CN108627919B - Polarization insensitive silicon-based optical switch - Google Patents
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- CN108627919B CN108627919B CN201810449137.3A CN201810449137A CN108627919B CN 108627919 B CN108627919 B CN 108627919B CN 201810449137 A CN201810449137 A CN 201810449137A CN 108627919 B CN108627919 B CN 108627919B
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/27—Optical coupling means with polarisation selective and adjusting means
- G02B6/2753—Optical coupling means with polarisation selective and adjusting means characterised by their function or use, i.e. of the complete device
- G02B6/2793—Controlling polarisation dependent loss, e.g. polarisation insensitivity, reducing the change in polarisation degree of the output light even if the input polarisation state fluctuates
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/28—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals
- G02B6/293—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals with wavelength selective means
- G02B6/29344—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals with wavelength selective means operating by modal interference or beating, i.e. of transverse modes, e.g. zero-gap directional coupler, MMI
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/28—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals
- G02B6/293—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals with wavelength selective means
- G02B6/29379—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals with wavelength selective means characterised by the function or use of the complete device
- G02B6/29397—Polarisation insensitivity
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/35—Optical coupling means having switching means
- G02B6/354—Switching arrangements, i.e. number of input/output ports and interconnection types
- G02B6/3544—2D constellations, i.e. with switching elements and switched beams located in a plane
- G02B6/3546—NxM switch, i.e. a regular array of switches elements of matrix type constellation
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/35—Optical coupling means having switching means
- G02B6/3592—Means for removing polarization dependence of the switching means, i.e. polarization insensitive switching
Abstract
The invention discloses a polarization insensitive silicon-based optical switch. The first input waveguide and the second input waveguide are connected with two mode filters through a first polarization insensitive 2 x 2 multimode interference coupler, the two mode filters are connected with a second polarization insensitive 2 x 2 multimode interference coupler through polarization insensitive waveguide arms respectively, the second polarization insensitive 2 x 2 multimode interference coupler is connected with a first output waveguide and a second output waveguide through a mode filter respectively, and a metal electrode is arranged above a phase shift region of one polarization insensitive waveguide arm. The invention realizes the switching effect on transverse electric mode (TE) and transverse magnetic mode (TM) signals at the same time, solves the problem of polarization sensitivity of a 2 multiplied by 2 optical switch, and has the outstanding advantages of high performance, simple structure, compact layout, easy expansion and the like.
Description
Technical Field
The invention belongs to the field of integrated optoelectronic devices, and particularly relates to a polarization insensitive silicon-based optical switch.
Background
The optical switch is a core part of an on-chip optical interconnection and reconfigurable add-drop multiplexing device, can enable people to freely select a channel for signal transmission in an integrated optical chip, and has very important significance for improving the concentration degree, expandability and channel selection flexibility of the integrated optical chip. Among the numerous platforms for implementing integrated optical chips, integrated silicon photonics has received great attention because of its ultra-high refractive index difference, which facilitates the implementation of ultra-small-sized integrated optical devices. Meanwhile, because the silicon material has a strong birefringence effect, various silicon-based optical devices can only work in a certain specific polarization state generally, and have strong polarization sensitivity, so that the application scenes of the silicon-based optical devices are greatly limited, and the further improvement of the chip integration level is not facilitated.
Disclosure of Invention
In order to solve the problems in the prior art, an object of the present invention is to provide a polarization insensitive silicon-based optical switch, which achieves the switching effect of thermal modulation on transverse electric mode (TE) and transverse magnetic mode (TM) signals in the C-band, and solves the polarization sensitivity problem of a 2 × 2 optical switch. The invention can greatly contribute to expanding the integration degree and application scene of the silicon-based integrated optical device, and enables the selection of the signal channel to be more flexible.
The invention adopts the specific technical scheme that:
the polarization insensitive dual-mode waveguide optical coupler comprises a first input waveguide, a second input waveguide, a polarization insensitive 2 x 2 multimode interference coupler, a mode filter, a polarization insensitive waveguide arm, a first output waveguide, a second output waveguide and a metal electrode, wherein the first input waveguide and the second input waveguide are connected with the two mode filters through the first polarization insensitive 2 x 2 multimode interference coupler, the two mode filters are connected with the second polarization insensitive 2 x 2 multimode interference coupler through the polarization insensitive waveguide arm respectively, the second polarization insensitive 2 x 2 multimode interference coupler is connected with the first output waveguide and the second output waveguide through the mode filter respectively, and the metal electrode is arranged above a phase shift area of one polarization insensitive waveguide arm.
The polarization insensitive 2 x 2 multimode interference coupler is a 3dB multimode interference coupler.
Each output end of the polarization insensitive 2 x 2 multimode interference coupler is connected with a mode filter.
The first input waveguide and the second input waveguide are respectively connected to two input ends of a first polarization insensitive 2 x 2 multimode interference coupler, two output ends of the first polarization insensitive 2 x 2 multimode interference coupler are respectively connected with input ends of two mode filters, the output ends of the two mode filters are respectively connected with two input ends of a second polarization insensitive 2 x 2 multimode interference coupler through respectively same polarization insensitive waveguide arms, and two output ends of the second polarization insensitive 2 x 2 multimode interference coupler are respectively connected with a first output waveguide and a second output waveguide after passing through the respective mode filters; the thermo-optic switch function is realized by changing the current injected into the metal electrode so as to adjust the phase change introduced by the phase shift region positioned on the polarization insensitive waveguide arm. And the invention can realize good thermo-optic switch under TM and TE polarization modes.
The two polarization insensitive 2 x 2 multimode interference couplers are completely the same, and use a multimode interference coupler structure, specifically comprise a first input adiabatic tapered waveguide, a second input adiabatic tapered waveguide, a multimode interference region, a first output adiabatic tapered waveguide and a second output adiabatic tapered waveguide, wherein the first input adiabatic tapered waveguide and the second input adiabatic tapered waveguide are connected to the same end of the multimode interference region, the first input adiabatic tapered waveguide and the second input adiabatic tapered waveguide are symmetrically distributed in the middle of the end of the multimode interference region, the first output adiabatic tapered waveguide and the second output adiabatic tapered waveguide are connected to the other same end of the multimode interference region, and the first output adiabatic tapered waveguide and the second output adiabatic tapered waveguide are symmetrically distributed in the middle of the end of the multimode interference region.
The multimode interference region is mainly composed of a waveguide which is wider than the adiabatic tapered waveguide, the width of the waveguide is twice that of the adiabatic tapered waveguide, and the widths of the adiabatic tapered waveguides are the same.
The two polarization insensitive waveguide arms are completely the same, the cross section is square, and the input end and the output end are respectively connected with the output end of the mode filter and the input end of the second polarization insensitive 2 multiplied by 2 multimode interference coupler.
The mode filter adopts a bent waveguide structure.
The curved waveguide structure for a mode filter has a bend radius such that a fundamental mode bend loss is <0.1dB/90 DEG and a high-order mode bend loss is >10dB/90 deg.
The invention realizes the 2 x 2 thermo-optic switch under the polarization insensitivity through the polarization insensitivity 2 x 2 multi-mode interference coupler, the mode filter and the polarization insensitivity waveguide arm.
In the specific implementation, after passing through the polarization insensitive 2 × 2 multimode interference coupler, a small amount of hybrid modes remain in the optical signal at the output end, which affects the subsequent signal transmission.
The invention mainly comprises two polarization insensitive 2 multiplied by 2 multimode interference couplers, four mode filters based on bent waveguides and two polarization insensitive waveguide arms. Firstly, a polarization insensitive 2 x 2 multimode interference coupler uniformly divides a signal at an input end into two paths of signals with equal strength, the two paths of signals respectively pass through a mode filter and a polarization insensitive waveguide arm and then enter a second polarization insensitive 2 x 2 multimode interference coupler, the signals after interference are all output through an output end, the phase of the signals when passing through the corresponding polarization insensitive waveguide arm can be changed through a thermal tuning mode, the phase difference of the signals in the two polarization insensitive waveguide arms is further changed, and therefore a port for outputting the signals is changed, and the function of switching is achieved.
The invention divides the signal light input from the first input waveguide or the second input waveguide into two signal lights with equal intensity after passing through the first polarization insensitive 2X 2 multi-mode interference coupler, then two paths of signals enter the second polarization insensitive 2X 2 multi-mode interference coupler after passing through a mode filter and a polarization insensitive waveguide arm respectively to change the phase, the signals can be output through an output end after interference, specifically, the two paths of signals pass through the second polarization insensitive 2X 2 multi-mode interference coupler and are output by the first or the second output waveguide, the phase when the signals pass through the corresponding polarization insensitive waveguide arm is changed by a thermal tuning mode, and then the phase difference of the signals in the two polarization insensitive waveguide arms is changed, thereby changing the port of signal output and realizing the function of switch.
The invention has the beneficial effects that:
the invention can realize the switching function under two TM and TE polarization modes, can change the output port of a signal under the condition of fixing the input signal port in a thermal tuning mode, solves the problem of 2 multiplied by 2 optical path switching under the polarization insensitivity requirement, has better working performance as a whole, and has the characteristics of simple structure and compact layout.
Drawings
FIG. 1 is a schematic diagram of the present invention.
FIG. 2 is a schematic diagram of the polarization insensitive 2 × 2 multimode interference coupler of the present invention.
Fig. 3 is a diagram of an operating spectrum in a state where the input is the TM mode according to the embodiment of the present invention.
Fig. 4 is an operation spectrum diagram of the embodiment of the present invention in a state where the TE mode is input.
In the figure: 1 is a first input waveguide; 2 is a second input waveguide, 3 is a polarization insensitive 2 x 2 multimode interference coupler, 3a is a first input adiabatic tapered waveguide, 3b is a second input adiabatic tapered waveguide, 3c is a multimode interference region, 3d is a first output adiabatic tapered waveguide, 3e is a second output adiabatic tapered waveguide, 4 is a mode filter, 5 is a polarization insensitive waveguide arm, 6 is a first output waveguide, 7 is a second output waveguide, 8 is a phase shift region, and 9 is a metal electrode.
Detailed Description
The invention is further illustrated by the following figures and examples.
As shown in fig. 1, an embodiment of the invention comprises a first input waveguide 1, a second input waveguide 2, a polarization insensitive 2 x 2 multimode interference coupler 3, a mode filter 4, a polarization insensitive waveguide arm 5, the dual-mode polarization-insensitive single-mode optical fiber laser comprises a first output waveguide 6, a second output waveguide 7, a phase shift region 8 and a metal electrode 9, wherein the first input waveguide 1 and the second input waveguide 2 are connected with two mode filters 4 through a first polarization-insensitive 2X 2 multimode interference coupler 3, the two mode filters 4 are respectively connected with a second polarization-insensitive 2X 2 multimode interference coupler 3 through a polarization-insensitive waveguide arm 5, the second polarization-insensitive 2X 2 multimode interference coupler 3 is respectively connected with the first output waveguide 6 and the second output waveguide 7 through a mode filter 4, and a micro heating electrode is arranged on one polarization-insensitive waveguide arm 5.
The first input waveguide 1 and the second input waveguide 2 are respectively connected to two input ends of a first polarization insensitive 2 × 2 multimode interference coupler 3, two output ends of the first polarization insensitive 2 × 2 multimode interference coupler 3 are respectively connected to input ends of two mode filters 4, output ends of the two mode filters 4 are respectively connected to two input ends of a second polarization insensitive 2 × 2 multimode interference coupler 3 through respective same polarization insensitive waveguide arms 5, and two output ends of the second polarization insensitive 2 × 2 multimode interference coupler 3 are respectively connected to a first output waveguide 6 and a second output waveguide 7 after passing through respective mode filters 4.
The phase shifting region 8 comprises a portion of the polarization insensitive waveguide arm 5, a metal electrode 9. The metal electrode 9 covers the phase shift region 8.
As shown in fig. 2, the two polarization insensitive 2 × 2 multimode interference couplers 3 used in the present invention have the same structure and parameters, and have a square cross section, and the input terminal and the output terminal are connected to the output terminal of the mode filter 4 and the input terminal of the second polarization insensitive 2 × 2 multimode interference coupler 3, respectively. The waveguide structure specifically comprises a first input adiabatic tapered waveguide 3a, a second input adiabatic tapered waveguide 3b, a multi-mode interference region 3c, a first output adiabatic tapered waveguide 3d and a second output adiabatic tapered waveguide 3e, wherein the first input adiabatic tapered waveguide 3a and the second input adiabatic tapered waveguide 3b are connected to one end of the multi-mode interference region 3c and are used as input ends, the first input adiabatic tapered waveguide 3a and the second input adiabatic tapered waveguide 3b are symmetrically distributed in the middle of the end of the multi-mode interference region 3c, the first output adiabatic tapered waveguide 3d and the second output adiabatic tapered waveguide 3e are connected to the other end of the multi-mode interference region 3c and are used as output ends, and the first output adiabatic tapered waveguide 3d and the second output adiabatic tapered waveguide 3e are symmetrically distributed in the middle of the end of the multi-mode interference region 3 c.
The first input adiabatic tapered waveguide 3a and the first output adiabatic tapered waveguide 3d are symmetrically distributed in the middle of the multimode interference region 3c, and the second input adiabatic tapered waveguide 3b and the second output adiabatic tapered waveguide 3e are symmetrically distributed in the middle of the multimode interference region 3 c. The first input adiabatic tapered waveguide 3a and the first output adiabatic tapered waveguide 3d are arranged in the same direction in the multimode interference coupler, the second input adiabatic tapered waveguide 3b and the second output adiabatic tapered waveguide 3e are arranged in the same direction in the multimode interference coupler, the first input adiabatic tapered waveguide 3a and the second output adiabatic tapered waveguide 3e are arranged in opposition in the multimode interference coupler, and the second input adiabatic tapered waveguide 3b and the first output adiabatic tapered waveguide 3d are arranged in opposition in the multimode interference coupler.
The polarization insensitive 2 x 2 multimode interference coupler structure of the embodiment is shown in fig. 2. The first input adiabatic tapered waveguide 3a, the second input adiabatic tapered waveguide 3b, the first output adiabatic tapered waveguide 3d and the second output adiabatic tapered waveguide 3e have the same structure and parameters, are in mirror symmetry with each other, and are respectively used for connecting the waveguides and the multimode interference region 3c to form the polarization insensitive 2 × 2 multimode interference coupler 3. An input signal is input from the first input adiabatic tapered waveguide 3a or the second input adiabatic tapered waveguide 3b, is split into two signals having the same intensity after passing through the multimode interference region 3c, and is output via the first output adiabatic tapered waveguide 3d and the second output adiabatic tapered waveguide 3e, respectively.
The phase difference between two paths of signal light passing through the two polarization insensitive waveguide arms 5 is adjusted by adjusting the phase shift region 8 of the micro-heating electrode, so that the thermo-optical switch control is realized. And the invention can realize good thermo-optic switch under TM and TE polarization modes.
As shown in fig. 1, two polarization insensitive 2 × 2 multimode interference couplers 3 are connected to two polarization insensitive waveguide arms 5 through two mode filters 4, wherein a micro-heating electrode is disposed above one of the waveguide arms, and the micro-heating electrode is disposed above the waveguide layer.
The parameters of the four mode filters 4 are identical, and the upper and lower groups are in mirror image relationship. In the invention, except the polarization insensitive 2X 2 multimode interference coupler, the rest waveguides are all waveguides.
Specifically, the switch of the polarization insensitive photosensitive signal is realized according to the following modes:
after an input signal in any polarization state is input through the first input waveguide 1 or the second input waveguide 2, the input signal is firstly divided into two paths of signals with completely same intensity through the first polarization insensitive 2 x 2 multimode interference coupler 3, and then the two paths of signals respectively enter two input ends of the second polarization insensitive 2 x 2 multimode interference coupler 3 through a mode filter 4 and a polarization insensitive waveguide arm 5 and are finally output through the first output waveguide or the second output waveguide.
The phase shifting region 8 may heat the polarization insensitive waveguide arm 5 thereunder, thereby changing the phase of the signal, and further causing the signals of the same intensity in the two polarization insensitive waveguide arms 5 to generate a phase difference Δ φ. When the Δ Φ is equal to 0, after passing through the multimode interference region 3c in the second polarization-insensitive 2 × 2 multimode interference coupler 3, the two signals in the two waveguide arms 5 are all output via the output waveguides opposite to the input waveguides after interference; when Δ Φ is ═ pi, two signals in the two waveguide arms 5 pass through the multimode interference region 3c in the second polarization insensitive 2 × 2 multimode interference coupler 3, and are output through the output waveguide in the same direction as the input waveguide by interference. By changing the heat applied to the phase shift region 8, the phase difference of the signals in the two polarization-insensitive waveguide arms 5 can be changed, and further the output port of the signals is changed, thereby realizing the 2 × 2 switching function.
The implementation working process of the invention is as follows:
in view of the similarity of the operation mode and the optical path of the present invention when signals are input from two input ports, for convenience of description, the first input waveguide 1 is used as an example for inputting signals.
After an input signal of any polarization state is input through the first input waveguide 1, the input signal is firstly divided into two paths of signals with the same intensity through the first polarization insensitive 2 × 2 multimode interference coupler 3 and respectively output by the first output adiabatic tapered waveguide 3d and the second output adiabatic tapered waveguide 3e, and then the two paths of signals with the same intensity respectively enter the first input adiabatic tapered waveguide 3a and the second input adiabatic tapered waveguide 3b of the second polarization insensitive 2 × 2 multimode interference coupler 3 through the mode filter 4 and the polarization insensitive waveguide arm 5.
When the phase difference Δ Φ between the two signals in the two polarization-insensitive waveguide arms 5 is equal to 0, the two signals input into the second polarization-insensitive 2 × 2 multimode interference coupler 3 interfere with the multimode interference region 3c, and are all output by the second output adiabatic tapered waveguide, and finally output by the second output waveguide 7. When the phase difference Δ Φ of the two signals in the two polarization-insensitive waveguide arms 5 is ═ pi, the two signals input into the second polarization-insensitive 2 × 2 multimode interference coupler 3 totally output from the first output adiabatic tapered waveguide after the internal interference of the multimode interference region 3c, and finally output through the second output waveguide 6. By changing the heat applied to the phase shift region 8, the phase difference of the signals in the two polarization-insensitive waveguide arms 5 can be changed, and further the output port of the signals is changed, thereby realizing the 2 × 2 switching function of the signals.
An embodiment is given below.
Silicon nanowire optical waveguides based on silicon-on-insulator (SOI) materials are selected: the core layer is made of silicon and has the thickness of 340 nm; the upper and lower cladding materials are both silica, the lower cladding thickness is 2 μm, and the upper cladding thickness is 1.2 μm.
The first input waveguide 1, the second input waveguide 2, the mode filter 4, the polarization insensitive waveguide arm 5, the first output waveguide 6 and the second output waveguide 7 are waveguides with a waveguide width of 340nm, so that they support only fundamental mode transmission and the transmission for both polarization states is almost identical. The polarization insensitive 2 x 2 multimode interference coupler multimode interference region 3c has a width of 1.975 μm and a length of 14.6 μm, the first input adiabatic tapered waveguide 3a, the second input adiabatic tapered waveguide 3b, the first output adiabatic tapered waveguide 3d, and the second output adiabatic tapered waveguide 3e have a length of 15 μm and a width of 0.9 μm and 0.34 μm at both ends, respectively. The mode filter 4 is composed of four arc waveguides with a radius of 5 μm and a bending angle of 90 °. The polarization insensitive waveguide arm 5 has a length of 30 μm.
The devices of the present invention were fabricated according to the above examples and the performance of the polarization insensitive 2 x 2 thermo-optic switch was measured in each case.
As can be seen from fig. 3 and 4, for the signal input from the first input waveguide 1, regardless of TM polarization or TE polarization, it can be realized that the signal is mainly output from a specific port, and the switching function is realized, and in the wavelength range of 1525nm to 1585nm, the loss at the main output port is only 1 to 5dB, while the output signal at the other port is relatively small, and the extinction ratio is-20 dB, which simultaneously reduces the extinction ratio, loss and size compared with the curved asymmetric directional coupler adopted by the existing polarization insensitive 2 × 2 thermo-optical switch.
The specific embodiment in fig. 3 and 4 is that when a signal is input from the first input waveguide 1 and Δ Φ is adjusted to 0, the output signal is mainly output from the second output waveguide 7 (black curve) regardless of TM polarization or TE polarization, and the extinction ratio of the signal in the first output waveguide 6 is larger; when adjusting Δ Φ ═ pi, the output signals are mainly output from the first output waveguide 6 (gray curve), and the extinction ratio of the signal in the second output waveguide 7 is larger.
The above-described embodiments are intended to illustrate rather than to limit the invention, and any modifications and variations of the present invention are within the spirit of the invention and the scope of the appended claims.
Claims (6)
1. A polarization insensitive silicon-based optical switch, comprising: comprises a first input waveguide (1), a second input waveguide (2), a polarization insensitive 2 x 2 multimode interference coupler (3), a first mode filter, a second mode filter, a polarization insensitive waveguide arm (5), a first output waveguide (6), a second output waveguide (7) and a metal electrode (9), wherein the first input waveguide (1) and the second input waveguide (2) are connected with two first mode filters through the first polarization insensitive 2 x 2 multimode interference coupler (3), the two first mode filters are respectively connected with the second polarization insensitive 2 x 2 multimode interference coupler (3) through the two polarization insensitive waveguide arms (5), the second polarization insensitive 2 x 2 multimode interference coupler (3) is respectively connected with the first output waveguide (6) and the second output waveguide (7) through the two second mode filters, a metal electrode (9) is arranged above the phase shift region (8) of one polarization insensitive waveguide arm (5);
two polarization insensitive 2 x 2 multimode interference couplers (3) are identical, and a multimode interference coupler structure is used, and specifically comprises a first input adiabatic tapered waveguide (3 a), a second input adiabatic tapered waveguide (3 b), a multimode interference zone (3 c), a first output adiabatic tapered waveguide (3 d) and a second output adiabatic tapered waveguide (3 e), wherein the first input adiabatic tapered waveguide (3 a) and the second input adiabatic tapered waveguide (3 b) are connected to the same end of the multimode interference zone (3 c), the first input adiabatic tapered waveguide (3 a) and the second input adiabatic tapered waveguide (3 b) are symmetrically distributed in the middle of the end of the multimode interference zone (3 c), the first output adiabatic tapered waveguide (3 d) and the second output adiabatic tapered waveguide (3 e) are connected to the same other end of the multimode interference zone (3 c), and the first output adiabatic tapered waveguide (3 d) and the second output adiabatic tapered waveguide (3 e) are connected to the same end of the multimode interference zone (3 c) 3c) The middle parts of the end parts are symmetrically distributed;
the multimode interference region (3 c) is mainly composed of a waveguide which is wider than the adiabatic tapered waveguide, the width of the waveguide is twice that of the adiabatic tapered waveguide, and the widths of the adiabatic tapered waveguides are the same.
2. A polarization insensitive silicon-based optical switch according to claim 1, wherein: each output of the two polarization insensitive 2 x 2 multimode interference couplers (3) is connected to one of the two first mode filters and the two second mode filters.
3. A polarization insensitive silicon-based optical switch according to claim 1, wherein: the first input waveguide (1) and the second input waveguide (2) are respectively connected to two input ends of a first polarization insensitive 2 x 2 multimode interference coupler (3), two output ends of the first polarization insensitive 2 x 2 multimode interference coupler (3) are respectively connected with input ends of two first mode filters, the output ends of the two first mode filters are respectively connected with two input ends of a second polarization insensitive 2 x 2 multimode interference coupler (3) through two polarization insensitive waveguide arms (5) which are respectively the same, and two output ends of the second polarization insensitive 2 x 2 multimode interference coupler (3) are respectively connected with a first output waveguide (6) and a second output waveguide (7) after passing through the two second mode filters; the thermo-optical switch function is realized by changing the current injected into the metal electrode (9) so as to adjust the phase change introduced by the phase shift region (8) positioned on the polarization insensitive waveguide arm (5).
4. A polarization insensitive silicon-based optical switch according to claim 1, wherein: the two polarization insensitive waveguide arms (5) are completely the same, the cross section is square, and the input end and the output end are respectively connected with the output ends of the two first mode filters and the input end of the second polarization insensitive 2 x 2 multimode interference coupler (3).
5. A polarization insensitive silicon-based optical switch according to claim 1, wherein: the two first mode filters and the two second mode filters adopt a bent waveguide structure.
6. A polarization insensitive silicon-based optical switch according to claim 5, wherein: the bend waveguide structure has a bend radius such that the fundamental mode bend loss is <0.1dB/90 DEG, and the high-order mode bend loss is >10dB/90 deg.
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| EP1605303B1 (en) * | 2003-03-19 | 2018-01-03 | Nippon Telegraph And Telephone Corporation | Optical switch |
| US20050185884A1 (en) * | 2004-01-23 | 2005-08-25 | Haus Hermann A. | Single-level no-crossing microelectromechanical hitless switch for high density integrated optics |
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| JP2006184345A (en) * | 2004-12-27 | 2006-07-13 | Keio Gijuku | Optical switch, optical serial-parallel converter, parallel bit delay variable/wavelength conversion circuit, and optical time switch |
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| CN103487889A (en) * | 2013-08-12 | 2014-01-01 | 上海交通大学 | Mach-Zehnder optical switch structure based on coupling of double resonant cavities |
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