CN112034638A - Polarization-independent optical phase shifter - Google Patents
Polarization-independent optical phase shifter Download PDFInfo
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- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/0147—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on thermo-optic effects
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- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
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- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
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- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/011—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour in optical waveguides, not otherwise provided for in this subclass
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- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/03—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on ceramics or electro-optical crystals, e.g. exhibiting Pockels effect or Kerr effect
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- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/03—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on ceramics or electro-optical crystals, e.g. exhibiting Pockels effect or Kerr effect
- G02F1/035—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on ceramics or electro-optical crystals, e.g. exhibiting Pockels effect or Kerr effect in an optical waveguide structure
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- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
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Abstract
The invention discloses a polarization-independent optical phase shifter.A two-dimensional grating coupler is connected with a waveguide through a spot-size converter, and a phase shifting area electrode is arranged around the waveguide; the two-dimensional grating coupler receives/outputs light in any polarization state, and the spot-size converter realizes the coupling between the waveguide and the two-dimensional grating coupler; the electrodes are positioned around the two waveguide arms and in a modulation region formed by the electrodes and the waveguides, so that phase modulation of light waves transmitted in the waveguides is realized. The two-dimensional grating coupler is adopted, so that the transmission of only single-mode light waves after light waves in any polarization state are coupled into the waveguide is realized, the complexity of an optical phase shifter system is greatly simplified, and the application range of the optical phase shifter is expanded. By adopting the principle based on the plasma dispersion effect, the material thermo-optic effect and the electro-optic effect, the modulation of the phase of the transmission optical wave is realized, and the selectivity of the manufacturing scheme of the optical phase shifter under different application scenes is improved.
Description
Technical Field
The invention relates to the technical field of optical communication, in particular to a polarization-independent optical phase shifter.
Background
With the continuous development and progress of science and technology, integrated optics becomes one of the leading-edge technologies in the field of current photonics, and is the necessary way for optical development. In particular, in the field of optical communications, devices such as lasers, modulators, detectors, filters, polarization controllers, wavelength division multiplexers/demultiplexers, phase shifters, and the like have been integrated and miniaturized. The phase shifter is used as a basic structure of a modulator, an optical switch and other devices, has become an important component in an integrated optical device, is commonly used for realizing modulation of transmission light phase, and further can be used for realizing light intensity modulation and the like. Optical waveguides and optical devices are typically polarization sensitive, meaning that the response of the device changes with changes in the polarization state of the input light. In general, it is desirable that the optical device is insensitive to the polarization state, i.e. the performance of the optical device is independent of the polarization state of the input signal. For example, an integrated optical device based on Silicon On Insulator (SOI) has a very strong birefringence effect due to the typical dimension of the cross section of a waveguide of 450nm (wide) by 220nm (thick), and a phase shifter based on the waveguide structure is sensitive to polarization, so different researchers propose different solutions, such as a polarization diversity scheme, in which two polarized lights are divided into two paths and processed separately in an optical system, and optimized separately for the two paths of devices, and finally the two paths of signals are combined into one pathThe number of finished devices increases the cost and complexity of the system, and reduces the yield of products; in patent CN201610226520.3, researchers implement polarization-independent optical switches by optimizing the design to make the polarization-dependent losses of two cascaded phase shifters opposite, in which precise control of waveguide width is required to avoid the polarization-dependent loss compensation from being insufficient or overcompensated; in patent CN201410652891.9, researchers use two-dimensional gratings to realize a polarization insensitive silicon-based electro-optic modulator, in this patent, in order to realize good modulation performance of light intensity, it is necessary to ensure that light is vertically incident to the two-dimensional gratings, so as to ensure that light energy in two waveguide arms is consistent, and to ensure that the verticality of input is necessary to increase the difficulty of packaging; the phase shifter based on lithium niobate has anisotropic electro-optic coefficient of lithium niobate and gamma33To make full use of gamma33The phase shifter is required to operate in a single polarization state with the applied electric field along the Z-axis. Different researchers have also proposed different solutions to the polarization sensitive properties of lithium niobate: for example, in patent CN201610294441.6, researchers achieve polarization-independent phase modulation by splicing an X-cut Y-pass lithium niobate chip and a Z-cut Y-pass lithium niobate chip, which is relatively complex in process and doubles the device size. In summary, the characteristics of the material or the structure of the waveguide determine that the phase shifter is sensitive to polarization and can only work in a single polarization state.
Disclosure of Invention
1. Objects of the invention
The problem to be solved by the present invention is to provide a polarization-independent optical phase shifter, which can realize phase modulation of an input optical wave in any polarization state (including a single polarization state), and can be used for realizing polarization-independent phase modulation based on a plasma dispersion effect, a thermo-optic effect, and an electro-optic effect.
2. The technical scheme adopted by the invention
The invention discloses a polarization-independent optical phase shifter.A two-dimensional grating coupler is connected with two waveguides through a spot-size converter, and phase shifting area electrodes are arranged around the two waveguides; the two-dimensional grating coupler receives/outputs light in any polarization state, and the spot-size converter realizes the coupling between the two waveguides and the two-dimensional grating coupler;
the phase shifting region electrode is positioned around the two waveguide arms and forms a modulation region with the two waveguides, so that phase modulation of the light waves transmitted in the two waveguides is realized.
Furthermore, the waveguide is composed of a lower cladding layer, an upper cladding layer and a core layer; the core layer is wrapped by the upper cladding layer and the lower cladding layer.
Furthermore, the lower cladding material is one or a combination of air, low-refractive-index silicon dioxide, low-refractive-index doped silicon dioxide, low-refractive-index silicon nitride, low-refractive-index silicon oxynitride, low-refractive-index polymer and low-refractive-index indium gallium arsenic phosphorus alloy.
Furthermore, the core layer material is one or a combination of more of silicon, silicon dioxide, doped silicon dioxide, silicon nitride, silicon oxynitride, lithium niobate, polymer and indium gallium arsenic phosphorus alloy.
Furthermore, the upper cladding material is one or a combination of air, low-refractive-index silicon dioxide, low-refractive-index doped silicon dioxide, low-refractive-index silicon nitride, low-refractive-index silicon oxynitride, low-refractive-index polymer and low-refractive-index indium gallium arsenic phosphorus alloy.
Furthermore, the two-dimensional grating coupler is made of one or more of silicon, silicon dioxide, doped silicon dioxide, silicon nitride, silicon oxynitride, lithium niobate, polymer and indium gallium arsenic phosphorus alloy.
Further, the phase shift region electrode is one or more of titanium, platinum, gold, chromium, aluminum, copper, nickel and iron.
Furthermore, the optical path and loss of the input channel and the output channel of the waveguide are the same.
Furthermore, the phase of the transmitted light wave in the waveguide is modulated by the thermo-optic effect, the core layer is silicon, the upper cladding layer is silicon dioxide, and the phase shifting region electrode is positioned above the waveguide; the spot size converter is of a gradual change structure; the relation between the phase change of the transmission light wave in the waveguide and the change quantity of the effective refractive index of the waveguide in the phase shifting region is
Wherein,
as the amount of the phase change,
in order to transmit the wavelength of the light wave,
in order to change the effective refractive index,
is the waveguide length in the phase shifting region.
Furthermore, the electro-optic effect of the lithium niobate is utilized to realize the modulation of the phase of the transmission light wave in the waveguide; the core layer is lithium niobate, and the upper cladding layer is air; the relationship between the phase change of the light wave transmitted by the waveguide and the magnitude of the voltage applied to the phase shift region is
Wherein,
as the amount of the phase change,
in order to transmit the wavelength of the light wave,
in order to change the effective refractive index,
is the refractive index of the lithium niobate,
is the electro-optic coefficient of the lithium niobate,
in order to apply the magnitude of the voltage,
is the distance between the electrodes, and is,
is the waveguide length in the phase shifting region.
3. Advantageous effects adopted by the present invention
(1) The two-dimensional grating coupler is adopted, so that only single-mode light waves are transmitted after input light waves in any polarization state are coupled into the waveguide, the complexity of an optical phase shifter system is greatly simplified, and the application range of the optical phase shifter is expanded.
(2) The invention realizes the modulation of the phase of the transmission light wave by adopting the principle based on the plasma dispersion effect, the material thermo-optic effect and the electro-optic effect, and improves the selectivity of the manufacturing scheme of the optical phase shifter under different application scenes.
Drawings
FIG. 1 is a top view of a polarization uncorrelated phase shifters according to an embodiment of the present invention.
FIG. 2 is a three-dimensional schematic diagram of a polarization uncorrelated phase shifters according to an embodiment of the present invention.
FIG. 3 is a schematic cross-sectional view of a SOI-based polarization uncorrelated phase shifter phase-shifting region waveguide according to an embodiment of the present invention.
FIG. 4 is a schematic cross-sectional view of a phase shift region waveguide of a polarization uncorrelated phase shifter based on X-cut Y-transfer Lithium Niobate (LN) according to an embodiment of the present invention.
Description of reference numerals: the optical waveguide grating coupler comprises an input two-dimensional grating coupler, an output two-dimensional grating coupler, a first waveguide arm, a second waveguide arm, a phase shifting region, a substrate, a lower cladding, a core layer, a phase shifting region positive electrode, a phase shifting region negative electrode and a mode spot converter, wherein the input two-dimensional grating coupler is 1a, the output two-dimensional grating coupler is 1b, the first waveguide arm is 2a, the second waveguide arm is 2b, the phase shifting region positive electrode is 3, the substrate is 4, the lower cladding is 5, the upper cladding.
Detailed Description
The technical solutions in the examples of the present invention are clearly and completely described below with reference to the drawings in the examples of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments of the present invention without inventive step, are within the scope of the present invention.
The present invention will be described in further detail with reference to the accompanying drawings.
As shown in fig. 1-2, the present invention discloses a polarization independent optical phase shifter, the two-dimensional grating coupler includes an input two-dimensional grating coupler 1a, an output two-dimensional grating coupler 1 b; the waveguide comprises a first waveguide arm 2a, a second waveguide arm 2b, a phase shifting region 3, a substrate 4, a lower cladding 5, an upper cladding 6, a core layer 7, phase shifting region electrodes comprising a phase shifting region positive electrode 8a, a phase shifting region negative electrode 8b and a spot size converter 9;
the input two-dimensional grating coupler 1a and the output two-dimensional grating coupler 1b are connected with the first waveguide arm 2a and the second waveguide arm 2b through a spot-size converter 9, and the input two-dimensional grating coupler 1a and the output two-dimensional grating coupler 1b output light waves in any polarization state; the phase shift region positive electrode 8a and the phase shift region negative electrode 8b are positioned around the first waveguide arm 2a and the second waveguide arm 2 b; the phase shifting section positive electrode 8a and the phase shifting section negative electrode 8b are used for realizing the modulation of the phase of the transmitted light wave in the waveguide.
The input two-dimensional grating coupler 1a and the output two-dimensional grating coupler 1b are made of one or a combination of more of silicon, silicon dioxide, doped silicon dioxide, silicon nitride, silicon oxynitride, lithium niobate, polymer and indium gallium arsenic phosphorus alloy; the input two-dimensional grating coupler 1a and the output two-dimensional grating coupler 1b and the first waveguide arm 2a and the second waveguide arm 2b may be made of different materials, and the optimized spot-size converter 9 is designed to realize low-loss coupling between the first waveguide arm 2a and the second waveguide arm 2b and the input two-dimensional grating coupler 1a and the output two-dimensional grating coupler 1 b;
the first waveguide arm 2a and the second waveguide arm 2b are composed of a lower cladding layer 5, a core layer 7 and an upper cladding layer 6, and the optical paths and the losses of the two waveguide arms are preferably selected to be the same by the first waveguide arm 2a and the second waveguide arm 2 b;
the lower cladding 5 is made of one or a combination of air, low-refractive-index silicon dioxide, low-refractive-index doped silicon dioxide, low-refractive-index silicon nitride, low-refractive-index silicon oxynitride, low-refractive-index polymer and low-refractive-index indium gallium arsenic phosphorus alloy;
the upper cladding 6 is made of one or a combination of air, silicon dioxide with low refractive index, doped silicon dioxide with low refractive index, silicon nitride with low refractive index, silicon oxynitride with low refractive index, polymer with low refractive index and indium gallium arsenic phosphorus alloy with low refractive index;
the core layer 7 is made of one or a combination of more of silicon, silicon dioxide, doped silicon dioxide, silicon nitride, silicon oxynitride, lithium niobate, polymer and indium gallium arsenic phosphorus alloy;
the phase shift region positive electrode 8a and the phase shift region negative electrode 8b are one or a combination of more of titanium, platinum, gold, chromium, aluminum, copper, nickel and iron; the phase shift region positive electrode 8a and the phase shift region negative electrode 8b ensure that the modulation characteristics of the two-channel waveguide are the same.
When the polarization uncorrelated optical phase shifter works, the two-dimensional grating coupler is used as an input end and an output end of the polarization uncorrelated optical phase shifter. After the input two-dimensional grating coupler 1a receives light waves in any polarization state, the light in a single mode (usually a transverse electric field, TE) is coupled into the waveguide through a spot-size converter 9, the voltage/current of a positive electrode 8a of a phase shifting area and the voltage/current of a negative electrode 8b of the phase shifting area are changed, the refractive index of the waveguide is controlled through an electro-optic effect, a thermo-optic effect and a plasma dispersion effect, and then the phase of the light waves transmitted in the waveguide is adjusted.
Example 1
As shown in fig. 3, is a SOI-based polarization uncorrelated optical phase shifter, where the core layer 7 is silicon, the lower cladding layer 5 is silicon dioxide, the upper cladding layer 6 is silicon dioxide, and the substrate 4 is silicon; a two-dimensional grating coupler (comprising an input two-dimensional grating coupler 1a and an output two-dimensional grating coupler 1 b) made of silicon, having a width of 10-20 μm and a length of 10-20 μm; the total length of the first waveguide arm 2a and the second waveguide arm 2b is 200 μm-800 μm, and the radius of the bent waveguide is 5 μm-150 μm; the length of the phase shift region 3 is 100-500 μm; the positive electrode 8a and the negative electrode 8b of the phase shift region are made of gold and are positioned above the first waveguide arm 2a and the second waveguide arm 2 b; the spot-size converter 9 is now of a graded construction. The example utilizes the thermo-optic effect to achieve phase modulation of the transmitted light waves in the waveguide. Specifically, after the input two-dimensional grating coupler 1a receives the light wave in any polarization state, the light wave in any polarization state is converted into the light wave in a single mode (usually, a transverse electric field, TE) under the action of the input two-dimensional grating coupler 1a, and then the converted light wave is converted into the light wave matched with the first waveguide arm 2a and the second waveguide arm 2b in mode by the spot-size converter 9 and then coupled into the first waveguide arm 2a and the second waveguide arm 2 b. Secondly, the phase shift region 3 is applied with current, electric energy is converted into heat energy under the action of a heating electrode, the temperatures of the first waveguide arm 2a and the second waveguide arm 2b in the phase shift region 3 are changed through heat conduction, the effective refractive indexes of the first waveguide arm 2a and the second waveguide arm 2b in the region are further changed, the phase of the light waves transmitted in the first waveguide arm 2a and the second waveguide arm 2b is changed due to the change of the effective refractive indexes of the first waveguide arm 2a and the second waveguide arm 2b, the light waves with the changed phases are coupled and output by the output two-dimensional grating coupler 1b after the size of a mode spot is converted by the mode spot converter 9, and therefore the phase of the light waves transmitted in the first waveguide arm 2a and the second waveguide arm 2b is modulated by utilizing the thermo-optical effect independently in polarization. The phase change of the transmitted light wave in the first waveguide arm 2a and the second waveguide arm 2b and the change of the effective refractive index of the first waveguide arm 2a and the second waveguide arm 2b in the phase shift region have a relationship
Wherein,
as the amount of the phase change,
in order to transmit the wavelength of the light wave,
in order to change the effective refractive index,
the lengths of the first waveguide arm 2a and the second waveguide arm 2b in the phase shift region 3.
Example 2
As shown in fig. 4, the polarization uncorrelated optical phase shifter is based on X-cut Y-transfer Lithium Niobate (LN), in which the core layer 7 is lithium niobate, the lower cladding layer 5 is silica, the upper cladding layer 6 is air, and the substrate 4 is silicon; a two-dimensional grating coupler (comprising an input two-dimensional grating coupler 1a and an output two-dimensional grating coupler 1 b) made of silicon, having a width of 10-20 μm and a length of 10-20 μm; the total length of the waveguide is 1.0mm-1.5mm, and the radius of the bent waveguide is 150 μm-500 μm; the length of the phase shift zone 3 is 0.5mm-1.0 m; the phase shift region electrodes are made of gold, are positioned on the left side and the right side of the waveguide and comprise phase shift region positive electrodes 8a and phase shift region negative electrodes 8 b; the spot size converter 9 enables coupling of light from the silicon waveguide into the lithium niobate waveguide or vice versa. In this embodiment, the modulation of the refractive index of the waveguide is realized by using the electro-optic effect of lithium niobate, and further, the modulation of the phase of the light wave transmitted in the waveguide is realized. Specifically, after the input two-dimensional grating coupler 1a receives the light wave in any polarization state, the light wave in any polarization state is converted into the light wave in a single mode (usually, a transverse electric field, TE) under the action of the input two-dimensional grating coupler 1a, and then converted into the light wave matched with the first waveguide arm 2a and the second waveguide arm 2b in mode by the spot-size converter 9, and then coupled into the first waveguide arm 2a and the second waveguide arm 2 b. The first waveguide arm 2a and the second waveguide arm 2b change the refractive indexes of the first waveguide arm 2a and the second waveguide arm 2b due to an electro-optical effect under the action of an electric field, and further, the phase of the light wave transmitted in the first waveguide arm 2a and the second waveguide arm 2b changes due to the change of the refractive indexes of the first waveguide arm 2a and the second waveguide arm 2 b. The light wave with the phase change is coupled and output by the output two-dimensional grating coupler 1b after the size of the spot is converted by the spot size converter 9, so that the phase of the light wave transmitted in the first waveguide arm 2a and the second waveguide arm 2b is controlled by polarization-independent electro-optic effect. The phase change of the light wave transmitted by the first waveguide arm 2a and the second waveguide arm 2b and the magnitude of the voltage applied by the phase shift section 3 are related
Wherein,
as the amount of the phase change,
in order to transmit the wavelength of the light wave,
in order to change the effective refractive index,
is the refractive index of the lithium niobate,
is the electro-optic coefficient of the lithium niobate,
in order to apply the magnitude of the voltage,
the distance between the positive electrode 8a of the phase shift section and the negative electrode 8b of the phase shift section,
the lengths of the first waveguide arm 2a and the second waveguide arm 2b in the phase shift region 3. While the invention has been described with reference to specific preferred embodiments, it will be understood by those skilled in the art that various changes and modifications may be made without departing from the spirit and scope of the invention as defined in the appended claimsAre within the scope of the invention. Therefore, the protection scope of the present invention shall be subject to the protection scope of the claims.
Claims (10)
1. A polarization independent optical phase shifter, comprising:
the two-dimensional grating coupler is connected with the two waveguides through the spot-size converter, and the phase shifting area electrode is arranged around the two waveguides; the two-dimensional grating coupler receives/outputs light in any polarization state, and the spot-size converter realizes the coupling between the two waveguides and the two-dimensional grating coupler;
the phase shifting region electrode is positioned around the two waveguide arms and forms a modulation region with the two waveguides, so that phase modulation of the light waves transmitted in the two waveguides is realized.
2. A polarization-independent optical phase shifter as recited in claim 1, wherein: the waveguide is composed of a lower cladding, an upper cladding and a core layer; the core layer is wrapped by the upper cladding layer and the lower cladding layer.
3. A polarization-independent optical phase shifter as recited in claim 2, wherein: the lower cladding material is one or a combination of air, silicon dioxide with low refractive index, doped silicon dioxide with low refractive index, silicon nitride with low refractive index, silicon oxynitride with low refractive index, polymer with low refractive index and indium gallium arsenic phosphorus alloy with low refractive index.
4. A polarization-independent optical phase shifter as recited in claim 2, wherein: the core layer material is one or a combination of more of silicon, silicon dioxide, doped silicon dioxide, silicon nitride, silicon oxynitride, lithium niobate, polymer and indium gallium arsenic phosphorus alloy.
5. A polarization-independent optical phase shifter as recited in claim 2, wherein: the upper cladding material is one or a combination of air, silicon dioxide with low refractive index, doped silicon dioxide with low refractive index, silicon nitride with low refractive index, silicon oxynitride with low refractive index, polymer with low refractive index and indium gallium arsenic phosphorus alloy with low refractive index.
6. A polarization-independent optical phase shifter as recited in claim 1, wherein: the two-dimensional grating coupler is made of one or a combination of more of silicon, silicon dioxide, doped silicon dioxide, silicon nitride, silicon oxynitride, lithium niobate, polymer and indium gallium arsenic phosphorus alloy.
7. A polarization-independent optical phase shifter as recited in claim 1, wherein: the phase shift region electrode is one or more of titanium, platinum, gold, chromium, aluminum, copper, nickel and iron.
8. A polarization-independent optical phase shifter as recited in claim 1, wherein: the optical path and loss of the input channel and the output channel of the waveguide are the same.
9. A polarization-independent optical phase shifter as recited in claim 1, wherein: the phase of the light wave transmitted in the waveguide is modulated by the thermo-optic effect, the core layer is silicon, the upper cladding layer is silicon dioxide, and the phase shifting region electrode is positioned above the waveguide; the spot size converter is of a gradual change structure; the relation between the phase change of the transmission light wave in the waveguide and the change quantity of the effective refractive index of the waveguide in the phase shifting region is
Wherein,
as the amount of the phase change,
in order to transmit the wavelength of the light wave,
in order to change the effective refractive index,
is the waveguide length in the phase shifting region.
10. A polarization-independent optical phase shifter as recited in claim 1, wherein: the electro-optic effect of lithium niobate is utilized to realize the modulation of the phase of the light wave transmitted in the waveguide; the core layer is lithium niobate, and the upper cladding layer is air; the relationship between the phase change of the light wave transmitted by the waveguide and the magnitude of the voltage applied to the phase shift region is
Wherein,
as the amount of the phase change,
in order to transmit the wavelength of the light wave,
in order to change the effective refractive index,
is the refractive index of the lithium niobate,
is the electro-optic coefficient of the lithium niobate,
in order to apply the magnitude of the voltage,
is the distance between the electrodes, and is,
is the waveguide length in the phase shifting region.
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