CN104174548A - Device and method for determining shape of slit nozzle - Google Patents
Device and method for determining shape of slit nozzle Download PDFInfo
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- CN104174548A CN104174548A CN201410171561.8A CN201410171561A CN104174548A CN 104174548 A CN104174548 A CN 104174548A CN 201410171561 A CN201410171561 A CN 201410171561A CN 104174548 A CN104174548 A CN 104174548A
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- coating liquid
- platform portion
- length
- nozzle
- flow velocity
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C11/00—Component parts, details or accessories not specifically provided for in groups B05C1/00 - B05C9/00
- B05C11/10—Storage, supply or control of liquid or other fluent material; Recovery of excess liquid or other fluent material
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C21/00—Accessories or implements for use in connection with applying liquids or other fluent materials to surfaces, not provided for in groups B05C1/00 - B05C19/00
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C5/00—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work
- B05C5/02—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work the liquid or other fluent material being discharged through an outlet orifice by pressure, e.g. from an outlet device in contact or almost in contact, with the work
Abstract
The present invention provides a device and a method for determining the shape of a slit nozzle. In the device, the slit nozzle comprises a first nozzle body portion and a second nozzle body portion, the second nozzle body portion is separated with the first nozzle body at a preset interval, and a separation member is disposed between the first nozzle body and the second nozzle body, so that a slit shape opening from which coating liquid is discharged is formed between the first nozzle body portion and the second nozzle body portion. The second nozzle body portion comprises a bench portion which forms an opening together with a region of the first nozzle body portion. The device comprises a flow speed nonuniformity determination unit, which determines that the flow speed nonuniformity at the width direction before the coating liquid goes in the bench portion is equal to or larger than a preset value; and a bench portion length computing unit, which calculates the difference between the length of the central portion of the bench portion along the direction at which the coating liquid is discharged and the length of each end portion of the bench portion if the flow speed nonuniformity is equal to or larger than the preset value.
Description
The application requires priority and the rights and interests at the 10-2013-0058855 korean patent application of Department of Intellectual Property of Korea S submission on May 24th, 2013, and the full content of this korean patent application is all contained in this by reference.
Technical field
An aspect of of the present present invention relates to a kind of Apparatus and method for of the shape for definite gap nozzle, more particularly, relates to a kind of Apparatus and method for of the shape for definite gap nozzle, and it can evenly discharge from gap nozzle coating liquid.
Background technology
The coating equipment with various forms and method is present in some industry, comprises field of semiconductor manufacture, field of liquid crystal, field of batteries etc.In these coating equipments, slot coated equipment coating liquid being applied equably with surface configuration by the nozzle of slit shape is used as having the coating equipment of high production speed and fine quality.
The centre that be injected at gap nozzle of coating liquid on gap nozzle carried out.In this case, according to the coordinate place of the length on the width of gap nozzle, the coating liquid on width does respectively different motions.Therefore, if the flow direction of coating liquid in gap nozzle is not endless, the discharge pressure of coating liquid is unequal according to the width of gap nozzle, and therefore, the flow velocity of the coating liquid of discharge becomes unequal along the width of gap nozzle.In the time that coating liquid is coated on matrix material, this inhomogeneities causes technique failure.
In addition,, in the time that the length on the width of gap nozzle lengthens, this inhomogeneities becomes more serious.But the length on the width of gap nozzle should be lengthened out, to increase the output that is coated with the matrix material of coating liquid on it.Therefore, need to prevent that the flow velocity inhomogeneities of coating liquid on width of discharging from increasing along with the lengthening of the length on the width of gap nozzle.
Summary of the invention
It is a kind of for determining the Apparatus and method for of shape of gap nozzle that embodiment provides, and it can prevent the coating liquid of the discharging flow velocity inhomogeneities on the width of gap nozzle.
According to an aspect of the present invention, a kind of equipment of the shape for definite gap nozzle is provided, described gap nozzle comprises the first nozzle body part and second nozzle main part, second nozzle main part is installed to be with predetermined space and the first nozzle body part to be separated and be provided with partition member between the first nozzle body part and second nozzle main part, thereby coating liquid is formed between the first nozzle body part and second nozzle main part by the opening of the slit shape of its discharge, second nozzle main part comprises and the platform portion that forms described opening together with a region of the first nozzle body part, described equipment comprises: flow velocity inhomogeneities determining means, be constructed to determine whether the degree of the flow velocity inhomogeneities on width is predetermined value or larger value before coating liquid enters in platform portion, and platform portion length computation unit, be constructed in the time that the degree of flow velocity inhomogeneities is predetermined value or larger value to calculate poor between the length of middle body of platform portion in the direction of discharging at coating liquid and the length of each end of platform portion.
It is described poor that platform portion length computation unit can calculate, and makes the length of each end of the Length Ratio platform portion of the middle body of platform portion long.
Described equipment can also comprise flow velocity inhomogeneities degree computing unit, and described flow velocity inhomogeneities degree computing unit is constructed to use before coating liquid enters in the platform portion average discharge flow velocity of the current difference on width and coating liquid to calculate the degree of flow velocity inhomogeneities.
Described equipment can also comprise current difference computing unit, and described current difference computing unit is constructed to calculate the current difference on width by least one in following factor: poor between the pressure differential before coating liquid enters in platform portion on width, the height of described opening, the absolute viscosity of coating liquid and the length of the middle body of platform portion and the length of each end of platform portion.
Platform portion length computation unit can be carried out poor between the length of middle body of computer board portion and the length of each end of platform portion by least one in following factor: the pressure differential before coating liquid enters in platform portion on width, average discharge flow velocity, the height of described opening and the absolute viscosity of coating liquid of coating liquid.
Poor between pressure before pressure differential on width can refer to the pressure before coating liquid enters on the middle body of platform portion and enter on each end of platform portion at coating liquid.
Described equipment can also comprise that pressure differential calculates unit, and described pressure differential is calculated unit and is constructed to carry out the pressure differential on the width of computer board portion by the length on the width of the reference width of platform portion, the pressure differential on width precomputing according to reference width and platform portion.
Described equipment can also comprise mean flow rate computing unit, and described mean flow rate computing unit is constructed to calculate average discharge flow velocity by least one in following factor: the coating thickness of coating liquid, the height of described opening and coating liquid is applied to the translational speed of matrix material thereon.
Second nozzle main part can also comprise entrance, and coating liquid flows in second nozzle main part by described entrance.
Second nozzle main part can comprise interim storage coating liquid and be formed on platform portion and described entrance between cavity.
The middle body that the coating liquid of platform portion enters into it from cavity can be formed towards the direction of cavity outstanding.
In the time watching from the first nozzle body part, the shape that coating liquid enters into the part it from cavity can be triangle, trapezoidal or half elliptic.
According to a further aspect in the invention, a kind of method of the shape for definite gap nozzle is provided, described gap nozzle comprises the first nozzle body part and second nozzle main part, second nozzle main part is installed to be with predetermined space and the first nozzle body part to be separated and be provided with partition member between the first nozzle body part and second nozzle main part, thereby coating liquid is formed between the first nozzle body part and second nozzle main part by the opening of the slit shape of its discharge, second nozzle main part comprises and the platform portion that forms described opening together with a region of the first nozzle body part, described method comprises: whether the degree that determines the flow velocity inhomogeneities before coating liquid enters in platform portion is predetermined value or larger value, and in the time that the degree of flow velocity inhomogeneities is predetermined value or larger value, determine coating liquid discharge direction on the length of middle body of platform portion and the length of each end of platform portion between poor.
According to the present invention, can design the shape of gap nozzle, this can prevent the flow velocity inhomogeneities of coating liquid on the width of gap nozzle of discharging.Therefore,, in the time applying coating liquid by gap nozzle on matrix material, can make the coating failure of matrix material minimized.
Detailed description of the invention
In the following detailed description, the mode of explanation only illustrates and has described certain exemplary embodiments of the present invention by way of example simply.As those skilled in the art will recognize, the embodiment of description can revise in a variety of ways, and does not all depart from the spirit or scope of the present invention.Therefore, accompanying drawing and describe that will to be considered to be illustrative and nonrestrictive in essence.In addition, when element be known as " " another element " on " time, it can be directly on described another element, or one or more intermediary element can be set between them and indirectly on described another element.In addition, in the time that element is known as " being connected to " another element, it can directly be connected to described another element, or can one or more intermediary element be set between them and indirectly be connected to described another element.Hereinafter, same Reference numeral is indicated same element.
Fig. 1 is schematically illustrated according to the figure of the slot coated equipment of the embodiment of the present invention.
With reference to Fig. 1, slot coated equipment 100 can comprise roller 110, gap nozzle 120, nozzle support part 130 and coating liquid supply section 140.
Roller 110 makes the matrix material 102 that is coated with coating liquid on it move along a direction.Gap nozzle 120 can be arranged on a side of roller 110, separates predetermined interval with roller 110 simultaneously.The length of gap nozzle 120 on width can be corresponding to the width of matrix material 102.Describe gap nozzle 120 in detail with reference to Fig. 2 after a while.Nozzle support part 130 is supported for gap nozzle 120 to be positioned at predetermined At The Height, and coating liquid supply section 140 is supplied coating liquid to gap nozzle 120.
Fig. 2 is according to the perspective view of the gap nozzle of the embodiment of the present invention.
With reference to Fig. 2, gap nozzle 120 can comprise the first nozzle body part 200 and separate the second nozzle main part 210 of predetermined space with the first nozzle body part 200, thereby coating liquid is formed between the first nozzle body part 200 and second nozzle main part 210 by the opening 250 of the slit shape of its discharge.
Fig. 3 be along A-A' line intercept according to the cutaway view of the gap nozzle of the embodiment of the present invention.
With reference to Fig. 3, second nozzle main part 210 is separated and be provided with partition member 220 between the first nozzle body part 200 and second nozzle main part 210 with predetermined space and the first nozzle body part 200.
Second nozzle main part 210 comprises and the smooth platform portion (land portion) 211 that forms opening 250 together with a region of the first nozzle body part 200.Entrance 213 is formed in second nozzle main part 210, and coating liquid can flow in second nozzle main part 210 by entrance 213.Cavity 215 as the storage area that can store coating liquid is temporarily formed between platform portion 211 and entrance 213.
Therefore, the coating liquid flowing in second nozzle main part 210 by entrance 213 is stored in cavity 215 provisionally, then moves along platform portion 211, to be discharged from by opening 250.
Fig. 4 is according to the plane of the second nozzle main part of the embodiment of the present invention.
With reference to Fig. 4, the entrance 213 of the centre of coating liquid by being formed on second nozzle main part 210 is injected in second nozzle main part 210, is then dispersed in cavity 215.Therefore,, before coating liquid enters in platform portion 211, in the direction of the width W of second nozzle main part 210, there is pressure differential.Here, before coating liquid enters in platform portion 211, the pressure differential on width refers to poor between the pressure P 1 of coating liquid before entering on the middle body of platform portion 211 and the coating liquid pressure P 2 before entering on the two ends of platform portion 211.In this case, the distance of the middle body from entrance 213 to platform portion 211 is less than the distance of the each end from entrance 213 to platform portion 211, and therefore, pressure P 1 is greater than pressure P 2.
The flow velocity of the coating liquid enter on the middle body of platform portion 211 at coating liquid before and enter on each end of platform portion 211 at coating liquid before the flow velocity of coating liquid between difference caused by the pressure differential on width.Therefore, there is the coating failure of matrix material 102.
In order to address this problem, the length L 1 of the middle body of platform portion 211 in the discharge direction of coating liquid is formed length L 2 length in the discharge direction of coating liquid than each end of platform portion 211.The middle body that, the coating liquid of platform portion 211 enters into it from cavity 215 can be formed towards the direction of cavity 215 outstanding.Therefore,, in the time watching from the first nozzle body part 200, the shape that the coating liquid of platform portion 211 enters into this part it from cavity 215 is leg-of-mutton shape, as shown in Figure 4.But, this is only an example, as long as the length L 1 of the middle body of platform portion 211 is formed as longer than the length L of each end of platform portion 211 2 just, platform portion 211 just can be with the shape formation in various shapes (comprise trapezoidal, half elliptic etc.) and Fig. 4.The length L 1 of the middle body of platform portion 211 is formed longlyer than the length L of each end of platform portion 211 2, thereby can prevent the coating liquid that caused by the pressure differential on width enter in platform portion 211 at coating liquid before the flow velocity inhomogeneities on width.
More particularly, compared with the coating liquid entering on each end of platform portion 211, the coating liquid entering on the middle body of platform portion 211 is advanced further, until this coating liquid is discharged from.Therefore it is larger than the decrease of pressure that enters into the coating liquid on each end of platform portion 211 that the decrease that, enters into the pressure of the coating liquid on the middle body of platform portion 211 becomes.As a result, can eliminate the pressure differential on width before coating liquid enters in platform portion 211.
Fig. 5 be illustrate according to the embodiment of the present invention for determining the block diagram of equipment of shape of gap nozzle, this equipment is determined poor between the length of middle body of platform portion and the length of each end of platform portion.
With reference to Fig. 5, equipment 500 can comprise flow velocity inhomogeneities determining means 510 and shape of slit determining unit 520.
Flow velocity inhomogeneities determining means 510 determine coating liquid enter in platform portion 211 before the degree of flow velocity inhomogeneities on width whether be predetermined value or larger value.
The degree of flow velocity inhomogeneities refers to the inhomogeneities degree between the flow velocity of central portion office of platform portion 211 and the flow velocity of each end of platform portion 211.As will be described later, the degree of flow velocity inhomogeneities can be the value calculating in shape of slit determining unit 520.
Degree in flow velocity inhomogeneities is less than predetermined value, although the length L 1 of the middle body of platform portion 211 is identical with the length L 2 of each end of platform portion 211, in the time of coating liquid process platform portion 211, flow velocity inhomogeneities can be eliminated.But, be predetermined value or larger value in the degree of flow velocity inhomogeneities, cannot eliminate flow velocity inhomogeneities.In order to address this problem, carry out poor between the length L 1 of middle body of computer board portion 211 and the length L 2 of each end of platform portion 211 by shape of slit determining unit 520.Predetermined value can be determined by testing by user.
Poor between the length L 2 of the length L 1 of the middle body of shape of slit determining unit 520 computer board portions 211 and each end of platform portion 211.Poor in order to calculate this, shape of slit determining unit 520 is constructed to calculate the pressure differential on the width of platform portion 211, average discharge flow velocity, the current difference on width etc. of coating liquid.
More particularly, shape of slit determining unit 520 can comprise platform portion length computation unit 521, mean flow rate computing unit 523, pressure differential calculating unit 525, current difference computing unit 527 and flow velocity inhomogeneities degree computing unit 529.
Poor between the length L 1 of middle body of length computation unit 521 computer board portions 211 of platform portion and the length L 2 of each end of platform portion 211, to eliminate the flow velocity inhomogeneities on width.
More particularly, platform portion length computation unit 521 can be carried out poor between the length L 1 of middle body of computer board portion 211 and the length L 2 of each end of platform portion 211 by least one in following factor: the pressure differential before coating liquid enters in platform portion 211 on width, the average discharge flow velocity of coating liquid, the height h as the opening 250 of the separation spacing between the first nozzle body part 200 and second nozzle main part 210, the absolute viscosity of coating liquid.Described difference can be represented by equation 1 below.
Equation 1
Here, Δ L represents poor between the length L 1 of middle body of platform portion 211 and the length L 2 of each end of platform portion 211, Δ P
c υbe illustrated in coating liquid enter in platform portion 211 before pressure differential on width, D represents the half of the height h of opening 250, μ represents the absolute viscosity of coating liquid, U represents the average discharge flow velocity of coating liquid.
Mean flow rate computing unit 523 calculates the average discharge flow velocity of coating liquid.The average flow velocity of discharging refers to the mean flow rate that is discharged to the coating liquid matrix material 102 from platform portion 211.The average flow velocity of discharging can calculate by least one in following factor: coating thickness, the height of opening 250 and the translational speed of matrix material 102 of coating liquid on matrix material 102.The average discharge flow velocity of coating liquid can be represented by equation 2 below.
Equation 2
U＝TD
2υ
Here, T represents that coating thickness, the υ of coating liquid represents the translational speed of matrix material 102.In slot coated equipment of the present invention, matrix material 102 moves, and therefore υ is defined as the translational speed of matrix material 102.But in the case of carrying out the slot coated equipment of coating by travelling slit nozzle, υ can be defined as the translational speed of gap nozzle.
According to embodiment, pressure differential is calculated unit 525 and is calculated the pressure differential on width before coating liquid enters in platform portion 211.Here poor between the pressure of the pressure differential on width before referring on the middle body that coating liquid enters into platform portion 211 and the coating liquid pressure before entering on each end of platform portion 211.Pressure differential can be calculated by the actual measurement between pressure.
According to another embodiment, pressure differential is calculated unit 525 and can be used following because usually calculating pressure differential (the Δ P on width
c υ): the reference width of platform portion, the pressure differential on width precomputing according to reference width, the length on width of platform portion that will actual design.Pressure differential on width can be represented by equation 3 below.
Equation 3
Here W,
strepresent the reference width of platform portion, P
strepresent according to the pressure differential on width of reference width, W represents the length on width of platform portion that will actual design.
For example, the width of the platform portion in slot coated equipment is increased to 1200mm to manufacture the slot coated equipment of wide width from 600mm, and the pressure differential in the time that the width of platform portion is designed to 1200mm on width can be estimated by the pressure differential on width in the time that the width of platform portion is 600mm.Therefore, the pressure differential on width can be estimated with equation 3, and not need actual manufacture gap nozzle.In addition, difference between the length L 2 of the length L 1 of the middle body of platform portion 211 and each end of platform portion 211 can be calculated with the pressure differential on width estimating and equation 1 and 2, to eliminate the flow velocity inhomogeneities of coating liquid on width.
Current difference computing unit 527 calculates the current difference on width before coating liquid enters in platform portion 211.
More particularly, current difference computing unit 527 can calculate the current difference on width by least one in following factor: poor (the Δ L) between the absolute viscosity of the pressure differential before coating liquid enters in platform portion 211 on width, the height h of opening 250, coating liquid, the length L 1 of middle body of platform portion 211 and the length L 2 of each end of platform portion 211.Current difference on width can be represented by equation 4 below.
Equation 4
Here Δ U,
c υrefer to the current difference on width before coating liquid enters in platform portion 211.
Flow velocity inhomogeneities degree computing unit 529 calculates the degree of the flow velocity inhomogeneities before coating liquid enters in platform portion 211 according to the length on width of platform portion 211.More particularly, flow velocity inhomogeneities degree computing unit 529 can calculate with the average discharge flow velocity of current difference and coating liquid the degree of flow velocity inhomogeneities.The degree of flow velocity inhomogeneities can be represented by equation 5 below.
Equation 5
Here U,
drefer to the degree of flow velocity inhomogeneities.
As mentioned above, flow velocity inhomogeneities determining means 510 can be used the degree of the flow velocity inhomogeneities calculating to decide whether the degree of flow velocity inhomogeneities is predetermined value or larger value.Be predetermined value or larger value in the degree of flow velocity inhomogeneities, the length L 2 of the length L 1 of the middle body of shape of slit determining unit 520 computer board portions 211 and each end of platform portion 211, to eliminate the current difference on width.
; in the present invention; in the time design need to being changed into the slot coated equipment of wide width from existing slot coated equipment; can design in advance the length L 1 of middle body of platform portion 211 and the length L 2 of each end of platform portion 211, to eliminate the flow velocity inhomogeneities of the coating liquid that becomes serious along with the length increase in slit width direction.
Fig. 6 is the flow chart illustrating according to the method for the shape for definite gap nozzle of the embodiment of the present invention.
With reference to Fig. 6, flow velocity inhomogeneities determining means 510 determines whether the degree of the flow velocity inhomogeneities of coating liquid before entering in platform portion 211 is predetermined value or larger value (S600).
Here can determine with the average discharge flow velocity of the current difference on width and coating liquid enter in platform portion at coating liquid before the degree of flow velocity inhomogeneities.
Be predetermined value or larger value in the degree of flow velocity inhomogeneities, shape of slit determining unit 520 is designed to the length L 1 in the direction of discharging at coating liquid of the middle body of platform portion than the length L 2 long (S610) in the direction of discharging at coating liquid of each end of platform portion 211.
Here can determine poor between the length L 1 of middle body of platform portion 211 and the length L 2 of each end of platform portion 211 by least one in following factor: the pressure differential before coating liquid enters in platform portion 211 on width, average discharge flow velocity, the height of opening 250 and the absolute viscosity of coating liquid of coating liquid.
Be less than predetermined value in the degree of flow velocity inhomogeneities, shape of slit determining unit 520 is designed to the length L of the middle body of platform portion 211 1 and the length L 2 identical (S620) of each end of platform portion 211.
Disclose example embodiment at this, although adopted specific term, these terms are only use and explain with the general and descriptive meaning, instead of object in order to limit.In some cases, as those of ordinary skill in the art will be clearly, from in submitting the application to, unless point out especially in addition, otherwise feature, characteristic and/or the element of description can use individually or use with feature, characteristic and/or the elements combination described in conjunction with other embodiment in conjunction with specific embodiments.Therefore, it will be appreciated by those skilled in the art that in the case of not departing from by the spirit and scope of the present invention of setting forth in claim, can carry out the various changes in form and details.
Brief description of the drawings
Now, will with reference to accompanying drawing, example embodiment be described more fully hereinafter; But example embodiment can be implemented with different forms, and should not be interpreted as the embodiment that is confined to proposed here.On the contrary, it will be thorough with completely providing these embodiment to make the disclosure, and the scope of example embodiment will be conveyed to those skilled in the art fully.
In the accompanying drawings, clear for what illustrate, can exaggerate size.Will be appreciated that when element be known as " " two elements " between " time, this element can be unique element between these two elements, or also can have one or more intermediary element.Same Reference numeral is indicated same element all the time.
Fig. 1 is schematically illustrated according to the figure of the slot coated equipment of the embodiment of the present invention.
Fig. 2 is according to the perspective view of the gap nozzle of the embodiment of the present invention.
Fig. 3 be along A-A' line intercept according to the cutaway view of the gap nozzle of the embodiment of the present invention.
Fig. 4 is according to the plane of the second nozzle main part of the embodiment of the present invention.
Fig. 5 be illustrate according to the embodiment of the present invention for determining the block diagram of equipment of shape of gap nozzle, this equipment is determined poor between the length of middle body of platform portion and the length of each end of platform portion.
Fig. 6 is the flow chart illustrating according to the method for the shape for definite gap nozzle of the embodiment of the present invention.
Claims (15)
1. the equipment for the shape of definite gap nozzle, described gap nozzle comprises the first nozzle body part and second nozzle main part, second nozzle main part is installed to be with predetermined space and the first nozzle body part to be separated and be provided with partition member between the first nozzle body part and second nozzle main part, thereby coating liquid is formed between the first nozzle body part and second nozzle main part by the opening of the slit shape of its discharge, second nozzle main part comprises and the platform portion that forms described opening together with a region of the first nozzle body part, described equipment comprises:
Flow velocity inhomogeneities determining means, is constructed to determine whether the degree of the flow velocity inhomogeneities on width is predetermined value or larger value before coating liquid enters in platform portion; And
Platform portion length computation unit, is constructed in the time that the degree of flow velocity inhomogeneities is predetermined value or larger value to calculate poor between the length of middle body of platform portion in the direction of discharging at coating liquid and the length of each end of platform portion.
2. equipment as claimed in claim 1, wherein, it is described poor that platform portion length computation unit calculates, and makes the length of each end of the Length Ratio platform portion of the middle body of platform portion long.
3. equipment as claimed in claim 1, described equipment also comprises flow velocity inhomogeneities degree computing unit, and described flow velocity inhomogeneities degree computing unit is constructed to use before coating liquid enters in the platform portion average discharge flow velocity of the current difference on width and coating liquid to calculate the degree of flow velocity inhomogeneities.
4. equipment as claimed in claim 3, described equipment also comprises current difference computing unit, and described current difference computing unit is constructed to calculate the current difference on width by least one in following factor: poor between the pressure differential before coating liquid enters in platform portion on width, the height of described opening, the absolute viscosity of coating liquid and the length of the middle body of platform portion and the length of each end of platform portion.
5. equipment as claimed in claim 4, wherein, platform portion length computation unit is carried out poor between the length of middle body of computer board portion and the length of each end of platform portion by least one in following factor: the pressure differential before coating liquid enters in platform portion on width, average discharge flow velocity, the height of described opening and the absolute viscosity of coating liquid of coating liquid.
6. the equipment as described in claim 4 or 5, wherein, poor between the pressure before the pressure differential on width refers to the pressure before coating liquid enters on the middle body of platform portion and enters on each end of platform portion at coating liquid.
7. equipment as claimed in claim 6, described equipment also comprises that pressure differential calculates unit, and described pressure differential is calculated unit and is constructed to carry out the pressure differential on the width of computer board portion by the length on the width of the reference width of platform portion, the pressure differential on width precomputing according to reference width and platform portion.
8. the equipment as described in claim 3 or 5, described equipment also comprises mean flow rate computing unit, and described mean flow rate computing unit is constructed to calculate average discharge flow velocity by least one in following factor: the coating thickness of coating liquid, the height of described opening and coating liquid is applied to the translational speed of matrix material thereon.
9. equipment as claimed in claim 1, wherein, second nozzle main part also comprises entrance, coating liquid flows in second nozzle main part by described entrance.
10. equipment as claimed in claim 9, wherein, second nozzle main part comprise interim storage coating liquid and be formed on platform portion and described entrance between cavity.
11. equipment as claimed in claim 10, wherein, the middle body that the coating liquid of platform portion enters into it from cavity is formed towards the direction of cavity outstanding.
12. equipment as claimed in claim 11, wherein, in the time watching from the first nozzle body part, the shape that coating liquid enters into the part it from cavity is triangle, trapezoidal or half elliptic.
13. 1 kinds of methods for the shape of definite gap nozzle, described gap nozzle comprises the first nozzle body part and second nozzle main part, second nozzle main part is installed to be with predetermined space and the first nozzle body part to be separated and be provided with partition member between the first nozzle body part and second nozzle main part, thereby coating liquid is formed between the first nozzle body part and second nozzle main part by the opening of the slit shape of its discharge, second nozzle main part comprises and the platform portion that forms described opening together with a region of the first nozzle body part, described method comprises:
Whether the degree that determines the flow velocity inhomogeneities before coating liquid enters in platform portion is predetermined value or larger value; And
In the time that the degree of flow velocity inhomogeneities is predetermined value or larger value, determine coating liquid discharge direction on the length of middle body of platform portion and the length of each end of platform portion between poor.
14. methods as claimed in claim 13, wherein, use before coating liquid enters in the platform portion average discharge flow velocity of the current difference on width and coating liquid to determine the degree of flow velocity inhomogeneities.
15. methods as claimed in claim 13, wherein, determine poor between the length of middle body of platform portion and the length of each end of platform portion by least one in following factor: the pressure differential before coating liquid enters in platform portion on width, average discharge flow velocity, the height of described opening and the absolute viscosity of coating liquid of coating liquid.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR1020130058855A KR102052061B1 (en) | 2013-05-24 | 2013-05-24 | Slit nozzle shape determination apparatus and method therefor |
| KR10-2013-0058855 | 2013-05-24 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN104174548A true CN104174548A (en) | 2014-12-03 |
| CN104174548B CN104174548B (en) | 2018-05-11 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN201410171561.8A Active CN104174548B (en) | 2013-05-24 | 2014-04-25 | Device and method for the shape for determining gap nozzle |
Country Status (3)
| Country | Link |
|---|---|
| KR (1) | KR102052061B1 (en) |
| CN (1) | CN104174548B (en) |
| MY (1) | MY176827A (en) |
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| CN109865633B (en) * | 2017-12-05 | 2024-02-09 | 湖南纳昇电子科技有限公司 | Cavity structure of slit coating head suitable for fluid coating |
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| CN202238512U (en) * | 2011-09-05 | 2012-05-30 | 东莞市群跃电子材料科技有限公司 | Extrusion die head for coating light emitting diode (LED) soft light bar base material and solder mask protective film |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| JP2004148228A (en) | 2002-10-31 | 2004-05-27 | Toppan Printing Co Ltd | Method of designing die for coating device, and coating device |
| KR100867893B1 (en) | 2007-08-10 | 2008-11-10 | 주식회사 디엠에스 | Slit nozzle and coating apparatus having the same |
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2013
- 2013-05-24 KR KR1020130058855A patent/KR102052061B1/en active IP Right Grant
- 2013-07-19 MY MYPI2013701271A patent/MY176827A/en unknown
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| CN1806934A (en) * | 2005-01-19 | 2006-07-26 | 东京応化工业株式会社 | Gap nozzle |
| CN101011691A (en) * | 2006-02-03 | 2007-08-08 | 三星电子株式会社 | Narrow-gap type coating machine for manufacturing display device and method thereof |
| CN101199961A (en) * | 2006-12-12 | 2008-06-18 | 东京应化工业株式会社 | Slit nozzle |
| WO2010131580A1 (en) * | 2009-05-09 | 2010-11-18 | コニカミノルタホールディングス株式会社 | Coating method and organic electronic element |
| CN102039255A (en) * | 2011-01-28 | 2011-05-04 | 福建南平南孚电池有限公司 | Coating device and method for forming pole piece of lithium battery |
| CN202238512U (en) * | 2011-09-05 | 2012-05-30 | 东莞市群跃电子材料科技有限公司 | Extrusion die head for coating light emitting diode (LED) soft light bar base material and solder mask protective film |
Also Published As
| Publication number | Publication date |
|---|---|
| MY176827A (en) | 2020-08-24 |
| KR102052061B1 (en) | 2019-12-04 |
| CN104174548B (en) | 2018-05-11 |
| KR20140137813A (en) | 2014-12-03 |
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