CN104241415A - Graphene/gallium arsenide solar cell and manufacturing method thereof - Google Patents

Graphene/gallium arsenide solar cell and manufacturing method thereof Download PDF

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Publication number
CN104241415A
CN104241415A CN201410456736.XA CN201410456736A CN104241415A CN 104241415 A CN104241415 A CN 104241415A CN 201410456736 A CN201410456736 A CN 201410456736A CN 104241415 A CN104241415 A CN 104241415A
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graphene
gallium arsenide
solar cell
layer
arsenide solar
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林时胜
李晓强
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Zhejiang University ZJU
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Zhejiang University ZJU
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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/0248Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies
    • H01L31/0352Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies characterised by their shape or by the shapes, relative sizes or disposition of the semiconductor regions
    • H01L31/035272Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies characterised by their shape or by the shapes, relative sizes or disposition of the semiconductor regions characterised by at least one potential jump barrier or surface barrier
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/04Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices
    • H01L31/06Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices characterised by potential barriers
    • H01L31/072Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices characterised by potential barriers the potential barriers being only of the PN heterojunction type
    • H01L31/0725Multiple junction or tandem solar cells
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/18Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02EREDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E10/00Energy generation through renewable energy sources
    • Y02E10/50Photovoltaic [PV] energy
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02PCLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P70/00Climate change mitigation technologies in the production process for final industrial or consumer products
    • Y02P70/50Manufacturing or production processes characterised by the final manufactured product

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Abstract

The invention relates to a graphene/gallium arsenide solar cell and a manufacturing method thereof. The graphene/gallium arsenide solar cell comprises a back face electrode, an n-type doped or p-type doped gallium arsenide layer, a graphene layer and front face electrodes from top to bottom in sequence, wherein one to 10 layers of graphene is arranged. The manufacturing method comprises the steps that firstly, the back face electrode is manufactured on one face of a gallium arsenide piece; secondly, surface chemical cleaning and drying are conducted; thirdly, the graphene is transferred to the other face of the gallium arsenide piece; fourthly, the front face electrodes are manufactured on the graphene. According to the graphene/gallium arsenide solar cell, the high carrier mobility, the high light transmission and the high conductivity of graphene materials are used, the excellent semiconductor property of gallium arsenide is combined, and thus the solar cell high in conversion efficiency can be easily manufactured on the basis of low cost and the simple technology.

Description

A kind of Graphene/gallium arsenide solar cell and manufacture method thereof
Technical field
The present invention relates to a kind of solar cell and manufacture method thereof, particularly relate to a kind of Graphene/gallium arsenide solar cell and manufacture method thereof, belong to technical field of solar.
Background technology
In recent years, solar cell just plays more and more important effect as a kind of new green power in the sustainable development of the mankind.Wherein, silica-based solar cell, the particularly share of crystal-silicon solar cell occuping market ~ 90%.But compared with conventional power generation usage, solar cell cost of electricity-generating is still higher, limits large-area applications.One of reason that solar cell cost of electricity-generating is higher is that battery manufacture cost is higher, and another one main cause is that its electricity conversion is lower.
Since grapheme material 2004 first by stable preparing after, increasing research finds that grapheme material has excellent electricity, optical property, as high carrier mobility, Young's modulus etc. that high printing opacity is new, high.The character of these uniquenesses makes Graphene likely be widely used in field of photovoltaic power generation.At present, the heterojunction that existing researcher utilizes Graphene and silicon materials to be formed makes solar cell, records the highest transformation efficiency 14.5%.This efficiency become to produce efficiency 18.5% ~ 20.0% with current crystal-silicon solar cell monocrystalline silicon main flow compared with also lower.Corresponding solar cell application, silicon materials energy gap is narrower, is indirect forbidden band simultaneously, is not optimal basic material.GaAs has more suitable energy gap, is also direct band gap material, also has the carrier mobility higher than silicon simultaneously, and therefore, space-efficient rate solar cell generally adopts GaAs material manufacture.But traditional gallium arsenide solar cell complicated process of preparation, with high costs, be difficult to obtain and promote on a large scale.
Summary of the invention
The object of the present invention is to provide that a kind of electricity conversion is high, technique is simple and lower-cost Graphene/gallium arsenide solar cell and manufacture method thereof.
Graphene/gallium arsenide solar cell of the present invention has gallium arsenide layer, graphene layer and the front electrode that backplate, N-shaped adulterate or p-type is adulterated from bottom to top successively, and wherein the Graphene of graphene layer is 1 ~ 10 layer.
The preparation method of Graphene/gallium arsenide solar cell of the present invention, comprises the steps:
1) backplate is made in the one side of the gallium arsenide film that N-shaped adulterates or p-type is adulterated; Then put into chemical cleaning solution immersion and carry out surface clean in 1 ~ 30 minute, dry up after taking-up;
2) Graphene is transferred on another face of above-mentioned gallium arsenide film;
3) on Graphene, front electrode is made.
Graphene described in technique scheme can be 1 ~ 10 layer.
Step 1) described in chemical cleaning solution can be HCl, HNO 3, H 2sO 4, KOH or NaOH the aqueous solution.
Described backplate can be gold, palladium, silver, titanium, copper, platinum, chromium, nickel, ITO(tin indium oxide) and AZO(aluminium-doped zinc oxide) in the combination electrode of one or more.
Described front electrode also can be gold, palladium, silver, titanium, copper, platinum, chromium, nickel, ITO(tin indium oxide) and AZO(aluminium-doped zinc oxide) in the combination electrode of one or more.
The beneficial effect that the present invention has compared with background technology is:
Compared to graphene/silicon solar cell, Graphene/gallium arsenide solar cell of the present invention utilizes the high carrier mobility of grapheme material, high light transmittance and high conductivity, and is conducive to obtaining higher open circuit voltage and transformation efficiency due to the impact of Graphene/GaAs band structure; And the preparation technology of Graphene/gallium arsenide solar cell of the present invention is simple, cost is lower, is conducive to commercial application.
Accompanying drawing explanation
Fig. 1 is the schematic diagram of Graphene/gallium arsenide solar cell;
Fig. 2 be Graphene/GaAs (N-shaped doping) solar cell can be with schematic diagram.
Embodiment
The present invention is further illustrated below in conjunction with accompanying drawing.
With reference to Fig. 1, Graphene/gallium arsenide solar cell of the present invention has gallium arsenide layer 2, graphene layer 3 and the front electrode 4 that backplate 1, N-shaped adulterate or p-type is adulterated from bottom to top successively, and wherein the Graphene of graphene layer is 1 ~ 10 layer.
Embodiment 1:
1) electron-beam vapor deposition method deposited gold electrode is utilized in the one side of the gallium arsenide film of N-shaped doping; Then immerse in the NaOH aqueous solution of mass concentration 10% and carry out surface clean in 1 minute, take out afterwards and dry up;
2) single-layer graphene is transferred on another face of the gallium arsenide film of surface cleaning;
3) on Graphene, utilize thermal evaporation process depositing silver electrode, obtain Graphene/gallium arsenide solar cell.
The schottky junction that the general principle of the Graphene/gallium arsenide solar cell finally obtained is formed based on Graphene and GaAs, Graphene as shown in Figure 2/N-shaped undoped gallium arsenide solar cell schematic diagram can be with visible, GaAs has suitable energy gap and converts solar energy into electrical energy, the work function of Graphene is greater than the work function of the GaAs of N-shaped doping, will form schottky junction when two materials contact, junction barrier is determined by the difference of the work function of two materials.
Embodiment 2:
1) magnetron sputtering deposition palladium electrode is utilized in the one side of the gallium arsenide film of p-type doping; Then immerse in the HCl aqueous solution of mass concentration 20% and carry out surface clean in 15 minutes, take out afterwards and dry up;
2) 10 layer graphenes are transferred on another face of the gallium arsenide film of surface cleaning;
4) on Graphene, utilize thermal evaporation process nickel deposited electrode, obtain Graphene/gallium arsenide solar cell.
Embodiment 3:
1) pulsed laser deposition chromium/Ti electrode is utilized in the one side of the gallium arsenide film of N-shaped doping; Then the HNO of mass concentration 10% is immersed 3within in the aqueous solution 30 minutes, carry out surface clean, take out afterwards and dry up;
2) 2 layer graphenes are transferred on another face of the gallium arsenide film of surface cleaning;
3) silk screen printing silver electrode on Graphene, obtains Graphene/gallium arsenide solar cell.
Embodiment 4
1) thermal evaporation process deposition chromium/gold electrode is utilized in the one side of the gallium arsenide film of N-shaped doping; Then the H of mass concentration 10% is immersed 2sO 4within in the aqueous solution 20 minutes, carry out surface clean, take out afterwards and dry up;
2) 6 layer graphenes are transferred on another face of the gallium arsenide film of surface cleaning;
3) magnetron sputtering titanium/nickel electrode on Graphene, obtains Graphene/gallium arsenide solar cell.
Embodiment 5
1) magnetron sputtering deposition copper/ITO electrode is utilized in the one side of the gallium arsenide film of N-shaped doping; Then immerse in the KOH aqueous solution of mass concentration 10% and carry out surface clean in 20 minutes, take out afterwards and dry up;
2) 8 layer graphenes are transferred on another face of the gallium arsenide film of surface cleaning;
3) magnetron sputtering AZO/ platinum electrode on Graphene, obtains Graphene/gallium arsenide solar cell.
Embodiment 6
1) magnetron sputtering deposition AZO/ platinum electrode is utilized in the one side of the gallium arsenide film of N-shaped doping; Then immerse in the HCl aqueous solution of mass concentration 30% and carry out surface clean in 10 minutes, take out afterwards and dry up;
2) single-layer graphene is transferred on another face of the gallium arsenide film of surface cleaning;
3) magnetron sputtering copper/ITO electrode on Graphene, obtains Graphene/gallium arsenide solar cell.

Claims (6)

1. Graphene/gallium arsenide solar cell, it is characterized in that there be gallium arsenide layer (2), graphene layer (3) and the front electrode (4) that backplate (1), N-shaped adulterate or p-type is adulterated from bottom to top successively, wherein the Graphene of graphene layer (3) is 1 ~ 10 layer.
2. prepare the method for Graphene/gallium arsenide solar cell as claimed in claim 1, it is characterized in that comprising the steps:
1) backplate is made in the one side of the gallium arsenide film that N-shaped adulterates or p-type is adulterated; Then put into chemical cleaning solution immersion and carry out surface clean in 1 ~ 30 minute, dry up after taking-up;
2) Graphene is transferred on another face of above-mentioned gallium arsenide film;
3) on Graphene, front electrode is made.
3. the preparation method of Graphene/gallium arsenide solar cell according to claim 2, is characterized in that described Graphene is 1 ~ 10 layer.
4. the preparation method of Graphene/gallium arsenide solar cell according to claim 2, is characterized in that described backplate is the combination electrode of one or more in gold, palladium, silver, titanium, copper, platinum, chromium, nickel, ITO and AZO.
5. the preparation method of Graphene/gallium arsenide solar cell according to claim 2, is characterized in that described chemical cleaning solution is HCl, HNO 3, H 2sO 4, KOH or NaOH the aqueous solution.
6. the preparation method of Graphene/gallium arsenide solar cell according to claim 2, is characterized in that described front electrode is the combination electrode of one or more in gold, palladium, silver, titanium, copper, platinum, chromium, nickel, ITO and AZO.
CN201410456736.XA 2014-09-10 2014-09-10 Graphene/gallium arsenide solar cell and manufacturing method thereof Pending CN104241415A (en)

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Cited By (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104576804A (en) * 2014-12-29 2015-04-29 浙江大学 Graphene/indium phosphide solar cell and preparation method thereof
CN104576787A (en) * 2014-12-29 2015-04-29 浙江大学 Electric field controlled graphene/gallium arsenide solar cell and preparation method thereof
CN104779315A (en) * 2015-04-08 2015-07-15 浙江大学 Graphene/indium phosphide photoelectric detector and preparation method thereof
CN106409988A (en) * 2016-12-09 2017-02-15 中国科学院微电子研究所 Preparation method of graphene/gallium arsenide solar cell
CN106449790A (en) * 2016-12-09 2017-02-22 中国科学院微电子研究所 Graphene/gallium arsenide solar cell
CN107437568A (en) * 2016-05-26 2017-12-05 中国科学院物理研究所 A kind of photovoltaic devices and a kind of method for producing photovoltaic effect
WO2019227825A1 (en) * 2018-05-30 2019-12-05 华南理工大学 High-performance quantum dot intermediate band graphene-schottky junction solar cell and preparation thereof
CN110783423A (en) * 2019-09-09 2020-02-11 浙江大学 Graphene/aluminum oxide/gallium arsenide terahertz detector and manufacturing method thereof
CN113690341A (en) * 2021-07-26 2021-11-23 华南理工大学 Graphene/gallium arsenide solar cell with array micro-nano lens structure and preparation method thereof
CN114373865A (en) * 2021-12-14 2022-04-19 华南理工大学 perovskite/GaAs unijunction hybrid solar cell and preparation method thereof

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CN204230261U (en) * 2014-09-10 2015-03-25 浙江大学 A kind of Graphene/gallium arsenide solar cell

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CN103311323A (en) * 2013-06-21 2013-09-18 杭州格蓝丰纳米科技有限公司 Graphene/silicon solar cell and manufacturing method thereof
CN204230261U (en) * 2014-09-10 2015-03-25 浙江大学 A kind of Graphene/gallium arsenide solar cell

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Cited By (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104576787A (en) * 2014-12-29 2015-04-29 浙江大学 Electric field controlled graphene/gallium arsenide solar cell and preparation method thereof
CN104576804A (en) * 2014-12-29 2015-04-29 浙江大学 Graphene/indium phosphide solar cell and preparation method thereof
CN104576787B (en) * 2014-12-29 2017-03-22 浙江大学 Electric field controlled graphene/gallium arsenide solar cell and preparation method thereof
CN104779315A (en) * 2015-04-08 2015-07-15 浙江大学 Graphene/indium phosphide photoelectric detector and preparation method thereof
CN107437568A (en) * 2016-05-26 2017-12-05 中国科学院物理研究所 A kind of photovoltaic devices and a kind of method for producing photovoltaic effect
CN107437568B (en) * 2016-05-26 2019-04-05 中国科学院物理研究所 A kind of photovoltaic devices and a kind of method for generating photovoltaic effect
CN106409988A (en) * 2016-12-09 2017-02-15 中国科学院微电子研究所 Preparation method of graphene/gallium arsenide solar cell
CN106409988B (en) * 2016-12-09 2018-02-02 中国科学院微电子研究所 Preparation method of graphene/gallium arsenide solar cell
CN106449790A (en) * 2016-12-09 2017-02-22 中国科学院微电子研究所 Graphene/gallium arsenide solar cell
WO2019227825A1 (en) * 2018-05-30 2019-12-05 华南理工大学 High-performance quantum dot intermediate band graphene-schottky junction solar cell and preparation thereof
CN110783423A (en) * 2019-09-09 2020-02-11 浙江大学 Graphene/aluminum oxide/gallium arsenide terahertz detector and manufacturing method thereof
CN113690341A (en) * 2021-07-26 2021-11-23 华南理工大学 Graphene/gallium arsenide solar cell with array micro-nano lens structure and preparation method thereof
CN114373865A (en) * 2021-12-14 2022-04-19 华南理工大学 perovskite/GaAs unijunction hybrid solar cell and preparation method thereof
CN114373865B (en) * 2021-12-14 2023-08-22 华南理工大学 perovskite/GaAs single junction hybrid solar cell and preparation method thereof

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Application publication date: 20141224