CN104201142B - Mechanical arm and vacuum reaction device - Google Patents
Mechanical arm and vacuum reaction device Download PDFInfo
- Publication number
- CN104201142B CN104201142B CN201410320518.3A CN201410320518A CN104201142B CN 104201142 B CN104201142 B CN 104201142B CN 201410320518 A CN201410320518 A CN 201410320518A CN 104201142 B CN104201142 B CN 104201142B
- Authority
- CN
- China
- Prior art keywords
- connecting plate
- mechanical hand
- thimble
- gripper shoe
- rotary shaft
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
- H01L21/67742—Mechanical parts of transfer devices
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67155—Apparatus for manufacturing or treating in a plurality of work-stations
- H01L21/67196—Apparatus for manufacturing or treating in a plurality of work-stations characterized by the construction of the transfer chamber
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
- H01L21/68707—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a robot blade, or gripped by a gripper for conveyance
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Robotics (AREA)
- Manipulator (AREA)
Abstract
The invention discloses a mechanical arm and vacuum reaction device, relates to the technical field of semiconductor manufacturing devices, and solves the problem that vacuum reaction devices are low in production efficiency. The mechanical arm comprises a rotating shaft, a first support plate fixedly connected to the rotating shaft, a first connecting plate installed on the first support plate in a sliding manner, and two second support plates fixedly connected to the first connecting plate, wherein a second connecting plate is correspondingly arranged on each second support plate, each second connecting plate can rotate in a horizontal plane, each second connecting plate is provided with an arm, and each arm includes a plurality of branches that are installed on the corresponding second connecting plate in a sliding manner for holding plate-like products, can synchronously and horizontally move with respect to the corresponding second connecting plate. The vacuum reaction device comprises the abovementioned at least one mechanical arm. According to the mechanical arm provided by the invention, production efficiency of the vacuum reaction device is improved.
Description
Technical field
The present invention relates to semiconductor manufacturing facility technical field, more particularly, to a kind of mechanical hand and vacuum response equipment.
Background technology
At present, in semiconductor manufacturing industry, the vacuum response equipment that used all include a vacuum transition chamber, one
Transfer chamber and at least one reaction chamber, wherein, transfer chamber is connected with vacuum transition chamber and each reaction chamber respectively, is passing
Send and in chamber, be provided with mechanical hand, using this mechanical hand can achieve plate-like product such as substrate vacuum transition chamber and each reaction chamber it
Between turnover.And traditional mechanical hand mostly is the mechanical hand carrying out carrying substrate by the way of absorption, including：It is provided with adsorbent equipment
Arm, the vacuum extractor connecting with adsorbent equipment, and being in transmission connection driving means with arm；Permissible by driving means
Realize arm in the elevating movement of vertical direction and movement in the horizontal direction and rotary motion, by adsorbent equipment and evacuation
Device can draw substrate, such that it is able to by board carrying to specified location.But, there is following defect in above-mentioned mechanical hand：When
Vacuum extractor breaks down or during unexpected power-off, and adsorbed substrate will drop, especially when substrate is frangible glass
The damage amount of substrate during substrate, can be increased, and then increase production cost.
For solving the above problems, technological means more common at present are to adopt the machine carrying plate-like product in the way of holding
Tool handss, the arm because of this mechanical hand carrys out carrying substrate in the way of holding up, thus avoiding unexpected power-off or vacuum extractor to occur
During fault, substrate drops from holding formula mechanical hand, reduces the damage amount of substrate, thus saving production cost.
However, present inventor finds：Although most of technique needs can be met using above-mentioned mechanical hand, at certain
Under specific technological requirement, then function is limited a bit.For example, when a certain position of substrate occur bad, need by substrate in the horizontal plane
Rotate 180 ° to verify when whether the same position of this substrate there is also above-mentioned bad, by existing holding formula mechanical hand
The space size of structure and reaction chamber limits, and does not enable substrate in level using this holding formula mechanical hand in reaction chamber
Rotation in surface, at this time, it may be necessary to by another one slewing, that is, needs to take out this substrate in reaction chamber and is placed on this
After slewing carries out rotating 180 °, recycle holding formula mechanical hand this substrate is put in reaction chamber, so increased into
The time of this technique of row, have a strong impact on the production efficiency of vacuum response equipment, and, the increase of all number of times of substrate, also can
Increase the spoilage of substrate, and then increase production cost.
Content of the invention
It is an object of the invention to provide a kind of mechanical hand and vacuum response equipment, for improving the life of vacuum response equipment
Produce efficiency.
To achieve these goals, the present invention provides following technical scheme：
A kind of mechanical hand, is arranged in the transfer chamber of vacuum response equipment, including：
The rotary shaft being vertically arranged；
It is fixedly mounted on the first gripper shoe in described rotary shaft, described first gripper shoe can be in the drive of described rotary shaft
Under rotate around described rotary shaft and move up and down in vertical direction；
Be slidably mounted in described first gripper shoe, can the first connection that moved horizontally of relatively described first gripper shoe
Plate；
It is fixedly mounted on two the second gripper shoes on described first connecting plate, described two second gripper shoes set relatively
Put, and two described second gripper shoe projection coincidences in the horizontal plane respectively；
Two second connecting plates one-to-one with described two second gripper shoes, it is right that each described second connecting plate is located at
The top of described second gripper shoe answered, each described second connecting plate centrally through a pivotal part and corresponding described
Two gripper shoe pivot joints, each described second connecting plate can rotate in the horizontal plane around described pivotal part；
One-to-one two arms of second connecting plate described with two, each described arm includes producing for holding tabular
Several branches of product, described several branches are slidably mounted on corresponding described second connecting plate, and can this second connection relatively
Plate synchronizes and moves horizontally.
Preferably, each described pivotal part is spherical hinge structure, and the ball seat of described spherical hinge structure is fixedly mounted on corresponding institute
State in the second gripper shoe, the multi-directional ball of described spherical hinge structure rolls the appearance ball at the center being arranged on corresponding described second connecting plate
In hole；
Each described second gripper shoe region relative with corresponding described second connecting plate is provided with least three first tops
Pin, described at least three first thimbles are uniformly arranged in the circular trace with the center of described second connecting plate as the center of circle.
It is preferred that each described second gripper shoe is provided with several pilot holes, each described first thimble is corresponding interspersed
In a described pilot hole；
Each described first thimble is each connected with first thimble driving means, and each described first thimble can be each right
The described first thimble driving means answered carry out elevating movement, to adjust the level of corresponding described second connecting plate under driving
Degree.
Alternatively, the upper surface of described first gripper shoe is provided with several first guide frames being parallel to each other, and described number
Individual first guide frame is horizontally disposed, and described first connecting plate is slidably mounted on each described first guide frame；
The upper surface of each described second connecting plate is provided with several second guide frames being parallel to each other, and described several
Two guide frames are horizontally disposed, and each described branch is slidably mounted on each described the of corresponding described second connecting plate
On two guide frames.
Preferably, each described first guide frame is del guide rail, inverted trapezoidal guide rail, positive T-rail or positive three
Angular gathering sill, trapezoid gathering sill, inverted T-shaped gathering sill, each described second guide frame is del guide rail, inverted trapezoidal
Guide rail, positive T-rail or equilateral triangle gathering sill, trapezoid gathering sill, inverted T-shaped gathering sill.
The present invention additionally provides a kind of vacuum response equipment simultaneously, including：Vacuum transition chamber and several reaction chamber, and
The transfer chamber being connected with described vacuum transition chamber and each described reaction chamber respectively, wherein, be provided with described transfer chamber to
The mechanical hand that a few technique scheme is carried.
Preferably, it is provided with several described mechanical hands in described transfer chamber, each described mechanical hand is sequentially overlapped from bottom to up
Setting, the rotary shaft of each described mechanical hand is columnar structured, each described rotating shaft coaxle heart, described machinery above
The rotary shaft of handss is interspersed in the rotary shaft of underlying described mechanical hand and can relatively rotate.
Further, above-mentioned vacuum response equipment also includes：
It is each provided with a thimble group for plate-like product is taken off from described mechanical hand, often in each described reaction chamber
Individual described thimble group includes multiple second thimbles, and is provided with for detecting this second thimble in the upper end of each described second thimble
The sensor of the distance to described plate-like product for the upper end；
The controller being connected with each described sensor and described first thimble driving means signal respectively, described controller root
The detection information fed back according to each described sensor, controls each described first thimble to enter by each described first thimble driving means
Row elevating movement, to adjust the levelness of corresponding described second connecting plate.
In the mechanical hand that the present invention provides, this mechanical hand can be made to pivot about with rotary shaft using rotary shaft
Motion, is had enough to meet the need between vacuum transition chamber and each reaction chamber with carrying plate-like product, can also utilize the liter of rotary shaft simultaneously
Fall is moved and to be adjusted the height of plate-like product relative response cavity bottom or vacuum transition cavity bottom；And stretch into instead in mechanical hand
When answering in chamber, when needing the plate-like product in reaction chamber rotates to an angle to verify processing quality, must not be by plate
Shape product takes out from reaction chamber, can achieve the spin of plate-like product using the rotation in the horizontal plane of the second connecting plate
Turn, with prior art in need to take out plate-like product from reaction chamber and remove again after other slewing rotates
Enter in reaction chamber and compare, save and will take out in plate-like product reaction chamber and move into the turnaround time in reaction chamber again,
Thus improve the production efficiency of vacuum response equipment.Additionally, taking out in substrate reaction chamber and move into anti-again because eliminating
Answer the circular flow in chamber, such that it is able to the spoilage of substrate, and then save production cost.
Brief description
Accompanying drawing described herein is used for providing a further understanding of the present invention, constitutes the part of the present invention, this
Bright schematic description and description is used for explaining the present invention, does not constitute inappropriate limitation of the present invention.In the accompanying drawings：
Fig. 1 is the front view of mechanical hand provided in an embodiment of the present invention；
Fig. 2 is the top view of mechanical hand in Fig. 1；
Fig. 3 is the structural representation of the second gripper shoe in Fig. 1；
Fig. 4 is the assembling relationship figure in Fig. 1 between the second connecting plate and each branch of arm；
Fig. 5 is the top view after 45 ° of the second connecting plate spinning of mechanical hand in Fig. 1；
Fig. 6 is the top view after 180 ° of the second connecting plate spinning of mechanical hand in Fig. 1；
Fig. 7 is the structural representation of multiple mechanical hand superpositions in vacuum response equipment provided in an embodiment of the present invention；
Fig. 8 is the top view of mechanical hand in Fig. 7.
Reference：
10- rotary shaft, 20- first gripper shoe,
21- first guide frame, 30- first connecting plate,
40- second gripper shoe, 41- ball pit,
42- pilot hole, 50- second connecting plate,
51- second guide frame, 60- spherical hinge structure,
70- first thimble, 80- branch,
90- substrate.
Specific embodiment
In order to further illustrate mechanical hand provided in an embodiment of the present invention and vacuum response equipment, attached with reference to description
Figure is described in detail.
Declare first：In describing the invention it is to be understood that term " " center ", " on ", D score, " front ",
" afterwards ", the orientation of instruction such as "left", "right", " vertical ", " level ", " top ", " bottom ", " interior ", " outward " or position relationship be based on
Orientation shown in the drawings or position relationship, are for only for ease of the description present invention and simplify description, rather than instruction or hint institute
The device referring to or element must have specific orientation, with specific azimuth configuration and operation, therefore it is not intended that to this
Bright restriction.
In describing the invention, it should be noted that unless otherwise clearly defined and limited, term " installation ", " phase
Even ", " connection " should be interpreted broadly, for example, it may be being fixedly connected or being detachably connected, or is integrally connected；Can
To be to be mechanically connected or electrical connection；Can be to be joined directly together it is also possible to be indirectly connected to by intermediary, Ke Yishi
The connection of two element internals.For the ordinary skill in the art, above-mentioned term can be understood at this with concrete condition
Concrete meaning in invention.
Mechanical hand provided in an embodiment of the present invention is applied to and picks and places plate-like product, such as substrate, display floater and silicon chip etc., under
Literary composition for convenience, is described taking substrate as a example.
Refer to Fig. 1～Fig. 4, mechanical hand provided in an embodiment of the present invention includes：
The rotary shaft 10 being vertically arranged；
Be fixedly mounted on the first gripper shoe 20 in rotary shaft 10, the first gripper shoe 20 can under the drive of rotary shaft 10 around
Rotary shaft 10 rotates and moves up and down in vertical direction；
The first connecting plate that be slidably mounted in the first gripper shoe 20, can be moved horizontally with respect to the first gripper shoe 20
30；
It is fixedly mounted on two the second gripper shoes 40 on the first connecting plate 30, two the second gripper shoes 40 are oppositely arranged,
And two the second gripper shoe 40 projection coincidences in the horizontal plane respectively；
With two one-to-one two the second connecting plates 50 of the second gripper shoe 40, each second connecting plate 50 is positioned at correspondence
The second gripper shoe 40 top, each the second connecting plate 50 centrally through a pivotal part and corresponding second gripper shoe 40
Pivot joint, each second connecting plate can rotate in the horizontal plane around pivotal part；
With two one-to-one two arms of the second connecting plate 50, each arm includes several for holding substrate 90
Branch 80, several branches 80 are slidably mounted on corresponding second connecting plate 50, and can carry out same with respect to this second connecting plate 50
Step moves horizontally.
When being embodied as, the first gripper shoe 20 is fixedly connected with the upper end of rotary shaft 10, when rotary shaft 10 is in vertical direction
Move up and down or in the horizontal direction around Pivot Point Center rotate when, the first gripper shoe 20 and rotary shaft 10 are synchronously done vertically
The elevating movement in direction and the rotary motion of horizontal direction, and when the first gripper shoe 20 rotates, the first gripper shoe 20
Rotated centered on rotary shaft 10 in the horizontal plane.It is provided with, in the upper surface of the first gripper shoe 20, several first being parallel to each other to lead
To structure 21, and several first guide frame 21 is horizontally disposed；Each first guide frame 21 is specifically as follows guide rail
Or gathering sill is it is preferable that each the first guide frame 21 is del guide rail, inverted trapezoidal guide rail, positive T-rail or positive triangle
Shape gathering sill, trapezoid gathering sill, inverted T-shaped gathering sill, in case sliding stop is arranged on the first connecting plate in the first gripper shoe 20
30 rollovers, to improve the stability of mechanical hand.
The lower end of the first connecting plate 30 is provided with and leading that several first guide frames 21 in the first gripper shoe 20 are adapted
To structure, the first connecting plate 30 is slidably mounted on several first guide frames 21；Solid on one side of the first connecting plate 30
It is provided with about two the second gripper shoes 40 being oppositely arranged, two the second gripper shoes 40 are spaced a distance, and two second
Projection in the horizontal plane overlaps, to reduce the installing space of mechanical hand and to use space, such that it is able to subtract gripper shoe 40 respectively
The volume size of the transfer chamber of little vacuum response equipment.
Corresponding above each second gripper shoe 40 be provided with second connecting plate 50, the second connecting plate 50 and corresponding
The second gripper shoe 40 between pass through a pivotal part pivot joint, and described pivotal part is corresponding with the center of the second connecting plate, second
Connecting plate 50 is rotated centered on described pivotal part in the horizontal direction.Alternatively, above-mentioned pivotal part is rotating shaft, in the second connecting plate
It is respectively equipped with appearance axis hole on 50 two faces relative with the second gripper shoe 40, and the appearance axis hole on the second connecting plate 50 passes through
The center of the second connecting plate 50, the two ends of rotating shaft are respectively inserted in this two and hold in axis hole, and the second connecting plate 50 with rotating shaft can be
Center of rotation rotates in the horizontal direction.
It is provided with several second guide frames 51 being parallel to each other in the upper surface of the second connecting plate 50, and several second guiding
Structure 51 is horizontally disposed；Each second guide frame 51 be specifically as follows guide rail or gathering sill it is preferable that each first
Guide frame 21 is del guide rail, inverted trapezoidal guide rail, positive T-rail or equilateral triangle gathering sill, trapezoid gathering sill, fall
T-shaped gathering sill, please continue to refer to Fig. 4, the second guide frame 51 on the second connecting plate 50 is inverted T-shaped gathering sill, in branch 80
It is provided with inverted T-shaped guide rail, is so designed that, when can prevent arm from sliding on the second connecting plate 50, rollover occurs, such that it is able to carry
The stability of high mechanical hand.
Branch 80 quantity on each arm can select, in the mechanical hand shown in Fig. 2, on arm according to actual needs
Branch 80 quantity is four, and four branches 80 are parallel to each other and arrange at equal intervals.
It is noted that above-mentioned mechanical hand also includes：The rotation axial brake device being connected with rotary shaft 10；With first even
The first connecting plate driving means that fishplate bar 30 is connected；The second connecting plate driving means being connected with the second connecting plate 50, or with institute
State pivotal part to be connected for the second connecting plate driving means driving the second connecting plate 50 to rotate centered on described pivotal part；Point
Be not connected multiple branch drives devices correspondingly with each branch；And respectively with above-mentioned rotation axial brake device, first even
The control device that fishplate bar driving means, the second connecting plate driving means and each branch drives device signal connect.Using rotary shaft
Driving means can drive rotary shaft 10 to carry out elevating movement and rotate around Pivot Point Center；Can be driven using the first connecting plate driving means
Dynamic first connecting plate 30 moves horizontally in the first gripper shoe 20；The second connecting plate can be driven using the second connecting plate driving means
50 rotate in the horizontal plane around described pivotal part；Can be driven on same second connecting plate 50 using each branch drives device
Each branch 80 level of synchronization moves.Control device is by above-mentioned each driving means so that above-mentioned mechanical hand carries out the control of corresponding actions
Principle processed is well known to those skilled in the art, and is not therefore herein described in detail.
When being moved into the substrate 90 in vacuum transition chamber in a reaction chamber using above-mentioned mechanical hand, first, rotate
Axle 10 drive under corresponding rotation axial brake device drives the first gripper shoe 20, the first connecting plate 30, the second gripper shoe 40, the
Two connecting plates 50 and arm unitary rotation so that mechanical hand puts in vacuum transition chamber, with from vacuum transition chamber take out one
Substrate 90；Then, mechanical hand rotates around rotary shaft 10 opposite direction, is also with the elevating movement of rotary shaft 10 to adjust base simultaneously
Plate 90 relative response cavity bottom or the height of vacuum transition cavity bottom, after above-mentioned mechanical hand stretches in reaction chamber, profit
Drive the first connecting plate 30 with the first connecting plate driving means, so that the first connecting plate 30 first gripper shoe 20 level relatively is moved
Dynamic, stop after the first connecting plate 30 moves to setting position；Each branch 80 in the same arm of holding substrate 90 is respective
Synchronous under the driving of corresponding branch drives device move horizontally, after arm moves to setting position, using being arranged on reaction
The ejector pin component of within the chamber, by substrate 90 jack-up, takes off substrate 90 from this arm, and afterwards, each branch 80 in same arm is anti-
Direction level of synchronization moves, and returns to and stops after the initial position on the second connecting plate 50, afterwards, the first connecting plate 30 opposite direction
Move horizontally, return to the initial position in the first gripper shoe 20.It is of course also possible to after moving to setting position when arm,
Make rotary shaft 10 carry out descending motion by rotating axial brake device, substrate 90 be placed on the setting position in reaction chamber,
Then pull out each branch 80 in same arm.
When a certain position of substrate 90 occur bad, need for substrate 90 to horizontally rotate certain angle after, with verify in this base
When whether the same position of plate 90 there is also above-mentioned bad, the second connecting plate driving means are can be utilized to drive the second connecting plate 50
Rotate in the horizontal plane, rotated with each branch 80 and the substrate 90 being located in each branch 80 driving corresponding arm certain
Angle.Before so that substrate 90 is rotated in the horizontal plane by the second connecting plate 50, each branch 80 of same arm will withdraw
To the initial position on the second connecting plate 50, to save rotation space and to guarantee slow-roll stabilization；After rotating set angle, each
Branch 80 also level of synchronization can move, to place a substrate in the setting position of reaction chamber on the second connecting plate 50.
Specifically, Fig. 2, Fig. 5 and Fig. 6 are referred to, before the second connecting plate 50 does not rotate, the labelling angle A position of substrate 90
In position as shown in Figure 2；After the second connecting plate 50 rotates 45° angle in the horizontal plane, the labelling angle A of substrate 90 is located at such as Fig. 5
Shown position；After the second connecting plate 50 rotates 180 ° of angles in the horizontal plane, the labelling angle A on substrate 90 is located at as shown in Figure 6
Position.After the second connecting plate 50 drives substrate 90 to rotate set angle, each branch 80 of same arm also can be each right
The branch drives device answered drives lower synchronization to move horizontally, to place a substrate in the setting position of reaction chamber.
Knowable to technique scheme, when carrying substrate 90 is come using the mechanical hand that the present invention provides, using rotary shaft 10
Above-mentioned mechanical hand can be made to pivot about motion with rotary shaft 10, so that substrate 90 is in vacuum transition chamber and each reaction chamber
Have enough to meet the need between room, substrate 90 relative response cavity bottom or vacuum can also be adjusted simultaneously using the elevating movement of rotary shaft 10
The height of transition chamber thereof bottom；And when mechanical hand stretches in reaction chamber, rotate when needing the substrate 90 by reaction chamber
Certain angle, to verify it is not necessary to take out substrate 90 from reaction chamber during processing quality, is existed by making the second connecting plate 50
Horizontal rotation in surface can realize the spinning of substrate 90, with prior art in need to take out substrate 90 from reaction chamber,
And move into reaction chamber after rotating to an angle by other slewing again and compare, save in substrate 90 reaction chamber
Take out and move into the turnaround time in reaction chamber again, thus significantly improving the production efficiency of vacuum response equipment.And, because
Eliminate and will take out in substrate 90 reaction chamber and move into the circular flow in reaction chamber again, such that it is able to the damage of substrate 90
Rate, and then save production cost.
Additionally, above-mentioned mechanical hand includes two arms, therefore, when being only provided with one in the transmission cavity of vacuum consersion unit
During individual above-mentioned mechanical hand, one of arm of this mechanical hand can be used for taking the substrate 90 after PROCESS FOR TREATMENT in reaction chamber
Go out, another arm is used for moving into pending substrate 90 in reaction chamber.When being provided with two mechanical hands in transmission cavity
When, one of mechanical hand can be used for taking out the substrate 90 after PROCESS FOR TREATMENT in reaction chamber, another one machinery
Handss are used for moving into pending substrate 90 in reaction chamber, because each mechanical hand includes two arms, when handss above
When arm breaks down, can proceed to carry work using underlying arm, so can reduce the handss because of mechanical hand
Arm fault and the vacuum response equipment downtime number of times that leads to and time, thereby may be ensured that the production efficiency of vacuum response equipment.
Refer to Fig. 1 and Fig. 4, in a preferred embodiment, each pivotal part is spherical hinge structure 60, spherical hinge structure 60
Ball seat be fixedly mounted in corresponding second gripper shoe, the multi-directional ball of spherical hinge structure 60 rolls and is arranged on corresponding second connection
In the ball pit at the center of plate；Each second gripper shoe 40 region relative with corresponding second connecting plate 50 is provided with least three
First thimble 70, at least three first thimbles 70 are uniformly arranged in the circular trace with the center of the second connecting plate 50 as the center of circle
Cloth.Specifically, each second gripper shoe 40 is provided with several pilot holes 42, and each first thimble 70 is corresponding to be interspersed in one and lead
To in hole 42；Each first thimble 70 is each connected with first thimble driving means, and each first thimble 70 can each correspond to
First thimble driving means drive under carry out elevating movement, to adjust the levelness of corresponding second connecting plate 50.
Pass through spherical hinge structure 60 between second connecting plate 50 and the second gripper shoe 40 to be connected, mainly using spherical hinge structure can
With rotate at any angle feature so that the second connecting plate 50 can rotate arbitrarily angled, thus driving on the second connecting plate 50
Roll over arbitrarily angled, and then realize the arbitrarily angled rotation of substrate 90.Second gripper shoe 40 is provided with multiple first
Thimble 70 is mainly used for the levelness ensureing the second connecting plate 50 and the levelness being conveniently adjusted the second connecting plate 50；Refer to
Fig. 3, is provided with three the first thimbles 70 in the second gripper shoe 40, and three the first thimbles 70 are with the center of the second connecting plate 50
It is uniformly distributed in the circular trace in the center of circle, because spherical hinge structure can arbitrarily angled rotate, in order to prevent the second connecting plate 50 from existing
Be under pressure effect rear-inclined and the levelness of the arm ensureing mechanical hand, can support second even by these first thimbles 70
Fishplate bar 50, to prevent the second connecting plate 50 in effect rear-inclined and the levelness ensureing the second connecting plate 50 of being under pressure with this,
Thus ensureing the levelness of arm；Additionally, each first thimble can be made respectively to carry out lifting fortune using each first thimble driving means
Dynamic, the overhang of corresponding each first thimble 70 first connecting plate 30 relatively of adjustment, thus adjusting the water of the second connecting plate 50
Pingdu.
It should be noted that above-mentioned spherical hinge structure 60 can save ball seat, as shown in figure 3, setting in the second gripper shoe 40
There is ball pit 41, multi-directional ball directly rolls the ball pit of ball pit 41 neutralization the second connecting plate 50 being arranged on the second gripper shoe 40
In (in figure is not drawn into).
The embodiment of the present invention has also led to a kind of vacuum response equipment simultaneously, including：Vacuum transition chamber and several reaction chamber,
And the transfer chamber that is connected with vacuum transition chamber and each reaction chamber respectively, wherein, it is provided with least one in transfer chamber
State the mechanical hand that technical scheme is carried.Carrying substrate 90 is come using the mechanical hand that technique scheme is carried, when needs are in reaction
When within the chamber makes substrate 90 horizontally rotate certain angle to verify processing quality, can achieve that substrate 90 rotates using this mechanical hand
Certain angle, it is not necessary to move into the circular flow in reaction chamber after this substrate is taken out of in reaction chamber, rotated again, is saved
To take out in substrate 90 reaction chamber and move into the turnaround time in reaction chamber again, thus significantly improve vacuum response set
Standby production efficiency.
It is noted that when being provided with a mechanical hand in transfer chamber, an arm of this mechanical hand is used for from anti-
Substrate 90 after answering within the chamber taking-up to process, another arm is used for moving into pending substrate 90 in reaction chamber.Work as biography
When sending within the chamber to be provided with two or more mechanical hand, wherein at least one mechanical hand is used at taking-up in reaction chamber
Substrate 90 after reason, remaining mechanical hand is used for moving into pending substrate 90 in reaction chamber；It is so designed that, it is possible to reduce
Wait mechanical hand to pick and place the time of substrate 90, improve the production efficiency of vacuum response equipment.Additionally, work as having a mechanical hand to occur
During fault, it is possible to use other machinery handss carry out picking and placeing substrate 90 it is not necessary to shut down, anti-such that it is able to further improve vacuum
Answer the production efficiency of equipment；And, because each mechanical hand includes two arms, when arm above breaks down, can
To proceed to carry work using underlying arm, lead to because of the arm fault of mechanical hand true so can be reduced
Empty consersion unit machine stop times and time, thereby may be ensured that the production efficiency of vacuum response equipment.
In a preferred embodiment, it is provided with several mechanical hands in transfer chamber, each mechanical hand is folded from bottom to up successively
Add and put, the rotary shaft 10 of each mechanical hand is columnar structured, and each rotary shaft 10 is concentric, the rotation of mechanical hand above
Rotating shaft 10 is interspersed in the rotary shaft 10 of underlying mechanical hand and can relatively rotate.Specifically, refer to Fig. 7 and Fig. 8,
It is provided with two mechanical hands in transfer chamber, this two mechanical hand superposition settings, the rotating shaft coaxle heart of two mechanical hands, and be located at
The external diameter of the rotary shaft 10 of mechanical hand of top is less than the internal diameter of the rotary shaft 11 of underlying mechanical hand, therefore rotary shaft 10
Can relatively rotate after being interspersed in rotary shaft 11.It is so designed that, the volume of transfer chamber can be reduced, and improve transfer chamber
Space availability ratio.
When passing through spherical hinge structure between the second connecting plate 50 in each mechanical hand and the second gripper shoe 40 and being connected, ball
The ball seat of hinged structure 60 is fixedly mounted on the first connecting plate 30, and the multi-directional ball of spherical hinge structure 60 rolls and is arranged on the second connecting plate
50 center；Second gripper shoe 40 region relative with the second connecting plate 50 is provided with least three first thimbles 70, and at least three
First thimble 70 is uniformly arranged in the same circular trace with the center of the second connecting plate 50 as the center of circle, and can be corresponding
One thimble driving means drive and carry out elevating movement, to adjust the levelness of the second connecting plate 50.
In order to the levelness of adjust automatically the second connecting plate 50, above-mentioned vacuum response equipment also includes：Each reaction chamber
It is each provided with a thimble group for taking off substrate 90 on hand from machinery, each thimble group includes multiple second thimbles in room,
And it is provided with the sensor for detecting this distance to described plate-like product for the second thimble upper end in the upper end of each the second thimble；
The controller being connected with each sensor and the first thimble driving means signal respectively, the inspection that controller is fed back according to each sensor
Measurement information, controls each first thimble to carry out elevating movement by each first thimble driving means, to adjust corresponding described second
The levelness of connecting plate.Controller noted above can be an independent controller or borrow in vacuum response equipment
Controller, concrete control process is well known to those skilled in the art, and no further details to be given herein.
In the description of above-mentioned embodiment, specific features, structure, material or feature can be at any one or many
Combine in an appropriate manner in individual embodiment or example.
The above, the only specific embodiment of the present invention, but protection scope of the present invention is not limited thereto, and any
Those familiar with the art the invention discloses technical scope in, change or replacement can be readily occurred in, all should contain
Cover within protection scope of the present invention.Therefore, protection scope of the present invention should described be defined by scope of the claims.
Claims (8)
1. a kind of mechanical hand, is arranged in the transfer chamber of vacuum response equipment it is characterised in that including：
The rotary shaft being vertically arranged；
Be fixedly mounted on the first gripper shoe in described rotary shaft, described first gripper shoe can under the drive of described rotary shaft around
Described rotary shaft rotates and moves up and down in vertical direction；
Be slidably mounted in described first gripper shoe, can the first connecting plate of being moved horizontally of relatively described first gripper shoe；
It is fixedly mounted on two the second gripper shoes on described first connecting plate, described two second gripper shoes are oppositely arranged, and
Two described second gripper shoe projection coincidences in the horizontal plane respectively；
Two second connecting plates one-to-one with described two second gripper shoes, each described second connecting plate is located at corresponding
The top of described second gripper shoe, each described second connecting plate centrally through a pivotal part with corresponding described second
Fagging pivot joint, each described second connecting plate can rotate in the horizontal plane around described pivotal part；
One-to-one two arms of second connecting plate described with two, each described arm is included for holding plate-like product
Several branches, described several branches are slidably mounted on corresponding described second connecting plate, and can enter this second connecting plate relatively
Row level of synchronization moves.
2. mechanical hand according to claim 1 it is characterised in that each described pivotal part be spherical hinge structure, described ball pivot
The ball seat of structure is fixedly mounted in corresponding described second gripper shoe, and the multi-directional ball of described spherical hinge structure rolls and is arranged on correspondence
The ball pit at center of described second connecting plate in；
Each described second gripper shoe region relative with corresponding described second connecting plate is provided with least three first thimbles, institute
State at least three first thimbles uniformly to arrange in the circular trace with the center of described second connecting plate as the center of circle.
3. mechanical hand according to claim 2 is it is characterised in that each described second gripper shoe is provided with several guiding
Hole, each described first thimble is corresponding to be interspersed in a described pilot hole；
Each described first thimble is each connected with first thimble driving means, and each described first thimble can be each self-corresponding
Described first thimble driving means carry out elevating movement, to adjust the levelness of corresponding described second connecting plate under driving.
4. mechanical hand according to claim 1 is it is characterised in that the upper surface of described first gripper shoe is provided with and is parallel to each other
Several first guide frames, and described several first guide frame is horizontally disposed, and described first connecting plate slides peace
It is contained on each described first guide frame；
The upper surface of each described second connecting plate is provided with several second guide frames being parallel to each other, and described several second lead
Horizontally disposed to structure, what each described branch was slidably mounted on corresponding described second connecting plate each described second leads
To in structure.
5. mechanical hand according to claim 4 is it is characterised in that each described first guide frame is led for del
Rail, inverted trapezoidal guide rail, positive T-rail or equilateral triangle gathering sill, trapezoid gathering sill, inverted T-shaped gathering sill, each described second
Guide frame is del guide rail, inverted trapezoidal guide rail, positive T-rail or equilateral triangle gathering sill, trapezoid gathering sill, the T that falls
Shape gathering sill.
6. a kind of vacuum response equipment, including：Vacuum transition chamber and several reaction chamber, and respectively with described vacuum transition chamber
The transfer chamber being connected with each described reaction chamber is wanted it is characterised in that being provided with least one such as right in described transfer chamber
Seek the mechanical hand described in 3.
7. vacuum response equipment according to claim 6 is it is characterised in that be provided with several described machines in described transfer chamber
Tool handss, each described mechanical hand is sequentially overlapped setting from bottom to up, and the rotary shaft of each described mechanical hand is columnar structured, each institute
State the rotating shaft coaxle heart, the rotary shaft of described mechanical hand above is interspersed in the rotary shaft of underlying described mechanical hand
In and can relatively rotate.
8. the vacuum response equipment according to claim 6 or 7 is it is characterised in that also include：
It is each provided with a thimble group for plate-like product is taken off from described mechanical hand, each institute in each described reaction chamber
State thimble group and include multiple second thimbles, and be provided with for detecting this second thimble upper end in the upper end of each described second thimble
Sensor to the distance of described plate-like product；
The controller being connected with each described sensor and described first thimble driving means signal respectively, described controller is according to each
The detection information that described sensor is fed back, controls each described first thimble to be risen by each described first thimble driving means
Fall motion, to adjust the levelness of corresponding described second connecting plate.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410320518.3A CN104201142B (en) | 2014-07-07 | 2014-07-07 | Mechanical arm and vacuum reaction device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410320518.3A CN104201142B (en) | 2014-07-07 | 2014-07-07 | Mechanical arm and vacuum reaction device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN104201142A CN104201142A (en) | 2014-12-10 |
| CN104201142B true CN104201142B (en) | 2017-02-08 |
Family
ID=52086414
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201410320518.3A Expired - Fee Related CN104201142B (en) | 2014-07-07 | 2014-07-07 | Mechanical arm and vacuum reaction device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN104201142B (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111450388A (en) * | 2020-04-02 | 2020-07-28 | 刘强 | Automatic catheter guide wire butt joint device, method and system for cardiac intervention operation |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113785387A (en) * | 2019-03-04 | 2021-12-10 | 朗姆研究公司 | Apparatus for automatic calibration of substrate transfer robot |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101552220A (en) * | 2008-04-03 | 2009-10-07 | 大日本网屏制造株式会社 | Substrate processing apparatus and substrate processing method for successively processing a plurality of substrates |
| CN203171636U (en) * | 2013-04-07 | 2013-09-04 | 京东方科技集团股份有限公司 | Manipulator |
| CN103700613A (en) * | 2013-12-18 | 2014-04-02 | 京东方科技集团股份有限公司 | Vacuum mechanical delivery system |
| CN103730398A (en) * | 2012-10-11 | 2014-04-16 | 株式会社Tes | Apparatus for transferring substrate |
-
2014
- 2014-07-07 CN CN201410320518.3A patent/CN104201142B/en not_active Expired - Fee Related
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101552220A (en) * | 2008-04-03 | 2009-10-07 | 大日本网屏制造株式会社 | Substrate processing apparatus and substrate processing method for successively processing a plurality of substrates |
| CN103730398A (en) * | 2012-10-11 | 2014-04-16 | 株式会社Tes | Apparatus for transferring substrate |
| CN203171636U (en) * | 2013-04-07 | 2013-09-04 | 京东方科技集团股份有限公司 | Manipulator |
| CN103700613A (en) * | 2013-12-18 | 2014-04-02 | 京东方科技集团股份有限公司 | Vacuum mechanical delivery system |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111450388A (en) * | 2020-04-02 | 2020-07-28 | 刘强 | Automatic catheter guide wire butt joint device, method and system for cardiac intervention operation |
Also Published As
| Publication number | Publication date |
|---|---|
| CN104201142A (en) | 2014-12-10 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN105374730B (en) | A kind of manipulator and its Double-head transporter for turning basket for solar battery sheet | |
| CN106973518A (en) | A kind of efficient automatic chip mounting equipment | |
| WO2014023048A1 (en) | Multi-layer substrate storage device | |
| CN106977089B (en) | Glass breaks device, glass breaks method and glass-cutting system | |
| CN105217285B (en) | For realizing the equipment that panel TV set transfer upset is leaned to | |
| CN110040431A (en) | Two-row roller pipeline with steering mechanism | |
| CN108957802B (en) | Visual detection equipment for LCD | |
| WO2016161703A1 (en) | Device for flip-chip mounting chip | |
| CN107298283A (en) | Display panel inspection apparatus and display panel inspection method | |
| CN110841929A (en) | Rotating disc type watch glass lens detector | |
| CN106956290A (en) | Mechanical arm and its operating method, robot arm device and display panel production equipment | |
| CN104201142B (en) | Mechanical arm and vacuum reaction device | |
| CN206834156U (en) | Substrate board treatment | |
| CN106809650A (en) | A kind of glass handling equipment and its control method | |
| CN105692199A (en) | Single body feeding and discharging machine for manufacturing LCD products | |
| CN102275707A (en) | Panel holding rack and panel conveying system | |
| CN107934431A (en) | A kind of base plate transfer device and substrate detection apparatus | |
| CN106865210A (en) | A kind of multistation sheet stock feeder | |
| KR100339499B1 (en) | Loadding device and method of PCB manufacturing process | |
| CN207181320U (en) | A kind of full-automatic LCD defect intelligent detection equipments | |
| CN105692194A (en) | Double-body loading and unloading machine for manufacturing of LCD (liquid crystal display) products | |
| JP5015107B2 (en) | Chamfering machine for flat display and its chamfering method | |
| CN205602694U (en) | A blanking machine on monomer for LCD product manufacture processing | |
| CN207091700U (en) | Automatic device, module and the embroidery machine for changing peg or spindle | |
| CN206849414U (en) | Flexible panel bogey |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20170208 Termination date: 20200707 |
|
| CF01 | Termination of patent right due to non-payment of annual fee |