CN104149036A - Micro-pore polishing equipment and micro-pore polishing process for abrasive particle flow - Google Patents
Micro-pore polishing equipment and micro-pore polishing process for abrasive particle flow Download PDFInfo
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- CN104149036A CN104149036A CN201410363244.6A CN201410363244A CN104149036A CN 104149036 A CN104149036 A CN 104149036A CN 201410363244 A CN201410363244 A CN 201410363244A CN 104149036 A CN104149036 A CN 104149036A
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Abstract
The invention discloses micro-pore polishing equipment for an abrasive particle flow. The micro-pore polishing equipment comprises a clamp, a base plate, a through-hole-shaped cavitation cavity, a high-transparency laser protection lens, a laser device, a focusing lens and an abrasive material guide channel, wherein the clamp is used for clamping a workpiece and positioning a micro-pore to be polished in the workpiece; the base plate is mounted on the clamp; the cavitation cavity is arranged on the base plate and is correspondingly communicated with the micro-pore in the workpiece; the high-transparency laser protection lens covers one side, opposite to the workpiece, of the cavitation cavity; the laser device can generate a laser beam towards the cavitation cavity; the focusing lens is arranged between the laser device and the high-transparency laser protection lens and can be used for focusing the laser beam into the cavitation cavity; the abrasive material guide channel can be used for leading pressure abrasive particle fluid into the cavitation cavity. By adopting the micro-pore polishing equipment, laser is continuously and periodically focused on the fluid to form cavitation; generated great partial pressure and a jet flow for pushing the abrasive particle flow to the micro-pore are used for continuously pushing the abrasive particle flow to flow in the micro-pore at a high speed and abrade the pore wall of the micro-pore, so that the super-precision and high-efficiency polishing is carried out on the micro-pore. The invention further discloses a micro-pore polishing process for the abrasive particle flow. By using the method disclosed by the invention, the super-precision and high-efficiency polishing can be carried out on the micro-pore.
Description
Technical field
The present invention relates to Precision Machining, relate in particular to a kind of abrasive Flow micropore polissoir that carries out polishing for metal or hard brittle materia micropore inner surface.The invention still further relates to a kind of abrasive Flow micropore glossing that micropore is carried out to polishing.
Background technology
The application of various micropores in the industries such as aircraft, automobile, electrical equipment, chemical industry, food, biologic medical is more and more extensive.As chopper hole on micropore, automotive fuel nozzle, chemical fibre filament nozzle, gold wire bonder on printed circuit board (PCB) etc.Approximately 10 microns of the spray orifice minimum diameters of chemical fiber wire nozzle wherein; Minimum approximately 25 microns of gold wire bonder chopper micropore.Utilize at present routine techniques to process the micropore inside surface roughness of these products all not ideal enough, be difficult to meet the miniaturization that product improves day by day and the quality requirement becoming more meticulous, just under this background, develop various efficient and easily micropore polishing technology just become the active demand of minute manufacturing industry instantly.
The method that is suitable at present capillary processing mainly contains: machine drilling, laser boring, spark machined and Electrolyzed Processing.But the method with machine drilling, can leave burr in the exit of micropore, this burr can affect result of use, by laser and spark machined, all can leave recast layer at micropore hole wall place, thereby affect the service life of micropore, the hole wall surface quality of micropore is worsened.The automobile oil nozzle that for example conventional method is processed, roughness is large, has flanging burr in balancing gate pit, and atomizer discharge coefficient only has 0.5 ~ 0.6.In order to meet more and more stricter emission regulation demands, diesel engine requires atomizer discharge coefficient more than 0.8, needs further to improve its discharge coefficient.
Because pore size is little, by conventional method, be difficult to improve inner wall roughness, and abrasive Flow Machining method is arisen at the historic moment just in this case.Abrasive flow machining (AbrasiveFlow Machining, be called for short " AFM ") at home also referred to as extrusion honing, under squeezing honing machine effect, the viscoplasticity half that utilization has a mobility admittedly shape abrasive material moves back and forth to part to be processed surface, thereby to the various die cavities of part with intersect aperture, arris and carry out grinding and polishing, rounding, deburring.
Abrasive Flow is that abrasive particle is with respect to the compressional movement realization of surface to be machined, Kong Yue little glossing is more difficult to realize, needed extruding force is larger, higher to the requirement of hydraulic system and equipment, thereby the micropore that at present abrasive Flow technique cannot polishing aperture be less than 50 microns.At present, abrasive Flow polishing technology is used widely in automobile nozzle manufacturing industry, but utilizes the abrasive Flow polishing micropore also less than automobile oil nozzle, and for example the small ceramic hole of 50um (using on gold wire bonder chopper), exists certain difficulty.Known according to microchannel fluid resistance computing formula, aperture is less, makes liquid enter the pressure of micropore larger (pressure and aperture square be inversely proportional to).Therefore,, for micropore, how clamp-oning in duct of high speed is a difficult problem that needs solution to abrasive Flow.If use for reference conventional abrasive Flow equipment pressure limit 0.7MPa-22.4MPa, the abrasive Flow polish pressure of 50um hole need to reach 12.8MPa-411.1MPa, if the Kong Ze of polishing 30um will reach 31MPa-995MPa, large inlet pressure like this, by hydraulic system, realizing is very difficult, Hydraulic Elements and pipeline are had to high requirement, and under so large high pressure, whole device systems is absolutely unsafe.For realizing the abrasive Flow polishing of micropore, must there is the driving pressure of stable, safety and super-pressure.
Summary of the invention
Not enough for prior art, the technical problem to be solved in the present invention a kind of partial high pressure that provides is provided and minimum micropore is carried out to abrasive Flow micropore polissoir and the glossing thereof of polishing.
In order to overcome prior art deficiency, the technical solution used in the present invention is: a kind of abrasive Flow micropore polissoir, it comprises for holding workpiece and makes workpiece need the micropore of polishing to realize the fixture of location, be installed on the base plate of fixture, be located at base plate and with the cavitation chamber of the through hole shape of the corresponding connection in micropore position of workpiece, be placed on the high protective glass thoroughly of laser of a side relative to workpiece in cavitation chamber, can produce the laser instrument towards the laser beam in described cavitation chamber, between laser instrument and the high saturating protective glass of laser, laser beam can be focused on to the condenser lens in described cavitation chamber, pressure abrasive particle fluid can be introduced to the abrasive material guiding channel in described cavitation chamber.
As a kind of improvement of the technical scheme of abrasive Flow micropore polissoir of the present invention, described abrasive material guiding channel comprise pressure abrasive particle fluid can be introduced base plate ingress pipe, be communicated with the injection groove in ingress pipe and cavitation chamber.
As a kind of improvement of the technical scheme of abrasive Flow micropore polissoir of the present invention, described ingress pipe is provided with check valve.
As a kind of improvement of the technical scheme of abrasive Flow micropore polissoir of the present invention, a described fixture side relative to base plate is provided with the recovery storage tank that can receive the abrasive Flow of discharging through micropore.
A kind of improvement as the technical scheme of abrasive Flow micropore polissoir of the present invention, described abrasive Flow micropore polissoir is also provided with feed storage tank that can pressure store abrasive particle fluid, the intake of ingress pipe stretches into below the abrasive particle fluid level of feed storage tank, the top Bonding pressure tracheae of feed storage tank.
As a kind of improvement of the technical scheme of abrasive Flow micropore polissoir of the present invention, described cavitation chamber is taper, and its major part vent cover has the high protective glass thoroughly of described laser, and microcephaly's opening is communicated with micropore.
In order to solve the defect that cannot carry out polishing to being less than the micropore of 50 microns in prior art, the process technology scheme that the present invention adopts is: a kind of abrasive Flow micropore glossing, for metal or hard brittle materia micropore inner surface are carried out to polishing, described abrasive Flow micropore glossing right to use requires the abrasive Flow micropore polissoir described in 1, comprises the following steps:
S1, workpiece is arranged on to fixture, and makes to need in workpiece the micropore connection corresponding to cavitation chamber of polishing;
S2, driving pressure abrasive particle fluid enter cavitation chamber through abrasive particle guiding channel;
S3, start laser instrument and produce laser beam, laser beam forms focus in cavitation chamber through condenser lens, and laser punctures fluid, ionize and forms cavity generation pushed at high pressure abrasive Flow and enter micropore;
S4, continue to give periodic Ear Mucosa Treated by He Ne Laser Irradiation, abrasive Flow constantly enters carries out polishing in micropore.
A kind of improvement as the technical scheme of abrasive Flow micropore glossing of the present invention, contains abrasive particle in described abrasive particle fluid and is filled in the filling liquid between abrasive particle, the particle diameter of described abrasive particle is micropore size 0.05 ~ 0.2 times.
The invention has the beneficial effects as follows: utilize Laser Focusing in fluid media (medium), the focus of assembling due to laser produces intensifies effect, the fluid of focal position can ionize, puncture moment, form plasma and generate cavity (also referred to as cavitation), utilize jet that the cavity stage of crumbling and fall forms and huge local pressure, nano particle soft abrasive fluid is pushed in micropore, supplement abrasive Flow simultaneously and continue to occur cavitation, constantly push abrasive Flow and flow in micropore high speed, thus and the polishing of the roughness realization of the micropore hole wall reduction micropore inner surface that rubs to micropore.
Accompanying drawing explanation
Fig. 1 is the structural representation of the single hole polishing embodiment of a kind of abrasive Flow micropore of the present invention polissoir.
Fig. 2 is a-quadrant partial enlarged drawing in Fig. 1.
The specific embodiment
Below embodiments of the present invention are specifically described.
As Fig. 1, shown in Fig. 2, a kind of abrasive Flow micropore of the present invention polissoir, it comprises for holding workpiece 10 and makes workpiece 10 need the micropore 11 of polishing to realize the fixture 12 of location, be installed on the base plate 15 of fixture 12, be located at base plate 15 and with the cavitation chamber 16 of the through hole shape of the micropore 11 corresponding connections in position of workpiece 10, be placed on the high protective glass 18 thoroughly of laser of a side relative to workpiece 10 in cavitation chamber 16, can produce the laser instrument towards the laser beam 22 in described cavitation chamber 16, between laser instrument and the high saturating protective glass 18 of laser, laser beam 22 can be focused on to the condenser lens 20 in described cavitation chamber 16, pressure abrasive particle fluid can be introduced to the abrasive material guiding channel 24 in described cavitation chamber 16.Abrasive Flow with nano particle is stored in the fluid reservoir with pressure, through abrasive material guiding channel, push in the cavitation chamber 16 of base plate 15 under pressure, cavitation chamber 16 1 sides are corresponding to micropore polished in workpiece 10 11 and communicate with each other, preferably openings of sizes is consistent and corresponding, utilize clamp base plate 15 and can base plate 15 be close on fixture 12 by alignment pin 17 or other connecting elements, make base plate 15 and workpiece 10 all be fixed on fixture 12, thereby make cavitation chamber 16 relative with micropore 11 positions corresponding regularly.Simultaneously; opposite side in cavitation chamber 16 arranges the high protective glass 18 thoroughly of laser that covers its opening; and fixedly fit in base plate 15 and make cavitation chamber 16 sealed air-tights; the laser beam 22 line focus lens 20 that laser instrument produces focus in the cavitation chamber 16 in micropore 11 top base plates 15; utilize Laser Focusing in fluid media (medium), the focus that the fluid of focal position is assembled due to laser produces intensifies effect and is punctured, ionizes and form cavity (also referred to as cavitation) by laser moment.Cavity there will be periodic expansion and contraction in fluid, thereby crumble and fall, form the jet that points to micropore, the speed of this jet is exceedingly fast (up to 100m/s), utilizes the at a high speed local and huge local pressure of this jet generation, promotes nano particle soft abrasive fluid and enters micropore 11.Continuing under periodic Ear Mucosa Treated by He Ne Laser Irradiation, and continue to push into cavitation chamber 16 through abrasive particle guiding channel 24 in pressure-driven abrasive Flow, make constantly to inject at a high speed micropore 11 percolation and mistake with the abrasive Flow of nano particle soft abrasive, supplement abrasive Flow simultaneously and continue to occur cavitation, constantly pushing abrasive Flow flows in micropore 11 high speeds, thereby make abrasive particle and micropore 11 inwalls produce the roughness that ablation reduces micropore inner surface, finally reach the object of polishing endoporus.
The present invention utilizes the local immense pressure of Generated by Laser-generated Cavitation as the motive force of micropore abrasive Flow polishing, replaced conventional hydraulic motive force, the formed local pressure of laser cavitation is more much larger than the pressure of traditional abrasive Flow hydraulic system, directly needing near the micropore of polishing in the spontaneous generation immense pressure that excites of internal fluid, reduce the pressure loss that pressure conduction process causes, thereby can be easily by the fluid with abrasive particle (abrasive Flow) high-speed pushing in the very little micropore of diameter, micropore inner surface is carried out to polishing, make up the deficiencies in the prior art, realize the Ultraprecise polished of micropore.And conventional abrasive Flow equipment is to be difficult to fluid to be pushed in the micropore of 50um.Meanwhile, due to Generated by Laser-generated Cavitation be local pressure, the whole immense pressure forming than hydraulic system is safer, does not have the personal safety problem under hyperbaric environment, is convenient to carry out production.
More preferably, described abrasive material guiding channel 24 comprises the injection groove 26 in ingress pipe 25, connection ingress pipe 25 and the cavitation chamber 16 that pressure abrasive particle fluid can be introduced to base plate 15, play drainage abrasive Flow is directed into cavitation chamber 16, and form buffering and adverse current resistance by elongated runner, ordering about the abrasive Flow that local immense pressure that the cavitation of laser excitation produces pushes can only spray forward, cannot upstream injection.
More preferably, described ingress pipe 25 is provided with check valve 28, abrasive Flow can only enter in cavitation chamber 16 through ingress pipe 25 and injection groove 26 from outflow in pressure vessel, cannot flow backwards, thereby fluid excites the abrasive Flow that produces pressure propelling movement to spray to micropore 11.
More preferably, described fixture 12 side relative to base plate 15 is provided with the recovery storage tank 33 that can receive the abrasive Flow of discharging through micropore 11, abrasive Flow recycling can be saved to raw material, keeps work area clean health simultaneously.
More preferably, described abrasive Flow micropore polissoir is also provided with feed storage tank 30 that can pressure store abrasive particle fluid, the intake of ingress pipe 25 stretches into below the abrasive particle fluid level of feed storage tank 30, the top Bonding pressure tracheae 31 of feed storage tank 30, Bonding pressure air chamber, under the effect of compressed air injection feed storage tank 30, force abrasive Flow to enter ingress pipe 25 and inject groove 26, enter in the cavitation chamber 16 in base plate 15, thereby abrasive Flow is transported to the top that polished workpiece needs polishing micropore 11, simultaneously lasting supply abrasive Flow under compressed air effect.
More preferably; described cavitation chamber 16 is taper; its major part vent cover has the high protective glass 18 thoroughly of described laser, and microcephaly's opening is communicated with micropore 11, and the laser of being convenient to larger light beam is injected; improve the cavity volume in cavitation chamber 16; the pressure producing all, from less jet ejection, improves the jet pressure spraying, and makes abrasive particle in abrasive Flow under the guiding of inclined wall, produce non-directional motion simultaneously; increase the contact probability of abrasive particle and micropore 11, improve the efficiency of polishing.
In order to solve the defect that cannot carry out polishing to being less than the micropore of 50 microns in prior art, the following novel technology that the present invention adopts, realizes ultrafine micropore and carries out the polishing of ultraprecise high efficiency.An abrasive Flow micropore glossing, for metal or hard brittle materia micropore inner surface are carried out to polishing, described abrasive Flow micropore glossing right to use requires the abrasive Flow micropore polissoir described in 1, comprises the following steps:
S1, workpiece being arranged on to fixture, and making to need in workpiece the micropore connection corresponding to cavitation chamber of polishing, is that abrasive Flow can enter from cavitation chamber and injection stream is crossed micropore.
S2, driving pressure abrasive particle fluid enter cavitation chamber through abrasive particle guiding channel, provide continuously polishing process required friction abrasive material.
S3, startup laser instrument produce laser beam, laser beam forms focus in cavitation chamber through condenser lens, laser punctures fluid, ionize and forms cavity and produce pushed at high pressure abrasive Flow and enter micropore, cavitation produces huge local pressure as ordering about the mobile propelling movement motive power of abrasive Flow, abrasive material flow at high speed under motive propelling movement is got up micropore inner surface is produced to extruding and ablation, realizes its polishing.
S4, continue to give periodic Ear Mucosa Treated by He Ne Laser Irradiation, abrasive Flow constantly enters carries out polishing in micropore.
More preferably, in described abrasive particle fluid, contain abrasive particle and be filled in the filling liquid between abrasive particle, make can force solidliquid mixture to enter from ingress pipe under compressed-air actuated pressure, the particle diameter of described abrasive particle is 0.05 ~ 0.2 times of micropore size, being convenient to abrasive particle flows freely into and flows out micropore, have simultaneously and can carry out grinding to micropore inwall, reach reasonable ground effect.
Above disclosed is only the preferred embodiments of the present invention, certainly can not limit with this interest field of the present invention, and the equivalent variations of therefore doing according to the present patent application the scope of the claims, still belongs to the scope that the present invention is contained.
Claims (8)
1. an abrasive Flow micropore polissoir, it is characterized in that: described abrasive Flow micropore polissoir comprises for holding workpiece and makes workpiece need the micropore of polishing to realize the fixture of location, be installed on the base plate of fixture, be located at base plate and with the cavitation chamber of the through hole shape of the corresponding connection in micropore position of workpiece, be placed on the high protective glass thoroughly of laser of a side relative to workpiece in cavitation chamber, can produce the laser instrument towards the laser beam in described cavitation chamber, between laser instrument and the high saturating protective glass of laser, laser beam can be focused on to the condenser lens in described cavitation chamber, pressure abrasive particle fluid can be introduced to the abrasive material guiding channel in described cavitation chamber.
2. abrasive Flow micropore polissoir according to claim 1, is characterized in that: described abrasive material guiding channel comprises can introduce pressure abrasive particle fluid the injection groove in ingress pipe, connection ingress pipe and the cavitation chamber of base plate.
3. abrasive Flow micropore polissoir according to claim 2, is characterized in that: described ingress pipe is provided with check valve.
4. abrasive Flow micropore polissoir according to claim 1, is characterized in that: a described fixture side relative to base plate is provided with the recovery storage tank that can receive the abrasive Flow of discharging through micropore.
5. abrasive Flow micropore polissoir according to claim 1, it is characterized in that: described abrasive Flow micropore polissoir is also provided with feed storage tank that can pressure store abrasive particle fluid, the intake of ingress pipe stretches into below the abrasive particle fluid level of feed storage tank, the top Bonding pressure tracheae of feed storage tank.
6. abrasive Flow micropore polissoir according to claim 1, is characterized in that: described cavitation chamber is taper, and its major part vent cover has the high protective glass thoroughly of described laser, and microcephaly's opening is communicated with micropore.
7. an abrasive Flow micropore glossing, for metal or hard brittle materia micropore inner surface are carried out to polishing, is characterized in that, described abrasive Flow micropore glossing right to use requires the abrasive Flow micropore polissoir described in 1, comprises the following steps:
S1, workpiece is arranged on to fixture, and makes to need in workpiece the micropore connection corresponding to cavitation chamber of polishing;
S2, driving pressure abrasive particle fluid enter cavitation chamber through abrasive particle guiding channel;
S3, start laser instrument and produce laser beam, laser beam forms focus in cavitation chamber through condenser lens, and laser punctures fluid, ionize and forms cavity generation pushed at high pressure abrasive Flow and enter micropore;
S4, continue to give periodic Ear Mucosa Treated by He Ne Laser Irradiation, abrasive Flow constantly enters carries out polishing in micropore.
8. abrasive Flow micropore glossing according to claim 7, is characterized in that: in described abrasive particle fluid, contain abrasive particle and be filled in the filling liquid between abrasive particle, the particle diameter of described abrasive particle is micropore size 0.05 ~ 0.2 times.
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| CN201410363244.6A CN104149036B (en) | 2014-07-29 | A kind of abrasive Flow micropore polissoir and glossing thereof |
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| CN201410363244.6A CN104149036B (en) | 2014-07-29 | A kind of abrasive Flow micropore polissoir and glossing thereof |
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| CN104149036A true CN104149036A (en) | 2014-11-19 |
| CN104149036B CN104149036B (en) | 2017-01-04 |
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| CN106166644A (en) * | 2015-05-21 | 2016-11-30 | 罗伯特·博世有限公司 | For the laser drill of workpiece or the method for cut and for laser drill or the system of cut |
| CN108526824A (en) * | 2018-04-18 | 2018-09-14 | 中国工程物理研究院机械制造工艺研究所 | A kind of micropore combined machining method |
| CN109773662A (en) * | 2019-02-21 | 2019-05-21 | 上海理工大学 | Using the inner hole of workpiece burnishing device of abrasive water-jet |
| CN110116363A (en) * | 2019-04-30 | 2019-08-13 | 江苏师范大学 | A kind of micropore surface Strengthening and Polishing device and method |
| CN110157879A (en) * | 2019-04-28 | 2019-08-23 | 江苏大学 | Increasing material manufacturing shapes bore area polishing and strengthens capsule and method |
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| CN110153708A (en) * | 2019-04-25 | 2019-08-23 | 孙树峰 | A kind of spontaneous abrasive Flow Compound Machining head of laser-spraying liquid bunch and working method |
| CN110614588A (en) * | 2019-10-16 | 2019-12-27 | 浙江工业大学 | Rotary polishing device and method for blind hole polishing |
| CN110842654A (en) * | 2019-11-13 | 2020-02-28 | 中国航发动力股份有限公司 | Abrasive flow quantitative grinding method |
| CN112775856A (en) * | 2021-01-28 | 2021-05-11 | 佛山科学技术学院 | Mold core polishing device and machining method for laser-induced abrasive particle micro-jet |
| CN114231898A (en) * | 2021-12-24 | 2022-03-25 | 中国电子科技集团公司第十四研究所 | High-precision high-wear-resistance titanium alloy gear forming method |
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| CN110157879B (en) * | 2019-04-28 | 2020-11-03 | 江苏大学 | Integrated processing system and method for polishing and strengthening surface of additive manufacturing forming inner hole |
| CN110116363A (en) * | 2019-04-30 | 2019-08-13 | 江苏师范大学 | A kind of micropore surface Strengthening and Polishing device and method |
| CN110116363B (en) * | 2019-04-30 | 2021-09-28 | 江苏师范大学 | Microporous surface strengthening and polishing device and method |
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| CN110842654B (en) * | 2019-11-13 | 2021-10-22 | 中国航发动力股份有限公司 | Abrasive flow quantitative grinding method |
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| CN114227546A (en) * | 2021-08-30 | 2022-03-25 | 浙江工业大学 | Polishing method and device for realizing surface fine structure |
| CN114231898A (en) * | 2021-12-24 | 2022-03-25 | 中国电子科技集团公司第十四研究所 | High-precision high-wear-resistance titanium alloy gear forming method |
| CN117680779B (en) * | 2024-02-04 | 2024-04-16 | 成都鼎易精密模具有限公司 | Special processing method for complex cavity |
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