CN104297989B - substrate, mask plate and liquid crystal display device - Google Patents
substrate, mask plate and liquid crystal display device Download PDFInfo
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- CN104297989B CN104297989B CN201410568190.7A CN201410568190A CN104297989B CN 104297989 B CN104297989 B CN 104297989B CN 201410568190 A CN201410568190 A CN 201410568190A CN 104297989 B CN104297989 B CN 104297989B
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/1335—Structural association of cells with optical devices, e.g. polarisers or reflectors
- G02F1/133509—Filters, e.g. light shielding masks
- G02F1/133512—Light shielding layers, e.g. black matrix
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
- G03F1/38—Masks having auxiliary features, e.g. special coatings or marks for alignment or testing; Preparation thereof
- G03F1/42—Alignment or registration features, e.g. alignment marks on the mask substrates
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- Physics & Mathematics (AREA)
- Nonlinear Science (AREA)
- General Physics & Mathematics (AREA)
- Mathematical Physics (AREA)
- Chemical & Material Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- Optics & Photonics (AREA)
- Liquid Crystal (AREA)
Abstract
The invention discloses a kind of substrate, mask plate and liquid crystal display device, be related to field of liquid crystal display, solve the problems, such as due on color membrane substrates because caused by missing bulk redundancy PS color membrane substrates and array base palte it is even to the box thickness ununiformity of the liquid crystal cell of the formation after box.In the embodiment of the present invention, substrate includes：The panel area of multiple rectangles of array arrangement both horizontally and vertically, each described panel area is used to make a color membrane substrates；The panel area includes four the first contraposition modules, is respectively arranged on four angles of the panel area；Wherein, in the horizontal direction or in vertical direction, two adjacent adjacent angulars of panel area share first contraposition module；And first contraposition module is located at the mask redundant area outside panel redundant area.The embodiment of the present invention also includes liquid crystal display device and the mask plate for forming figure on aforesaid substrate.
Description
Technical field
The present invention relates to field of liquid crystal display, more particularly to a kind of substrate, mask plate and liquid crystal display device.
Background technology
Liquid crystal display device mainly includes color membrane substrates, array base palte and is clipped in liquid crystal material between two substrates.Wherein,
Color membrane substrates generally include glass substrate and form black matrix on the glass substrate, dyed layer and support column (Photo
Spacer, referred to as：PS).
The preparation of dyed layer and support column is carried out after forming black matrix on the glass substrate, and preparation method includes：
The photosensitive film layer being coated on the glass substrate for having been formed with black matrix is exposed using mask plate E (as shown in Figure 1)；Again
To photosensitive film layer development and baking after exposure, the dyed layer and support column of required structure are ultimately formed.
Generally, the size of a finished glass plate for being used for making color membrane substrates is glass substrate chi in a color membrane substrates
Very little several times, can be used to make multiple color membrane substrates.In manufacturing process, first the glass plate C shown in Fig. 1 can be divided into
Multiple panel area A, each panel area A is correspondingly formed a color membrane substrates.Each panel area A is divided into periphery according to function
Mask redundant area (Mask Dummy Area) 11, the effective district of panel (Pannel Active Area) 12 at center, and sandwiched
Panel redundant area (Pannel Dummy Area) 13 between the two areas.Black matrix, dyed layer and PS are formed in panel to be had
In effect area 12.
When forming dyed layer and support column on glass plate C with above-mentioned mask plate E, due to the size and of mask plate E
The size of individual panel area A is essentially identical, therefore single exposure can only be processed the photosensitive film layer of a panel area A.If
Make all to form dyed layer and support column on whole glass plate C in all of panel area A, that is accomplished by terminating in previous exposure
Afterwards, mask plate E is directed at the next panel area A, then carry out exposing operation next time.
In order to ensure the position consistency of the dyed layer and support column formed in each panel area A, generally in panel area A
First alignment mark 14 of multiple hollow outs can be set on four angles of panel redundant area 13, correspondingly, at four angles of mask plate E
On be also equipped with same number and spacing multiple hollow outs the second alignment mark 15, the first alignment mark 14 and the second register guide
Note 15 represents that mask plate E has been accurately positioned in panel area A when being aligned on the direction of panel area A.On mask plate also
The spacing detection window 16 of hollow out is provided with, is arranged side by side with the second alignment mark 15, for making exposure machine accurately control mask
The distance between plate E and glass plate C.
Mark group is constituted by spacing detection window 16 and multiple second alignment marks 15, it is each on four angles of mask plate E
It is provided with the mark group.The hollow out on mask plate E is provided in due to the alignment mark 15 of spacing detection window 16 and second
Figure, in exposure process, in order to avoid from the partial light permeability of these hollow outs, and forms unwanted figure on glass plate C,
The light of directive mark group is hidden using the baffle plate (Mark Shutter) D (as shown in Figure 2) of rectangle in exposure machine generally
Gear.And, in order to ensure baffle plate D blocking completely to mark group, the length L1 of baffle plate D needs should than each member edge in mark group
The size sum of length direction X is larger, and width W1 needs the full-size Wx along width Y than each member in mark group
It is larger.Dotted line frame in Fig. 2 represents each member in the mark group of the mask plate E that baffle plate D is blocked.
As shown in figure 1, along the two neighboring panel area A of Y-direction, two angles of lower edge and lower section of top panel area A
Two angles of top edge of panel area A are equipped with quantity identical the first alignment mark 14 of multiple, are using mask plate E successively to two
During individual panel area A is exposed, in blocking projection such as Fig. 1 of the baffle plate of mark group on mask plate E on panel area A
Shown in dotted line frame 17, the inner region of dotted line frame 17 does not form any figure due to being blocked by baffle plate after exposed.In addition, dotted line
The inner region of frame 17 is located in panel redundant area 13, and multiple first alignment marks 14 are not only included in the region, further comprises first
A part of panel redundant area 13 outside alignment mark 14.
Generally redundancy PS arrays can be formed in panel redundant area 13, it is therefore an objective to after color membrane substrates and array base palte are to box,
Ensure that two spacing of substrate edge region are consistent with the spacing of two substrate zone lines, that is, ensure the box of the liquid crystal cell to be formed
It is thick uniform, but blocking due to baffle plate, four pieces of regions are had in a panel redundant area 13 can not form redundancy PS arrays, largely
After the missing of redundancy PS can cause color membrane substrates and array base palte to box, it is impossible to ensure liquid crystal cell thickness and the face of panel redundant area 13
Plate effective district 12 is consistent, the problem even so as to result in liquid crystal box thickness ununiformity, and then have impact on the quality of display picture.
The content of the invention
Embodiments of the invention provide a kind of substrate, mask plate and liquid crystal display device, solve due on color membrane substrates
Because color membrane substrates and array base palte are even to the box thickness ununiformity of the liquid crystal cell of the formation after box caused by missing bulk redundancy PS
Problem.
To reach above-mentioned purpose, embodiments of the invention are adopted the following technical scheme that：
The embodiment of the present invention provides a kind of substrate, including multiple rectangles of array arrangement both horizontally and vertically
Panel area, each described panel area is used to make a color membrane substrates；The panel area includes four the first contraposition modules, respectively
It is arranged on four angles of the panel area；Wherein, in the horizontal direction or in vertical direction, two adjacent panel areas it is adjacent
Angle shares first contraposition module；And first contraposition module is located at the mask redundant area outside panel redundant area.
Alternatively, first contraposition module, including the first mark group being made up of multiple first alignment marks, and by many
Second mark group of individual second alignment mark composition；The multiple first alignment mark equidistant arrangement in the first direction is described more
Individual second alignment mark is along the first direction equidistant arrangement.
Preferably, the first direction is parallel to horizontal direction or vertical direction.
Further, the multiple first alignment mark is collinearly arranged with the multiple second alignment mark.
Alternatively, there is angle a, and 0 ° of 90 ° of ＜ a ＜ between the first direction and horizontal direction or vertical direction.
The embodiment of the present invention also provides a kind of liquid crystal display device, including the color membrane substrates made by aforesaid substrate.
The embodiment of the present invention provides a kind of mask plate again, for forming figure in a panel area of aforesaid substrate；Institute
Stating mask plate includes four the second contraposition modules, is respectively used to be aligned with the first contraposition module on four angles of the panel area；
The mask plate also includes four spacing detection windows, and the second contraposition module described with is arranged side by side respectively；Described
When two contraposition modules are aligned with first contraposition module, the second contraposition module and the spacing detection window being arranged side by side with it exist
Projection on the substrate is respectively positioned in exposure machine in baffle plate drop shadow spread on the substrate.
Alternatively, second contraposition module, including the 3rd mark group being made up of multiple 3rd alignment marks, and by many
4th mark group of individual 4th alignment mark composition；The multiple 3rd alignment mark equidistant arrangement in a second direction is described more
Individual 4th alignment mark is along the second direction equidistant arrangement.
Preferably, horizontal direction or Vertical Square of the second direction parallel to each panel area array arrangement in the substrate
To.
Further, the multiple 3rd alignment mark is collinearly arranged with the multiple 4th alignment mark.
Alternatively, the horizontal direction or vertical direction of the second direction and each panel area array arrangement in the substrate
Between there is angle a, and 0 ° of 90 ° of ＜ a ＜.
In substrate, mask plate and liquid crystal display device that embodiments of the invention are provided, due in the horizontal direction or vertically
On direction, two adjacent adjacent angulars of panel area share first contraposition module, so successively to two adjacent faces
When plate area is exposed, the two first contraposition modules between two neighboring panel area are used twice, right respectively
Second contraposition module of diverse location on quasi- mask plate, the second contraposition module of the baffle plate of exposure machine on mask plate is blocked it is same
When, also blocked to sharing the first contraposition module in adjacent panels area, and be used for blocking the second contraposition mould in double exposure
Projection of the baffle plate of group on panel area is to overlap, so the area blocked by baffle plate between two adjacent surfaces plate area, compared to
Two pieces of baffle plates of the prior art project misaligned situation, reduce half.
Further, since the first contraposition module is located at the mask redundant area outside panel redundant area, and mask redundant area is that do not have
Any figure formed without graph area, when baffle plate blocks the second contraposition module of this position, projection can fall in mask redundant area
It is interior, thus will not the redundancy PS figures that are formed of counter plate redundant area have any impact.So being carried using the embodiment of the present invention
After color membrane substrates that the substrate of confession is made and array base palte are to box, it is ensured that between color membrane substrates and array base palte fringe region
Away from consistent with the spacing of two substrate zone lines, so as to ensure that the box of the liquid crystal cell to be formed is thick uniform, display picture is improved
Quality.
Brief description of the drawings
In order to illustrate more clearly about the embodiment of the present invention or technical scheme of the prior art, below will be to embodiment or existing
The accompanying drawing to be used needed for having technology description is briefly described, it should be apparent that, drawings in the following description are only this
Some embodiments of invention, for those of ordinary skill in the art, on the premise of not paying creative work, can be with
Other accompanying drawings are obtained according to these accompanying drawings.
Fig. 1 is to include the glass plate of multiple panel areas in the prior art and for forming covering for figure on the glass plate
The structural representation of lamina membranacea；
Fig. 2 is the structural representation of the rectangle baffle plate of exposure machine in the prior art；
Fig. 3 is a kind of structural representation of substrate provided in an embodiment of the present invention；
Fig. 4 is the structural representation of another substrate provided in an embodiment of the present invention；
Fig. 5 is a kind of structural representation of mask plate provided in an embodiment of the present invention；
Fig. 6 is a kind of structural representation of first contraposition module provided in an embodiment of the present invention；
Fig. 7 is the structural representation of the contraposition module of another provided in an embodiment of the present invention first；
Fig. 8 is a kind of structural representation of second contraposition module provided in an embodiment of the present invention；
Fig. 9 is the structural representation of the contraposition module of another provided in an embodiment of the present invention second.
Specific embodiment
Below in conjunction with the accompanying drawing in the embodiment of the present invention, the technical scheme in the embodiment of the present invention is carried out clear, complete
Site preparation is described, it is clear that described embodiment is only a part of embodiment of the invention, rather than whole embodiments.It is based on
Embodiment in the present invention, those of ordinary skill in the art obtained on the premise of creative work is not made it is all its
His embodiment, belongs to the scope of protection of the invention.
A kind of substrate is the embodiment of the invention provides, as shown in Figure 3 and Figure 4, including P1 and vertical direction in the horizontal direction
The panel area G of multiple rectangles of P2 array arrangements, each panel area G are used to make a color membrane substrates；Panel area G includes four
First contraposition module 31, is respectively arranged on four angles of panel area G；It is adjacent in the horizontal direction on P1 or vertical direction P2
Two adjacent angulars of panel area G share first contraposition module 31；And first contraposition module 31 be located at outside panel redundant area 32
Mask redundant area 33.
Usual one substrate size for being used for making color membrane substrates is one several times of color membrane substrates size, be can be used to
Multiple color membrane substrates are made, so during making, substrate is divided into multiple panel area G, each panel area G is used to make
Make a color membrane substrates.Each panel area G is divided into the mask redundant area 33 of periphery, the effective district of panel at center according to function
34 (forming the region of dyed layer and support column), and the panel redundant area 32 being folded between the two areas (is formed superfluous
The region of remaining PS arrays).
Above-mentioned panel area G includes four the first contraposition modules 31, is respectively arranged on four angles of panel area G, first pair
Position module 31 is used to make the mask plate shown in panel area G and Fig. 5 to align, and required figure is formed with panel area G.Mask plate
Second contraposition module 51 of same number and spacing can be also set on four angles.When the first contraposition module 31 and the second contraposition module
51 on the direction of panel area G when being aligned, and represents mask plate and panel area G accurate contraposition.Due to the second contraposition mould
The hollow out figure that group 51 is provided on mask plate, in exposure process, in order to avoid from the partial light permeability of these hollow outs, and
Unwanted figure is formed on substrate, generally using the baffle plate of rectangle in exposure machine, to the light of the second contraposition module of directive 51
Blocked.
As shown in figure 3, adjacent two adjacent angulars of panel area G on vertical direction P2 share first contraposition module
31.Therefore, when being exposed to top panel area G, the meeting of the first contraposition module 31 on two angles of panel area G lower edges of top
It is aligned with the second contraposition module 51 on two angles of mask plate lower edge；When being exposed to lower section panel area G, lower section panel
The first contraposition mould in the first contraposition module 31 on two angles of area G top edges, that is, top two angles of panel area G lower edges
Group 31, can be aligned with the second module 51 on two angles of mask plate top edge.
In other words, two the first contraposition modules 31 are devised between two neighbouring panel area G, it is neighbouring
Two panels keep left two angles correspondence on side one of those first contraposition module 31, two angles correspondence on side of keeping right another the
One contraposition module 31.So when being exposed to two neighbouring panel area G successively, positioned at neighbouring two panels
The two first contraposition modules 31 between area G are used twice, are respectively aligned to the second contraposition of diverse location on mask plate
Module 51.
It can be seen from foregoing description, in the double exposure carried out to neighbouring two panel area G, the baffle plate of exposure machine
While the second contraposition module 51 on mask plate is blocked, also the first contraposition module 31 on counter plate area G is blocked,
Due between the adjacent angular of neighbouring two panel areas, being only provided with a first shared contraposition module 31, therefore two
It is to overlap for blocking projection of the baffle plate of the second contraposition module 51 on this position on panel area G in secondary exposure, so
The area blocked by baffle plate between neighbouring two panels area, misaligned feelings are projected compared to two pieces of baffle plates of the prior art
Shape, reduces half.
Further, since the first contraposition module 31 is located at the mask redundant area 33 outside panel redundant area 32, and mask redundant area
33 is that when baffle plate blocks the second contraposition module 51 of this position, projection can fall without graph area without the formation of any figure
In mask redundant area 33, thus will not the redundancy PS figures that are formed of counter plate redundant area 32 have any impact.So using
After the color membrane substrates that are made of substrate that the above embodiment of the present invention is provided and array base palte are to box, it is ensured that color membrane substrates and battle array
The spacing of row substrate edge region is consistent with the spacing of two substrate zone lines, so as to ensure that the box of the liquid crystal cell to be formed is thick
It is even, improve the quality of display picture.
Fig. 3 shows that the adjacent angular of the Liang Ge adjacent panels area G on vertical direction P2 shares first contraposition module
31 situation.The invention is not restricted to this, as shown in figure 4, the first shared contraposition module 31 can also be located on horizontal direction P1
Between two adjacent angulars of adjacent panels G, and the first contraposition module 31 is located at mask redundant area 33, and the substrate of this structure is being formed
Also have uniform box thick after color membrane substrates, during with array base palte to box.
In the substrate that above-described embodiment is provided, the first contraposition module 31, as shown in fig. 6, including by multiple first register guides
First mark group 62 of the composition of note 61, and constitute the second mark group 64, multiple first register guides by multiple second alignment marks 63
The t1 equidistant arrangements in the first direction of note 61, and multiple second alignment marks 63 also t1 equidistant arrangements in the first direction.On substrate
The contraposition module that is made up of two alignment mark groups of setting, can on the premise of manufacturing cost is not increased, improve mask plate with
Aligning accuracy between substrate.
When being aligned using the first contraposition module 31 in the second contraposition module 51 and substrate on mask plate, Ke Yixuan
Select and aligned with the first mark group 62, it is also possible to which selection is aligned with the second mark group 64, it is also possible to the first mark group
62 and second mark group 64 align simultaneously, alignment method is flexible.
In the substrate provided in above-described embodiment, first direction t1 can be parallel to above-mentioned horizontal direction P1, Huo Zheping
Row is in above-mentioned vertical direction P2.When the first contraposition module 31 is located between upper and lower surfaces plate area G as shown in Figure 3, first
Direction t1 can take excessive substrate to save each mark group (62,64) parallel to horizontal direction P1 on vertical direction P2
Space.Similarly, when the first contraposition module 31 is located between the two panel area G in left and right as shown in Figure 4, first direction t1 can be with
Parallel to vertical direction P2, excessive substrate space is taken on P1 in the horizontal direction to save each mark group (62,64).
In the substrate that above-described embodiment is provided, when first direction t1 is parallel to horizontal direction or vertical direction, Duo Ge
One alignment mark 61 can be arranged collinearly as shown in Figure 6 with multiple second alignment marks 63, hung down with further saving (62,64)
Nogata to or horizontal direction on substrate space.
Certainly, in the substrate that above-described embodiment is provided, first direction t1 can be with horizontal direction P1 or vertical direction P2
Parallel to have angle a, and 0 ° of 90 ° of ＜ a ＜ between horizontal direction P1 or vertical direction P2, Fig. 7 shows angle a
It is the situation of angle between first direction t1 and horizontal direction P1.Regardless of the orientation of each group alignment mark, as long as it
Can fall into baffle plate in the projection on substrate.
The embodiment of the present invention additionally provides a kind of liquid crystal display device, and it includes the substrate manufacture provided by above-described embodiment
Color membrane substrates.Using the color membrane substrates and array base palte to box, do not exist the problem of redundancy PS missings due to color membrane substrates, because
This has uniform thickness to the liquid crystal cell formed after box, so that the liquid crystal display device has the display picture that improve
Quality.
The liquid crystal display device can be specially：Liquid crystal panel, Electronic Paper, mobile phone, panel computer, television set, display,
Any product or part with display function such as notebook computer, DPF, navigator.
In addition, the embodiment of the present invention provides a kind of mask plate again, as shown in figure 5, for being provided in above-described embodiment
Figure is formed in one panel area G of substrate.The mask plate includes four the second contraposition modules 51, is respectively used to and panel area G
The first contraposition module 31 on four angles is aligned；Mask plate also includes four spacing detection windows 52, respectively with one second pair
Position module 51 is arranged side by side；When the second contraposition module 51 and the first contraposition module 31 are aligned, the second contraposition module 51 and and its
Projection of the spacing detection window 52 being arranged side by side on substrate is respectively positioned in exposure machine projection model of the baffle plate on substrate
In enclosing.
Mask plate provided in an embodiment of the present invention is used to form figure on the substrate of above-described embodiment offer, is using
Cheng Zhong, the second contraposition module 51 on mask plate needs to be aligned with the first contraposition module 31 on substrate, therefore is using exposure
When the baffle plate of machine blocks the second contraposition module 51 and spacing detection window 52 on mask plate, the first contraposition module 31 will be made
In drop shadow spread positioned at baffle plate on substrate.Because the first contraposition module 31 is located at the mask outside panel redundant area 32 on substrate
Redundant area 33, and mask redundant area 33 is that do not have any figure to be formed without graph area, when baffle plate blocks the first contraposition module 31,
Projection can fall in mask redundant area 33, thus will not the redundancy PS figures that are formed of counter plate redundant area 32 cause any shadow
Ring.So when forming figure on the substrate that above-described embodiment is provided using the mask plate that the above embodiment of the present invention is provided, most
End form into color membrane substrates and array base palte to box after, it is ensured that the spacing and two of color membrane substrates and array base palte fringe region
The spacing of individual substrate zone line is consistent, so as to ensure that the box of the liquid crystal cell to be formed is thick uniform, and then improves display picture
Quality.
In the mask plate that above-described embodiment is provided, the second contraposition module 51, as shown in figure 8, can include by the multiple 3rd
3rd mark group 82 of the composition of alignment mark 81, and the 4th mark group 84 being made up of multiple 4th alignment marks 83；Multiple the
Three alignment marks 81 t2 equidistant arrangements in a second direction, multiple 4th alignment marks 83 t2 equidistant arrangements in a second direction.So
Second contraposition module 51 is set, is in order to be able to corresponding with the structure of the first contraposition module 31 shown in Fig. 6, to ensure mask plate and base
Aligning accuracy between plate.
According to the description of above-described embodiment, when mask plate and substrate are aligned, the 3rd mark group 81 and the 4th can be selected
One in mark group 83 is aligned with the first mark group 62 and the second mark group 64, it is also possible to the 3rd mark group
81 and the 4th mark group 83 simultaneously with relative position on the first mark group 62 and the second mark group 64 align.For example, the 3rd mark
Note group 81 is corresponding with the position of the first mark group 62, and the 4th mark group 83 is corresponding with the position of the second mark group 64, then the 3rd mark group
81 align with the first mark group 62, while the 4th mark group 83 is aligned with the second mark group 64, alignment method is flexible.
In the mask plate that above-described embodiment is provided, second direction t2 can be parallel to each panel area G array arrangements in substrate
Horizontal direction P1, or, parallel to the vertical direction P2 of each panel area G array arrangements.When the first contraposition module 31 such as Fig. 3 institutes
Show when between upper and lower surfaces plate area G, in the first contraposition module 31 the first direction t1 of each mark group (62,64) parallel to
Horizontal direction P1, correspondingly, the second direction t2 of each mark group (82,84) is also parallel with horizontal direction in the second contraposition module 51
P1, to realize accurate contraposition.Similarly, when the first contraposition module 31 is located between the two panel area G in left and right as shown in Figure 4,
The first direction t1 of each mark group (62,64) is parallel to vertical direction P2, correspondingly, the second contraposition mould in first contraposition module 31
The second direction t2 of each mark group (82,84) in 51 is organized also parallel with vertical direction P2, to realize accurate contraposition.
In the mask plate of above-described embodiment offer, multiple 3rd alignment marks 81 are conllinear with multiple 4th alignment marks 83 to be arranged
Row.This set is corresponding with the arrangement mode of each mark in the first contraposition module 31 shown in Fig. 6, to realize accurate contraposition.
Certainly, in the mask plate that above-described embodiment is provided, second direction t2 can be with horizontal direction P1 or vertical direction
P2 is parallel, it is also possible to which there is angle a, Fig. 9 to show that angle a is second direction between horizontal direction P1 or vertical direction P2
The situation of angle between t2 and horizontal direction P1, and 0 ° of 90 ° of ＜ a ＜.In the first contraposition module 31 shown in this set and Fig. 7
The arrangement mode correspondence of each mark, to realize accurate contraposition.
The above, specific embodiment only of the invention, but protection scope of the present invention is not limited thereto, and it is any
Those familiar with the art the invention discloses technical scope in, the change or replacement that can be readily occurred in, all should
It is included within the scope of the present invention.Therefore, protection scope of the present invention should be with the scope of the claims
It is accurate.
Claims (11)
1. a kind of substrate, including the panel area of multiple rectangles of array arrangement both horizontally and vertically, each described face
Plate area is used to make a color membrane substrates；The panel area includes four the first contraposition modules, is respectively arranged at the panel area
Four angles on；Characterized in that, in the horizontal direction or in vertical direction, two adjacent adjacent angulars of panel area share one
First contraposition module；And first contraposition module is located at the mask redundant area outside panel redundant area.
2. substrate according to claim 1, it is characterised in that first contraposition module, including aligned by multiple first
Mark the first mark group of composition, and the second mark group being made up of multiple second alignment marks；The multiple first register guide
Remember equidistant arrangement in the first direction, the multiple second alignment mark is along the first direction equidistant arrangement.
3. substrate according to claim 2, it is characterised in that the first direction is parallel to horizontal direction or Vertical Square
To.
4. substrate according to claim 3, it is characterised in that the multiple first alignment mark with the multiple second pair
The conllinear arrangement of position mark.
5. substrate according to claim 2, it is characterised in that the first direction and horizontal direction or vertical direction it
Between there is angle a, and 0 ° of 90 ° of ＜ a ＜.
6. a kind of liquid crystal display device, it is characterised in that the color film base including the substrate manufacture as described in claim any one of 1-5
Plate.
7. a kind of mask plate, it is characterised in that for being formed in a panel area of substrate described in claim any one of 1-5
Figure；
The mask plate includes four the second contraposition modules, is respectively used to and the first contraposition module on four angles of the panel area
Contraposition；The mask plate also includes four spacing detection windows, and the second contraposition module described with is arranged side by side respectively；
When second contraposition module is aligned with first contraposition module, the second contraposition module and between being arranged side by side with it
Away from detection window projection on the substrate be respectively positioned on exposure machine in baffle plate drop shadow spread on the substrate.
8. mask plate according to claim 7, it is characterised in that second contraposition module, including by multiple 3rd pair
3rd mark group of position mark composition, and the 4th mark group being made up of multiple 4th alignment marks；The multiple 3rd contraposition
Equidistant arrangement in a second direction is marked, the multiple 4th alignment mark is along the second direction equidistant arrangement.
9. mask plate according to claim 8, it is characterised in that the second direction is parallel to each panel in the substrate
The horizontal direction or vertical direction of area's array arrangement.
10. mask plate according to claim 9, it is characterised in that the multiple 3rd alignment mark and the multiple
Four alignment marks are collinearly arranged.
11. mask plates according to claim 8, it is characterised in that the second direction and each panel area in the substrate
There is angle a, and 0 ° of 90 ° of ＜ a ＜ between the horizontal direction or vertical direction of array arrangement.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410568190.7A CN104297989B (en) | 2014-10-22 | 2014-10-22 | substrate, mask plate and liquid crystal display device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410568190.7A CN104297989B (en) | 2014-10-22 | 2014-10-22 | substrate, mask plate and liquid crystal display device |
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| CN105867066B (en) * | 2016-06-27 | 2021-01-22 | 京东方科技集团股份有限公司 | Mask plate, manufacturing method of display substrate, display substrate and display device |
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| CN110232867B (en) * | 2019-05-13 | 2022-01-04 | Tcl华星光电技术有限公司 | Mother board exposure structure of display panel |
| CN113433791B (en) * | 2020-03-23 | 2023-03-31 | 长鑫存储技术有限公司 | Mask plate |
| CN111383537A (en) * | 2020-04-02 | 2020-07-07 | 上海天马有机发光显示技术有限公司 | Display panel and display device |
| CN111679473A (en) * | 2020-06-04 | 2020-09-18 | 深圳市华星光电半导体显示技术有限公司 | Display mother board, manufacturing method thereof and display panel |
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