CN104330905B - Silicon substrate QPSK optical modulator based on two-dimensional grating coupling - Google Patents
Silicon substrate QPSK optical modulator based on two-dimensional grating coupling Download PDFInfo
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- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 title claims abstract description 40
- 229910052710 silicon Inorganic materials 0.000 title claims abstract description 40
- 239000010703 silicon Substances 0.000 title claims abstract description 40
- 239000000758 substrate Substances 0.000 title claims abstract description 35
- 230000008878 coupling Effects 0.000 title claims abstract description 19
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- 238000010438 heat treatment Methods 0.000 description 1
- GQYHUHYESMUTHG-UHFFFAOYSA-N lithium niobate Chemical compound [Li+].[O-][Nb](=O)=O GQYHUHYESMUTHG-UHFFFAOYSA-N 0.000 description 1
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/015—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on semiconductor elements having potential barriers, e.g. having a PN or PIN junction
- G02F1/025—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on semiconductor elements having potential barriers, e.g. having a PN or PIN junction in an optical waveguide structure
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/0147—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on thermo-optic effects
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Abstract
A kind of silicon substrate QPSK optical modulator based on two-dimensional grating coupling, comprising: a two-dimensional grating coupler will couple light as vertical light coupling interface and four-way power-sharing device and be averaged beam splitting into four channel waveguides；Four mode converters to the mode conversion between two-dimensional grating and single mode waveguide and are insulated optical transport；Single mode waveguide, the low-loss single-mode to optical signal transmit；One optical crossover is used between two waveguides without the low-loss smooth Cross transfer of crosstalk；Four radio frequency phase-shifters, for phase circuit-switched data DATAIWith positive cross-channel data DATAQElectric signal load, realize two-way BPSK light phase modulation.Three MMI bundling devices, combiner of the two of them for two branches in Tong Xianglu and positive cross-channel, another is used for the combiner of Tong Xianglu and positive cross-channel.Two thermo-optic phase shifters, it is poor to the phase of light wave among DC adjustment Tong Xianglu and positive cross-channel, it is allowed to meet pi/2, so that the optical signal of Tong Xianglu and positive cross-channel synthesizes qpsk modulation signal.
Description
Technical field
The present invention relates to silicon based photon and chip-scale light network technologies, more particularly to a kind of two-dimensional grating that is based on to couple
Silicon substrate QPSK optical modulator.
Background technique
In the modern society that science and technology is grown rapidly, a large amount of information and data exchange need high speed, a broadband
Communication system.Theoretical calculation shows: frequency bandwidth can be increased to expand capacity of communication system by increasing carrier frequency.Work as electricity
When transmitting on conductor, the impedance of conductor and parasitic capacitance can increase as frequency increases so that electric signal declines rapidly signal
Subtract.Even if its loss has also had reached 5dB/Km under 100MHz frequency using the lesser coaxial cable of high-frequency loss.Therefore electricity
Cable is suitable only for using under short distance and low frequency, and is unable to satisfy high speed long haul communication needs.It is mutually reflective that there is high frequency
Rate (several hundred THz), therefore the Transmission system of broadband high-speed can be provided.Usually transmission optical signal medium have one to specific
The transparent window of wavelength, the loss that light transmits in transparent window are minimum.These windows are located at visible light and near infrared region,
Corresponding frequency is 150THz~800THz, is 106 times of electric signal transmission frequency！Using high frequency light wave as the fiber optic communication of carrier
Have many advantages, such as that bandwidth, loss is low, small in size, exempts from electromagnetic interference, high reliability, makes it existing various means of communication
In most promising one of communication mode, become the foundation stone that the mankind march toward information-intensive society.
In long range ultrahigh speed backbone network communication aspects, although optic communication achieves unprecedented success.But its light
What transceiver module used is expensive III-V material, such as GaAs and InP-InGaAs.These III-V materials
Opto-electronic device is although expensive, but its photoelectric characteristic is very good, can be readily achieved the modulation and spy of 40Gbit/s
Test the speed rate.For communication backbone, what people pursued is the wide-band communication system of performance brilliance, and due to there is multiple users point
Booth expense, price are not usually restraining factors.However in short haul connection, such as due to there is no user to share expense in local area network
With price is just at restraining factors.Expensive III-V material opto-electronic device limits its in a local network extensive
It uses, people can only hope " light " to heave a sigh.Being constantly progressive with information technology simultaneously transmits optical information storage, light data
Deng application, the photoelectron transceiver module of low cost is needed.Thus it is necessary to develop cheap optical transceiver module to make up
The deficiency of these III-V material opto-electronic devices, makes optic communication enter huge numbers of families, superfast to extend arterial grid
" last one kilometer " realizes fiber entering household.
Then people have turned one's attention to silicon based optoelectronic devices.Utilize mature cheap si-substrate integrated circuit technique skill
Art, global scientific research personnel have carried out the extensive research of silicon substrate optical device, achieve a series of representational achievements, silicon
Base electrooptic modulator, germanium waveguide photodetector, silicon substrate mixing laser, wavelength division multiplex device etc. are come out one after another, and performance indicator is increasingly
Perfect, technique reaches its maturity, it appears that implies the communication era of a silicon photon at hand.
Silicon-based electro-optical modulator is the Primary Component of light network and optic communication, as high speed electrical modulation signal and light carrier
The performance of interface, electrooptic modulator is most important for the message capacity of interconnection system, link budget, communication quality etc..It is close
Nian Lai, in order to improve the modulation rate of modulator and reduce the driving voltage of modulator, global researcher has been done very much
Research work, also achieve good achievement.Currently, the driving voltage of MZI type electrooptic modulator has had been reduced to 1V or so,
Modulation rate reaches as high as 60Gb/s.Nevertheless, the electrooptic effect weaker due to the plasma dispersion of silicon substrate modulation use, silicon
The performance of base modulator is still generally inferior to commercial lithium niobate modulator.Therefore, the most of modulation reported in the world at present
Device is all based on the modulation system of switch phase-shift keying (PSK) (OOK), main application prospect be for extinction ratio and linear requirements simultaneously
Not harsh short haul connection.Compared to OOK, orthogonal phase modulation mode (QPSK) has higher spectrum utilization efficiency, to color
It dissipates and the advantages that the nonlinear effect of optical fiber is more insensitive, lower signal-to-noise ratio requires, therefore is considered as that long range light is logical
It more preferably selects in letter field.Silicon substrate qpsk modulator is mainly based upon nested MZI structure at present, however the structure needs three points
Beam device two-stage cascade, considerably increases the complexity and Insertion Loss of route, and the present invention is both used as QPSK by using two-dimensional grating
The vertical optical interface of modulator chip and laser or single mode optical fiber, while it being used as four-way optical power divider again,
It may be said that having had both the function of the unrelated coupler of polarization and four-way beam splitter.The qpsk modulator realized using this structure
There are two advantage: one can be achieved on completely vertical optical coupled of optical fiber so that the encapsulation of light source more has cost excellent
Gesture more attractive, while if can by three-five laser flip chip bonding and grating hybrid integrated, undoubtedly one it is very good
Light source solution；Two can be achieved on the coupling of polarization diversity, by two kinds of degeneracys in optical fiber and can be mutually perpendicular to
Polarization state mode be coupled into chip, to not only make in chip route while handle two kinds of polarization morphotypes in optical fiber
Formula is possibly realized, and also avoids the needs of on piece TE/TM conversion.In conclusion our this invention has potential application
Prospect and real value are expected to obtain important application in the following optical communication network.
Summary of the invention
The purpose of the present invention is to provide a kind of silicon substrate QPSK optical modulators based on two-dimensional grating coupling, have complete
The advantages that vertical optical interface, polarization diversity, in addition its manufacture craft is compatible with CMOS technology.
The present invention provides a kind of silicon substrate QPSK optical modulator based on two-dimensional grating coupling, comprising:
One four-way two-dimensional grating coupler, as silicon substrate qpsk modulator chip and external laser or single-mode optics
Fine vertical coupled interface, while will be coupled into as four-way power-sharing device and leading into the average beam splitting of the light of grating to four
In road waveguide；
Four mode converters, it is loss-free to realize as the connection between two-dimensional grating and single mode ridge waveguide
Mode conversion and optical delivery；
Single mode ridge waveguide, as the main media of light wave transmissions, to realize device inside optical signal low-loss and
Single mode transport；
One optical crossover, for realizing between two channel single mode ridge waveguides of two-dimensional grating without the low-loss light of crosstalk
Cross transfer；
Four radio frequency phase-shifters are located in four channels of two-dimensional grating, are by single mode ridge waveguide and to be embedded into
Electricity phase-shift structure therein is constituted, for realizing the load of the electric signal of same phase circuit-switched data DATAI and positive cross-channel data DATAQ.
Three MMI couplers, use as power combiner, and the first MMI coupler and the 2nd MMI coupler are respectively used to
The power combing of the power combing of two branch-waveguides and Tong Xianglu and positive cross-channel in Tong Xianglu and positive cross-channel.
First thermo-optic phase shifter and the second thermo-optic phase shifter, are located at Tong Xianglu and positive cross-channel, are by single mode ridge wave
It leads and is embedded into thermal resistance phase-shift structure therein and constitute, to the light wave phase among DC voltage regulation Tong Xianglu and positive cross-channel
Potential difference is allowed to meet pi/2.
By analysis above it is found that the device has polarization diversity coupling optical interface, while it can be realized high speed
QPSK light modulation is demodulated in output end by coherent receiver, it will be able to realize the optic communication of high message capacity, it can be in future
Long-distance optical communication field obtain important application.
Detailed description of the invention
To make the objectives, technical solutions, and advantages of the present invention clearer, below in conjunction with specific embodiment, and reference
The present invention is described in more detail for attached drawing, in which:
Fig. 1 is specific embodiments of the present invention structure and schematic illustration；
Fig. 2 is the two-dimensional grating structure figure in specific embodiments of the present invention；
Fig. 3 is radio frequency phase-shifter schematic cross-section in specific embodiments of the present invention；
Fig. 4 is thermo-optic phase shifter schematic cross-section in specific embodiments of the present invention；
Fig. 5 is the principle of equal effects schematic diagram of specific embodiments of the present invention
Specific embodiment
It is thick for different buried oxide layers since the present invention is the silicon substrate QPSK optical modulator based on SOI substrate design of material
Degree and top layer silicon thickness, it is also different to reach the corresponding optimal design of functional requirement, therefore described for convenience, this hair
Bright substrate material is defaulted as specific implementation parameter, i.e., buried oxide layer is with a thickness of 2 μm, and top layer silicon is with a thickness of 220nm.
Referring to Fig. 1, the present invention provides a kind of silicon substrate QPSK optical modulator based on two-dimensional grating, comprising:
One four-way two-dimensional grating coupler 1, as silicon substrate qpsk modulator chip and external laser 8 or single mode
The vertical coupled interface of optical fiber, while will be coupled into the average beam splitting of the light of grating as four-way power-sharing device to four
In channel waveguide；
Four mode converters 2, it is lossless to realize as the connection between two-dimensional grating 1 and single mode ridge waveguide 3
Mode conversion and optical delivery；
Single mode ridge waveguide 3, as the main media of light wave transmissions, to realize device inside optical signal low-loss and
Single mode transport；
One optical crossover 4, for realizing between 1 two channel single mode ridge waveguides 3 of two-dimensional grating without crosstalk low-loss
Light Cross transfer；
Four radio frequency phase-shifters 51,52,53,54, are located in four channels of two-dimensional grating 1, are by single mode ridge
Waveguide 3 is constituted with electricity phase-shift structure therein is embedded into, for realizing same phase circuit-switched data DATAI and positive cross-channel data DATAQ
Electric signal load.
Three MMI couplers 61,62,63, use as power combiner, are respectively used in Tong Xianglu and positive cross-channel two
The power combing and Tong Xianglu of branch-waveguide and the power combing of positive cross-channel.
Two thermo-optic phase shifters 71,72, are located at Tong Xianglu and positive cross-channel, are by single mode ridge waveguide 3 and to be embedded into
Thermal resistance phase-shift structure therein is constituted, poor to the phase of light wave among DC voltage regulation Tong Xianglu and positive cross-channel, is allowed to
Meet pi/2.
The silicon substrate QPSK optical modulator based on two-dimensional grating coupling, wherein being used as laser 8 using two-dimensional grating 1
Or the optical interface of single mode optical fiber and silicon substrate QPSK optical modulator, the two-dimensional grating symmetrically, that is, exist on two dimensions
There is uniform period and identical duty ratio in two dimensions.Due to symmetry, when the incidence of laser or single mode optical fiber
When light is exactly perpendicularly to grating and is in grating center, which may be implemented the uniform beam splitting of four-way, and will be incident
Random polarization state light polarization beam splitting and rotate realize polarization diversity coupling.
The silicon substrate QPSK optical modulator based on two-dimensional grating coupling, wherein being used as two using an optical crossover 4
The crossover element in 1 two channels of grating at single mode waveguide is tieed up, to realize that the light in two waveguides intersects without crosstalk filter with low insertion loss
It is current, to guarantee the correctness of device function.
The silicon substrate QPSK optical modulator based on two-dimensional grating coupling, wherein using two MMI couplers as light
It learns bundling device and four Light guiding channels of two-dimensional grating 1 is synthesized into two main channels two-by-two, to combine shape with two-dimensional grating 1
At two class MZI structures, two class MZI structures are located at the Tong Xianglu and positive cross-channel of qpsk modulator.
The silicon substrate QPSK optical modulator based on two-dimensional grating coupling, wherein using four radio frequency phase-shifters, respectively
In four channels of two-dimensional grating 1 namely in Tong Xianglu and positive cross-channel in four optical arms of two class MZI structures.Together
Xiang Luzhong class MZI structure carries out difference tune to two of them optical arm respectively by same Xiang Lu electricity data DATAI and its oppisite phase data
System realizes BPSK modulation function to realize that the optical signal phase after the synthesis of class MZI structure is overturn between O and π.Together
Reason, positive cross-channel class MZI structure carry out differential modulation by positive cross-channel data DATAQ and its oppisite phase data, also complete BPSK and modulate function
Energy.
The silicon substrate QPSK optical modulator based on two-dimensional grating coupling, wherein two thermo-optic phase shifters 71,72 are used,
It is located in the main channel waveguide of Tong Xianglu and positive cross-channel, by single mode ridge waveguide 3 and the thermal resistance phase shift knot being embedded
Structure composition.The effect of thermo-optic phase shifter is the thermal tuning by adding DC voltage to carry out light, so that control is the same as phase road and orthogonal
The phase difference of light wave among road is allowed to be accurately pi/2.
The silicon substrate QPSK optical modulator based on two-dimensional grating coupling, wherein using 63 conduct of MMI coupler
Light synthesizer will be synthesized by the optical signal in the Tong Xianglu and positive cross-channel of rf-signal modulation and thermo-optical tunability it is a branch of, thus
The output of QPSK signal is converted by two-way bpsk signal.
According to the above-described silicon substrate QPSK optical modulator based on two-dimensional grating coupling, can complete two-way radio frequency
Microwave electrical modulation signal (Tong Xianglu and positive cross-channel), which is loaded on light wave, carries out BPSK modulation to phase of light wave respectively, hereafter passes through
Positive cross-channel light carrier carries out 90 degree of phase shifts, and the road Zai Jiangtongxiang and positive cross-channel optical signal just obtain quadrature phase after being synthesized
Modulated signal (QPSK).
The two-dimensional grating top view in the silicon substrate qpsk modulator that Fig. 2 is shown.As shown, single mode optical fiber and two dimension
1 plane of grating is completely vertical, and is in the center of two-dimensional grating 1, and the light of random polarization state or dual-polarization state passes through single mode
Optical fiber is incident on grating surface, and scattering enters the waveguide of 1 four side of two-dimensional grating.For two kinds of polarization modes P1, P2 in optical fiber
For, two-dimensional grating 1 is equivalent to polarization beam apparatus and polarization rotator, and two kinds of polarization state beam splitting are respectively enterd vertical and water
Square upward waveguide, and for each waveguide, the mode being coupled into waveguide is TE mode.Further, since
The symmetry and fiber position of grating are in raster center, and the optical power in four channel waveguides of grating should be equal each other
Weigh namely grating realizes four-way even power beam splitting.
Shown in Fig. 3 is the specific embodiment schematic cross-section of radio frequency phase-shifter described in Fig. 1.As shown, this implementation
Radio frequency phase-shifter uses the reversed phase-shifter of PN junction in example, since reverse carrier extraction effect is a very quick effect,
Therefore, the modulation bandwidth of the modulator and rate will be very high.Due to hole concentration variation for refractive index change more
Obviously, therefore in order to improve phase shift efficiency, we design the area P in ridge waveguide wider.While in order to improve the electricity of device
Bandwidth, metal electrode can be considered using co-planar waveguide traveling wave electrode design.
The specific embodiment of the first thermo-optic phase shifter 71 and the second thermo-optic phase shifter 72 described in Fig. 1 is shown in Fig. 4
Schematic cross-section.As shown, thermo-optic phase shifter uses the resistance of p-type doping in the present embodiment, the thermal effect of resistance is utilized
It should be waveguide heating, so that the effective refractive index to waveguide carries out thermal tuning, realize the phase-modulation of light wave.Herein, we
By carrying out direct current biasing to the thermo-optic phase shifter in Tong Xianglu and positive cross-channel, so that the optical carrier phase difference in two-way is accurate
Control is at 90 degree.
Shown in fig. 5 is the principle of equal effects schematic diagram of the silicon substrate QPSK optical modulator.In fact, silicon substrate QPSK light
Modulator is equivalent to the silicon substrate QPSK optical modulator based on nested MZI structure an of polarization diversity.As shown, in chip
Two-dimensional grating 1 can regard a vertical coupled optics interface and No. four beam splitters as, and the light of dual-polarization state is by grating point in optical fiber
Shu Xuanzhuan is divided into two beams into two MZI structures, and MZI structure uses non-equal arm configurations, passes through two optical arms to MZI in this way
Carry out differential modulation because by Mach once moral power transmission spectrum it is sagging when light field phase can figure shift.By two
It is converted between a adjacent intensity transmission peak, the phase of light wave can change between O and π, that is, complete the modulation work of BPSK.
The output waveguide of two sub- MZI is respectively Tong Xianglu and positive cross-channel, 90 degree of phase shifts is introduced in positive cross-channel, then two sub- MZI
A mother MZI is synthesized, final two-way bpsk signal is synthesized into QPSK signal.
Claims (2)
1. a kind of silicon substrate QPSK optical modulator based on two-dimensional grating coupling, comprising:
One four-way two-dimensional grating coupler (1), vertical coupled the connecing as silicon substrate qpsk modulator and external laser (8)
Mouthful, while the vertical coupled interface as single mode optical fiber and silicon substrate qpsk modulator, the four-way two-dimensional grating coupler (1)
On two dimensions symmetrically, i.e., there is uniform period and identical duty ratio on two dimensions；Due to symmetry, outside
The incident light of portion's laser (8) or single mode optical fiber is perpendicular to the four-way two-dimensional grating coupler (1) and is in described four
When the center of channel two-dimensional grating coupler (1), while it is flat as four-way power-sharing device to will be coupled into the light into grating
Equal beam splitting is into four channel waveguides；
Single mode optical fiber and four-way two-dimensional grating coupler (1) plane are completely vertical, and are located at the four-way two-dimensional grating coupling
The light of the center of clutch (1), random polarization state or dual-polarization state is incident on grating surface by single mode ridge waveguide, scattering
Into the waveguide of four side of two-dimensional grating；
Four mode converters (2), as the connection between four-way two-dimensional grating coupler (1) and single mode ridge waveguide (3),
To implementation pattern conversion and optical delivery；
Single mode ridge waveguide (3), as the medium of light wave transmissions, to realize the single mode transport of device inside optical signal；
One optical crossover (4), for realizing (1) two channel single mode ridge waveguide (3) of four-way two-dimensional grating coupler it
Between light Cross transfer；
Four radio frequency phase-shifters are located in four channels of four-way two-dimensional grating coupler (1), are by single mode ridge wave
It leads (3) and is embedded into electricity phase-shift structure therein and constitute, for realizing same phase circuit-switched data DATAIWith positive cross-channel data DATAQ's
Electric signal load；
Three MMI couplers, use as power combiner, are located at the Tong Xianglu and positive cross-channel of silicon substrate qpsk modulator,
And for the power combing of two branch-waveguides in Tong Xianglu and positive cross-channel and the power combing of Tong Xianglu and positive cross-channel,
In, four-way two-dimensional grating is coupled as optics bundling device using the first MMI coupler (61) and the 2nd MMI coupler (62)
Four Light guiding channels of device (1) synthesize two main channels two-by-two, to combine shape with four-way two-dimensional grating coupler (1)
At two class MZI structures, two class MZI structures are located at the Tong Xianglu and positive cross-channel of silicon substrate qpsk modulator；Using third
MMI coupler (63) will be believed as light synthesizer by the light in the Tong Xianglu and positive cross-channel of rf-signal modulation and thermo-optical tunability
Number synthesize it is a branch of, to convert the output of QPSK signal for two-way bpsk signal；
First thermo-optic phase shifter (71) and the second thermo-optic phase shifter (72) are located at Tong Xianglu and positive cross-channel, are by single mode ridge
Waveguide (3) and it is embedded into thermal resistance phase-shift structure therein and constitutes, among DC voltage regulation Tong Xianglu and positive cross-channel
Phase of light wave is poor, is allowed to meet pi/2.
2. the silicon substrate QPSK optical modulator according to claim 1 based on two-dimensional grating coupling, wherein using four radio frequencies
Phase-shifter (5) is located in four channels of four-way two-dimensional grating coupler (1) namely two in Tong Xianglu and positive cross-channel
In four optical arms of a class MZI structure；With Xiang Luzhong class MZI structure by same Xiang Lu electricity data DATAIWith its oppisite phase dataDifferential modulation is carried out to two of them optical arm respectively, to realize the optical signal phase after the synthesis of class MZI structure 0
It is overturn between π, that is, realizes BPSK modulation function；Similarly, positive cross-channel class MZI structure is by positive cross-channel data DATAQAnd its it is anti-
Phase dataDifferential modulation is carried out, BPSK modulation function is also completed.
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| CN102540505B (en) * | 2012-01-13 | 2014-12-31 | 中国科学院半导体研究所 | SOI (silicon on insulator) based electrooptical modulator based on symmetrical and vertical grating coupling |
| CN103091869B (en) * | 2013-02-05 | 2018-08-10 | 中国科学院半导体研究所 | Integrated coherent light communication electrooptical modulator structure |
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