CN104125718A - Vertical substrate detachment system - Google Patents
Vertical substrate detachment system Download PDFInfo
- Publication number
- CN104125718A CN104125718A CN201310300816.1A CN201310300816A CN104125718A CN 104125718 A CN104125718 A CN 104125718A CN 201310300816 A CN201310300816 A CN 201310300816A CN 104125718 A CN104125718 A CN 104125718A
- Authority
- CN
- China
- Prior art keywords
- substrate
- stripping
- framework
- vertical
- liquid
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23F—NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACE; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL; MULTI-STEP PROCESSES FOR SURFACE TREATMENT OF METALLIC MATERIAL INVOLVING AT LEAST ONE PROCESS PROVIDED FOR IN CLASS C23 AND AT LEAST ONE PROCESS COVERED BY SUBCLASS C21D OR C22F OR CLASS C25
- C23F1/00—Etching metallic material by chemical means
- C23F1/08—Apparatus, e.g. for photomechanical printing surfaces
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
- B05B1/00—Nozzles, spray heads or other outlets, with or without auxiliary devices such as valves, heating means
- B05B1/12—Nozzles, spray heads or other outlets, with or without auxiliary devices such as valves, heating means capable of producing different kinds of discharge, e.g. either jet or spray
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D1/00—Processes for applying liquids or other fluent materials
- B05D1/02—Processes for applying liquids or other fluent materials performed by spraying
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
Abstract
The present invention relates to a stripping system which is to remove a hardened part with a liquid chemical after exposing light during the manufacturing process of a printed circuit board (PCB). By performing a stripping process by jetting the liquid chemical to a substrate while vertically transferring a substrate inside a stripping room, the process can be conducted continuously and the time required for the stripping process can be shortened. In addition, because the stripping process is performed by jetting the liquid chemical to a substrate while vertically transferring the substrate, the vertical substrate stripping system can significantly increase a process yield ratio. According to an embodiment of the present invention, the vertical substrate stripping system comprises: the stripping room which is formed on a frame to be closed; a transferring unit which vertically transfers the substrate in the inner space of the stripping room; a jetting unit which uniformly jets the liquid chemical to the substrate that is transferred vertically in the inner space of the stripping room; and a pumping unit which collects the liquid chemical jetted to the substrate in the inner space of the stripping room and supplies the liquid chemical to the jetting unit through pumping.
Description
Technical field
The present invention relates to after exposing, with liquid, remove in the manufacturing process of printed circuit board (PCB) (PCB) lift-off technology of cured portion.Specifically, by the stripping cell of sealing form and in described stripping cell inside, with plumbness, transfer substrate Handling device, on the described substrate of transferring with plumbness, evenly spray liquid injection apparatus, to the pumping installations of described injection apparatus pumping liquid, form.This vertical-type strippable substrate device (Vertical Substrate detachment system) is carried out stripping process by medical liquid spraying in substrate in stripping cell inside in the process with plumbness handover substrate, can when carrying out successional overburden operation, shorten the time that stripping process consumes, and by spraying liquid, peel off, thereby can further improve operation productivity ratio when transferring substrate with plumbness.
Background technology
Generally speaking, printed circuit board (PCB) (PCB) is parts electric, that electronic product is the most basic, in the middle of life, is widely used in electric, the electronic products such as LCD TV, DVD, computer, notebook computer, digital camera and Mobile phone, PDA, MP3.Along with the develop rapidly of digital form and the tipped of semiconductor development, with miniaturization, high density and high-performance, printed circuit board (PCB) answer expenditure more and more wider.
The manufacturing process of this printed circuit board (PCB) (PCB) consists essentially of exposure (Inner Later Exposing), DF video picture (Dry Film Developing), etching (Etching), peels off (Stripping) operation, exposure is the operation that forms circuit, on Core surface, carry out wrapping exposure with irradiating UV after Film on the LPR INK of plated film, necessary part (the LPR INK being irradiated by UV) is carried out to the operation of photocuring.
Described DF video picture operation is in order to form circuit, on Copper Foil, with the form of circuit space of a whole page figure, leave the operation of DF imaging liquid, etching work procedure is with etching solution, to remove the operation of the Copper Foil that does not leave DF imaging liquid, and stripping process is the operation that etching work procedure is used DF imaging liquid residual on alkalescence (Alkali) solution removal Copper Foil afterwards.
The stripping off device of removing DF imaging liquid in the past adopts Dip form, and substrate (PCB) is immersed in alkaline solution (liquid) case, removes the mode of DF imaging liquid residual on Copper Foil to peel off within a certain period of time by the chemical action of liquid.
Thereupon, the stripping off device of former Dip form is limited according to its number of substrates that is dipped into liquid of the size of medicine-chest, and the time of chemical action need to occur, and the time that stripping process consumes is elongated, once needs to change large medicine amount liquid while changing the liquid in medicine-chest.
Prior art
Patent documentation
No. 10-1019154th, (patent documentation 1) Korean registered patent.
No. 10-1103767th, (patent documentation 2) Korean registered patent.
Summary of the invention
(1) technical problem that will solve
The present invention is long with the time of improving its glass operation of original base plate glass system and consuming, medical liquid spraying is inhomogeneous, charge stripping efficiency and the process efficiency obviously problem such as low are starting point, providing a kind of sprays liquid on substrate in the process with plumbness handover substrate equably in stripping cell inside, keeping, operation is successional shortens the time that stripping process consumes simultaneously, and peel off because spraying liquid in the process of employing with plumbness handover substrate, the vertical-type strippable substrate device that its charge stripping efficiency and operation productivity ratio are further enhanced is object.
(2) technical scheme
For realizing described object, formation of the present invention comprises:
The frame-type stripping cell of enclosure space and transfer injection apparatus that the Handling device of substrate, the substrate transferred with vertical mode to the inner space at described stripping cell evenly spray liquid, collect the liquid spraying to substrate in the inner space of described stripping cell with vertical mode in the inner space of described stripping cell, delivers to spray pump the pumping installations of injection apparatus.
Handling device is characterised in that in an embodiment of the present invention, by the motor actuating force of coming by reception and registration, be rotated, most driving wheels of installing at certain intervals and the level on described most driving wheel that is positioned over are transferred, more than descend vertical configuration form framework Jig, be installed on the upper-lower position of described Jig, most fixtures of controlling substrate with plumbness form.
Injection apparatus is by adopting quadrupod shape in an embodiment of the present invention, the pair of frames forming in both sides and being installed at certain intervals on described framework, and be equipped with the playpipe of a plurality of nozzles, above descend vertical mode be arranged on described framework both sides guide rail, be arranged on described framework both sides can rotating, along the guide wheel of guide rail action, above described framework and driving shaft combine, start up and down driving shaft and form to move up and down the drive division of framework.
(3) beneficial effect
The vertical-type base plate glass device that embodiments of the invention provide, its formation comprises: the stripping cell of sealing form and in described stripping cell inside, with plumbness, transfer substrate Handling device, on the described substrate of transferring with plumbness, evenly spray the injection apparatus of liquid, to the pumping installations of described injection apparatus pumping liquid.Because medical liquid spraying is carried out to stripping process in substrate in the process in stripping cell inside with plumbness handover substrate, has and shorten the time consuming effect of stripping process when carrying out successional overburden operation.
Moreover, embodiments of the invention adopt in the process with plumbness handover substrate liquid are evenly sprayed to the mode of carrying out stripping process in substrate, when further improving charge stripping efficiency and operation productivity ratio, collection is ejected into the liquid of substrate, can also recycle after filtering, the service time of liquid is long, and efficiency is also high.
Accompanying drawing explanation
Fig. 1 is the stripping off device pie graph of the embodiment of the present invention.
Fig. 2 is the installment state side view of the embodiment of the present invention.
Fig. 3 is the installment state front elevation of the embodiment of the present invention.
Fig. 4 is transfer device and the injection apparatus side view of the embodiment of the present invention.
Fig. 5 is the injection apparatus front elevation of the embodiment of the present invention.
Fig. 6 is the transfer device side view of the embodiment of the present invention.
Fig. 7 is the base plate glass state plane figure of the embodiment of the present invention.
Fig. 8 to Fig. 9 is injection apparatus operate condition front elevation of the present invention.
Description of reference numerals
10: stripping cell 11: framework
20: Handling device 21: driving wheel
22: axle 23:Jig
24: fixture 30: injection apparatus
31: framework 32: playpipe
33: nozzle 34: guide rail
35: guide wheel 40: pumping installations
41: medicine-chest 42: collector pipe
42a: water leg 43: filter
44: pump
Embodiment
The main aim of the embodiment of the present invention is in stripping cell inside, with plumbness, to transfer in the process of substrate liquid evenly to spray in substrate to carry out stripping process, when keeping continuous overburden operation, shorten the time that stripping process consumes, because spraying liquid in the process with plumbness handover substrate, peel off, thereby further improve charge stripping efficiency and operation productivity ratio.
The accompanying drawing of the embodiment of the present invention by is below known, mainly by the stripping cell 10 of framework 11 formulas sealing forms and in the inside of described stripping cell 10 with plumbness transfer substrate P Handling device 20, in described stripping cell 10, give injection apparatus 30 that substrate P that plumbness transfers evenly sprays liquid, collect internal spray at described stripping cell 10 liquid in substrate P, give pumping 40 installation compositions of injection apparatus 30 pumping liquids.
The stripping off device of the embodiment of the present invention is in stripping cell 10 inside, with plumbness, to transfer in the process of substrate P to spray the device of liquid to peel off to substrate P, as shown in Figure 1 to Figure 3, by stripping cell 10, stripping off device 20, injection apparatus 30, pumping installations 40, formed, at stripping cell 10, collect and spray the liquid in substrate P, by pumping installations 40, supply with to injection apparatus 30 after filtering, thereby recycle.
In the chief component of described embodiment, as shown in Figure 1 to Figure 3, stripping cell 10 is the enclosure spaces that form with quadrupod form on framework 11, in the inside of described stripping cell 10, Handling device 20 and the injection apparatus 30 that will illustrate is installed below.
Described stripping cell 10 adopts as far as possible enclosure space and should possess certain length 2～5m to transfer substrate P by Handling device 20 with a side direction, the job state of stripping cell 10 inside of can mounting glass door being convenient to externally to detect by an unaided eye.
In the main member of described embodiment, Handling device 20 is in stripping cell 10 inside, with plumbness, to transfer the function of substrate P, as shown in Fig. 2 to Fig. 4 and Fig. 6, described Handling device 20 is rotated by the motor actuating force of coming by reception and registration, most driving wheels 21 of installing at certain intervals and the level on described most driving wheel 21 that is positioned over are transferred, more than descend vertical configuration form framework Jig23, be installed on the upper-lower position of described Jig23, most fixtures 24 of controlling substrate P with plumbness form.
On described driving wheel 21, be provided with and the ground maintenance certain distance of stripping cell 10 and most bearings 22 that can rotate, most driving wheels 21 of certain distance are installed in described bearing 22 both sides combinations, from a 21a of side drive portion, the actuating force of motor is conveyed to most bearings 22, with motor, drive and rotate most driving wheels 21.
In addition, described Jig23 transfers along driving wheel 21 levels by the chassis on driving wheel 21, when the upper middle body on described chassis forms vertical frame, at the upper-lower position of framework, most fixtures 24 is installed.
The upper framework forming of described Jig23 adopts quadrupod form to form the larger space that is greater than substrate P, the upper-lower position of described framework is provided with most fixtures 24 of controlling substrate P with plumbness, and described fixture 24 is controlled the marginal position of substrate P to make substrate P be placed in the space of framework formation.
Thereupon, Handling device 20 its most fixtures 24 are controlled substrate P with plumbness, and 24 the Jig23 that fixture is installed transfers by most driving wheel 21 levels, and substrate P is transferred with plumbness in the inner space with this at stripping cell 10.
In the main composition of described embodiment, the function of injection apparatus 30 is that the substrate P of giving plumbness handover in stripping cell 10 inside is sprayed liquid equably.Described injection apparatus is as shown in Fig. 2 to Fig. 5 and Fig. 7 to Fig. 9, injection apparatus is by adopting quadrupod shape, the pair of frames 31 forming in both sides and being installed at certain intervals on described framework 31, and be equipped with the playpipe 32 of a plurality of nozzles 33, above descend vertical mode be arranged on described framework 31 both sides guide rail 34, be arranged on described framework 31 both sides can rotating, along the guide wheel 35 of guide rail 34 action, above described framework 31 and driving shaft 37 combine, start up and down driving shaft 37 and form to move up and down the drive division 36 of framework 31.
Described framework 31 adopts the large space of the quadrupod form that is greater than substrate p area, in stripping cell 10 inside, partner, and and the substrate P both sides transferred with plumbness keep certain distance, on framework, 31 install the playpipe 32 that most nozzles 33 are housed at certain intervals.
Described playpipe 32 descends certain intervals to be arranged on position, both sides of the edge across the inner space of framework 31 above, be side inclination form down, in the time of pumping installations 40 supply of chemical by illustrating below by most nozzles 33 with particulate form by medical liquid spraying in substrate P.
In addition, guide rail 34 from the both sides of framework 31 to lower carriage with plumbness, install, during installation and the both sides of framework 31 are separated out certain distance.
It is upper and lower that described guide wheel 35 is arranged on framework 31 both sides, and the built-in bearing that can carry out rotational action drives up and down along the guide wheel 34 of framework 31 both sides vertical configurations.
Described drive division 36 plays the function that comes and goes continuously up and down movable frame 31, can use CD-ROM drive motor or hydraulic pressure or pneumatic cylinder, should be arranged on the top, outside of stripping cell 10, the driving shaft 37 that passes the actuating force knee-action of coming by drive division 36 is installed on the top of framework 31.
Described driving shaft 37 and the framework 31 that is arranged on the drive division 36 of stripping cell 10 tops, outsides and is arranged on stripping cell 10 inside are vertical configuration, and when drive division 36 starts, the knee-action of driving shaft 37 comes and goes shift action up and down continuously with what drive framework 31.Now, in the both sides of framework 31, guide wheel 35 turns round up and down along guide rail 34, and framework 31 can not rock, and moves up and down highly stable.
The action of injection apparatus 30 by drive division 36 comes and goes continuously up and down and under mobile state, by pumping installations 40 described later, liquid delivered to playpipe 32 and spray by nozzle 33 at framework 31, thereby the substrate P both sides of transferring to plumbness are sprayed liquid equably.
In addition, the chief component pumping installations 40 of described embodiment plays the function to injection apparatus 30 pumping liquids, described pumping installations 40 as shown in Figure 1 to Figure 3, by medicine-chest 41, collector pipe 42, filter 43, pump 44, formed, collection, is used with recirculation after filter 43 filtering liquid medicines to the liquid in substrate P in stripping cell internal spray.
Described pumping installations 40 is included in the water leg 42a of the stripping cell 10 downward-sloping installations in ground and is connected to the pump 44 of medicine-chest 41 inner liquid medicines described in the collector pipe 42 of described water leg 42a, the filter 43 that is connected to described collector pipe 42 and medicine-chest 41, pumping.
Described water leg 42a is to be vertically installed on the ground of stripping cell 10, middle body is downward-sloping to collect liquid, the below of described water leg 42a connects collector pipe 42 and is arranged on the outside of stripping cell 10, and described collector pipe 42 is connected on filter 43 and medicine-chest 41 successively.
The medicine-chest 41 use pumping lines of receiving medical liquids connect pump 44 and valve 45 successively, by described pump 44, the liquid of medicine-chest 41 are supplied with to the playpipe 32 to injection apparatus 30, because described playpipe 32 moves up and down, should use the flexible pipe of good fluidity to connect playpipe 32.
Pumping installations 40 is collected and is ejected into the liquid on stripping cell 10 internal base plate P by water leg 42a, the liquid of collecting flow into filter 43 by collector pipe 42, after impurity screening, flow into medicine-chest 41, by pump 44, the liquid in medicine-chest 41 be supplied to playpipe 32 and spray by nozzle 33, thereby form recycling of liquid, the service time of liquid is long, and efficiency is high.
Embodiments of the invention action of continuous moving up and down by playpipe and nozzle in the process of stripping cell internal vertical handover substrate sprays liquid equably in substrate both sides, thereby shorten the time that stripping process consumes, when further improving charge stripping efficiency and operation productivity ratio, also can carry out successional overburden operation.
In addition, embodiments of the invention are collected and are sprayed in the liquid of stripping cell internal base plate, and the liquid being collected with filter filtration also recycles after medicine-chest is stored, thereby have extended the service time of liquid, have improved efficiency.
As a reference, with embodiments of the invention, be illustrated, but be not limited to above-described embodiment, the technical field by upper embodiment under the present invention can be carried out numerous variations by the technical staff who possesses relevant knowledge in the scope that does not exceed aim of the present invention.
Claims (5)
1. a vertical-type strippable substrate device, is characterized in that, comprising:
The stripping cell (10) of framework (11) formula sealing form and stripping cell (10) in plumbness transfer the Handling device (20) of substrate (P), to the upper injection apparatus (30) that evenly sprays liquid of the substrate (P) of transferring with plumbness in described stripping cell (10), collect at the inner liquid to substrate (P) injection of described stripping cell (10), spray pump is delivered to the pumping installations (40) of injection apparatus (30).
2. vertical-type strippable substrate device according to claim 1, it is characterized in that, Handling device (20) is rotated by the motor actuating force of coming by reception and registration, most driving wheels (21) of installing at certain intervals and the level on described most driving wheel (21) that is positioned over are transferred, more than descend vertical configuration to form the Jig(23 of framework), be installed on described Jig(23) upper-lower position, most fixtures (24) of controlling substrate (P) with plumbness form.
3. vertical-type strippable substrate device according to claim 1, it is characterized in that, injection apparatus (30) is by adopting quadrupod shape, the pair of frames (31) forming in both sides and being installed at certain intervals on described framework (31), and the playpipe (32) of a plurality of nozzles (33) is housed, more than descend vertical mode to be arranged on the guide rail (34) of described framework (31) both sides, be arranged on described framework (31) both sides and can rotate, guide wheel (35) along guide rail (34) action, top and driving shaft (37) at described framework (31) combine, start up and down drive division (36) composition that driving shaft (37) moves up and down framework (31).
4. vertical-type strippable substrate device according to claim 3, it is characterized in that, described framework (31) adopts the large space of the quadrupod form that is greater than substrate (p) area, in stripping cell (10), partner, and be placed in and position that the both sides of substrate (P) keep certain distance, the inner space that playpipe (32) crosses framework (31) reserves up and down a determining deviation in position, both sides of the edge and installs, and is the state that a side direction has a down dip.
5. vertical-type strippable substrate device according to claim 1, it is characterized in that, pumping installations (40) is by the water leg in the stripping cell downward-sloping installation in (10) ground (42a) and be connected to the pump (44) of medicine-chest (41) inner liquid medicine described in the collector pipe (42) of described water leg (42a), the filter (43) that is connected to described collector pipe (42) and medicine-chest (41), pumping and form.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR10-2013-0046623 | 2013-04-26 | ||
| KR1020130046623A KR101342616B1 (en) | 2013-04-26 | 2013-04-26 | Vertical substrate detachment system |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN104125718A true CN104125718A (en) | 2014-10-29 |
| CN104125718B CN104125718B (en) | 2017-05-03 |
Family
ID=49988558
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201310300816.1A Active CN104125718B (en) | 2013-04-26 | 2013-07-17 | Vertical substrate detachment system |
Country Status (2)
| Country | Link |
|---|---|
| KR (1) | KR101342616B1 (en) |
| CN (1) | CN104125718B (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108315749A (en) * | 2018-03-16 | 2018-07-24 | 合肥汇通控股股份有限公司 | A kind of metal material processing system |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR101615125B1 (en) * | 2014-08-13 | 2016-04-25 | 제이엔케이히터(주) | Paste constant rate discharge apparatus |
| KR102172665B1 (en) * | 2019-03-22 | 2020-11-03 | 주식회사 티케이씨 | Driving Apparatus For Non Contact Vertical Typed Developing System For Board |
| KR102150614B1 (en) * | 2019-03-22 | 2020-09-02 | 주식회사 티케이씨 | Non Contact Vertical Typed Processing System For Board Having Jig Inspecting Apparatus |
| KR102172662B1 (en) * | 2019-03-22 | 2020-11-03 | 주식회사 티케이씨 | Non Contact Vertical Typed Processing System For Board |
| KR102410120B1 (en) * | 2020-09-14 | 2022-06-21 | 주식회사 티케이씨 | Vertical Typed Continuous Developing System Having Improved Stain Proof Function |
Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH08293698A (en) * | 1995-04-20 | 1996-11-05 | Tokyo Kakoki Kk | Printed wiring board conveyer |
| TW391151B (en) * | 1996-12-03 | 2000-05-21 | Tokyo Kakoki Kk | Transmission processing unit |
| JP2004346391A (en) * | 2003-05-23 | 2004-12-09 | Kemitoron:Kk | Plating apparatus |
| CN1576961A (en) * | 2003-07-18 | 2005-02-09 | 芝浦机械电子株式会社 | Apparatus and method for processing substrate |
| CN1962962A (en) * | 2005-11-08 | 2007-05-16 | 上村工业株式会社 | Plating tank |
| CN101441987A (en) * | 2007-11-20 | 2009-05-27 | 细美事有限公司 | Substrate cleaning device and method |
| KR20110010965A (en) * | 2009-07-27 | 2011-02-08 | 삼성전기주식회사 | Vertical transfer jig and apparatus for wet etching using the same |
-
2013
- 2013-04-26 KR KR1020130046623A patent/KR101342616B1/en active IP Right Grant
- 2013-07-17 CN CN201310300816.1A patent/CN104125718B/en active Active
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH08293698A (en) * | 1995-04-20 | 1996-11-05 | Tokyo Kakoki Kk | Printed wiring board conveyer |
| TW391151B (en) * | 1996-12-03 | 2000-05-21 | Tokyo Kakoki Kk | Transmission processing unit |
| JP2004346391A (en) * | 2003-05-23 | 2004-12-09 | Kemitoron:Kk | Plating apparatus |
| CN1576961A (en) * | 2003-07-18 | 2005-02-09 | 芝浦机械电子株式会社 | Apparatus and method for processing substrate |
| CN1962962A (en) * | 2005-11-08 | 2007-05-16 | 上村工业株式会社 | Plating tank |
| CN101441987A (en) * | 2007-11-20 | 2009-05-27 | 细美事有限公司 | Substrate cleaning device and method |
| KR20110010965A (en) * | 2009-07-27 | 2011-02-08 | 삼성전기주식회사 | Vertical transfer jig and apparatus for wet etching using the same |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108315749A (en) * | 2018-03-16 | 2018-07-24 | 合肥汇通控股股份有限公司 | A kind of metal material processing system |
Also Published As
| Publication number | Publication date |
|---|---|
| CN104125718B (en) | 2017-05-03 |
| KR101342616B1 (en) | 2013-12-20 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN104125718A (en) | Vertical substrate detachment system | |
| CN100576975C (en) | Film figure formation method and application thereof | |
| JP2011167612A (en) | Slit nozzle cleaning device and coating device | |
| CN107170667B (en) | Substrate wet processing process method and substrate wet processing process device | |
| KR200433952Y1 (en) | Detach device of printed circuits board film | |
| CN103002672A (en) | Hole plugging device of base material and application thereof | |
| CN102315092B (en) | Wet etching apparatus and method thereof | |
| CN107785292B (en) | Substrate processing apparatus and substrate processing method | |
| JP2005205329A (en) | Applicator | |
| CN111135985A (en) | Frame glue coating equipment and glue removing method thereof | |
| CN218308986U (en) | Gluing equipment | |
| CN101051190A (en) | Photoresist stripping apparatus, method of recycling photoresist stripper | |
| JP2017076639A (en) | Board developing system | |
| CN1780530A (en) | Method of forming a wiring pattern, method of manufacturing a device, device, and electro-optic device | |
| KR100766115B1 (en) | Coating apparatus for substrate of flat panel display | |
| JP2012012647A (en) | Metal-film forming device | |
| KR20140148162A (en) | Apparatus for treating substrate | |
| CN210666252U (en) | LCD display screen production line | |
| CN114150316A (en) | Precision etching module, precision etching device and etching process of device | |
| CN110049624B (en) | Automatic production equipment for circuit board | |
| KR101842113B1 (en) | Method for treating substrate | |
| KR101350950B1 (en) | Nozzle unit, substrate treating apparatus and substrate treating method | |
| KR101962738B1 (en) | Sheet Separating Apparatus and Mask Manufacturing System Having The Same | |
| KR101598360B1 (en) | Substrate position controller for cleaning thereof | |
| JP6116948B2 (en) | Substrate processing apparatus and cleaning method thereof |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |