CN104105994B - 用于激光束扫描的声光偏转器的配置 - Google Patents

用于激光束扫描的声光偏转器的配置 Download PDF

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Publication number
CN104105994B
CN104105994B CN201180076303.6A CN201180076303A CN104105994B CN 104105994 B CN104105994 B CN 104105994B CN 201180076303 A CN201180076303 A CN 201180076303A CN 104105994 B CN104105994 B CN 104105994B
Authority
CN
China
Prior art keywords
acousto
laser beam
deflection device
optic deflection
diffraction
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CN201180076303.6A
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English (en)
Chinese (zh)
Other versions
CN104105994A (zh
Inventor
李永刚
I·萨拉玛
C·张
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Intel Corp
Original Assignee
Intel Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Intel Corp filed Critical Intel Corp
Publication of CN104105994A publication Critical patent/CN104105994A/zh
Application granted granted Critical
Publication of CN104105994B publication Critical patent/CN104105994B/zh
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/10—Scanning systems
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/29—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the position or the direction of light beams, i.e. deflection
    • G02F1/33—Acousto-optical deflection devices
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K2101/00—Articles made by soldering, welding or cutting
    • B23K2101/36—Electric or electronic devices
    • B23K2101/42—Printed circuits
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/29—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the position or the direction of light beams, i.e. deflection
    • G02F1/291—Two-dimensional analogue deflection
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F2201/00—Constructional arrangements not provided for in groups G02F1/00 - G02F7/00
    • G02F2201/16—Constructional arrangements not provided for in groups G02F1/00 - G02F7/00 series; tandem
CN201180076303.6A 2011-12-22 2011-12-22 用于激光束扫描的声光偏转器的配置 Expired - Fee Related CN104105994B (zh)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/US2011/067001 WO2013095556A1 (en) 2011-12-22 2011-12-22 Configuration of acousto-optic deflectors for laser beam scanning

Publications (2)

Publication Number Publication Date
CN104105994A CN104105994A (zh) 2014-10-15
CN104105994B true CN104105994B (zh) 2017-04-26

Family

ID=48669197

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201180076303.6A Expired - Fee Related CN104105994B (zh) 2011-12-22 2011-12-22 用于激光束扫描的声光偏转器的配置

Country Status (5)

Country Link
US (1) US9442286B2 (ko)
EP (1) EP2795392B1 (ko)
KR (1) KR101676931B1 (ko)
CN (1) CN104105994B (ko)
WO (1) WO2013095556A1 (ko)

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* Cited by examiner, † Cited by third party
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KR101676931B1 (ko) 2011-12-22 2016-11-16 인텔 코포레이션 레이저 빔 스캐닝을 위한 음향 광학 편향기의 구성
US20150338718A1 (en) * 2014-05-22 2015-11-26 Intel Corporation Acousto-optic deflector with multiple transducers for optical beam steering
JP6377771B2 (ja) * 2014-05-22 2018-08-22 インテル コーポレイション 光学ビーム・ステアリングのための複数のトランスデューサをもつ音響光学偏向器
CN113163180B (zh) * 2014-12-29 2023-03-31 奇跃公司 使用声光控制装置的光投影仪
KR102309213B1 (ko) * 2015-03-06 2021-10-05 인텔 코포레이션 레이저 빔 조향용 음향 광학 편향기 및 거울
CN211935467U (zh) * 2017-03-02 2020-11-17 贝姆15有限责任公司 用于动态重建或模拟竞赛情境的光学设备
US11281069B2 (en) * 2017-07-03 2022-03-22 Electro Scientific Industries, Inc. Optically contacted acousto-optic device and method of making the same
CN108716894B (zh) * 2018-04-04 2020-04-28 杭州电子科技大学 一种基于声光偏转器的非机械式激光三维扫描系统
US11118903B2 (en) * 2018-10-17 2021-09-14 Kla Corporation Efficient illumination shaping for scatterometry overlay
DE102020202317A1 (de) * 2019-03-28 2020-10-01 Advantest Corporation Vorrichtung zur messung photoakustischer wellen
US11307433B2 (en) * 2020-02-21 2022-04-19 Robotic Research Opco, Llc Acoustically adjustable lenses
CN112620964B (zh) * 2021-03-15 2021-06-04 金洲数控(北京)软件技术有限公司 一种基于包覆建模的激光加工控制方法
TW202337606A (zh) * 2022-02-27 2023-10-01 美商伊雷克托科學工業股份有限公司 用於聲光偏轉器(aod)之熱穩定操作的方法和設備

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US3531184A (en) * 1968-06-17 1970-09-29 Zenith Radio Corp Monochromatic light beam deflection apparatus having two trains of frequency scanned acoustic waves for effecting bragg diffraction
JP2538569B2 (ja) * 1986-10-31 1996-09-25 日本電気 株式会社 音響光学スイツチ
JP2538589B2 (ja) 1987-04-07 1996-09-25 株式会社東芝 半導体ウエハ処理装置
JP2805064B2 (ja) 1988-04-26 1998-09-30 ソニー株式会社 光記録／再生装置
JPH0437788A (ja) 1990-06-01 1992-02-07 Sony Corp レーザ描画装置
FR2763767B1 (fr) 1997-05-26 1999-08-13 France Telecom Systeme de commutation optique spatiale a deflecteur acousto-optique multicanaux
IL140309A0 (en) 2000-12-14 2002-02-10 Yeda Res & Dev Acousto-optic scanner with fast non-linear scan
AU2002311597A1 (en) * 2001-06-13 2002-12-23 Orbotech Ltd. Multi-beam micro-machining system and method
US6674564B2 (en) 2001-06-15 2004-01-06 Maniabarco, Inc. System, method and article of manufacture for a beam splitting acousto-optical modulator
SE0200547D0 (sv) 2002-02-25 2002-02-25 Micronic Laser Systems Ab An image forming method and apparatus
WO2006129369A1 (ja) 2005-06-03 2006-12-07 Mitsubishi Denki Kabushiki Kaisha レーザ加工方法およびレーザ加工装置
JP4917382B2 (ja) 2006-08-09 2012-04-18 株式会社ディスコ レーザー光線照射装置およびレーザー加工機
KR100817825B1 (ko) * 2007-05-02 2008-03-31 주식회사 이오테크닉스 레이저 가공장치
HU0800781D0 (en) * 2008-12-31 2009-03-02 Femtonics Kft Focusing system comprising acousto-optic deflectors for focusing an electromagnetic beam
JP2010207879A (ja) * 2009-03-11 2010-09-24 Panasonic Corp レーザ加工方法およびレーザ加工装置
TWI523720B (zh) 2009-05-28 2016-03-01 伊雷克托科學工業股份有限公司 應用於雷射處理工件中的特徵的聲光偏轉器及相關雷射處理方法
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KR101676931B1 (ko) 2011-12-22 2016-11-16 인텔 코포레이션 레이저 빔 스캐닝을 위한 음향 광학 편향기의 구성

Also Published As

Publication number Publication date
EP2795392B1 (en) 2018-07-04
WO2013095556A1 (en) 2013-06-27
EP2795392A4 (en) 2015-09-09
KR20140102766A (ko) 2014-08-22
US20140204454A1 (en) 2014-07-24
US9442286B2 (en) 2016-09-13
EP2795392A1 (en) 2014-10-29
KR101676931B1 (ko) 2016-11-16
CN104105994A (zh) 2014-10-15

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Granted publication date: 20170426

Termination date: 20181222