CN104148660A - Plasma device for manufacturing metallic powder and method for manufacturing metallic powder - Google Patents
Plasma device for manufacturing metallic powder and method for manufacturing metallic powder Download PDFInfo
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- CN104148660A CN104148660A CN201410424660.2A CN201410424660A CN104148660A CN 104148660 A CN104148660 A CN 104148660A CN 201410424660 A CN201410424660 A CN 201410424660A CN 104148660 A CN104148660 A CN 104148660A
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- cooling tube
- cooling
- metal
- reaction vessel
- metal dust
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B22—CASTING; POWDER METALLURGY
- B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
- B22F9/00—Making metallic powder or suspensions thereof
- B22F9/02—Making metallic powder or suspensions thereof using physical processes
- B22F9/14—Making metallic powder or suspensions thereof using physical processes using electric discharge
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J19/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
- B01J19/08—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
- H05H1/00—Generating plasma; Handling plasma
- H05H1/24—Generating plasma
- H05H1/26—Plasma torches
- H05H1/32—Plasma torches using an arc
- H05H1/42—Plasma torches using an arc with provisions for introducing materials into the plasma, e.g. powder, liquid
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- Engineering & Computer Science (AREA)
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- Chemical & Material Sciences (AREA)
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- General Health & Medical Sciences (AREA)
- Health & Medical Sciences (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Organic Chemistry (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Manufacture Of Metal Powder And Suspensions Thereof (AREA)
- Physical Or Chemical Processes And Apparatus (AREA)
- Plasma Technology (AREA)
Abstract
A plasma device for manufacturing metallic powder comprising: a reaction container fed with metal materials; a plasma torch unit for producing plasma between the metallic materials in the reaction container to evaporate the metallic material into metallic vapor; a carrier gas providing portion for providing a carrier gas for carrying the metallic evaporation into the reaction container; and a cooling tube for cooling the metallic vapor carried by the carrier gas from the reaction container and thereby manufacturing a metallic powder, is characterized in that the cooling tube comprises an indirect cooling division, which indirectly cools the metallic vapor and/or the metallic powder carried by the carring gas from the reaction container by cooling the periphery of the cooling tube with a cooling fluid without directly contacting the cooling fluid; and a direct cooling division, which follows the indirect cooling division and directly cools the metallic vapor and/or the metallic powder by directly contacting the cooling fluid. Wherein the cooling tube is provided in the reaction container in a manner that the downstream side in a longitudinal direction of the cooling tube is located at the upside of the reaction container and the cooling tube is inclined at 10 to 80 DEG opposite to a horizontal direction, and a scraper for removing deposits attached on an inner wall of the cooling tube is inserted in the cooling tube from the downstream side of the longitudinal direction of the cooling tube.
Description
The application is that application number is 201210213479.8, and the applying date is on June 25th, 2012, and what denomination of invention was the application for a patent for invention of " manufacture method of plasma device and metal dust for metal dust manufacture " divides an application.
Technical field
The present invention relates to manufacture the plasma device of metal dust, especially, relate to and possess tubulose cooling tube and carry out the cooling manufacture method of manufacturing plasma device and the metal dust of metal dust by the metallic vapour that utilizes this cooling tube to form process melting, evaporation.
Background technology
When manufacturing the electronic units such as electronic circuit or wiring substrate, resistance, capacitor, IC assembly, in order to form conductor tunicle, electrode, use be conductive metal powder.As the desired characteristic of such metal dust, proterties, can enumerate: fine-powder, shape of particle or the particle diameter that impurity is few, average grain diameter is 0.01～10 about μ m evenly, good dispersion, the crystallinity of cohesion less, in slurry be good etc.
In recent years, follow the miniaturization of electronic unit, wiring substrate, thin layer, the thin spaceization of conductor tunicle and electrode are developed, thereby require the metal dust of finer, spherical and high crystalline.
As manufacturing one of method of so trickle metal dust, known have a following plasma device: utilize plasma to make raw metal melting in reaction vessel, evaporation, then cool metal steam, obtains metal dust (with reference to patent documentation 1,2) thereby it is condensed.In these plasma devices, due to metallic vapour is condensed in gas phase, therefore can produce the metallic that impurity is few, fine, spherical and crystallinity is high.
These plasma devices all possess long tubulose cooling tube, and the carrier gas that comprises metallic vapour is carried out to the cooling of a plurality of stages.For example, in patent documentation 1, possess by will being directly mixed into and carrying out the 1st cooling cooling end in above-mentioned carrier gas and carry out the 2nd cooling cooling end by direct mixing normal temperature refrigerating gas after this through pre-warmed hot gas.
In addition, in the plasma device of patent documentation 2, possess by make cooling with fluid in tubular body circulation around, thereby in the situation that not making this fluid directly contact with above-mentioned carrier gas by the cooling indirect cooling zone (the 1st cooling end) of this carrier gas; By direct combination cooling in carrier gas, with fluid, carry out cooling direct cooling zone (the 2nd cooling end) after this.
Particularly, with regard to the latter's situation, can stably carry out generation, growth and the crystallization of core, can obtain having through the particle diameter of control and the metal dust of size distribution.
Prior art document
Patent documentation
Patent documentation 1: No. 2007/0221635 description of U.S. Patent Application Publication
Patent documentation 2: No. 3541939, Japan Patent
Summary of the invention
The problem that invention will solve
But with regard to the plasma device of recording in above-mentioned document, when metallic vapour condenses in cooling tube, a part wherein will inevitably be attached to the inwall of cooling tube.This attachment is slowly piled up, and can cause gradually mobile, some situation of carrier gas in cooling tube that hinder and issue the but problem of blockage of raw food.
Particularly, the device that possesses the patent documentation 1 that sprays the cooling mechanism with fluid with Zone Full in cooling tube is compared, there is following problems in the plasma device that patent documentation 2 is recorded: the inwall at the upstream side (the 1st cooling end side) of its cooling tube, more easily adheres to attachment.
In the past, in order to remove such attachment, must be regularly and/or make aperiodically plasma device shut down, after device is fully cooling, disassembles cooling tube and remove the attachment in pipe.
But these plasma devices, after plasma is occurred, still need considerable time until can stablize generation metallic vapour.Therefore, in order to remove attachment, except from plasma device is stopped to disassembling required time of cooling tube and the actual needed time of operation of removing of carrying out attachment, also need to be until can stablize the needed time of metallic vapour that generates, these consideration of viewpoint from the production efficiency of metal dust existing problems after the running of device is restarted.
The object of the present invention is to provide and can make plasma device that the problems referred to above are solved and the manufacture method of metal dust, wherein, in the metal dust manufacture with cooling tube, use in plasma device, can easily remove attachment removal, be piled up in the attachment of the inwall of cooling tube, obtain higher production efficiency.The method of dealing with problems
The invention provides a kind of metal dust manufacture plasma device, it possesses: the reaction vessel that is wherein supplied to raw metal; And described reaction vessel in raw metal between generate plasma, make described raw metal evaporate to generate the plasma gun of metallic vapour; In described reaction vessel, supply with for carrying the carrier gas supply unit of the carrier gas of described metallic vapour; And, the described metallic vapour that utilizes described carrier gas to carry from described reaction vessel is carried out cooling to generate the cooling tube of metal dust, it is characterized in that, described cooling tube possesses indirect cooling zone and direct cooling zone, thus described indirect cooling zone by with the cooling surrounding with the cooling described cooling tube of fluid in the situation that do not make to utilize described carrier gas directly to contact and carry out indirectly cooling to described metallic vapour and/or metal dust with fluid from the described metallic vapour of described reaction vessel conveying and/or metal dust and this are cooling; After described direct cooling zone is configured in described indirect cooling zone, thereby coolingly with fluid, contact and carry out directly cooling to described metallic vapour and/or metal dust with described metallic vapour and/or metal dust by making, and, by described cooling tube with its length direction (Long hand direction) the mode relative level direction that is positioned at top 10～80 ° of ground that tilt in downstream are arranged at described reaction vessel, and by the scraper plate of attachment for removing the inwall that is attached to described cooling tube from the length direction downstream intercalation of described cooling tube in described cooling tube.
The effect of invention
Plasma device of the present invention is because the mode relative level direction that cooling tube is positioned to top with its length direction downstream is arranged at reaction vessel obliquely, and by the scraper plate of attachment that adheres to, is piled up in cooling tube inwall for scraping from the downstream intercalation of cooling tube in cooling tube, therefore, by making this scraper plate move back and forth in cooling tube and/or drive, not only can in the situation that not making device shut down, remove attachment, and can easily reclaim, discharge the attachment scraping, and then production efficiency that can tremendous raising metal dust.
Accompanying drawing explanation
Fig. 1 is the figure that the plasma device of the first embodiment is shown.
Fig. 2 (A)～(C) is the figure that the scraper plate of the first embodiment is shown.
Fig. 3 (A) is (B) figure that the plasma device of the second embodiment is shown.
Fig. 4 (A)～(E) is the figure that the scraper plate of the second embodiment is shown.
Fig. 5 is the figure that the plasma device of the 3rd embodiment is shown.
Fig. 6 (A)～(C) is the figure that the scraper plate of the 3rd embodiment is shown.
Symbol description
1 plasma device
2 reaction vessels
3 cooling tubes
4 plasma guns
10 carrier gas supply units
20 scraper plates
The specific embodiment
Below, based on the specific embodiment, the present invention will be described, but the present invention is not limited to this.
[the first embodiment]
Fig. 1 shows the first embodiment, this first embodiment has been applied the present invention in the transferred-arc plasma device identical with above-mentioned patent documentation 2, wherein, in the inside of reaction vessel 2, make raw metal melting, evaporation, the metallic vapour generating is interior cooling at cooling tube 3, it is condensed, thereby generate metallic.
It is pointed out that in the following description, described upstream side or downstream refer to shown in the arrow in Fig. 1 on the length direction of cooling tube 3 towards, refer to the above-below direction of the in the vertical direction shown in the arrow in Fig. 1 above or below described.
In addition, in the present invention, as raw metal, so long as the conductive material of the metal ingredient that contains metal target powder is just not particularly limited, except simple metal, also can use the alloy that comprises two or more metal ingredients or compound, mixture, compound etc.As an example of metal ingredient, can enumerate silver, gold, cadmium, cobalt, copper, iron, nickel, palladium, platinum, rhodium, ruthenium, tantalum, titanium, tungsten, zirconium, molybdenum, niobium etc.Although be not particularly limited, from processing ease, preferably use the big or small granular or block metal material in number mm～tens of mm left and right or alloy material as raw metal.
Below, for the ease of understanding, using and manufacture nickel by powder as metal dust, use metallic nickel to describe for example as the situation of raw metal, but the present invention is not limited thereto.
For metallic nickel, before device entry into service, in advance at the interior preparation ormal weight of reaction vessel 2, after device entry into service, the amount according to becoming metallic vapour from reaction vessel 2 interior minimizings is supplemented to reaction vessel 2 is interior from material inlet 9 at any time.Therefore, plasma device 1 of the present invention can long-time continuous be manufactured metal dust.
Above reaction vessel 2, dispose plasma gun 4, via not shown supply pipe, to plasma gun 4, supply with the gas that generates plasma.Plasma gun 4 is using negative pole 6 as negative electrode, using the not shown positive pole that is arranged at plasma gun 4 inside as anode, produce plasma 7, then anode is moved to anodal 5, thus, between negative pole 6 and anodal 5, produce plasma 7, utilize the heat of this plasma 7 to make at least a portion melting of the metallic nickel in reaction vessel 2, the fused solution of generating nickel (molten Soup) 8.Further, plasma gun 4 utilizes the heat of plasma 7 that a part for fused solution 8 is evaporated, generating nickel steam (being equivalent to metallic vapour of the present invention).
Carrier gas supply unit 10 is the carrier gas for carrying nickel steam to the interior supply of reaction vessel 2.As carrier gas, in the situation that the metal dust of manufacturing is not restriction of noble metal, can use the mist of the non-active gas such as the oxidizing gas such as air, oxygen, water vapour, nitrogen, argon gas, these gases etc., in the situation that manufacture is easy to the base metals (base metal) such as the nickel, steel of oxidation, preferably use non-active gas.Unless otherwise specified, in the following description, use nitrogen as carrier gas.
It should be noted that, as required, also can in carrier gas, mix the organic compounds such as the reducibility gas such as hydrogen, carbon monoxide, methane, ammonia or alcohols, carboxylic acids, in addition, in order to improve, adjust performance, the characteristic of metal dust, can also contain the compositions such as oxygen or other phosphorus, sulphur.The gas of the generation plasma using in the generation of plasma in addition, also can be used as the part performance function of carrier gas.
Between near the upstream extremity of reaction vessel 2 and cooling tube 3 (in Fig. 1 the end of illustrated cooling tube upstream side), be provided with the introducing port 11 that diameter is less than the internal diameter of cooling tube 3, reaction vessel 2 and cooling tube 3 are communicated with via introducing port 11.Therefore the carrier gas, containing at the nickel steam of reaction vessel 2 interior generations is transported to cooling tube 3 by introducing port 11.
Cooling tube 3 possesses the indirectly cooling indirect cooling zone IC of nickel steam in carrier gas and/or nickel by powder and direct cooling nickel steam in carrier gas and/or the direct cooling zone DC of nickel by powder of being contained in of being contained in.In addition, as described later, cooling tube 3 also can further possess standby district AC.
At indirect cooling zone IC, use and coolingly with fluid or external heater etc., the surrounding of cooling tube 3 is carried out to cooling or heating, control the temperature of indirect cooling zone IC, carry out thus cooling.As cooling, with fluid, above-mentioned carrier gas or other gas be can use, in addition, water, warm water, methyl alcohol, ethanol or their liquid such as mixture also can be made.Wherein, from the viewpoint of cooling effectiveness and cost, preferably coolingly with fluid, make water or warm water, thereby make its surrounding's circulation at cooling tube 3 carry out cooling to cooling tube 3.
At indirect cooling zone IC, the nickel steam that keeps high temperature and be transported in the carrier gas in cooling tube 3 is cooled with the speed comparatively relaxing under radiation effects, stablize and uniform temperature controlled atmosphere in carry out generation, growth, the crystallization of core, in carrier gas, generate thus the uniform nickel by powder of particle diameter.
At direct cooling zone DC, the nickel steam transporting from indirect cooling zone IC and/or nickel by powder are sprayed or mixes cooling with fluid that never illustrated cooling fluid supply unit is supplied with, carry out directly cooling.It should be noted that, directly cooling zone DC is used cooling with fluid can with in cooling zone IC indirectly, use cooling with fluid-phase together, also can be different, but from the viewpoint of easy operating and cost, preferably use the gas (in following embodiment be nitrogen) identical with above-mentioned carrier gas.
In the situation that using gas, identical with above-mentioned carrier gas, can mix as required the compositions such as use reducibility gas or organic compound, oxygen, phosphorus, sulphur.In addition, cooling, contain liquid with fluid in the situation that, the state by this liquid with spraying imports in cooling tube 3.
Indirectly in the carrier gas in the IC of cooling zone, mix and have nickel steam and nickel by powder, but than its upstream side, the ratio of the nickel steam in downstream is lower.In addition, different according to device, directly in the carrier gas in the DC of cooling zone, also can mix and have nickel steam and nickel by powder.But as mentioned above, the preferably generation of core, growth, crystallization are indirectly carrying out and are completing in the IC of cooling zone, therefore, do not contain nickel steam in the carrier gas in preferably direct cooling zone DC.
In the running of plasma device 1, in above-mentioned cooling tube 3, a part for the nickel by powder in carrier gas or the precipitate that comes from nickel steam can slowly be attached to the inwall of cooling tube 3, in some situation, can form oxide or other compound and pile up.When these accumulations from the attachment of nickel steam further increase, can cause the narrow diameter of cooling tube 3 or the movement disorder of carrier gas, not only can bring harmful effect to the control of the particle diameter of nickel by powder, size distribution, in some situation, also may cause the interior obstruction of cooling tube 3.Particularly, find: in the upstream side with the cooling tube 3 of indirect cooling zone IC, the tendency that exists attachment to increase.
Based on aftermentioned reason, in the present invention, preferably at the downstream of cooling tube 3 or near guiding tube that to possess the carrying direction guiding of the carrier gas of carrying metal dust it be the direction different from the length direction of cooling tube 3.
The guiding tube 13 of the first embodiment guides carrier gas towards the substantially vertical direction of the length direction with cooling tube 3.The carrier gas being guided by guiding tube 13 is carried to not shown grabber, isolates metal dust and carrier gas in this grabber, and reclaims metal dust.In addition, in grabber, the separated carrier gas obtaining also can be configured to the form that can recycle at carrier gas supply unit 10.
Here, the guiding gas blowing unit towards channeling direction ejection gas also can be set in guiding tube 13 or near it.Under guiding gas exists, can successfully carry out the conversion of carrier gas carrying direction.As guiding gas, can use the gases identical with above-mentioned carrier gas such as nitrogen.
One of feature of the present invention is to be attached to the attachment in cooling tube 3 and to have scraper plate in order to remove, and the downstream intercalation from above-mentioned cooling tube by this scraper plate.
As shown in Figure 2, the scraper plate 20 of the first embodiment is in one end of bar-shaped axle 21, to have for scraping the shape of the scraper head 22 of attachment, and preferably the total length of scraper plate 20 is greater than the length of the length direction of cooling tube 3.In scraper plate 20, scraper head 22 is intercalated in cooling tube 3, and axle 21 is intercalated in the insert port 31 of the downstream that is arranged on cooling tube 3, and its at least a portion is disposed at outside cooling tube 3.
In the existing plasma device that possesses cooling tube, grabber is arranged on the extended line of tubulose cooling tube more, the scraper plate 20 itself that configures above-mentioned shape is difficulty comparatively, but by possessing guiding tube 13, can on the extended line of cooling tube 3, form space, thereby be easy to configure scraper plate 20, therefore preferably.But if it is complicated not mind device, also can not possess guiding tube and configure scraper plate 20, in the present invention, guiding tube is not necessary formation.
Because axle 21 is installed to be intercalated in the state of insert port 3, therefore, axle 21 can freely move back and forth along the length direction of cooling tube 3, and, can also freely carry out the axle circumference (Shaft week り centered by the axle of axle 21) revolution of direction.
It should be noted that, the radially maximum length of (direction vertical with axle 21) of scraper head 22 is set as less than the minimum diameter in cooling tube 3.
In the first embodiment of above-mentioned formation, when regularly or aperiodically removing attachment, handle the axle 21 outside cooling tube 3, axle 21 was turned round along axle circumferencial direction in the reciprocating while of the length direction along cooling tube 3.Now, the manipulation of axle 21 is not limited to staff, also can be undertaken by driving mechanisms such as motors.Then,, by utilizing the attachment of 22 pairs of cooling tube 3 inwalls of scraper head to apply physical force, can effectively scrape attachment.
Fig. 2 (A)～(C) is the details drawing of the scraper head 22 of the first embodiment, Fig. 2 (B) be while observing from the II-II line of Fig. 2 (A) to view, Fig. 2 (C) be while observing from the IIA-IIA ' line of Fig. 2 (B) to view.
As shown, scraper head 22 has the first scraper head 22a, the second scraper head 22b, outstanding pawl 27, the first scraper head 22a and the second scraper head 22b and is all the annular shape with 3 spokes.
In addition, the first scraper head 22a, the second scraper head 22b possess respectively claw 23a and the 23b of the different zigzag fashion of tooth angle.Therefore, when scraper head 22 is moved to the upstream side of cooling tube 3, first by the claw 23a of the first scraper head 22a, roughly scrape the attachment of cooling tube 3 inwalls, then the claw 23b by the second scraper head 22a scrapes residual attachment.
In addition, because the position on the scraper head 22 with introducing port 11 face-offs is provided with outstanding pawl 27, therefore, as required, also can, by making scraper head 22 in the upstream extremity revolution of cooling tube 3 and/or moving back and forth, remove and be attached to introducing port 11 and attachment around thereof.
As long as the material of scraper plate 20 possesses heat resistance, preferably by forming such as SUS, Inconel alloy etc.In addition, can, by axle 21 and scraper head 22 moulding integratedly, also their splits can be engaged.In addition, as long as axle 21 and scraper head 22 can move integratedly, they might not be fixed, for example, can be by them via connecting such as elastomeric damper mechanisms such as comprising spring.
Do not carry out attachment remove operation time, when for example manufacturing metal dust, preferably make scraper head 22 in the standby of the downstream of cooling tube 3.
As long as the position of readiness of scraper head 22 is the downstream of the indirect cooling zone IC (the 1st cooling end) substantially finishing in the growth of metal dust, more preferably near downstream.By making the position of readiness of scraper head 22, it is direct cooling zone DC downstream afterwards, can suppress attachment adhering to scraper head 22, in addition, can reduce because scraper head 22 makes carrier gas and produce sinuous flow and then the particle diameter of metal dust and size distribution are brought to dysgenic risk.
In the first embodiment, in cooling tube 3, be provided with standby district AC, when removing operation beyond, make scraper head 22 in district AC standby for standby.
But, standby district AC might not be set, also can be as described later in directly cooling zone DC standby.In addition, in the situation that make scraper head 22 form or form the shape that is difficult for occurring carrier gas sinuous flow by be difficult for there is material that attachment adheres to and the member of shape, also can further make scraper head 22 in upstream side standby.
One of feature of plasma device 1 of the present invention is that the mode relative level direction that cooling tube 3 is positioned to top with its downstream tilts with the scope of 10～80 °.
In the existing plasma device that possesses cooling tube, how by cooling tube towards horizontal direction or vertical direction setting, but in the situation that cooling tube along continuous straight runs is arranged, can cause being stranded in cooling tube with the attachment that scraper plate 20 scrapes, therefore the mechanism that reclaims the attachment being detained need to be newly set.
In the situation that cooling tube is vertically arranged, the attachment scraping can not be stranded in cooling tube, but for straight down for the situation of the cooling tube in (downstream of cooling tube be positioned at below), exist the attachment scraping to sneak into as in the metal dust of object and the hidden danger that causes the quality of metal dust to reduce.In addition, for straight up for the situation of the cooling tube in (downstream of cooling tube be positioned at top), exist the attachment scraping to fall back in reaction vessel and cause the hidden danger that temperature reduces, impurity concentration increases of solution.
The present invention possesses above-mentioned scraper plate 20, and cooling tube 3 be take to relative level direction as 10～80 ° of tilted settings of scope simultaneously, thus, without recovering mechanism is newly set especially, the attachment with scraper plate 20 scrapes can be collected in to the upstream side of cooling tube 3.Preferred angle of inclination is 20～70 °, and preferred angle of inclination is 30～60 °.
The cooling tube 3 of the first embodiment shown in Fig. 1 is positioned at 45 ° of settings of mode relative level direction inclination of top with its downstream.
Even if the attachment being scraped by scraper plate 20 does not possess special recovering mechanism yet, the upstream side that also can only collect cooling tube 3 by reciprocating motion and the gravity of scraper plate 20.
It should be noted that, in the first embodiment, because reaction vessel 2 and cooling tube 3 are communicated with via the diameter introducing port 11 less than the internal diameter of cooling tube 3, therefore, the attachment of collection is difficult for falling back in reaction vessel 2.Like this, in the present invention, preferably the upstream extremity of cooling tube 3 is communicated with reaction vessel 1 via the diameter introducing port 11 less than the internal diameter of cooling tube 3.
In addition, in the first embodiment, at the upstream side of cooling tube 3, possesses the peristome 32 attachment being discharged to outside cooling tube 3.When the direct cooling zone DC with cooling fluid supply unit (not shown) arranges peristome 32, because the formation of cooling fluid supply unit is complicated, therefore preferably peristome 32 is arranged at indirect cooling zone IC.
At peristome 32, be provided with can not produce the switch gate 33 that the mode of difference in height forms with the inwall of cooling tube 3, its only attachment remove operation time open.Thus, when common metal dust is manufactured, can suppress as far as possible carrier gas generation sinuous flow.
Linking part 34 arranges to surround the mode of switch gate 33, facing to linking part 34, removable returnable 35 is installed.Attachment remove operation time, shutter door 33 is open, attachment is from peristome 32 discharge to cooling tube 3, and reclaimed by returnable 35.
[the second embodiment]
Fig. 3 and Fig. 4 show the second embodiment, in figure, to the position identical with the first embodiment, give the symbol identical with the first embodiment, and the description thereof will be omitted below.
In the second embodiment, the cooling tube 103 of plasma device 101 is positioned at 70 ° of settings of mode relative level direction inclination of top with its downstream.In addition, switch gate 133 is the sliding door type along the outer wall slip of cooling tube 103.
Fig. 3 (B) be while observing from the III-III line of Fig. 3 (A) to view, as shown in the drawing, in the second embodiment, crooked guiding tube 113 is connected with the downstream end face of cooling tube 103, thus the carrying direction of the carrier gas that comprises metal dust is guided to the direction different from the length direction of cooling tube 103.
Fig. 4 (A)～(E) is the details drawing of the scraper head 122 of the second embodiment, Fig. 4 (B) be while observing from the IV-IV line of Fig. 4 (A) to view, Fig. 4 (C) be while observing from the IVA-IVA ' line of Fig. 4 (B) to view, Fig. 4 (D) and Fig. 4 (E) be while observing from the IVB-IVB ' line of Fig. 4 (B) to view.
As shown in Fig. 4 (A), near an end of the scraper plate 120 of the second embodiment, have for making and utilize staff to become and be easy to handle 128 operation of axle 121.
In addition, as shown in Fig. 4 (B)～Fig. 4 (E), scraper head 122 is the shape that the claw 124 by different 2 claws 125,126 of 4 spokes, outstanding length and ring-type forms, described 4 spokes become radiated entends centered by axle 121, and the external diameter of scraper head 122 forms slightly less than the internal diameter of cooling tube 103.
In addition, as shown in Fig. 3 (A), in the downstream of cooling tube 103, possess the shaft guide (シ ャ Off ト ガ イ De) 140 that motion when scraper plate 120 is moved back and forth is guided, in the present embodiment, scraper plate 120 is intercalated in the patchhole 131 of shaft guide 140.
In the second embodiment, while removing attachment, employment hand operated handle 128 makes scraper plate 120 revolution occur and/or move back and forth.
It should be noted that, because scraper head 122 has three kinds of claws, therefore at scraper head 122 when the upstream side of cooling tube 103 moves, can first utilize the first the most outstanding outstanding pawl 125 roughly to scrape attachment, then utilize the second outstanding pawl 126 and ring-type claw 124 that residual attachment is scraped equably, thereby can enough less power effectively remove attachment.
[the 3rd embodiment]
Fig. 5 and Fig. 6 show the 3rd embodiment, in figure, to the position identical with the first～bis-embodiment, give the symbol identical with the first～bis-embodiment, and the description thereof will be omitted below.
In the 3rd embodiment, the cooling tube 203 of plasma device 201 is positioned at 20 ° of settings of mode relative level direction inclination of top with its downstream.In present embodiment, with regard to guiding tube 213, its section shape and diameter and cooling tube 203 are roughly the same, by the downstream continuous bend from cooling tube 203, the carrying direction of the carrier gas that comprises metal dust are guided to the direction different from the length direction of cooling tube 203.
In present embodiment, do not possess standby district AC, scraper head 222 is in directly cooling zone DC standby.
In addition, in the present embodiment, the angle of inclination of cooling tube 203 is more slow, is 20 °, therefore between reaction vessel 2 and cooling tube 203, introducing port is not set.
Provided upstream at cooling tube 203 is equipped with switch gate 33, and removable returnable 235 is not directly installed on cooling tube 203 to cover the mode of this switch gate 33 via linking part.In the inside of returnable 235, be provided with demarcation strip 236, it can be suppressed under the existence of carrier gas that switch gate 33 flows into returnable 235 when open and cause the attachment in returnable 235 to turn back in cooling tube 203.
The one end that is intercalated in the axle 221 of shaft guide 140 is connected with squeegee drive part 240, and squeegee drive part 240 possesses limit makes scraper plate 220 revolutions, limit make its driving mechanism moving back and forth in the longitudinal direction (not shown).
Fig. 6 (A)～(C) is the details drawing of the scraper head 222 of the 3rd embodiment, Fig. 6 (B) be while observing from the VI-VI line of Fig. 6 (A) to view, Fig. 6 (C) be while observing from the VIA-VIA ' line of Fig. 6 (B) to view.
As shown in Fig. 6 (A)～(C), the scraper plate 220 of the 3rd embodiment has dome (ド ー system) scraper head 222 of shape.As shown in the figure, with regard to scraper head 222, near extend one end of axle 221 four arcuation spokes and the claw 223 of ring-type, link.
[other variation]
The present invention includes other various variation.
As an example, as long as scraper head can be removed attachment, not necessarily must there is claw, the shape of scraper head and claw, number are also unrestricted.
If the magnetism servo-electric motor water-cooling inner at scraper head, the inner setting of axle makes water or other fluid circulation, can suppress the distortion that scraper plate is caused by heat.
Position and the number of peristome that is arranged at cooling tube is also unrestricted, can be according to the shape of the inclination of cooling tube, scraper plate etc. and suitably change.
In addition, with regard to the shape of guiding tube, as long as can form the space of configuration scraper plate on the extended line of cooling tube, except above-mentioned example, can be also for example S word shape, crank (crank) shape, helical form.
Claims (19)
1. a producing method for metal powder, it comprises:
Prepare the operation of plasma device for metal dust manufacture;
Use described metal dust manufacture with plasma device, to manufacture the operation of metal dust,
Described metal dust manufacture possesses with plasma device:
Reaction vessel, is wherein supplied to raw metal;
Plasma gun, this plasma gun generates plasma between the raw metal in itself and described reaction vessel, makes described raw metal evaporate to generate metallic vapour;
Carrier gas supply unit, it supplies with the carrier gas for carrying described metallic vapour in described reaction vessel;
Cooling tube, the second portion that there is the upstream extremity being communicated with described reaction vessel, the downstream that is positioned at described upstream extremity opposition side on cooling tube length direction, the first that comprises described upstream extremity and comprise described downstream, described second portion is compared and is positioned at downstream with described first, this cooling tube is to utilizing described carrier gas to carry limit to carry out cooling from the described metallic vapour limit of described reaction vessel conveying from described upstream extremity to described downstream, to generate metal dust
Scraper plate, its from the described downstream intercalation of described cooling tube in described cooling tube, and for removing the attachment of the inwall that is attached to described cooling tube,
It is characterized in that,
The operation of described manufacture metal dust is carried out described scraper plate under the state of the described second portion standby of described cooling tube.
2. producing method for metal powder as claimed in claim 1, is characterized in that,
Described cooling tube is arranged at described reaction vessel with respect to horizontal direction 10～80 ° of ground that tilt, and makes the downstream of described cooling tube be positioned at the top of the upstream extremity of described cooling tube.
3. producing method for metal powder as claimed in claim 1 or 2, is characterized in that,
The described first of described cooling tube further comprises indirect cooling zone, and described indirect cooling zone is carried out indirectly cooling to the described metallic vapour and/or the metal dust that utilize described carrier gas to carry from described reaction vessel.
4. the producing method for metal powder as described in any one in claim 1～3, is characterized in that,
Described indirect cooling zone is by with the cooling described cooling tube of cooling use fluid around, thereby coolingly to described metallic vapour and/or metal dust, do not carry out cooling directly contact with fluid in the situation that with this at described metallic vapour and/or metal dust.
5. producing method for metal powder as claimed in claim 4, is characterized in that,
In described indirect cooling zone, for around described cooling of cooling described cooling tube, with fluid, make water or warm water.
6. the producing method for metal powder as described in any one in claim 1～5, is characterized in that,
Described second portion further comprises utilizing described metallic vapour and/or the metal dust that described carrier gas is carried from described reaction vessel to carry out directly cooling direct cooling zone.
7. as right, want the producing method for metal powder as described in 6, it is characterized in that,
Thereby described direct cooling zone coolingly directly contacts and carries out cooling to described metallic vapour and/or metal dust with described metallic vapour and/or metal dust with fluid by making.
8. as right, want the producing method for metal powder as described in 7, it is characterized in that,
In described direct cooling zone, for comprising the gas identical with described carrier gas with described metallic vapour and/or the described cooling of the direct contact of metal dust with fluid.
9. the producing method for metal powder as described in any one in claim 1～8, is characterized in that,
The described second portion of described cooling tube further comprises district for standby in the downstream of described direct cooling zone, the operation of described manufacture metal dust at the scraper head that makes described scraper plate in described standby with carrying out under the state of district's standby.
10. the producing method for metal powder as described in any one in claim 1～9, is characterized in that,
Be supplied to described raw metal in described reaction vessel and be the conductive material of the metal ingredient that contains described metal dust, and be granular or block metal material or alloy material.
11. producing method for metal powder as described in any one in claim 1～10, is characterized in that,
Described metal ingredient comprises the a kind of above element being selected from silver, gold, copper, nickel, palladium.
12. producing method for metal powder as described in any one in claim 1～11, is characterized in that,
According to described raw metal, become described metallic vapour and to described reaction vessel, supplement described raw metal at any time from the amount of described reaction vessel minimizing.
13. producing method for metal powder as described in any one in claim 1～12, is characterized in that,
Use metallic nickel as described raw metal, use nitrogenous gas as described carrier gas, manufacture thus nickel metal powder.
14. producing method for metal powder as described in any one in claim 1～13, is characterized in that,
Described scraper plate comprises bar-shaped axle and is arranged on the scraper head of one end of described axle, described scraper head is disposed at the inside of described cooling tube, and the other end of described axle extends to the outside of described cooling tube by being arranged at the insert port of described downstream of the described second portion of described cooling tube.
15. producing method for metal powder as described in any one in claim 1～14, is characterized in that,
Also comprise the operation that reclaims the described metal dust of described manufacture with grabber.
16. 1 kinds of producing method for metal powder, it comprises:
Prepare the operation of plasma device for metal dust manufacture;
Use described metal dust manufacture with plasma device, to manufacture the operation of metal dust,
Described metal dust manufacture possesses with plasma device:
Reaction vessel, is wherein supplied to raw metal;
Plasma gun, this plasma gun generates plasma between the raw metal in itself and described reaction vessel, makes described raw metal evaporate to generate metallic vapour;
Carrier gas supply unit, it supplies with the carrier gas for carrying described metallic vapour in described reaction vessel;
Cooling tube, there is the upstream extremity being communicated with described reaction vessel, the downstream that is positioned at described upstream extremity opposition side on cooling tube length direction, the first that comprises described upstream extremity and comprise described downstream and be positioned at the second portion in the downstream of described first, this cooling tube is to utilizing described carrier gas to carry limit to carry out cooling from the described metallic vapour limit of described reaction vessel conveying from described upstream extremity to described downstream, to generate metal dust
Scraper plate, its from the described downstream intercalation of described cooling tube in described cooling tube, and for removing the attachment of the inwall that is attached to described cooling tube,
It is characterized in that,
Described cooling tube further has: is arranged at described first and the attachment of being removed by described scraper plate is discharged to the peristome outside described cooling tube, and the shutter door that is arranged at described peristome and can opens and closes,
The operation of described manufacture metal dust is carried out closing under the state of described shutter door.
17. want the producing method for metal powder as described in 16 as right, it is characterized in that,
The described first of described cooling tube possesses indirect cooling zone, and described indirect cooling zone is carried out indirectly cooling to the described metallic vapour and/or the metal dust that utilize described carrier gas to carry from described reaction vessel; Described peristome is configured in described indirect cooling zone.
18. want the producing method for metal powder as described in 17 as right, it is characterized in that,
For reclaiming the removable described peristome that is loaded on described cooling tube of returnable that is discharged to the attachment outside described cooling tube.
19. want the producing method for metal powder as described in 18 as right, it is characterized in that,
Described returnable can be installed to cover the mode of described peristome.
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2011140098A JP5824906B2 (en) | 2011-06-24 | 2011-06-24 | Plasma device for producing metal powder and method for producing metal powder |
| JP2011-140098 | 2011-06-24 | ||
| CN201210213479.8A CN102837002B (en) | 2011-06-24 | 2012-06-25 | The manufacture method of metal dust manufacture plasma device and metal dust |
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| CN201210213479.8A Division CN102837002B (en) | 2011-06-24 | 2012-06-25 | The manufacture method of metal dust manufacture plasma device and metal dust |
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| CN104148660A true CN104148660A (en) | 2014-11-19 |
| CN104148660B CN104148660B (en) | 2017-04-12 |
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| CN201410424659.XA Active CN104148659B (en) | 2011-06-24 | 2012-06-25 | Plasma device for manufacturing metallic powder and method for manufacturing metallic powder |
| CN201410424660.2A Active CN104148660B (en) | 2011-06-24 | 2012-06-25 | Plasma device for manufacturing metallic powder and method for manufacturing metallic powder |
| CN201210213479.8A Active CN102837002B (en) | 2011-06-24 | 2012-06-25 | The manufacture method of metal dust manufacture plasma device and metal dust |
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| JP (1) | JP5824906B2 (en) |
| KR (1) | KR101345145B1 (en) |
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| JP5821579B2 (en) * | 2011-12-01 | 2015-11-24 | 昭栄化学工業株式会社 | Plasma equipment for metal powder production |
| JP5817636B2 (en) | 2012-04-20 | 2015-11-18 | 昭栄化学工業株式会社 | Method for producing metal powder |
| JP5982673B2 (en) * | 2013-03-29 | 2016-08-31 | 株式会社栗本鐵工所 | Ultrafine particle production equipment |
| JP5936091B2 (en) * | 2014-06-20 | 2016-06-15 | 昭栄化学工業株式会社 | Carbon-coated metal powder, conductive paste containing carbon-coated metal powder, laminated electronic component using the same, and method for producing carbon-coated metal powder |
| CN104400006B (en) * | 2014-12-16 | 2017-02-22 | 中国科学院合肥物质科学研究院 | Device and process for preparing superfine uranium powder |
| KR101866216B1 (en) * | 2016-03-23 | 2018-06-14 | (주)플라즈마텍 | Apparatus of manufacturing nano powder |
| CN107030292A (en) * | 2017-05-03 | 2017-08-11 | 江苏天楹环保能源成套设备有限公司 | A kind of multistage cooling prepares the plasma atomising device of metal dust |
| US11878915B2 (en) * | 2018-03-30 | 2024-01-23 | Kanto Denka Kogyo Co., Ltd. | Production method and production apparatus for molybdenum hexafluoride |
| CN110834090A (en) * | 2019-12-13 | 2020-02-25 | 黑龙江省科学院高技术研究院 | Metal powder shaping, refining and purifying device and method |
| CN214184130U (en) * | 2021-01-08 | 2021-09-14 | 江苏博迁新材料股份有限公司 | Defective product recovery structure in forming process of preparing ultrafine powder particles |
| CN114131033A (en) * | 2021-12-03 | 2022-03-04 | 上海镁源动力科技有限公司 | Equipment and method for preparing metal powder |
| KR20240031471A (en) | 2022-08-29 | 2024-03-08 | (주)선영시스텍 | Centrifugal Spraying Apparatus |
| KR102465825B1 (en) * | 2022-09-06 | 2022-11-09 | 이용복 | Apparatus for manufacturing metal power using thermal plasma and its manufacturing method |
| CN115770882A (en) * | 2022-11-02 | 2023-03-10 | 杭州新川新材料有限公司 | Method and device for manufacturing superfine spherical metal powder |
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Also Published As
| Publication number | Publication date |
|---|---|
| CN102837002A (en) | 2012-12-26 |
| KR101345145B1 (en) | 2013-12-26 |
| CN104148660B (en) | 2017-04-12 |
| CN104209528A (en) | 2014-12-17 |
| CN104148659A (en) | 2014-11-19 |
| JP5824906B2 (en) | 2015-12-02 |
| CN104148659B (en) | 2017-04-12 |
| TWI629124B (en) | 2018-07-11 |
| CN104209528B (en) | 2018-01-16 |
| JP2013007096A (en) | 2013-01-10 |
| CN102837002B (en) | 2016-01-20 |
| TW201306971A (en) | 2013-02-16 |
| KR20130001129A (en) | 2013-01-03 |
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