CN106549024A - A kind of traveling wave photodetector of integrated coupling polarization manipulation - Google Patents
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Abstract
本发明涉及一种集成耦合偏振处理的行波光电探测器，至少包括一个构成单元，所述每个构成单元包括射频传输线、分别加载在射频传输线两侧的光探测单元、两条一端相互连接的无源光波导、开设在两条无源光波导连接处的无源二维光栅，其中射频传输线与光探测单元的输出端连接；无源光波导用于为射频传输线两侧的光探测单元提供光信号。
The invention relates to a traveling wave photodetector with integrated coupling and polarization processing, which comprises at least one constituent unit, each of which comprises a radio frequency transmission line, optical detection units respectively loaded on both sides of the radio frequency transmission line, and two Passive optical waveguide, a passive two-dimensional grating set at the junction of two passive optical waveguides, where the radio frequency transmission line is connected to the output end of the photodetection unit; the passive optical waveguide is used to provide optical detection units on both sides of the radio frequency transmission line light signal.
Description
技术领域technical field
本发明涉及光电探测器领域，更具体地，涉及一种集成耦合偏振处理的行波光电探测器。The invention relates to the field of photodetectors, in particular to a traveling wave photodetector integrated with coupled polarization processing.
背景技术Background technique
光电通信链路中，光信号通过光电探测器的光电转换，实现射频电信号的解调。传统的面入射光电探测器，由于存在载流子渡越响应和电路弛豫响应的双重制约，使得光电探测器的带宽参数和响应度参数不能同时优化，探测器的带宽效率积指标受到限制。为解决传统面入射光电探测器面临的带宽效率积的不足，可采用行波结构光探测器的设计方案，在不牺牲器件的载流子响应带宽的前提下，从光电探测器的射频电路角度上优化。通过射频传输线分散p-i-n光探测单元的容性弛豫，缓解了等效电路整体的RC高频截断，使得行波探测器的整体带宽不受电容限制。同时分布式采用多个的探测器并联，通过无源光波导输送光信号，从累加的角度增大了器件的光信号吸收，增大了探测器的响应度指标，使得这种分布式行波光电探测器整体的带宽效率积比传统面入射探测器更具潜力，在宽带大容量的光载无线通信等微波光子学领域具有很好的竞争力和应用前景。In the photoelectric communication link, the photoelectric conversion of the optical signal through the photodetector realizes the demodulation of the radio frequency electrical signal. Due to the dual constraints of carrier transition response and circuit relaxation response in traditional surface-incidence photodetectors, the bandwidth parameters and responsivity parameters of photodetectors cannot be optimized at the same time, and the bandwidth efficiency product index of the detector is limited. In order to solve the shortage of bandwidth efficiency product faced by traditional surface incident photodetectors, the design scheme of traveling wave structured light detectors can be adopted, without sacrificing the carrier response bandwidth of the device, from the perspective of radio frequency circuit optimization. Dispersing the capacitive relaxation of the p-i-n optical detection unit through the radio frequency transmission line relieves the overall RC high-frequency cutoff of the equivalent circuit, so that the overall bandwidth of the traveling wave detector is not limited by the capacitance. At the same time, multiple detectors are distributed in parallel, and the optical signal is transmitted through the passive optical waveguide, which increases the optical signal absorption of the device from the perspective of accumulation, and increases the responsivity index of the detector, making this distributed traveling wave The overall bandwidth efficiency product of photodetectors has more potential than traditional surface-incidence detectors, and has good competitiveness and application prospects in microwave photonics fields such as broadband and high-capacity optical-borne wireless communications.
然而，分布式的行波光电探测器比面入射光电探测器的应用有更高的光耦合要求。由于行波结构光电探测器的波导集成特性，光信号经过光纤传输，需高效率的耦合才能进入波导传输，并最终被光探测单元吸收，实现光电转换。而光信号经过光纤的长距离传输后，其偏振信息会发生随机变动，不经过偏振控制而直接耦合，一方面耦合效率低，导致器件的响应度较低；另一方面可激发横磁场模TM模等非期望模式的传输，破坏了器件的光电速度匹配条件，导致器件带宽严重退化，因此，采用端面耦合需要对光纤入射光信号的偏振状态进行严格控制；也可采用光栅进行表面垂直耦合的方式代替端面耦合，但是由于光栅的衍射对入射光的偏振敏感，光信号的偏振状态对光信号的耦合、波导传输、吸收并光电转化具有较大的影响，并最终对器件应用的响应度、信噪比和信道带宽等产生较大影响。为解决传统行波光电探测器与光纤结合的偏振选择性问题，常采用前置偏振控制器、偏振模式转换器或保偏光纤等方法，避免了光纤中光信号偏振状态变化导致的行波探测器响应变化，确保通信传输的高效稳定。然而采用偏振控制器或保偏光纤的方式使得光电链路复杂化，硬件成本也随之增加，日常使用和维护也变得困难。However, distributed traveling-wave photodetectors have higher optical coupling requirements than surface-incidence photodetector applications. Due to the waveguide integration characteristics of the traveling wave photodetector, the optical signal is transmitted through the optical fiber, and it needs high-efficiency coupling to enter the waveguide for transmission, and is finally absorbed by the photodetector unit to realize photoelectric conversion. After the optical signal is transmitted through the long-distance optical fiber, its polarization information will change randomly, and it is directly coupled without polarization control. On the one hand, the coupling efficiency is low, resulting in low responsivity of the device; on the other hand, the transverse magnetic field mode TM can be excited. The transmission of undesired modes such as mode destroys the optoelectronic speed matching condition of the device, leading to serious degradation of device bandwidth. Therefore, the use of end-face coupling requires strict control of the polarization state of the optical fiber incident optical signal; gratings can also be used for surface vertical coupling. However, since the diffraction of the grating is sensitive to the polarization of the incident light, the polarization state of the optical signal has a great influence on the coupling of the optical signal, waveguide transmission, absorption and photoelectric conversion, and ultimately has a great impact on the responsivity of the device application, The signal-to-noise ratio and channel bandwidth have a greater impact. In order to solve the polarization selectivity problem of traditional traveling-wave photodetectors combined with optical fibers, methods such as pre-polarization controllers, polarization mode converters, or polarization-maintaining optical fibers are often used to avoid traveling-wave detection caused by changes in the polarization state of optical signals in optical fibers. The device responds to changes to ensure efficient and stable communication transmission. However, the use of polarization controllers or polarization-maintaining optical fibers complicates the optical link, increases hardware costs, and makes daily use and maintenance difficult.
发明内容Contents of the invention
本发明为解决以上现有技术的难题，提供了一种集成耦合偏振处理的行波光电探测器，该探测器能够实现对光信号的耦合偏振处理，与现有技术相比，其光电链路简化，降低了硬件搭建和维护成本，具有较大的市场潜力。In order to solve the above problems in the prior art, the present invention provides a traveling-wave photodetector with integrated coupling polarization processing, which can realize the coupling polarization processing of optical signals. Compared with the prior art, its photoelectric link Simplification reduces the cost of hardware construction and maintenance, and has great market potential.
为实现以上发明目的，采用的技术方案是：For realizing above-mentioned purpose of the invention, the technical scheme that adopts is:
一种集成耦合偏振处理的行波光电探测器，至少包括一个构成单元，所述每个构成单元包括射频传输线、分别加载在射频传输线两侧的光探测单元、两条一端相互连接的无源光波导、开设在两条无源光波导连接处的无源二维光栅，其中射频传输线与光探测单元的输出端连接；无源光波导用于为射频传输线两侧的光探测单元提供光信号。A traveling-wave photodetector with integrated coupling and polarization processing, comprising at least one constituent unit, each of which includes a radio frequency transmission line, photodetection units respectively loaded on both sides of the radio frequency transmission line, and two passive optical Waveguide, a passive two-dimensional grating set at the junction of two passive optical waveguides, wherein the radio frequency transmission line is connected to the output end of the photodetection unit; the passive optical waveguide is used to provide optical signals for the photodetection units on both sides of the radio frequency transmission line.
其具体的工作原理如下：光信号从标准单模光纤出射至无源二维光栅中，其中垂直偏振的光信号经过无源二维光栅后分离出来，以横电场模（TE模）的形式耦合到对应的、垂直于各自偏振方向的无源光波导中，无源光波导将耦合的光信号馈给射频传输线两侧的光探测单元，光探测单元对光信号实行光电转换得到射频信号，并将射频信号通过射频传输线输出。Its specific working principle is as follows: the optical signal is emitted from the standard single-mode fiber to the passive two-dimensional grating, where the vertically polarized optical signal is separated after passing through the passive two-dimensional grating, and coupled in the form of a transverse electric field mode (TE mode) into the corresponding passive optical waveguide perpendicular to the respective polarization directions, the passive optical waveguide feeds the coupled optical signal to the optical detection unit on both sides of the radio frequency transmission line, the optical detection unit performs photoelectric conversion on the optical signal to obtain a radio frequency signal, and The radio frequency signal is output through the radio frequency transmission line.
上述方案中，光信号以横电场模（TE模）的形式耦合入相应的波导中，保障了光信号从光纤耦合至无源光波导中的耦合效率，避免了横磁场模（TM模）等非传输模式或非速度匹配模式的激发，避免了传输损耗导致的响应度降低及模式色散导致的器件带宽的退化等，提升了光电探测器的信噪比。同时，由于耦合至两条无源波导中的光信号为原标准单模光纤中互相垂直偏振态的光信号，则无论单模光纤中光信号的偏振信息如何分布，均能高效耦合至光探测单元并被吸收，不需要预先对入射光信号的偏振态进行调控和筛选，可实现单模光纤的偏振无关光探测，简化光电链路中的器件配置、硬件成本以及调试、维护成本。In the above solution, the optical signal is coupled into the corresponding waveguide in the form of a transverse electric field mode (TE mode), which ensures the coupling efficiency of the optical signal from the optical fiber to the passive optical waveguide, and avoids the transverse magnetic field mode (TM mode), etc. The excitation of non-transmission mode or non-speed matching mode avoids the reduction of responsivity caused by transmission loss and the degradation of device bandwidth caused by mode dispersion, etc., and improves the signal-to-noise ratio of the photodetector. At the same time, since the optical signals coupled to the two passive waveguides are optical signals with mutually perpendicular polarization states in the original standard single-mode fiber, no matter how the polarization information of the optical signal in the single-mode fiber is distributed, it can be efficiently coupled to the optical detector. The unit is absorbed and does not need to adjust and screen the polarization state of the incident optical signal in advance. It can realize the polarization-independent light detection of single-mode fiber, and simplify the device configuration, hardware cost, debugging and maintenance cost in the optical link.
优选地，所述构成单元的数量为2个或2个以上。使得构成单元数量增加至2个或2个以上，可以使得光电探测器能够同时将2组或2组以上偏振态相互垂直的光信号分离出来，并分别转换成相应的射频信号进行输出，实现集成偏振解复用的光电转换。Preferably, the number of the constituent units is 2 or more. Increase the number of constituent units to 2 or more, enabling the photodetector to simultaneously separate two or more groups of optical signals whose polarization states are perpendicular to each other, and convert them into corresponding radio frequency signals for output, realizing integration Photoelectric conversion with polarization demultiplexing.
优选地，所述分别加载在射频传输线两侧的光探测单元的数量为多个，多个光探测单元在射频传输线两侧周期性分布；射频传输线两侧的光探测单元的输出端与射频传输线连接。Preferably, the number of photodetection units loaded on both sides of the radio frequency transmission line is multiple, and the plurality of photodetection units are periodically distributed on both sides of the radio frequency transmission line; the output ends of the photodetection units on both sides of the radio frequency transmission line are connected to the connect.
优选地，所述光探测单元的n极接地，光探测单元的输出端与所述射频传输线的信号电极S连接。Preferably, the n pole of the light detection unit is grounded, and the output end of the light detection unit is connected to the signal electrode S of the radio frequency transmission line.
优选地，无源光波导采用氮化硅材料制成。利用氮化硅材料宽窗口、低损耗、低色散、折射率适中、加工宽容度高的优势，使得光电探测器在光载无线通信等微波光子学领域具有广泛应用前景。Preferably, the passive optical waveguide is made of silicon nitride material. Taking advantage of the wide window, low loss, low dispersion, moderate refractive index, and high processing tolerance of silicon nitride materials, photodetectors have broad application prospects in the field of microwave photonics such as optical wireless communication.
优选地，所述光探测单元的外延结构采用磷化铟基半导体材料制成。利用磷化铟基半导体材料高载流子迁移率、直接带隙以及带隙掺杂可调等优势，使得光电探测器在传统C波段光通信中具有难以替代的优势。Preferably, the epitaxial structure of the light detection unit is made of indium phosphide-based semiconductor material. Utilizing the advantages of high carrier mobility, direct bandgap, and adjustable bandgap doping of indium phosphide-based semiconductor materials, photodetectors have irreplaceable advantages in traditional C-band optical communications.
优选地，所述行波光电探测器集成在芯片中，芯片的衬底采用磷化铟。Preferably, the traveling wave photodetector is integrated in a chip, and the substrate of the chip is made of indium phosphide.
与现有技术相比，本发明的有益效果是：Compared with prior art, the beneficial effect of the present invention is:
本发明提供的光电探测器光信号是以横电场模（TE模）的形式耦合入相应的波导中，保障了光信号从光纤耦合至无源光波导中的耦合效率，避免了横磁场模（TM模）等非传输模式或非速度匹配模式的激发，避免了传输损耗导致的响应度降低及模式色散导致的器件带宽的退化等，提升了光电探测器的信噪比。同时，由于耦合至两条无源波导中的光信号为原标准单模光纤中互相垂直偏振态的光信号，则无论单模光纤中光信号的偏振信息如何分布，均能高效耦合至光探测单元并被吸收，不需要预先对入射光信号的偏振态进行调控和筛选，可实现单模光纤的偏振无关光探测，简化光电链路中的器件配置、硬件成本以及调试、维护成本。The optical signal of the photodetector provided by the present invention is coupled into the corresponding waveguide in the form of a transverse electric field mode (TE mode), which ensures the coupling efficiency of the optical signal from the optical fiber to the passive optical waveguide, and avoids the transverse magnetic field mode ( TM mode) and other non-transmission mode or non-speed matching mode excitation, avoiding the reduction of responsivity caused by transmission loss and the degradation of device bandwidth caused by mode dispersion, etc., and improving the signal-to-noise ratio of photodetectors. At the same time, since the optical signals coupled to the two passive waveguides are optical signals with mutually perpendicular polarization states in the original standard single-mode fiber, no matter how the polarization information of the optical signal in the single-mode fiber is distributed, it can be efficiently coupled to the optical detector. The unit is absorbed and does not need to adjust and screen the polarization state of the incident optical signal in advance. It can realize the polarization-independent light detection of single-mode fiber, and simplify the device configuration, hardware cost, debugging and maintenance cost in the optical link.
附图说明Description of drawings
图1为实施例1的光电传感器的结构示意图。FIG. 1 is a schematic structural view of the photoelectric sensor of Embodiment 1.
图2为实施例2的光电传感器的结构示意图。FIG. 2 is a schematic structural diagram of the photoelectric sensor of Embodiment 2.
图3为无源二维光栅对光信号进行分离的示意图。Fig. 3 is a schematic diagram of separating optical signals by a passive two-dimensional grating.
具体实施方式detailed description
附图仅用于示例性说明，不能理解为对本专利的限制；The accompanying drawings are for illustrative purposes only and cannot be construed as limiting the patent;
以下结合附图和实施例对本发明做进一步的阐述。The present invention will be further elaborated below in conjunction with the accompanying drawings and embodiments.
实施例1Example 1
图1为本实施例所提供的光电探测器的结构示意图，本实施例的光电探测器包括一个构成单元，所述每个构成单元包括射频传输线1、分别加载在传输线两侧的光探测单元2、两条一端相互连接的无源光波导3、开设在两条无源光波导连接处的无源二维光栅4，其中射频传输线与光探测单元2的输出端连接；无源光波导用于为光探测单元提供光信号。Figure 1 is a schematic structural view of the photodetector provided in this embodiment, the photodetector of this embodiment includes a constituent unit, and each constituent unit includes a radio frequency transmission line 1, and photodetection units 2 respectively loaded on both sides of the transmission line , two passive optical waveguides with one end connected to each other 3, a passive two-dimensional grating 4 set at the junction of the two passive optical waveguides, wherein the radio frequency transmission line is connected to the output end of the optical detection unit 2; the passive optical waveguide is used for Provide light signal for light detection unit.
其中，金属射频传输线1从左到右依次为地电极G、信号电极S、地电极G，地电极G、信号电极S、地电极G构成行波光探测器的电极框架（GSG），射频传输线1的信号电极S与光探测单元2的输出端连接。本实施例中，光电探测器集成在芯片中，其衬底5采用磷化铟衬底。Among them, the metal radio frequency transmission line 1 is the ground electrode G, signal electrode S, and ground electrode G from left to right. The ground electrode G, signal electrode S, and ground electrode G constitute the electrode frame (GSG) of the traveling wave photodetector. The radio frequency transmission line 1 The signal electrode S is connected to the output terminal of the photodetection unit 2 . In this embodiment, the photodetector is integrated in the chip, and its substrate 5 is an indium phosphide substrate.
其具体的工作原理如下：光信号从标准单模光纤9出射至无源二维光栅4中，其中垂直偏振的光信号经过无源二维光栅4后分离出来，以横电场模（TE模）的形式耦合到对应的、垂直于各自偏振方向的无源光波导3中，无源光波导3将耦合的光信号馈给其一侧的光探测单元2，光探测单元2对光信号实行光电转换得到射频信号，并将射频信号通过射频传输线1输出。Its specific working principle is as follows: the optical signal is emitted from the standard single-mode optical fiber 9 to the passive two-dimensional grating 4, and the vertically polarized optical signal is separated after passing through the passive two-dimensional grating 4, and the transverse electric field mode (TE mode) In the form of coupling to the corresponding passive optical waveguide 3 perpendicular to the respective polarization directions, the passive optical waveguide 3 feeds the coupled optical signal to the optical detection unit 2 on one side thereof, and the optical detection unit 2 implements photoelectricity on the optical signal The radio frequency signal is obtained through conversion, and the radio frequency signal is output through the radio frequency transmission line 1.
图3为无源二维光栅4对光信号进行分离的示意图，如图2所示，光纤9中出射的光信号具有多种偏振模式6，其中偏振态相互垂直的两路光信号7、8经由无源二维光栅4解偏振复用后，以TE模的形式分别进入对应的、与偏振方向垂直的无源光波导3中。Fig. 3 is a schematic diagram of the separation of optical signals by a passive two-dimensional grating 4. As shown in Fig. 2, the optical signals emitted from the optical fiber 9 have multiple polarization modes 6, wherein two optical signals 7 and 8 whose polarization states are perpendicular to each other After being depolarized and multiplexed by the passive two-dimensional grating 4, they respectively enter the corresponding passive optical waveguides 3 perpendicular to the polarization direction in the form of TE modes.
上述方案中，光信号以横电场模（TE模）的形式耦合入相应的无源光波导3中，保障了光信号从光纤9耦合至无源光波导3中的耦合效率，避免了横磁场模（TM模）等非传输模式或非速度匹配模式的激发，避免了传输损耗导致的响应度降低及模式色散导致的器件带宽的退化等，提升了光电探测器的信噪比。同时，由于耦合至两条无源光波导3中的光信号为原标准单模光纤9中互相垂直偏振态的光信号，则无论单模光纤9中光信号的偏振信息如何分布，均能高效耦合至光探测单元2并被吸收，不需要预先对入射光信号的偏振态进行调控和筛选，可实现单模光纤9的偏振无关光探测，简化光电链路中的器件配置、硬件成本以及调试、维护成本。In the above solution, the optical signal is coupled into the corresponding passive optical waveguide 3 in the form of a transverse electric field mode (TE mode), which ensures the coupling efficiency of the optical signal from the optical fiber 9 to the passive optical waveguide 3 and avoids the transverse magnetic field The excitation of non-transmission mode or non-velocity matching mode such as mode (TM mode) avoids the reduction of responsivity caused by transmission loss and the degradation of device bandwidth caused by mode dispersion, etc., and improves the signal-to-noise ratio of photodetectors. At the same time, since the optical signals coupled to the two passive optical waveguides 3 are optical signals with mutually perpendicular polarization states in the original standard single-mode optical fiber 9, no matter how the polarization information of the optical signals in the single-mode optical fiber 9 is distributed, it can be efficiently Coupled to the optical detection unit 2 and absorbed, it is not necessary to adjust and screen the polarization state of the incident optical signal in advance, which can realize the polarization-independent optical detection of the single-mode fiber 9, and simplify the device configuration, hardware cost and debugging in the optical link , Maintenance costs.
在具体的实施过程中，所述分别设射频传输线1两侧的光探测单元2的数量均为多个，多个光探测单元2在射频传输线1两侧周期性分布；射频传输线1两侧的光探测单元2的输出端与射频传输线1连接。In a specific implementation process, the number of optical detection units 2 on both sides of the radio frequency transmission line 1 is multiple, and a plurality of optical detection units 2 are periodically distributed on both sides of the radio frequency transmission line 1; The output end of the light detection unit 2 is connected with the radio frequency transmission line 1 .
在具体的实施过程中，无源光波导3采用氮化硅材料制成。利用氮化硅材料宽窗口、低损耗、低色散、折射率适中、加工宽容度高的优势，使得光电探测器在光载无线通信等微波光子学领域具有广泛应用前景。In a specific implementation process, the passive optical waveguide 3 is made of silicon nitride material. Taking advantage of the wide window, low loss, low dispersion, moderate refractive index, and high processing tolerance of silicon nitride materials, photodetectors have broad application prospects in the field of microwave photonics such as optical wireless communication.
在具体的实施过程中，所述光探测单元2的外延结构采用磷化铟基半导体材料制成。利用磷化铟基半导体材料高载流子迁移率、直接带隙以及带隙掺杂可调等优势，使得光电探测器在传统C波段光通信中具有难以替代的优势。In a specific implementation process, the epitaxial structure of the light detection unit 2 is made of indium phosphide-based semiconductor material. Utilizing the advantages of high carrier mobility, direct bandgap, and adjustable bandgap doping of indium phosphide-based semiconductor materials, photodetectors have irreplaceable advantages in traditional C-band optical communications.
实施例2Example 2
如图2所示，本实施例所提供的光电传感器包括有两个构成单元，射频传输线1从左到右依次为地电极G、信号电极S1、地电极G、信号电极S2、地电极G，地电极G、信号电极S1、地电极G、信号电极S2、地电极G构成并列两个行波光探测器的电极框架（GSGSG）；信号电极S1、信号电极S2分别与两个构成单元的光探测单元2的输出端连接。本实施例使得构成单元数量增加至2个，可以使得光电探测器能够同时将2组偏振态相互垂直的光信号分离出来，并分别转换成相应的射频信号进行输出，实现集成偏振解复用的光电转换。As shown in Figure 2, the photoelectric sensor provided in this embodiment includes two constituent units, the radio frequency transmission line 1 from left to right is the ground electrode G, the signal electrode S1, the ground electrode G, the signal electrode S2, and the ground electrode G, The ground electrode G, the signal electrode S1, the ground electrode G, the signal electrode S2, and the ground electrode G form an electrode frame (GSGSG) of two parallel traveling wave photodetectors; The output of unit 2 is connected. This embodiment increases the number of constituent units to two, enabling the photodetector to simultaneously separate two groups of optical signals whose polarization states are perpendicular to each other, and convert them into corresponding radio frequency signals for output, realizing integrated polarization demultiplexing photoelectric conversion.
显然，本发明的上述实施例仅仅是为清楚地说明本发明所作的举例，而并非是对本发明的实施方式的限定。对于所属领域的普通技术人员来说，在上述说明的基础上还可以做出其它不同形式的变化或变动。这里无需也无法对所有的实施方式予以穷举。凡在本发明的精神和原则之内所作的任何修改、等同替换和改进等，均应包含在本发明权利要求的保护范围之内。Apparently, the above-mentioned embodiments of the present invention are only examples for clearly illustrating the present invention, rather than limiting the implementation of the present invention. For those of ordinary skill in the art, other changes or changes in different forms can be made on the basis of the above description. It is not necessary and impossible to exhaustively list all the implementation manners here. All modifications, equivalent replacements and improvements made within the spirit and principles of the present invention shall be included within the protection scope of the claims of the present invention.
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