CN104101994A - Interference microobjective refitted by long-working-distance microobjective - Google Patents

Interference microobjective refitted by long-working-distance microobjective Download PDF

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Publication number
CN104101994A
CN104101994A CN201310124780.6A CN201310124780A CN104101994A CN 104101994 A CN104101994 A CN 104101994A CN 201310124780 A CN201310124780 A CN 201310124780A CN 104101994 A CN104101994 A CN 104101994A
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sleeve
microcobjective
spectroscope
radius
interference
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CN201310124780.6A
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CN104101994B (en
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马骏
高志山
谢佳丽
朱日宏
黄亚
冯海友
陈磊
王青
何勇
李建欣
沈华
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Nanjing University of Science and Technology
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Nanjing University of Science and Technology
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Abstract

The invention discloses an interference microobjective refitted by a long-working-distance microobjective. The interference microobjective includes a microobjective, a first sleeve assembly and a second sleeve assembly, one end of the first sleeve assembly is fixed on the microobjective through threads, the other end is connected with the second sleeve assembly and fixed through a tension screw, a junction surface of the first sleeve assembly and the second sleeve assembly are provided with threads, the first sleeve assembly includes a first sleeve, a first clamping ring, and a reference mirror, the first sleeve is fixed on the microobjective through threads, the other end is provided with three steps, the first clamping ring fixed the reference mirror on the first sleeve through threads, the second sleeve assembly includes a second sleeve, a second clamping ring, and a spectroscope, the bottom of the second sleeve is provided with two steps, the radius of the step close to a piece to be tested is the smallest, and the second clamping ring fixes the spectroscope on the second sleeve through threads. The device is simple in structure, small in size, easy to machine, and high in applicability, when applied to a white light interference microscope, the device can generate white light interference fringes, thereby providing a necessary means for high-precision measurement of a surface microcosmic three-dimensional profile.

Description

A kind of by the interference microcobjective to the repacking of long working distance microcobjective
Technical field
The invention belongs to interferometry field, be specifically related to a kind of interference microcobjective passing through the repacking of long working distance microcobjective, by increasing reference mirror for convenience detach and spectroscope, the interference microcobjective that common microcobjective is transformed into.
Background technology
Interference microscope mainly contains Michelson, Mirau and Linnik three types.Mirau interference microscope carrys out the distance between design reference mirror and spectroscope according to the operating distance of microcobjective, making the optical path difference by the light beam of reference mirror and to be measured reflection is zero, after light beam interferes, obtain interference image, thereby can analyze the characteristic of to be measured.It has only used a microcobjective, and object lens are identical on the impact of reference beam and measuring beam, can not introduce additional path-length error, and reference mirror and to be measured equate with respect to spectroscopical distance in addition, do not need compensating plate can realize interference.
Mirau(rice Lip river) type interference microscope be current structure the simplest, use maximum a kind ofly by the interference microcobjective type to the repacking of long working distance microcobjective, Mirau type interferes micro-detection technique to be used widely in fields such as investigation of materials, biomedicine, data storage disk and precision machined surface detections.Patent < < Mirau type object lens that Tao Chun bears and use interference microscope and the measuring system > > of these object lens, the patent No. 201220363110, the Mirau type interference microscope using in system splits interference system and microscopic system, will increase like this volume of instrument and debug complexity.The optimal design of a kind of Mirau interference objective that the people such as Zhang Hongxia propose is utilized the lower surface folded light beam of back up pad, can cause like this light path elongated, and the working distance of microcobjective can not be fully used.The people's such as Sagamihara-shi patent, patent No. US 2012/0099115 A1, wherein having proposed a kind of Mirau type interference microcobjective is to be fixed in a sleeve with reference to mirror and spectroscope, then by sleeve and microcobjective combination, although the method makes to interfere the simple structure of microcobjective, but cannot regulate distance between reference mirror and spectroscope, still limited the scope of application of device, and the range accuracy between two mirrors can only be determined by machining precision.
Summary of the invention
The object of the present invention is to provide a kind of by the interference microcobjective to the repacking of long working distance microcobjective, this device can be transformed into interference microcobjective by common microcobjective easily, unloading reference mirror and spectroscope can be conveniently installed, and can finely tune the microcobjective that distance between reference mirror and spectroscope can be applicable to different operating distance.
The technical solution that realizes the object of the invention is: a kind of by the interference microcobjective device to the repacking of long working distance microcobjective, comprise microcobjective, first set cartridge module and the second sleeve assembly, first set cartridge module one end is fixed on microcobjective by screw thread, the other end is connected with the second sleeve assembly, by stopping spiral shell, fix the second sleeve assembly, first set cartridge module and the second sleeve assembly joint face are threaded, for regulating the distance between reference mirror and spectroscope, first set cartridge module comprises the first sleeve, the first trim ring, reference mirror, the first sleeve is fixed on microcobjective by screw thread, the other end is with three stage rank, step radius near microcobjective camera lens is minimum, for first step, be respectively second step and the 3rd step thereafter, the first trim ring is fixed on the first step lower surface of the first sleeve with reference to mirror by screw thread, the second sleeve assembly comprises the second sleeve, the second trim ring, spectroscope, the second sleeve bottom is with two stage rank, minimum near the step radius of to be measured, it is the 4th step, it is the 5th step thereafter, the second trim ring is fixed on spectroscope by screw thread the 4th step upper surface of the second sleeve.
First step upper surface in the first sleeve is to the vertical range of microcobjective camera lens front end d 0be not more than 1mm, microcobjective aperture angle is θ, working distance is d, the radius of first step r 1need to meet r 1> ( d- d 0) tan θ/ 2, first step width c 1be not more than 1mm, first step thickness d 1be not more than 1mm, the radius of reference mirror r 2need to meet r 1﹤ r 2≤ r 1+ c 1, the thickness of reference mirror [4] h 3requirement is greater than second step thickness d 2and be not more than 2mm, the vertical thickness of the first trim ring h 1be not more than 3mm, the thickness of the 3rd step d 3>= h 1+ h 3- d 2, inner ring radius r 3need meet formula r 3> ( d- d 0- d 1- h 3) tan θthe/2, three step is to the distance of the first sleeve bottom d 7> d 6, and need to meet d 0+ d 1+ d 2+ d 3+ d 7< d, when the design in all apertures need guarantee normally to use, element can not affect light transmition;
The second sleeve is by being threaded in the first sleeve, according to the distance of reference mirror and microcobjective front end d 0, guarantee the second sleeve assembly spectroscope upper surface can be adjusted to apart from reference mirror upper surface ( d- d 0the position of)/2, makes reference mirror upper surface equate to be measured surperficial distance to spectroscope upper surface and spectroscope upper surface, the vertical thickness of the second trim ring h 2be not more than 3mm, the length of the second sleeve d 6>= d 4+ h 2 + h 4, inner ring radius r 4need to meet r 4>[( d- d 0)/2+ h 2] tan θ/ 2, spectroscopical radius r 5meet r 4< r 5≤ r 4+ c 2, spectroscopical thickness h 4requirement is greater than the 5th step thicknesses of the second sleeve [6] d 5and be not more than 2mm, the radius of the 4th step in the second sleeve r 6need to meet [( d- d 0)/2] tan θ/ 2< r 6< r 5, the 4th step width c 2be not more than 1mm, the 4th step thicknesses d 4be not more than 1mm, when the design in all apertures need guarantee normally to use, element can not affect light transmition;
The first two of sleeve both sides designs are screw only, only screw is not more than M4, when rotating the second sleeve spectroscope being adjusted to aplanatism position, by stopping spiral shell, fix the position of the second sleeve assembly in the first sleeve, two apertures have all been designed in the first trim ring and the second trim ring surface and the second sleeve bottom, and convenient rotation is fixing;
Reference mirror upper surface radius is r 5concentric circular regions in plating total reflection film, zone radius r 5meet 1/7≤ r 5/ r 2≤ 1/5, reflectivity is greater than 99%, operation wavelength is 380-780nm, be less than ± 0.2nm of the concentricity of border circular areas and upper surface, other regions of reference mirror upper surface and lower surface plating anti-reflection film, transmitance is greater than 99%, and operation wavelength is 380-780nm, and the surface roughness Ra of upper and lower surface is better than 1nm;
Spectroscope upper surface plated film, reflectivity is 70%:30% with the ratio of transmitance, operation wavelength is 380-780nm, spectroscope lower surface plating anti-reflection film, transmitance is greater than 99%, and operation wavelength is 380-780nm, and the surface roughness Ra of upper and lower surface is better than 1nm.
Microcobjective adopts long working distance microcobjective.
The present invention compared with prior art, its remarkable advantage: the present invention can be transformed into common microcobjective the interference microcobjective that detects precision element surface topography fast; The two light beams that does not need compensating glass can realize zero optical path difference is interfered; The relatively independent assembling of reference mirror and spectroscope, and all detachably reuse separately; Device volume is little, easy to process, and can meet high-precision request for utilization, and between spectroscope and reference mirror, distance is adjustable, can be used for the microcobjective repacking of different operating distance.
Accompanying drawing explanation
Fig. 1 is apparatus structure schematic diagram of the present invention.
Fig. 2 is sleeve group structure enlarged drawing of the present invention.
Embodiment
Below in conjunction with accompanying drawing, the present invention is described in further detail.
In conjunction with Fig. 1 and Fig. 2, during installation, first with reference to mirror 4, from the first sleeve 2 bottoms, screw in, one side with the border circular areas of plating total reflection film is upper surface, more fixing with reference to mirror 4 with the first trim ring 3, then spectroscope 8 is put into the second sleeve 6, fixing with the second trim ring 7, again the second sleeve assembly 5 is rotated into the first sleeve 2, adjusts the position of the second sleeve assembly 5, with stopping spiral shell 9, the second sleeve assembly 5 is fixing while adjusting to the poor position of aplanatism.
First step upper surface in the first sleeve 2 is to the vertical range of microcobjective 11 camera lens front ends d 0=0.6mm, microcobjective 11 aperture angles θ=48.5 °, working distance is d=11.1mm, first step radius r 1according to r 1> ( d- d 0) tan θ/ 2 are designed to 5.5mm, first step width c 1=0.5mm, first step thickness d 1=0.4mm, the radius of reference mirror 4 r 2=6mm, the thickness of reference mirror 4 h 3=0.5mm, is greater than the thickness of second step d 2=0.3mm, the vertical thickness of the first trim ring 3 h 1=2mm, the thickness of the 3rd step d 3=2.2mm, inner ring radius r 3=5.7mm, the 3rd step is to the distance of the first sleeve 2 bottoms d 7=5.8mm, the vertical thickness of the second trim ring 7 h 2=2mm, the length of the second sleeve 6 d 6=3mm, inner ring radius r 4=3.5mm, meets r 4>[( d- d 0)/2+ h 2] tan θ/ 2, the radius of spectroscope 8 r 5=3.7mm, meets r 5> r 4, the thickness of spectroscope 8 h 4=0.5mm, is greater than the 5th step thicknesses of the second sleeve [6] d 5=0.3mm, the radius of the 4th step in the second sleeve 6 r 6=3.3mm, meet [( d- d 0)/2] tan θ/ 2< r 6< r 5, the 4th step width c 2=0.4mm, the 4th step thicknesses d 4=0.4mm, the only screw of two M2 of the first sleeve 2 both sides designs, zone radius r 5=1mm, meets 1/7< r 5/ r 2<1/5, reflectivity is greater than 99.9%, and operation wavelength is 380-780nm, be less than ± 0.2nm of the concentricity of border circular areas and upper surface, other regions of reference mirror 4 upper surfaces and lower surface plating anti-reflection film, transmitance is greater than 99.5%, and operation wavelength is 380-780nm; Spectroscope 8 upper surface plated films, reflectivity is 70%:30% with the ratio of transmitance, operation wavelength is 380-780nm, spectroscope 8 lower surface plating anti-reflection films, transmitance is greater than 99.9%, and operation wavelength is 380-780nm, and the surface roughness Ra of upper and lower surface is better than 0.5nm.

Claims (7)

1. one kind is passed through the interference microcobjective that long working distance microcobjective is reequiped, it is characterized in that: comprise microcobjective [11], first set cartridge module [1] and the second sleeve assembly [5], first set cartridge module [1] one end is fixed on microcobjective [11] by screw thread, the other end is connected with the second sleeve assembly [5], by stopping spiral shell [9], fix the second sleeve assembly [5], first set cartridge module [1] is threaded with the second sleeve assembly [5] joint face, first set cartridge module [1] comprises the first sleeve [4], the first trim ring [3], reference mirror [4], the first sleeve [2] is fixed on microcobjective [11] by screw thread, the other end is with three stage rank, step radius near microcobjective [11] camera lens is minimum, for first step, be respectively second step and the 3rd step thereafter, the first trim ring [3] is fixed on the first step lower surface of the first sleeve [2] with reference to mirror [4] by screw thread, the second sleeve assembly [5] comprises the second sleeve [6], the second trim ring [7], spectroscope [8], the second sleeve [6] bottom is with two stage rank, step radius near to be measured [10] is minimum, it is the 4th step, it is the 5th step thereafter, the second trim ring [7] is fixed on spectroscope [8] by screw thread the 4th step upper surface of the second sleeve [6].
2. according to claim 1 by the interference microcobjective to the repacking of long working distance microcobjective, it is characterized in that: the first step upper surface in the first sleeve [2] is to the vertical range of microcobjective [11] camera lens front end d 0be not more than 1mm, microcobjective [11] aperture angle is θ, working distance is d, the radius of first step r 1need to meet r 1> ( d- d 0) tan θ/ 2, first step width c 1be not more than 1mm, first step thickness d 1be not more than 1mm, the radius of reference mirror [4] r 2need to meet r 1< r 2≤ r 1+ c 1, the thickness of reference mirror [4] h 3requirement is greater than second step thickness d 2and be not more than 2mm, the vertical thickness of the first trim ring [3] h 1be not more than 3mm, the thickness of the 3rd step d 3>= h 1+ h 3- d 2, inner ring radius r 3need meet formula r 3> ( d- d 0- d 1- h 3) tan θthe/2, three step is to the distance of the first sleeve [2] bottom d 7> d 6, and need to meet d 0+ d 1+ d 2+ d 3+ d 7< d, when the design in all apertures need guarantee normally to use, element can not affect light transmition.
3. according to claim 1 by the interference microcobjective to the repacking of long working distance microcobjective, it is characterized in that: the second sleeve [6] is by being threaded in the first sleeve [2], according to the distance of reference mirror [4] and microcobjective [11] front end d 0, guarantee the second sleeve assembly [5] spectroscope [8] upper surface can be adjusted to apart from reference mirror [4] upper surface ( d- d 0the position of)/2, makes reference mirror [4] upper surface equal to the distance on to be measured [10] surface to spectroscope [8] upper surface and spectroscope [8] upper surface, the vertical thickness of the second trim ring [7] h 2be not more than 3mm, the length of the second sleeve [6] d 6>= d 4+ h 2 + h 4, inner ring radius r 4need to meet r 4>[( d- d 0)/2+ h 2] tan θ/ 2, the radius of spectroscope [8] r 5meet r 4< r 5≤ r 4+ c 2, the thickness of spectroscope [8] h 4requirement is greater than the 5th step thicknesses of the second sleeve [6] d 5and be not more than 2mm, the radius of the 4th step in the second sleeve [6] r 6need to meet [( d- d 0)/2] tan θ/ 2< r 6< r 5, the 4th step width c 2be not more than 1mm, the 4th step thicknesses d 4be not more than 1mm, when the design in all apertures need guarantee normally to use, element can not affect light transmition.
4. according to claim 1 by the interference microcobjective to the repacking of long working distance microcobjective, it is characterized in that: reference mirror [4] upper surface radius is r 5concentric circular regions in plating total reflection film, zone radius r 5meet 1/7≤ r 5/ r 2≤ 1/5, reflectivity is greater than 99%, operation wavelength is 380-780nm, be less than ± 0.2nm of the concentricity of border circular areas and upper surface, other regions of reference mirror [4] upper surface and lower surface plating anti-reflection film, transmitance is greater than 99%, and operation wavelength is 380-780nm, and the surface roughness Ra of upper and lower surface is better than 1nm.
5. according to claim 1 by the interference microcobjective to the repacking of long working distance microcobjective, it is characterized in that: spectroscope [8] upper surface plated film, reflectivity is 70%:30% with the ratio of transmitance, operation wavelength is 380-780nm, spectroscope [8] lower surface plating anti-reflection film, transmitance is greater than 99%, and operation wavelength is 380-780nm, and the surface roughness Ra of upper and lower surface is better than 1nm.
6. according to claim 1 by the interference microcobjective to the repacking of long working distance microcobjective, it is characterized in that: the first sleeve [2] both sides arrange two only screws, only screw is not more than M4, when rotating the second sleeve [6] spectroscope [8] being adjusted to aplanatism position, by stopping spiral shell [9], fix the position of the second sleeve assembly [5] in the first sleeve [2], two apertures have all been designed in the first trim ring [3] and the second trim ring [7] surface and the second sleeve [6] bottom, and convenient rotation is fixing.
7. according to claim 1 by the interference microcobjective to the repacking of long working distance microcobjective, it is characterized in that: microcobjective [11] adopts long working distance microcobjective.
CN201310124780.6A 2013-04-11 2013-04-11 A kind of interference microcobjective by long working distance microcobjective is reequiped Active CN104101994B (en)

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Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105241393A (en) * 2015-09-24 2016-01-13 南京理工大学 High-precision portable optical surface three-dimensional morphology online detector
CN105758294A (en) * 2015-01-05 2016-07-13 株式会社三丰 Interference objective lens and light interference measuring device
CN106370129A (en) * 2016-11-17 2017-02-01 南京理工大学 5X Michelson interference microscope objective optical system

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6657728B1 (en) * 1998-12-25 2003-12-02 Mitutoyo Corporation Two beam interference objective device
CN101893753A (en) * 2009-05-21 2010-11-24 义守大学 Microscope lens device with light guide function
EP2447663A1 (en) * 2010-10-26 2012-05-02 Mitutoyo Corporation Interference objective lens unit with temperature variation compensation and light-interference measuring apparatus using thereof
CN102608744A (en) * 2011-01-18 2012-07-25 卡尔蔡司微成像有限责任公司 Microscope objective with at least one lens group that can be moved along the optical axis

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6657728B1 (en) * 1998-12-25 2003-12-02 Mitutoyo Corporation Two beam interference objective device
CN101893753A (en) * 2009-05-21 2010-11-24 义守大学 Microscope lens device with light guide function
EP2447663A1 (en) * 2010-10-26 2012-05-02 Mitutoyo Corporation Interference objective lens unit with temperature variation compensation and light-interference measuring apparatus using thereof
CN102608744A (en) * 2011-01-18 2012-07-25 卡尔蔡司微成像有限责任公司 Microscope objective with at least one lens group that can be moved along the optical axis

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105758294A (en) * 2015-01-05 2016-07-13 株式会社三丰 Interference objective lens and light interference measuring device
CN105758294B (en) * 2015-01-05 2019-12-24 株式会社三丰 Interference objective and optical interference measuring device
CN105241393A (en) * 2015-09-24 2016-01-13 南京理工大学 High-precision portable optical surface three-dimensional morphology online detector
CN105241393B (en) * 2015-09-24 2018-11-13 南京理工大学 High-accuracy portable optical surface three-dimensional appearance on-line detector
CN106370129A (en) * 2016-11-17 2017-02-01 南京理工大学 5X Michelson interference microscope objective optical system

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