CN104297989A - Substrate, mask plate and liquid crystal display device - Google Patents
Substrate, mask plate and liquid crystal display device Download PDFInfo
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- CN104297989A CN104297989A CN201410568190.7A CN201410568190A CN104297989A CN 104297989 A CN104297989 A CN 104297989A CN 201410568190 A CN201410568190 A CN 201410568190A CN 104297989 A CN104297989 A CN 104297989A
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- substrate
- alignment mark
- contraposition
- panel
- mask plate
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/1335—Structural association of cells with optical devices, e.g. polarisers or reflectors
- G02F1/133509—Filters, e.g. light shielding masks
- G02F1/133512—Light shielding layers, e.g. black matrix
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
- G03F1/38—Masks having auxiliary features, e.g. special coatings or marks for alignment or testing; Preparation thereof
- G03F1/42—Alignment or registration features, e.g. alignment marks on the mask substrates
Abstract
The invention discloses a substrate, a mask plate and a liquid crystal display device, relates to the field of liquid crystal display and solves the problem that since a color film substrate is short of large amount of redundant PS, the thickness of a liquid crystal box by closing the color film substrate and array substrate is uneven. According to an embodiment, the substrate comprises panel regions provided with a plurality of rectangles arrayed in the horizontal and vertical directions, and each panel region is used for manufacturing one color film substrate; the panel region comprises four first alignment modules located at four corners of the panel region; the adjacent corners of two adjacent panel regions share one alignment module in the horizontal and vertical directions; the first alignment modules are located in the mask redundant region outside the panel redundant region. According to the embodiment, the invention further provided a liquid crystal display device and a mask plate used for forming patterns on the substrate.
Description
Technical field
The present invention relates to field of liquid crystal display, particularly relate to a kind of substrate, mask plate and liquid crystal indicator.
Background technology
The liquid crystal material that liquid crystal indicator mainly comprises color membrane substrates, array base palte and is clipped between two substrates.Wherein, color membrane substrates generally include glass substrate and formed black matrix on the glass substrate, dyed layer and support column (Photo Spacer, referred to as: PS).
The preparation of dyed layer and support column is carried out after forming black matrix on the glass substrate, and preparation method comprises: utilize mask plate E (as shown in Figure 1) to be coated in be formed with black matrix glass substrate on photosensitive rete expose; Again to the photosensitive rete development after exposure and baking, final dyed layer and the support column forming desired structure.
Usually, size of finished glass plate being used for making color membrane substrates is several times of glass substrate size in a color membrane substrates, can be used for making multiple color membrane substrates.In manufacturing process, first the glass plate C shown in Fig. 1 can be divided into multiple panel area A, each panel area A correspondence forms a color membrane substrates.Each panel area A is divided into peripheral mask redundant area (Mask Dummy Area) 11 according to function, the effective district of panel (Pannel Active Area) 12 at center, and be folded in the panel redundant area (Pannel Dummy Area) 13 between this Liang Ge district.Black matrix, dyed layer and PS are formed in the effective district 12 of panel.
When forming dyed layer and support column with above-mentioned mask plate E on glass plate C, because the size of mask plate E is substantially identical with the size of a panel area A, therefore single exposure can only process the photosensitive rete of a panel area A.If make all to form dyed layer and support column in panel area A all on whole glass plate C, that just needs after previous exposure terminates, and makes mask plate E aim at the next panel district A, then carries out exposing operation next time.
In order to ensure the position consistency of dyed layer and the support column formed in each panel area A, four angles of the panel redundant area 13 usually in panel area A can be arranged the first alignment mark 14 of multiple hollow out, correspondingly, four angles of mask plate E are also provided with the second alignment mark 15 of multiple hollow outs of same quantity and spacing, first alignment mark 14 and the second alignment mark 15 on time, represent that mask plate E accurately locates in panel area A on the direction perpendicular to panel area A.Spacing mask plate being also provided with hollow out detects window 16, is arranged side by side with the second alignment mark 15, the distance accurately controlling between mask plate E and glass plate C for making exposure machine.
Detect window 16 by spacing and multiple second alignment mark 15 forms mark group, four angles of mask plate E are respectively provided with this mark group.Window 16 is detected and the second alignment mark 15 is the hollow out figures be arranged on mask plate E due to spacing, in exposure process, in order to avoid the partial light permeability from these hollow outs, and on glass plate C, form unwanted figure, usually utilize the baffle plate of rectangle in exposure machine (Mark Shutter) D (as shown in Figure 2) light to directive mark group to block.And in order to ensure baffle plate D blocking completely mark group, the length L1 of baffle plate D needs larger along the size sum of this length direction X than member each in mark group, and width W 1 needs larger along the full-size Wx of this Width Y than member each in mark group.Dotted line frame in Fig. 2 represents each member in the mark group of the mask plate E that baffle plate D blocks.
As shown in Figure 1, along in adjacent two panel area A of Y-direction, lower limb two angles of top panel area A and coboundary two angles of below panel area A are equipped with identical multiple first alignment marks 14 of quantity, carry out in exposure process to two panel area A successively at use mask plate E, the projection of the baffle plate being used for blocking mark group on mask plate E on panel area A as Fig. 1 in shown in dotted line frame 17, dotted line frame 17 inner region, owing to being blocked by baffle plate, does not form any figure after exposed.In addition, dotted line frame 17 inner region is arranged in panel redundant area 13, not only comprises multiple first alignment mark 14 in this region, further comprises a part of panel redundant area 13 outside the first alignment mark 14.
Usually redundancy PS array can be formed in panel redundant area 13, object is after color membrane substrates and array base palte are to box, ensure that the spacing of two substrate edge region is consistent with the spacing of two substrate zone lines, namely ensure that the box of the liquid crystal cell formed is evenly thick, but due to blocking of baffle plate, a panel redundant area 13 has four pieces of regions and can not form redundancy PS array, the disappearance of bulk redundancy PS can make color membrane substrates and array base palte to after box, cannot ensure that the liquid crystal cell of panel redundant area 13 is thick consistent with panel effective district 12, thus result in the even problem of liquid crystal cell thickness ununiformity, and then have impact on the quality of display frame.
Summary of the invention
Embodiments of the invention provide a kind of substrate, mask plate and liquid crystal indicator, solve due on color membrane substrates because disappearance bulk redundancy PS the color membrane substrates that causes and the even problem of the box thickness ununiformity of array base palte to the liquid crystal cell of the formation after box.
For achieving the above object, embodiments of the invention adopt following technical scheme:
The embodiment of the present invention provides a kind of substrate, comprise in the horizontal direction with the panel area of multiple rectangles of vertical direction array arrangement, each described panel area is for making a color membrane substrates; Described panel area comprises four the first contraposition modules, is arranged on four angles of described panel area respectively; Wherein, in the horizontal direction or in vertical direction, the adjacent angular of two adjacent panel areas shares a described first contraposition module; And described first contraposition module is positioned at the mask redundant area outside panel redundant area.
Alternatively, described first contraposition module, comprises the first mark group be made up of multiple first alignment mark, and the second mark group be made up of multiple second alignment mark; Described multiple first alignment mark is along first direction equidistant arrangement, and described multiple second alignment mark is along described first direction equidistant arrangement.
Preferably, described first direction is parallel to horizontal direction or vertical direction.
Further, described multiple first alignment mark and described multiple second alignment mark conllinear arrange.
Alternatively, between described first direction and horizontal direction or vertical direction, there is angle a, and 0 ° of < a < 90 °.
The embodiment of the present invention also provides a kind of liquid crystal indicator, comprises the color membrane substrates made by aforesaid substrate.
The embodiment of the present invention provides again a kind of mask plate, for forming figure in a panel area of aforesaid substrate; Described mask plate comprises four the second contraposition modules, is respectively used to and the first contraposition module aligning on described panel area four angles; Described mask plate also comprises four spacing and detects window, and described second contraposition module is arranged side by side with one respectively; When described second contraposition module and described first contraposition module aligning, the second contraposition module and the spacing be arranged side by side with it detect window projection on the substrate and are all arranged in exposure machine baffle plate drop shadow spread on the substrate.
Alternatively, described second contraposition module, comprises the 3rd mark group be made up of multiple 3rd alignment mark, and the 4th mark group be made up of multiple 4th alignment mark; Described multiple 3rd alignment mark is along second direction equidistant arrangement, and described multiple 4th alignment mark is along described second direction equidistant arrangement.
Preferably, described second direction is parallel to horizontal direction or the vertical direction of each panel area array arrangement in described substrate.
Further, described multiple 3rd alignment mark and described multiple 4th alignment mark conllinear arrange.
Alternatively, in described second direction and described substrate, between the horizontal direction of each panel area array arrangement or vertical direction, there is angle a, and 0 ° of < a < 90 °.
The substrate that embodiments of the invention provide, in mask plate and liquid crystal indicator, due in the horizontal direction or in vertical direction, the adjacent angular of two adjacent panel areas shares a first contraposition module, like this when exposing adjacent two panel areas successively, these two the first contraposition modules between adjacent two panel areas are employed twice, second contraposition module of diverse location on difference alignment mask plate, the baffle plate of exposure machine is while blocking the second contraposition module on mask plate, also block adjacent panels district sharing the first contraposition module, and the projection of baffle plate on panel area being used for blocking the second contraposition module in double exposure overlaps, so the area blocked by baffle plate between two adjacent surfaces plate district, to project the situation do not overlapped compared to two pieces of baffle plates of the prior art, reduce half.
In addition, the mask redundant area outside panel redundant area is positioned at due to the first contraposition module, and mask redundant area be without any figure formed without graph area, when baffle plate blocks the second contraposition module of this position, projection can drop in mask redundant area, therefore can not have any impact by the redundancy PS figure that formed of counter plate redundant area.So the color membrane substrates adopting the substrate that provides of the embodiment of the present invention to make and array base palte are to after box, can ensure that color membrane substrates is consistent with the spacing of array base palte fringe region and the spacing of two substrate zone lines, thus ensure that the box of the liquid crystal cell formed is evenly thick, improve the quality of display frame.
Accompanying drawing explanation
In order to be illustrated more clearly in the embodiment of the present invention or technical scheme of the prior art, be briefly described to the accompanying drawing used required in embodiment or description of the prior art below, apparently, accompanying drawing in the following describes is only some embodiments of the present invention, for those of ordinary skill in the art, under the prerequisite not paying creative work, other accompanying drawing can also be obtained according to these accompanying drawings.
Fig. 1 includes the glass plate of multiple panel area and the structural representation for the mask plate that forms figure on this glass plate in prior art;
Fig. 2 is the structural representation of the rectangle baffle plate of exposure machine in prior art;
The structural representation of a kind of substrate that Fig. 3 provides for the embodiment of the present invention;
The structural representation of the another kind of substrate that Fig. 4 provides for the embodiment of the present invention;
The structural representation of a kind of mask plate that Fig. 5 provides for the embodiment of the present invention;
The structural representation of a kind of first contraposition module that Fig. 6 provides for the embodiment of the present invention;
The structural representation of the another first contraposition module that Fig. 7 provides for the embodiment of the present invention;
The structural representation of a kind of second contraposition module that Fig. 8 provides for the embodiment of the present invention;
The structural representation of the another second contraposition module that Fig. 9 provides for the embodiment of the present invention.
Embodiment
Below in conjunction with the accompanying drawing in the embodiment of the present invention, be clearly and completely described the technical scheme in the embodiment of the present invention, obviously, described embodiment is only the present invention's part embodiment, instead of whole embodiments.Based on the embodiment in the present invention, the every other embodiment that those of ordinary skill in the art obtain under the prerequisite of not making creative work, all belongs to the scope of protection of the invention.
Embodiments provide a kind of substrate, as shown in Figure 3 and Figure 4, comprise the panel area G of multiple rectangles of P1 and vertical direction P2 array arrangement in the horizontal direction, each panel area G is for making a color membrane substrates; Panel area G comprises four the first contraposition modules 31, is arranged on four angles of panel area G respectively; In the horizontal direction on P1 or vertical direction P2, the adjacent angular of two adjacent panel area G shares a first contraposition module 31; And the first contraposition module 31 is positioned at the mask redundant area 33 outside panel redundant area 32.
Usual one is used for making several times that the substrate size of color membrane substrates is a color membrane substrates size, can be used for making multiple color membrane substrates, so in the process made, substrate is divided into multiple panel area G, each panel area G is for making a color membrane substrates.Each panel area G is divided into peripheral mask redundant area 33 according to function, the effective district 34 (namely forming the region of dyed layer and support column) of panel at center, and be folded in the panel redundant area 32 (namely forming the region of redundancy PS array) between this Liang Ge district.
Above-mentioned panel area G comprises four the first contraposition modules 31, is arranged on four angles of panel area G respectively, the first contraposition module 31 for making the mask plate contraposition shown in panel area G and Fig. 5, to form required figure at panel area G.Four angles of mask plate also can be arranged the second contraposition module 51 of same quantity and spacing.When the first contraposition module 31 and the second contraposition module 51 on the direction perpendicular to panel area G on time, represent mask plate and panel area G accurate contraposition.Because the second contraposition module 51 is the hollow out figures be arranged on mask plate, in exposure process, in order to avoid the partial light permeability from these hollow outs, and on substrate, form unwanted figure, usually utilize the baffle plate of rectangle in exposure machine, the light of directive second contraposition module 51 is blocked.
As shown in Figure 3, the adjacent angular of two adjacent on P2 in the vertical direction panel area G shares a first contraposition module 31.Therefore, when exposing top panel area G, the first contraposition module 31 on panel area G lower limb two angles, top can be aimed at the second contraposition module 51 on mask plate lower limb two angles; When exposing below panel area G, the first contraposition module 31 on panel area G coboundary two angles, below, the first contraposition module 31 namely on panel area G lower limb two angles, top, can aim at the second module 51 on mask plate coboundary two angles.
In other words, two the first contraposition modules 31 are devised between two neighbouring panel area G, two neighbouring panels keep left two angles one of them first contraposition module 31 corresponding on limit, two angles another the first contraposition modules 31 corresponding on limit of keeping right.Like this when exposing neighbouring two panel area G successively, these two the first contraposition modules 31 between neighbouring two panel area G are employed twice, the second contraposition module 51 of diverse location on difference alignment mask plate.
According to foregoing description, in the double exposure that neighbouring two panel area G are carried out, the baffle plate of exposure machine is while blocking the second contraposition module 51 on mask plate, also the first contraposition module 31 on counter plate district G blocks, due between the adjacent angular of neighbouring two panel areas, only be provided with a shared first contraposition module 31, therefore in double exposure, the projection of baffle plate on panel area G being used for blocking the second contraposition module 51 on this position overlaps, so the area blocked by baffle plate between neighbouring two panels district, to project the situation do not overlapped compared to two pieces of baffle plates of the prior art, reduce half.
In addition, the mask redundant area 33 outside panel redundant area 32 is positioned at due to the first contraposition module 31, and mask redundant area 33 be without any figure formed without graph area, when baffle plate blocks the second contraposition module 51 of this position, projection can drop in mask redundant area 33, therefore can not have any impact by the redundancy PS figure that formed of counter plate redundant area 32.So the color membrane substrates adopting the substrate that provides of the above embodiment of the present invention to make and array base palte are to after box, can ensure that color membrane substrates is consistent with the spacing of array base palte fringe region and the spacing of two substrate zone lines, thus ensure that the box of the liquid crystal cell formed is evenly thick, improve the quality of display frame.
The adjacent angular of the Liang Ge adjacent panels district G that Fig. 3 shows on P2 in the vertical direction shares the situation of a first contraposition module 31.The present invention is not limited thereto, as shown in Figure 4, share the first contraposition module 31 also can on horizontal direction P1 two adjacent panels G adjacent angular between, and the first contraposition module 31 is positioned at mask redundant area 33, the substrate of this structure is after formation color membrane substrates, thick to also having uniform box during box with array base palte.
In the substrate that above-described embodiment provides, first contraposition module 31, as shown in Figure 6, comprise the first mark group 62 be made up of multiple first alignment mark 61, the second mark group 64 is formed with by multiple second alignment mark 63, multiple first alignment mark 61 is along first direction t1 equidistant arrangement, and multiple second alignment mark 63 is also along first direction t1 equidistant arrangement.Substrate arranges the contraposition module be made up of two alignment mark groups, under the prerequisite not increasing manufacturing cost, the aligning accuracy between mask plate and substrate can be improved.
When using the second contraposition module 51 on mask plate and the first contraposition module 31 on substrate to carry out contraposition, can select to carry out contraposition with the first mark group 62, also can select to carry out contraposition with the second mark group 64, also can with the contraposition simultaneously of the first mark group 62 and the second mark group 64, alignment method is flexible.
In the substrate provided in above-described embodiment, first direction t1 can be parallel to above-mentioned horizontal direction P1, or is parallel to above-mentioned vertical direction P2.When the first contraposition module 31 is as shown in Figure 3 between plate district, upper and lower surfaces G, first direction t1 can be parallel to horizontal direction P1, in the vertical direction P2 takies too much substrate space to save each mark group (62,64).Similarly, when the first contraposition module 31 is as shown in Figure 4 between the panel area G of two, left and right, first direction t1 can be parallel to vertical direction P2, in the horizontal direction P1 takies too much substrate space to save each mark group (62,64).
In the substrate that above-described embodiment provides, when first direction t1 is parallel to horizontal direction or vertical direction, multiple first alignment mark 61 can arrange by conllinear as shown in Figure 6 with multiple second alignment mark 63, to save (62,64) substrate space in the vertical direction or the horizontal direction further.
Certainly, in the substrate that above-described embodiment provides, first direction t1 can parallel with horizontal direction P1 or vertical direction P2 also can and horizontal direction P1 or vertical direction P2 between there is angle a, and 0 ° of < a < 90 °, Fig. 7 shows the situation that angle a is angle between first direction t1 and horizontal direction P1.No matter the orientation of each group of alignment mark how, as long as they all can fall in the projection of baffle plate on substrate.
The embodiment of the present invention additionally provides a kind of liquid crystal indicator, and it comprises the color membrane substrates of the substrate manufacture provided by above-described embodiment.Use this color membrane substrates and array base palte to box, because color membrane substrates does not exist the problem of redundancy PS disappearance, therefore to the liquid crystal cell formed after box, there is uniform thickness, thus the display frame quality this liquid crystal indicator being had improve.
This liquid crystal indicator can be specially: any product or parts with Presentation Function such as liquid crystal panel, Electronic Paper, mobile phone, panel computer, televisor, display, notebook computer, digital album (digital photo frame), navigating instrument.
In addition, the embodiment of the present invention further provides a kind of mask plate, as shown in Figure 5, forms figure in the panel area G of substrate that provides at above-described embodiment.This mask plate comprises four the second contraposition modules 51, is respectively used to and the first contraposition module 31 contraposition on panel area G tetra-angles; Mask plate also comprises four spacing and detects window 52, is arranged side by side respectively with a second contraposition module 51; When the second contraposition module 51 and the first contraposition module 31 contraposition, the second contraposition module 51 and the spacing be arranged side by side with it detect the projection of window 52 on substrate and are all arranged in the exposure machine drop shadow spread of baffle plate on substrate.
The mask plate that the embodiment of the present invention provides forms figure on the substrate provided at above-described embodiment, in use, the second contraposition module 51 on mask plate needs and the first contraposition module 31 contraposition on substrate, therefore, when the baffle plate of use exposure machine blocks the second contraposition module 51 on mask plate and spacing detects window 52, the first contraposition module 31 will be made also to be positioned at the drop shadow spread of baffle plate on substrate.Because on substrate, the first contraposition module 31 is positioned at the mask redundant area 33 outside panel redundant area 32, and mask redundant area 33 be without any figure formed without graph area, when baffle plate blocks the first contraposition module 31, projection can drop in mask redundant area 33, therefore can not have any impact by the redundancy PS figure that formed of counter plate redundant area 32.So when the mask plate adopting the above embodiment of the present invention to provide forms figure on the substrate that above-described embodiment provides, the color membrane substrates of final formation and array base palte are to after box, can ensure that color membrane substrates is consistent with the spacing of array base palte fringe region and the spacing of two substrate zone lines, thus ensure that the box of the liquid crystal cell formed is evenly thick, and then improve the quality of display frame.
In the mask plate that above-described embodiment provides, the second contraposition module 51, as shown in Figure 8, can comprise the 3rd mark group 82 be made up of multiple 3rd alignment mark 81, and the 4th mark group 84 be made up of multiple 4th alignment mark 83; Multiple 3rd alignment mark 81 is along second direction t2 equidistant arrangement, and multiple 4th alignment mark 83 is along second direction t2 equidistant arrangement.So arranging the second contraposition module 51, is in order to can be corresponding with the first contraposition module 31 structure shown in Fig. 6, to ensure the aligning accuracy between mask plate and substrate.
According to the description of above-described embodiment, when mask plate and substrate contraposition, one in the 3rd mark group 81 and the 4th mark group 83 can be selected to carry out contraposition with in the first mark group 62 and the second mark group 64, also can the 3rd mark group 81 and the 4th mark group 83 simultaneously with the first mark group 62 and the second mark group 64 contraposition on relative position.Such as, the 3rd mark group 81 is corresponding with the first mark group 62 position, and the 4th mark group 83 is corresponding with the second mark group 64 position, then the 3rd mark group 81 and the first mark group 62 contraposition, and the 4th mark group 83 and the second mark group 64 contraposition simultaneously, alignment method is flexible.
In the mask plate that above-described embodiment provides, second direction t2 can be parallel to the horizontal direction P1 of each panel area G array arrangement in substrate, or, be parallel to the vertical direction P2 of each panel area G array arrangement.When the first contraposition module 31 is as shown in Figure 3 between plate district, upper and lower surfaces G, each mark group (62 in first contraposition module 31,64) first direction t1 is parallel to horizontal direction P1, correspondingly, each mark group (82 in second contraposition module 51,84) second direction t2 is also parallel to horizontal direction P1, to realize accurate contraposition.Similarly, when the first contraposition module 31 is as shown in Figure 4 between the panel area G of two, left and right, each mark group (62 in first contraposition module 31,64) first direction t1 is parallel to vertical direction P2, correspondingly, in second contraposition module 51, the second direction t2 of each mark group (82,84) is also parallel to vertical direction P2, to realize accurate contraposition.
In the mask plate that above-described embodiment provides, multiple 3rd alignment mark 81 arranges with multiple 4th alignment mark 83 conllinear.In the first contraposition module 31 shown in this set with Fig. 6, the arrangement mode of each mark is corresponding, to realize accurate contraposition.
Certainly, in the mask plate that above-described embodiment provides, second direction t2 can be parallel with horizontal direction P1 or vertical direction P2, also can and horizontal direction P1 or vertical direction P2 between there is angle a, Fig. 9 shows the situation that angle a is angle between second direction t2 and horizontal direction P1, and 0 ° of < a < 90 °.In the first contraposition module 31 shown in this set with Fig. 7, the arrangement mode of each mark is corresponding, to realize accurate contraposition.
The above; be only the specific embodiment of the present invention, but protection scope of the present invention is not limited thereto, is anyly familiar with those skilled in the art in the technical scope that the present invention discloses; the change that can expect easily or replacement, all should be encompassed within protection scope of the present invention.Therefore, protection scope of the present invention should be as the criterion with the protection domain of described claim.
Claims (11)
1. a substrate, comprise in the horizontal direction with the panel area of multiple rectangles of vertical direction array arrangement, each described panel area is for making a color membrane substrates; Described panel area comprises four the first contraposition modules, is arranged on four angles of described panel area respectively; It is characterized in that, in the horizontal direction or in vertical direction, the adjacent angular of two adjacent panel areas shares a described first contraposition module; And described first contraposition module is positioned at the mask redundant area outside panel redundant area.
2. substrate according to claim 1, is characterized in that, described first contraposition module, comprises the first mark group be made up of multiple first alignment mark, and the second mark group be made up of multiple second alignment mark; Described multiple first alignment mark is along first direction equidistant arrangement, and described multiple second alignment mark is along described first direction equidistant arrangement.
3. substrate according to claim 2, is characterized in that, described first direction is parallel to horizontal direction or vertical direction.
4. substrate according to claim 3, is characterized in that, described multiple first alignment mark and described multiple second alignment mark conllinear arrange.
5. substrate according to claim 2, is characterized in that, has angle a between described first direction and horizontal direction or vertical direction, and 0 ° of < a < 90 °.
6. a liquid crystal indicator, is characterized in that, comprises by the color membrane substrates of substrate manufacture described in any one of claim 1-5.
7. a mask plate, is characterized in that, for forming figure in a panel area of substrate described in any one of claim 1-5;
Described mask plate comprises four the second contraposition modules, is respectively used to and the first contraposition module aligning on described panel area four angles; Described mask plate also comprises four spacing and detects window, and described second contraposition module is arranged side by side with one respectively;
When described second contraposition module and described first contraposition module aligning, the second contraposition module and the spacing be arranged side by side with it detect window projection on the substrate and are all arranged in exposure machine baffle plate drop shadow spread on the substrate.
8. mask plate according to claim 7, is characterized in that, described second contraposition module, comprises the 3rd mark group be made up of multiple 3rd alignment mark, and the 4th mark group be made up of multiple 4th alignment mark; Described multiple 3rd alignment mark is along second direction equidistant arrangement, and described multiple 4th alignment mark is along described second direction equidistant arrangement.
9. mask plate according to claim 8, is characterized in that, described second direction is parallel to horizontal direction or the vertical direction of each panel area array arrangement in described substrate.
10. mask plate according to claim 9, is characterized in that, described multiple 3rd alignment mark and described multiple 4th alignment mark conllinear arrange.
11. mask plates according to claim 8, it is characterized in that, between the horizontal direction of each panel area array arrangement or vertical direction, there is angle a in described second direction and described substrate, and 0 ° of < a < 90 °.
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| CN201410568190.7A CN104297989B (en) | 2014-10-22 | 2014-10-22 | substrate, mask plate and liquid crystal display device |
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| CN201410568190.7A CN104297989B (en) | 2014-10-22 | 2014-10-22 | substrate, mask plate and liquid crystal display device |
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| CN104297989B CN104297989B (en) | 2017-06-27 |
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| CN105867066A (en) * | 2016-06-27 | 2016-08-17 | 京东方科技集团股份有限公司 | Mask plate, manufacturing method of display substrate, display substrate and display device |
| CN106933025A (en) * | 2017-05-10 | 2017-07-07 | 京东方科技集团股份有限公司 | The method of mask plate and its component, exposure machine and detection test window occlusion effect |
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| CN107868931A (en) * | 2016-09-23 | 2018-04-03 | 昆山国显光电有限公司 | Precision metallic shade, oled substrate and its alignment method |
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| CN111383537A (en) * | 2020-04-02 | 2020-07-07 | 上海天马有机发光显示技术有限公司 | Display panel and display device |
| CN111679473A (en) * | 2020-06-04 | 2020-09-18 | 深圳市华星光电半导体显示技术有限公司 | Display mother board, manufacturing method thereof and display panel |
| WO2021190396A1 (en) * | 2020-03-23 | 2021-09-30 | 长鑫存储技术有限公司 | Mask |
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| CN105572939A (en) * | 2016-02-01 | 2016-05-11 | 武汉华星光电技术有限公司 | Alignment and assembly method of liquid crystal display panel |
| CN105867066A (en) * | 2016-06-27 | 2016-08-17 | 京东方科技集团股份有限公司 | Mask plate, manufacturing method of display substrate, display substrate and display device |
| CN107868931A (en) * | 2016-09-23 | 2018-04-03 | 昆山国显光电有限公司 | Precision metallic shade, oled substrate and its alignment method |
| CN107065283A (en) * | 2017-04-17 | 2017-08-18 | 深圳市华星光电技术有限公司 | The shared method of high PPI panels CF light shields |
| CN107065283B (en) * | 2017-04-17 | 2020-04-07 | 深圳市华星光电半导体显示技术有限公司 | Method for sharing CF photomask of high PPI panel |
| US11307491B2 (en) | 2017-05-10 | 2022-04-19 | Boe Technology Group Co., Ltd. | Mask, mask assembly, exposure machine, method for testing shadowing effect on window, and photolithography method |
| CN106933025A (en) * | 2017-05-10 | 2017-07-07 | 京东方科技集团股份有限公司 | The method of mask plate and its component, exposure machine and detection test window occlusion effect |
| WO2018205588A1 (en) * | 2017-05-10 | 2018-11-15 | 京东方科技集团股份有限公司 | Mask and assembly thereof, exposure machine and method for inspecting shielding effect of test windows, and photoetching method |
| CN106933025B (en) * | 2017-05-10 | 2020-04-10 | 京东方科技集团股份有限公司 | Mask plate and assembly thereof, exposure machine and method for detecting shielding effect of test window |
| CN110232867A (en) * | 2019-05-13 | 2019-09-13 | 深圳市华星光电技术有限公司 | The motherboard exposure structure of display panel |
| CN110232867B (en) * | 2019-05-13 | 2022-01-04 | Tcl华星光电技术有限公司 | Mother board exposure structure of display panel |
| WO2021190396A1 (en) * | 2020-03-23 | 2021-09-30 | 长鑫存储技术有限公司 | Mask |
| CN111383537A (en) * | 2020-04-02 | 2020-07-07 | 上海天马有机发光显示技术有限公司 | Display panel and display device |
| CN111679473A (en) * | 2020-06-04 | 2020-09-18 | 深圳市华星光电半导体显示技术有限公司 | Display mother board, manufacturing method thereof and display panel |
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