CN101162338A - Liquid crystal display board and method for manufacturing facing direction substrates thereof - Google Patents
Liquid crystal display board and method for manufacturing facing direction substrates thereof Download PDFInfo
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- CN101162338A CN101162338A CNA2007101873043A CN200710187304A CN101162338A CN 101162338 A CN101162338 A CN 101162338A CN A2007101873043 A CNA2007101873043 A CN A2007101873043A CN 200710187304 A CN200710187304 A CN 200710187304A CN 101162338 A CN101162338 A CN 101162338A
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Abstract
The invention discloses a liquid crystal display panel and a manufacturing method of an opposite base plate. The liquid crystal display panel comprises a thin film transistor array base plate with a colorful filter layer, the opposite base plate and a liquid crystal layer. The opposite base plate is provided with a common electrode, a plurality of main gap objects arranged on the common electrode, a plurality of gap object seats which are arranged on the common electrode and bulge toward the thin film transistor array base plate with the colorful filter layer, and a plurality of sub gap objects arranged on the common electrode. The main gap objects are arranged on the gap object seats for maintaining gaps between the thin film transistor array base plate with the colorful filter layer and the opposite base plate. The liquid crystal layer is also arranged between the thin film transistor array base plate with the colorful filter layer and the opposite base plate. Due to the main gap objects and the sub gap objects, the liquid crystal display panel of the invention forms a liquid crystal display panel with mixed type gap objects.
Description
Technical field
The present invention relates to relevant for a kind of display panels (liquid crystal display panel, LCD panel) and the method for making its subtend substrate (opposite substrate), relate in particular to a kind of the have display panels of hybrid design gaps thing (hybrid spacer) and the method for making its subtend substrate.
Background technology
Advantages such as LCD has that high image quality, volume are little, in light weight, low voltage drive, low consumpting power and applied range, so it has replaced cathode-ray tube (CRT), and (cathode ray tube CRT) becomes the main flow of display of new generation.Traditional display panels is to be made of a colored optical filtering substrates (colorfilter), a thin-film transistor array base-plate (thin film transistor array substrate, TFT array substrate) and a liquid crystal layer (liquid crystallayer) that is disposed between this two substrates.Yet the resolution of this kind display panels (resolution) is relatively poor, the aperture opening ratio of pixel (pixel) is lower, and colored optical filtering substrates has bit errors (misalignment) when engaging with thin-film transistor array base-plate easily.
In order to improve the problems referred to above, prior art has proposed a kind of display panels of being made up of thin-film transistor array base-plate (color filter on array substrate, COA substrate), a subtend substrate, a plurality of separation material and the liquid crystal layer with chromatic filter layer.Separation material and liquid crystal layer are disposed between the thin-film transistor array base-plate and subtend substrate with chromatic filter layer, and separation material can be in order to keep thin-film transistor array base-plate with chromatic filter layer and the gap between the subtend substrate.In this kind display panels,, therefore can not produce bit errors because chromatic filter layer is directly to be formed on the thin-film transistor array base-plate.And this kind display panels can have preferable resolution and its aperture ratio of pixels is also higher.
Yet, it should be noted that, in this kind display panels, use spherical separation material (ball spacer) traditionally, because the position of wayward spherical separation material when scattering, spherical separation material rises and falls because of the height on thin-film transistor array base-plate surface easily, and forms different high low heads, causes spherical separation material that even liquid crystal spacing (cellgap) can't be provided between thin-film transistor array base-plate and subtend substrate.Therefore, this kind display panels is being subjected to external force when extruding, is difficult for keeping the spacing between its thin-film transistor array base-plate with chromatic filter layer and the subtend substrate and influences the panel optical characteristics, causes the panel demonstration inhomogeneous.
Summary of the invention
Technical matters to be solved by this invention is to provide a kind of display panels, and it has a plurality of hybrid separation materials.
Another purpose of the present invention is to provide a kind of manufacture method of subtend substrate, to form a plurality of separation material pedestals (spacer stage) and a plurality of alignment mark (alignment mark) in the lump on its substrate.
The present invention proposes a kind of display panels for achieving the above object, comprises that one has thin-film transistor array base-plate, a subtend substrate and a liquid crystal layer of chromatic filter layer.The subtend substrate has a public electrode (common electrode), a plurality ofly is disposed at main gap thing (main spacer) on the public electrode, a plurality of be disposed on the public electrode and towards separation material pedestal and a plurality of sub-separation material (sub spacer) that is disposed on the public electrode of the thin-film transistor array base-plate projection with chromatic filter layer.The main gap thing is disposed on the separation material pedestal, to keep thin-film transistor array base-plate with chromatic filter layer and the liquid crystal spacing between the subtend substrate.Liquid crystal layer is disposed between the thin-film transistor array base-plate and subtend substrate with chromatic filter layer.
In one embodiment of this invention, above-mentioned thin-film transistor array base-plate with chromatic filter layer comprise a substrate (substrate), multi-strip scanning line (scan line), many data lines (data line), a plurality of thin film transistor (TFT) (thin film transistor, TFT), a plurality of chromatic filter layer (color filterfilm) and a plurality of pixel electrode (pixel electrode).Sweep trace, data line and thin film transistor (TFT) all are disposed on the substrate, and thin film transistor (TFT) and corresponding scanning line and data line electric connection.Chromatic filter layer covers sweep trace, data line and thin film transistor (TFT).Pixel electrode is disposed on the chromatic filter layer, and electrically connects with corresponding thin film transistor (TFT).
In one embodiment of this invention, above-mentioned chromatic filter layer comprises red filter layer, green filter layer and blue color filter layer.
In one embodiment of this invention, above-mentioned pixel electrode comprises transparency electrode (transparentelectrode), reflecting electrode (reflective electrode) or semi-penetration semi-reflective electrode (transflective electrode).
In one embodiment of this invention, the above-mentioned thin-film transistor array base-plate with chromatic filter layer comprises that also one is disposed at the overlayer (overcoatlayer) that has light-transmitting materials between chromatic filter layer and the pixel electrode, and this tectal material for example can be the organic material of high spreadability.
In one embodiment of this invention, above-mentioned subtend substrate has more a plurality of alignment marks.Sub-separation material is positioned on separation material pedestal and the alignment mark zone in addition.
In one embodiment of this invention, the height of above-mentioned sub-separation material is lower than the height of main gap thing.
In one embodiment of this invention, above-mentioned subtend substrate also has a plurality of orientation projectioies (alignmentprotrusion).The orientation convex configuration and is arranged in pixel cell (pixel unit) on public electrode, be used for LCD alignment and use.
In one embodiment of this invention, the material of above-mentioned public electrode, separation material pedestal and alignment mark is identical.
In one embodiment of this invention, the material of above-mentioned public electrode, separation material pedestal and alignment mark comprise transparent conductive oxide (transparent conductive oxide, TCO).
In one embodiment of this invention, the material difference of above-mentioned public electrode, separation material pedestal and alignment mark.
In one embodiment of this invention, the material of above-mentioned public electrode comprises transparent conductive oxide, and the material of separation material pedestal comprises metal or resin material (resin), and the material of alignment mark comprises metal or resin material.
The present invention also proposes a kind of method for making of subtend substrate, and it comprises the following steps.At first, provide a substrate.Then, on substrate, form a public electrode, a plurality of separation material pedestal and a plurality of alignment mark.Then, form a plurality of main gap things on public electrode, wherein the main gap thing is disposed on the separation material pedestal.
In one embodiment of this invention, the formation method of above-mentioned public electrode, separation material pedestal and alignment mark comprises the following steps.Prior to forming an electrode material layer (electrode materiallayer) on the substrate, reduce the thickness of the electrode material layer in the subregion then, to form public electrode, separation material pedestal and alignment mark simultaneously.
In one embodiment of this invention, the formation method of above-mentioned public electrode, separation material pedestal and alignment mark comprises the following steps.Prior to forming a public electrode on the substrate, on public electrode, form separation material pedestal and alignment mark then simultaneously.
In one embodiment of this invention, the formation method of above-mentioned main gap thing comprises little shadow (Photolithography) and etching (etching) technology or ink jet printing (inkjetprinting) technology.
In one embodiment of this invention, the method for making of above-mentioned subtend substrate also is included in public electrode and forms a plurality of sub-separation materials.Sub-separation material is disposed on the public electrode, and is positioned on separation material pedestal and the alignment mark zone in addition, and is adjacent to the main gap thing.
Because display panels of the present invention has hybrid design gaps thing, therefore, when being subjected to the external force extruding, display panels is easier to keep the spacing between its thin-film transistor array base-plate and the subtend substrate, the stability of the resistance to pressure of panel and panel packaging technology with chromatic filter layer.In addition, when on the substrate of subtend substrate of the present invention, forming the separation material pedestal, also can form alignment mark in the lump, so that can carry out contraposition by alignment mark when having the thin-film transistor array base-plate of chromatic filter layer and subtend substrate in combination.
For above-mentioned feature and advantage of the present invention can be become apparent, preferred embodiment cited below particularly, and cooperate appended accompanying drawing, be described in detail below.
Description of drawings
Fig. 1 illustrates the structural representation into a kind of display panels of one embodiment of the invention;
Fig. 2 A to Fig. 2 C is the synoptic diagram of the method for making of the subtend substrate among Fig. 1;
Fig. 3 is the top view of Fig. 2 B;
Fig. 4 is for looking synoptic diagram on the pixel region of one embodiment of the invention.
Reference numeral wherein:
100: display panels 200: thin-film transistor array base-plate with chromatic filter layer
210: substrate 220: thin film transistor (TFT)
230: protective seam 240: pixel electrode
250: overlayer 260: black matrix"
270: chromatic filter layer 300: the subtend substrate
310: substrate 320: public electrode
330: separation material pedestal 340: alignment mark
350: orientation projection 360: the main gap thing
370: sub-separation material 400: liquid crystal layer
Embodiment
Fig. 1 illustrates the structural representation into a kind of display panels of one embodiment of the invention.Please refer to Fig. 1, display panels 100 comprises that thin-film transistor array base-plate (colorfilter on array (COA) substrate) 200, one a subtend substrate (opposite substrate) 300 and with chromatic filter layer is disposed at thin-film transistor array base-plate 200 with chromatic filter layer and the liquid crystal layer 400 between the subtend substrate 300.
Thin-film transistor array base-plate 200 with chromatic filter layer comprises a substrate 210, multi-strip scanning line (not illustrating), many data lines (not illustrating), a plurality of thin film transistor (TFT) 220, a plurality of chromatic filter layer 230 and a plurality of pixel electrode 240.Sweep trace, data line and thin film transistor (TFT) 220 all are disposed on the substrate 210, and sweep trace and data line are staggered out and are the pixel region of arrayed, and the thin film transistor (TFT) in each pixel region 220 electrically connects with corresponding scanning line and data line.Be coated with protective seam 230 on the thin film transistor (TFT) 220, thin film transistor (TFT) 220, sweep trace and online data optionally form black matrix" 260, to reduce the light leak of pixel edge.In addition, on the thin-film transistor array base-plate 200 of chromatic filter layer 230, also can not form black matrix" 260,, or also black matrix" 260 can be produced on the subtend substrate 300 with each chromatic filter layer 230 storehouse.For example one of them is formed chromatic filter layer 230 in the inferior pixel region of each pixel region at least by red filter layer, green filter layer and blue color filter layer, and it covers sweep trace, data line and thin film transistor (TFT) 220.
Moreover pixel electrode 240 for example is a transparency electrode, and it is disposed on the chromatic filter layer 230, and electrically connects with corresponding thin film transistor (TFT) 220.In the embodiment that other does not illustrate, pixel electrode 240 can also be reflecting electrode or semi-penetration semi-reflective electrode.In addition, the thin-film transistor array base-plate 200 with chromatic filter layer also can comprise an overlayer 250, and it is disposed between chromatic filter layer 230 and the pixel electrode 240.Overlayer 250 is made up of light-transmitting materials, and its material can be the organic material of high spreadability.
In addition, 300 of subtend substrates have a substrate 310, a public electrode 320, a plurality of separation material pedestal 330, a plurality of main gap thing 360 and a plurality of sub-separation materials 370.Public electrode 320 is disposed on the substrate 310, and its material for example is transparent conductive oxide, and separation material pedestal 330, main gap thing 360 then are disposed on the public electrode 320 with sub-separation material 370.And when the thin-film transistor array base-plate 200 of chromatic filter layer was assembled with subtend substrate 300, separation material pedestal 330 was towards thin-film transistor array base-plate 200 projections with chromatic filter layer.
Moreover main gap thing 360 is disposed on the separation material pedestal 330, and it can be in order to keep thin-film transistor array base-plate 200 with chromatic filter layer and the gap between the subtend substrate 300.Main gap thing 360 can need its allocation position of decision according to designing, and main gap thing 360 can dispose in each pixel region, or even disposes in each time pixel region, also disposes one in the certain number of pixels at interval.In addition, sub-separation material 370 can be positioned on separation material pedestal 330 zone in addition, so that its height can be lower than the height of main gap thing 360.Sub-separation material 370 can be arranged arbitrarily in the zone beyond separation material pedestal 330, and it can be adjacent to 360 configurations of main gap thing, also can replace part main gap thing 360, to be staggered with main gap thing 360.When display panels 100 is being subjected to external force when extruding, sub-separation material 370 can be in order to keep thin-film transistor array base-plate 200 with chromatic filter layer and the spacing between the subtend substrate 300.At this moment, display panels 100 can form a display panels with hybrid design gaps thing because of having main gap thing 360 and sub-separation material 370, and wherein hybrid design gaps thing can be in order to the resistance to pressure that improves display panels 100 and the stability of packaging technology.
In addition, subtend substrate 300 more can have a plurality of alignment marks 340 (being illustrated in Fig. 3), and sub-separation material 370 can be positioned on alignment mark 340 zone in addition.Thin-film transistor array base-plate 200 with chromatic filter layer can carry out contraposition by alignment mark 340 during with 300 combinations of subtend substrate.In this embodiment, separation material pedestal 330 then can be transparent conductive oxide, metal or resin material with the material of alignment mark 340.
In addition, subtend substrate 300 more can have a plurality of orientation projectioies 350, and it is disposed on the public electrode 320, and is positioned on separation material pedestal 330 and alignment mark 340 zone in addition.Each pixel region can be provided with at least one orientation projection 350, and orientation projection 350 can be multi-direction arrangement in order to the liquid crystal molecule in the guiding liquid crystal layer 400, to obtain several different orientation zones (domain).At this moment, display panels 100 can form multi-zone vertical alignment nematic and arrange that (it can have wider visible angle for multi-domain vertical alignment, display panels MVA).Below will enumerate the method for making of an embodiment with the subtend substrate 300 in the explanation present embodiment.
Fig. 2 A to Fig. 2 C is the synoptic diagram of the method for making of the subtend substrate among Fig. 1, and Fig. 3 is the top view of Fig. 2 B.Please refer to Fig. 2 A, at first, provide a substrate 310, and on substrate 310, form an electrode material layer (not illustrating).The material of substrate 310 can be glass substrate (glass substrate), plastic base transparent substrates (transparent substrate) such as (plastic substrate), and the material of electrode material layer can be indium tin oxide (indium tin oxide, ITO) or indium-zinc oxide (indium zinc oxide IZO) waits the electrically conducting transparent material.Then, remove electrode material layer partly to form a public electrode 320.
Then, please refer to Fig. 2 B and Fig. 3, form a separation material base material layer (not illustrating) again on substrate 310, its material can be transparent conductive oxides such as indium tin oxide or indium-zinc oxide.But in other embodiments, the material of separation material base material layer can also be metal or resin material.Then, remove separation material base material layer partly, on public electrode 320, to form a plurality of separation material pedestals 330 and a plurality of alignment mark 340.In addition, more can form a plurality of orientation projectioies 350 in the lump this moment on public electrode 320, and orientation projection 350 can be arranged in pixel region, and be positioned on the zone beyond separation material pedestal 330 and the alignment mark 340.
In addition, public electrode 320 and position separation material pedestal 330 thereon can be divided into the formation of twice step with alignment mark 340 as previously mentioned.In the embodiment that other does not illustrate, public electrode 320 and position separation material pedestal 330 thereon can also form simultaneously with alignment mark 340.For instance, can be prior to forming above-mentioned electrode material layer on the substrate 300.Then, with a shadow tone photomask (half-tone mask) or multiple penetration photomask (multi-tone mask) serves as that shielding is carried out one and removed technology, with the thickness of the electrode material layer in the minimizing subregion, and then form public electrode 320, separation material pedestal 330 and alignment mark 340.At this moment, public electrode 320, separation material pedestal 330 can have different height with alignment mark 340, and its material all is transparent conductive oxide, and wherein separation material pedestal 330 can be the highest with the height of alignment mark 340.Alignment mark 340 can be because of the different formed light transmittances in various degree of thickness, to reach the purpose that alignment mark 340 is aimed at by this with public electrode 320.In addition, if separation material pedestal 330 uses metal or resin material with alignment mark 340, equally also can use above-mentioned technology.
Identical, more can form a plurality of orientation projectioies 350 in the lump this moment on public electrode 320, and orientation projection 350 can be positioned on separation material pedestal 330 and alignment mark 340 pixel region in addition.
Then, please refer to Fig. 2 C, on substrate 310, carry out a little shadow and etch process or an ink-jet printing process again, on public electrode 320, to form a plurality of main gap things 360 and a plurality of sub-separation material 370.Main gap thing 360 is disposed on the separation material pedestal 330, and sub-separation material 370 is positioned on separation material pedestal 330 and alignment mark 340 (the being illustrated in Fig. 3) zone in addition, so that the height of sub-separation material 370 can be lower than the height of main gap thing 360.So far above-mentioned, roughly finish the making of the subtend substrate 300 of present embodiment.Wherein, Fig. 3 is a synoptic diagram, and main gap thing 360 disposes one in the certain number of pixels zone at interval among the figure.
Fig. 4 is for looking synoptic diagram on the pixel region of one embodiment of the invention.Please refer to Fig. 4, main gap thing 360 also can determine its allocation position according to the design needs.In other words, main gap thing 360 not only can dispose one in each pixel region, even also can be to dispose one in each time pixel region, as shown in Figure 4.In addition, the configuration of sub-separation material 370 not only can be adjacent to main gap thing 360, also can replace part main gap thing 360, to be staggered with main gap thing 360.
In sum, display panels of the present invention can have preferable structural strength because of having hybrid separation material.The main gap thing can be in order to keep thin-film transistor array base-plate with chromatic filter layer and the gap between the subtend substrate.And, when display panels is being subjected to external force when extruding, sub-separation material can be in order to keeping thin-film transistor array base-plate with chromatic filter layer and the spacing between the subtend substrate, and then avoid the liquid crystal layer spacing to change and cause panel optics characteristic changing, thereby it is inhomogeneous to cause panel to show.Therefore, display panels of the present invention not only can have preferable resistance to pressure, and its stability in packaging technology is also preferable.
In addition, when on the public electrode of subtend substrate of the present invention, forming the separation material pedestal, more can form alignment mark in the lump, not need to carry out extra technology when therefore making alignment mark.
In addition, can carry out contraposition by alignment mark when having the thin-film transistor array base-plate of chromatic filter layer and subtend substrate in combination, its contraposition mode is comparatively simple.
Certainly; the present invention also can have other various embodiments; under the situation that does not deviate from spirit of the present invention and essence thereof; those of ordinary skill in the art work as can make various corresponding changes and distortion according to the present invention, but these corresponding changes and distortion all should belong to the protection domain of the appended claim of the present invention.
Claims (17)
1. a display panels is characterized in that, comprising:
One has the thin-film transistor array base-plate of chromatic filter layer;
One subtend substrate, have a public electrode, a plurality ofly be disposed at the main gap thing on this public electrode, a plurality of being disposed on this public electrode and towards this has separation material pedestal and a plurality of sub-separation material that is disposed on this public electrode of the thin-film transistor array base-plate projection of chromatic filter layer, wherein those main gap things are disposed on this separation material pedestal, to keep the gap between this thin-film transistor array base-plate with chromatic filter layer and this subtend substrate; And
One liquid crystal layer is disposed between this thin-film transistor array base-plate with chromatic filter layer and this subtend substrate.
2. display panels according to claim 1 is characterized in that, this thin-film transistor array base-plate with chromatic filter layer comprises:
One substrate;
The multi-strip scanning line is disposed on this substrate;
Many data lines are disposed on this substrate;
A plurality of thin film transistor (TFT)s are disposed on this substrate, and electrically connect with corresponding scanning line and data line;
A plurality of chromatic filter layers cover those sweep traces, those data lines and those thin film transistor (TFT)s; And
A plurality of pixel electrodes are disposed on those chromatic filter layers, and electrically connect with corresponding thin film transistor (TFT).
3. display panels according to claim 2 is characterized in that those chromatic filter layers comprise red filter layer, green filter layer and blue color filter layer.
4. display panels according to claim 2 is characterized in that, those pixel electrodes comprise transparency electrode, reflecting electrode or semi-penetration semi-reflective electrode.
5. display panels according to claim 2 is characterized in that, this thin-film transistor array base-plate with chromatic filter layer also comprises an overlayer, is disposed between those chromatic filter layers and those pixel electrodes.
6. display panels according to claim 1 is characterized in that, this subtend substrate also has a plurality of alignment marks, and this a little separation material is positioned on those separation material pedestals and those alignment marks zone in addition.
7. display panels according to claim 6 is characterized in that the height of this a little separation material is lower than the height of those main gap things.
8. display panels according to claim 1 is characterized in that, this subtend substrate also has a plurality of orientation projectioies, and those orientation convex configuration and are positioned on the zone beyond those separation material pedestals and those alignment marks on this public electrode.
9. display panels according to claim 1 is characterized in that, the material of this public electrode, those separation material pedestals and those alignment marks is identical.
10. display panels according to claim 9 is characterized in that, the material of this public electrode, those separation material pedestals and those alignment marks comprises transparent conductive oxide.
11. display panels according to claim 1 is characterized in that, the material difference of this public electrode, those separation material pedestals and those alignment marks.
12. display panels according to claim 11, it is characterized in that, the material of this public electrode comprises transparent conductive oxide, and the material of those separation material pedestals comprises metal or resin material, and the material of those alignment marks comprises metal or resin material.
13. the method for making of a subtend substrate is characterized in that, comprising:
One substrate is provided;
On this substrate, form a public electrode, a plurality of separation material pedestal and a plurality of alignment mark; And
Form a plurality of main gap things in this public electrode, wherein those main gap things are disposed on this separation material pedestal.
14. the method for making of subtend substrate according to claim 13 is characterized in that, the formation method of this public electrode, those separation material pedestals and those alignment marks comprises:
On this substrate, form an electrode material layer; And
Reduce the thickness of the electrode material layer in the subregion, to form this public electrode, those separation material pedestals and those alignment marks simultaneously.
15. the method for making of subtend substrate according to claim 13 is characterized in that, the formation method of this public electrode, those separation material pedestals and those alignment marks comprises:
On this substrate, form this public electrode; And
On this public electrode, form those separation material pedestals and those alignment marks simultaneously.
16. the method for making of subtend substrate according to claim 13 is characterized in that, the formation method of those main gap things comprises little shadow and etch process or ink-jet printing process.
17. the method for making of subtend substrate according to claim 13, it is characterized in that, also be included in this public electrode and form a plurality of sub-separation materials, this a little separation material is disposed on this public electrode, and is positioned on those separation material pedestals and those alignment marks zone in addition.
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| CNB2007101873043A CN100573292C (en) | 2007-11-19 | 2007-11-19 | Display panels and the method for making its subtend substrate |
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| CNB2007101873043A CN100573292C (en) | 2007-11-19 | 2007-11-19 | Display panels and the method for making its subtend substrate |
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| CN112099272B (en) * | 2016-06-15 | 2023-03-28 | 友达光电股份有限公司 | Pixel structure of display |
| CN106773253A (en) * | 2016-12-29 | 2017-05-31 | 惠科股份有限公司 | A kind of liquid crystal display panel and liquid crystal display device |
| WO2018120398A1 (en) * | 2016-12-29 | 2018-07-05 | 惠科股份有限公司 | Liquid crystal display panel and liquid crystal display device |
| US10802330B2 (en) | 2016-12-29 | 2020-10-13 | HKC Corporation Limited | Liquid crystal display panel and liquid crystal display apparatus |
| WO2018171079A1 (en) * | 2017-03-20 | 2018-09-27 | 惠科股份有限公司 | Active switch array substrate and manufacturing method therefor, and display panel |
| WO2018196052A1 (en) * | 2017-04-24 | 2018-11-01 | 惠科股份有限公司 | Liquid crystal panel and manufacturing method thereof |
| CN110767084A (en) * | 2019-02-01 | 2020-02-07 | 云谷（固安）科技有限公司 | Display panel, manufacturing method thereof and display device |
| CN110767084B (en) * | 2019-02-01 | 2022-07-08 | 云谷（固安）科技有限公司 | Display panel, manufacturing method thereof and display device |
| CN114280867A (en) * | 2021-12-29 | 2022-04-05 | 惠科股份有限公司 | Array substrate, display panel and display device |
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