CN104101994B - A kind of interference microcobjective by long working distance microcobjective is reequiped - Google Patents
A kind of interference microcobjective by long working distance microcobjective is reequiped Download PDFInfo
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- CN104101994B CN104101994B CN201310124780.6A CN201310124780A CN104101994B CN 104101994 B CN104101994 B CN 104101994B CN 201310124780 A CN201310124780 A CN 201310124780A CN 104101994 B CN104101994 B CN 104101994B
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- sleeve
- microcobjective
- spectroscope
- trim ring
- reference mirror
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Abstract
The invention discloses a kind of interference microcobjective device by long working distance microcobjective is reequiped, including microcobjective, first set cartridge module and the second sleeve assembly, first set cartridge module one end is threadedly secured on microcobjective, the other end and the second sleeve assembly connect, fixed by only spiral shell, first set cartridge module and the second sleeve assembly joint face are threaded, first set cartridge module includes the first sleeve, first trim ring, reference mirror, first sleeve is threadedly secured on microcobjective, the other end is with three stage rank, reference mirror is fixed on the first sleeve by the first trim ring by screw thread, second sleeve assembly includes the second sleeve, second trim ring, spectroscope, second sleeve bottom is with two stage rank, minimum near the step radius of part to be measured, spectroscope is fixed on the second sleeve by the second trim ring by screw thread.This apparatus structure is simple, and volume is little, handling ease, and the suitability is high, applies in white light interference microscope, can produce white-light fringe, and the high-acruracy survey for surface microscopic three-D profile provides necessary means.
Description
Technical field
The invention belongs to interferometry field, be specifically related to a kind of interference by long working distance microcobjective is reequiped and show
Speck mirror, by increasing reference mirror and spectroscope, the interference microcobjective being transformed into by common microcobjective of convenient dismounting.
Background technology
Interference microscope mainly has Michelson, Mirau and Linnik three types.Mirau interference microscope is according to aobvious
The operating distance of speck mirror carrys out the distance between design reference mirror and spectroscope, the light beam making to be reflected by reference mirror and part to be measured
Optical path difference is zero, and light beam obtains interference image after interfering, such that it is able to analyze the characteristic of part to be measured.It only employs one
Microcobjective, object lens are identical with the impact of measuring beam on reference beam, will not introduce additional path-length error, referring additionally to mirror
With part to be measured relative to spectroscopical apart from equal, it is not necessary to compensating plate can realize interfering.
Mirau(rice Lip river) type interference microscope is that current structure is the simplest, uses most one by long working distance
The interference microcobjective type of microcobjective repacking, Mirau type interferes micro measurement technology at investigation of materials, biomedicine, number
It is widely used according to fields such as storage dish and precision machined surface detections.Patent that Tao Chun bears " Mirau type object lens and making
By the interference microscope of these object lens and the system of measurement ", the patent No. 201220363110, the Mirau type used in system is interfered aobvious
Interference system and microscopic system are split by micro mirror, so will increase the volume of instrument and debug complexity.Zhang Hongxia
Et al. propose a kind of Mirau interference objective optimize design utilize gripper shoe lower surface reflection light beam, so can cause light
Cheng Bianchang, the working distance of microcobjective can not be fully used.The patent of Sagamihara-shi et al., patent No. US
2012/0099115 A1, where it is proposed a kind of Mirau type and interferes microcobjective to be that reference mirror and spectroscope are fixed on one
In sleeve, then sleeve is combined with microcobjective, although the method makes the simple structure of interference microcobjective, but cannot
Regulation reference mirror and the spacing of spectroscope, still limit the scope of application of device, and the range accuracy between two mirrors be only
Can be determined by machining accuracy.
Summary of the invention
It is an object of the invention to provide a kind of interference microcobjective by long working distance microcobjective is reequiped, this dress
Put and easily common microcobjective can be transformed into interference microcobjective, unloading reference mirror and spectroscope can be conveniently installed, and
The spacing that can finely tune reference mirror and spectroscope can be applicable to the microcobjective of different operating distance.
The technical solution realizing the object of the invention is: a kind of interference by reequiping long working distance microcobjective shows
Speck lens device, including microcobjective, first set cartridge module and the second sleeve assembly, first set cartridge module one end is solid by screw thread
Being scheduled on microcobjective, the other end and the second sleeve assembly connect, and fix the second sleeve assembly, first set cartridge module by only spiral shell
It is threaded with the second sleeve assembly joint face, for regulating the distance between reference mirror and spectroscope, first set cartridge module bag
Including the first sleeve, the first trim ring, reference mirror, the first sleeve is threadedly secured on microcobjective, and the other end is with three stages
Rank, minimum near the step radius of microcobjective camera lens, for first step, the most respectively second step and the 3rd step, the
Reference mirror is fixed on the first step lower surface of the first sleeve by one trim ring by screw thread, and the second sleeve assembly includes the second set
Cylinder, the second trim ring, spectroscope, the second sleeve bottom is with two stage rank, minimum near the step radius of part to be measured, is the 4th
Rank, are followed by the 5th step, and spectroscope is fixed on the 4th step upper surface of the second sleeve by the second trim ring by screw thread.
First step upper surface in first sleeve is to the vertical dimension of microcobjective camera lens front endd 0It is not more than 1mm, aobvious
Micro-objective aperture angle isθ, working distance isd, the radius of first stepr 1Need to meetr 1>(d-d 0)∙tanθ/ 2, first step width
Degreec 1It is not more than 1mm, first step thicknessd 1It is not more than 1mm, the radius of reference mirrorr 2Need to meetr 1?r 2≤r 1+c 1, reference mirror
[4] thicknessh 3Require more than second step thicknessd 2And no more than 2mm, the vertical thickness of the first trim ringh 1It is not more than 3mm, the
The thickness of three stepsd 3≥h 1+ h 3-d 2, inner radiir 3Formula need to be metr 3>(d-d 0-d 1-h 3)∙tanθ/ 2, the 3rd step arrives
The distance of the first sleeve bottomd 7> d 6, and need to meetd 0+ d 1+ d 2+d 3+ d 7< d,d 6Being the length of the second sleeve, institute is porose
When the design in footpath need to ensure normally to use, element does not interferes with light propagation；
Second sleeve is by being threaded in the first sleeve, according to the distance of reference mirror Yu microcobjective front endd’ 0, it is ensured that
Second sleeve assembly spectroscope upper surface can be adjusted to away from reference mirror upper surface (d-d’ 0The position of)/2, makes table on reference mirror
Face is equal to the distance on part surface to be measured to spectroscope upper surface and spectroscope upper surface, the vertical thickness of the second trim ringh 2Not quite
In 3mm, the length of the second sleeved 6≥d 4+h 2 +h 4, spectroscopical radiusr 5Meetr 6< r 5≤r 6+c 2, spectroscopical thicknessh 4
Require the 5th step thicknesses more than the second sleeved 5And no more than 2mm, the radius of the 4th step in the second sleever 6Need to meet
[(d-d’ 0)/2]∙tanθ /2<r 6< r 5, the 4th step widthc 2It is not more than 1mm, the 4th step thicknessesd 4It is not more than 1mm, all
When the design in aperture need to ensure normally to use, element does not interferes with light propagation.
Two only screws are designed in first sleeve both sides, and only screw is not more than M4, rotates the second sleeve and is adjusted to by spectroscope
During aplanatism position, fix second sleeve assembly position in the first sleeve, the first trim ring and the second trim ring table by only spiral shell
Face and the second sleeve bottom all devise two apertures, and convenient rotation is fixed；
Reference mirror upper surface radius isr 7Concentric circular regions in plating total reflection film, zone radiusr 7Meet 1/7≤r 5/ r 2
≤ 1/5, reflectance is more than 99%, and operation wavelength is 380-780nm, and the concentricity of border circular areas and upper surface is less than ±
0.2nm, other regions of reference mirror upper surface and lower surface plating anti-reflection film, transmitance is more than 99%, and operation wavelength is 380-780nm,
The surface roughness Ra of upper and lower surface is better than 1nm；
Spectroscope upper surface plated film, reflectance is 70%:30% with the ratio of transmitance, and operation wavelength is 380-780nm, light splitting
Mirror lower surface plating anti-reflection film, transmitance is more than 99%, and operation wavelength is 380-780nm, and the surface roughness Ra of upper and lower surface is better than
1nm。
Microcobjective uses long working distance microcobjective.
The present invention compared with prior art, its remarkable advantage: common microcobjective quickly can be transformed into detection by the present invention
The interference microcobjective of precision element surface topography；Need not compensate for mirror and can realize the two light beams interference of zero optical path difference；Reference
Mirror and the relatively independent assembling of spectroscope, and the most detachably reuse；Device volume is little, easy to process, and can meet height
The use requirement of precision, the spacing of spectroscope and reference mirror is adjustable, can be used for the microcobjective repacking of different operating distance.
Accompanying drawing explanation
Fig. 1 is assembly of the invention structural representation.
Fig. 2 is sleeve group schematic enlarged-scale view of the present invention.
Detailed description of the invention
Below in conjunction with the accompanying drawings the present invention is described in further detail.
In conjunction with Fig. 1 and Fig. 2, a kind of interference microcobjective by long working distance microcobjective is reequiped, it is characterised in that:
Including microcobjective 11, first set cartridge module 1 and the second sleeve assembly 5, first set cartridge module 1 one end is threadedly secured to show
On speck mirror 11, the other end and the second sleeve assembly 5 connect, and fix the second sleeve assembly 5, first set cartridge module by only spiral shell 9
1 is threaded with the second sleeve assembly 5 joint face, and first set cartridge module 1 includes first sleeve the 2, first trim ring 3, reference mirror 4,
First sleeve 2 is threadedly secured on microcobjective 11, and the other end is with three stage rank, near the platform of microcobjective 11 camera lens
Rank radius is minimum, and for first step, the most respectively second step and the 3rd step, the first trim ring 3 passes through screw thread by reference mirror 4
Being fixed on the first step lower surface of the first sleeve 2, the second sleeve assembly 5 includes second sleeve the 6, second trim ring 7, spectroscope 8,
With two stage rank bottom second sleeve 6, minimum near the step radius of part 10 to be measured, it is the 4th step, is followed by the 5th
Rank, spectroscope 8 is fixed on the 4th step upper surface of the second sleeve 6 by the second trim ring 7 by screw thread.
During installation, first reference mirror 4 is screwed in bottom the first sleeve 2, with the one side of the border circular areas of plating total reflection film
For upper surface, then with the first trim ring 3, reference mirror 4 is fixed, then spectroscope 8 is put into the second sleeve 6, fix with the second trim ring 7,
Again the second sleeve assembly 5 is rotated into the first sleeve 2, adjust the position of the second sleeve assembly 5, when being adjusted to aplanatism difference position
With only spiral shell 9, second sleeve assembly 5 is fixed.
First step upper surface in first sleeve 2 is to the vertical dimension of microcobjective 11 camera lens front endd 0=0.6mm, aobvious
Speck mirror 11 angular apertureθ=48.5 °, working distance isd=11.1mm, first step radiusr 1According tor 1>(d-d 0)∙tanθ/ 2 set
It is calculated as 5.5mm, first step widthc 1=0.5mm, first step thicknessd 1=0.4mm, the radius of reference mirror 4r 2=6mm, reference mirror
The thickness of 4h 3=0.5mm, more than the thickness of second stepd 2=0.3mm, the vertical thickness of the first trim ring 3h 1=2mm, the 3rd step
Thicknessd 3=2.2mm, the distance bottom the 3rd step to the first sleeve 2d 7=5.8mm, the vertical thickness of the second trim ring 7h 2=
2mm, the length of the second sleeve 6d 6=3mm, the radius of spectroscope 8r 5=3.7mm, meetsr 5> r 6, the thickness of spectroscope 8h 4=
0.5mm, more than the 5th step thicknesses of the second sleeve [6]d 5=0.3mm, the radius of the 4th step in the second sleeve 6r 6=3.3mm,
Meet [(d-d 0)/2]∙tanθ /2<r 6< r 5, the 4th step widthc 2=0.4mm, the 4th step thicknessesd 4=0.4mm, first set
Only screw, the zone radius of two M2 of cylinder 2 both sides designr 7=1mm, meet 1/7 <r 7/ r 2< 1/5, reflectance is more than 99.9%, work
Being 380-780nm as wavelength, border circular areas is less than ± 0.2nm, other regions of reference mirror 4 upper surface with the concentricity of upper surface
And lower surface plating anti-reflection film, transmitance is more than 99.5%, and operation wavelength is 380-780nm；Spectroscope 8 upper surface plated film, reflectance
Being 70%:30% with the ratio of transmitance, operation wavelength is 380-780nm, and spectroscope 8 lower surface plating anti-reflection film, transmitance is more than
99.9%, operation wavelength is 380-780nm, and the surface roughness Ra of upper and lower surface is better than 0.5nm.
Claims (7)
1. one kind by the interference microcobjective reequiping long working distance microcobjective, it is characterised in that: include microcobjective
[11], first set cartridge module [1] and the second sleeve assembly [5], first set cartridge module [1] one end is threadedly secured to micro-thing
On mirror [11], the other end and the second sleeve assembly [5] connect, and fix the second sleeve assembly [5], the first sleeve by only spiral shell [9]
Assembly [1] is threaded with the second sleeve assembly [5] joint face, and first set cartridge module [1] includes the first sleeve [2], the first pressure
Circle [3], reference mirror [4], the first sleeve [2] is threadedly secured on microcobjective [11], and the other end, with three stage rank, leans on
The step radius of nearly microcobjective [11] camera lens is minimum, for first step, the most respectively second step and the 3rd step, and first
Reference mirror [4] is fixed on the first step lower surface of the first sleeve [2] by screw thread by trim ring [3], and the second sleeve assembly [5] wraps
Including the second sleeve [6], the second trim ring [7], spectroscope [8], the second sleeve [6] bottom is with two stage rank, near part to be measured
[10] step radius is minimum, is the 4th step, is followed by the 5th step, and the second trim ring [7] is solid by spectroscope [8] by screw thread
It is scheduled on the 4th step upper surface of the second sleeve [6].
Interference microcobjective by long working distance microcobjective is reequiped the most according to claim 1, it is characterised in that:
First step upper surface in first sleeve [2] is to the vertical dimension of microcobjective [11] camera lens front endd 0It is not more than 1mm, micro-
Object lens [11] angular aperture isθ, working distance isd, the radius of first stepr 1Need to meetr 1>(d-d 0)∙tanθ/ 2, First
Rank widthc 1It is not more than 1mm, first step thicknessd 1It is not more than 1mm, the radius of reference mirror [4]r 2Need to meetr 1<r 2≤r 1+c 1,
The thickness of reference mirror [4]h 3Require more than second step thicknessd 2And no more than 2mm, the vertical thickness of the first trim ring [3]h 1No
More than 3mm, the thickness of the 3rd stepd 3≥h 1+ h 3-d 2, inner radiir 3Formula need to be metr 3>(d-d 0-d 1-h 3)∙tanθ /
2, the distance of the 3rd step to the first sleeve [2] bottomd 7> d 6, and need to meetd 0+ d 1+ d 2+d 3+ d 7< d,d 6It is second
The length of sleeve [6], when the design in all apertures need to ensure normally to use, element does not interferes with light propagation.
Interference microcobjective by long working distance microcobjective is reequiped the most according to claim 2, it is characterised in that:
Second sleeve [6] is by being threaded in the first sleeve [2], according to the distance of reference mirror [4] Yu microcobjective [11] front endd ’ 0, it is ensured that the second sleeve assembly [5] spectroscope [8] upper surface can be adjusted to away from reference mirror [4] upper surface (d-d’ 0The position of)/2
Put, make reference mirror [4] upper surface to spectroscope [8] upper surface and spectroscope [8] upper surface to the distance on part to be measured [10] surface
Equal, the vertical thickness of the second trim ring [7]h 2It is not more than 3mm, the length of the second sleeve [6]d 6≥d 4+h 2 +h 4,d 4It it is the 4th
Rank thickness,h 4For the thickness of spectroscope [8], the radius of spectroscope [8]r 5Meetr 6< r 5≤r 6+c 2,r 6It is the second sleeve [6]
In the radius of the 4th step, the thickness of spectroscope [8]h 4Require the 5th step thicknesses more than the second sleeve [6]d 5And be not more than
2mm, the radius of the 4th step in the second sleeve [6]r 6Need to meet [(d -d' 0)/2]∙tanθ /2<r 6< r 5, the 4th step width
Degreec 2It is not more than 1mm, the 4th step thicknessesd 4Being not more than 1mm, when the design in all apertures need to ensure normally to use, element will not shadow
Ring light to propagate.
Interference microcobjective by long working distance microcobjective is reequiped the most according to claim 2, it is characterised in that:
Reference mirror [4] upper surface radius isr 7Concentric circular regions in plating total reflection film, zone radiusr 7Meet 1/7≤r 7 / r 2≤1/
5, reflectance is more than 99%, and operation wavelength is 380-780nm, and border circular areas is less than ± 0.2nm with the concentricity of upper surface, ginseng
Examining other regions of mirror [4] upper surface and lower surface plating anti-reflection film, transmitance is more than 99%, and operation wavelength is 380-780nm, up and down
The surface roughness Ra on surface is better than 1nm.
Interference microcobjective by long working distance microcobjective is reequiped the most according to claim 1, it is characterised in that:
Spectroscope [8] upper surface plated film, reflectance is 70%:30% with the ratio of transmitance, and operation wavelength is 380-780nm, spectroscope [8]
Lower surface plating anti-reflection film, transmitance is more than 99%, and operation wavelength is 380-780nm, and the surface roughness Ra of upper and lower surface is better than
1nm。
Interference microcobjective by long working distance microcobjective is reequiped the most according to claim 1, it is characterised in that:
First sleeve [2] both sides arrange two only screws, and only screw is not more than M4, rotates the second sleeve [6] and is adjusted to by spectroscope [8]
During aplanatism position, fix the second sleeve assembly [5] position in the first sleeve [2], the first trim ring [3] by only spiral shell [9]
All devising two apertures with the second trim ring [7] surface and the second sleeve [6] bottom, convenient rotation is fixed.
Interference microcobjective by long working distance microcobjective is reequiped the most according to claim 1, it is characterised in that:
Microcobjective [11] uses long working distance microcobjective.
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| Application Number | Priority Date | Filing Date | Title |
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| CN201310124780.6A CN104101994B (en) | 2013-04-11 | 2013-04-11 | A kind of interference microcobjective by long working distance microcobjective is reequiped |
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|---|---|---|---|
| CN201310124780.6A CN104101994B (en) | 2013-04-11 | 2013-04-11 | A kind of interference microcobjective by long working distance microcobjective is reequiped |
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| CN104101994A CN104101994A (en) | 2014-10-15 |
| CN104101994B true CN104101994B (en) | 2016-12-28 |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| JP6461609B2 (en) * | 2015-01-05 | 2019-01-30 | 株式会社ミツトヨ | Interference objective lens and optical interference measurement apparatus |
| CN105241393B (en) * | 2015-09-24 | 2018-11-13 | 南京理工大学 | High-accuracy portable optical surface three-dimensional appearance on-line detector |
| CN106370129B (en) * | 2016-11-17 | 2017-09-22 | 南京理工大学 | 5 times of Michaelsons interfere microcobjective optical system |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6657728B1 (en) * | 1998-12-25 | 2003-12-02 | Mitutoyo Corporation | Two beam interference objective device |
| CN101893753A (en) * | 2009-05-21 | 2010-11-24 | 义守大学 | Microscope lens device with light guide function |
| EP2447663A1 (en) * | 2010-10-26 | 2012-05-02 | Mitutoyo Corporation | Interference objective lens unit with temperature variation compensation and light-interference measuring apparatus using thereof |
| CN102608744A (en) * | 2011-01-18 | 2012-07-25 | 卡尔蔡司微成像有限责任公司 | Microscope objective with at least one lens group that can be moved along the optical axis |
-
2013
- 2013-04-11 CN CN201310124780.6A patent/CN104101994B/en active Active
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6657728B1 (en) * | 1998-12-25 | 2003-12-02 | Mitutoyo Corporation | Two beam interference objective device |
| CN101893753A (en) * | 2009-05-21 | 2010-11-24 | 义守大学 | Microscope lens device with light guide function |
| EP2447663A1 (en) * | 2010-10-26 | 2012-05-02 | Mitutoyo Corporation | Interference objective lens unit with temperature variation compensation and light-interference measuring apparatus using thereof |
| CN102608744A (en) * | 2011-01-18 | 2012-07-25 | 卡尔蔡司微成像有限责任公司 | Microscope objective with at least one lens group that can be moved along the optical axis |
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