CN104242842A - Piezoelectric ceramic drive amplification circuit - Google Patents

Piezoelectric ceramic drive amplification circuit Download PDF

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Publication number
CN104242842A
CN104242842A CN201410441037.8A CN201410441037A CN104242842A CN 104242842 A CN104242842 A CN 104242842A CN 201410441037 A CN201410441037 A CN 201410441037A CN 104242842 A CN104242842 A CN 104242842A
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voltage
circuit
resistance
transistor
piezoelectric ceramic
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CN201410441037.8A
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CN104242842B (en
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徐立松
李佩玥
葛川
尹志生
隋永新
杨怀江
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Changchun Institute of Optics Fine Mechanics and Physics of CAS
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Changchun Institute of Optics Fine Mechanics and Physics of CAS
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Abstract

The invention provides a piezoelectric ceramic drive amplification circuit and relates to the field of piezoelectric ceramic drive control, in particular to a piezoelectric ceramic drive amplifier which can be used for flexibly constituting a piezoelectric ceramic power supply. The piezoelectric ceramic drive amplifier can be used for effectively lowering the cost and ensuring the application convenience of the circuit while ensuring the driving effect. The piezoelectric ceramic drive amplification circuit is designed according to the amplification circuit design theory and consists of a difference input circuit, a voltage amplification circuit and a current amplification circuit, wherein the difference input circuit can be used for solving the difference input problem of a high voltage amplification circuit; the voltage amplification circuit is used for amplifying voltages; the current amplification circuit is used for amplifying currents, so that the power of output voltage is enhanced and the loading capability of the system is improved. The designed high voltage amplifier is used for constituting the piezoelectric ceramic drive power supply, so that the symmetry is good and the resolution ratio of the output voltage is superior to 10mV.

Description

A kind of drive amplification circuit of piezoelectric ceramic
Technical field
The present invention relates to Piezoelectric Ceramic control field, be specifically related to a kind of Piezoelectric Ceramic amplifying circuit, it can form piezoelectric ceramics power supply flexibly.
Background technology
The development of science and technology makes the research field of the mankind constantly expand, and the operand of current system is from the microcosmic Nano grade of macroscopic view expansion.Piezoelectric ceramic, according to the principle of piezoelectric effect, uses special piezoelectric sintering to form, and has that volume is little, displacement resolution is high, dynamic property is good, a feature such as little of generating heat, and has a very wide range of applications in the occasion of nanometer positioning.The performance of piezoelectric ceramic realizes the support always be unableing to do without Piezoelectric Ceramic, can say that the performance of Piezoelectric Ceramic amplifier finally determines the mechanical performance of piezoelectric ceramic.Current Piezoelectric Ceramic has voltage control and Charge controlled two kinds of solutions, and wherein voltage control scheme becomes the mainstream scheme of Piezoelectric Ceramic control because possessing good dynamic property.Use voltage control method, adopt circuit form flexibly a to form hot issue that high-precision piezoelectric ceramic actuator is current techniques research.
Summary of the invention
The present invention is the problem of the driving governor very flexible solving existing piezoelectric ceramic, provides a kind of drive amplification circuit of piezoelectric ceramic.
A drive amplification circuit for piezoelectric ceramic, is made up of Differential input circuit, voltage amplifier circuit and current amplification circuit; The output of described Differential input circuit is connected with the input of voltage amplifier circuit, the output of voltage amplifier circuit is connected with the input of current amplification circuit, forms RC charge-discharge circuit power to piezoelectric ceramic after the output series resistance of described Current amplifier electricity with piezoelectric ceramic.
Beneficial effect of the present invention: the drive amplification circuit of piezoelectric ceramic of the present invention, is made up of Differential input circuit, voltage amplifier circuit and current amplification circuit, it proposes according to the design philosophy of amplifier, structure is simple, it is convenient to apply, and has flexibility strong, low cost and other advantages.The present invention adopts discrete electronic device to realize driver circuit for piezoelectric ceramics, design philosophy according to amplifier devises the operational amplifier of high voltage supply, the operational amplifier of this high voltage supply possesses the ability driving High Precision Piezoelectric Ceramic, circuit application is convenient simultaneously, and effectively reduces cost.
Accompanying drawing explanation
Fig. 1 is the structural representation that device is put in the driving of described piezoelectric ceramic of the present invention;
Fig. 2 is the circuit theory schematic diagram of the drive amplification circuit of piezoelectric ceramic of the present invention;
Fig. 3 is model and the application principle figure in circuit of drive amplification circuit of the present invention;
The principle schematic that device is applied to voltage resolution test is put in the driving of piezoelectric ceramic of the present invention by Fig. 4;
The result schematic diagram that device is applied to the display of voltage resolution test scope is put in the driving of piezoelectric ceramic of the present invention by Fig. 5.
Embodiment
Embodiment one, composition graphs 1 and Fig. 2 illustrate present embodiment, a kind of drive amplification circuit of piezoelectric ceramic, described driver circuit for piezoelectric ceramics is an operational amplifier from external interface, it has the whole interface of general-purpose operation amplifier, its also identity of operation amplifier in using method; As shown in Figure 1, its inside is made up of Differential input circuit, voltage amplifier circuit and current amplification circuit its block diagram realized; Differential input circuit is made up of transistor high-precision, and voltage amplifier circuit uses high-voltage three-pole pipe composition, and the push-pull current amplifying circuit that current amplification circuit is made up of metal-oxide-semiconductor realizes; Last series resistance and piezoelectric ceramic form RC charge-discharge circuit and power to piezoelectric ceramic.
Composition graphs 2 illustrates present embodiment, described Differential input circuit adopts difference channel structure, the constant-current source of difference channel uses depletion type MOS tube to realize, the source class series resistance R6 of metal-oxide-semiconductor is finally connected on negative voltage source VSS, the grid of metal-oxide-semiconductor is directly connected on negative voltage source VSS, and the drain electrode of metal-oxide-semiconductor is as the output of constant-current source circuit, differential pair tube Q1 is as the core of Differential input circuit, divide the emitter of transistor Q1_A with Q1_B to link together finally to be connected with the output of constant-current source, the base stage of two points of transistor Q1_A and Q1_B of Q1 respectively as Differential input circuit in the same way and reverse input end, the collector electrode of two points of transistor Q1_A with Q1_B is connected the emitter of high voltage transistor Q2 and Q3 respectively, the base stage of high voltage transistor Q2 and Q3 links together, their collector electrode is connected to mirror current source two outputs, simultaneously their collector electrode also become Differential input circuit in the same way and inverse output terminal, wherein the collector electrode of Q2 is as inverse output terminal, the collector electrode of Q3 is as output in the same way, mirror current source uses mirror current source to realize pipe Q4, the collector electrode of two triode Q4_A with Q4_B of Q4 is connected with the collector electrode of Q2 and Q3 respectively as two outputs of mirror current source, the base stage of triode Q4_A with Q4_B links together and is connected with the collector electrode of Q4_A, and their emitter-base bandgap grading respectively series resistor R1 and R2 is finally connected on positive voltage source VCC, for ensureing that stable R3 and D1 of use of the quiescent point of circuit forms quiescent point stabilizing circuit, in circuit, R3 one end is connected with positive voltage source VCC, the output of the constant-current source formed with Q6 after other end series connection D1 is connected, and one end that D1 and R3 connects is connected to the base stage of Q2 and Q3 as burning voltage output.The voltage amplifier circuit of system with transistor Q5 for core, positive voltage source VCC is connected to after the emitter series connection variable resistor R4 of Q5, the base stage of Q5 is connected to the inverse output terminal of differential amplifier circuit as input, its collector electrode series connection variable resistor R5 is finally connected to constant-current source circuit; Constant-current source circuit is made up of depletion type MOS tube Q7 and R7, and its composing method is identical with Differential input circuit.The current amplification circuit of system with metal-oxide-semiconductor M1 and M2 for core, their drain electrodes are connected to positive voltage source VCC and negative voltage source VSS respectively, grid is then as the two ends being connected on resistance R5 after two input series resistor R8 and R9, the source class of M1 with M2 is connected the output as current amplification circuit, in order to drive piezoelectric ceramic after series resistance R10.
Resistance R1, R2, R3, R6, R7, R8 and R9 described in present embodiment are Chip-R; R10 is powerful resistance; R4, R5 are its resistance variations of variable resistor is 0-10k; D1 is the voltage stabilizing didoe of 4V; IN+ and IN-of circuit is respectively anode and the negative terminal input of amplifying circuit; VCC is that the positive voltage of amplifying circuit is powered, and VSS is that the negative voltage of amplifying circuit is powered, and VOUT is the output of amplifying circuit.
In Circuits System described in present embodiment, differential pair tube Q1 selects SMM2212 as input transistors, Q2 and Q3 is coordinated to form the graceful amplifying circuit in Wal, Q2 and Q3 is CZTA44 high-voltage three-pole pipe, while the high frequency performance ensureing circuit, and output voltage is incremented on the working point of voltage amplifier circuit, using transistor Q4 is BCM62B mirror current source triode composition current mirroring circuit, outstanding symmetrical performance is possessed to transistor Q4 and Q1, ensure that the symmetry of circuit input stage thus, reduce offset error, the current source of Differential input circuit uses depletion type MOS tube Q6 to realize, Q6 is CPC5603 depletion type MOS tube, the size of electric current is realized by adjusting resistance R6.The voltage amplifier circuit of circuit uses the reverse amplification circuit of band constant-current source to realize, use constant-current source as the load of amplifying circuit, effectively increase the multiplication factor of voltage amplifier circuit, resistance R4 is realized by variable resistor, and it is mainly used to the quiescent point adjusting amplifying circuit.The current amplification circuit of circuit adopts push-pull metal-oxide-semiconductor circuit realiration, and circuit is made up of M1 and M2, and described M1 is IXTA10N60P high-voltage MOS pipe, and M2 is IXTH10N60 high-voltage MOS pipe; Metal-oxide-semiconductor possesses higher input resistance, has effectively isolated voltage amplifier circuit and current amplification circuit, and variable resistor R5 is that the quiescent point of current amplification circuit arranges resistance; Piezoelectric ceramic can be equivalent to the electric capacity of a uF rank and the resistor coupled in parallel of M Ω rank on circuit, often there is stability problem in the electric capacity that amplifier Direct driver is large, therefore connect a high-power resistance R10, can effectively reduce the inertia of load, strengthen the stability of system.
The supply power voltage of the drive amplification circuit described in present embodiment is ± 150V, when adjusting resistance R6 and R7 of constant-current source is 1k Ω, the quiescent current of circuit is about 3.5mA, the Open loop gain cofficient of circuit is at more than 60dB, the imbalance performance of circuit and the basically identical to transistor of prime, the noise of circuit is little, and its voltage resolution exported is better than 10mV.
Embodiment two, composition graphs 1 to Fig. 5 illustrate present embodiment, and present embodiment is the Application Example of the drive amplification circuit of a kind of piezoelectric ceramic described in embodiment one:
Composition graphs 1 and Fig. 2, the first Differential input circuit of welding circuit, will in the same way with reverse input end ground connection; R6 accesses the resistance of 1k, R1 and R2 accesses the resistance of 2k, and measuring the voltage obtaining resistance two ends is 1.8V, and output has voltage to export; On the basis of previous step, the voltage amplifier circuit of welding circuit; In the same way with reverse input end ground connection, R7 accesses the resistance of 1k; The resistance of adjustment R4, makes the resistance value of R4 be the half of R1; The resistance of adjustment R5, makes the voltage at R5 two ends be 6V.Finally, the third level of welding circuit, R10 is the high-power resistance in 20 Europe.
Composition graphs 3, Fig. 4 and Fig. 5 illustrate the occupation mode of circuit.The Piezoelectric Ceramic amplifying circuit application in circuit of design is general as shown in Figure 3, feedback resistance R11, R12 and R13 in circuit choose suitable resistance, C1 gets 5pF built-up circuit, input weak signal, just can amplify input signal and drives piezoelectric ceramic by applying high voltage amplifying circuit.Wherein: R12 is balance resistance, the parallel connection value that its value equals R11 and R13 is equal; The multiplication factor of R11 and R13 adjustment System; C1 is feedback compensation electric capacity, and capacitance is between 1pF ~ 100pF; High voltage source needs the ability possessing positive and negative dual service.
Composition graphs 4 and Fig. 5 illustrate present embodiment, Fig. 4 and Fig. 5 is that circuit application illustrates in the test of piezoelectric ceramic.In Piezoelectric Ceramic, the index paid close attention to is the resolution of output voltage.The Piezoelectric Ceramic Design of Amplification Circuit of Fig. 4 application design amplifying circuit of multiplication factor 16 times, the high pressure positive-negative power of circuit is respectively ± 150V, feedback resistance R13=150k Ω, R11 and R12 use 10k Ω resistance, and building-out capacitor C1 gets 5pF and constitutes drive power supply for piezoelectric ceramics; The DA chip PCM1702U of 20 is used to form wave generator circuit, there is the square wave of uV rank, by in second order Butterworth filter input drive power supply for piezoelectric ceramics, the waveform of piezoelectric ceramic terminal voltage waveform and input signal is observed by oscilloscope, its oscillogram as shown in Figure 5, known according to test result, the output voltage resolution of the piezoelectric ceramics power supply of design is within 10mV.

Claims (6)

1. a drive amplification circuit for piezoelectric ceramic, is made up of Differential input circuit, voltage amplifier circuit and current amplification circuit; It is characterized in that, the output of described Differential input circuit is connected with the input of voltage amplifier circuit, the output of voltage amplifier circuit is connected with the input of current amplification circuit, forms RC charge-discharge circuit power to piezoelectric ceramic after the output series resistance of described Current amplifier electricity with piezoelectric ceramic.
2. the drive amplification circuit of a kind of piezoelectric ceramic according to claim 1, it is characterized in that, described Differential input circuit is made up of depletion type MOS tube Q6, resistance R6, the differential pair tube Q1, high voltage transistor Q2 and Q3 that are made up of point transistor Q1_A and point transistor Q1_B, the current source triode Q4, resistance R1, resistance R2, resistance R3 and the diode D1 that are made up of triode Q4_A and triode Q4_B; Described voltage amplifier circuit is made up of variable resistor R4, variable resistor R5, triode Q5, depletion type MOS tube Q7 and R7; Described current amplification circuit is made up of high-voltage MOS pipe M1, high-voltage MOS pipe M2, resistance R8, resistance R9 and resistance R10.
3. the drive amplification circuit of a kind of piezoelectric ceramic according to claim 2, it is characterized in that, the source series resistance R6 of described depletion type MOS tube Q6 is as the constant-current source of Differential input circuit, described point of transistor Q1_A is connected with the emitter of point transistor Q1_B and is connected with the output of constant-current source, the base stage of differential pair tube Q1_A and Q1_B respectively as the input in the same way of Differential input circuit and reverse input end, point transistor Q1_A and divide the collector electrode of transistor Q1_B to be connected the emitter of high voltage transistor Q2 and Q3 respectively; Described high voltage transistor Q2 is connected with high voltage transistor Q3 base stage, collector electrode connects the collector electrode of current source triode Q4_A and Q4_B respectively, the collector electrode of described high voltage transistor Q2 is as the inverse output terminal of Differential input circuit, and the collector electrode of high voltage transistor Q3 is as the output in the same way of Differential input circuit; Be connected with the collector electrode of triode Q4_A after the base stage of described current source triode Q4_A with Q4_B is connected, the emitter of described current source triode Q4_A and Q4_B respectively series resistor R1 and R2 is finally connected on positive voltage source VCC; One end of described resistance R3 is connected with positive voltage source VCC, the output of the constant-current source formed with depletion type MOS tube Q6 after other end series diode D1 is connected, and one end that described diode D1 is connected with resistance R3 is connected to the base stage of high voltage transistor Q2 and high voltage transistor Q3 as burning voltage output.
4. the drive amplification circuit of a kind of piezoelectric ceramic according to claim 2, it is characterized in that, be connected with positive voltage source VCC after the emitter series connection variable resistor R4 of described transistor Q5, the base stage of described transistor Q5 is connected with the inverse output terminal of Differential input circuit as input, the collector electrode series connection variable resistor R5 of transistor Q5 is connected with the output of depletion type MOS tube Q7, and the source series R7 of described depletion type MOS tube Q7 is as the constant-current source of voltage amplifier circuit.
5. the drive amplification circuit of a kind of piezoelectric ceramic according to claim 2, it is characterized in that, described high-voltage MOS pipe M1 is connected with negative voltage source VSS with positive voltage source VCC respectively with the drain electrode of high-voltage MOS pipe M2, grid is respectively as the two ends being connected on variable resistor R5 after input series resistor R8 and R9 of voltage amplifier circuit, described high-voltage MOS pipe M1 is connected with the source class of high-voltage MOS pipe M2 and as the output of current amplification circuit, simultaneously described output connect with resistance R10 after for driving piezoelectric ceramic.
6. the drive amplification circuit of a kind of piezoelectric ceramic according to claim 2, it is characterized in that, described point of transistor Q1_A and Q1_B selects model to be the transistor of SMM2212, high voltage transistor Q2 and Q3 selection model is the high-voltage three-pole pipe of CZTA44, current source triode Q4_A and Q4_B selection model is the mirror current source triode of BCM62B, triode Q5 is FZT560 high-voltage three-pole pipe, depletion type MOS tube Q6 and Q7 is CPC5603 depletion type MOS tube, and high-voltage MOS pipe M1 and M2 is respectively IXTA10N60P and IXTH10N60 high-voltage MOS pipe; Resistance R1 to resistance R3, resistance R6 to R9 are Chip-R; Resistance R10 is powerful resistance.
CN201410441037.8A 2014-09-01 2014-09-01 A kind of drive amplification circuit of piezoelectric ceramics Expired - Fee Related CN104242842B (en)

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108336980A (en) * 2018-02-06 2018-07-27 深圳先进技术研究院 A kind of power amplifier
CN111211744A (en) * 2020-01-09 2020-05-29 苏州大学 Amplifier for inertial stick-slip drive circuit

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Publication number Priority date Publication date Assignee Title
CN101599715A (en) * 2009-06-25 2009-12-09 天津大学 Dynamic bipolar drive power supply for piezoelectric ceramics and implementation method

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Publication number Priority date Publication date Assignee Title
CN101599715A (en) * 2009-06-25 2009-12-09 天津大学 Dynamic bipolar drive power supply for piezoelectric ceramics and implementation method

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Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108336980A (en) * 2018-02-06 2018-07-27 深圳先进技术研究院 A kind of power amplifier
CN108336980B (en) * 2018-02-06 2021-10-29 深圳先进技术研究院 Power amplifier
CN111211744A (en) * 2020-01-09 2020-05-29 苏州大学 Amplifier for inertial stick-slip drive circuit

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