CN104101789A - Measurement apparatus and method of automatic test equipment - Google Patents

Measurement apparatus and method of automatic test equipment Download PDF

Info

Publication number
CN104101789A
CN104101789A CN201310122280.9A CN201310122280A CN104101789A CN 104101789 A CN104101789 A CN 104101789A CN 201310122280 A CN201310122280 A CN 201310122280A CN 104101789 A CN104101789 A CN 104101789A
Authority
CN
China
Prior art keywords
parameter
pin
signal
unit
reading
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
CN201310122280.9A
Other languages
Chinese (zh)
Other versions
CN104101789B (en
Inventor
张友青
林士闻
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Chroma ATE Suzhou Co Ltd
Original Assignee
Chroma ATE Suzhou Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Chroma ATE Suzhou Co Ltd filed Critical Chroma ATE Suzhou Co Ltd
Priority to CN201310122280.9A priority Critical patent/CN104101789B/en
Publication of CN104101789A publication Critical patent/CN104101789A/en
Application granted granted Critical
Publication of CN104101789B publication Critical patent/CN104101789B/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Abstract

The invention relates to a measurement apparatus and method of automatic test equipment. The measurement apparatus comprises multiple pin parameter measurement units, an analog-to-digital converter and a control unit, wherein each pin parameter measurement unit is used for measuring a pin to be measured to generate a measurement signal; the analog-to-digital converter is used for converting the measurement signal to a value reading signal; and the control unit is electrically connected with the analog-to-digital converter for selecting one from the multiple pin parameter measurement units and controlling the analog-to-digital converter for conversion so as to receive the value reading signals, such that multiple pins to be measured can be measured rapidly, and the purpose of shortening test time is achieved.

Description

The measuring equipment of ATE (automatic test equipment) and method
Technical field
The invention relates to a kind of measuring equipment and method, it is a kind of measuring equipment and method of ATE (automatic test equipment) espespecially.
Background technology
In the manufacture process of all electron devices (Device), all exist the needs of eliminating the false and retaining the true, in fact this need to be exactly a test process.Realize the various testing apparatuss of this process need, this kind equipment is exactly so-called ATE (automatic test equipment) (Automatic Test Equipment, ATE).And in field of automatic testing, how shortening the test duration is very important problem always, test duration shortening is the cost of representative products.
Refer to Fig. 1, the circuit diagram of its ATE (automatic test equipment) that is known techniques.As shown in the figure, known ATE (automatic test equipment) includes a plurality of test channel CH1, CH2 ... CHn-1, CHn, the plurality of test channel CH1, CH2 ... CHn-1, CHn are connected in a parameter and measure unit (Parametric Measurement Unit, PMU), and each test channel comprises a pin parameter and measures unit (Per Pin Parametric Measurement Unit, PPMU).Parameter measures unit PMU in order to provide four-quadrant accurately to measure (VFIM, IFVM, VMM), but it is few that shortcoming is quantity, common 64 test channel can only be assigned to a parameter and measure unit PMU, make parameter measure unit PMU pin PIN1 a plurality of to be measured, the PIN2 to determinand in turn ... PINn-1, PINn measure, therefore the time of meeting overspending.And the plurality of pin parameter measurement unit PPMU can measure respectively the plurality of pin CHI to be measured, CH2 simultaneously ... CHn-1, CHn, but can only export the measurement signal MS being measured to a comparer, and relatively measure signal MS do by/by (G0/NO-GO), do not measure, that is to say, whether the plurality of pin parameter measures unit PPMU and only can use in order to the determinand of testing in each test channel, and cannot read actual test value, so also more not accurate, so parameter measures unit PMU and pin parameter measurement unit PPMU respectively has relative merits.
From the above, parameter measures unit PMU can provide four-quadrant accurately to measure, but parameter measurement unit PMU quantity is few, measure overlong time, the plurality of pin parameter measures unit PPMU can measure each test channel simultaneously, and measurement speed is fast, but can only provide by/rough the measurement do not passed through.Therefore, use known ATE (automatic test equipment) and cannot reach both accurate and fireballing measurement modes.
Moreover, when ATE (automatic test equipment) measures test channel conventionally, by a main frame, to see through a bus to assign measurement instruction to ATE (automatic test equipment), in the time need to measuring a plurality of test channel or need to measure the different assembly of determinand simultaneously, main frame all must be assigned the instruction of Close All before each test channel of test, then assign again the instruction of unlatching to open the test channel of requirement survey, therefore measure more test channel or assembly and must assign more volume survey instruction, so, the mode of above-mentioned software control is when measuring many test channel or assembly, have the excessively slow problem of measurement speed, and aforesaid way can take the too much resource of bus.
In addition, the cost that measures unit PMU due to parameter is higher, if therefore increase the quantity that parameter measures unit PMU, can increase the cost of whole auto-measuring equipment.
Therefore, the present invention is directed to the problems referred to above provides a kind of control module that utilizes sequentially to select a plurality of pins to measure unit, make the plurality of pin parameter measure unit and sequentially measure a plurality of pins to be measured, so, the present invention utilizes the hardware circuit of control module to measure and reaches measuring equipment and the method for the ATE (automatic test equipment) of the plurality of pin to be measured of rapid measuring.
Summary of the invention
An object of the present invention, be to provide a kind of measuring equipment and method of ATE (automatic test equipment), its hardware circuit by a control module and sequentially select a plurality of pin parameters to measure unit, make the plurality of pin parameter measure unit and sequentially measure a plurality of pins to be measured, with the plurality of pin to be measured of rapid measuring, and then reach the object that shortens the test duration.
In order to reach above-mentioned censured each object and effect, the present invention has disclosed a kind of measuring equipment of ATE (automatic test equipment), and it comprises a plurality of pins and measures unit, an analog-digital converter and a control module.Each pin parameter that the plurality of pin parameter measures in unit measures unit in order to measure a pin to be measured, to produce a measurement signal, analog-digital converter is in order to be converted to measurement signal one value of reading signal, control module is electrically connected at analog-digital converter, in order to select the plurality of pin parameter to measure one of unit, and control simulation digital quantizer changes to receive the value of reading signal.So, the present invention sequentially selects the plurality of pin parameter to measure unit by control module, makes the plurality of pin parameter measure unit and sequentially measures a plurality of pins to be measured, with the plurality of pin to be measured of rapid measuring, and then reaches the object that shortens the test duration.
The present invention has more disclosed a kind of method for measurement of ATE (automatic test equipment), be applied to a plurality of pin parameters measurements unit that a measuring equipment is electrically connected ATE (automatic test equipment), the step of method for measurement comprises: according to one, select signal to select the plurality of pin parameter to measure one of unit; Order about selected pin parameter and measure a pin to be measured corresponding to unit measuring, to produce a measurement signal; And the measurement signal of selected pin parameter measurement unit output is converted to the value of a reading signal.
The beneficial effect of implementing the present invention's generation is: the present invention connects an analog-digital converter by the output terminal that measures unit in a plurality of pin parameters, the plurality of pin parameter is measured to the measurement signal of unit output, be converted to the value of reading signal, and sequentially select the plurality of pin parameter that requirement is surveyed to measure one of unit by a control module, to reach the object that measures fast and accurately a plurality of pins to be measured.
Accompanying drawing explanation
Fig. 1: the circuit diagram of its ATE (automatic test equipment) that is known techniques;
Fig. 2: the circuit diagram of the measuring equipment of its ATE (automatic test equipment) that is the first embodiment of the present invention;
Fig. 3: the schematic diagram of the measuring equipment of its ATE (automatic test equipment) that is the first embodiment of the present invention;
Fig. 4: its calcspar that is control module of the present invention;
Fig. 5: its circuit diagram that is correcting circuit of the present invention;
Fig. 6: it is the calcspar of correction memory circuit of the present invention;
Fig. 7: the schematic diagram of the measuring equipment of its ATE (automatic test equipment) that is the second embodiment of the present invention;
Fig. 8: the process flow diagram of its method for measurement that is ATE (automatic test equipment) of the present invention; And
Fig. 9: the constitutional diagram of its method for measurement that is ATE (automatic test equipment) of the present invention.
[figure number is to as directed]
10 analog-digital converter 20 control modules
21 lookup unit 23 are selected control module
25 correction memory circuit 251 first flip-flops
252 selector switch 253 second flip-flops
254 gain mnemon 255 compensation mnemons
256 the 3rd flip-flop 257 the 4th flip-flops
27 correcting circuit 271 multipliers
273 totalizer 29 storage elements
40 main frame 60 selected cells
CH1 test channel CH2 test channel
CHn-1 test channel CHn test channel
Gain gain parameter MS measures signal
Offset compensating parameter PIN1 pin to be measured
PIN2 pin PINn-1 to be measured pin to be measured
PINn pin PMU to be measured parameter measures unit
PPMU pin parameter measures unit R _ add reading address
S_add stores address RWD read-write signal
SP selects parameter S S to select signal
The actual value of the reading signal of the VAL value of reading signal VAL '
Embodiment
For the effect that makes architectural feature of the present invention and reach has a better understanding and awareness, spy is by preferred embodiment and coordinate detailed explanation, is described as follows:
First, refer to Fig. 2, the circuit diagram of the measuring equipment of its ATE (automatic test equipment) that is the first embodiment of the present invention.As shown in the figure, measuring equipment of the present invention comprises a plurality of measurement of pin parameters unit PPMU, an analog-digital converter 10 and control modules 20.The plurality of pin parameter measures unit PPMU and is arranged at respectively a plurality of test channel CH1, CH2 ... CHn-1, CHn, and connect respectively pin PIN1 to be measured, the PIN2 of determinand ... PINn-1, PINn, and measure the plurality of pin PIN1 to be measured, PIN2 ... PINn-1, PINn to be to produce respectively a measurement signal MS, wherein the plurality of pin PIN1 to be measured, PIN2 ... PINn-1, PINn can be the pin of same determinand or are respectively the pin of a plurality of determinands.Analog-digital converter 10 is connected in the output terminal that the plurality of pin parameter measures unit PPMU, and in order to measurement signal MS is converted to the value of reading a signal VAL.Control module 20 is electrically connected at analog-digital converter 10, and transmit a selection signal SS to the plurality of pin parameter measurement unit PPMU, to select the plurality of pin parameter to measure one of unit PPMU, with selected pin parameter, measure unit PPMU to its corresponding pin to be measured (PIN1, PIN2 ... one of PINn-1, PINn) measure, and the measurement signal MS of 10 couples of pin parameters measurement unit PPMU of analog-digital converter output is converted to the value of reading signal VAL.
Based on above-mentioned, because utilizing the hardware circuit of control module 20, the present invention sequentially select the plurality of pin parameter to measure unit PPMU, make the plurality of pin parameter measure unit PPMU and sequentially measure the plurality of test channel CH1, CH2 ... the pin to be measured of CHn-1, CHn, with the plurality of test channel CH1 of rapid measuring, CH2 ... the determinand of CHn-1, CHn, and then reach the object that shortens the test duration.
General have bus B US as communication transfer between the two between measuring equipment Tester and main frame 40, yet, the communication time of bus B US can change with the load of the central processor CPU of main frame 40, so, if use software to measure, likely further affect measurement.Moreover, due to the computer hardware that cannot determine end to be measured why, the best way is completely by the whole measuring program of hardware circuit control of control module 20 itself, and can guarantee that measurement is not affected by the speed of main frame 40 bus B US communication times.
In addition, it is the resource that does not account for main frame 40 that the present invention uses another benefit of the hardware circuit controlled quentity controlled variable measuring program of control module 20, during measuring at analog-digital converter 10, software still can see through main frame 40 and other assemblies be set with bus B US simultaneously, such as access memory or to temperature or voltage, the behavior such as detect, and then can shorten test and the time of setting.
In addition, control module 20 more can be proofreaied and correct the actual value of the reading signal of rear generation one VAL ' to the value of reading signal VAL, for a main frame 40, reads.
See also Fig. 3, the schematic diagram of the measuring equipment of its ATE (automatic test equipment) that is the first embodiment of the present invention.As shown in the figure, analog-digital converter 10 of the present invention can connect the pin parameter measurement unit PPMU of any amount simultaneously.Control module 20 is connected in the plurality of pin parameter and measures unit PPMU, and output selects signal SS to selected pin parameter measurement unit PPMU, with measuring corresponding pin to be measured (PIN1, PIN2 so that selected pin parameter measures unit PPMU ... one of PINn-1, PINn) and produce to measure signal MS, and transmit measure signal MS to analog-digital converter 10 to change.
64 test channel of take are example, an analog-digital converter is responsible for the measurement of 16 test channel, first analog-digital converter is responsible for test channel CH1-CH16, second analog-digital converter is responsible for test channel CH17-CH32, the 3rd analog-digital converter is responsible for test channel CH33-CH48, the 4th analog-digital converter is responsible for test channel CH49-CH64, and control module corresponding to first analog-digital converter is set as measuring test channel CH1, 3, 5, second control module corresponding to analog-digital converter is set as measuring test channel CH19, 25, 27, the 3rd control module that analog-digital converter is corresponding is set as measuring test channel CH35, 40, 44, the 4th control module that analog-digital converter is corresponding is set as measuring test channel CH49, 52, 64 o'clock, in the first measurement time, first analog-digital converter measures test channel CH1, second analog-digital converter measures test channel CH19, the 3rd analog-digital converter measures test channel CH35, the 4th analog-digital converter measures test channel CH49, and second, three measurement times by that analogy.
From the above, above-mentioned framework can measure 4 test channel simultaneously, the speed measuring to increase ATE (automatic test equipment).Yet the present invention is not limited to above-mentioned test channel quantity or analog-digital converter quantity.For example, a plurality of test channel can be responsible for measuring by 1 to n analog-digital converter, the sum that n is the plurality of test channel.
See also Fig. 4, its calcspar that is control module of the present invention.As shown in the figure, control module 20 comprises a lookup unit 21, selection control module 23, a correction memory circuit 25 and a correcting circuit 27.Lookup unit 21 stores a plurality of selection parameter S P, and the plurality of selection parameter S P measures unit PPMU corresponding to the plurality of pin parameter.Select control module 23 to be electrically connected at lookup unit 21, and produce a selection signal SS according to the plurality of selection parameter S P, select signal SS in order to select the plurality of pin parameter to measure one of unit PPMU, and make selected pin parameter measure pin to be measured (PIN1, PIN2 that unit PPMU measures correspondence ... one of PINn-1, PINn), and this selects signal SS to can be considered an enable signal, in order to the selected pin parameter of activation, measure unit PPMU.
Correction memory circuit 25 is electrically connected at lookup unit 21, and in order to store a plurality of gain parameter Gain and a plurality of compensating parameter Offset, the plurality of gain parameter Gain the plurality of selection parameter S P corresponding to the plurality of compensating parameter Offset, that is to say, each test channel comprises a plurality of measuring ranges, and each measuring range all has a gain parameter Gain and a compensating parameter Offse, wherein the quantity of measuring range is decided by that pin parameter measures the specification of unit PPMU.
Lookup unit 21 produces a reading address R_add according to a read-write signal RWD of main frame 40 outputs, the selected pin parameter of reading address R_add corresponding selection signal SS measures unit PPMU, and correction memory circuit 25 measures gain parameter Gain and the compensating parameter Offset of unit PPMU according to the corresponding selected pin parameter of reading address R_add output.Correcting circuit 27 is electrically connected at correction memory circuit 25 and analog-digital converter 10, and correcting circuit 27 uses the gain parameter Gain of correction memory circuit 25 outputs and compensating parameter Offset to proofread and correct the value of reading signal VAL, and the actual value of the reading signal VAL ' after output calibration is to main frame 40.
For example, when lookup unit 21 stores corresponding test channel CH1, when the plurality of pin parameter of CH10 and CH16 measures the selection parameter S P of unit PPMU, select control module 23 sequentially to transmit corresponding test channel CH1 according to the plurality of selection parameter S P, the plurality of pin parameter of CH10 and CH16 measures the selection signal SS of unit PPMU, make the plurality of pin parameter measure unit PPMU and sequentially measure respectively pin PIN1 to be measured, PIN10 and PIN16, when the measurement unit of test channel CH1 PPMU measures pin PIN1 to be measured and produces the value of reading signal VAL, correction memory circuit 25 is exported the gain parameter Gain of corresponding test channel CH1 and compensating parameter Offset to correcting circuit 27 according to reading address R_add now, make correcting circuit 27 use this gain parameter Gain and compensating parameter Offset to proofread and correct the value of reading signal VAL now, then sequentially carry out the measurement of test channel CH10 and CH16, measurement mode is listed as and pushes away with this, repeat no more.
In addition, in this embodiment, control module 20 more comprises a storage element 29, for receiving and store the actual value of the reading signal VAL ' after correction, for main frame 40, reads.
In addition, if need to store gain parameter Gain and compensating parameter Offset in correction memory circuit 25 time before measuring, correction memory circuit 25 is judged as storing state according to read-write signal RWD, so the gain parameter Gain that correction memory circuit 25 carrys out now main frame 40 transmission according to a storage address S_add is stored to corresponding address with compensating parameter Offset.Wherein, storing address S_add is produced by main frame 40.For example, the read-write signal RWD that transmits storing states when main frame 40 is to lookup unit 21 and correction memory circuit 25, and main frame 40 also sequentially transmits corresponding test channel CH1, the storage address S_add of CH10 and CH16 is during to correction memory circuit 25, correction memory circuit 25 transfers storing state to according to the read-write signal RWD of corresponding storing state, and when the storage address of corresponding test channel CH1 S_add is sent to correction memory circuit 25, correction memory circuit 25 is stored to the gain parameter Gain that now main frame 40 sends and compensating parameter Offset the storage address S_add of corresponding test channel CH1, then sequentially carry out the storage work of test channel CH10 and CH16, all the other are listed as and push away with this, repeat no more.
See also Fig. 5, its circuit diagram that is correcting circuit of the present invention.As shown in the figure, correcting circuit 27 comprises a multiplier 271 and a totalizer 273.Multiplier 271 is electrically connected at analog-digital converter 10 and correction memory circuit 25, receiving gain parameter Gain and the value of reading signal VAL, and gain parameter Gain and the value of reading signal VAL are carried out exporting after multiplying.Totalizer 273 is electrically connected at the output terminal of multiplier 271, receives the value of the reading signal VAL after compensating parameter Offset and multiplying, and carries out producing the actual value of reading signal VAL ' after additive operation.
See also Fig. 6, it is the calcspar of correction memory circuit of the present invention.As shown in the figure, correction memory circuit 25 comprises one first flip-flop 251, a selector switch 252, one second flip-flop 253, a gain mnemon 254, compensation mnemon 255, one the 3rd flip-flop 256 and one the 4th flip-flop 257.The first flip-flop 251 is electrically connected at lookup unit 21, and obtains reading address R_add and output according to read-write signal RWD.Selector switch 252 can be a multiplexer, and it is electrically connected at the first flip-flop 251, and learns to be now write mode or read mode according to read-write signal RWD, and selects an output of a storage address S_add or reading address R_add.The second flip-flop 253 is electrically connected at selector switch 252, obtains storage address S_add or reading address R_add the output of selector switch 252 outputs.
Gain mnemon 254 is electrically connected at the second flip-flop 253, in order to store or to read the plurality of gain parameter Gain, that is to say, gain mnemon 254 is according to received storage address S_add, the gain parameter Gain of main frame 40 outputs is stored to the address of the corresponding address S_add of storage in gain mnemon 254, or according to received reading address R_add, output is stored in the gain parameter Gain of the address of corresponding reading address R_add in gain mnemon 254.Compensation mnemon 255 is electrically connected at the second flip-flop 253, in order to store or to read the plurality of compensating parameter Offset, that is to say, compensation mnemon 255 is according to received storage address S_add, the compensating parameter Offset of main frame 40 outputs is stored to the address of the corresponding address S_add of storage in compensation mnemon 255, or according to received reading address R_add, output is stored in the compensating parameter Offset of the address of corresponding reading address R_add in compensation mnemon 255.
The 3rd flip-flop 256 is electrically connected at gain mnemon 254, and exports received gain parameter Gain to multiplier 271 according to read-write signal RWD.The 4th flip-flop 257 is electrically connected at compensation mnemon 255, and exports received compensating parameter Offset to totalizer 273 according to read-write signal RWD.Wherein, read-write signal RWD can be produced by lookup unit 21 or main frame 40.
Refer to Fig. 7, the schematic diagram of the measuring equipment of its ATE (automatic test equipment) that is the second embodiment of the present invention.The difference of the present embodiment and the first embodiment is, the plurality of pin parameter of the present embodiment measures unit PPMU and sees through a selected cell 60 and be connected to analog-digital converter 10, and all the other repeat no more, described in it is described in detail as follows.
As shown in the figure, the plurality of pin parameter measures a plurality of input ends that unit PPMU is electrically connected at respectively selected cell 60, one output terminal of selected cell 60 is electrically connected analog-digital converter 10, one control end of selected cell 60 is electrically connected control module 20, and select the plurality of pin parameter to measure one of unit PPMU in order to the selection signal SS according to control module 20 outputs, with output, measure signal MS to analog-digital converter 10, that is to say, control module 20 sends selects signal SS to selected cell 60, to control selected cell 60, sequentially select the plurality of pin parameter to measure the pin (PIN1 to be measured that unit PPMU measures correspondence, PIN2 ... PINn-1, one of PINn), sequentially select pin PIN1 to be measured, pin PIN2 to be measured ... pin PINn-1 to be measured and pin PINn to be measured, sequentially to transmit measurement signal MS, to analog-digital converter 10, change.Wherein, the selected cell 60 of the present embodiment can be a multiplexer.
See also Fig. 8, the process flow diagram of its method for measurement that is ATE (automatic test equipment) of the present invention.The method for measurement of ATE (automatic test equipment) of the present invention is applied to a measurement circuit, and measurement circuit is connected in the plurality of pin parameter and measures unit PPMU, and measurement circuit comprises analog-digital converter 10 and control module 20.First method for measurement of the present invention performs step S10, stores a plurality of gain parameter Gain and a plurality of compensating parameter Offset in correction memory circuit 25, the plurality of gain parameter Gain and the plurality of compensating parameter Offset.Then, execution step S20, stores a plurality of selection parameter S P in lookup unit 21, and the corresponding the plurality of pin parameter of the plurality of selection parameter S P measures unit PPMU, selects control module 12 sequentially to produce a plurality of selection signal SS according to the plurality of selection parameter S P.
Then perform step S30, according to the plurality of selection signal SS, sequentially select the plurality of pin parameter to measure unit PPMU.Then perform step S40, order about selected pin parameter and measure the pin (PIN1 to be measured that unit PPMU measures correspondence ... one of PINn), to produce corresponding measurement signal MS.Then perform step S50, the measurement signal MS that analog-digital converter 10 measures unit PPMU output by selected pin parameter is converted to the value of reading signal VAL.
Then perform step S60, according to read-write signal RWD, lookup unit 21 produces reading address R_add, the corresponding selected pin parameter of reading address R_add measures unit PPMU, and correction memory circuit 25 measures gain parameter Gain and the compensating parameter Offset of unit PPMU according to the corresponding selected pin parameter of reading address R_add output.Then perform step S70, correcting circuit 27 uses selected gain parameter Gain and compensating parameter Offset to proofread and correct the value of the reading signal VAL producing through step S50, to produce the actual value of reading signal VAL ', for main frame 40, reads.
Wherein, in step S70, correcting circuit 27 first carries out the value of reading signal VAL after multiplying with selected gain parameter Gain, then carries out additive operation with selected compensating parameter Offset, to produce the actual value of reading signal VAL '.In addition, in step S70, more the read-write signal RWD according to main frame 40 outputs obtains and exports reading address R_add to selector switch 252, and according to read-write signal RWD, order about selector switch 252 and select to store address S_add or reading address R_add output, then obtain and store address S_add or reading address R_add and export correction memory circuit 25 to, make correction memory circuit 25 write gain parameter Gain according to storing address S_add, compensating parameter Offset, or order about the selected gain parameter Gain of correction memory circuit 25 output according to reading address R_add, compensating parameter Offset.
See also Fig. 9, the constitutional diagram of its method for measurement that is ATE (automatic test equipment) of the present invention.This constitutional diagram represents the state of control module 20, and as shown in the figure, before measuring, control module 20, in idle state ST10, when control module 20 receives the trigger signals that main frame 40 sends, is converted to inspection state ST20.When the state of inspection ST20, control module 20 checks the plurality of test channel CH1-CHn according to lookup unit 21, and determines it is now which test channel CH1-CHn will be measured, and is converted to set condition ST30 after having checked.
When set condition ST30, control module 20 transmits selects signal SS to the corresponding pin parameter measurement of the test channel (one of CH1-CHn) that now will be measured unit PPMU, or the selection signal SS that transmits the corresponding test channel (one of CH1-CHn) that now will be measured is to selected cell 60, make analog-digital converter 10 connect correct pin parameter and measure unit PPMU, after having set, be converted to steady state (SS) ST40.Steady state (SS) ST40 is used for postponing a period of time, the setting of being carried out to be stable at set condition ST30.
Then, be converted to reading state ST50, when this state, control module 20 transmits a reading signal to analog-digital converter 10, makes analog-digital converter 10 start to read the value that measures signal MS, and be converted to the value of reading signal VAL, after having read, be converted to correcting state ST60.When correcting state ST60, control module 20 is proofreaied and correct rear output by gain parameter Gain, compensating parameter Offset to the value of reading signal VAL, after correction finishes, is converted to judgement state ST70.When judgement state ST70, control module 20 can judge whether to have completed the measurement of all test channel CH1-CHn, if complete, convert back idle state ST10, if do not complete, be converted to inspection state ST20, control module 20 continues to check the plurality of test channel CH1-CHn, with the test channel (one of CH1-CHn) that determines that now requirement is surveyed.
In sum, the measuring equipment of ATE (automatic test equipment) of the present invention and method, by the output terminal that measures unit in a plurality of pin parameters, connect an analog-digital converter, the plurality of pin parameter is measured to the measurement signal of unit output, be converted to the value of reading signal, and sequentially select the plurality of pin parameter that requirement is surveyed to measure one of unit by a control module, to reach the object that measures fast and accurately a plurality of pins to be measured.
It is only above preferred embodiment of the present invention, not be used for limiting scope of the invention process, all equalizations of doing according to the shape described in the claims in the present invention scope, structure, feature and spirit change and modify, and all should be included within the scope of claim of the present invention.

Claims (10)

1. a measuring equipment for ATE (automatic test equipment), is characterized in that, it comprises:
A plurality of pin parameters measure unit, and each pin parameter measures unit in order to measure a pin to be measured, to produce a measurement signal;
One analog-digital converter, in order to be converted to the value of a reading signal by this measurement signal; And
One control module, is electrically connected at this analog-digital converter, in order to select the plurality of pin parameter to measure one of unit, and controls this analog-digital converter conversion and receives this value of reading signal.
2. the measuring equipment as described in claim 1, is characterized in that, more comprises:
One multiplexer, there is a control end, an output terminal and a plurality of input end, this control end is electrically connected this control module, this output terminal is electrically connected this analog-digital converter, the plurality of input end is electrically connected at respectively the plurality of pin parameter and measures unit, and be controlled by this control module and select the plurality of pin parameter to measure one of unit, to export this measurement signal to this analog-digital converter.
3. the measuring equipment as described in claim 1, is characterized in that, wherein this control module comprises:
One lookup unit, in order to store a plurality of selection parameters, the corresponding the plurality of pin parameter of the plurality of selection parameter measures unit;
One selects control module, is electrically connected at this lookup unit, in order to select signal in order to select the plurality of pin parameter to measure one of unit according to the plurality of selection parameter generating one;
One correction memory circuit, be electrically connected at this lookup unit, in order to store a plurality of gain parameters and a plurality of compensating parameter, the plurality of gain parameter the plurality of selection parameter corresponding to the plurality of compensating parameter, this lookup unit produces a reading address according to a read-write signal, corresponding selected this pin parameter of this reading address measures unit, and this correction memory circuit is exported this gain parameter and this compensating parameter according to this reading address; And
One correcting circuit, is electrically connected at this correction memory circuit and this analog-digital converter, and uses this gain parameter and this compensating parameter of this correction memory circuit output to proofread and correct this value of reading signal.
4. the measuring equipment as described in claim 3, is characterized in that, wherein this correcting circuit comprises:
One multiplier, is electrically connected at this analog-digital converter and this correction memory circuit, in order to this gain parameter and this value of reading signal are carried out to multiplying; And
One totalizer, is electrically connected at this multiplier, in order to the output of this multiplier and this compensating parameter are carried out to additive operation.
5. the measuring equipment as described in claim 4, is characterized in that, wherein this correction memory circuit more comprises:
One first flip-flop, is electrically connected at this lookup unit, in order to obtain and to export this reading address according to this read-write signal;
One selector switch, is electrically connected at this first flip-flop, in order to select one to store address or the output of this reading address according to this read-write signal;
One second flip-flop, be electrically connected at this selector switch, in order to obtain this storage address or this reading address of this selector switch output, and export this storage address or this reading address to one gain mnemon and a compensation mnemon, to write or to read this gain parameter or this compensating parameter;
One the 3rd flip-flop, is electrically connected at this gain mnemon, in order to export this corresponding gain parameter to this multiplier according to this read-write signal; And
One the 4th flip-flop, is electrically connected at this compensation mnemon, in order to export this corresponding compensating parameter to this totalizer according to this read-write signal.
6. the measuring equipment as described in claim 4, is characterized in that, wherein this control module more comprises:
One storage element, in order to store this value of the reading signal after this multiplier and this totalizer are proofreaied and correct, reads for a main frame.
7. a method for measurement for ATE (automatic test equipment), is characterized in that, this method for measurement is applied to a measurement circuit, and a plurality of pin parameters that this measurement circuit is electrically connected this ATE (automatic test equipment) measure unit, and the step of this method for measurement comprises:
According to one, select signal to select the plurality of pin parameter to measure one of unit;
Order about selected this pin parameter and measure a pin to be measured corresponding to unit measuring, to produce a measurement signal; And
This measurement signal that selected this pin parameter is measured to unit output is converted to the value of a reading signal.
8. the method for measurement as described in claim 7, is characterized in that, wherein more comprises:
Store a plurality of selection parameters in a lookup unit, the corresponding the plurality of pin parameter of the plurality of selection parameter measures unit, so that according to the plurality of selection parameter generating, this selects signal;
Store a plurality of gain parameters and a plurality of compensating parameter in a correction memory circuit, the plurality of gain parameter the plurality of selection parameter corresponding to the plurality of compensating parameter;
According to a read-write signal, this lookup unit produces a reading address, and corresponding selected this pin parameter of this reading address measures unit, and this correction memory circuit is exported this gain parameter and this compensating parameter according to this reading address; And
Use selected this gain parameter and this compensating parameter to proofread and correct this value of reading signal.
9. the method for measurement as described in claim 8, is characterized in that, wherein, in using selected this gain parameter and this compensating parameter to proofread and correct in the step of this value of reading signal, comprises:
This gain parameter and this value of reading signal are carried out to multiplying; And
This compensating parameter and this value of the reading signal carrying out after multiplying are carried out to additive operation.
10. the method for measurement as described in claim 8, is characterized in that, wherein, in using selected this gain parameter and this compensating parameter to proofread and correct in the step of this value of reading signal, comprises:
According to this read-write signal, obtain and export this reading address to one selector switch;
According to this read-write signal, ordering about this selector switch selects one to store address or the output of this reading address; And
Obtain this storage address or this reading address of this selector switch output, and export this storage address or this reading address to this correction memory circuit, in order to write this gain parameter and this compensating parameter according to this storage address, in this correction memory circuit or according to reading address, order about this correction memory circuit selected this gain parameter of output and this compensating parameter.
CN201310122280.9A 2013-04-03 2013-04-03 The measuring equipment and method of ATE Active CN104101789B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201310122280.9A CN104101789B (en) 2013-04-03 2013-04-03 The measuring equipment and method of ATE

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201310122280.9A CN104101789B (en) 2013-04-03 2013-04-03 The measuring equipment and method of ATE

Publications (2)

Publication Number Publication Date
CN104101789A true CN104101789A (en) 2014-10-15
CN104101789B CN104101789B (en) 2017-04-05

Family

ID=51670104

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201310122280.9A Active CN104101789B (en) 2013-04-03 2013-04-03 The measuring equipment and method of ATE

Country Status (1)

Country Link
CN (1) CN104101789B (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107003336A (en) * 2014-12-19 2017-08-01 泰拉丁公司 Control is per pin measuring unit
CN109212307A (en) * 2017-06-30 2019-01-15 致茂电子(苏州)有限公司 Measuring signal device and measuring signal method
CN116299125A (en) * 2023-03-31 2023-06-23 深圳市辰卓科技有限公司 Parameter calibration method, device and system of ATE equipment

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN85108326A (en) * 1984-11-20 1986-12-03 得克萨斯仪器公司 The very lagre scale integrated circuit (VLSIC) that self-testing capability is arranged
JPH1014083A (en) * 1996-06-25 1998-01-16 Meidensha Corp Analog monitoring and automatic adjustment system for digital relay
WO1999062267A1 (en) * 1998-05-27 1999-12-02 Advanced Testing Technologies, Inc. Automatic test instrument for multi-format video generation and capture
US20020140817A1 (en) * 1998-05-27 2002-10-03 William Biagiotti Video generation and capture techniques
CN101529262A (en) * 2005-05-19 2009-09-09 奈克斯测试系统公司 System for testing smart cards and method for same

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN85108326A (en) * 1984-11-20 1986-12-03 得克萨斯仪器公司 The very lagre scale integrated circuit (VLSIC) that self-testing capability is arranged
JPH1014083A (en) * 1996-06-25 1998-01-16 Meidensha Corp Analog monitoring and automatic adjustment system for digital relay
WO1999062267A1 (en) * 1998-05-27 1999-12-02 Advanced Testing Technologies, Inc. Automatic test instrument for multi-format video generation and capture
US20020140817A1 (en) * 1998-05-27 2002-10-03 William Biagiotti Video generation and capture techniques
CN101529262A (en) * 2005-05-19 2009-09-09 奈克斯测试系统公司 System for testing smart cards and method for same

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
张运春 等: "基于单片机的半导体激光器应用控制技术", 《红外与激光工程》 *

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107003336A (en) * 2014-12-19 2017-08-01 泰拉丁公司 Control is per pin measuring unit
CN107003336B (en) * 2014-12-19 2021-09-07 泰拉丁公司 Controlling a per-pin measurement unit
CN109212307A (en) * 2017-06-30 2019-01-15 致茂电子(苏州)有限公司 Measuring signal device and measuring signal method
CN109212307B (en) * 2017-06-30 2020-12-18 致茂电子(苏州)有限公司 Signal measurement device and signal measurement method
CN116299125A (en) * 2023-03-31 2023-06-23 深圳市辰卓科技有限公司 Parameter calibration method, device and system of ATE equipment
CN116299125B (en) * 2023-03-31 2024-04-05 深圳市辰卓科技有限公司 Parameter calibration method, device and system of ATE equipment

Also Published As

Publication number Publication date
CN104101789B (en) 2017-04-05

Similar Documents

Publication Publication Date Title
KR100432965B1 (en) Method and apparatus for testing semiconductor devices
JP3453133B2 (en) Timing calibration method for IC test apparatus and IC test apparatus having calibration function using the calibration method
US8384408B2 (en) Test module with blocks of universal and specific resources
CN107228719B (en) Temperature calibration method, module to be tested and temperature calibration device
US7852099B1 (en) Frequency trimming for internal oscillator for test-time reduction
US7782064B2 (en) Test apparatus and test module
CN110785669B (en) Processor-based measurement method for testing a device under test and measurement apparatus using the same
CN110031811B (en) Multichannel broadband signal coherent characteristic rapid calibration system
JP2001356153A (en) Semiconductor device testing method and semiconductor device testing device
US5854598A (en) Method of testing an analog-to-digital converter
CN107783069A (en) The on-line calibration system and method for DC measurement in integrated circuit test system
CN104101789A (en) Measurement apparatus and method of automatic test equipment
JP4394789B2 (en) Semiconductor device testing method and semiconductor device testing equipment
CN112086212A (en) Reactivity instrument offline calibration test method and system
US6253360B1 (en) Timing generator
JP2539897B2 (en) Leakage current test equipment
US7680615B2 (en) Parallel testing system with shared golden calibration table and method thereof
CN112649719A (en) Method, device and equipment for testing linear voltage stabilizer in chip
KR20150053598A (en) Apparatus and method for test of watt-hour meter
CN112152623B (en) System and method for testing analog-to-digital converter
CN115144806A (en) Calibration method, device, equipment and system for calibration source
Zhihong et al. Self-calibrate two-step digital setup/hold time measurement
CN213637693U (en) Clock self-testing FPGA
TWI490516B (en) Measuring device and method for automatic test equipment
US8008935B1 (en) Tester and a method for testing an integrated circuit

Legal Events

Date Code Title Description
C06 Publication
PB01 Publication
C10 Entry into substantive examination
SE01 Entry into force of request for substantive examination
GR01 Patent grant
GR01 Patent grant