CN104089966B - 分析样品的方法、用于分析样品的带电粒子束装置和计算机可读介质 - Google Patents
分析样品的方法、用于分析样品的带电粒子束装置和计算机可读介质 Download PDFInfo
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- CN104089966B CN104089966B CN201410017457.3A CN201410017457A CN104089966B CN 104089966 B CN104089966 B CN 104089966B CN 201410017457 A CN201410017457 A CN 201410017457A CN 104089966 B CN104089966 B CN 104089966B
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- 239000002245 particle Substances 0.000 title claims abstract description 185
- 238000000034 method Methods 0.000 title claims abstract description 38
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- 230000005855 radiation Effects 0.000 claims abstract description 26
- 238000004458 analytical method Methods 0.000 claims abstract description 18
- 238000005136 cathodoluminescence Methods 0.000 claims abstract description 12
- 238000010894 electron beam technology Methods 0.000 claims description 22
- 238000001514 detection method Methods 0.000 claims description 10
- 230000005670 electromagnetic radiation Effects 0.000 claims description 8
- 238000010884 ion-beam technique Methods 0.000 claims description 7
- 238000007689 inspection Methods 0.000 claims description 4
- 230000005611 electricity Effects 0.000 claims description 2
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- RAHZWNYVWXNFOC-UHFFFAOYSA-N Sulphur dioxide Chemical compound O=S=O RAHZWNYVWXNFOC-UHFFFAOYSA-N 0.000 description 2
- 238000002485 combustion reaction Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 239000004744 fabric Substances 0.000 description 2
- 239000007789 gas Substances 0.000 description 2
- IPCSVZSSVZVIGE-UHFFFAOYSA-N hexadecanoic acid Chemical compound CCCCCCCCCCCCCCCC(O)=O IPCSVZSSVZVIGE-UHFFFAOYSA-N 0.000 description 2
- 238000005191 phase separation Methods 0.000 description 2
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- TVEXGJYMHHTVKP-UHFFFAOYSA-N 6-oxabicyclo[3.2.1]oct-3-en-7-one Chemical compound C1C2C(=O)OC1C=CC2 TVEXGJYMHHTVKP-UHFFFAOYSA-N 0.000 description 1
- 241000208340 Araliaceae Species 0.000 description 1
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- BVKZGUZCCUSVTD-UHFFFAOYSA-L Carbonate Chemical compound [O-]C([O-])=O BVKZGUZCCUSVTD-UHFFFAOYSA-L 0.000 description 1
- 241000196324 Embryophyta Species 0.000 description 1
- 208000035126 Facies Diseases 0.000 description 1
- BPQQTUXANYXVAA-UHFFFAOYSA-N Orthosilicate Chemical compound [O-][Si]([O-])([O-])[O-] BPQQTUXANYXVAA-UHFFFAOYSA-N 0.000 description 1
- 235000021314 Palmitic acid Nutrition 0.000 description 1
- 235000005035 Panax pseudoginseng ssp. pseudoginseng Nutrition 0.000 description 1
- 235000003140 Panax quinquefolius Nutrition 0.000 description 1
- UCKMPCXJQFINFW-UHFFFAOYSA-N Sulphide Chemical compound [S-2] UCKMPCXJQFINFW-UHFFFAOYSA-N 0.000 description 1
- 238000003916 acid precipitation Methods 0.000 description 1
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- 229910001423 beryllium ion Inorganic materials 0.000 description 1
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- WQEPLUUGTLDZJY-UHFFFAOYSA-N n-Pentadecanoic acid Natural products CCCCCCCCCCCCCCC(O)=O WQEPLUUGTLDZJY-UHFFFAOYSA-N 0.000 description 1
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Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
- G01N23/22—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
- G01N23/225—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material using electron or ion
- G01N23/2251—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material using electron or ion using incident electron beams, e.g. scanning electron microscopy [SEM]
- G01N23/2254—Measuring cathodoluminescence
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/26—Electron or ion microscopes
- H01J2237/28—Scanning microscopes
- H01J2237/2803—Scanning microscopes characterised by the imaging method
- H01J2237/2804—Scattered primary beam
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/26—Electron or ion microscopes
- H01J2237/28—Scanning microscopes
- H01J2237/2803—Scanning microscopes characterised by the imaging method
- H01J2237/2806—Secondary charged particle
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/26—Electron or ion microscopes
- H01J2237/28—Scanning microscopes
- H01J2237/2803—Scanning microscopes characterised by the imaging method
- H01J2237/2808—Cathodoluminescence
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/26—Electron or ion microscopes
- H01J2237/28—Scanning microscopes
- H01J2237/2809—Scanning microscopes characterised by the imaging problems involved
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| EP13151344.2A EP2755021B1 (en) | 2013-01-15 | 2013-01-15 | Method of analyzing a sample and charged particle beam device for analyzing a sample |
| EP13151344.2 | 2013-01-15 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN104089966A CN104089966A (zh) | 2014-10-08 |
| CN104089966B true CN104089966B (zh) | 2018-07-27 |
Family
ID=47563221
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201410017457.3A Active CN104089966B (zh) | 2013-01-15 | 2014-01-15 | 分析样品的方法、用于分析样品的带电粒子束装置和计算机可读介质 |
Country Status (4)
| Country | Link |
|---|---|
| US (1) | US9159532B2 (enExample) |
| EP (1) | EP2755021B1 (enExample) |
| CN (1) | CN104089966B (enExample) |
| IN (1) | IN2014DE00065A (enExample) |
Families Citing this family (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US9190241B2 (en) * | 2013-03-25 | 2015-11-17 | Hermes-Microvision, Inc. | Charged particle beam apparatus |
| JP6689602B2 (ja) * | 2014-12-22 | 2020-04-28 | カール ツァイス マイクロスコーピー エルエルシー | 荷電粒子ビームシステム及び方法 |
| US10236156B2 (en) | 2015-03-25 | 2019-03-19 | Hermes Microvision Inc. | Apparatus of plural charged-particle beams |
| US11444213B2 (en) * | 2017-06-05 | 2022-09-13 | Fondazione Bruno Kessler | Radiation detector and radiation detection apparatus |
| CN107727677A (zh) * | 2017-09-22 | 2018-02-23 | 中国科学院地质与地球物理研究所 | 独居石的阴极发光成像方法 |
| US11342155B2 (en) * | 2018-05-22 | 2022-05-24 | Hitachi High-Tech Corporation | Charged particle beam device and method for adjusting position of detector of charged particle beam device |
| CN110376229B (zh) * | 2019-06-12 | 2020-09-04 | 聚束科技（北京）有限公司 | 具备复合式探测系统的扫描电子显微镜和样品探测方法 |
| DE102019208661A1 (de) * | 2019-06-13 | 2020-12-17 | Carl Zeiss Microscopy Gmbh | Verfahren zum Betrieb eines Teilchenstrahlgeräts und Teilchenstrahlgerät zum Ausführen des Verfahrens |
| US11114274B2 (en) * | 2019-12-23 | 2021-09-07 | Carl Zeiss Smt Gmbh | Method and system for testing an integrated circuit |
| US11257657B2 (en) * | 2020-02-18 | 2022-02-22 | ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH | Charged particle beam device with interferometer for height measurement |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1411047A (zh) * | 2001-09-27 | 2003-04-16 | 株式会社东芝 | 微细图形检查装置和方法、cd－sem的管理装置和方法 |
| CN1720445A (zh) * | 2002-10-08 | 2006-01-11 | 应用材料以色列公司 | 使用x－射线发射以用于制程监控的系统及方法 |
| CN1776413A (zh) * | 2004-10-14 | 2006-05-24 | 株式会社荏原制作所 | 信息记录介质检查装置和方法 |
| CN1820346A (zh) * | 2003-05-09 | 2006-08-16 | 株式会社荏原制作所 | 基于带电粒子束的检查装置及采用了该检查装置的器件制造方法 |
| CN1822305A (zh) * | 2005-02-18 | 2006-08-23 | 株式会社日立科学系统 | 扫描电子显微镜 |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP2388796A1 (en) * | 2010-05-21 | 2011-11-23 | FEI Company | Simultaneous electron detection |
| WO2012118866A2 (en) | 2011-02-28 | 2012-09-07 | Schlumberger Technology Corporation | Methods to build 3d digital models of porous media using a combination of high- and low-resolution data and multi-point statistics |
| WO2012174173A2 (en) * | 2011-06-13 | 2012-12-20 | President And Fellows Of Harvard College | Multi-color nanoscale imaging based on nanoparticle cathodoluminescence |
| DE102012217761B4 (de) * | 2012-09-28 | 2020-02-06 | Carl Zeiss Microscopy Gmbh | Verfahren zur Vermeidung von Artefakten beim Serial Block Face Imaging |
-
2013
- 2013-01-15 EP EP13151344.2A patent/EP2755021B1/en active Active
-
2014
- 2014-01-08 US US14/150,012 patent/US9159532B2/en active Active
- 2014-01-09 IN IN65DE2014 patent/IN2014DE00065A/en unknown
- 2014-01-15 CN CN201410017457.3A patent/CN104089966B/zh active Active
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1411047A (zh) * | 2001-09-27 | 2003-04-16 | 株式会社东芝 | 微细图形检查装置和方法、cd－sem的管理装置和方法 |
| CN1720445A (zh) * | 2002-10-08 | 2006-01-11 | 应用材料以色列公司 | 使用x－射线发射以用于制程监控的系统及方法 |
| CN1820346A (zh) * | 2003-05-09 | 2006-08-16 | 株式会社荏原制作所 | 基于带电粒子束的检查装置及采用了该检查装置的器件制造方法 |
| CN1776413A (zh) * | 2004-10-14 | 2006-05-24 | 株式会社荏原制作所 | 信息记录介质检查装置和方法 |
| CN1822305A (zh) * | 2005-02-18 | 2006-08-23 | 株式会社日立科学系统 | 扫描电子显微镜 |
Non-Patent Citations (1)
| Title |
|---|
| quantitative cathodoluminescence mapping with application to a Kalgoorlie Scheelite;MACRAE C M ET AL.;《MICROSCOPY AND MICROANALYSIS》;20090522;第15卷(第3期);第222-230页 * |
Also Published As
| Publication number | Publication date |
|---|---|
| CN104089966A (zh) | 2014-10-08 |
| US20140197310A1 (en) | 2014-07-17 |
| IN2014DE00065A (enExample) | 2015-06-19 |
| EP2755021A1 (en) | 2014-07-16 |
| EP2755021B1 (en) | 2016-06-22 |
| US9159532B2 (en) | 2015-10-13 |
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| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
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| GR01 | Patent grant | ||
| GR01 | Patent grant |