CN104467981A - Silicon substrate monolithic integration coherent optical receiver - Google Patents
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- CN104467981A CN104467981A CN201410539976.6A CN201410539976A CN104467981A CN 104467981 A CN104467981 A CN 104467981A CN 201410539976 A CN201410539976 A CN 201410539976A CN 104467981 A CN104467981 A CN 104467981A
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Abstract
The invention discloses a silicon substrate monolithic integration coherent optical receiver. The silicon substrate monolithic integration coherent optical receiver comprises a coupling polarization beam splitter, an optical coupler, a beam splitter, two 90-degree phase shift frequency mixers and four balance reception optical detectors; signal light is processed through the coupling polarization beam splitter to be divided into first signal light and second signal light which are vertical; local oscillation light is processed through the optical coupler to be divided by the beam splitter into first local oscillation light and second local oscillation light; the first local oscillation light and the first signal light enter one 90-degree phase shift frequency mixer; the second local oscillation light and the second signal light enter the other 90-degree phase shift frequency mixer; lasers processed by the two 90-degree phase shift frequency mixers enter the four balance reception optical detectors to convert optical signals into electric signals. The silicon substrate monolithic integration coherent optical receiver has the advantages of being compatible with the CMOS technology, low in cost, simple in system composition, small in size, high in integration degree, easy and convenient to test, stable in work, easy to package and the like.
Description
Technical field
The present invention relates to technical field of photo communication, more specifically relate to the integrated coherent optical heterodyne communicatio of a kind of silicon-based monolithic.
Background technology
Several years the insides in past, due to the fast development of Web TV (IPTV), high definition TV (HDTV), video request program (VOD) technology and mobile Internet business, make the service traffics sustainable growth of the backbone network of operator.In order to tackle witched-capacity network bandwidth requirement, high speed transmission technology becomes the focus of optical communication field research.At present, along with the sustainable development of high bandwidth new business drives, the application demand based on 100Gb/s high-speed transfer becomes clear day by day.Typical case as Huawei dispose at the 100Gb/s of KPN Telecom N.V. (KPN), A Lang upgrades at the 100Gb/s of French Completel company, the 100Gb/s of Hong Kong New World telecommunications deployment etc.Domestic after first round testing authentication, start to build commercial network.100Gb/s technology has started to move towards commercialization gradually from laboratory.Wherein, China Mobile has taken the lead in having carried out the extensive bid of 100Gb/s equipment, China Telecom also at the beginning of 2013 the commercialization of the formal 100Gb/s of startup equipment dispose.But the device of key such as the modulator of 100Gb/s and receiver all need import, and therefore the research of 100Gb/s coherent transmitting and receiver is extremely urgent.
Traditional wavelength division multiplexing (WDM) technology is owing to adopting simple on-off keying (OOK) modulation format, and the availability of frequency spectrum is low.In recent years, the modulation of Multilevel modulation, leggy and coherent light reception technique is adopted to become a kind of important technology realizing spectral efficient and high speed transmission system.The feature of coherent reception is mainly manifested in and combines above with new modulation techniques: by combining with new modulation techniques, can reduce channel speed, reduce the requirement to opto-electronic device speed under same traffic rate, improves dispersion tolerance.This is that the spectrum efficiency of new type of modulation form is higher due to compared with traditional intensity modulated form, and a light pulse can carry the information of a lot of bits.Such as in the 100Gb/s communication system of bipolarity orthogonal PSK (DP-QPSK) modulation format, its baud rate is only 25G baud, therefore use DP-QPSK modulation format, can dispersion tolerance be improved, the requirement to opto-electronic device speed can be reduced again.In addition, coherent detection can also all change into electrical domain the amplitude of optical signalling, phase place and polarization information, has high sensitivity, an ability that light signal that the compensation of dispersion that combines with Digital Signal Processing brings damages.
Coherent receiver in the high speed fibre transmission system that current laboratory is commonly used all is built by discrete device: comprise coupler, polarization beam apparatus/bundling device, frequency mixer, detector etc.Be difficult to ensure the exact matching of insertion loss when connecting between each device cell, optical path length, efficiency be low, cost is high, cannot integrated, job insecurity, volume and power consumption become the bottleneck problem being badly in need of solving.
A development trend of current optical communication is, each discrete device of optical communication system also will be integrated on single receiver gradually, only has integratedly could realize high density, low cost, low energy consumption, meets the demand of Future Information social enviroment protection green.Silicon based opto-electronics integrated technology due to complementary metal oxide semiconductors (CMOS) (CMOS) process compatible, there is the features such as integrated level is high, cost is low, working stability, be particularly suitable for solving these bottleneck problems that current optical communication system runs into, become the study hotspot of optical communication, optoelectronic areas.
Silicon-based monolithic integrated circuit (PIC) can ensure exact matching and the balance of insertion loss when connecting between each device cell, optical path length relatively easily, greatly reduces the size of device and the cost of encapsulation, improves the stability of system.A few days ago, the portion of techniques index of silicon based optoelectronic devices has reached the level of commercial devices, and because itself and CMOS are compatible, large-scale integrated, advantage that cost is low can become the important solutions of the 100Gb/s photoelectron integrated receiver of industry and scientific research institution's common concern.On the basis that individual devices is succeeded in developing, Bell laboratory utilizes Si-based OEIC technology successively to develop high speed coherent reception receiver, within 2011, report the coherent optical heterodyne communicatio of first preparation and encapsulation on silica-based in the world, rate 112Gb/s, completes again the silica-based integrated coherent receiver of 224Gb/s for 2013.
In these Integrated Solutions, optical receiver can comprise optical coupler, beam splitter, 90 ° of optical mixer units, balance reception photo-detector.Optical coupler can by the signal coupling in optical fiber in monolithic integrated receiver, and beam splitter can segregate into the different polarization separation of irradiating light beam based on polarization, to process respectively.The modulated optical carrier received and the coherent light from light local oscillator can be mixed the light signal producing lower mixing by optical mixer unit optically.Balance reception photo-detector can detect the intensity of the light signal of this lower mixing to demodulate the signal of telecommunication, and this signal of telecommunication, by off-line digital signal transacting, recovers the data message entrained by the modulated optical carrier received.But in the specific embodiments of Bell Laboratory, the first integrated receiver have employed 2 × 2 multi-mode interferometer (MMI) and realizes optical frequency mixing, need hot phase in-migration to realize the phase difference of 90 ° of input optical signal, add the number of the unit component of system and the complexity of test.The second integrated receiver, flashlight and local oscillator light all adopt end coupling to enter in planar optical waveguide, add the difficulty of aligning; Adopt Polarization Controller (PBS) that coupling light is divided into transverse electric (TE) and horizontal magnetic (TM) light, then adopt polarization converter (PolarizationRotator) that TM light is changed into TE light, add the quantity of unit component and the complexity of system, 4 × 4MMI is adopted to carry out optical frequency mixing, due in the 1-4 road signal from top to bottom that frequency mixer exports, 1 tunnel differs 180 ° with 4 tunnels, 2 tunnels respectively with the phase place on 3 tunnels, and this four roads signal inputs in corresponding silicon germanium photodetector respectively.According to the relation of the phase difference of above-mentioned correspondence, intersecting of bonding line is there will be when silicon germanium photodetector and transreactance amplifier (TIA) are carried out wire bonding (Wire bonding), deal with improperly and the input of TIA can be made to occur mistake, correctly can not demodulate the data message entrained by modulated optical carrier.
Summary of the invention
(1) technical problem that will solve
The technical problem to be solved in the present invention how to realize coherent optical heterodyne communicatio when ensureing that high integration, volume are little, ensures the work that coherent optical heterodyne communicatio is stable.
(2) technical scheme
In order to solve the problems of the technologies described above, the invention provides the integrated coherent optical heterodyne communicatio of a kind of silicon-based monolithic, the integrated coherent optical heterodyne communicatio of described a kind of silicon-based monolithic comprises coupling polarization beam apparatus, an optical coupler, a beam splitter, the one 90 ° of phase shift frequency mixer, the 2 90 ° of phase shift frequency mixer and four balance reception photo-detectors;
Flashlight is divided into orthogonal first flashlight, secondary signal light by after the process of described coupling polarization beam apparatus; Local oscillations light by after described optical coupler process, by described beam splitter be divided into described first flashlight the first local oscillation light in the same way, with described secondary signal light the second local oscillations light in the same way; Described first local oscillation light, the first flashlight all enter described one 90 ° of phase shift frequency mixer; Described secondary signal light, the second local oscillations light all enter described 2 90 ° of phase shift frequency mixer; Enter four described balance reception photo-detectors respectively by the laser after described one 90 ° of phase shift frequency mixer, the 2 90 ° of phase shift frequency mixer process and light signal is converted to the signal of telecommunication.
Preferably, described coupling polarization beam apparatus, optical coupler, beam splitter, set up light interface channel by planar optical waveguide between the one 90 ° of phase shift frequency mixer, the 2 90 ° of phase shift frequency mixer and balance reception photo-detector.
Preferably, described planar optical waveguide is corresponding with the pattern of the light signal of transmission.
Preferably, described flashlight is entered two-dimensional grating by Single-Mode Fiber Coupling by described coupling polarization beam apparatus, is changed by described two-dimensional grating settling signal polarisation of light, and the flashlight after polarization conversion is divided into the orthogonal two-beam injection in the direction of propagation.
Preferably, described two-dimensional grating obtains by the 2 D photon crystal of etching period on silicon chip on an insulating substrate.
Preferably, described local oscillations optical coupling is entered one-dimensional grating by monomode fiber by described optical coupler, sends described beam splitter afterwards to.
Preferably, described one-dimensional grating is that on silicon chip on an insulating substrate, etching period grating is formed, and is specially full etching grating, or shallow etched diffraction grating, or uniform grating, or binary blazed grating.
Preferably, described beam splitter is the two-beam being divided into power equal described local oscillations light, adopts the multi-mode interferometer beam splitter of 1 × 2.
Preferably, described one 90 ° of phase shift frequency mixer, the 2 90 ° of phase shift frequency mixer all by the phase deviation 90 ° of light wave, and realize the mixing of light wave.
Preferably, described one 90 ° of phase shift frequency mixer, the 2 90 ° of phase shift frequency mixer realize by the multi-mode interferometer of single 2 × 4, or are realized by the multi-mode interferometer cascade of the multi-mode interferometer I and 2 × 2 of 2 × 4;
Export 1-4 road mixing light respectively by described one 90 ° of phase shift frequency mixer or the 2 90 ° of phase shift frequency mixer, wherein the phase 180 ° of 1 tunnel mixing light and 2 tunnel mixing light, and enter same described balance reception photo-detector; The phase 180 ° of 3 tunnel mixing light and 4 tunnel mixing light, and enter balance reception photo-detector described in another, avoid the intersection of waveguide.
Preferably, described balance reception photo-detector is connected by two photodetectors and is formed, and series connection node exports the signal of telecommunication demodulated.
Preferably, described photodetector is the integrated detector of waveguide.
Preferably, the full germanium photodetector of described photodetector or silicon germanium photodetector.
Preferably, described a kind of silicon-based monolithic integrated coherent optical heterodyne communicatio surface coverage protective material.
(3) beneficial effect
The invention provides the integrated coherent optical heterodyne communicatio of a kind of silicon-based monolithic, tool of the present invention has the following advantages:
All elements of the present invention all adopt silica-base material to realize, and compatible with CMOS technology, cost is low;
Built different by discrete device from conventional optical communication systems, the present invention achieves the integrated of all unit components of coherent optical heterodyne communicatio on one chip, overcome the impact of conventional optical communication systems by connective stability between discrete device job stability and device, thus ensure that working stability.Meanwhile, in the present invention, conventional coupler, polarization converter, beam splitter are realized with a grating respectively, 90 ° of phase-shifters and frequency mixer a 2 × 4MMI and 2 × 2MMI cascade are realized; Flashlight is once be coupled into coherent optical heterodyne communicatio chip, and all light has become TE polarization state, does not therefore need to adopt polarization converter (Polarization Rotator), decreases unit component quantity, further increases job stability;
The unit component negligible amounts that coherent optical heterodyne communicatio of the present invention comprises, thus reduce overall size, the 90 ° of phase shift frequency mixers adopted are formed by a wedge shape 2 × 4MMI and 2 × 2MMI cascade, are the devices that in the 90 ° of phase shift frequency mixers reported at present, length is the shortest; The length of the silicon germanium photodetector that the waveguide adopted is integrated only has 10 μm, further reduces the size of integrated receiver, and the area of the overall receiver of the present invention is only the half of the receiver area of Bell Laboratory latest report; During the present invention adopts a two-dimensional grating and an one-dimensional grating flashlight and local oscillator optical coupling afferent echo to be led respectively, avoid the complex operations of Waveguide end face coupling and the unsteadiness of optical fiber align optical signal, make to test easy, aligning optical signal good stability; Simultaneously because the particular design of 90 ° of phase shift frequency mixers makes in the 1-4 road mixing light from top to bottom exported, 1 tunnel differs 180 ° with 2 tunnels, 3 tunnels respectively with the phase place on 4 tunnels, avoid intersecting of waveguide when being connected with balance reception photo-detector, be easy to the bonding packaging of later stage balance reception photo-detector and commercial TIA.
Accompanying drawing explanation
In order to be illustrated more clearly in the embodiment of the present invention or technical scheme of the prior art, be briefly described to the accompanying drawing used required in embodiment or description of the prior art below, apparently, accompanying drawing in the following describes is only some embodiments of the present invention, for those of ordinary skill in the art, under the prerequisite not paying creative work, other accompanying drawing can also be obtained according to these accompanying drawings.
Fig. 1 is the theory diagram of the integrated coherent optical heterodyne communicatio of a kind of silicon-based monolithic of the present invention;
Fig. 2 is the coupling polarization beam splitter structure schematic diagram of the integrated coherent optical heterodyne communicatio of a kind of silicon-based monolithic of the present invention;
Fig. 3 is the optical coupler structural representation of the integrated coherent optical heterodyne communicatio of a kind of silicon-based monolithic of the present invention;
Fig. 4 is the beam splitter structure schematic diagram of the integrated coherent optical heterodyne communicatio of a kind of silicon-based monolithic of the present invention;
90 ° of phase shift mixer architecture schematic diagrames of the integrated coherent optical heterodyne communicatio of Fig. 5 a kind of silicon-based monolithic of the present invention;
Fig. 6 is the balance reception photo-detector structural representation of the integrated coherent optical heterodyne communicatio of a kind of silicon-based monolithic of the present invention;
Fig. 7 (a), 7 (b) are structural representation, the cross-sectional view of the integrated silicon germanium photodetector of the waveguide of the integrated coherent optical heterodyne communicatio of a kind of silicon-based monolithic of the present invention;
The cross-sectional view that Fig. 8 (a), 8 (b) are two kinds of planar optical waveguides of the integrated coherent optical heterodyne communicatio of a kind of silicon-based monolithic of the present invention.
Embodiment
Below in conjunction with drawings and Examples, the present invention is described in further detail.Following examples for illustration of the present invention, but can not be used for limiting the scope of the invention.
The invention discloses the integrated coherent optical heterodyne communicatio of a kind of silicon-based monolithic, as shown in Figure 1, the integrated coherent optical heterodyne communicatio of described a kind of silicon-based monolithic comprises coupling polarization beam apparatus, an optical coupler, a beam splitter, the one 90 ° of phase shift frequency mixer, the 2 90 ° of phase shift frequency mixer and four balance reception photo-detectors; Flashlight is by being divided into orthogonal first flashlight S after the process of described coupling polarization beam apparatus
x, secondary signal light S
y; Local oscillations light, by after described optical coupler process, is divided into and described first flashlight the first local oscillation light L in the same way by described beam splitter
x, with described secondary signal light the second local oscillations light L in the same way
y; Described local oscillations light only comprises TE component; Described first local oscillation light L
x, the first flashlight S
xall enter described one 90 ° of phase shift frequency mixer; Described secondary signal light S
y, the second local oscillations light L
yall enter described 2 90 ° of phase shift frequency mixer; Enter four described balance reception photo-detectors respectively by the laser after described one 90 ° of phase shift frequency mixer, the 2 90 ° of phase shift frequency mixer process and light signal is converted to the signal of telecommunication.Wherein said coupling polarization beam apparatus, optical coupler, beam splitter, set up light interface channel by planar optical waveguide between the one 90 ° of phase shift frequency mixer, the 2 90 ° of phase shift frequency mixer and balance reception photo-detector; Described planar optical waveguide is corresponding with the pattern of the light signal of transmission, is TE planar optical waveguide in the present invention.
All devices of the present invention, comprise coupling polarization beam apparatus, optical coupler, beam splitter, the one 90 ° of phase shift frequency mixer, the 2 90 ° of phase shift frequency mixer and four balance reception photo-detectors are isolate supports material, or the compound semiconductor materials on body silicon materials or silicon substrate.
Described flashlight is entered two-dimensional grating by Single-Mode Fiber Coupling by described coupling polarization beam apparatus, changed by described two-dimensional grating settling signal polarisation of light, and be divided into by the flashlight after polarization conversion the orthogonal two-beam in the direction of propagation (two-beam in X-direction and Y-direction) to inject planar optical waveguide, as shown in Figure 2.Containing TE light and TM light component in flashlight, once be coupled into described coupling polarization beam apparatus, the light of all mode has all become TE polarization state.
Described two-dimensional grating is obtained by the 2 D photon crystal of SOI etching period on silicon chip on an insulating substrate.Lattice period equals the wavelength of TE pattern in silicon waveguide, and the etching depth of photonic crystal is d, actually adds man-hour, can by parameters such as the coupling efficiency of the state modulator two-dimensional gratings such as control d and splitting ratios.
Described local oscillations optical coupling is entered one-dimensional grating by described optical coupler; Described one-dimensional grating is that on the silicon chip on dielectric substrate SOI, etching period grating is formed, and is specially full etching grating, or shallow etched diffraction grating, or uniform grating, or binary blazed grating.Wherein soi wafer top layer silicon thickness is a, and oxygen buried layer thickness is h, and screen periods is T (T=g+ γ), and wherein g is the etching width of top layer silicon, and γ is ridge width.Grating duty ratio is x (duty ratio is defined as in each screen periods the ratio of be etched region and screen periods, i.e. x=g/T=g/ (g+r)), and the etching depth of grating is d, and the incident angle of optical fiber is φ.Actually add man-hour, can by parameters such as the coupling efficiency of the state modulator gratings such as control T, x, d and spectral widths, as shown in Figure 3.
Described beam splitter adopts the multi-mode interferometer of 1 × 2 to be formed, and described local oscillations light is divided into the two-way light of 50/50, as shown in Figure 5.
Described one 90 ° of phase shift frequency mixer, the 2 90 ° of phase shift frequency mixer all by the phase deviation 90o of light wave, and realize the mixing of light wave.Described one 90 ° of phase shift frequency mixer, the 2 90 ° of phase shift frequency mixer realize by the multi-mode interferometer (MMI) of single 2 × 4, or are realized by the multi-mode interferometer of 2 × 4 and the multi-mode interferometer cascade of 2 × 2, do not need cascade phase-shifter; Export 1-4 road mixing light respectively by described one 90 ° of phase shift frequency mixer or the 2 90 ° of phase shift frequency mixer, wherein the phase 180 ° of 1 tunnel mixing light and 2 tunnel mixing light, and enter same described balance reception photo-detector; The phase 180 ° of 3 tunnel mixing light and 4 tunnel mixing light, and enter balance reception photo-detector described in another, avoid intersecting of waveguide when being connected with described balance reception photo-detector.Described one 90 ° of phase shift frequency mixer, the 2 90 ° of phase shift frequency mixer are 90 ° of phase shift frequency mixers of TE light.For described one 90 ° of phase shift frequency mixer, the 2 90 ° of phase shift frequency mixer, by reducing the width of 2 × 4MMI input, reducing the pattern count excited, also can effectively eliminate phase deviation very large between high-rder mode simultaneously.Actual design adds man-hour, by changing the width W of 2 × 4MMI input
a, output width W
b, 2 × 4MMI length L
2-4and the length L of 2 × 2MMI
2-2control the parameters such as extinction ratio, conjugated analoging systeming ratio, phase deviation, as shown in Figure 5.
Described balance reception photo-detector is connected by two photodetectors and is formed, and as shown in Figure 6, series connection node S exports the signal of telecommunication demodulated; Described photodetector is the integrated detector of waveguide.The full germanium photodetector of described photodetector or silicon germanium photodetector.
During concrete connection, the N pole of the PN junction of the first photodetector is extremely connected with the P of the PN junction of the second photodetector, and connect back bias voltage in the P pole of described first photodetector, connect positive bias in the N pole of described second photodetector, export the differentiated signal of telecommunication at S end; Simultaneously, can link on photodetector to make the G of AC signal, ensure that output and the direct current biasing of high-frequency signal are separated simultaneously, the present invention to devise on receiver (on-chip) electric capacity C1, C2 to guarantee the correctness in the high frequency equivalent loop of photodetector, thus can avoid the complexity of the test brought because adopting outer (off-chip) electric capacity of receiver.
As shown in Fig. 7 (a), 7 (b), be structural representation and the cross-sectional view of the silicon germanium photodetector that medium wave derived set of the present invention becomes.Wherein germanium layer grows in the silicon waveguide of P type doping, by obtaining N-type germanium to the doping of germanium top, thus forms vertical PIN structural.The anode of photodetector and negative electrode are formed respectively on the heavily doped germanium material of N-type and the heavily doped silicon materials of P type.By the structure adopting waveguide integrated, because the direction of propagation of light, the collecting direction that absorbs direction and photo-generated carrier are orthogonal, therefore the restricting relation between the quantum efficiency of the photodetector of vertical incidence and bandwidth can be overcome, while acquisition high bandwidth, ensure that high quantum efficiency.Adopt PIN structural, make processing technology simple, device bias voltage is little.Actual design adds man-hour, and by optimizing the process conditions of growth of germanium, and the mode such as the surface passivation of device carrys out the dark current of control device.By the parameter such as responsiveness, bandwidth controlling the width W of germanium layer, height H, length L carry out control device.
Four pairs of photodetectors in the present invention form four balance reception photo-detectors, demodulation exports I road information, the Q road information of the I road information of a road (X-direction) TE light, Q road information and an other road (Y-direction) TE light respectively, wherein I represents the in-phase component after demodulation, Q represents the quadrature component that demodulation exports, and is specially: the 1 tunnel mixing light S that described one 90 ° of phase shift frequency mixer exports
x+ L
xwith 2 tunnel mixing light S
x-L
xenter a balance reception photo-detector, after opto-electronic conversion, export the I road information I of TE light X-direction
x; The 3 tunnel mixing light S that described one 90 ° of phase shift frequency mixer exports
x+ jL
xwith 4 tunnel mixing light S
x-jL
xenter another weighing apparatus and receive photo-detector, after opto-electronic conversion, export the Q road information Q of TE light X-direction
x; The 1 tunnel mixing light S that described 2 90 ° of phase shift frequency mixer exports
y+ L
ywith 2 tunnel mixing light S
y-L
yenter a balance reception photo-detector, after opto-electronic conversion, export the I road information I of TE light Y-direction
y; The 3 tunnel mixing light S that described 2 90 ° of phase shift frequency mixer exports
y+ jL
ywith 4 tunnel mixing light S
y-jL
yenter another weighing apparatus and receive photo-detector, after opto-electronic conversion, export the Q road information Q of TE light Y-direction
y.
Fig. 8 (a), 8 (b) are the cross-sectional views of two kinds of embodiments of planar optical waveguide of the present invention, Fig. 8 (a) is slab waveguide, duct width is W, this waveguiding structure the top layer silicon of silicon-on-insulator (SOI) material (thickness is H) is all etched and formed, and wherein t is the thickness of silicon dioxide oxygen buried layer.Fig. 8 (b) is ridge waveguide, and duct width is W, and this waveguiding structure is formed by the top layer silicon partial etching of SOI material (etching depth is D).By controlling the parameters such as W, H, t, D of waveguide, can control the characteristic of waveguide, design is applicable to the waveguide passing TE light.
The integrated coherent optical heterodyne communicatio surface of a kind of silicon-based monolithic of the present invention can cover other protective materials, also can not cover other protective materials.Preferably, described protective material is SiO
2material, adopts the method for chemical vapour deposition (CVD) to grow one deck SiO at device surface
2, be used for protection device surface.
The integrated coherent optical heterodyne communicatio of a kind of silicon-based monolithic provided by the invention, its all element all adopts silica-base material to realize, and compatible with CMOS technology, cost is low; Built different by discrete device from conventional optical communication systems, the present invention achieves the integrated of all unit components of coherent optical heterodyne communicatio on one chip, overcome the impact of conventional optical communication systems by connective stability between discrete device job stability and device, thus ensure that working stability.Meanwhile, in the present invention, conventional coupler, polarization converter, beam splitter are realized with a grating respectively, 90 ° of phase-shifters and frequency mixer a 2 × 4MMI and 2 × 2MMI cascade are realized; Flashlight is once be coupled into coherent optical heterodyne communicatio chip, and all light has become TE polarization state, does not therefore need to adopt polarization converter (Polarization Rotator), decreases unit component quantity, further increases job stability.The unit component negligible amounts that coherent optical heterodyne communicatio of the present invention comprises, thus reduce overall size, the 90 ° of phase shift frequency mixers adopted are formed by a wedge shape 2 × 4MMI and 2 × 2MMI cascade, are the devices that in the 90 ° of phase shift frequency mixers reported at present, length is the shortest; The length of the silicon germanium photodetector that the waveguide adopted is integrated only has 10 μm, further reduces the size of integrated receiver, and the area of the overall receiver of the present invention is only the half of the receiver area of Bell Laboratory latest report; During the present invention adopts a two-dimensional grating and an one-dimensional grating flashlight and local oscillator optical coupling afferent echo to be led respectively, avoid the complex operations of Waveguide end face coupling and the unsteadiness of optical fiber align optical signal, make to test easy, aligning optical signal good stability; Simultaneously because the particular design of 90 ° of phase shift frequency mixers makes in the 1-4 road mixing light from top to bottom exported, 1 tunnel differs 180 ° with 2 tunnels, 3 tunnels respectively with the phase place on 4 tunnels, avoid intersecting of waveguide when being connected with balance reception photo-detector, be easy to the bonding packaging of later stage balance reception photo-detector and commercial TIA.
Above execution mode is only for illustration of the present invention, but not limitation of the present invention.Although with reference to embodiment to invention has been detailed description, those of ordinary skill in the art is to be understood that, various combination, amendment or equivalent replacement are carried out to technical scheme of the present invention, do not depart from the spirit and scope of technical solution of the present invention, all should be encompassed in the middle of right of the present invention.
Claims (10)
1. the integrated coherent optical heterodyne communicatio of silicon-based monolithic, it is characterized in that, the integrated coherent optical heterodyne communicatio of described a kind of silicon-based monolithic comprises coupling polarization beam apparatus, an optical coupler, a beam splitter, the one 90 ° of phase shift frequency mixer, the 2 90 ° of phase shift frequency mixer and four balance reception photo-detectors;
Flashlight is divided into orthogonal first flashlight, secondary signal light by after the process of described coupling polarization beam apparatus; Local oscillations light by after described optical coupler process, by described beam splitter be divided into described first flashlight the first local oscillation light in the same way, with described secondary signal light the second local oscillations light in the same way; Described first local oscillation light, the first flashlight all enter described one 90 ° of phase shift frequency mixer; Described secondary signal light, the second local oscillations light all enter described 2 90 ° of phase shift frequency mixer; Enter four described balance reception photo-detectors respectively by the laser after described one 90 ° of phase shift frequency mixer, the 2 90 ° of phase shift frequency mixer process and light signal is converted to the signal of telecommunication.
2. the integrated coherent optical heterodyne communicatio of a kind of silicon-based monolithic according to claim 1, it is characterized in that, described coupling polarization beam apparatus, optical coupler, beam splitter, set up light interface channel by planar optical waveguide between the one 90 ° of phase shift frequency mixer, the 2 90 ° of phase shift frequency mixer and balance reception photo-detector; Described planar optical waveguide is corresponding with the pattern of the light signal of transmission.
3. the integrated coherent optical heterodyne communicatio of a kind of silicon-based monolithic according to claim 1, it is characterized in that, described flashlight is entered two-dimensional grating by Single-Mode Fiber Coupling by described coupling polarization beam apparatus, changed by described two-dimensional grating settling signal polarisation of light, and be divided into by the flashlight after polarization conversion the orthogonal two-beam in the direction of propagation to export; Described two-dimensional grating is obtained by the 2 D photon crystal of etching period on silicon chip on an insulating substrate.
4. the integrated coherent optical heterodyne communicatio of a kind of silicon-based monolithic according to claim 1, is characterized in that, described local oscillations optical coupling is entered one-dimensional grating by monomode fiber by described optical coupler, sends described beam splitter afterwards to; Described one-dimensional grating is that on silicon chip on an insulating substrate, etching period grating is formed, and is specially full etching grating, or shallow etched diffraction grating, or uniform grating, or binary blazed grating.
5. the integrated coherent optical heterodyne communicatio of a kind of silicon-based monolithic according to claim 1, is characterized in that, described beam splitter is described local oscillations light is divided into two impartial bundles, adopts the multi-mode interferometer beam splitter of 1 × 2.
6. the integrated coherent optical heterodyne communicatio of a kind of silicon-based monolithic according to claim 1, is characterized in that, described one 90 ° of phase shift frequency mixer, the 2 90 ° of phase shift frequency mixer all by the phase deviation 90 ° of light wave, and realize the mixing of light wave.
7. the integrated coherent optical heterodyne communicatio of a kind of silicon-based monolithic according to claim 1, it is characterized in that, described one 90 ° of phase shift frequency mixer, the 2 90 ° of phase shift frequency mixer realize by the multi-mode interferometer of single 2 × 4, or are realized by the multi-mode interferometer of 2 × 4 and the multi-mode interferometer cascade of 2 × 2;
Export 1-4 road mixing light respectively by described one 90 ° of phase shift frequency mixer or the 2 90 ° of phase shift frequency mixer, wherein the phase 180 ° of 1 tunnel mixing light and 2 tunnel mixing light, and enter same described balance reception photo-detector; The phase 180 ° of 3 tunnel mixing light and 4 tunnel mixing light, and enter balance reception photo-detector described in another.
8. the integrated coherent optical heterodyne communicatio of a kind of silicon-based monolithic according to claim 1, is characterized in that, described balance reception photo-detector is connected by two photodetectors and formed, and series connection node exports the signal of telecommunication demodulated.
9. the integrated coherent optical heterodyne communicatio of a kind of silicon-based monolithic according to claim 11, is characterized in that, described photodetector is the integrated full germanium photodetector of waveguide or silicon germanium photodetector.
10. the integrated coherent optical heterodyne communicatio of a kind of silicon-based monolithic according to any one of claim 1 to 9, is characterized in that, described a kind of silicon-based monolithic integrated coherent optical heterodyne communicatio surface coverage protective material.
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| CN106328751A (en) * | 2015-07-02 | 2017-01-11 | 中兴通讯股份有限公司 | Silicon-based germanium photodetector |
| CN106921441A (en) * | 2017-03-13 | 2017-07-04 | 南京邮电大学 | A kind of coherent optical heterodyne communicatio of achievable indifference mixing |
| CN107643120A (en) * | 2017-11-10 | 2018-01-30 | 武汉理工光科股份有限公司 | The distributed fiber Rayleigh of polarization decay is avoided to scatter vibration sensing system and method |
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| CN109991582A (en) * | 2019-03-13 | 2019-07-09 | 上海交通大学 | Silicon substrate hybrid integrated laser radar chip system |
| CN109991582B (en) * | 2019-03-13 | 2023-11-03 | 上海交通大学 | Silicon-based hybrid integrated laser radar chip system |
| CN110687518B (en) * | 2019-09-30 | 2021-07-13 | 中国电子科技集团公司信息科学研究院 | On-chip integrated balanced detection receiving system and method |
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| CN111596281A (en) * | 2020-06-17 | 2020-08-28 | 中国电子科技集团公司信息科学研究院 | Three-dimensional integrated balanced detector receiving device and integration method |
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