Weight system is all connected with central processing unit；
Described charging weighing system and discharging weighing system all include：Docking setting is right for silicon chip feeding and alignment successively
Neat device, the weighing device weighed for silicon chip, be used for weighing after the completion of silicon chip smooth transfer to next process equipment
Transition apparatus；
Described central processing unit controls charging and discharging weighing system silicon chip to be weighed and transmits, and record charging and discharging are weighed and are
The weight data of system feedback the loss of weight amount before and after calculating silicon chip PROCESS FOR TREATMENT, then by the loss of weight calculating amount and standard
The contrast of loss of weight amount judges whether exception, according to judged result, the technological parameter of process equipment is adjusted；
Described alignment means include：Least one set alignment transmission channel, described alignment transmission channel is provided with：Support, parallel located at
Belt is transported in two alignment being used for transporting silicon chip on support, for driving described two alignment to transport the alignment motor of belt movement,
It is respectively arranged on first and second detection switch that belt head and the tail two ends are transported in alignment, the second detection in every group of alignment transmission channel is opened
Close and be in same position and be provided with independent alignment motor；
Described weighing device includes：The transmission channel of weighing coordinating with transmission channel quantity of aliging, described transmission channel of weighing sets
Have：Centre be provided with through hole and liftable prop up platform, parallel be used for transporting the two of silicon chip on platform and weigh transport located at propping up
Belt, transports the motor of weighing of belt for driving described two to weigh, and fixation stretches out through hole and less than transport belt top surface of weighing
LOAD CELLS, be adjacent to the 3rd detection switch propping up on platform with LOAD CELLS phase, located at propping up platform base
Cylinder, located at the 4th detection switch propping up outside platform；4th detection switch is provided with upper and lower two test positions；
Described transition apparatus include：With the transition transmission channel of transmission channel quantity cooperation of aliging, described transition transmission channel bag
Include：Support, parallel two transition being used for transporting silicon chip on support are transported belt, are used for driving described two transition to transport belt
The adjustable speed transition motor of motion, the 5th detection switch located at transition transport belt tail end；
First and second detection switch controls the on off state of alignment motor, and the 3rd detection switch controls the on off state of motor of weighing,
3rd detection switch and the on off state of the 4th detection switch co- controlling cylinder, the 5th detection switch controls opening of transition motor
Off status, the second detection switch, the 3rd detection switch and the 5th detection switch are all connected with central processing unit.
2. silicon chip online weighing control system as claimed in claim 1 it is characterised in that described charging and discharging weighing system also
Including：It is installed on below weighing device and be used for reducing the damping device of vibrations, be installed on weighing device both sides and be used for reducing air-flow
Wind-proof device；
Described damping device includes：Be fixed on the foot rest on ground, located at the beam on foot rest, the counterweight on beam
Block, the mounting bracket on balancing weight, described LOAD CELLS is fixedly installed in described mounting bracket；
Described wind-proof device includes：It is fixed at the translucent cover weighing in transmission channel, described translucent cover top surface machine surrounding seals,
Described translucent cover is provided with, with the side of transmission channel two ends cooperation of weighing, the breach accommodating silicon chip turnover respectively.
3. silicon chip online weighing control system as claimed in claim 2 is it is characterised in that described central processing unit includes：
Central processing unit, with the display alarm module being connected central processing unit connection, monitoring system database, described monitoring system prison
The running status of control charging and discharging weighing system, described central processing unit judges whether to subtract weight data extremely and according to default
Formula automatically adjusts the various process parameters of process equipment.
4. a kind of control method of silicon chip online weighing control system as claimed in claim 1 is it is characterised in that include following
Step：
Step 1, startup optimization, system initialization；
Step 2, manual or automatic device are to charging weighing system feeding；
Silicon chip in every group of transmission channel is all transported at the second detection switch by step 3, the alignment means of charging weighing system,
Transport silicon chip to charging weighing device again；
Silicon chip is transported to weighing positions and is weighed by step 4, charging weighing device, and central processing unit is carried out to weight data
Preserve, charging weighing device continues to transport backward silicon chip；
Silicon chip transition is transported to next process equipment by step 5, charging transition apparatus；
Step 6, process equipment carry out PROCESS FOR TREATMENT to silicon chip, then transport silicon chip to discharging weighing system；
Silicon chip in every group of transmission channel is all transported at the second detection switch by step 7, the alignment means of discharging weighing system,
Transport silicon chip to discharging weighing device again；
Silicon chip is transported to weighing positions and is weighed by step 8, discharging weighing device, and central processing unit is carried out to weight data
Preserve and the weight data before and after PROCESS FOR TREATMENT is analyzed and judges, the work to process equipment according to judged result
Skill parameter is adjusted, and discharging weighing device continues to transport backward silicon chip；
Silicon chip transition is transported to next process equipment by step 9, discharging transition apparatus.
5. control method as claimed in claim 4 is it is characterised in that the silicon chip of described step 7 transports alignment procedure and step 3
Identical, described step 3 includes：
Step 3.1, the first detection switch of certain group transmission channel detect silicon chip；
Silicon chip is transmitted rearward at a high speed by step 3.2, the alignment motor starting in this transmission channel；
After step 3.3, the second detection switch detect silicon chip arrival, stop the alignment motor of this transmission channel；
Step 3.4, all silicon chip is detected when every group of second detection switch, or wherein several groups do not have silicon chip but the first detection switch exists
When being not detected by new silicon chip charging in setting time, carry out step 3.5, otherwise return to step 3.2；
Step 3.5, all alignment motors start simultaneously, the electric motor starting of weighing of weighing device, transport silicon to charging weighing device
Piece, simultaneously central processing unit every group of silicon chip is recorded；
Step 3.6, alignment motor stop after the second detection switch loses signal.
6. control method as claimed in claim 5 is it is characterised in that described step 4 includes：
Step 4.1, motor of weighing transport silicon chip backward, and after the 3rd detection switch detects silicon chip arrival, motor of weighing stops turning
Dynamic；
Step 4.2, central processing unit confirm whether the silicon chip that the 3rd detection switch detects is consistent with record silicon chip quantity, differs
Cause then alarm；
Step 4.3, cylinder decline, and so that silicon chip is fallen within LOAD CELLS, and the 4th detection switch detection props up platform and reaches bottom,
Cylinder stops；
Step 4.4, central processing unit read weight data, and each scan period records a weight data, removes inclined greatly simultaneously
The invalid data of difference, when valid data reach set point number, calculates averaged weight value, and is stored to database；
Step 4.5, weighing completes, and cylinder rises, and the 4th detection switch detection props up platform and reaches upper, and cylinder stops, weighing
Electric motor starting, transition electric motor starting simultaneously；
Step 4.6, motor of weighing stop after the 3rd detection switch loses signal.
7. control method as claimed in claim 6 is it is characterised in that described step 8 includes：
Step 8.1, motor of weighing transport silicon chip backward, and after the 3rd detection switch detects silicon chip arrival, motor of weighing stops turning
Dynamic；
Step 8.2, central processing unit confirm whether the silicon chip that the 3rd detection switch detects is consistent with record silicon chip quantity, differs
Cause then alarm；
Step 8.3, cylinder decline, and so that silicon chip is fallen within LOAD CELLS, and the 4th detection switch detection props up platform and reaches bottom,
Cylinder stops；
Step 8.4, central processing unit read weight data, and each scan period records a weight data, removes inclined greatly simultaneously
The invalid data of difference, when valid data reach set point number, calculates averaged weight value, and is stored to database, and
Weight data before and after PROCESS FOR TREATMENT is analyzed and judges, according to judged result, the technological parameter of process equipment entered
Row adjustment；
Step 8.5, weighing completes, and cylinder rises, and the 4th detection switch detection props up platform and reaches upper, and cylinder stops, weighing
Electric motor starting, transition electric motor starting simultaneously；
Step 8.6, motor of weighing stop after the 3rd detection switch loses signal.
8. control method as claimed in claim 7 is it is characterised in that process is transported in the silicon chip transition of described step 9 and step 5
Identical, described step 5 includes：
Step 5.1, transition motor transport silicon chip backward, when the 5th detection switch detects silicon chip, transition motor regulate the speed with
The travelling speed of process equipment is consistent,；
Step 5.2, central processing unit confirm whether silicon chip quantity is identical with record quantity, inconsistent then alarm；
Step 5.3, transition motor stop after the 5th detection switch loses signal.
9. control method as claimed in claim 8 is it is characterised in that described step 8.4 includes：
Step 8.4.1, central processing unit read weight data；
Step 8.4.2, each scan period record a weight data, remove the invalid data of large deviation simultaneously；
Step 8.4.3, when valid data reach set point number, calculate averaged weight value, and stored to database；
The weight data before and after same silicon chip PROCESS FOR TREATMENT transferred by step 8.4.4, central processing unit, compares and draws loss of weight amount, subtracts
Weight is shown in real time with curve mode, stores to database simultaneously；
Actual loss of weight amount and preset standard value are compared by step 8.4.5, central processing unit, if subtracting gravimetric anomaly, are walked
Rapid 8.4.6, is not otherwise carried out；
Step 8.4.6, judge to require supplementation with liquid or water according to difference, and magnitude of recruitment is calculated according to default formula；
Step 8.4.7, process equipment carry out the supplement of liquid or water to treatment trough.
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| CN105665295A (en) * | 2016-01-07 | 2016-06-15 | 苏州市璟硕自动化设备有限公司 | Automatic weighing system |
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| CN111584384B (en) * | 2020-05-15 | 2024-06-25 | 苏州迈为科技股份有限公司 | Silicon wafer weighing mechanism, weighing device and online weighing method |
| CN113182207A (en) * | 2021-04-13 | 2021-07-30 | 浙江致盛包装科技有限公司 | Operation control method, system, terminal and medium for transportation weighing platform |
| CN113063272B (en) * | 2021-04-14 | 2023-11-17 | 创微微电子(常州)有限公司 | Wafer drying groove, wafer drying method and wafer drying device |
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