CN104291265B - 在薄聚合物膜上连续制造数字微米尺度图案 - Google Patents

在薄聚合物膜上连续制造数字微米尺度图案 Download PDF

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Publication number
CN104291265B
CN104291265B CN201410323336.1A CN201410323336A CN104291265B CN 104291265 B CN104291265 B CN 104291265B CN 201410323336 A CN201410323336 A CN 201410323336A CN 104291265 B CN104291265 B CN 104291265B
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China
Prior art keywords
patterned
electric field
polymer
patterning
film
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Chinese (zh)
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CN104291265A (zh
Inventor
D·M·约翰逊
A·R·沃尔克尔
J·S·帕施科维茨
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Palo Alto Research Center Inc
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Palo Alto Research Center Inc
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J19/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J19/08—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor
    • B01J19/087—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor employing electric or magnetic energy
    • B01J19/088—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor employing electric or magnetic energy giving rise to electric discharges
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J19/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J19/08—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor
    • B01J19/12—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor employing electromagnetic waves
    • B01J19/122—Incoherent waves
    • B01J19/123—Ultraviolet light
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/0002—Lithographic processes using patterning methods other than those involving the exposure to radiation, e.g. by stamping

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  • Chemical & Material Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Toxicology (AREA)
  • General Health & Medical Sciences (AREA)
  • Organic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Application Of Or Painting With Fluid Materials (AREA)
  • Surface Treatment Of Optical Elements (AREA)
  • Shaping Of Tube Ends By Bending Or Straightening (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Heating, Cooling, Or Curing Plastics Or The Like In General (AREA)
CN201410323336.1A 2013-07-17 2014-07-08 在薄聚合物膜上连续制造数字微米尺度图案 Active CN104291265B (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US13/944,851 US9700869B2 (en) 2013-07-17 2013-07-17 Continuously producing digital micro-scale patterns on a thin polymer film
US13/944851 2013-07-17

Publications (2)

Publication Number Publication Date
CN104291265A CN104291265A (zh) 2015-01-21
CN104291265B true CN104291265B (zh) 2017-07-04

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CN201410323336.1A Active CN104291265B (zh) 2013-07-17 2014-07-08 在薄聚合物膜上连续制造数字微米尺度图案

Country Status (5)

Country Link
US (1) US9700869B2 (enExample)
EP (1) EP2827193B1 (enExample)
JP (1) JP6424029B2 (enExample)
KR (1) KR102104770B1 (enExample)
CN (1) CN104291265B (enExample)

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10696210B2 (en) 2013-02-25 2020-06-30 Rensselaer Polytechnic Institute Low luminance lighting
JP6037914B2 (ja) * 2013-03-29 2016-12-07 富士フイルム株式会社 保護膜のエッチング方法およびテンプレートの製造方法
US9884437B2 (en) 2014-06-20 2018-02-06 Palo Alto Research Center Incorporated Integral vasculature
US9718914B2 (en) * 2015-08-31 2017-08-01 Palo Alto Research Center Incorporated Mechanically robust linked particle networks
CN106513278A (zh) * 2015-09-11 2017-03-22 新纶科技（常州）有限公司 紫外光固化机
US10384432B2 (en) 2016-02-19 2019-08-20 Palo Alto Research Center Incorporated Hierarchical laminates fabricated from micro-scale, digitally patterned films
CN107463069A (zh) * 2017-08-28 2017-12-12 中国科学技术大学 一种大面积连续辊动曝光装置及方法
NL2021092B1 (en) * 2018-06-08 2019-12-13 Qlayers Holding B V Application of a coating on a base structure
US11732378B2 (en) 2019-10-02 2023-08-22 Palo Alto Research Center Incorporated Three dielectric electrohydrodynamic patterning
WO2021087172A1 (en) * 2019-10-29 2021-05-06 Georgia Tech Research Corporation Methods and systems of obtaining patterned structures on surfaces
CN114602762B (zh) * 2022-02-26 2023-04-14 宁波大学 一种电场辅助功能涂层制备方法

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2116899A2 (en) * 2008-04-14 2009-11-11 Samsung Electronics Co., Ltd. Composition for forming inorganic pattern and method for forming inorganic pattern using the same
CN100565798C (zh) * 2005-08-17 2009-12-02 Lg化学株式会社 使用包含离子成分的涂料图形化的方法
EP2495866A1 (fr) * 2011-03-04 2012-09-05 Commissariat à l'Énergie Atomique et aux Énergies Alternatives Actionneur électrostatique d'une structure mobile à relaxation améliorée des charges piégées
CN103159164A (zh) * 2013-03-01 2013-06-19 西安交通大学 一种高深宽比微柱阵列的电场诱导压印方法

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6391217B2 (en) 1999-12-23 2002-05-21 University Of Massachusetts Methods and apparatus for forming submicron patterns on films
US6964793B2 (en) * 2002-05-16 2005-11-15 Board Of Regents, The University Of Texas System Method for fabricating nanoscale patterns in light curable compositions using an electric field
MY144124A (en) * 2002-07-11 2011-08-15 Molecular Imprints Inc Step and repeat imprint lithography systems
US7163611B2 (en) 2003-12-03 2007-01-16 Palo Alto Research Center Incorporated Concentration and focusing of bio-agents and micron-sized particles using traveling wave grids
JP2007050518A (ja) * 2005-08-12 2007-03-01 Ricoh Co Ltd プラスチック成形品の製造方法及びこの製造方法により製造されるプラスチック成形品
JP2007062095A (ja) * 2005-08-30 2007-03-15 Ricoh Co Ltd プラスチック成形品の製造方法、及びその製造装置
KR20080105193A (ko) * 2007-05-30 2008-12-04 박종수 전기수력학 공정에 의한 박막코팅 방법과 시스템
US10014261B2 (en) * 2012-10-15 2018-07-03 Palo Alto Research Center Incorporated Microchip charge patterning

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN100565798C (zh) * 2005-08-17 2009-12-02 Lg化学株式会社 使用包含离子成分的涂料图形化的方法
EP2116899A2 (en) * 2008-04-14 2009-11-11 Samsung Electronics Co., Ltd. Composition for forming inorganic pattern and method for forming inorganic pattern using the same
EP2495866A1 (fr) * 2011-03-04 2012-09-05 Commissariat à l'Énergie Atomique et aux Énergies Alternatives Actionneur électrostatique d'une structure mobile à relaxation améliorée des charges piégées
CN103159164A (zh) * 2013-03-01 2013-06-19 西安交通大学 一种高深宽比微柱阵列的电场诱导压印方法

Also Published As

Publication number Publication date
US9700869B2 (en) 2017-07-11
JP2015020435A (ja) 2015-02-02
US20150021161A1 (en) 2015-01-22
JP6424029B2 (ja) 2018-11-14
CN104291265A (zh) 2015-01-21
EP2827193B1 (en) 2019-04-03
KR102104770B1 (ko) 2020-04-28
EP2827193A1 (en) 2015-01-21
KR20150009924A (ko) 2015-01-27

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