JP2013007096A - Plasma apparatus for producing metal powder - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a plasma apparatus higher in production efficiency by easily removing an attachment attached and accumulated on the internal wall of a cooling pipe in the plasma apparatus for producing metal powder, having the cooling pipe.SOLUTION: The plasma apparatus 1 for producing metal powder includes a reaction vessel 2 supplied with a metal raw material; a plasma torch 4 generating plasma with the metal raw material in the reaction vessel 2 and evaporating the metal raw material to produce metal steam; a carrier gas supply part 10 supplying carrier gas for conveying the metal steam, into the reaction vessel 2; and the cooling pipe 3 for cooling the metal steam transferred with the carrier gas from the reaction vessel 2, to produce metal powder. The cooling pipe 3 is installed at the reaction vessel 2 in a state of inclining at 10-80° with respect to a horizontal direction so that its longitudinal downstream side is placed upward, and a scraper 20 for removing the attachment attached to the internal wall of the cooling pipe 3 is fittingly inserted into the cooling pipe 3 from the longitudinal downstream end of the cooling pipe 3.

Description

  The present invention relates to a plasma apparatus for producing metal powder, and more particularly to a plasma apparatus comprising a tubular cooling pipe and producing metal powder by cooling molten and evaporated metal vapor with the cooling pipe.

In the manufacture of electronic components such as electronic circuits, wiring boards, resistors, capacitors, and IC packages, conductive metal powder is used to form conductor coatings and electrodes. The properties and properties required for such metal powders include few impurities, a fine powder having an average particle size of about 0.01 to 10 μm, a uniform particle shape and particle size, and aggregation. There are few, dispersibility in a paste is good, crystallinity is good, etc.
In recent years, with the miniaturization of electronic components and wiring boards, conductor coatings and electrodes have been made thinner and fine pitches, and therefore, a finer, more spherical and highly crystalline metal powder has been demanded.

One of the methods for producing such fine metal powder is a plasma device that uses plasma to melt and evaporate metal raw material in a reaction vessel, and then cool and condense metal vapor to obtain metal powder. Is known (see Patent Documents 1 and 2). In these plasma apparatuses, metal vapor is condensed in the gas phase, so that it is possible to produce metal particles with few impurities, fine, spherical and highly crystalline.
Both of these plasma devices are provided with long tubular cooling pipes, and perform cooling in a plurality of stages with respect to a carrier gas containing metal vapor. For example, in Patent Document 1, a first cooling unit that performs cooling by directly mixing a preheated hot gas with the carrier gas, and then a second cooling that performs cooling by directly mixing a normal temperature cooling gas. Department.
Moreover, in the plasma apparatus of patent document 2, by circulating the cooling fluid around the tubular body, the indirect cooling section (first first) for cooling the carrier gas without directly contacting the fluid with the carrier gas. A cooling section) and a direct cooling section (second cooling section) for performing cooling by directly mixing a cooling fluid into the carrier gas.
In particular, in the latter case, since the carrier gas flow in the indirect cooling section is less likely to be disturbed, it is possible to stably generate nuclei, grow and crystallize, and a metal powder having a controlled particle size and particle size distribution Can be obtained.

US Patent Application Publication No. 2007/0221635 Japanese Patent No. 3541939

By the way, in the plasma apparatus described in these documents, when the metal vapor condenses in the cooling pipe, it is inevitable that a part thereof adheres to the inner wall of the cooling pipe. The adhering matter gradually accumulates, and gradually causes a problem of obstructing the flow of the carrier gas in the cooling pipe and possibly blocking the cooling pipe.
In particular, the plasma device described in Patent Document 2 has an inner wall on the upstream side (first cooling unit side) of the cooling pipe as compared with the apparatus of Patent Document 1 that includes a mechanism for ejecting a cooling fluid over the entire area of the cooling pipe. There is a problem that deposits are more likely to adhere.
Conventionally, in order to remove such deposits, the operation of the plasma apparatus must be stopped periodically and / or irregularly, and the cooling pipe must be disassembled after the apparatus is sufficiently cooled to remove the deposits in the pipe. I had to.
By the way, these plasma apparatuses require a considerable time until the metal vapor can be stably generated even after the plasma is generated. Therefore, in order to remove the deposits, in addition to the time required to disassemble the cooling pipe after stopping the plasma device and the time required for the actual deposit removal work, The time required until the metal vapor is stably generated is necessary, which is a problem in terms of metal powder production efficiency.
The present invention solves these problems, and in a plasma apparatus for producing metal powder having a cooling pipe, it is possible to easily remove deposits adhering to and depositing on the inner wall of the cooling pipe, and plasma with higher production efficiency. An object is to provide an apparatus.

The plasma apparatus of the present invention includes a plasma torch that generates plasma between a reaction vessel to which a metal raw material is supplied and a metal raw material in the reaction vessel, and generates a metal vapor by evaporating the metal raw material, A carrier gas supply unit that supplies a carrier gas for transporting metal vapor into the reaction vessel, and a cooling pipe that cools the metal vapor transferred from the reaction vessel by the carrier gas to generate metal powder. A plasma device for producing metal powder,
The cooling pipe is installed in the reaction vessel at an angle of 10 to 80 ° with respect to the horizontal direction so that the downstream side in the longitudinal direction is upward, and a scraper for removing deposits adhering to the inner wall of the cooling pipe is provided in the cooling pipe. It is characterized by being fitted into the cooling pipe from the downstream end in the longitudinal direction of the pipe.

  The plasma apparatus of the present invention is a scraper that is installed in a reaction vessel so that the cooling pipe is inclined with respect to the horizontal direction so that the downstream side in the longitudinal direction is on the upper side, and scrapes adhered and deposited on the inner wall of the cooling pipe. However, since the scraper is reciprocated and / or driven in the cooling pipe from the downstream end of the cooling pipe, not only can the deposits be removed without stopping the operation of the apparatus, The scraped-off deposits can be easily collected and discharged, and the metal powder production efficiency can be greatly improved.

It is a figure which shows the plasma apparatus by 1st Embodiment. It is a figure which shows the scraper by 1st Embodiment. It is a figure which shows the plasma apparatus by 2nd Embodiment. It is a figure which shows the scraper by 2nd Embodiment. It is a figure which shows the plasma apparatus by 3rd Embodiment. It is a figure which shows the scraper by 3rd Embodiment.

Hereinafter, the present invention will be described based on specific embodiments, but the present invention is not limited thereto.
[First Embodiment]
FIG. 1 shows a first embodiment in which the present invention is applied to a transfer type arc plasma apparatus similar to the above-mentioned Patent Document 2, and a metal material produced by melting and evaporating a metal raw material inside a reaction vessel 2. The steam is cooled and condensed in the cooling pipe 3 to generate metal particles.
In the following description, the upstream side and the downstream side refer to the direction in the longitudinal direction of the cooling pipe 3 indicated by the arrow in FIG. 1, and the upper side and the lower side indicate the vertical direction indicated by the arrow in FIG. The vertical direction in

  In the present invention, the metal raw material is not particularly limited as long as it is a conductive substance containing the metal component of the target metal powder. In addition to a pure metal, an alloy or composite containing two or more metal components , Mixtures, compounds and the like can be used. Examples of the metal component include silver, gold, cadmium, cobalt, copper, iron, nickel, palladium, platinum, rhodium, ruthenium, tantalum, titanium, tungsten, zirconium, molybdenum, niobium, and the like. Although there is no restriction | limiting in particular, From the ease of handling, it is preferable to use the metal material or alloy material of a granular or lump shape with a magnitude | size of about several mm-several dozen mm as a metal raw material.

In the following, for ease of understanding, an example in which nickel powder is produced as metal powder and metal nickel is used as the metal raw material will be described, but the present invention is not limited to this.
Before starting the operation of the apparatus, a predetermined amount of metallic nickel is prepared in the reaction vessel 2, and after starting the operation of the apparatus, depending on the amount reduced from the reaction vessel 2 as metal vapor. Thus, the reaction vessel 2 is replenished from the feed port 9 as needed. Therefore, the plasma apparatus 1 of the present invention can produce metal powder continuously for a long time.

  A plasma torch 4 is disposed above the reaction vessel 2 and a plasma generating gas is supplied to the plasma torch 4 via a supply pipe (not shown). The plasma torch 4 generates a plasma 7 using the cathode 6 as a cathode and an anode (not shown) provided inside the plasma torch 4 as an anode, and then moves the anode to the anode 5, whereby the cathode 6 and the anode 5 are connected. Plasma 7 is generated in between, and at least a part of the metallic nickel in the reaction vessel 2 is melted by the heat of the plasma 7 to generate a molten nickel 8. Further, the plasma torch 4 evaporates a part of the molten metal 8 by the heat of the plasma 7 and generates nickel vapor (corresponding to the metal vapor of the present invention).

The carrier gas supply unit 10 supplies a carrier gas for conveying nickel vapor into the reaction vessel 2. The carrier gas is not particularly limited when the metal powder to be produced is a noble metal, and an oxidizing gas such as air, oxygen or water vapor, an inert gas such as nitrogen or argon, or a mixed gas thereof may be used. It is preferable to use an inert gas when producing a base metal such as nickel or copper which can be easily oxidized. Unless otherwise specified, nitrogen gas is used as a carrier gas in the following description.
The carrier gas may be mixed with a reducing gas such as hydrogen, carbon monoxide, methane, or ammonia gas, or an organic compound such as alcohols or carboxylic acids as necessary. In order to improve and adjust the characteristics, oxygen and other components such as phosphorus and sulfur may be included. Note that the plasma generation gas used to generate plasma also functions as part of the carrier gas.

Between the reaction vessel 2 and the upstream end of the cooling pipe 3 (near the end on the upstream side of the cooling pipe shown in FIG. 1), an inlet 11 having a diameter smaller than the inner diameter of the cooling pipe 3 is provided. The reaction vessel 2 and the cooling pipe 3 communicate with each other through the introduction port 11. Therefore, the carrier gas containing nickel vapor generated in the reaction vessel 2 is transferred to the cooling pipe 3 through the inlet 11.
The cooling pipe 3 includes an indirect cooling section IC for indirectly cooling nickel vapor and / or nickel powder contained in the carrier gas, and a direct cooling section for directly cooling nickel vapor and / or nickel powder contained in the carrier gas. DC is provided. As will be described later, the cooling pipe 3 may further include a standby section AC.
In the indirect cooling section IC, cooling is performed by cooling or heating the periphery of the cooling pipe 3 using a cooling fluid, an external heater, or the like, and controlling the temperature of the indirect cooling section IC. As the cooling fluid, the above-described carrier gas and other gases can be used, and liquids such as water, warm water, methanol, ethanol, or a mixture thereof can also be used. However, from the viewpoint of cooling efficiency and cost, it is desirable to use water or hot water as the cooling fluid and circulate this around the cooling pipe 3 to cool the cooling pipe 3.
In the indirect cooling section IC, nickel vapor in the carrier gas that is transferred into the cooling pipe 3 at a high temperature is cooled at a relatively slow rate by radiation, and is heated in a stable and uniformly temperature-controlled atmosphere. As the production, growth and crystallization progress, nickel powder with a uniform particle size is produced in the carrier gas.

In the direct cooling section DC, a cooling fluid supplied from a cooling fluid supply unit (not shown) is jetted or mixed with the nickel vapor and / or nickel powder transferred from the indirect cooling section IC to perform direct cooling. The cooling fluid used in the direct cooling section DC may be the same as or different from the cooling fluid used in the indirect cooling section IC, but is the same as the carrier gas from the viewpoint of ease of handling and cost. It is preferable to use gas (nitrogen gas in the following embodiments).
When using a gas, components such as a reducing gas, an organic compound, oxygen, phosphorus, and sulfur may be mixed and used as necessary, similarly to the carrier gas described above. When the cooling fluid includes a liquid, the liquid is introduced into the cooling pipe 3 in a sprayed state.

  Although nickel vapor and nickel powder are mixed in the carrier gas in the indirect cooling section IC, the ratio of nickel vapor on the downstream side is lower than that on the upstream side. Moreover, depending on the apparatus, nickel vapor and nickel powder may be mixed even in the carrier gas in the direct cooling section DC. However, as described above, the generation, growth, and crystallization of nuclei preferably proceed and complete in the indirect cooling compartment IC, so that the carrier gas in the direct cooling compartment DC contains nickel vapor. Preferably not.

During operation of the plasma apparatus 1, in the cooling pipe 3 described above, a part of the nickel powder in the carrier gas and precipitates from nickel vapor gradually adhere to the inner wall of the cooling pipe 3, and in some cases, oxides and other Deposit as a compound. If the deposits of deposits derived from these nickel vapors increase further, the inner diameter of the cooling pipe 3 may be narrowed, the flow of the carrier gas may be disturbed, and the control of the particle size and particle size distribution of the nickel powder may be adversely affected. Depending on the case, the inside of the cooling pipe 3 may be blocked. In particular, there is a tendency for deposits to increase on the upstream side of the cooling pipe 3 having the indirect cooling section IC.
For reasons that will be described later, in the present invention, at the downstream end of the cooling pipe 3 or in the vicinity thereof, a guide pipe for guiding the carrier gas carrying direction for carrying the metal powder in a direction different from the longitudinal direction of the cooling pipe 3 is provided. Is preferred.
The guide tube 13 in the first embodiment guides the carrier gas in a direction substantially orthogonal to the longitudinal direction of the cooling tube 3. The carrier gas guided by the induction tube 13 is conveyed to a collector (not shown), where the carrier gas is separated into metal powder and carrier gas, and the metal powder is recovered. Note that the carrier gas separated by the collector may be reused by the carrier gas supply unit 10.
Here, an induction gas ejection part that ejects gas toward the induction direction may be provided in or near the induction tube 13. The induction gas can smoothly change the carrier gas conveyance direction. As the induction gas, the same as the carrier gas, such as nitrogen gas, can be used.

One feature of the present invention is that it has a scraper for removing deposits adhering to the inside of the cooling pipe 3, and is inserted from the downstream end of the cooling pipe described above.
As shown in FIG. 2, the scraper 20 in the first embodiment has a shape in which a scraper head 22 for scraping off deposits is provided at one end of a rod-shaped shaft 21. The entire length of the scraper 20 is a cooling pipe. 3 is preferably longer than the length in the longitudinal direction. Of the scraper 20, the scraper head 22 is fitted into the cooling pipe 3, and the shaft 21 is fitted into an insertion port 31 provided at the downstream end of the cooling pipe 3, and at least a part thereof is disposed outside the cooling pipe 3. ing.

  In a conventional plasma apparatus having a cooling pipe, the collector is often provided on the extension of the tubular cooling pipe, and it has been difficult to arrange the scraper 20 having the shape described above, but the induction pipe 13 is provided. Thus, it becomes possible to form a space on the extension of the cooling pipe 3, and it becomes easy to arrange the scraper 20, which is preferable. However, the scraper 20 can be arranged without providing the guide tube if the device is not complicated, and the guide tube is not necessarily an essential configuration in the present invention.

Since the shaft 21 is attached in a state of being inserted into the insertion port 3, the shaft 21 can reciprocate in the longitudinal direction of the cooling pipe 3, and at the same time, in the direction around the axis about the axis of the shaft 21. Rotation is also free.
The maximum length of the scraper head 22 in the radial direction (the direction orthogonal to the shaft 21) is set smaller than the minimum inner diameter in the cooling pipe 3.

  In the first embodiment configured as described above, when deposits are removed regularly or irregularly, the shaft 21 outside the cooling pipe 3 is operated to reciprocate the shaft 21 in the longitudinal direction of the cooling pipe 3. And rotate in the direction around the axis. The operation of the shaft 21 at this time may be performed by a human hand or by a driving mechanism such as a motor. Then, the scraper head 22 applies physical force to the deposit on the inner wall of the cooling pipe 3, whereby the deposit can be effectively scraped off.

2A to 2C are details of the scraper head 22 of the first embodiment, and FIG. 2B is a view as viewed from the line II-II in FIG. 2 (C) is an arrow view seen from the IIA-IIA ′ line in FIG. 2 (B).
As shown in the figure, the scraper head 22 has a first scraper head 22a, a second scraper head 22b, and a protruding claw 27, and each of the first scraper head 22a and the second scraper head 22b emits three radiations. It has a ring shape.
Further, the first scraper head 22a and the second scraper head 22b are provided with sawtooth-shaped claw portions 23a and 23b having different tooth angles. For this reason, when the scraper head 22 is moved to the upstream side of the cooling pipe 3, the deposits on the inner wall of the cooling pipe 3 are roughly scraped off by the claw portions 23a of the first scraper head 22a, and then the second scraper head 22a. The remaining deposits are scraped off by the claw portion 23b.
Further, since the protruding claw 27 is provided at a position on the scraper head 22 facing the inlet 11, the scraper head 22 is rotated and / or reciprocated at the upstream end of the cooling pipe 3 as necessary. As a result, the adhering matter adhering to the introduction port 11 and its periphery can also be removed.

  The scraper 20 may be made of any material having heat resistance, and is preferably formed of, for example, SUS or Inconel. Further, the shaft 21 and the scraper head 22 may be integrally molded, or may be joined separately. Further, the shaft 21 and the scraper head 22 do not necessarily need to be fixed as long as they can operate integrally, and may be connected via a damper mechanism including an elastic body such as a spring, for example.

When the deposit removal operation is not performed, for example, when the metal powder is manufactured, it is desirable to make the scraper head 22 stand by on the downstream side of the cooling pipe 3.
The standby position of the scraper head 22 may be on the downstream side of the indirect cooling section IC (first cooling unit) where the growth of the metal powder is almost finished, and more preferably in the vicinity of the downstream end. By setting the standby position of the scraper head 22 to the downstream side after the direct cooling section DC, adhesion of deposits to the scraper head 22 can be suppressed, and the turbulent flow is generated in the carrier gas by the scraper head 22, and the metal powder The risk of adversely affecting the particle size and particle size distribution of the can be reduced.

In the first embodiment, the cooling section 3 is provided with a standby section AC, and the scraper head 22 is placed on standby in the standby section AC except during the removal operation.
However, it is not always necessary to provide the standby section AC, and the standby section AC may wait directly in the cooling section DC as will be described later. In addition, when the scraper head 22 is made of a material or shape member that does not easily adhere to deposits or has a shape that does not easily cause turbulent flow of carrier gas, the scraper head 22 may be made to wait further upstream. Is possible.

The plasma apparatus 1 of the present invention is characterized in that the cooling pipe 3 is tilted in the range of 10 to 80 ° with respect to the horizontal direction so that the downstream side is on the upper side.
In a conventional plasma apparatus having a cooling pipe, the cooling pipe is often installed in the horizontal direction or in the vertical direction, but when the cooling pipe is installed in the horizontal direction, the deposits scraped off by the scraper 20 Therefore, it becomes necessary to provide a new mechanism for collecting the accumulated deposits.
When the cooling pipe is installed in the vertical direction, the scraped deposit does not collect in the cooling pipe, but in the case of the cooling pipe that is vertically downward (downstream downstream of the cooling pipe), the scraped deposit May be mixed into the target metal powder and the quality of the metal powder may be reduced. In addition, in the case of a cooling pipe that is vertically upward (downstream side of the cooling pipe is upward), the scraped deposits return to the inside of the reaction vessel, which may cause the temperature of the molten metal to decrease or the impurity concentration to increase. .
The present invention includes the scraper 20 described above, and at the same time, the cooling pipe 3 is inclined at a range of 10 to 80 ° with respect to the horizontal direction, so that the scraper 20 can be scraped without newly providing a recovery mechanism. Dropped deposits can be collected on the upstream side of the cooling pipe 3. A more preferable inclination angle is 30 to 60 °.
The cooling pipe 3 of the first embodiment shown in FIG. 1 is installed with an inclination of 45 ° with respect to the horizontal direction so that the downstream side is on the upper side.
The deposits scraped off by the scraper 20 are collected on the upstream side of the cooling pipe 3 only by the reciprocating motion of the scraper 20 and gravity, even though no special recovery mechanism is provided.

  In the first embodiment, the reaction vessel 2 and the cooling pipe 3 communicate with each other through the inlet 11 having a diameter smaller than the inner diameter of the cooling pipe 3, so that the collected deposits are in the reaction vessel. 2 is difficult to reverse. Thus, in the present invention, it is preferable that the upstream end of the cooling pipe 3 communicates with the reaction vessel 1 via the inlet 11 having a diameter smaller than the inner diameter of the cooling pipe 3.

Furthermore, in 1st Embodiment, the opening part 32 which discharges | emits an adhering matter out of the cooling pipe 3 is provided in the upstream of the cooling pipe 3. As shown in FIG. If the opening 32 is provided in the direct cooling section DC having the cooling fluid supply section (not shown), the configuration of the cooling fluid supply section becomes complicated, so the opening 32 is preferably provided in the indirect cooling section IC.
The opening 32 is provided with an open / close door 33 formed so as not to form a step with the inner wall of the cooling pipe 3 and is opened only during the removal work of the deposits. Thereby, it can suppress as much as possible that a turbulent flow generate | occur | produces in carrier gas at the time of manufacture of a normal metal powder.
The connecting portion 34 is provided so as to surround the opening / closing door 33, and a collection container 35 that can be attached and detached is attached to the connecting portion 34. When the deposit is removed, the door 33 is opened, and the deposit is discharged from the opening 32 to the outside of the cooling pipe 3 and collected by the collection container 35.

[Second Embodiment]
3 and 4 show the second embodiment. In the drawing, the same reference numerals as those in the first embodiment are assigned to the same parts as those in the first embodiment, and the description thereof is omitted below.
In the second embodiment, the cooling pipe 103 of the plasma apparatus 101 is installed with an inclination of 70 ° with respect to the horizontal direction so that the downstream side is on the upper side. The open / close door 133 is a sliding door type that slides along the outer wall of the cooling pipe 103.

  FIG. 3B is an arrow view taken along line III-III in FIG. 3A. As shown in FIG. 3B, in the second embodiment, the curved guide tube 113 is a cooling tube 103. By connecting to the downstream end surface of the gas, the carrier gas containing metal powder is guided in a direction different from the longitudinal direction of the cooling pipe 103.

4A to 4E are detailed views of the scraper head 122 of the second embodiment, and FIG. 4B is an arrow view seen from the line IV-IV in FIG. 4 (C) is an arrow view seen from the IVA-IVA 'line in FIG. 4 (B), and FIGS. 4 (D) and 4 (E) are taken from the IVB-IVB' line in FIG. 4 (B). FIG.
As shown in FIG. 4A, a handle 128 for facilitating manual operation of the shaft 121 is provided near one end of the scraper 120 in the second embodiment.
As shown in FIGS. 4B to 4E, the scraper head 122 includes four claws 125 and 126 having four radii extending radially around the shaft 121 and different projecting lengths. And an outer diameter of the scraper head 122 is formed to be slightly smaller than an inner diameter of the cooling pipe 103.
3A, the downstream end of the cooling pipe 103 is provided with a shaft guide 140 that guides the movement when the scraper 120 reciprocates. In this embodiment, the scraper 120 is a shaft guide. 140 is inserted into the insertion hole 131.

In removing the deposits in the second embodiment, the handle 128 is manually operated to rotate and / or reciprocate the scraper 120.
Since the scraper head 122 has three kinds of claw portions, when the scraper head 122 moves toward the upstream side of the cooling pipe 103, first, the scraper head 122 is attached by the first protruding claw 125 that protrudes most. The kimono is roughly scraped off, and then the remaining deposits can be evenly scraped off by the second protruding claws 126 and the ring-shaped claws 124, and the deposits can be efficiently removed with a relatively small force.

[Third Embodiment]
5 and 6 show a third embodiment. In the figure, the same parts as those in the first and second embodiments are denoted by the same reference numerals as those in the first and second embodiments, and will be described below. Omit.
In the third embodiment, the cooling pipe 203 of the plasma apparatus 201 is installed with an inclination of 20 ° with respect to the horizontal direction so that the downstream side is on the upper side. In this embodiment, the guide tube 213 has substantially the same cross-sectional shape and diameter as the cooling tube 203, and is continuously curved from the downstream end of the cooling tube 203, thereby changing the transport direction of the carrier gas containing the metal powder. It is guided in a direction different from the longitudinal direction of the cooling pipe 203.
In the present embodiment, the standby section AC is not provided, and the scraper head 222 stands by directly in the cooling section DC.
In the present embodiment, since the inclination angle of the cooling pipe 203 is as gentle as 20 °, no introduction port is provided between the reaction vessel 2 and the cooling pipe 203.

An opening / closing door 33 is provided upstream of the cooling pipe 203, and a collection container 235 that can be attached / detached so as to cover the opening / closing door 33 is directly attached to the cooling pipe 203 without a connecting portion. A partition plate 236 is provided inside the recovery container 235, and it is possible to suppress the deposits in the recovery container 235 from returning back into the cooling pipe 203 due to the carrier gas flowing into the recovery container 235 when the opening / closing door 33 is opened.
One end of the shaft 221 inserted into the shaft guide 140 is connected to a scraper driving unit 240, and the scraper driving unit 240 rotates a scraper 220 and reciprocates in the longitudinal direction (not shown). Prepare.

6A to 6C are detailed views of the scraper head 222 of the third embodiment, and FIG. 6B is an arrow view seen from the line VI-VI in FIG. FIG. 6C is an arrow view seen from the VIA-VIA ′ line of FIG.
As shown in FIGS. 6A to 6C, the scraper 220 in the third embodiment has a dome-shaped scraper head 222. As shown in the figure, the scraper head 222 has four arc-shaped radii extending from the vicinity of one end of the shaft 221 connected to the ring-shaped claw portion 223.

[Other variations]
Various other modifications are included in the present invention.
As an example, the claw portion is not necessarily required if the scraper head can remove deposits, and the shape and number of the scraper head and the claw portion are not limited.
If a water cooling mechanism for circulating a fluid such as water is provided inside the scraper head or the shaft, deformation of the scraper due to heat can be suppressed.
There are no restrictions on the position and number of openings provided in the cooling pipe, and they can be appropriately changed according to the inclination of the cooling pipe, the shape of the scraper, and the like.
Further, the shape of the induction tube is not limited as long as a space for disposing the scraper on the extension of the cooling tube can be formed.
Further, the cooling pipe is not limited to the above-described one. For example, as described in Patent Document 1, a cooling pipe that performs only direct cooling over the entire cooling pipe or a cooling that performs only indirect cooling. You may apply this invention with respect to the plasma apparatus provided with a pipe | tube.

DESCRIPTION OF SYMBOLS 1 Plasma apparatus 2 Reaction container 3 Cooling tube 4 Plasma torch 10 Carrier gas supply part 20 Scraper

Claims (10)

A reaction vessel to which a metal raw material is supplied;
A plasma torch that generates a plasma with the metal source in the reaction vessel and generates a metal vapor by evaporating the metal source;
A carrier gas supply unit for supplying a carrier gas for conveying the metal vapor into the reaction vessel;
A plasma device for producing metal powder, comprising a cooling pipe for cooling the metal vapor transferred from the reaction vessel by the carrier gas to produce metal powder,
The cooling pipe is installed in the reaction vessel at an angle of 10 to 80 ° with respect to the horizontal direction so that the downstream side in the longitudinal direction is upward, and a scraper for removing deposits adhering to the inner wall of the cooling pipe is provided in the cooling pipe. A plasma apparatus for producing metal powder, wherein the plasma apparatus is inserted into the cooling pipe from a downstream end in the longitudinal direction of the pipe.   2. The plasma apparatus for producing metal powder according to claim 1, wherein the cooling pipe is installed at an angle of 30 to 60 ° with respect to a horizontal direction so that a downstream side in the longitudinal direction is upward.   The plasma apparatus for producing metal powder according to claim 1 or 2, wherein the cooling pipe includes an induction pipe that guides the carrier gas in a direction different from a longitudinal direction of the cooling pipe.   The said cooling pipe is communicating with the said reaction container through the inlet port smaller in diameter than the internal diameter of the said cooling pipe in the longitudinal direction upstream end. Plasma equipment for metal powder production.   The said scraper is provided with the nail | claw part which removes the deposit | attachment adhering to the said inlet, The plasma apparatus for metal powder manufacture of Claim 4 characterized by the above-mentioned.   An indirect cooling section in which the cooling pipe indirectly cools the metal vapor and / or metal powder transferred by the carrier gas from the reaction vessel; the indirect cooling section; and the metal vapor and / or metal powder 6. A plasma apparatus for producing metal powder according to claim 1, further comprising a direct cooling section that directly cools the metal powder.   The indirect cooling section cools the periphery of the cooling pipe with a cooling fluid and cools the metal vapor and / or metal powder without bringing the cooling fluid into direct contact with the metal vapor and / or metal powder. 7. The plasma device for producing metal powder according to claim 6, wherein the plasma cooling device is a compartment for cooling by directly contacting the cooling fluid with the metal vapor and / or metal powder.   The scraper includes a rod-shaped shaft and a scraper head provided at one end of the shaft, the scraper head is disposed in the cooling pipe, and at least a part of the shaft is disposed outside the cooling pipe. The plasma apparatus for producing metal powder according to claim 1, wherein the plasma apparatus is used.   9. The plasma apparatus for producing metal powder according to claim 8, wherein the deposit is removed by reciprocating and / or rotating the scraper head by operating a shaft outside the cooling pipe.   10. The plasma for producing metal powder according to claim 1, further comprising an opening for discharging deposits removed by the scraper to the outside of the cooling pipe on the upstream side in the longitudinal direction of the cooling pipe. apparatus.

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